Door driving mechanism, process chamber and semiconductor process equipment

Abstract

This application provides a door driving mechanism, a process chamber, and semiconductor process equipment. The door driving mechanism includes: a first driving device, a second driving device, and a connecting portion. The connecting portion is used to connect to the door body and is drivenly connected to the first and second driving devices. The first driving device drives the connecting portion to move along a first direction, causing the connecting portion to move the door body along the first direction. The second driving device drives the connecting portion to move along a second direction, which intersects with the first direction, causing the connecting portion to move the door body relative to the first driving device along the second direction. The door driving mechanism of this application, by providing the second driving device, can achieve lateral movement of the door body, thereby pressing the door body against the inner lining structure to achieve a seal or separating the door body from the inner lining. While ensuring the sealing effect of the door body, it also effectively avoids rubbing between the door body and the inner lining structure.

Description

[Technical Field]

[0001] This application relates to the field of semiconductor manufacturing, specifically to a door drive mechanism, a process chamber, and semiconductor process equipment. [Previous Technology]

[0002] In the semiconductor manufacturing field, the process chamber is a very important piece of equipment, and many semiconductor process equipment require a process chamber. Taking an etching machine as an example, a process chamber is set inside the etching machine. An upper electrode is set at the top of the process chamber, and a lower electrode that can be raised and lowered is set inside the process chamber. An inner liner is set at the top of the process chamber. The top of the inner liner is connected to the upper electrode, and the bottom is set with an assembly port that mates with the lower electrode. After the lower electrode rises to the assembly port, the upper electrode, the inner wall of the inner liner, and the lower electrode together form an inner cavity for the etching process. An outer cavity is formed between the outer wall of the inner liner and the inner wall of the process chamber.

[0003] To facilitate the entry and exit of wafers from the process chamber, a transfer port communicating with the outer cavity is provided on the outer wall of the process chamber, and a wafer transfer notch communicating with the inner cavity is provided on the inner liner. The transfer port and the wafer transfer notch correspond to each other, and the wafer is transferred by a robot through the transfer port and the wafer transfer notch. Since the integrity of the inner cavity needs to be maintained during the etching process, a liftable inner door mechanism is set in the outer cavity. During the etching process, the inner door blocks the wafer transfer notch, making the inner cavity form a nearly complete circle, thereby improving the uniformity of the process environment inside the cavity and improving the etching uniformity.

[0004] However, in the prior art, since the inner door mechanism moves up and down against the outer wall of the inner liner during opening and closing, a gap is provided between the inner door and the inner liner to avoid friction between them. Therefore, the inner cavity is not completely sealed, which is not conducive to stable and uniform airflow and does not completely shield the plasma, posing a risk of plasma leakage. Moreover, although there is a gap between the inner door and the inner liner, the long lifting rod causes instability in the inner door's movement. Prolonged lifting motion poses a risk of the guide rod tilting and rubbing against the inner wall or liner of the reaction chamber. Therefore, how to effectively prevent rubbing between the inner door and the inner liner while ensuring the sealing effect of the inner cavity is a problem that urgently needs to be solved in this field. [Summary of the Invention]

[0005] This application aims to solve the problem that the inner door and the inner lining cannot be completely sealed in the prior art, and there is still a risk of rubbing and bumping. It proposes a door drive mechanism, a process chamber and a semiconductor process equipment.

[0006] To achieve the purpose of this application, a door driving mechanism is provided, comprising: a first driving device; a second driving device; and a connecting portion, the connecting portion being used to connect to a door body and being drivenly connected to the first driving device and the second driving device, the first driving device being used to drive the connecting portion to move along a first direction, so that the connecting portion drives the door body to move along the first direction; and the second driving device being used to drive the connecting portion to move along a second direction, the second direction intersecting the first direction, so that the connecting portion drives the door body to move relative to the first driving device along the second direction.

[0007] Further, the second driving device includes: a second housing having a mounting port and a mounting space communicating with the mounting port, the second housing being used to be mounted on a support and to close the mounting port through the support; and a second driving member disposed within the mounting space for providing driving force in the second direction to drive the connecting portion to move along the second direction.

[0008] Further, the second driving device also includes a transmission assembly connected between the second driving member and the connecting portion. The transmission assembly includes: a connecting plate movably disposed within the mounting space, the connecting plate being drivenly connected to the second driving member; a guide shaft passing through the second housing, the axis of the guide shaft being disposed along the second direction and movable relative to the second housing in the second direction, the first end of the guide shaft being located within the mounting space and fixedly connected to the connecting plate, and the second end of the guide shaft being located outside the second housing; the second end of the guide shaft being provided with a mounting seat, the connecting portion being disposed on the mounting seat, and the mounting seat being movable along the second direction under the drive of the guide shaft; wherein, in the first direction, the connecting portion and the mounting seat are movable relative to each other; in the second direction, the connecting portion and the mounting seat are fixed relative to each other, so that the mounting seat drives the connecting portion to move along the second direction.

[0009] Further, the second housing includes: a first receiving portion having a first end and a second end disposed opposite to each other along a second direction, the first end of the first receiving portion being used to connect with the support, and the first end of the first receiving portion being provided with the mounting port; a second receiving portion having a first end and a second end disposed opposite to each other along a second direction, the first end of the second receiving portion being connected to the second end of the first receiving portion; the interior of the first receiving portion communicating with the interior of the second receiving portion and forming the mounting space; the connecting plate being movably disposed within the first receiving portion along the second direction; and the second driving member being disposed within the second receiving portion.

[0010] Further, the connection position between the first end of the second receiving portion and the second end of the first receiving portion forms a stepped structure. The first receiving portion is provided with a guide hole communicating with its interior along the second direction. The guide hole is located on the stepped structure, and the guide shaft is movably inserted through the guide hole along the second direction.

[0011] Further, the connecting plate includes a plate body and a connecting arm, the connecting arm is disposed on the outer periphery of the plate body, the plate body is driven to be connected to the second driving member, and the connecting arm is connected to the guide shaft.

[0012] Further, a first mounting groove is provided in the first receiving portion, the groove opening of the first mounting groove is located on the surface of the first end of the first receiving portion to form the mounting opening, and the groove bottom of the first mounting groove is located at the second end of the first receiving portion; the first mounting groove includes a main groove body and a secondary groove body, and the secondary groove body is disposed on the outer periphery of the main groove body; a second mounting groove is provided in the second receiving portion, the groove opening of the second mounting groove is located at the groove bottom of the first mounting groove and communicates with the main groove body, and the groove bottom of the second mounting groove is located at the second end of the second receiving portion, and the first mounting groove and the second mounting groove together form the mounting space; the plate body is located in the main groove body, and the connecting arm is located in the secondary groove body.

[0013] Furthermore, the guide shaft is sealed to the second housing.

