Heating treatment device

Abstract

This invention relates to a heat treatment apparatus that improves the accuracy of workpiece temperature detection. The heat treatment apparatus of one embodiment includes: a chamber for housing the workpiece and maintaining a gas environment depressurized to below atmospheric pressure; an exhaust section for venting the interior of the chamber; a heater disposed inside the chamber; and a detection section disposed inside the chamber for detecting the temperature of the workpiece. The detection section is linear and has: a first portion extending close to and along the surface of the workpiece; and a second portion connected to the first portion and extending in a direction intersecting the first portion, with a temperature measuring point provided at the front end of the first portion.

Description

Technical Field

[0001] The invention relates to a heating treatment device. Prior Art

[0002] There are heat treatment apparatuses that heat a workpiece to form a film or the like on the surface of the workpiece or to treat the surface of the workpiece. For example, a heating treatment device is proposed, comprising: a chamber for accommodating a workpiece; a plurality of heaters arranged inside the chamber; a detection unit arranged at a position inside the chamber facing the workpiece and detecting the temperature of the workpiece; and a controller arranged outside the chamber and controlling the plurality of heaters based on detection values ​​detected by the detection unit. If a detection unit is provided to detect the temperature of the workpiece, the temperature of the workpiece can be kept within a predetermined range.

[0003] However, it has been found that simply providing a detection unit reduces the accuracy of workpiece temperature detection. This reduction in workpiece temperature detection accuracy can lead to a decrease in the quality of the film formed on the workpiece surface or the treated portion. Therefore, it is desirable to develop a technology that can improve the detection accuracy of the workpiece temperature. [Prior art literature] [Patent Document]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2019-184229 Summary of the Invention

[0005] [Problem to be solved by the invention] The problem to be solved by the present invention is to provide a heating treatment device that can improve the detection accuracy of the temperature of a workpiece. [Technical means to solve the problem]

[0006] A heat treatment apparatus according to an embodiment includes: a chamber that houses a workpiece and is capable of maintaining a gas atmosphere reduced to below atmospheric pressure; an exhaust unit that exhausts the interior of the chamber; a heater disposed within the chamber; and a detection unit disposed within the chamber to detect the temperature of the workpiece. The detection unit is linear and has a first portion extending along and proximate to the surface of the workpiece; and a second portion connected to the first portion and extending in a direction intersecting the first portion. A temperature measurement point is provided at the distal end of the first portion. [Effects of the Invention]

[0007] According to an embodiment of the present invention, a heat treatment device capable of improving the detection accuracy of the temperature of a workpiece is provided. Simple diagram description

[0008] FIG1 is a schematic front view for illustrating a heat treatment apparatus according to the present embodiment. FIG2 is a schematic cross-sectional view of the heat treatment apparatus taken along line AA in FIG1 . FIG3 is a schematic perspective view of the chamber and the cassette holder. FIG. 4 is a schematic perspective view illustrating a cassette. FIG. 5 is a schematic side view for illustrating a detection unit provided inside the cassette. FIG. 6 is a schematic diagram showing the detection unit in FIG. 5 as viewed from the line BB. FIG7 is a schematic side view for illustrating a detection unit according to another embodiment. Implementation Method

[0009] Hereinafter, the embodiment will be described with reference to the accompanying drawings. In addition, in each of the drawings, the same components are denoted by the same reference numerals and detailed descriptions thereof are omitted as appropriate. As an example, the following describes a heat treatment apparatus that heats a workpiece in a gas atmosphere reduced to a pressure lower than atmospheric pressure to form an organic film on the workpiece's surface. However, the present invention is not limited to this embodiment. For example, the present invention can also be applied to heat treatment apparatuses that heat a workpiece to form an inorganic film on the workpiece's surface, or to other applications that treat the workpiece's surface.

[0010] In addition, the workpiece before heating may include, for example, a substrate and a solution applied to the surface of the substrate, or may be only the substrate. Below, as an example, a case where the workpiece before heating includes a substrate and a solution applied to the surface of the substrate will be described.

[0011] The workpiece 100 before being heat-treated by the heat treatment apparatus 1 of this embodiment comprises a substrate and a solution applied to the surface of the substrate. The substrate is, for example, a glass substrate or a semiconductor wafer. However, the substrate is not limited to the substrates shown in the examples. The solution comprises, for example, an organic material and a solvent. The organic material is not particularly limited as long as it can be dissolved in the solvent. The solution can be, for example, a varnish containing polyamide. However, the solution is not limited to the solutions shown in the examples. Alternatively, the solution may be a liquid that has been temporarily calcined to a semi-hardened state (a non-flowing state).

[0012] FIG1 is a schematic front view for illustrating a heat treatment apparatus 1 according to the present embodiment. 1 , only one detection unit 40 and cassette 50 are depicted to avoid complication. FIG2 is a schematic cross-sectional view of the heat treatment apparatus 1 taken along line AA in FIG1 . 2 , the detection unit 40 and the cassette 50 are omitted in order to avoid complication. FIG. 3 is a schematic perspective view of the chamber 10 and the cassette holder 60 . In each figure, the X, Y, and Z directions represent three mutually orthogonal directions. For example, the X and Y directions are directions parallel to the surface of the workpiece 100 (e.g., horizontal directions). For example, the Z direction is a direction perpendicular to the surface of the workpiece 100 (e.g., vertical direction).

