Valve plate

Abstract

A valve plate has a plate section (1) on which a seal (2) made of an elastomeric material is mounted on the front side. The valve plate also has a connecting device arranged on the back side of the plate section (1) for connecting the valve plate to a carrier of a vacuum valve. The connecting device includes first and second connecting sections (5) extending longitudinally, wherein the first connecting section (5) is located on one side of the longitudinal center of the plate section (1), and the second connecting section (5) is located on the other side of the longitudinal center, and each connecting section is connected to the plate section (1) by means of its two ends spaced apart in the longitudinal direction (3). In the case where a corresponding slit (6) is formed between the plate section (1) and the corresponding connecting section (5), the connecting sections (5) are spaced apart from the plate section (1) in the region between their two ends, and each connecting section (5) has a connecting structure (5c) in the central region of its longitudinal extension for connecting to the end of a corresponding valve stem (8) of the carrier of the vacuum valve.

Description

Technical Field

[0001] The present invention relates to a valve plate having a plate section on which a seal made of an elastic material is mounted on the front side, and the plate section having a longitudinal extension in a longitudinal direction that is greater than a width extension in a width direction perpendicular to the longitudinal direction. The valve plate also has a connecting device arranged on the back side opposite to the front side of the plate section for connecting the valve plate to a carrier of a vacuum valve. