Valve plate and vacuum valve

Abstract

A valve plate has a plate section (1) and at least one longitudinally extending connecting section (5), on the front side of the plate section, a seal (2) made of an elastomeric material is mounted thereon, the connecting section being separated from the plate section by a slit (6), the connecting section being used to secure the valve plate to at least one valve stem (8). Viewed from a plan view of the back side of the plate section (1), the extension of the connecting section (5) in the width direction (4) is bounded by first and second opposing side edges (5a, 5b) of the connecting section (5). A connecting structure (5c) is formed in the central region of the longitudinal extension of the first side edge (5a) of the connecting section (5) for connecting the connecting section (5) to the end section of the valve stem (8) in the connecting section (5). The connecting section is reinforced in its extension region in the width direction (4) adjacent to the second side edge (5b) relative to its extension region in the width direction (4) adjacent to the first side edge (5a).

Description

Technical Field

[0001] The present invention relates to a valve plate having a plate segment on which a seal made of an elastomeric material is mounted on the front side, and the plate segment having a longitudinal extension in a longitudinal direction greater than a width extension in a width direction perpendicular to the longitudinal direction. The valve plate also has at least one longitudinally extending connecting segment for securing the valve plate to at least one valve stem. The at least one connecting segment is connected to a back side of the plate segment opposite to the front side at two ends spaced apart from each other in the longitudinal direction. In the case of a slit formed between the plate segment and the connecting segment, the at least one connecting segment is spaced apart from the plate segment in a region between its two ends. Viewed from a plan view of the back side of the plate segment, the width extension of the at least one connecting segment is bounded by a first and a second side edge of the connecting segment opposite to each other. A connecting structure is formed in the central region of the longitudinal extension of the first side edge of the at least one connecting segment for connecting the connecting segment to an end of the valve stem protruding from the first side edge of the connecting segment within the connecting segment. Prior Technology

[0002] A valve plate suspension device on a valve stem is known, wherein the valve stem has a joint that allows the valve plate to pivot about an axis perpendicular to the valve stem. This allows for more uniform compression of the seals arranged on the front side of the valve plate in the closed state of the vacuum valve, compensating for structural tolerances and elastic deformations, particularly the slight bending of the valve stem in the closed state. However, hinged connections within the vacuum region of the vacuum valve are undesirable because they generate particles during relative surface movement.

[0003] US 2011 / 0108750 A1 discloses a valve plate of the type described at the beginning. On the back side of a plate section of the valve plate—and on the front side of the plate section—a seal made of an elastomeric material is arranged a longitudinally extending connecting section, which connects to the plate section at both ends. Between the two ends, the connecting section is spaced apart from the plate section, and a connecting structure is provided at the longitudinal center of the connecting section for connecting the connecting section to one end of a valve stem, wherein one end of the valve stem is inserted into a groove in the connecting section and screwed therein. A certain degree of pivoting of the valve plate relative to the valve stem is achieved by the elastic deformation of the connecting section in the form of torsion. Summary of the Invention

[0004] The objective of this invention is to provide an advantageous valve plate of the type described at the beginning, wherein the compression uniformity of the elastomeric seal is improved in the closed state of the vacuum valve. According to the invention, this is achieved by a valve plate having the features of claim 1.

[0005] According to the invention, at least one connecting section is reinforced in its width-direction extension region adjacent to the second side edge relative to its width-direction extension region adjacent to the first side edge. The second side edge is opposite to the first side edge in the width direction, wherein a connecting structure for connecting the connecting section to the end section of the valve stem is formed in the central region of the longitudinal extension of the first side edge. Therefore, in the state of connection with the valve stem, the valve stem protrudes from the connecting section at the first side edge of the connecting section. By reinforcing the connecting section in the region of the second side edge, at least the uneven compression of the seal caused by a certain degree of bending of at least one valve stem in the closed state of the vacuum valve can be reduced.

[0006] The reinforcement of the connecting section is advantageously achieved by the connecting section having a greater thickness in its extension region in the width direction adjacent to the second side edge than in its extension region in the width direction adjacent to the first side edge.

