Decontamination equipment and laser annealing equipment

Abstract

This invention provides a decontamination device and a laser annealing apparatus. The decontamination device includes a device body and a flange, with the flange surrounding the outer periphery of the device body near its bottom. The device body includes a housing and a purging assembly. The housing has a first cavity inside and multiple purging jet ports. The purging assembly is connected to a gas source to introduce purging gas supplied by the gas source into the first cavity through the multiple purging jet ports. The flange includes a flange body and a suction assembly. The bottom of the flange body has an opening communicating with the first cavity. The flange body and the workpiece supported on the workpiece stage together form a semi-closed second cavity communicating with the opening. The suction assembly communicates with the second cavity to discharge contaminants. This invention can efficiently remove contaminants generated on the workpiece during the exposure process, which can not only effectively improve the product yield but also effectively reduce the frequency of equipment maintenance.

Claims

1. A decontamination device for placement between a workpiece stage and an optical system, characterized in that the decontamination device comprises a connected device body and a flange, the flange surrounding the outer periphery near the bottom of the device body; the device body comprises a housing and at least one set of purging assemblies disposed on the housing, the housing having a first cavity inside, and the housing also having a plurality of purging jet nozzles, a first end of each purging jet nozzle communicating with the purging assemblies, and a second end of each purging jet nozzle communicating with the first cavity; the purging assemblies are used to connect to a gas source to introduce purging gas provided by the gas source into the first cavity through the plurality of purging jet nozzles; the flange comprises a flange body and at least one set of suction assemblies disposed on the flange body, the bottom of the flange body having an opening communicating with the first cavity, and a gap between the flange body and the workpiece carried on the workpiece stage to form a semi-closed second cavity communicating with the opening; the suction assemblies are connected to the second cavity to discharge contaminants generated by the workpiece during exposure.

2. The decontamination device as described in claim 1, wherein, The purging assembly includes an air inlet and a purging gas flow channel that are interconnected. The air inlet is used to connect to the air source, and the purging gas flow channel is connected to the purging jet nozzle.

3. The decontamination device as described in claim 1, wherein, The upper and lower parts of the housing are provided with a plurality of purge jet ports that are equally spaced along the circumference of the housing.

4. The decontamination device as described in claim 1, wherein, The device body includes multiple sets of the purging components disposed on the housing, wherein at least one set of the purging components is disposed on the upper part of the housing, and at least one set of the purging components is disposed on the lower part of the housing.

5. The decontamination device as described in claim 1, wherein, The flange body is provided with multiple sets of suction components, which are evenly arranged along the circumference of the flange body.

6. The decontamination apparatus as described in claim 1, wherein, The suction assembly includes a contamination suction port and a suction channel that are interconnected. The contamination suction port is connected to the second cavity, and the suction channel is used to connect to a negative pressure device.

7. The decontamination apparatus as described in claim 6, wherein, The suction assembly further includes a suction port, the first end of which is connected to the suction channel, and the second end of which is connected to the negative pressure device.

8. The decontamination apparatus as described in claim 6, wherein, The contamination suction port is set at an angle to the plane of the flange body, and the angle formed by the contamination suction port and the plane of the flange body is 30°~60°.

9. The decontamination apparatus as described in claim 6, wherein, The ratio of the side length of the flange body to the side length of the opening is greater than 1 and less than 5, and the ratio of the distance between the center of the pollution suction port and the center of the opening to the side length of the opening is greater than 0.5 and less than 5.

10. The decontamination apparatus as described in claim 6, wherein, The suction assembly also includes a peripheral suction port that communicates with the suction flow channel. The peripheral suction port is located closer to the outer edge of the flange body than the contamination suction port.

11. The decontamination apparatus as claimed in claim 1, wherein, The ratio of the total air intake flow rate of the purging assembly to the total suction flow rate of the suction assembly is 0.5 to 1.

5.

12. A laser annealing apparatus, characterized in that it comprises an optical system, a workpiece stage, and a decontamination device as described in any one of claims 1 to 11, the decontamination device being located between the optical system and the workpiece stage.

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