[0014] Further, a positioning post is provided inside the second housing, and the positioning post is arranged along the second direction; a positioning hole is provided on the connecting plate, the positioning post is located in the positioning hole, and the connecting plate is movable relative to the positioning post, so as to perform positioning and guidance by cooperating with the positioning post and the positioning hole.

[0015] Further, there are two positioning posts, which are spaced apart in the second receiving part, and a limiting space for installing the second driving member is formed between two adjacent positioning posts.

[0016] Further, the connecting part includes a connecting rod, the mounting base is provided with a through mounting hole along the first direction, the connecting rod passes through the mounting hole, and the connecting part is movable in the first direction within the mounting hole.

[0017] Further, the first driving device includes: a first driving member, movably disposed along the first direction, the first driving member being provided with a first sliding portion; the connecting portion being provided with a second sliding portion, the first sliding portion and the second sliding portion being in upper limit engagement in the first direction, and the first sliding portion and the second sliding portion being in sliding engagement in the second direction, so that the first driving member drives the connecting portion to move along the first direction, and the connecting portion slides relative to the first driving member in the second direction.

[0018] Further, the connecting part includes: a connecting rod, the first end of which is connected to the door body; a sliding plate, which is fixedly connected to the second end of the connecting rod, and the sliding plate is provided with a second sliding part; wherein, the first sliding part is a slide rail or slide groove arranged along the second direction, and the second sliding part is a slide groove or slide rail that matches the first sliding part.

[0019] Further, the first driving device further includes: a bracket, on which the first driving member is movably disposed along the first direction; and a detection device disposed on the bracket, the detection device being used to detect the position of the first driving member.

[0020] Further, the door drive mechanism further includes: a first connector, the first connector being used to connect to a support, the first connector having an elongated hole extending along the first direction, the connecting portion passing through the elongated hole, the radial length direction of the elongated hole being arranged along the second direction; the connecting portion and the elongated hole slidingly engaging in the first direction; the connecting portion and the elongated hole slidingly engaging in the second direction; and the connecting portion and the elongated hole sealingly engaging.

[0021] According to a second aspect of this application, a process chamber is also disclosed, comprising: a chamber body; an inner liner structure disposed within the chamber body, the inner liner structure dividing the chamber body into an inner cavity and an outer cavity, the inner liner structure having a transfer notch communicating the inner cavity and the outer cavity; a door body movably disposed within the outer cavity, the door body being used to open and close the transfer notch; and the aforementioned door body driving mechanism being driven connected to the door body to drive the door body to open and close the transfer notch.

[0022] Further, the door body has a first position, a second position, and a third position; in the first position, the door body is located at the notch position of the transfer piece, closing the notch; in the second position, the door body is located away from the notch position in the second direction, and an movable gap is formed between the door body and the outer wall of the inner lining structure; in the third position, the door body is located in the first direction to avoid the notch position of the transfer piece; the first driving device is used to drive the door body to move between the second position and the third position; the second driving device is used to drive the door body to move between the first position and the second position.

[0023] Further, the inner lining structure has a first mating end face, and the transfer piece notch is located on the first mating end face; the door body has a second mating end face, and at the first position of the door body, the second mating end face covers the first mating end face and closes the transfer piece notch.

[0024] Further, an induction coil is provided on the second mating end face of the door body, and at the first position of the door body, the door body abuts the induction coil against the inner lining structure.

[0025] Further, a receiving groove is provided on the first mating end face, and at the first position of the door body, the induction coil is located in the receiving groove, and the induction coil abuts against the bottom of the receiving groove.

[0026] Further, the second mating end face of the door body is provided with a boss structure, and the induction coil is disposed on the outer periphery of the boss structure; the inner lining structure also has a sealing channel, the first end of the sealing channel extends to the first mating end face to form the transmission plate notch, and the second end of the sealing channel communicates with the inner cavity; when the door body is in the first position, the boss structure is located in the sealing channel, and the protruding end surface of the boss structure is flush with the inner wall surface of the inner cavity, so that the inner cavity forms a complete symmetrical space; a first sealing gap is formed between the outer peripheral wall of the boss structure and the inner wall of the sealing channel.

[0027] Further, from the first end to the second end of the sealing channel, the distance between the relatively disposed inner walls in the sealing channel gradually decreases, and the boss structure is a wedge-shaped boss that matches the sealing channel.

[0028] Further, at least one annular protrusion is provided on the second mating end face of the door body along the outer periphery of the boss structure, and the annular protrusion is located inside the induction coil; at least one annular groove is provided on the first mating end face of the inner lining structure, the annular protrusion is located in the corresponding annular groove, and a second sealing gap is formed between the annular protrusion and the annular groove.

[0029] Further, when the door body is in the second position, the boss structure disengages from the sealing channel, so that the movable gap is formed between the door body and the outer wall of the inner lining structure; the second driving device drives the door body to move so that the boss structure enters or disengages from the sealing channel.

[0030] According to a third aspect of this application, a semiconductor process apparatus is also disclosed, including at least one of the above-described process chambers.

[0031] The door drive mechanism of this application, in addition to using the first drive device to drive the door to move along the first direction through the connecting part, can also use the second drive device to drive the door to move along the second direction through the connecting part. Since the connecting part can move relative to the first drive device in the second direction and is not restricted by the first drive device, the door can move along the second direction (e.g., laterally) under the drive of the second drive device, so that the door can be pressed onto the inner lining structure to achieve sealing or to separate the door from the inner lining. While ensuring the sealing effect of the door, it also effectively avoids the door from rubbing against the inner lining structure.

Implementation Method

[0033] In order to enable those skilled in the art to better understand the technical solution of this application, the door drive mechanism, process chamber and semiconductor process equipment provided in this application will be described in detail below with reference to the accompanying drawings.

[0034] To achieve the purpose of this application, as shown in FIG1, an embodiment of this application discloses a door driving mechanism. This door driving mechanism can be applied to various semiconductor process equipment such as etching machines to drive the door to close the wafer transfer gap or move away from the wafer transfer gap. The door driving mechanism of this application embodiment may include: a first driving device 10, a second driving device 20, and a connecting part 30. The connecting part 30 is used to connect with the door 70, and the connecting part 30 is driven to connect with the first driving device 10. The first driving device 10 is used to drive the connecting part 30 to move along a first direction, so that the connecting part 30 drives the door 70 to move along the first direction; in a second direction intersecting the first direction, the connecting part 30 is movable relative to the first driving device 10. The connecting part 30 is also driven to connect with the second driving device 20. The second driving device 20 is used to drive the connecting part 30 to move along the second direction, so that the connecting part 30 drives the door 70 to move relative to the first driving device 10 along the second direction.

