Fixed structure of laminar flow elements and flow control machine

Abstract

A fixed structure for a laminar flow element and a flow control machine are provided, which prevents gas accumulation and ensures that the laminar flow element is fully and tightly sealed. A fixing structure for a laminar flow element is fixed to a flow path block having a flow path, and is configured to include: a pressing member, which is pressed and fixed to the flow path; and an elastic body, which is located between the pressing member and the laminar flow element; wherein the elastic force generated by the pressing member pressing the elastic body acts on the laminar flow element, thereby fixing the laminar flow element to the flow path block.

Description

Technical Field

[0001] The present disclosure relates to a fixing structure of a laminar flow element and a flow control machine including the same. The fixing structure is used in a fluid control machine used in semiconductor manufacturing equipment, etc. Prior Art

[0002] Patent document 1 discloses a flow control device, which includes a block body, a rectifier assembled to the block body, a flow sensor assembled to a flow path, and a flow regulating valve mechanism assembled to the downstream side of the flow path. The rectifier is embedded in the block body, a spring component and a spacer are assembled at the end of the rectifier, the rectifier is covered with a cover body, and the cover body is fixed to the block body by screws, thereby assembling the rectifier block body. There is also a fluid control machine in which a rectifier (laminar flow element) is pressed and fixed to a housing. [Prior Technical Literature] [Patent Document]

[0003] [Patent Document 1] Japanese Patent No. 4162227 Summary of the invention

[0004] [Problems to be solved by the present invention] However, in the rectifier of Patent Document 1, since the cover is fixed to the block body by screws, there is a possibility that a small amount of gas is accumulated near the screws and the screws are loosened. In the case where the laminar flow element is fixed to the housing by pressing, the force of pressing the laminar flow element after fixing is not effective, so the laminar flow element cannot be sufficiently closely attached. Although fixing can also be performed by welding, the corrosion resistance is deteriorated due to welding, which may cause the risk of corrosion caused by corrosive gas.

[0005] Therefore, the purpose of the present disclosure is to provide a fixing structure of a laminar flow element and a flow control machine, which can prevent gas accumulation and make the laminar flow element fully close. [Methods for solving the problem]

[0006] In order to achieve the above-mentioned purpose, a fixing structure of a laminar flow element of one aspect of the present disclosure is: a fixing structure of a laminar flow element is fixed to a flow path block having a flow path, and is configured to include: a pressing component that is pressed and fixed to the aforementioned flow path; and an elastic body that is interposed between the aforementioned pressing component and the aforementioned laminar flow element. The elastic force generated by the aforementioned pressing component pressing the aforementioned elastic body acts on the aforementioned laminar flow element, so that the aforementioned laminar flow element is closely fixed to the aforementioned flow path block without a gap.

[0007] An auxiliary component may be provided between the laminar flow element and the pressing component to assist the elastic force of the elastic body in acting on the laminar flow element.

[0008] A mesh may also be fixed in the aforementioned flow path.

[0009] Furthermore, a fluid control machine according to one aspect of the present disclosure is: a fluid control machine using a fixed structure of the laminar flow element according to the above description. [Effects of the Invention]

[0010] According to the present invention, a fixing structure of a laminar flow element and a flow control device can be provided, which can prevent gas accumulation and make the laminar flow element sufficiently close. Simple diagram description

[0011] [ Fig. 1 ] is a schematic diagram of a flow control device according to an embodiment. FIG. 2 is an exploded perspective view of the first flow path block, the push-in unit, and the mesh portion according to the first embodiment. [ Fig. 3 ] is an exploded perspective view of the push-in unit according to the first embodiment. 4 is a cross-sectional view of the first flow path block, the push-in unit, and the mesh portion according to the first embodiment. [ Fig. 5 ] is an exploded perspective view of a push-in unit according to a second embodiment. 6 is a cross-sectional view of a first flow path block, a pressing unit, and a mesh portion according to a second embodiment. [ Fig. 7 ] is an exploded perspective view of a pressing unit according to a third embodiment. 8 is a cross-sectional view of a first flow path block, a pressing unit, and a mesh portion according to a third embodiment. [ Fig. 9 ] is an exploded perspective view of a pressing unit according to a fourth embodiment. 10 is a cross-sectional view of a first flow path block, a pressing unit, and a mesh portion according to a fourth embodiment. Implementation

[0012] The fixing structure of the laminar flow element according to the first embodiment of the present disclosure and the flow control machine including the same will be described with reference to the drawings. Fig. 1 is a schematic diagram of a flow control machine 1 according to the embodiment.

