A shaft structure and an aluminum nitride heater

Abstract

This invention discloses a shaft structure and an aluminum nitride heater, belonging to the technical field of aluminum nitride heaters. The shaft structure includes an aluminum nitride ceramic segment, an aluminum nitride and alumina transition segment, and an alumina ceramic segment, which are sequentially connected from top to bottom. The aluminum nitride heater includes an aluminum nitride heating plate connected to the aluminum nitride ceramic segment. This technical solution not only ensures that the shaft structure and the aluminum nitride heating plate are made of the same or similar materials at the joint, resulting in essentially the same coefficient of thermal expansion, but also allows for a transition to alumina via the transition layer. Utilizing the lower thermal conductivity of alumina compared to aluminum nitride, this reduces heat loss from the aluminum nitride heating plate through the shaft structure.

Description

[Technical Field]

[0001] This invention relates to the field of aluminum nitride heater technology, and particularly to a shaft structure and an aluminum nitride heater. [Previous Technology]

[0002] The aluminum nitride heater consists of a ceramic disc and a ceramic shaft, both of which are made of aluminum nitride. Aluminum nitride heaters are used in high-temperature conditions and require high temperature uniformity of the ceramic disc during use. However, due to the heat dissipation of the aluminum nitride shaft, the temperature of the ceramic disc at the shaft position deviates from that at other positions during use. [Summary of the Invention]

[0003] The technical problem to be solved by the present invention is to provide a shaft structure and an aluminum nitride heater to solve the problems mentioned in the background art, optimize the ceramic shaft structure, and improve the temperature uniformity of the aluminum nitride heater.

[0004] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0005] One aspect of the present invention discloses a shaft structure, which includes an aluminum nitride ceramic segment, an aluminum nitride and aluminum oxide transition segment, and an aluminum oxide ceramic segment, wherein the aluminum nitride ceramic segment, the aluminum nitride and aluminum oxide transition segment, and the aluminum oxide ceramic segment are connected in sequence from top to bottom.

[0006] Preferably, the length of the aluminum nitride ceramic segment is equal to that of the aluminum nitride and aluminum oxide transition segment, and the length of the aluminum nitride and aluminum oxide transition segment is less than that of the aluminum oxide ceramic segment.

[0007] Preferably, the length of the aluminum nitride ceramic segment is 3 / 10 of the total length of the shaft structure, the length of the aluminum nitride and aluminum oxide transition segment is 3 / 10 of the total length of the shaft structure, and the length of the aluminum oxide ceramic segment is 4 / 10 of the total length of the shaft structure.

[0008] Preferably, the aluminum nitride ceramic segment includes a first aluminum nitride segment, a second aluminum nitride segment, and a third aluminum nitride segment, which are connected sequentially. The lengths of the first aluminum nitride segment, the second aluminum nitride segment, and the third aluminum nitride segment are all 1 / 10 of the total length of the shaft structure. The first aluminum nitride segment comprises, by mass percentage: 90-100% aluminum nitride and 0-10% aluminum oxide. The second aluminum nitride segment comprises, by mass percentage: 80-90% aluminum nitride and 10-20% aluminum oxide. The third aluminum nitride segment comprises, by mass percentage: 70-80% aluminum nitride and 20-30% aluminum oxide.

[0009] Preferably, the aluminum nitride and aluminum oxide transition section includes a first transition section, a second transition section, and a third transition section, which are connected sequentially. The lengths of the first transition section, the second transition section, and the third transition section are all 1 / 10 of the total length of the shaft structure. The first transition section comprises 60-70% aluminum nitride and 30-40% aluminum oxide by mass percentage. The second transition section comprises 50-60% aluminum nitride and 40-50% aluminum oxide by mass percentage. The third transition section comprises 40-50% aluminum nitride and 50-60% aluminum oxide by mass percentage.

[0010] Preferably, the alumina ceramic segment includes a first alumina segment, a second alumina segment, a third alumina segment, and a fourth alumina segment, which are connected sequentially. The lengths of the first alumina segment, the second alumina segment, the third alumina segment, and the fourth alumina segment are all 1 / 10 of the total length of the shaft structure. The first alumina segment comprises 30-40% aluminum nitride and 60-70% alumina by mass percentage. The second alumina segment comprises 20-30% aluminum nitride and 70-80% alumina by mass percentage. The third alumina segment comprises 10-20% aluminum nitride and 80-90% alumina by mass percentage. The fourth alumina segment comprises 0-10% aluminum nitride and 90-100% alumina by mass percentage.