[0007] In an advantageous embodiment of the invention, the at least one connecting section has a plate-shaped connecting arm that extends from a corresponding end of the connecting section to its longitudinal center. To form the reinforcement, a reinforcing web protrudes from the connecting arm in the direction toward the plate section of the valve plate, preferably in the width extension region of the connecting arm adjacent to the second side edge, wherein, particularly preferably, the reinforcing web is located directly at the second side edge of the connecting section. Simple Explanation of the Diagram

[0008] The following explanation, based on the drawings, illustrates further advantages and details of the invention. In the drawings:

[0009] Figures 1 and 2 show oblique views of an embodiment of the valve plate according to the invention from different viewing directions;

[0010] Figures 3 and 4 show the front and rear views;

[0011] Figures 5 and 6 show side views of the narrow, longitudinally extending sides of the valve plates opposite each other;

[0012] Figures 7 and 8 show cross-sectional views along lines AA and BB in Figure 5;

[0013] Figures 9 and 10 show three-dimensional schematic diagrams of the valve plate cross-section from different viewing directions;

[0014] [Figure 11] shows a simplified illustration of a vacuum valve with a valve plate according to the invention, based on the embodiments shown in Figures 1 to 10;

[0015] [Figure 12] and [Figure 13] show cross-sectional views along lines CC and DD of Figure 11 (with the vacuum valve open);

[0016] [Figure 14] shows a cross-sectional view in a central position similar to that in Figure 12;

[0017] [Figure 15] shows a cross-sectional view similar to that in Figure 12 with the vacuum valve closed;

[0018] Figures 16 through 21 show illustrations similar to Figures 1 through 4 of a second embodiment of the present invention;

[0019] [Figure 22] shows a view similar to Figure 11, and

[0020] [Figure 23] and [Figure 24] show cross-sectional views of the second embodiment along the EE and FF lines of Figure 22. Implementation

[0021] An embodiment of the valve plate according to the invention is shown in Figures 1 to 10. The valve plate has a plate section 1 on which an annular seal 2 made of an elastomeric material is mounted, preferably at least substantially flat, on its front side. For example, the seal 2 can be vulcanized onto the plate section 1. An O-ring may also be provided that is received in a groove.

[0022] The length a of plate segment 1 is greater than the width b, preferably more than twice the width b. Therefore, plate segment 1 has a longitudinal extension in the longitudinal direction 3, which is greater than the width extension in the width direction 4 perpendicular to the longitudinal direction, preferably more than twice the width extension.

[0023] The thickness of section 1 is significantly less than the width b, preferably less than half the width b.

[0024] From the plan view of the front side of plate section 1, the plate section in this embodiment preferably has a rectangular outline with rounded corners.

[0025] To connect the valve plate to the valve stem, a longitudinally extending connecting section 5 is used. Therefore, the extension of the connecting section 5 in the longitudinal direction 3 is greater than the extension in the width direction 4. Preferably, the longitudinal extension of the connecting section 5 is more than twice the width extension.

[0026] The connecting section 5 is connected to the back side of the plate section 1, opposite to the front side, only at its two ends spaced apart from each other along the longitudinal direction 3. In this embodiment, longitudinally extending reinforcing ribs 1a are formed on the back side of the plate section 1, in which the plate section has a greater thickness and the reinforcing ribs are distributed along the longitudinal direction 3. The reinforcing ribs 1a form stepped ridges on the back side of the plate section 1. The two ends of the connecting section 5 are connected to the plate section 1 in the region of the reinforcing ribs 1a.

[0027] The reinforcing rib 1a can also be removed, so that the plate segment can also be constructed to be at least substantially flat on its back side. If desired, the plate segment can have a slightly greater overall thickness.

[0028] In the region between the two ends of the connecting section 5, the connecting section has a distance from the plate section 1, thereby forming a slit 6 between the plate section 1 and the connecting section 5.

[0029] Specifically, the connecting section 5 extends parallel to the longitudinal direction 3 with its longitudinal extension and extends into the middle region of the extension of the plate section in the width direction 4.