[0035] In use, the first drive device 10 drives the connecting part 30 to move, and the connecting part 30 drives the door body 70 to move along the first direction; when the door body 70 moves to the preset position, the first drive device 10 stops, so that the connecting part 30 stops moving in the first direction. At this time, the second drive device 20 will drive the connecting part 30 to move along the second direction. Since the connecting part 30 can move relative to the first drive device 10 in the second direction, it is not restricted by the first drive device 10. Therefore, under the drive of the second drive device 20, the connecting part 30 can drive the door body 70 to move along the second direction.

[0036] After the door drive mechanism is assembled onto the process chamber, in this embodiment, the first direction is the vertical direction, i.e., the up-down direction in Figure 1, and the second direction is the horizontal direction, i.e., the left-right direction in Figure 1. When closing the door 70, the first drive device 10 can drive the connecting part 30 and the door 70 to rise together. After rising to an appropriate position, the second drive device 20 drives the door 70 to move laterally (i.e., in the second direction) through the connecting part 30, thereby pressing the door 70 onto the inner lining structure 60 (see Figure 12) to achieve a seal. When opening the door 70, the second drive device 20 first drives the door 70 to move laterally (i.e., in the second direction) through the connecting part 30 to separate the door 70 from the inner lining structure 60. Then, the first drive device 10 drives the second drive device 20 and the door 70 to descend together, thereby completing the opening of the door 70.

[0037] The door drive mechanism of this application, in addition to using the first drive device 10 to drive the door 70 to move in the first direction through the connecting part 30, can also use the second drive device 20 to drive the door 70 to move in the second direction through the connecting part 30. Since the connecting part 30 can move in the second direction relative to the first drive device 10 and is not restricted by the first drive device 10, the door 70 can be moved in the second direction (e.g., laterally) under the drive of the second drive device 20, so that the door 70 can be pressed on the inner lining structure 60 to achieve sealing or to separate the door 70 from the inner lining structure 60. While ensuring the sealing effect of the door 70, it also effectively avoids the door 70 from rubbing against the inner lining structure 60.

[0038] As shown in Figure 1, in this embodiment, the connecting part 30 includes a connecting rod 31, which is disposed on the second driving device 20. The axial direction of the connecting rod 31 is arranged along a first direction, and the connecting rod 31 is movable relative to the second driving device 20 in the first direction. One end of the connecting rod 31 is movably disposed on the first driving device 10 along a second direction, and the second end of the connecting rod 31 is used to connect with the door body 70. That is, as shown in Figure 1, the connecting rod 31 is disposed on the second driving device 20 along the vertical direction (i.e., the first direction) in Figure 1, and the connecting rod 31 can move relative to the second driving device 20 in the vertical direction, thereby avoiding the first driving device 10 being restricted by the second driving device 20 when driving the connecting rod 31 to rise and fall. Similarly, the connecting rod 31 can move relative to the first driving device 10 along the horizontal direction (i.e., the second direction) in Figure 1, thereby avoiding the second driving device 20 being restricted by the first driving device 10 when driving the connecting rod 31 to move horizontally.

[0039] Specifically, as shown in FIG2, in this embodiment, the second driving device 20 includes: a second housing 21 and a second driving member 22. As shown in FIG3, the second housing 21 has a mounting opening 411 and a mounting space 40 communicating with the mounting opening 411. The second housing 21 is used to be mounted on a support and the mounting opening 411 is closed by the support. The second driving member 22 is disposed in the mounting space 40 and is used to provide driving force in a second direction to drive the connecting part 30 to move in the second direction.

[0040] It should be noted that the support is a component used to install the second housing 21. In this embodiment, as shown in FIG12, the process chamber includes an inner cavity 51 and an outer cavity 52. ​​The support is the inner wall of the outer cavity 52. ​​After the second housing 21 is installed on the inner wall of the outer cavity 52, the inner wall surface of the outer cavity 52 closes the installation port 411, thereby isolating the installation space 40 from the outer cavity 52. ​​On the one hand, it can prevent the process gas in the process chamber from entering the installation space 40 and adversely affecting the components in the second drive device 20. On the other hand, it can also prevent the particles generated by friction and impact of the internal components of the second drive device 20 from entering the process chamber and affecting the product. This achieves multiple benefits.

[0041] The second driving device 20 further includes a transmission assembly connected between the second driving member 22 and the connecting portion 30. The second driving member 22 applies a driving force in a second direction to the connecting portion 30 through the transmission assembly to drive the connecting portion 30 to move in the second direction. In some embodiments, the transmission assembly includes a connecting plate 23, a guide shaft 24, and a mounting base 25.

[0042] The connecting plate 23 is movably disposed within the installation space 40, and the connecting plate 23 is drivenly connected to the second driving member 22; the guide shaft 24 passes through the second housing 21, the axis of the guide shaft 24 is disposed along the second direction and is movable relative to the second housing 21 in the second direction, the first end of the guide shaft 24 is located within the installation space 40 and is fixedly connected to the connecting plate 23, and the second end of the guide shaft 24 is located outside the second housing 21; the second end of the guide shaft 24 is provided with a mounting seat 25, and the connecting part 30 is disposed on the mounting seat 25, and the mounting seat 25 is movable along the second direction under the drive of the guide shaft 24; wherein, in the first direction, the connecting part 30 and the mounting seat 25 are movable relative to each other; in the second direction, the connecting part 30 and the mounting seat 25 are fixed relative to each other, so that the mounting seat 25 drives the connecting part 30 to move along the second direction.

[0043] In some embodiments, as shown in FIG4, the second housing 21 includes: a first receiving portion 211 and a second receiving portion 212. The first receiving portion 211 has a first end and a second end disposed opposite to each other along a second direction. The first end of the first receiving portion 211 is used to connect with a support. Further, in some embodiments, a first mounting groove 41 is provided inside the first receiving portion 211, which is the interior of the first receiving portion 211. The groove opening of the first mounting groove 41 is located on the surface of the first end of the first receiving portion 211 to form a mounting opening 411, and the groove bottom of the first mounting groove 41 is located at the second end of the first receiving portion 211.

[0044] The second receiving portion 212 has a first end and a second end disposed opposite to each other along a second direction. The first end of the second receiving portion 212 is connected to the second end of the first receiving portion 211. Further, in some embodiments, a second mounting groove 42 is provided inside the second receiving portion 212. The second mounting groove 42 is the internal space of the second receiving portion 212. The opening of the second mounting groove 42 is located at the bottom of the first mounting groove 41 and communicates with the first mounting groove 41. The bottom of the second mounting groove 42 is located at the second end of the second receiving portion 212. The first mounting groove 41 and the second mounting groove 42 together form the mounting space 40.

[0045] Further, in some embodiments, as shown in FIG4, the first mounting groove 41 includes a main groove 41a and a secondary groove 41b. The secondary groove 41b is disposed on the outer periphery of the main groove 41a and is connected to the main groove 41a. The second mounting groove 42 is connected to the main groove 41a.