[0013] The flow control device 1 mainly includes a body 10, a flow sensor 2, a control unit 3, and a control valve 4. The flow control device is, for example, a mass flow controller.

[0014] The main body 10 is made of a steel material such as stainless steel, and has a rectangular shape. The main body 10 has a first joint block 11, a first flow path block 12, a second flow path block 13, a second joint block 14, and two joints 15. The first joint block 11, the first flow path block 12, the second flow path block 13, and the second joint block 14 are connected to each other in this order by bolts or the like. The first joint block 11 and the second joint block 14 are connected by the joint 15. In the first flow path block 12 and the second flow path block 13, a bypass flow path 10a, a sensor inlet path 10b, a sensor outlet path 10c, a confluence path 10d, a valve chamber 10e, and an outlet path 10f are formed.

[0015] The flow system through the joint 15 and the first joint block 11 flows into the bypass flow path 10a. The sensor inlet path 10b branches off from the bypass flow path 10a and flows the fluid to the flow sensor 2. The sensor outlet path 10c causes the fluid passing through the flow sensor 2 to flow out. In the converging path 10d, the fluid passing through the bypass flow path 10a merges with the flow system passing through the sensor outlet path 10c. The bypass flow path 10a and the sensor inlet path 10b are configured so that the fluid flows at a predetermined flow ratio (for example, 1:2 to 1:1000). In the bypass flow path 10a, a press-in unit 20 and a mesh portion 16 described later are provided. In the valve chamber 10e, a flow control valve 4A of the control valve 4 is arranged.

[0016] The flow sensor 2 is a thermal flow sensor. The control unit 3 outputs a valve drive signal to the control valve 4 based on the flow rate of the fluid measured by the flow sensor 2 so that the fluid flowing through the bypass flow path 10a becomes a predetermined flow rate. The flow control mechanism 4 drives the flow control valve 4A based on the valve drive signal from the control unit 3.

[0017] Fig. 2 is an exploded perspective view of the first flow path block 12, the press-in unit 20, and the mesh portion 16 according to the first embodiment, Fig. 3 is an exploded perspective view of the press-in unit 20 according to the first embodiment, and Fig. 4 is a cross-sectional view of the first flow path block 12, the press-in unit 20, and the mesh portion 16 according to the first embodiment. In Figs. 2 and 3, the lower left side is the upstream side of the flow of the fluid, and the upper right side is the downstream side of the flow of the fluid, while in Fig. 4, the left side is the upstream side of the flow of the fluid, and the right side is the downstream side of the flow of the fluid.

[0018] As shown in FIG4 , the bypass flow path 10a includes a downstream path 10a1, an intermediate path 10a2, and an upstream path 10a3. The inner diameter of the upstream path 10a3 is configured to be larger than the inner diameter of the intermediate path 10a2, and the inner diameter of the intermediate path 10a2 is configured to be larger than the inner diameter of the downstream path 10a1. The inner diameter of the confluent path 10d is configured to be smaller than the inner diameter of the downstream path 10a1.

[0019] As shown in FIGS. 2 to 4 , the press-in unit 20 includes a laminar flow element 21, a sheet press 22, a spring bracket 23, a disc spring 24, and a press-in collar 25. These components constituting the press-in unit 20 are made of steel materials such as stainless steel. The laminar flow element 21 is formed into a cylindrical shape by stacking a plurality of bypass sheets. When the fluid flows through the inside of the laminar flow element 21, the flow becomes laminar. The laminar flow element 21 is in contact with the step difference surface 12A of the first flow path block 12.