[0013] As shown in FIG. 1 and FIG. 2 , the heat treatment apparatus 1 includes, for example, a chamber 10 , an exhaust unit 20 , a heating unit 30 , a detection unit 40 , a cassette 50 , a cassette holder 60 , and a controller 70 .

[0014] As shown in Figures 1 to 3, chamber 10 is box-shaped. Chamber 10 has an airtight structure capable of maintaining a gaseous environment reduced to below atmospheric pressure. The external shape of chamber 10 is not particularly limited. For example, chamber 10 can be a rectangular parallelepiped or cylindrical. Chamber 10 is formed of a metal such as stainless steel.

[0015] For example, the chamber 10 has openings at both ends in the Y direction. A flange 11 is provided at one end of the chamber 10 in the Y direction. A sealing material 12, such as an O-ring, is provided on the flange 11. An opening and closing door 13 is provided on the side of the chamber 10 where the flange 11 is provided. When the opening and closing door 13 is closed, the opening of the chamber 10 is sealed airtight by the sealing material 12. When the opening and closing door 13 is opened, the workpiece 100 can be loaded into or unloaded from the cassette 50 through the opening of the chamber 10. In other words, the workpiece 100 is stored within the chamber 10.

[0016] For example, a flange 14 is provided at the other end of the chamber 10 in the Y direction. A sealing material 12 is provided on the flange 14. A cover 15 is provided on the side of the chamber 10 where the flange 14 is provided. For example, the cover 15 is detachably attached to the flange 14 using fastening members such as screws. When the cover 15 is attached, the opening of the chamber 10 is sealed airtightly by the sealing material 12. Providing a detachable cover 15 facilitates maintenance of the heat treatment apparatus 1 from the side where the flange 14 is provided. In this case, when the cover 15 is opened for maintenance, the cassette 50, which has a processing space for heating the workpiece 100, is brought into the chamber 10 through the opening of the chamber 10. Alternatively, the cassette 50 is taken out of the chamber 10 through the opening of the chamber 10.

[0017] Furthermore, a cooling device (not shown) may be provided on the outer wall of the chamber 10. The cooling device may be, for example, a water jacket. Providing a cooling device can prevent the outer wall temperature of the chamber 10 from exceeding a predetermined temperature.

[0018] The exhaust unit 20 exhausts the interior of the chamber 10 . 1 , the exhaust unit 20 includes a first exhaust unit 21 and a second exhaust unit 22 . The first exhaust unit 21 and the second exhaust unit 22 are connected to an exhaust port 16 provided on the bottom surface of the chamber 10 .

[0019] The first exhaust unit 21 includes an exhaust pump 21 a and a pressure control unit 21 b . The exhaust pump 21a can be configured to perform rough exhaust from atmospheric pressure to a predetermined pressure. Therefore, the exhaust pump 21a has a greater exhaust volume than the exhaust pump 22a described later. For example, the exhaust pump 21a can be configured as a dry vacuum pump.

[0020] The pressure control unit 21b is provided between the exhaust port 16 and the exhaust pump 21a. The pressure control unit 21b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) or the like that detects the internal pressure of the chamber 10. The pressure control unit 21b can be, for example, an automatic pressure controller (APC).

[0021] The second exhaust unit 22 includes an exhaust pump 22 a and a pressure control unit 22 b . After the exhaust pump 21a performs rough exhaust, the exhaust pump 22a exhausts the air to a lower, predetermined pressure. The exhaust pump 22a has an exhaust capacity capable of exhausting the air to a high-vacuum molecular flow region. For example, the exhaust pump 22a can be a turbomolecular pump (TMP).

[0022] The pressure control unit 22b is provided between the exhaust port 16 and the exhaust pump 22a. The pressure control unit 22b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) that detects the internal pressure of the chamber 10. The pressure control unit 22b can be, for example, an APC.

[0023] By reducing the pressure within the chamber 10, the amount of heat released to the outside of the chamber 10 can be reduced. This improves heating efficiency and heat storage efficiency, thereby reducing the power applied to the heater 33 (described later). Reducing the power applied to the heater 33 prevents the load on the heater 33 from increasing, thereby extending the life of the heater 33.

[0024] The heating unit 30 includes, for example, a first heating unit 31 and a second heating unit 32 . The first heating unit 31 and the second heating unit 32 are provided inside the chamber 10 . The first heating unit 31 is disposed above the cassette 50 . The second heating portion 32 is disposed below the cassette 50 . The second heating portion 32 faces the first heating portion 31 .

[0025] As will be described later, the workpiece 100 is supported inside the cassette 50. Therefore, the first heating unit 31 heats the front surface (upper surface) of the workpiece 100 supported inside the cassette 50. The second heating unit 32 heats the back surface (lower surface) of the workpiece 100 supported inside the cassette 50.