[0046] In some embodiments, a stepped structure 214 is formed at the connection position between the first end of the second receiving portion 212 and the second end of the first receiving portion 211. A guide hole 213 is also provided on the first receiving portion 211 along the second direction. The guide hole 213 communicates with the interior of the first receiving portion 211 and is located on the stepped structure 214. In other words, as shown in FIG4, one end of the guide hole 213 extends to the bottom of the sub-groove 41b, and the other end of the guide hole 213 extends to the outer surface of the second end of the first receiving portion 211. At the same time, the axial direction of the guide hole 213 is arranged along the second direction.

[0047] Furthermore, in some embodiments, a positioning post 27 is provided inside the second housing 21. The positioning post 27 is arranged along the second direction, with its first end connected to the bottom of the second mounting groove 42 and its second end extending to the opening (mounting port 411) of the first mounting groove 41. There are two positioning posts 27, which are spaced apart inside the second receiving portion 212, forming a limiting space between adjacent positioning posts 27 for mounting the second driving member 22.

[0048] As shown in Figures 4 and 5, in this embodiment, the second driving member 22 is a cylinder. The second driving member 22 is disposed in the second mounting groove 42 and located within the limiting space formed by the two positioning posts 27. The piston rod 221 of the cylinder faces the mounting port 411 and is fixedly connected to the connecting plate 23, thereby driving the connecting plate 23 to move along the second direction through the piston rod 221 of the cylinder.

[0049] The connecting plate 23 is movably disposed in the first mounting groove 41 along the second direction. In some embodiments, the connecting plate 23 includes a plate body 23a and a connecting arm 23b. The connecting arm 23b is disposed on the outer periphery of the plate body 23a. The plate body 23a is located in the main groove 41a, and the connecting arm 23b is located in the secondary groove 41b. The plate body 23a is drivenly connected to the second driving member 22, and the connecting arm 23b is connected to the guide shaft 24.

[0050] Specifically, as shown in Figure 5, the plate body 23a of the connecting plate 23 is fixedly connected to the piston rod 221 of the cylinder. The plate body 23a of the connecting plate 23 is also provided with a positioning hole 231. The positioning pin 27 is located within the positioning hole 231, and the connecting plate 23 is movable relative to the positioning pin 27, so that positioning and guidance are achieved through the cooperation of the positioning pin 27 and the positioning hole 231. When installing the connecting plate 23, the positioning hole 231 needs to be aligned with the positioning pin 27 before the connecting plate 23 can be installed in the first mounting groove 41.

[0051] As shown in Figure 5, the guide shaft 24 passes through the guide hole 213 and is movable relative to the second housing 21 in the second direction. As shown in Figure 3, the first end of the guide shaft 24 is located in the sub-groove 41b of the first mounting groove 41 and is fixedly connected to the connecting plate 23. As shown in Figure 5, the second end of the guide shaft 24 is located outside the second housing 21. Referring to Figures 1 and 5, the mounting base 25 is disposed at the second end of the guide shaft 24, and the connecting part 30 is disposed on the mounting base 25. The mounting base 25 is movable in the second direction under the drive of the guide shaft 24.

[0052] It should be noted that, as shown in Figure 6, the mounting base 25 has a through mounting hole 251 along the first direction, and the connecting part 30 is disposed through the mounting hole 251 and moves within the mounting hole 251 along the first direction. This allows the connecting part 30 to be relatively movable relative to the mounting base 25 in the first direction; and in the second direction, the connecting part 30 and the mounting base 25 are relatively fixed, so that the mounting base 25 drives the connecting part 30 to move along the second direction.

[0053] It should also be noted that, in order to ensure the stability of the movement of the connecting part 30, as shown in Figure 2, a positioning sleeve 28 and a locking nut 29 are provided in the mounting hole 251. The positioning sleeve 28 is located between the connecting part 30 and the mounting hole 251, and the locking nut 29 is installed on the positioning sleeve 28, thereby preventing the connecting part 30 from shaking in the mounting hole 251.

[0054] In some embodiments, the guide shaft 24 and the second housing 21 are sealed together. For example, as shown in FIG7, a sealing ring is provided between the guide shaft 24 and the guide hole 213 to ensure the sealing of the installation space 40. In order to ensure the smooth movement of the guide shaft 24 in the second direction, a buffer ring 26 is provided on the guide shaft 24, and the buffer ring 26 is located between the guide shaft 24 and the inner wall of the guide hole 213.

[0055] In this embodiment, as shown in Figures 5 and 6, there are two connecting rods 31, which are spaced apart to ensure that the door body 70 is subjected to uniform force and operates more stably. Correspondingly, there are two guide holes 213 and two guide shafts 24, and the second receiving part 212 is located between the two guide shafts 24. This arrangement not only facilitates the installation of the second housing 21, but also makes full use of the space between the two connecting rods 31 to accommodate the second housing 21. It makes full use of the space in the already narrow process cavity, thereby realizing horizontal movement, improving the sealing effect of the door body 70, and effectively avoiding the door body 70 from rubbing against the inner lining structure 60.

[0056] In addition, by setting the positioning post 27, not only can the cylinder be limited, which facilitates the installation and fixing of the cylinder, but also the positioning post 27 and the positioning hole 231 can facilitate the positioning of the connecting plate 23 during assembly. Moreover, the parallel arrangement of the two positioning posts 27 can ensure that the assembly angle of the connecting plate 23 is perpendicular to the second direction, so as to ensure that the position of the guide shaft 24 connected to both sides of the connecting plate 23 is consistent, thereby ensuring that the position of the two connecting rods 31 is consistent, and finally ensuring the tightness of the fit between the door body 70 and the inner lining structure 60. It is a typical example of one thing serving multiple purposes.

[0057] In some embodiments, the first driving device 10 includes: a first driving member 13, which is movably disposed along a first direction, and a first sliding portion 14 is disposed on the first driving member 13; further, in some embodiments, in order to realize that the connecting portion 30 is movable relative to the first driving member 13, as shown in FIG10, a second sliding portion 321 is disposed on the connecting portion 30 (e.g., connecting rod 31), the first sliding portion 14 and the second sliding portion 321 are engaged in an upper limit engagement in the first direction, and the first sliding portion 14 and the second sliding portion 321 are engaged in a sliding engagement in the second direction, so that the first driving member 13 drives the connecting portion 30 (e.g., connecting rod 31) to move along the first direction, and the connecting portion 30 (e.g., connecting rod 31) slides relative to the first driving member 13 in the second direction.

[0058] Specifically, in this embodiment, as shown in FIG8, the first sliding part 14 is a slide rail arranged along the second direction, and the second sliding part 321 is a slide groove that matches the first sliding part 14. The slide rail is fixedly arranged on the first driving member 13 along the second direction. To ensure stability, as shown in FIG10, there are two slide rails arranged at intervals. Of course, in practical applications, the first sliding part 14 can also be a slide groove arranged along the second direction, and the second sliding part 321 can be a slide rail that matches the first sliding part 14.

[0059] In some embodiments, as shown in Figures 1 and 8, the door drive mechanism further includes a first connecting member 11. The first connecting member 11 is used to connect a support. The first connecting member 11 and the connecting part 30 (e.g., the connecting rod 31) are slidably engaged in a first direction, and the first connecting member 11 and the connecting part 30 (e.g., the connecting rod 31) are slidably engaged in a second direction. Specifically, the first connecting member 11 is provided with an elongated hole 111 extending along the first direction. The connecting part 30 (e.g., the connecting rod 31) passes through the elongated hole 111. The radial length direction of the elongated hole 111 is arranged along the second direction. The connecting part 30 and the elongated hole 111 are slidably engaged in the first direction. The connecting part 30 and the elongated hole 111 are slidably engaged in the second direction. The connecting part 30 and the elongated hole 111 are sealed together.

[0060] It should be noted that, in this embodiment, as shown in Figures 1, 8 and 9, the first connecting member 11 is a mounting plate. The mounting plate is provided with an elongated hole 111 that runs through the mounting plate along a first direction (the up and down direction in Figure 1) (see Figure 9). The connecting part 30 passes through the elongated hole 111. The radial length direction of the elongated hole 111 is set along a second direction (the up and down direction in Figure 9). The connecting part 30 and the elongated hole 111 slide in the first direction, thereby allowing the connecting part 30 to move under the drive of the first driving member 13. The connecting part 30 and the elongated hole 111 slide in the second direction, that is, the whole can move left and right in Figure 1, thereby allowing the connecting part 30 to move under the drive of the second driving member 22. The connecting part 30 and the elongated hole 111 are sealed together so that after the mounting plate is assembled onto the process chamber, the process gas can be prevented from leaking from the elongated hole 111. Preferably, as shown in Figures 1 and 8, the connecting part 30 and the elongated hole 111 are sealed by a bellows, which can take into account both sealing and movement.

[0061] Further, in some embodiments, the first drive device 10 further includes a bracket 12. As shown in FIG10, the first connector 11 is fixed to the first end of the bracket 12, for example, by bolts.

[0062] As shown in Figure 12, when assembled onto the process chamber, the first connector 11 is connected to the chamber body 50. The bottom of the chamber body 50 is provided with an opening, and the outer cavity 52 communicates with the outside through the opening. The first connector 11 is installed at the opening position of the chamber body 50, and the bracket 12 is fixedly connected to the chamber body 50 through the first connector 11.

[0063] The connecting rod 31 of the connecting part 30 is simultaneously inserted on the first connecting member 11 and the chamber body 50. The first connecting member 11 and the connecting part 30 are slidably engaged in the first direction, and the first connecting member 11 and the connecting part 30 are slidably engaged in the second direction.

[0064] Further, in some embodiments, as shown in FIG10, the first driving device 10 further includes: a sliding mechanism 16 and a servo motor 17, wherein the servo motor 17 is fixed on the second end of the bracket 12, the sliding mechanism 16 is installed on the bracket 12 between the first end and the second end of the bracket 12, the servo motor 17 is drivenly connected to the sliding mechanism 16, and the first driving member 13 is fixedly connected to the sliding mechanism 16. That is, the first driving member 13 is movably disposed on the bracket 12 through the sliding mechanism 16, and the connecting part 30 (e.g., connecting rod 31) is disposed on the first driving member 13. The first driving member 13 is used to drive the connecting part 30 to move along the first direction, and the connecting part 30 is movable along the second direction on the first driving member 13.

[0065] In use, the sliding mechanism 16 is driven by the servo motor 17, causing the sliding mechanism 16 to move the first driving member 13 between the first and second ends of the bracket 12. The moving first driving member 13 causes the connecting part 30 to move in the first direction. After moving to the preset position, under the drive of the second driving device 20, the connecting part 30 can move along the second direction on the first driving member 13, so as to drive the door body 70 to move in the second direction.

[0066] After being assembled onto the process chamber, the servo motor 17 drives the sliding mechanism 16, causing the sliding mechanism 16 to move the first driving member 13. The moving first driving member 13 causes the connecting part 30 to move in the first direction, thereby causing the connecting part 30 to move the door body 70 between the positions shown in Figure 13 and Figure 14. When the first driving member 13 moves to the first end of the bracket 12, the connecting part 30 moves the door body 70 to the position shown in Figure 13. At this time, under the drive of the second driving device 20, the connecting part 30 can move along the second direction on the first driving member 13, so as to move the door body 70 along the second direction to the position shown in Figure 12, closing the transfer notch 61.

[0067] The connecting part 30 includes a connecting rod 31 and a sliding plate 32. For example, there are two connecting rods 31. The first ends of both connecting rods 31 are fixedly connected to the door body 70, and the second ends of both connecting rods 31 are fixedly connected to the sliding plate 32. That is, the sliding plate 32 is fixedly connected to the second ends of the connecting rods 31. The sliding plate 32 is movably mounted on a slide rail in a second direction. Furthermore, the sliding plate 32 is provided with a slide groove, and the slide rail is located within the slide groove and slides in cooperation with it. In other words, the sliding plate 32 is movably mounted on the first driving member 13 via the slide rail, while the connecting rods 31 are fixedly connected to the sliding plate 32, thereby achieving movement relative to the first driving member 13 in the second direction. This method ensures that the two connecting rods 31 move synchronously, guaranteeing the smooth movement of the door body 70. Further, in this embodiment, the slide rail has a T-shaped cross-section.

[0068] It should be noted that in this embodiment, the first sliding part 14 is a slide rail disposed on the first driving member 13 along the second direction, and the second sliding part 321 is a slide groove disposed on the sliding plate 32 that cooperates with the first sliding part 14. However, this is not limiting. In some other embodiments not shown in the figure, the first sliding part 14 can also be a slide groove, and the second sliding part 321 can be a slide rail. As long as the structure can realize the upper limit cooperation between the first sliding part 14 and the second sliding part 321 in the first direction and the sliding cooperation between the first sliding part 14 and the second sliding part 321 in the second direction, it is within the protection scope of this application.

[0069] To facilitate obtaining the position of the door 70, as shown in Figure 8, the first driving device 10 further includes a detection device 15. The detection device 15 is mounted on the bracket 12 and is used to detect the position of the first driving member 13, so as to indirectly obtain the position of the door 70. Specifically, referring to Figure 11, the detection device 15 is an optical sensor, which has a transmitter 151 and a receiver 152 arranged opposite to each other, forming a detection space between the transmitter 151 and the receiver 152. A blocking member 131 is provided on the first driving member 13. When the first driving member 13 moves to the position corresponding to the detection device 15, the blocking member 131 is located within the detection space, thereby realizing the detection of the position of the first driving member 13, and thus indirectly obtaining the position of the door 70.