[0020] The sheet press 22 has a pressing portion 22A and a through portion 22B. The pressing portion 22A is roughly disc-shaped. The pressing portion 22A has a flat abutted surface 22C and an inclined surface 22D on its upstream side. The abutted surface 22C is located at the center of the pressing portion 22A, and the inclined surface 22D is located on the outer periphery of the abutted surface 22C. A recess 22e is formed at the center of the abutted surface 22C. The pressing portion 22A has a pressing surface 22F on its downstream side. The through portion 22B is columnar, extending from the center of the pressing surface 22F toward the downstream side, and penetrating the laminar flow element 21. The end of the through portion 22B is located in the confluence path 10d. The through portion 22B has a longitudinal section that is roughly a deltoid shape (triangular shape). The three outer end portions of the through-portion 22B are configured to abut against the inner peripheral surface of the laminar flow element 21 .

[0021] The spring bracket 23 as an auxiliary component is roughly disc-shaped and is located on the upstream side of the sheet press 22. A plurality of (eight) through holes 23a are formed on the spring bracket 23. The plurality of through holes 23a are formed into four on the inner circumference and four on the outer circumference. The spring bracket 23 has a convex portion 23B at the center on the downstream side. The convex portion 23B is embedded in the concave portion 22e. An annular support portion 23C is provided in the outer circumference of the spring bracket 23, which protrudes toward the upstream side.

[0022] The disc spring 24 as an elastic body is a roughly disc-shaped spring and is located on the upstream side of the spring bracket 23. The disc spring 24 has an outer peripheral portion 24A, an intermediate portion 24B, and a central portion 24C. The outer peripheral portion 24A is annular and has two protrusions protruding outward. The protrusions are configured to be embedded in two grooves of the support portion 23C. The outer peripheral portion 24A is supported by the support portion 23C. A plurality of (four) through holes 24d are formed in the intermediate portion 24B. Each through hole 24d is formed to overlap with a through hole 23a on the inner peripheral side and a through hole 23a on the outer peripheral side in the direction of fluid flow. An embedded hole 24e is formed in the center of the central portion 24C.

[0023] The press-in collar 25 as a press-in component is roughly disc-shaped and is located on the upstream side of the disc spring 24. A plurality of (eight) through holes 23a are formed in the press-in collar 25. The plurality of through holes 25a are formed as four on the inner circumference side and four on the outer circumference side. The four through holes 25a on the inner circumference side are formed so as to overlap with the inner circumference side portions of the four through holes 24d and the through holes 23a on the inner circumference side in the direction of fluid flow. The four through holes 25a on the outer circumference side are formed so as to overlap with the outer circumference side portions of the four through holes 24d and the through holes 23a on the outer circumference side in the direction of fluid flow. In the center portion of the press-in collar 25, a two-stage convex portion 25B is provided, which protrudes toward the downstream side. The end of the convex portion 25B is embedded in the embedding hole 24e.

[0024] The press-in collar 25 is pressed into the downstream path 10a1 and fixed to the first flow path block 12. The center portion 24C of the disc spring 24 is pushed toward the downstream side by the convex portion 25B of the press-in collar 25, so that the center portion 24C is bent toward the downstream side. As a result, the elastic force of the disc spring 24 acts on the spring bracket 23 via the outer peripheral portion 24A, pushing the spring bracket 23 toward the downstream side, so that the center portion of the spring bracket 23 presses the sheet press 22 toward the downstream side. As a result, the laminar flow element 21 is clamped by the pressing portion 22A of the sheet press 22 and the step surface 12A of the first flow path block 12, and the laminar flow element 21 is fixed to the first flow path block 12 in close contact without a gap.

[0025] As shown by arrows A1 to A3 in FIG. 4 , the fluid passes through the through holes 25a, 24d, and 23a, and after passing through the gap between the spring bracket 23 and the inclined surface 22D, flows through the laminar flow element 21 and flows toward the confluence path 10d.

[0026] The mesh part 16 has a mesh 16A and a mesh ferrule 16B. The disc-shaped mesh 16A is arranged in the upstream path 10a3. The mesh 16A is fixed relative to the first flow path block 12 by pressing the annular mesh ferrule 16B into the upstream path 10a3.

[0027] As described above, according to the fixing structure of the laminar flow element of the present embodiment, the press-in collar 25 and the disc spring 24 are provided, the press-in collar 25 is press-fitted and fixed to the downstream path 10a1 of the bypass flow path 10a, and the disc spring 24 is interposed between the press-in collar 25 and the laminar flow element 21. The elastic force generated by the press-in collar 25 pressing the disc spring 24 acts on the laminar flow element 21, so that the laminar flow element 21 is configured to be fixed to the first flow path block 12 in close contact without a gap. As a result, it is possible to prevent gas from accumulating in the bypass flow path 10a, and to make the bypass sheet constituting the laminar flow element 21 sufficiently close contact.