[0011] Preferably, the third aluminum nitride segment is connected to the first transition segment, and the third transition segment is connected to the first alumina segment.

[0012] Preferably, the shaft structure is prepared by isostatic pressing and sintering of ceramic granulated powder.

[0013] Another aspect of the present invention discloses an aluminum nitride heater including the shaft structure, the aluminum nitride heater including an aluminum nitride heating plate, the aluminum nitride heating plate being connected to the aluminum nitride ceramic segment.

[0014] The above technical solution has the following beneficial effects:

[0015] In the technical solution of this application, since the aluminum nitride ceramic section is connected to the aluminum nitride heating plate, it can be ensured that the materials of the shaft structure and the aluminum nitride heating plate at the joint are the same or similar, so that their thermal expansion coefficients are basically the same. Then, the aluminum nitride and aluminum oxide transition section is used to transition to aluminum oxide. Aluminum oxide has a lower thermal conductivity than aluminum nitride, thereby reducing the heat loss of the aluminum nitride heating plate through the shaft structure.

Implementation Method

[0017] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for illustrative purposes and does not constitute a limitation of the present invention. Furthermore, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0018] Example 1:

[0019] Referring to Figure 1, a shaft structure includes an aluminum nitride ceramic segment, an aluminum nitride and aluminum oxide transition segment, and an aluminum oxide ceramic segment, which are connected sequentially from top to bottom;

[0020] The aluminum nitride heater includes the aforementioned shaft structure and aluminum nitride heating plate 11. The shaft structure is connected to the aluminum nitride heating plate 11. Due to the high thermal conductivity of aluminum nitride, the heat of the aluminum nitride heater at the shaft structure will dissipate along with the shaft structure. To reduce the influence of the shaft structure on the heat of the aluminum nitride heating plate 11, this application designs the shaft structure as a gradient material structure. That is, the material of the shaft structure closer to the aluminum nitride heating plate 11 is aluminum nitride or mainly aluminum nitride, while the material of the shaft structure further away from the aluminum nitride heating plate 11 is... The content of aluminum nitride in the material decreases with increasing distance. At the position farthest from the aluminum nitride heating plate 11, the material is alumina or mainly alumina. Alumina has a lower thermal conductivity than aluminum nitride, thereby reducing the heat loss from the aluminum nitride heating plate 11 through the shaft structure. The design of this shaft structure not only ensures the consistency of the thermal expansion coefficient between the shaft structure and the aluminum nitride heating plate 11 at the joint, but also reduces the heat dissipation of the shaft structure, thereby optimizing the shaft structure and improving the temperature uniformity of the aluminum nitride heater.

[0021] The length of the aluminum nitride ceramic segment is equal to that of the aluminum nitride and aluminum oxide transition segment. The length of the aluminum nitride and aluminum oxide transition segment is less than that of the aluminum oxide ceramic segment. The main material of the aluminum nitride ceramic segment is aluminum nitride. It is the end connected to the aluminum nitride heating plate 11. The closer it is to the aluminum nitride heating plate 11, the higher the content of aluminum nitride material, so as to ensure the consistency of the thermal expansion coefficient of the aluminum nitride heating plate 11 at the joint.

[0022] The length of the aluminum nitride ceramic segment is 3 / 10 of the total length of the shaft structure, the length of the transition segment between aluminum nitride and aluminum oxide is 3 / 10 of the total length of the shaft structure, and the length of the aluminum oxide ceramic segment is 4 / 10 of the total length of the shaft structure.

[0023] The aluminum nitride ceramic segment includes a first aluminum nitride segment 1, a second aluminum nitride segment 2, and a third aluminum nitride segment 3, which are connected sequentially. The lengths of the first aluminum nitride segment 1, the second aluminum nitride segment 2, and the third aluminum nitride segment 3 are all 1 / 10 of the total length of the shaft structure. The first aluminum nitride segment 1 includes 90-100% aluminum nitride and 0-10% aluminum oxide by mass percentage. The second aluminum nitride segment 2 includes 80-90% aluminum nitride and 10-20% aluminum oxide by mass percentage. The third aluminum nitride segment 3 includes 70-80% aluminum nitride and 20-30% aluminum oxide by mass percentage.