[0070] It should be noted that, in this embodiment, as shown in FIG8, there are two detection devices 15, which are respectively arranged at intervals on the bracket 12. The two detection devices 15 correspond to the upper limit position and lower limit position of the first driving member 13 moving in the first direction, that is, the two extreme positions of the door body 70 in the first direction. However, this is not limiting. In some other embodiments not shown in the figure, the detection device 15 can be arranged only at the position close to the first end of the bracket 12, so that the detection device 15 can detect whether the first driving member 13 is at the upper limit position of the stroke in the first direction. At this time, the position corresponding to the door body 70 is the same as the height of the transmission notch, thereby facilitating the control of the movement of the second driving device 20.

[0071] As shown in Figures 12 to 14, this application also discloses a process chamber, including: a chamber body 50, an inner liner structure 60, a door 70, and the aforementioned door drive mechanism. The inner liner structure 60 is disposed within the chamber body 50, dividing the chamber body 50 into an inner cavity 51 and an outer cavity 52. ​​The inner liner structure 60 has a wafer transfer notch 61 that connects the inner cavity 51 and the outer cavity 52. ​​The door 70 is movably disposed within the outer cavity 52 and is used to open and close the wafer transfer notch 61. The door drive mechanism is drivenly connected to the door 70 to drive the door 70 to open and close the wafer transfer notch 61.

[0072] The process cavity provided in this application drives the door 70 by connecting the door drive mechanism provided in this application to the door 70, thereby enabling the door 70 to move laterally (i.e., in the second direction), so that the door 70 abuts against the inner lining structure 60 to achieve sealing or to separate the door 70 from the inner lining. While ensuring the sealing effect of the door 70, it also effectively avoids the door 70 from rubbing against the inner lining.

[0073] In some embodiments, as shown in Figures 12 and 13, the door 70 has a first position, a second position and a third position.

[0074] As shown in Figure 12, in the first position, the door 70 is located at the position of the transfer notch 61, and the transfer notch 61 is closed.

[0075] As shown in Figure 13, in the second position, the door body 70 is located in the second direction away from the notch 61 of the transfer plate, and an movable gap is formed between the door body 70 and the outer wall of the inner lining structure 60.

[0076] As shown in Figure 14, in the third position, the door body 70 is located at the position of the clearance notch 61 in the first direction; the first driving device 10 is used to drive the door body 70 to move between the second position and the third position; the second driving device 20 is used to drive the door body 70 to move between the first position and the second position.

[0077] In some embodiments, the process cavity provided in this application further includes a control device, which is electrically connected to the detection device 15, the servo motor 17 and the second drive device 20 respectively. The control device is used to control the second drive device 20 to drive the door body 70 to switch between the first position and the second position according to the position of the first drive member 13.

[0078] In some embodiments, as shown in Figures 15 and 16, the inner lining structure 60 has a first mating end face 62, and the transfer notch 61 is located on the first mating end face 62; the door body 70 has a second mating end face 71, and at a first position of the door body 70, the second mating end face 71 covers the first mating end face 62 and closes the transfer notch 61.

[0079] In some embodiments, as shown in Figures 17 and 18, an induction coil 80 is provided on the second mating end face 71 of the door body 70. In the first position of the door body 70, the induction coil 80 is pressed against the inner lining structure 60. By providing the induction coil 80, in the first position of the door body 70, the induction coil 80 is pressed against the inner lining structure 60, making the inner lining structure 60 and the door body 70 conductive, thereby constructing a completely closed radio frequency environment.

[0080] In some embodiments, as shown in FIG19, a receiving groove 621 is provided on the first mating end face 62. As shown in FIG20, in the first position of the door body 70, the induction coil 80 is located in the receiving groove 621, and at the same time, the induction coil 80 abuts against the bottom of the receiving groove 621. By providing a receiving groove 621 on the first mating end face 62, when the door body 70 is in the first position, the induction coil 80 is located in the receiving groove 621, and at the same time, the induction coil 80 abuts against the bottom of the receiving groove 621, which can ensure that the first mating end face 62 and the second mating end face 71 fit together, thereby improving the sealing effect.

[0081] In some embodiments, as shown in Figures 17 and 18, the second mating end face 71 of the door body 70 is provided with a boss structure 72, and the induction coil 80 is disposed on the outer periphery of the boss structure 72; as shown in Figure 19, the inner lining structure 60 also has a sealing channel 63, the first end of the sealing channel 63 extends to the first mating end face 62 to form a transfer notch 61, and the second end of the sealing channel 63 communicates with the inner cavity 51; as shown in Figure 20, at the first position of the door body 70, the boss structure 72 is located in the sealing channel 63, and the protruding end surface of the boss structure 72 is flush with the inner wall surface of the inner cavity 51 so that a complete symmetrical space is formed inside the inner cavity 51; a first sealing gap 91 is formed between the outer peripheral wall of the boss structure 72 and the inner wall of the sealing channel 63 (see Figure 16). The first sealing gap 91 is formed by setting the boss structure 72 and the sealing channel 63. The first sealing gap 91 can prevent the inner lining structure 60 from colliding with the door body 70 and forming particulate matter to contaminate the wafer. On the other hand, it can block the passage of plasma in the process gas, thereby protecting the induction coil 80.

[0082] As shown in Figure 16, from the first end to the second end of the sealing channel 63, the distance between the relatively disposed inner walls of the sealing channel 63 gradually decreases, and the boss structure 72 is a wedge-shaped boss that matches the sealing channel 63. That is to say, the inner wall of the sealing channel 63 is inclined. In this embodiment, the distance between the outer peripheral wall of the boss structure 72 and the inner wall of the sealing channel 63 is d, and the value of d ranges from 0.5 to 1.3 mm. The inner wall of the sealing channel 63 forms an angle α with the tangent of the arc at this position, and the value of α ranges from 30° to 60°, thereby increasing the gap depth-to-width ratio and achieving the purpose of annihilating plasma.

[0083] Referring to Figures 16 to 20, an annular protrusion 73 is provided on the second mating end face 71 of the door body 70 along the outer periphery of the boss structure 72, and the annular protrusion 73 is located inside the induction coil 80; an annular groove 622 is provided on the first mating end face 62 of the liner structure 60, and the annular protrusion 73 is located in the annular groove 622, and a second sealing gap 92 is formed between the annular protrusion 73 and the annular groove 622. The first sealing gap 91 and the second sealing gap 92 communicate to form a labyrinth sealing structure 90. By setting the first sealing gap 91 and the second sealing gap 92, and making the first sealing gap 91 and the second sealing gap 92 communicate to form a labyrinth sealing structure 90, the travel distance of the process gas to the induction coil 80 can be increased, the flow resistance can be increased, and the difficulty of the process gas reaching the induction coil 80 can be increased. At the same time, the probability of annihilation plasma can be increased, and the induction coil 80 can be better protected.