[0026] As shown in FIG1 , when multiple cassettes 50 are arranged in the Z direction (vertical direction) within the chamber 10, the second heating unit 32 provided below the upper cassette 50 can be replaced with the first heating unit 31 provided above the lower cassette 50. In other words, the first heating unit 31 or the second heating unit 32 provided between the cassettes 50 can serve as both. In addition, for convenience, when focusing on one cassette 50 , the upper side is set as the first heating part 31 and the lower side is set as the second heating part 32 when viewed from the cassette 50 . Heating parts (heaters 33 ) can be set on the upper and lower sides of all cassettes 50 .

[0027] In this case, the back surface of the workpiece 100 supported in the upper cassette 50 is heated by the combined first heating unit 31 or the second heating unit 32. The front surface of the workpiece 100 supported in the lower cassette 50 is heated by the combined first heating unit 31 or the second heating unit 32. If so, the number of the first heating unit 31 or the second heating unit 32 can be reduced. Therefore, it is possible to achieve a reduction in power consumption, a reduction in manufacturing cost, and space saving.

[0028] The first heating unit 31 and the second heating unit 32 include, for example, a heater 33 , a support unit 34 , and a holding unit 35 . At least one heater 33 is provided. For example, one support portion 34 is provided for each heater 33 or for a plurality of heaters 33. For example, one holding portion 35 is provided for each heater 33 or for a plurality of heaters 33.

[0029] The first heating section 31 and the second heating section 32 illustrated in Figures 1 and 2 each include a plurality of heaters 33. For example, the plurality of heaters 33 extend in the X direction and are arranged in the Y direction. Alternatively, the plurality of heaters 33 may extend in the Y direction and be arranged in the X direction. That is, the plurality of heaters 33 are arranged in a direction intersecting the central axis of the heater 33. The plurality of heaters 33 may be arranged at equal intervals, or the intervals may be varied depending on, for example, the in-plane temperature distribution of the workpiece 100. Furthermore, the specifications, number, and spacing of the heaters 33 provided in the second heating section 32 may be the same as or different from those provided in the first heating section 31. The specifications, number, and spacing of the heaters 33 may be appropriately modified depending on, for example, the composition of the solution to be heated (the heating temperature of the solution) and the size of the workpiece 100. The specifications, number, and spacing of the heaters 33 can be appropriately determined through simulations or experiments.

[0030] Heater 33 can be a rod-shaped heater extending in one direction. Heater 33 is not particularly limited as long as it is a rod-shaped heater. Heater 33 can be, for example, a sheathed heater, a ceramic heater, a cartridge heater, or the like. Heater 33 can also be a heater with a quartz mantle, for example. In this specification, heaters covered by a quartz cover are also referred to as "rod-shaped heaters." The "rod-shaped" shape is not limited to a specific shape and can be, for example, cylindrical or prismatic.

[0031] The heater 33 is not limited to the above configuration as long as it can heat the workpiece 100 in a gas environment decompressed to a pressure lower than atmospheric pressure. In other words, the heater 33 may be a rod-shaped heater that utilizes heat energy released by radiation.

[0032] The detection unit 40 is disposed within the chamber 10 and detects the temperature of the workpiece 100. The detection unit 40 can be, for example, a thermocouple. If the detection unit 40 is a thermocouple, it can be, for example, a sheathed thermocouple. A sheathed thermocouple comprises, for example: two bare thermocouple wires; a cylindrical metal sheath (protective tube) that houses the two bare thermocouple wires; and an insulating material filled within the sheath to insulate the two bare thermocouple wires from the sheath.

[0033] The type of thermocouple (bare thermocouple wire) can be appropriately selected based on the heating temperature of the workpiece 100. For example, the thermocouple can be a K thermocouple or an N thermocouple (based on Japanese Industrial Standards). In this case, if the detection unit 40 is a K thermocouple, the relationship between temperature and electromotive force is essentially linear, allowing for highly accurate detection of the temperature of the workpiece 100. Furthermore, the thermocouple can be either a grounded type, in which a pair of bare thermocouple wires are electrically connected to a sheath, or a non-grounded type, in which a pair of bare thermocouple wires are insulated from the sheath. A grounded thermocouple improves responsiveness. A non-grounded thermocouple improves noise immunity and durability. This embodiment illustrates the use of a non-grounded thermocouple as the detection unit 40. Furthermore, with non-grounded thermocouples, the junction (temperature measurement point) is not located at the sheath, making it difficult to accurately determine the junction's position. As will be described later, this embodiment is particularly effective when using such non-grounded thermocouples.

[0034] As shown in FIG. 4 , the detection unit 40 may be disposed inside the cartridge 50 . As shown in Figure 1, the output side of the detection unit 40 is electrically connected to the controller 70. In this case, the wiring extending to the outside of the cartridge 50 can be electrically connected to the wiring electrically connected to the controller 70 via the connector 41. In this manner, when the cartridge 50 is removed from the cartridge holder 60, the wiring on the detection unit 40 side can be separated from the wiring on the controller 70 side via the connector 41. When the cartridge 50 is returned to the cartridge holder 60, the wiring on the detection unit 40 side can be electrically connected to the wiring on the controller 70 side via the connector 41. Furthermore, the wiring can be a wire material forming a thermocouple or a so-called compensation wire. Note that details regarding the arrangement and shape of the detection unit 40 provided inside the cassette 50 will be described later.