[0024] The main component of the first aluminum nitride segment 1 is aluminum nitride. It is the end connected to the aluminum nitride heating plate 11 and can maintain the same coefficient of thermal expansion as the aluminum nitride heating plate 11. The first aluminum nitride segment 1, the second aluminum nitride segment 2, and the third aluminum nitride segment 3 are formed by isostatic pressing and sintering of ceramic granules to form aluminum nitride ceramic segments with decreasing aluminum nitride content in the first aluminum nitride segment 1, the second aluminum nitride segment 2, and the third aluminum nitride segment 3. However, this segment mainly... The main components are aluminum nitride, such as the first aluminum nitride segment 1 comprising 90-100% aluminum nitride and the remainder being aluminum oxide, preferably 95% aluminum nitride and 5% aluminum oxide; the second aluminum nitride segment 2 comprising 80-90% aluminum nitride and 10-20% aluminum oxide, preferably 85% aluminum nitride and 15% aluminum oxide; and the third aluminum nitride segment 3 comprising 70-80% aluminum nitride and 20-30% aluminum oxide, preferably 75% aluminum nitride and 25% aluminum oxide.

[0025] The aluminum nitride and aluminum oxide transition section includes a first transition section 4, a second transition section 5, and a third transition section 6, which are connected sequentially. The lengths of the first transition section 4, the second transition section 5, and the third transition section 6 are all 1 / 10 of the total length of the shaft structure. The first transition section 4 includes 60-70% aluminum nitride and 30-40% aluminum oxide by mass percentage. The second transition section 5 includes 50-60% aluminum nitride and 40-50% aluminum oxide by mass percentage. The third transition section 6 includes 40-50% aluminum nitride and 50-60% aluminum oxide by mass percentage.

[0026] The first transition section 4 comprises, by mass percentage, 60-70% aluminum nitride and 30-40% aluminum oxide, preferably 65% ​​aluminum nitride and 35% aluminum oxide; the second transition section 5 comprises, by mass percentage, 50-60% aluminum nitride and 40-50% aluminum oxide, preferably 55% aluminum nitride and 45% aluminum oxide; the third transition section 6 comprises, by mass percentage, 40-50% aluminum nitride and 50-60% aluminum oxide, preferably 45% aluminum nitride and 55% aluminum oxide; the first transition section 4 is connected to the third aluminum nitride section 3 described above, and the connection is achieved by sintering together using a ceramic sintering method.

[0027] The alumina ceramic segment includes a first alumina segment 7, a second alumina segment 8, a third alumina segment 9, and a fourth alumina segment 10, which are connected sequentially. The lengths of each of the first alumina segment 7, second alumina segment 8, third alumina segment 9, and fourth alumina segment 10 are 1 / 10 of the total length of the shaft structure. The first alumina segment 7 comprises, by mass percentage, 30-40% aluminum nitride and 60-70% alumina, preferably 35%. The alumina segment 8 comprises, by mass percentage: 20-30% aluminum nitride and 70-80% aluminum oxide, preferably 25% aluminum nitride and 75% aluminum oxide; the alumina segment 9 comprises, by mass percentage: 10-20% aluminum nitride and 80-90% aluminum oxide, preferably 15% aluminum nitride and 85% aluminum oxide; and the alumina segment 10 comprises, by mass percentage: 0-10% aluminum nitride and 90-100% aluminum oxide, preferably 5% aluminum nitride and 95% aluminum oxide.

[0028] For the alumina ceramic segment, the main material is alumina, and the remaining part is aluminum nitride. The first alumina segment 7, the second alumina segment 8, the third alumina segment 9 and the fourth alumina segment 10 are pressed and sintered together to form an alumina ceramic segment. One end of the first alumina segment 7 is connected to the third transition segment 6 of the transition segment between aluminum nitride and alumina. They are also connected by sintering. Each segment is prepared separately and then sintered together to form a shaft structure.