[0028] The elastic force of the disc spring 24 is applied to the laminar flow element 21 via the spring bracket 23, thereby being configured. The convex portion 23B of the spring bracket 23 is embedded in the concave portion 22e of the sheet press 22. Thus, the influence of the tolerance of the parts such as the sheet press 22 can be suppressed, thereby suppressing the axial deviation of the disc spring 24. Therefore, the spring bracket 23 functions as an auxiliary component to assist the elastic force of the disc spring 24 in the action state relative to the laminar flow element 21.

[0029] Next, the fixing structure of the laminar flow element according to the second embodiment is described. FIG. 5 is an exploded perspective view of the press-in unit 120 according to the second embodiment, and FIG. 6 is a cross-sectional view of the first flow path block 12, the press-in unit 120, and the mesh portion 16 according to the second embodiment. The same reference numerals are given to the same components as the press-in unit 20 of the first embodiment, and the description thereof is omitted.

[0030] The press-in unit 120 includes a laminar flow element 21, a sheet presser 122, a disc spring 124, a spring bracket 123, and a plug 125. These components constituting the press-in unit 120 are made of steel materials such as stainless steel.

[0031] The sheet press 122 has a pressing portion 122A and a through portion 22B. The pressing portion 122A is substantially disc-shaped. In the pressing portion 122A, a disc-shaped convex portion 122C is provided at the center of the upstream side. The pressing portion 122A has a pressing surface 122F at the downstream side. The through portion 22B extends from the center of the pressing surface 122F toward the downstream side and penetrates the laminar flow element 21.

[0032] The disc spring 124 as an elastic body is located on the upstream side of the sheet presser 122. The through hole 124a of the disc spring 124 is configured to be fitted into the convex portion 122C of the sheet presser 122. The disc spring 124 is arranged so that the outer peripheral end is located on the upstream side relative to the inner peripheral end.

[0033] The spring bracket 123 as an auxiliary component is roughly disc-shaped and is located on the upstream side of the disc spring 124. The outer peripheral portion of the disc spring 124 abuts against the downstream side 123A of the spring bracket 123. An annular protrusion 123B is provided on the outer peripheral edge of the spring bracket 123, which protrudes toward the downstream side. The outer peripheral portion of the disc spring 124 is located inside the protrusion 123B.

[0034] The insert 125 as a press-fit component has a cylindrical portion 125A and four leg portions 125B. The cylindrical portion 125A is pressed into the downstream path 10a1. The four leg portions 125 extend from the cylindrical portion 125A toward the downstream side and are bent inwardly so as to be separated from the inner peripheral surface 12B forming the downstream path 10a1. Thus, a gap is formed between the four leg portions 125 and the inner peripheral surface 12B. The front end of each leg portion 125B abuts against the upstream side surface 123C of the spring bracket 123.

[0035] The cylindrical portion 125A is pressed into the downstream path 10a1, and the plug 125 is fixed to the first flow path block 12. The four legs 125B of the plug 125 push the upstream side surface 123C of the spring bracket 123 toward the downstream side, so that the disc spring 124 is bent. As a result, the elastic force of the disc spring 124 acts on the pressing portion 122A of the sheet press 122, so that the sheet press 122 is pushed toward the downstream side. As a result, the laminar flow element 21 is clamped by the pressing portion 122A of the sheet press 122 and the step surface 12A of the first flow path block 12, and the laminar flow element 21 is fixed to the first flow path block 12 without a gap.

[0036] As shown by arrows B1 to B3 in FIG. 6 , the fluid passes through the gaps in the cylindrical portion 125A, between adjacent legs 125B, and between the legs 125B and the inner peripheral surface 12B, flows through the laminar flow element 21, and flows toward the confluent passage 10d.