[0084] As shown in Figures 13 and 19, in the second position of the door body 70, the boss structure 72 disengages from the sealing channel 63, so that an movable gap is formed between the door body 70 and the outer wall of the inner lining structure 60; the second driving device 20 drives the door body 70 to move so that the boss structure 72 enters or disengages from the sealing channel 63.

[0085] To ensure that the door body 70 can be pressed tightly and that the induction coil 80 is compressed to a certain extent (compression amount between 20% and 25%), and since the boss structure 72 needs to enter the sealing channel 63 to keep the first sealing gap 91 at 0.5~1.3mm, it is necessary to improve the fitting accuracy between the door body 70 and the inner lining structure 60. Therefore, the traditional door structure is split into a first drive device 10 that drives the door body 70 to move in the first direction and a second drive device 20 that drives the door body 70 to move in the second direction. The servo motor 17 of the first drive device 10 is used to precisely control the lifting height of the door body 70 in the first direction; the added second drive device 20 can ensure that the door body 70 moves smoothly in the second direction while pressing the induction coil 80 on the arc surface, ensuring the integrity of the radio frequency circuit, and thus improving the process uniformity.

[0086] This application also discloses a semiconductor manufacturing apparatus, including at least one of the above-described manufacturing chambers. By providing a second driving device 20, the door 70 can be moved laterally, thereby pressing the door 70 onto the inner liner structure 60 to achieve a seal or separating the door 70 from the inner liner structure 60. While ensuring the sealing effect of the door 70, it also effectively avoids the door 70 rubbing against the inner liner structure 60.

[0087] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of this application, and this application is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this application, and these modifications and improvements are also considered to be within the protection scope of this application. [Simplified Explanation of the Diagram]

[0032] In the accompanying drawings: Figure 1 is a structural schematic diagram of the door drive mechanism according to Embodiment 1 of this application; Figure 2 is a structural schematic diagram of the second drive device of the door drive mechanism according to Embodiment 1 of this application; Figure 3 is a front view of the second drive device of the door drive mechanism according to Embodiment 1 of this application; Figure 4 is a cross-sectional view of the second housing of the second drive device of the door drive mechanism according to Embodiment 1 of this application along the AA direction; Figure 5 is a cross-sectional view of the entire second drive device of the door drive mechanism according to Embodiment 1 of this application along the AA direction; Figure 6 is a cross-sectional view of the entire second drive device of the door drive mechanism according to Embodiment 1 of this application along the BB direction; Figure 7 is a partial enlarged view of part A in Figure 5; Figure 8 is a structural schematic diagram of the first drive device of the door drive mechanism according to Embodiment 1 of this application; Figure 9 is a top view of the first connecting member of the first drive device of the door drive mechanism according to Embodiment 1 of this application; Figure 10 is a front view of the first drive device of the door drive mechanism according to Embodiment 1 of this application; Figure 11 is a cross-sectional view of the top view of the first drive device of the door drive mechanism according to Embodiment 1 of this application; Figure 12 is a structural schematic diagram of the process cavity door in the first position according to Embodiment 1 of this application; Figure 13 is a structural schematic diagram of the process cavity door in the second position according to Embodiment 1 of this application; Figure 14 is a structural schematic diagram of the process cavity door in the third position according to Embodiment 1 of this application; Figure 15 is a schematic diagram of the inner lining structure of the process cavity and the door body cooperating in Embodiment 1 of this application; Figure 16 is a partial enlarged view of part C in Figure 15; Figure 17 is a structural schematic diagram of the door body of the process cavity according to Embodiment 1 of this application; Figure 18 is a partial enlarged view of part D in Figure 17; Figure 19 is a partial enlarged view of part B in Figure 14; Figure 20 is a structural schematic diagram of the boss structure of the process cavity and the sealing channel cooperating in Embodiment 1 of this application.

Claims

1. A door drive mechanism, wherein, include: A first driving device; A second driving device; a connecting portion for connecting to a door body and drivingly connected to the first driving device and the second driving device, the first driving device for driving the connecting portion to move along a first direction, so that the connecting portion drives the door body to move along the first direction; and the second driving device for driving the connecting portion to move along a second direction, the second direction intersecting the first direction, so that the connecting portion drives the door body to move relative to the first driving device along the second direction, wherein the first driving device includes: a first driving member movably disposed along the first direction, the first driving member having a first sliding portion disposed thereon; the connecting portion having a second sliding portion disposed thereon, the first sliding portion and the second sliding portion being in upper limit engagement in the first direction, and the first sliding portion and the second sliding portion being in sliding engagement in the second direction, so that the first driving member drives the connecting portion to move along the first direction, and the connecting portion sliding relative to the first driving member in the second direction.

2. The door drive mechanism as described in claim 1, wherein, The first driving device further includes: a bracket, on which the first driving member is movably mounted along the first direction; and a detection device mounted on the bracket, which is used to detect the position of the first driving member.

3. The door drive mechanism as described in claim 1 or 2, wherein, The connecting part includes: a connecting rod, the first end of which is connected to the door body; a sliding plate, which is fixedly connected to the second end of the connecting rod, and the sliding plate is provided with the second sliding part; wherein, the first sliding part is a slide rail or slide groove arranged along the second direction, and the second sliding part is a slide groove or slide rail that matches the first sliding part.

4. The door drive mechanism as described in claim 2, wherein, The second driving device includes: a second housing having a mounting opening and a mounting space communicating with the mounting opening, the second housing being used to be mounted on a support and the mounting opening being closed by the support; and a second driving member disposed within the mounting space for providing driving force in the second direction to drive the connecting portion to move along the second direction.

5. The door drive mechanism as described in claim 4, wherein, The second driving device further includes a transmission assembly connected between the second driving member and the connecting portion. The transmission assembly includes: a connecting plate movably disposed within the mounting space, the connecting plate being drivenly connected to the second driving member; a guide shaft passing through the second housing, the axis of the guide shaft being disposed along the second direction and movable relative to the second housing in the second direction, the first end of the guide shaft being located within the mounting space and fixedly connected to the connecting plate, and the second end of the guide shaft being located outside the second housing; a mounting seat is provided at the second end of the guide shaft, the connecting portion being disposed on the mounting seat, and the mounting seat being movable along the second direction under the drive of the guide shaft; wherein, in the first direction, the connecting portion and the mounting seat are movable relative to each other; in the second direction, the connecting portion and the mounting seat are fixed relative to each other, so that the mounting seat drives the connecting portion to move along the second direction.

6. The door drive mechanism as described in claim 5, wherein, The second housing includes: a first receiving portion having a first end and a second end disposed opposite to each other along a second direction, the first end of the first receiving portion being used to connect with the support, and the first end of the first receiving portion being provided with the mounting port; a second receiving portion having a first end and a second end disposed opposite to each other along a second direction, the first end of the second receiving portion being connected to the second end of the first receiving portion; the interior of the first receiving portion communicating with the interior of the second receiving portion and forming the mounting space; a connecting plate being movably disposed within the first receiving portion along the second direction; and a second driving member being disposed within the second receiving portion.