[0035] As shown in FIG1 , the cassette 50 is detachably mounted on a pair of receiving members 62 of a cassette holder 60 disposed within the chamber 10 . In this case, the cassette 50 is detachably mounted between the first heating unit 31 and the second heating unit 32 . In addition, the cassette 50 may be omitted. When the cassette 50 is omitted, the detection unit 40 and the workpiece support unit 56 described later are provided inside the chamber 10 (cassette holder 60).

[0036] However, when the workpiece 100 is heated, the solution applied to the substrate surface may evaporate or sublime. Therefore, maintenance such as cleaning is required periodically or as needed. If a cassette 50 is provided, the cassette 50 can be removed from the chamber 10 (cassette holder 60) to perform cleaning and other maintenance on the cassette 50 from outside the chamber 10. The cassette 50, after maintenance, can then be brought back inside the chamber 10 (cassette holder 60). Therefore, the use of a cassette 50 significantly reduces the time and effort required for maintenance, compared to performing cleaning and other maintenance directly inside the chamber 10 (cassette holder 60).

[0037] FIG. 4 is a schematic perspective view for illustrating the cassette 50 . The cassette 50 is disposed inside the chamber 10 , and the workpiece 100 is housed inside the cassette 50 . As shown in FIG4 , the cassette 50 is box-shaped and has a processing space inside for supporting the workpiece 100. The external shape of the cassette 50 is not particularly limited. The external shape of the cassette 50 can be, for example, a rectangular parallelepiped.

[0038] The cassette 50 includes, for example, a cassette frame 51 , an upper vapor chamber 52 , a lower vapor chamber 53 , side vapor chambers 54 , side vapor chambers 55 , a workpiece support 56 , a cassette support 57 , and a heater 33 a .

[0039] The cassette frame 51 defines a processing space for heating the workpiece 100. The cassette frame 51 is, for example, a skeletal structure made of elongated plate material or steel sections. Alternatively, the cassette frame 51 may be a frame formed by processing a metal plate. Vapor chambers (upper vapor chamber 52, lower vapor chamber 53, side vapor chambers 54, and side vapor chambers 55) are provided on the outer surface of the cassette frame 51. The external shape of the cassette frame 51 is not particularly limited. For example, the external shape of the cassette frame 51 is a rectangular parallelepiped.

[0040] The upper vapor chamber 52 is plate-shaped and is mounted on the upper portion of the cassette frame 51. The upper vapor chamber 52 is removably mounted on the upper portion of the cassette frame 51. At least one upper vapor chamber 52 may be provided. The cassette 50 illustrated in FIG4 is provided with seven upper vapor chambers 52. The planar shape of the upper vapor chambers 52 can be, for example, a quadrilateral. The number and planar shape of the upper vapor chambers 52 can be adjusted appropriately based on the size and shape of the upper portion of the cassette frame 51.

[0041] The lower vapor chamber 53 is plate-shaped and is installed at the bottom of the cassette frame 51. Like the upper vapor chamber 52, the lower vapor chamber 53 is removably installed at the bottom of the cassette frame 51. The lower vapor chamber 53 faces the upper vapor chamber 52. At least one lower vapor chamber 53 is provided. The number and planar shape of the lower vapor chamber 53 can be the same as or different from those of the upper vapor chamber 52.

[0042] The side heat spreader 54 is plate-shaped. A pair of side heat spreaders 54 can be provided. One of the side heat spreaders 54 is provided, for example, at one of the mutually facing sides of the cassette frame 51 .

[0043] The workpiece 100 is loaded into the cassette 50 through an opening provided in the side of the cassette frame 51. Alternatively, the workpiece 100 is unloaded from the cassette 50 through an opening provided in the side of the cassette frame 51. Therefore, the side opening of the cassette frame 51 is on the side opposite to the side where the side vapor chamber 54 is provided.

[0044] The opening of the cassette frame 51 is opened and closed by another side vapor chamber 54. For example, a side vapor chamber 54 can be provided on the door 13 of the chamber 10 so that the opening of the cassette frame 51 is sealed by the side vapor chamber 54 when the door 13 is closed. Alternatively, a freely openable and closable side vapor chamber 54 can be provided on the side of the cassette frame 51 so that the opening of the cassette frame 51 is sealed by the side vapor chamber 54.

[0045] The side vapor chambers 55 are plate-shaped and are provided in pair within the cassette frame 51. The pair of side vapor chambers 55 face each other and extend between the pair of side vapor chambers 54. One of the pair of side vapor chambers 55 is provided near one side of the cassette frame 51. The other of the pair of side vapor chambers 55 is provided near the other side of the cassette frame 51.

[0046] The space enclosed by upper vapor chamber 52, lower vapor chamber 53, side vapor chamber 54, and side vapor chamber 55 forms the processing space for heating the workpiece 100. The processing space within cassette 50 is connected to the interior of chamber 10 via, for example, gaps between vapor chambers (gaps between beams of cassette frame 51 and vapor chambers between the vapor chambers). Therefore, if the pressure within chamber 10 is reduced, the pressure within cassette 50 is also reduced.