[0037] As described above, according to the fixing structure of the laminar flow element of the present embodiment, the insert 125 and the disc spring 124 are provided, the insert 125 is pressed into and fixed to the downstream path 10a1 of the bypass flow path 10a, and the disc spring 124 is interposed between the insert 125 and the laminar flow element 21. The elastic force generated by the insert 125 pressing the disc spring 124 acts on the laminar flow element 21, so that the laminar flow element 21 is configured to be fixed to the first flow path block 12 in close contact without a gap. As a result, it is possible to prevent gas accumulation in the bypass flow path 10a and to make the bypass sheet constituting the laminar flow element 21 sufficiently close.

[0038] The disc-shaped spring bracket 123 pushed by the plug 125 is configured so that, by pressing the disc spring 124, the elastic force of the disc spring 124 acts on the laminar flow element 21. Thus, the elastic force of the disc spring 124 can fully act on the laminar flow element 21. Therefore, the spring bracket 123 functions as an auxiliary component to assist the elastic force of the disc spring 24 in acting on the laminar flow element 21.

[0039] Next, the fixing structure of the laminar flow element according to the third embodiment is described. FIG. 7 is an exploded perspective view of the press-in unit 220 according to the third embodiment, and FIG. 8 is a cross-sectional view of the first flow path block 12, the press-in unit 220, and the mesh portion 16 according to the third embodiment. The same reference numerals are given to the same components as the press-in unit 20 of the first embodiment, and the description thereof is omitted. In addition, the first flow path block 12 of this embodiment does not have the intermediate path 10a2.

[0040] The press-in unit 220 includes a laminar flow element 21, a sheet presser 222, a disc spring 224, and a bypass adapter 225. These components constituting the press-in unit 220 are made of steel materials such as stainless steel.

[0041] The sheet pressing member 222 has a pressing portion 222A and a through portion 22B. The pressing portion 222A is roughly semi-spherical. In the pressing portion 222A, a convex portion 222C having a two-stage structure is provided at the center (top) of the upstream side. A concave portion 222d is formed at the center of the front end of the convex portion 222C. The pressing portion 222A has a pressing surface 222F at the downstream side. The through portion 22B is columnar, extending from the center of the pressing surface 222F toward the downstream side, and penetrating the laminar flow element 21.

[0042] The disc spring 224 as an elastic body is a roughly disc-shaped spring and is located on the upstream side of the sheet press 222. The disc spring 224 has an outer peripheral portion 224A, an intermediate portion 224B, and a central portion 224C. The outer peripheral portion 224A is annular. A plurality of (four) through holes 224d are formed on the intermediate portion 224B. Each through hole 224d is the same as the through hole 24d according to the first embodiment, and is composed of a portion located on the inner peripheral side and a portion located on the outer peripheral side. An embedding hole 224e is formed at the center of the central portion 224C. The front end portion of the protrusion 222C is embedded in the embedding hole 224e. Therefore, the sheet press 222 and the disc spring 224 are integrated.

[0043] The bypass adapter 225 as a press-in component is cylindrical and is located on the upstream side of the disc spring 224. The bypass adapter 225 has a press-in portion 225A and a flow path portion 225B. The press-in portion 225A is pressed into the upstream path 10a3. The flow path portion 225B is located on the upstream side of the press-in portion 225A. The outer diameter of the flow path portion 225B is configured to be smaller than the outer diameter of the press-in portion 225A. A gap is formed between the flow path portion 225B and the inner circumferential surface 12C forming the upstream path 10a3. A through hole 225c is formed in the flow path portion 225B. [] []

[0044] The press-in portion 225A is pressed into the upstream path 10a3, and the bypass adapter 225 is fixed to the first flow path block 12. The outer peripheral portion 224A of the disc spring 224 is pushed toward the downstream side by the press-in portion 225A, so that the disc spring 224 is bent. As a result, the elastic force of the disc spring 224 acts on the pressing portion 222A of the sheet press 222 via the center portion 224C, so that the sheet press 222 is pushed toward the downstream side. As a result, the laminar flow element 21 is clamped by the pressing portion 222A of the sheet press 22 and the step surface 12A of the first flow path block 12, and the laminar flow element 21 is fixed to the first flow path block 12 without a gap.

[0045] As shown by arrows C1 to C2 in FIG. 8 , the fluid passes through the through hole 224d of the bypass adapter 225 and the disc spring 224, flows through the laminar flow element 21 and flows toward the confluence path 10d.