[0029] The third aluminum nitride segment 3 is connected to the first transition segment 4, and the third transition segment 6 is connected to the first alumina segment 7;

[0030] First, the first aluminum nitride segment 1, the second aluminum nitride segment 2, the third aluminum nitride segment 3, the first transition segment 4, the second transition segment 5, the third transition segment 6, the first alumina segment 7, the second alumina segment 8, the third alumina segment 9, and the fourth alumina segment 10 are prepared by ceramic granulation powder, and then the shaft structure is prepared by isostatic pressing and sintering.

[0031] In the technical solution of this application, since the aluminum nitride ceramic section is connected to the aluminum nitride heating plate 11, it can be ensured that the materials of the shaft structure and the aluminum nitride heating plate 11 at the joint are the same or similar, so that their thermal expansion coefficients are basically the same. Then, the aluminum nitride and aluminum oxide transition section is used to transition to aluminum oxide. Aluminum oxide has a lower thermal conductivity than aluminum nitride, thereby reducing the heat loss on the aluminum nitride heating plate 11 through the shaft structure.

[0032] Example 2:

[0033] A shaft structure includes an aluminum nitride ceramic segment, an aluminum nitride and aluminum oxide transition segment, and an aluminum oxide ceramic segment, which are connected sequentially from top to bottom;

[0034] The length of the aluminum nitride ceramic segment is equal to that of the aluminum nitride and aluminum oxide transition segment, and the length of the aluminum nitride and aluminum oxide transition segment is less than that of the aluminum oxide ceramic segment;

[0035] The length of the aluminum nitride ceramic section is 3 / 10 of the total length of the shaft structure, the length of the transition section between aluminum nitride and aluminum oxide is 3 / 10 of the total length of the shaft structure, and the length of the aluminum oxide ceramic section is 4 / 10 of the total length of the shaft structure.

[0036] The aluminum nitride ceramic segment includes a first aluminum nitride segment 1, a second aluminum nitride segment 2, and a third aluminum nitride segment 3, which are connected sequentially. The lengths of the first aluminum nitride segment 1, the second aluminum nitride segment 2, and the third aluminum nitride segment 3 are all 1 / 10 of the total length of the shaft structure. The first aluminum nitride segment 1 comprises 100% aluminum nitride by mass percentage, the second aluminum nitride segment 2 comprises 90% aluminum nitride and 10% aluminum oxide by mass percentage, and the third aluminum nitride segment 3 comprises 80% aluminum nitride and 20% aluminum oxide by mass percentage.

[0037] The aluminum nitride and aluminum oxide transition section includes a first transition section 4, a second transition section 5, and a third transition section 6, which are connected in sequence. The lengths of the first transition section 4, the second transition section 5, and the third transition section 6 are all 1 / 10 of the total length of the shaft structure. The first transition section 4 includes 70% aluminum nitride and 30% aluminum oxide by mass percentage. The second transition section 5 includes 60% aluminum nitride and 40% aluminum oxide by mass percentage. The third transition section 6 includes 50% aluminum nitride and 50% aluminum oxide by mass percentage.

[0038] The alumina ceramic segment includes a first alumina segment 7, a second alumina segment 8, a third alumina segment 9, and a fourth alumina segment 10. The first alumina segment 7, the second alumina segment 8, the third alumina segment 9, and the fourth alumina segment 10 are connected in sequence. The lengths of the first alumina segment 7, the second alumina segment 8, the third alumina segment 9, and the fourth alumina segment 10 are all 1 / 10 of the total length of the shaft structure. The first alumina segment 7 includes 40% aluminum nitride and 60% alumina by mass percentage. The second alumina segment 8 includes 30% aluminum nitride and 70% alumina by mass percentage. The third alumina segment 9 includes 20% aluminum nitride and 80% alumina by mass percentage. The fourth alumina segment 10 includes 10% aluminum nitride and 90% alumina by mass percentage.

[0039] The third aluminum nitride segment 3 is connected to the first transition segment 4, and the third transition segment 6 is connected to the first alumina segment 7;

[0040] First, aluminum nitride segment 1, aluminum nitride segment 2, aluminum nitride segment 3, first transition segment 4, second transition segment 5, third transition segment 6, first alumina segment 7, second alumina segment 8, third alumina segment 9, and fourth alumina segment 10 are prepared by ceramic granulation powder, and then the shaft structure is prepared by isostatic pressing and sintering.