[0047] Here, as described above, multiple rod-shaped heaters 33 are arranged at predetermined intervals. Rod-shaped heaters 33 radiate heat radially from the central axis of heater 33. Therefore, the shorter the distance between the central axis of heater 33 and the heated portion of workpiece 100, the higher the temperature of the heated portion. In other words, directly heating workpiece 100 using multiple rod-shaped heaters 33 can cause temperature variations within the surface of the heated workpiece 100.

[0048] If the temperature within the surface of the workpiece 100 varies, the quality of the formed organic film may be degraded. For example, bubbles may form in the portion with a higher temperature, or the composition of the organic film may change.

[0049] When upper and lower vapor chambers 52 and 53 are provided, heat radiated from the multiple heaters 33 is incident on these two plates. The heat incident on these plates propagates in the planar direction within these plates and is simultaneously radiated toward the workpiece 100. This prevents temperature variations within the plane of the workpiece 100, resulting in improved quality of the formed organic film.

[0050] The upper vapor chamber 52 , the lower vapor chamber 53 , the side vapor chambers 54 , and the side vapor chambers 55 may be formed of metal such as aluminum, copper, or stainless steel.

[0051] A plurality of workpiece supports 56 are provided inside the cassette 50. The plurality of workpiece supports 56 support the back surface of the workpiece 100 in the processing space where the workpiece 100 is heated. The plurality of workpiece supports 56 support the workpiece 100 so that the workpiece 100 faces the upper and lower vapor chambers 52 and 53.

[0052] The workpiece support 56 can be a rod-shaped body. The workpiece support 56 is made of, for example, stainless steel. The number, arrangement, and spacing of the workpiece support 56 can be appropriately changed according to the size and rigidity (flexibility) of the workpiece 100.

[0053] The cassette support portion 57 is provided on a side surface of the cassette frame 51 that intersects the side surface on which the side vapor chamber 54 is provided. A pair of cassette support portions 57 are provided. The cassette support portions 57 protrude outward from the side surface of the cassette frame 51 and extend in a direction perpendicular to the side surface on which the side vapor chamber 54 is provided.

[0054] Cassette supports 57 are provided on each of a pair of mutually facing side surfaces of the cassette 50. The cassette supports 57 are supported by a receiving member 62 of the cassette holder 60, described later. Specifically, the cassette 50 is detachably mounted within the chamber 10 (cassette holder 60) via the cassette supports 57 and the receiving member 62. The detachable mounting of the cassette 50 within the chamber 10 facilitates maintenance of the cassette 50.

[0055] A pair of heaters 33a can be installed inside the cassette frame 51. Each heater 33a can be located in the space between the side vapor chambers 55 and the side of the cassette frame 51. In other words, the heaters 33a can be installed outside the area supporting the workpiece 100. The pair of heaters 33a face each other and extend between the pair of side vapor chambers 54. The heaters 33a can be similar to the heaters 33 installed inside the chamber 10. However, the diameter and length of the heaters 33a can be modified appropriately based on the size of the cassette frame 51.

[0056] When the heater 33 a is provided inside the cassette 50 (cassette frame 51 ), at least one of the support portion 34 and the holding portion 35 that support the heater 33 a may be provided similarly to the heater 33 .

[0057] The heater 33a can be electrically connected to the controller 70 via a connector or the like. In this manner, when the cassette 50 is removed from the cassette holder 60, the wiring portion on the heater 33a side can be separated from the wiring portion on the controller 70 side via the connector. When the cassette 50 is placed back into the cassette holder 60, the wiring portion on the heater 33a side can be electrically connected to the wiring portion on the controller 70 side via the connector.

[0058] Alternatively, the pair of heaters 33a can be omitted. However, heat from the peripheral region of the workpiece 100 escapes more easily than heat from the central region. Therefore, providing a pair of heaters 33a allows the peripheral region of the workpiece 100 to be heated, thereby minimizing the temperature difference between the peripheral region and the central region of the workpiece 100. In other words, temperature variations within the surface of the heated workpiece 100 can be minimized.

[0059] In addition, a cooling unit for cooling the processed workpiece 100 may be provided in the cassette 50. The cooling unit may include, for example, a nozzle for supplying cooling gas to at least one of the front surface and the back surface of the workpiece 100.

[0060] As shown in Figures 1 to 3, the cassette holder 60 is provided inside the chamber 10. The cassette holder 60 holds the heater 33 and the cassette 50 at predetermined positions inside the chamber 10.

[0061] The cassette holder 60 includes a frame 61 , a receiving member 62 , and a reflective plate 63 . The frame 61 is a skeleton structure formed by using, for example, elongated members. The outer shape of the frame 61 is not particularly limited. The outer shape of the frame 61 can be, for example, a rectangular parallelepiped or a cylinder.

[0062] At least one pair of receiving members 62 is disposed within the frame 61. The pair of receiving members 62 supports the cassette support portion 57 of the cassette 50 within the chamber 10. In the Z direction, the pair of receiving members 62 is disposed between the first heating unit 31 and the second heating unit 32. One cassette 50 is placed on the pair of receiving members 62. Therefore, a pair of receiving members 62 is provided for each cassette 50. For example, if the frame 61 can accommodate fourteen cassettes 50, fourteen sets of a pair of receiving members 62 are provided within the frame 61.