[0046] The mesh 16A is arranged at the end of the flow path portion 225B and is pressed into the upstream path 10a3 by the mesh sleeve 16B. The mesh 16A is fixed relative to the first flow path block 12.

[0047] As described above, according to the fixing structure of the laminar flow element of the present embodiment, the bypass adapter 225 and the disc spring 224 are provided, the bypass adapter 225 is pressed and fixed to the upstream path 10a3 of the bypass flow path 10a, and the disc spring 224 is interposed between the bypass adapter 225 and the laminar flow element 21. The elastic force generated by the bypass adapter 225 pressing the disc spring 224 acts on the laminar flow element 21, so that the laminar flow element 21 is configured to be fixed to the first flow path block 12 in close contact without a gap. As a result, it is possible to prevent gas accumulation in the bypass flow path 10a and to make the bypass sheet constituting the laminar flow element 21 sufficiently close contact.

[0048] Next, the fixing structure of the laminar flow element according to the fourth embodiment is described. FIG. 9 is an exploded perspective view of the press-in unit 320 according to the fourth embodiment, and FIG. 10 is a cross-sectional view of the first flow path block 12, the press-in unit 320, and the mesh portion 16 according to the fourth embodiment. The same reference numerals are given to the same components as the press-in unit 20 of the first embodiment, and the description thereof is omitted.

[0049] The press-in unit 320 includes a laminar flow element 21, a sheet press 22, a spring bracket 323, a disc spring 24, and a press-in collar 325. These components constituting the press-in unit 320 are made of steel materials such as stainless steel.

[0050] The spring bracket 323 as an auxiliary component is roughly disc-shaped and is located on the upstream side of the sheet press 22. A plurality of (eight) through holes 323a are formed on the spring bracket 323. The plurality of through holes 323a are formed into four on the inner circumference and four on the outer circumference. In the spring bracket 323, a first convex portion 323B is provided at the center of the downstream side. The first convex portion 323B is embedded in the concave portion 22e. In the spring bracket 323, a second convex portion 323C of a two-stage structure is provided at the center of the upstream side. The end of the second convex portion 323C is embedded in the embedding hole 24e.

[0051] The press-in collar 325 as the press-in member is annular and is located on the upstream side of the disc spring 24. An annular protrusion 325A is provided on the outer periphery of the press-in collar 325, which protrudes toward the downstream side. The outer periphery 24A of the disc spring 24 is located inside the protrusion 325A.

[0052] The press-in collar 325 is pressed into the downstream path 10a1 and fixed to the first flow path block 12. The outer peripheral portion 24A of the disc spring 24 is pressed toward the downstream side by the press-in collar 325, so that the disc spring 24 is bent. As a result, the elastic force of the disc spring 24 acts on the spring bracket 323 via the center portion 24C, and the spring bracket 323 is pressed toward the downstream side, so that the center portion of the spring bracket 323 presses the sheet press 22 toward the downstream side. As a result, the laminar flow element 21 is clamped by the pressing portion 22A of the sheet press 22 and the step surface 12A of the first flow path block 12, and the laminar flow element 21 is fixed to the first flow path block 12 in close contact without a gap.

[0053] As shown by arrows D1 to D3 in FIG. 10 , the fluid is pressed into the collar 325 , through the through holes 24 d and 323 a , and passes through the gap between the spring bracket 323 and the inclined surface 22D , then flows through the laminar flow element 21 and flows toward the confluence path 10 d .

[0054] As described above, according to the fixing structure of the laminar flow element of the present embodiment, the press-in collar 325 and the disc spring 24 are provided, the press-in collar 325 is press-fitted and fixed to the downstream path 10a1 of the bypass flow path 10a, and the disc spring 24 is interposed between the press-in collar 325 and the laminar flow element 21. The elastic force generated by the press-in collar 325 pressing the disc spring 24 acts on the laminar flow element 21, so that the laminar flow element 21 is configured to be fixed to the first flow path block 12 in close contact without a gap. As a result, it is possible to prevent gas accumulation in the bypass flow path 10a and to make the bypass sheet constituting the laminar flow element 21 sufficiently close contact.

