Gravity compensation mechanism for micro-positioning stage

Abstract

The gravity compensation mechanism of the micro-motion platform provided by the present invention includes a first magnetic element and a second magnetic element. The first magnetic element and the second magnetic element are respectively disposed on a fixed part and a movable part of the micro-motion platform. The base plane defined by the first magnetic element and the second magnetic element from their respective side surfaces is separated from the Z-axis parallel to the direction of gravity along which the movable part moves by an angle greater than or equal to 1 degree and less than 90 degrees. Thus, the magnetic field interaction between the first magnetic element and the second magnetic element can provide a force to the movable part to counteract the aforementioned gravity and / or the force exerted on the movable part by the elastic element.

Claims

1. A gravity compensation mechanism for a micro-motion platform, comprising: a fixed part; a movable part movably disposed on the fixed part and reciprocating between an initial position and a movable position along a Z-axis parallel to the direction of gravity; a spring force providing mechanism bridging the movable part and the fixed part, providing a positively rigid spring force to the movable part when it moves out of the initial position; the gravity compensation mechanism includes a first magnet fixed on the fixed part and a second magnet fixed on the movable part, wherein when the movable part is in the initial position, the first magnet and the second magnet are spaced apart by an initial distance, wherein... The first magnetic component and the second magnetic component have a measurable magnetic field interaction with each other, and one of the base surfaces of the first magnetic component and / or the second magnetic component is tilted at an angle greater than or equal to 1 degree and less than 90 degrees from the Z-axis; the magnetic moment direction of the first magnetic component is the same as the magnetic moment direction of the second magnetic component; the base surface of the first magnetic component and the second magnetic component is either an N-end surface or an S-end surface.

2. The gravity compensation mechanism of the micro-motion platform as described in claim 1, wherein, The tilt angle is greater than or equal to 1 degree and less than or equal to 30 degrees.

3. The gravity compensation mechanism of the micro-motion platform as described in claim 1, wherein, The active part further includes a moving base, a platform protruding from one side of the moving base, and the second magnet is attached and fixed to one of the inclined surfaces of the platform.

4. The gravity compensation mechanism of the micro-motion platform as described in claim 1, wherein, When the movable part is in the moving position, the second magnet and the first magnet are separated by a moving gap, and the moving gap is smaller than the initial gap.

5. The gravity compensation mechanism of the micro-motion platform as described in claim 1, wherein, The gravity compensation mechanism further includes a third magnetic element fixed on the fixed part. The magnetic moment direction of the third magnetic element is opposite to that of the magnetic moment direction of the second magnetic element, and one of the base surfaces of the third magnetic element is separated from the Z-axis by the tilt angle. At least when the movable part is in the moving position, there is a measurable magnetic field interaction between the third magnetic element and the second magnetic element.

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