[0041] Example 3:

[0042] A shaft structure includes an aluminum nitride ceramic segment, an aluminum nitride and aluminum oxide transition segment, and an aluminum oxide ceramic segment, which are connected sequentially from top to bottom;

[0043] The length of the aluminum nitride ceramic segment is equal to that of the aluminum nitride and aluminum oxide transition segment, and the length of the aluminum nitride and aluminum oxide transition segment is less than that of the aluminum oxide ceramic segment;

[0044] The length of the aluminum nitride ceramic segment is 3 / 10 of the total length of the shaft structure, the length of the transition segment between aluminum nitride and aluminum oxide is 3 / 10 of the total length of the shaft structure, and the length of the aluminum oxide ceramic segment is 4 / 10 of the total length of the shaft structure.

[0045] The aluminum nitride ceramic segment includes a first aluminum nitride segment 1, a second aluminum nitride segment 2, and a third aluminum nitride segment 3, which are connected sequentially. The lengths of the first aluminum nitride segment 1, the second aluminum nitride segment 2, and the third aluminum nitride segment 3 are all 1 / 10 of the total length of the shaft structure. The first aluminum nitride segment 1 includes 90% aluminum nitride and 10% aluminum oxide by mass percentage. The second aluminum nitride segment 2 includes 80% aluminum nitride and 20% aluminum oxide by mass percentage. The third aluminum nitride segment 3 includes 70% aluminum nitride and 30% aluminum oxide by mass percentage.

[0046] The aluminum nitride and aluminum oxide transition section includes a first transition section 4, a second transition section 5, and a third transition section 6, which are connected in sequence. The lengths of the first transition section 4, the second transition section 5, and the third transition section 6 are all 1 / 10 of the total length of the shaft structure. The first transition section 4 includes 60% aluminum nitride and 40% aluminum oxide by mass percentage. The second transition section 5 includes 50% aluminum nitride and 50% aluminum oxide by mass percentage. The third transition section 6 includes 40% aluminum nitride and 60% aluminum oxide by mass percentage.

[0047] The alumina ceramic segment includes a first alumina segment 7, a second alumina segment 8, a third alumina segment 9, and a fourth alumina segment 10. The first alumina segment 7, the second alumina segment 8, the third alumina segment 9, and the fourth alumina segment 10 are connected sequentially. The lengths of the first alumina segment 7, the second alumina segment 8, the third alumina segment 9, and the fourth alumina segment 10 are all 1 / 10 of the total length of the shaft structure. The first alumina segment 7 includes 30% aluminum nitride and 70% alumina by mass percentage. The second alumina segment 8 includes 20% aluminum nitride and 80% alumina by mass percentage. The third alumina segment 9 includes 10% aluminum nitride and 90% alumina by mass percentage. The fourth alumina segment 10 includes 100% alumina by mass percentage.

[0048] The third aluminum nitride segment 3 is connected to the first transition segment 4, and the third transition segment 6 is connected to the first aluminum oxide segment 7;

[0049] First, aluminum nitride segment 1, aluminum nitride segment 2, aluminum nitride segment 3, first transition segment 4, second transition segment 5, third transition segment 6, first alumina segment 7, second alumina segment 8, third alumina segment 9, and fourth alumina segment 10 are prepared by ceramic granulation powder, and then the shaft structure is prepared by isostatic pressing and sintering.

[0050] Example 4:

[0051] An aluminum nitride heater including the above-mentioned shaft structure, the aluminum nitride heater including an aluminum nitride heating plate 11, the aluminum nitride heating plate 11 being connected to an aluminum nitride ceramic segment, specifically, the first aluminum nitride segment containing the most aluminum nitride in the shaft structure is connected to the aluminum nitride heating plate 11.

[0052] Not only can it ensure that the shaft structure and the aluminum nitride heating plate 11 are made of the same material or have the same main components at the joint, so that their thermal expansion coefficients are consistent, but it can also transition to the section with aluminum oxide ceramic as the main component. Taking advantage of the fact that aluminum oxide has a lower thermal conductivity than aluminum nitride, the heat loss from the aluminum nitride heating plate 11 through the shaft structure is reduced.