[0055] The elastic force of the disc spring 24 is applied to the laminar flow element 21 via the spring bracket 323, thereby being configured. The first convex portion 323B of the spring bracket 323 is embedded in the concave portion 22e of the sheet press 22. Thus, the influence of the tolerance of the parts such as the sheet press 22 can be suppressed, thereby suppressing the axial deviation of the disc spring 24. Therefore, the spring bracket 323 functions as an auxiliary component to assist the elastic force of the disc spring 24 in the action state relative to the laminar flow element 21.

[0056] In addition, the present disclosure is not limited to the above-mentioned embodiments. A person skilled in the art can make various additions or changes within the scope of the present disclosure.

[0057] For example, stainless steel is exemplified as the material of the body 10, the pressing unit 20, and the mesh portion 16, but the usable material (including metal, non-metal, resin material, etc.) or shape can be selected according to the controlled fluid or the place of use. The fluid control machine 1 is a mass flow controller, but is not limited to a machine with a fixed structure suitable for a laminar flow element, and can also be a mass flow meter or other machine. The elastic body is a disc spring 24, 224 and a disc spring 124, but can also be other elastic bodies such as a leaf spring.

[0058] 1: Flow control machine 2: Flow sensor 3: Control Department 4: Control valve 10:Ontology 11: First connector block 12: First flow path block 13: Second flow path block 14: Second connector block 15: Connector 16: Mesh 20: Press-in unit 21: Laminar flow element 22: Sheet Pressing 23: Spring bracket 24: Disc spring 25: Press-in collar 120: Press-in unit 121: Laminar flow element 122: Sheet Press 123: Spring bracket 124: Disc spring 125: Plugins 220: Press-in unit 222: Sheet Press 224: Disc spring 225: Bypass adapter 320: Press-in unit 323: Spring bracket 325: Press-fit collar 10a: Bypass flow path 10a1: Downstream Road 10a2: Middle Road 10a3: Upstream Road 10b: Sensor inflow path 10c: Sensor outflow 10d:Merge Road 10e: Valve chamber 10f: Outflow 122A: Pressing part 122B: Through section 122C:convex part 122F: Pressing surface 123A: Downstream side 123B: protrusion 123C: Upstream side 124a:Through hole 125A: Cylindrical part 125B: Feet 12A: Step surface 12B: Inner Surface 12C: Inner Surface 16A: Mesh 16B: Mesh cover 222A: Pressing part 222B: Through section 222C:convex part 222d: concave part 222F: Pressing surface 224A: Periphery 224B: Middle 224C: Center 224d:Through hole 224e: Embedded hole 225A: Press-fit part 225B:Flow path part 225c:Through hole 22A: Pressing part 22B: Through part 22C: abutted surface 22D: Inclined surface 22e: concave part 22F: Pressing surface 23a: Through hole 23B:Protrusion 23C: Supporting part 24A: Periphery 24B: Middle 24C: Center 24d: Through hole 24e: Embedded hole 25a: Through hole 25B:Protrusion 323a:Through hole 323B: First convex part 323C: Second convex part 325A: protrusion 4A: Flow control valve

Claims

1. A fixing structure for a laminar flow element, fixed to a flow path block having a flow path, and configured to include: a press-in member, press-fitted and fixed to the aforementioned flow path; and an elastic body, disposed between the press-in member and the aforementioned laminar flow element; wherein, The elastic force generated by the aforementioned pressing component pressing the aforementioned elastic body acts on the aforementioned laminar flow element, thereby fixing the aforementioned laminar flow element to the aforementioned flow path block; wherein the aforementioned elastic body is made of steel and is a disc spring or a leaf spring.

2. The fixing structure of the laminar flow element as described in claim 1, wherein: An auxiliary component is provided between the aforementioned laminar flow element and the aforementioned pressing component to assist the elastic force of the aforementioned elastomer in its interaction with the aforementioned laminar flow element.

3. The fixing structure of the laminar flow element as described in claim 1, wherein: In the aforementioned flow path, there are fixed meshes.

4. The fixing structure of the laminar flow element as described in claim 1, wherein: In the aforementioned disc spring, a plurality of through holes are formed through which fluid passes.

5. A flow control machine using a fixed structure of a laminar flow element as described in any one of claims 1 to 4.

Images