[0030] In this embodiment, plate segment 1 and connecting segment 5 are integrally constructed with the same material and form the metal substrate of the valve plate. Alternatively, a multi-part construction and material-fitting connection can also be provided. Thus, for example, connecting segment 5 can be constructed as a separate component, with its two ends welded to plate segment 1. It is also conceivable and possible to screw the two ends of connecting segment 5 to plate segment 1.

[0031] In the plan view of the back side of plate section 1 (=plan view of the back side of valve plate), the extension of connecting section 5 in the width direction 4 is limited by the first side edge 5a and the second side edge 5b, which are opposite to each other, see Figure 4. A connecting structure 5c is formed in the connecting section 5 in the central region of the longitudinal extension of the first side edge 5a. This connecting structure is used to connect to the end section of the valve stem. For this purpose, the connecting structure 5c is oriented in the width direction 4. In this embodiment, the connecting structure is constructed as a recess in the narrow side surface (=edge surface) of the connecting section 5 located at the first side edge 5a. The end section of the valve stem 8 is inserted into this recess. In Figure 4, a portion of the valve stem connected to the connecting section 5 is shown in dashed lines. A hole 5d is provided at the bottom of the recess, which extends to the narrow side surface (=edge surface) of the connecting section located at the second side edge 5b. A fastening screw 7 (also shown in dashed lines in Figure 4) can be screwed into the thread of the valve stem end through this hole. The valve stem 8, which is connected to the valve plate, protrudes from the connecting section 5 at the first side edge 5a, as can be seen from Figure 4.

[0032] The connecting section 5 has two plate-like connecting arms 5e and 5f, which extend from their respective ends to the longitudinal center of the connecting section and are connected to each other thereby by a thickened portion of the connecting structure 7, which is integrally connected in this embodiment. The thickness of the connecting arms 5e and 5f is therefore significantly less than their length and width.

[0033] In this embodiment, plate-shaped connecting arms 5e and 5f are located in planes 16 and 17, which form an angle of less than 20° with the positive side of plate segment 1 located in plane 15. The connecting arms 5e and 5f start from the corresponding ends of connecting segment 5 and move away from the positive side of plate segment 1 towards the longitudinal center of connecting segment (see Figure 5).

[0034] The connecting section 5 essentially has a reinforcing web 5g projecting from the plate-like connecting arms 5e and 5f in the direction toward the plate section 1. In this case, the reinforcing web 5g is located in the region of the connecting section adjacent to the second side edge 5b. In cross-section, referring to Figures 8, 9, and 10, the reinforcing web 5g is perpendicular to the connecting arms 5e and 5f. Therefore, the connecting section 5 is reinforced by the reinforcing web 5g in its extension region in the width direction adjacent to the second side edge 5b relative to its extension region in the width direction adjacent to the first side edge 5a. Thus, this reinforcement is located in the region of half of the extension of the connecting section 5 in the width direction 4, which is adjacent to the second side edge 5b, in this embodiment directly at the second side edge 5b.

[0035] In this embodiment, the reinforcing web 5g is located in a plane perpendicular to the plane 15 on the front side of the plate segment 1.

[0036] In a modified embodiment, the reinforcement of the connecting segment in the region adjacent to the second side edge 5b can also be formed in different ways, particularly by making the connecting segment 5 thicker in that region. For example, the connecting arms 5e and 5f can have steps extending in their longitudinal direction, thereby increasing the thickness of the connecting arms 5e and 5f in the region adjacent to the second side edge 5b relative to the region adjacent to the first side edge 5a.

[0037] A simplified partial schematic diagram of a vacuum valve having a valve plate according to the invention is shown in Figures 11 to 15. The valve plate is fixed to the valve stem 8 by means of fastening screws 7. The section of the valve plate adjacent to the valve stem 8 is located within the internal space of the valve housing 9. In the open state of the vacuum valve, the valve plate releases the valve port 10, thereby releasing the passage through the valve housing 9 between the valve port 10 and the opposing opening 11, see Figure 12. In the closed state of the vacuum valve, the valve port 10 is closed and sealed by the valve plate, see Figure 15.