7. The door drive mechanism as described in claim 6, wherein, The connection between the first end of the second receiving part and the second end of the first receiving part forms a stepped structure. The first receiving part is provided with a guide hole communicating with its interior along the second direction. The guide hole is located on the stepped structure, and the guide shaft is movably inserted into the guide hole along the second direction.

8. The door drive mechanism as described in claim 6, wherein, The connecting plate includes a plate body and a connecting arm. The connecting arm is disposed on the outer periphery of the plate body. The plate body is driven to be connected to the second driving member, and the connecting arm is connected to the guide shaft.

9. The door drive mechanism as described in claim 8, wherein, The first receiving portion is provided with a first mounting groove. The opening of the first mounting groove is located on the surface of the first end of the first receiving portion, forming the mounting opening. The bottom of the first mounting groove is located at the second end of the first receiving portion. The first mounting groove includes a main groove body and a secondary groove body, with the secondary groove body disposed on the outer periphery of the main groove body. The second receiving portion is provided with a second mounting groove. The opening of the second mounting groove is located at the bottom of the first mounting groove and communicates with the main groove body. The bottom of the second mounting groove is located at the second end of the second receiving portion. The first mounting groove and the second mounting groove together form the mounting space. The plate body is located in the main groove body, and the connecting arm is located in the secondary groove body.

10. The door drive mechanism as described in claim 5, wherein, The guide shaft is sealed to the second housing.

11. The door drive mechanism as described in claim 6, wherein, The second housing is provided with a positioning post, which is arranged along the second direction; the connecting plate is provided with a positioning hole, the positioning post is located in the positioning hole, and the connecting plate is movable relative to the positioning post, so as to perform positioning and guidance by cooperating with the positioning post and the positioning hole.

12. The door drive mechanism as described in claim 11, wherein, There are two positioning posts, which are spaced apart within the second receiving portion, and a limiting space is formed between two adjacent positioning posts for installing the second driving member.

13. The door drive mechanism as described in claim 5, wherein, The connecting part includes a connecting rod, and the mounting base is provided with a through mounting hole along the first direction. The connecting rod passes through the mounting hole, and the connecting part is movable along the first direction within the mounting hole.

14. The door drive mechanism as described in any one of claims 1, 2, 4 to 13, wherein, The door drive mechanism further includes: a first connector for connecting to a support, the first connector having an elongated hole extending along a first direction, the connecting portion passing through the elongated hole, the length direction of the elongated hole being along a second direction; the connecting portion slidingly engaging with the elongated hole in the first direction; the connecting portion slidingly engaging with the elongated hole in the second direction; and a sealing fit between the connecting portion and the elongated hole.

15. A door drive mechanism, wherein, include: A first driving device; A second driving device; a connecting portion for connecting to a door body and drivingly connected to the first driving device and the second driving device, the first driving device for driving the connecting portion to move along a first direction, so that the connecting portion drives the door body to move along the first direction; and the second driving device for driving the connecting portion to move along a second direction, the second direction intersecting the first direction, so that the connecting portion drives the door body to move relative to the first driving device along the second direction, wherein the door body driving mechanism further includes: a first connecting member for connecting to a support, the first connecting member having an elongated hole extending along the first direction, the connecting portion passing through the elongated hole, the length direction of the elongated hole being arranged along the second direction; the connecting portion and the elongated hole slidingly engaging in the first direction; the connecting portion and the elongated hole slidingly engaging in the second direction; and the connecting portion and the elongated hole sealingly engaging.

16. A process chamber, wherein, include: One-chamber body; A liner structure is disposed within the chamber body, the liner structure dividing the chamber body into an inner cavity and an outer cavity, the liner structure having a transfer notch communicating the inner cavity and the outer cavity; a door body is movably disposed within the outer cavity, the door body being used to open and close the transfer notch; a door body drive mechanism according to any one of claims 1 to 15 is driven connected to the door body to drive the door body to open and close the transfer notch.

17. The process chamber as described in claim 16, wherein, The door has a first position, a second position, and a third position; in the first position, the door is located at the notch of the transmission piece, closing the notch; in the second position, the door is located away from the notch of the transmission piece in a second direction, forming an movable gap between the door and the outer wall of the inner lining structure; in the third position, the door is located in the first direction, avoiding the notch of the transmission piece; a first driving device is used to drive the door to move between the second and third positions; a second driving device is used to drive the door to move between the first and second positions.

18. The process chamber as claimed in claim 17, wherein, The inner lining structure has a first mating end face, and the notch for the transmission piece is located on the first mating end face; the door body has a second mating end face, and at the first position of the door body, the second mating end face covers the first mating end face and closes the notch for the transmission piece.

19. The process chamber as claimed in claim 18, wherein, An induction coil is provided on the second mating end face of the door body. At the first position of the door body, the door body abuts the induction coil against the inner lining structure.

20. The process chamber as claimed in claim 19, wherein, A receiving groove is provided on the first mating end face. At the first position of the door body, the induction coil is located in the receiving groove and abuts against the bottom of the receiving groove.

21. The process chamber as described in claim 19, wherein, The second mating end face of the door body is provided with a boss structure, and the induction coil is disposed on the outer periphery of the boss structure; the inner lining structure also has a sealing channel, the first end of the sealing channel extends to the first mating end face to form the notch of the transmission plate, and the second end of the sealing channel communicates with the inner cavity; when the door body is in the first position, the boss structure is located in the sealing channel, and the protruding end surface of the boss structure is flush with the inner wall surface of the inner cavity, so that the inner cavity forms a complete symmetrical space; a first sealing gap is formed between the outer peripheral wall of the boss structure and the inner wall of the sealing channel.

22. The process chamber as claimed in claim 21, wherein, From the first end to the second end of the sealing channel, the distance between the relatively disposed inner walls of the sealing channel gradually decreases, and the boss structure is a wedge-shaped boss that matches the sealing channel.

23. The process chamber as claimed in claim 21, wherein, At least one annular protrusion is provided on the second mating end face of the door body along the outer periphery of the boss structure, and the annular protrusion is located inside the induction coil; at least one annular groove is provided on the first mating end face of the liner structure, the annular protrusion is located in the corresponding annular groove, and a second sealing gap is formed between the annular protrusion and the annular groove.

24. The process chamber as claimed in claim 21, wherein, When the door is in the second position, the boss structure disengages from the sealing channel, thereby creating the movable gap between the door and the outer wall of the inner lining structure; the second drive device drives the door to move, causing the boss structure to enter or leave the sealing channel.

25. A semiconductor manufacturing apparatus, wherein, include: At least one process chamber according to any one of claims 16 to 24.

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