[0063] Each of the pair of receiving members 62 is provided on inner walls of the frame 61 facing each other in the X direction, for example. The pair of receiving members 62 extends in the Y direction. When multiple pairs of receiving members 62 are provided, the pair of receiving members 62 may be arranged side by side in the Z direction.

[0064] The reflector 63 reflects heat incident from the heater 33 toward the cassette 50. The installation of the reflector 63 improves the heat storage capacity of the interior space (processing space) of the cassette 50. The reflector 63 is plate-shaped and is mounted on the outer surface of the frame 61. To avoid complication, the reflector 63 is not depicted in Figures 1 and 2. Figure 3 only depicts the reflector 63 mounted on the side of the frame 61 where the receiving member 62 is mounted.

[0065] The controller 70 is disposed outside the chamber 10. The controller 70 includes, for example, a computing unit such as a central processing unit (CPU) and a storage unit such as a memory. The controller 70 is, for example, a computer. The controller 70 controls the operation of each component of the heat treatment apparatus 1 based on a control program stored in the storage unit.

[0066] For example, the controller 70 performs feedback control on the value of power applied to the heater 33 or heater 33 a or on / off switching of power application based on the detection value (temperature of the workpiece 100 ) detected by the detection unit 40 .

[0067] Here, as described above, heat from the peripheral region of the workpiece 100 escapes to the outside more easily than heat from the central region of the workpiece 100. Therefore, the area where the multiple heaters 33 are installed may be divided into multiple zones, and the controller 70 may control the heaters 33 for each of the multiple zones. For example, the controller 70 may separately control the heater 33 provided in the peripheral region of the workpiece 100 and the heater 33 provided in the central region of the workpiece 100. In this way, the temperature deviation within the surface of the workpiece 100 can be further reduced.

[0068] Next, the arrangement and shape of the detection unit 40 provided inside the cassette 50 will be further described. FIG. 5 is a schematic side view for illustrating the detection unit 40 provided inside the cassette 50 . FIG. 6 is a schematic diagram showing the detection unit 40 in FIG. 5 as viewed from the line BB. 6 , the lower heat spreader 53 and the workpiece 100 are omitted to avoid complication.

[0069] As shown in Figures 5 and 6 , for example, the detection unit 40 can be mounted on a plate 56a provided with a workpiece support 56. The plate 56a can be secured to the cassette frame 51 using fastening members such as screws. The plate 56a can be formed of a metal such as stainless steel. The plate 56a includes, for example, a plate body 56a1 extending in the direction (X direction) in which the heater 33 extends, and a plurality of extensions 56a2 extending in a direction (Y direction) intersecting the direction in which the heater 33 extends. The extensions 56a2 are spaced apart from one another. The workpiece support 56 or the detection unit 40 can be mounted on each of the extensions 56a2.

[0070] Furthermore, the plates 56a are provided for the following reason. The workpiece supports 56 need to be arranged in a matrix at intervals sufficient to suppress deflection of the relatively thin workpiece 100. However, constructing the cassette frame 51 with these intervals would require the number of beams in the cassette frame 51 to exceed the required number. Because the cassette frame 51 requires a certain degree of rigidity, the beams have a relatively large cross-sectional area, effectively shielding the heat from the heater 33. Therefore, if there are too many beams, more of the heat from the heater 33 is shielded, potentially hindering uniform heating of the workpiece 100. Therefore, the number of beams in the cassette frame 51 is minimized, and the plates 56a, which have a smaller cross-sectional area than the beams of the cassette frame 51, ensure sufficient space for the workpiece supports 56.

[0071] 6 illustrates two extensions 56a2 provided with workpiece supports 56 and one extension 56a2 provided with detection unit 40. However, the number and arrangement of extensions 56a2 can be modified as appropriate. Specifically, multiple detection units 40 can be provided on a single plate 56a. Separate plates can be provided, each provided with only workpiece supports 56 and detection units 40. Furthermore, multiple detection units 40 can be provided within a single cassette 50.

[0072] In addition, as described above, the cassette 50 may be omitted. When the cassette 50 is omitted, for example, the plate 56a may be attached to a horizontal rail or the like provided inside the chamber 10. That is, the plate 56 a only needs to be provided inside the chamber 10 .

[0073] As shown in Figure 5, the detection portion 40 is linear and curved at its front end. For example, the detection portion 40 includes a first portion 40a extending along the surface of the workpiece 100 and a second portion 40b connected to the first portion 40a and extending in a direction (Z direction) intersecting the first portion 40a. In this case, the first portion 40a can be parallel to the surface of the workpiece 100 or inclined relative to it.

[0074] A thermocouple is a device that connects two thermocouple wires at both ends and uses the thermoelectromotive force generated by the temperature difference between the two ends to detect temperature. In this case, one of the junctions between the two thermocouple wires is located near the tip of the thermocouple sheath.

[0075] Therefore, if the detection portion 40 has a first portion 40a extending along the surface of the workpiece 100, radiant heat from the workpiece 100 is more likely to enter a wide area around and at the junction of the thermocouple bare wires. In this case, for example, compared to a case where the first portion 40a of the detection portion 40 extends perpendicular to the surface of the workpiece 100, the amount of radiant heat entering can be significantly increased. Consequently, the accuracy of detecting the temperature of the workpiece 100 can be improved.