[0038] The valve stem 8 is led out from the internal space of the valve housing 9 in a sealed manner, for example, by means of a bellows 12. To open and close the vacuum valve, the valve stem 8 is moved by means of a valve actuation device located outside the vacuum region. For this purpose, a longitudinal actuation device 13 and a transverse actuation device 14 are schematically shown in the figure. By means of the longitudinal actuation device 13, the valve stem 8 moves longitudinally from the open state of the vacuum valve until the valve plate is opposite the valve port 10, but still raised from the valve port 10, see Figure 14. From this intermediate position, the valve stem 8 and therefore the valve plate also move in a direction perpendicular to the longitudinal axis of the valve stem by means of the transverse actuation device 14, whereby the valve plate's seal 2 presses against the valve seat surrounding the valve port 10 inside the valve housing 9. This valve seat is formed by a sealing surface.

[0039] The vacuum valve having the valve plate according to the invention can also be constructed in a modified form. For example, in order to close the vacuum valve from the middle position, the valve stem 8 can also pivot about a swing axis perpendicular to the longitudinal axis of the valve stem.

[0040] The ends of the connecting structure and the valve stem that interact with the connecting structure can also have modified construction. A form-fitting anti-torsion device can also be formed between the connecting structure and the valve stem; for example, the valve stem can have a ridge extending in its longitudinal direction that engages with a corresponding groove in the wall forming the recess of the connecting structure.

[0041] When the valve plate presses against the valve seat, the valve stem 8 bends to a certain extent. In this case, the angular position of the valve plate relative to the valve seat can be adapted by the bending of the connecting section 5. This bending of the connecting section 5 is specifically a torsion of the connecting section. By reinforcing the connecting section 5 in the width direction 4 in the extended region adjacent to the second side edge 5b of the connecting section, it is possible to improve the compression of the longitudinal leg of the seal 2, which is located on the side of the valve plate away from the valve actuation device, compared to a structure without such a reinforced connecting section. Thus, the compression of the longitudinal leg of the seal 2 away from the valve actuation device can be adapted to the longitudinal leg of the seal 2 near the valve actuation device.

[0042] The reinforcement of the connecting section 5 of the valve plate is therefore located in the half extension of the connecting section 5 in the width direction 4, away from the valve drive device.

[0043] A second embodiment of the valve plate according to the invention is shown in Figures 16 to 21. The differences from the first embodiment are explained below. The rest can be described similarly using the description of the first embodiment.

[0044] In this second embodiment of the invention, there are two connecting sections 5 that are adjacent to each other with respect to the longitudinal extension of the plate section 1. The valve plate of this embodiment is thus provided for fixing to two spaced-apart valve stems 8. The two connecting sections 5 are preferably constructed identically in this case. In the illustrated second embodiment, each of the two connecting sections 5 is constructed in the same manner as the single connecting section 5 of the first embodiment.

[0045] The opposite ends of the two connecting sections 5 are fixed on their back sides to the longitudinal central region of the plate section 1. In this embodiment, the connecting sections 5 and the plate section 1 are preferably constructed as a single material.

[0046] Figures 22 to 24 illustrate a vacuum valve using a valve plate according to this second embodiment. This configuration corresponds to that of the first embodiment, except that there are two spaced-apart valve stems 8 and a valve plate is fixed to these stems. These valve stems can move separately in the longitudinal direction and in a transverse direction perpendicular to the longitudinal direction to close and open the vacuum valve. For this purpose, in this embodiment, the valve actuation device has its own longitudinal actuation device 13 and transverse actuation device 14 for each valve stem. Alternatively, a common longitudinal actuation device 13 and / or a common transverse actuation device 14 for the valve stems may also exist. Instead of moving the valve stems in the transverse direction, the valve stems can also tilt about an axis perpendicular to the longitudinal axis of the valve stem.