[0053] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and these variations still fall within the protection scope of the present invention. [Simplified Explanation of the Diagram]

[0016] Figure 1 is a schematic diagram of the structure of the aluminum nitride heater of the present invention.

Claims

1. A shaft structure, characterized in that: the shaft structure comprises an aluminum nitride ceramic segment, an aluminum nitride and aluminum oxide transition segment, and an aluminum oxide ceramic segment, wherein the aluminum nitride ceramic segment, the aluminum nitride and aluminum oxide transition segment, and the aluminum oxide ceramic segment are sequentially connected from top to bottom; the aluminum nitride ceramic segment comprises a first aluminum nitride segment, a second aluminum nitride segment, and a third aluminum nitride segment, wherein the first aluminum nitride segment, the second aluminum nitride segment, and the third aluminum nitride segment are sequentially connected, and the lengths of the first aluminum nitride segment, the second aluminum nitride segment, and the third aluminum nitride segment are all 1 / 10 of the total length of the shaft structure, wherein the first aluminum nitride segment comprises, by mass percentage: The aluminum nitride segment comprises 90-100% aluminum nitride and 0-10% aluminum oxide, wherein the second aluminum nitride segment comprises 80-90% aluminum nitride and 10-20% aluminum oxide by mass percentage, and the third aluminum nitride segment comprises 70-80% aluminum nitride and 20-30% aluminum oxide by mass percentage.

2. A shaft structure according to claim 1, wherein, The length of the aluminum nitride ceramic segment is equal to that of the aluminum nitride and aluminum oxide transition segment, and the length of the aluminum nitride and aluminum oxide transition segment is less than that of the aluminum oxide ceramic segment.

3. A shaft structure according to claim 2, wherein, The length of the aluminum nitride ceramic segment is 3 / 10 of the total length of the shaft structure, the length of the transition segment between aluminum nitride and aluminum oxide is 3 / 10 of the total length of the shaft structure, and the length of the aluminum oxide ceramic segment is 4 / 10 of the total length of the shaft structure.

4. A shaft structure according to claim 1, wherein, The aluminum nitride and aluminum oxide transition section includes a first transition section, a second transition section, and a third transition section, which are connected sequentially. The lengths of the first transition section, the second transition section, and the third transition section are all 1 / 10 of the total length of the shaft structure. The first transition section comprises 60-70% aluminum nitride and 30-40% aluminum oxide by mass percentage. The second transition section comprises 50-60% aluminum nitride and 40-50% aluminum oxide by mass percentage. The third transition section comprises 40-50% aluminum nitride and 50-60% aluminum oxide by mass percentage.

5. A shaft structure according to claim 4, wherein the alumina ceramic segment comprises a first alumina segment, a second alumina segment, a third alumina segment, and a fourth alumina segment, wherein the first alumina segment, the second alumina segment, the third alumina segment, and the fourth alumina segment are connected sequentially, and the lengths of the first alumina segment, the second alumina segment, the third alumina segment, and the fourth alumina segment are all 1 / 10 of the total length of the shaft structure, and the first alumina segment comprises, by mass percentage: The alumina fraction comprises 30-40% aluminum nitride and 60-70% aluminum oxide, wherein the second alumina fraction comprises 20-30% aluminum nitride and 70-80% aluminum oxide by mass percentage, the third alumina fraction comprises 10-20% aluminum nitride and 80-90% aluminum oxide by mass percentage, and the fourth alumina fraction comprises 0-10% aluminum nitride and 90-100% aluminum oxide by mass percentage.

6. A shaft structure according to claim 5, wherein, The third aluminum nitride segment is connected to the first transition segment, and the third transition segment is connected to the first aluminum oxide segment.

7. A shaft structure according to claim 5, wherein, The shaft structure is prepared by isostatic pressing and sintering of ceramic granulated powder.

8. An aluminum nitride heater comprising a shaft structure as described in any one of claims 1 to 7, wherein, The aluminum nitride heater includes an aluminum nitride heating plate, which is connected to the aluminum nitride ceramic section.

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