[0076] Furthermore, it is difficult to accurately determine the joint portion of the thermocouple wires, as their position varies from one unit to another. In this regard, when the first portion 40a of the detection unit 40 is arranged to extend parallel to the surface of the workpiece 100, the temperature of the workpiece 100 can be accurately measured regardless of the location of the joint portion on the first portion 40a, compared to when it is arranged at an angle. Furthermore, in the heat treatment apparatus 1, multiple cassettes 50 are provided on the cassette holder 60, and multiple detection units 40 are provided in these cassettes 50. As previously described, the position of the joint portion of the thermocouple wires in the detection unit 40 varies from one unit to another. Therefore, in order for each of the multiple detection units 40 to detect the temperature of the workpiece 100 under the same conditions, it is ideal to arrange the first portion 40a to extend parallel to the surface of the workpiece 100.

[0077] Furthermore, when the workpiece 100 is heated, it may bend. If the first portion 40a of the detection portion 40 extends perpendicular to the surface of the workpiece 100, there is a risk of damage to the surface of the workpiece 100 when the workpiece 100 bends and the tip of the first portion 40a of the detection portion 40 contacts the surface of the workpiece 100. In this case, if the first portion 40a of the detection portion 40 extends along the surface of the workpiece 100, even if the first portion 40a of the detection portion 40 contacts the surface of the workpiece 100, the contact is linear rather than point, thus minimizing damage to the surface of the workpiece 100. Furthermore, since the first portion 40a of the detection portion 40 extends along the surface of the workpiece 100, even if it contacts the surface of the workpiece 100, the tip of the first portion 40a is more likely to bend perpendicularly due to contact with the workpiece 100, minimizing damage to the surface of the workpiece 100.

[0078] Furthermore, if plate 56a is present between workpiece 100 and heater 33, radiant heat from heater 33 is blocked by plate 56a. Therefore, when viewed from the Z direction, it is estimated that the temperature of the area of ​​workpiece 100 that overlaps plate 56a is lower than the temperature of the area of ​​workpiece 100 that does not overlap plate 56a. Therefore, if at least the front end of the first portion 40a of the detection unit 40 overlaps plate 56a when viewed from the Z direction, there is a risk that the accurate temperature of the workpiece 100 cannot be detected.

[0079] Therefore, in the detection unit 40 of this embodiment, as shown in FIG6 , at least the front end of the first portion 40a of the detection unit 40 does not overlap with the plate 56a when viewed from the Z direction. However, if the distance L1 (mm) from the front end of the first portion 40a of the detection unit 40 is too long, the rigidity of the first portion 40a may become too low. Therefore, the distance L1 (mm) is preferably set to 100 mm or less, for example.

[0080] Furthermore, the radiant heat from the heater 33 is blocked by the beams of the cassette frame 51. Therefore, it is preferable that at least the front end of the first portion 40a of the detection unit 40 does not overlap with the beams provided on the cassette frame 51 when viewed from the Z direction. This allows accurate temperature detection of the workpiece 100.

[0081] Furthermore, as shown in Figure 6, at least the front end of the first portion 40a of the detection section 40 may or may not overlap with the heater 33 when viewed in the Z direction. As shown in Figure 5, a lower heat spreader 53 is provided between the heater 33 and the first portion 40a of the detection section 40. As described above, heat radiated from the heater 33 and incident on the lower heat spreader 53 propagates along the surface of the lower heat spreader 53 and is radiated toward the first portion 40a of the detection section 40 and the workpiece 100. Therefore, the positional relationship between the first portion 40a of the detection section 40 and the heater 33 when viewed in the Z direction can be arbitrarily set. However, the temperature of the area of ​​the workpiece 100 surface that overlaps with the heater 33 when viewed in the Z direction fluctuates less than the temperature of the area of ​​the workpiece 100 surface that does not overlap with the heater 33 when viewed in the Z direction. Therefore, if at least the front end of the first portion 40a overlaps with the heater 33 when viewed in the Z direction, fluctuations in the detected value can be suppressed.

[0082] Furthermore, as shown in Figure 5 , the detection unit 40 can be attached to the plate 56a via a fixture 42. The fixture 42 can, for example, have a hole extending in the Z direction. Furthermore, the fixture 42 can hold the second portion 40b of the detection unit 40, which extends in the Z direction and is inserted into the hole. This stabilizes the posture of the detection unit 40, and consequently, the position of the first portion 40a of the detection unit 40. Consequently, the accuracy of temperature detection of the workpiece 100 can be further improved.

[0083] However, as shown in Figure 5, if the distance L2 (mm) between the end of the fixture 42 on the workpiece 100 side and the first portion 40a of the detection unit 40—that is, the portion of the second portion 40b of the detection unit 40 exposed from the fixture 42—is too short, heat radiated from the fixture 42 is more likely to enter the first portion 40a of the detection unit 40. Consequently, there is a risk that the accurate temperature of the workpiece 100 cannot be detected. Therefore, the distance L2 (mm) is preferably set to, for example, 100 mm or less. Furthermore, if the distance L2 is too long, the posture of the first portion 40a becomes unstable and prone to deflection. Therefore, it is preferable to set the distance L1 (mm) ≥ the distance L2 (mm). Doing so further improves the accuracy of workpiece 100 temperature detection.