[0047] 1: Plate Section 1a: Reinforcing ribs 2: Seals 3: Vertical direction 4: Width direction 5: Connecting Section 5a: First side edge 5b: Second side edge 5c: Connection structure 5d: Hole 5e: Connecting arm 5f: Connecting arm 5g: Strengthens the abdominal plate 6: Slit 7: Fastening screws 8: Valve stem 9: Valve body 10: Valve port 11: Opening 12: Corrugated pipe 13: Longitudinal drive device 14: Lateral drive device 15: Plane 16: Plane 17: Plane

Claims

1. A valve plate having a plate section (1) on which a seal (2) made of an elastomeric material is mounted on the front side, and the plate section having a longitudinal extension in a longitudinal direction (3) greater than a width extension in a width direction (4) perpendicular to the longitudinal direction (3), the valve plate further having at least one longitudinally extending connecting section (5) for securing the valve plate to at least one valve stem (8), wherein the at least one connecting section (5) is connected to the back side of the plate section (1) opposite to the front side at two ends spaced apart from each other in its longitudinal direction (3), and in the case of a slit (6) formed between the plate section (1) and the connecting section (5), the at least one connecting section (5) is spaced apart from the plate section (1) in the region between its two ends. The at least one connecting section (5) is defined by the first and second opposing side edges (5a, 5b) of the connecting section (5) in the width direction (4) as seen from the plan view of the back side of the plate section (1), and a connecting structure (5c) is formed in the central region of the longitudinal extension of the first side edge (5a) of the at least one connecting section (5) for connecting the connecting section (5) to the end section of the connecting section (5) of the valve stem (8) protruding from the first side edge (5a) of the connecting section (5), characterized in that the at least one connecting section is reinforced in its extension region in the width direction (4) adjacent to the second side edge (5b) relative to its extension region in the width direction (4) adjacent to the first side edge (5a); The plate-shaped connecting arms (5e, 5f) of the connecting section (5) extend from their respective ends to the central region of the longitudinal extension of the connecting section (5); a reinforcing web (5g) protrudes from the connecting arms (5e, 5f) in the direction of the plate section (1) of the valve plate, the reinforcing web (5g) extending only half of the extension region of the connecting section (5) in the width direction adjacent to the second side edge (5b), and the reinforcing web (5g) reinforces the connecting section (5) in the extension region of the connecting section (5) in the width direction (4) adjacent to the second side edge (5b) relative to the extension region of the connecting section (5) in the width direction (4) adjacent to the first side edge (5a).

2. The valve plate according to claim 1, wherein, The at least one connecting segment (5) has a greater thickness in its extension region in the width direction (4) adjacent to the second side edge (5b) than in its extension region in the width direction (4) adjacent to the first side edge (5a).

3. The valve plate according to claim 1, wherein, The reinforcing web (5g) is located directly at the second side edge (5b).

4. The valve plate according to claim 1, wherein, The reinforcing web (5g) is located in a plane perpendicular to the front side of the plate section (1).

5. The valve plate according to claim 1, wherein, The plate-shaped connecting arms (5e, 5f) are located in planes that form an angle of less than 20° with the positive side of the plate segment (1) in a plane, wherein the planes start from the respective ends of the connecting segment (5) and move away from the positive side of the plate segment (1) toward the longitudinal center of the connecting segment (5).

6. The valve plate according to claim 1 or 2, wherein, The connecting structure (5c) has a recess in the connecting section (5) for accommodating the end section of the valve stem.

7. The valve plate according to claim 1 or 2, wherein, The plate section (1) has a reinforcing rib (1a) extending in the longitudinal direction (3) on the back side opposite to the front side of the plate section, and the two ends of the connecting section (5) are connected to the reinforcing rib.

8. The valve plate according to claim 1 or 2, wherein, In order to adapt the angular position of the plate section (1) of the valve plate to the valve seat when the valve plate is pressed against the valve seat, the connecting section (5) of the valve plate can be bent relative to the plate section (1) in a torsional sense.

9. A vacuum valve having a valve plate according to any one of claims 1 to 8, the valve plate being carried by a valve stem (8) of the vacuum valve, the valve stem being adjustable by a valve actuation device (13, 14) to open and close the vacuum valve.

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