[0084] FIG7 is a schematic side view for illustrating a detection unit 40 according to another embodiment. 5 , the first portion 40 a of the detection unit 40 is provided on the back side of the workpiece 100 . In contrast, the first portion 40 a of the detection unit 40 shown in FIG. 7 , is provided on the front side of the workpiece 100 .

[0085] In this case, the detection unit 40 can be mounted on a plate 560. Plate 560 can be configured similarly to plate 56a. However, the workpiece support 56 is not provided on plate 560. Plate 560 can be mounted, for example, on a beam provided in the cassette frame 51 or on the upper soaking plate 52. Alternatively, plate 560 can be mounted on a beam or bracket provided external to the cassette 50. When plate 560 is mounted external to the cassette 50, a hole penetrating the upper soaking plate 52 in the thickness direction can be provided, and the first portion 40a of the detection unit 40 can be mounted inside the cassette 50 via the hole in the upper soaking plate 52.

[0086] In this manner, the temperature of the surface of the workpiece 100 to be subjected to the heat treatment (the upper surface coated with the solution) can be detected, thereby easily improving the quality of the film formed on the surface of the workpiece 100 or the treated portion.

[0087] In addition, the first portion 40a of the detection unit 40 may be provided on both the front side and the back side of the workpiece 100. That is, the first portion 40a of the detection unit 40 may be provided on at least one of the front side and the back side of the workpiece 100.

[0088] The embodiments have been described above by way of example. However, the present invention is not limited to these descriptions. Any embodiment obtained by appropriately adding design changes to the above-described embodiment by those skilled in the art is also included in the scope of the present invention as long as it has the characteristics of the present invention. For example, the shape, size, arrangement, etc. of each member included in the heat treatment apparatus 1 are not limited to the examples and can be changed as appropriate.

[0089] Furthermore, the elements included in the above-described embodiments can be combined as much as possible, and embodiments obtained by combining these elements are also included in the scope of the present invention as long as they include the characteristics of the present invention.

[0090] 1:Heating treatment device 10: Chamber 11, 14: flange 12: Sealing material 13: Open and close doors 15: Cover 16: Exhaust port 20: Exhaust 21: First exhaust part 21a, 22a: Exhaust pump 21b, 22b: Pressure control unit 22: Second exhaust section 30: Heating unit 31: First heating unit 32: Second heating unit 33, 33a: Heater 34: Supporting part 35: Maintenance 40: Detection Department 40a: Part 1 40b: Part 2 41: Connector 42: Fixer 50:Box 51:Box frame 52: Upper heat sink 53: Lower heat sink 54, 55: Side heat sink 56: Workpiece support 56a, 560: Plate 56a1: Plate body 56a2: extension 57: cassette support 60:Box bracket 61:Frame 62: Receive component 63:Reflector 70:Controller 100:Workpiece L1, L2: distance X, Y, Z: direction []

Claims

1. A heat treatment apparatus, comprising: A chamber that houses the workpiece and maintains a gas environment depressurized to below atmospheric pressure; An exhaust section is provided to exhaust air from the interior of the chamber; a heater is disposed inside the chamber; a detection section is disposed inside the chamber to detect the temperature of the workpiece; a support section is provided to support the workpiece; and a plate is disposed inside the chamber and is equipped with the detection section and the support section. And a case, disposed inside the chamber and used to hold the workpiece, the detection part is linear and has: a first part that is close to the surface of the workpiece and extends along the surface of the workpiece; The second part is connected to the first part and extends in a direction intersecting the first part. A temperature measuring point is provided on the front end side of the first part. The detection part and the support part are located at positions separated from each other on the plate. The box has a box frame as a skeleton structure or frame and a heat dissipation plate provided on the outer surface of the box frame. The plate is provided on the box frame.

2. The heat treatment apparatus as claimed in claim 1, wherein, When viewed from a direction perpendicular to the surface of the workpiece, at least the front end side of the first portion overlaps with the heater.

3. The heat treatment apparatus as claimed in claim 1, wherein, The plate has a plate body and an extension extending in a direction intersecting the length direction of the plate body. Multiple extensions are provided, and each extension is provided with the detection part or the support part.

4. The heat treatment apparatus as described in claim 1 or claim 2, wherein, The detection unit is a non-grounded thermocouple, which connects the two ends of two bare thermocouple wires at a joint, and the joint is provided with the temperature measuring point.

5. The heat treatment apparatus as claimed in claim 3, wherein, The detection unit is a non-grounded thermocouple, which connects the two ends of two bare thermocouple wires at a joint, and the joint is provided with the temperature measuring point.

6. The heat treatment apparatus as described in claim 3 or claim 5, wherein, The plate body is arranged along the direction of extension of the heater. One end of the extension is connected to the plate body, and the other end of the extension is provided with the detection part or the support part. When viewed from a direction perpendicular to the surface of the workpiece, the other end overlaps with the heater.

7. The heat treatment apparatus as claimed in claim 1, wherein, The first portion of the detection unit is positioned along the direction in which the heater extends.

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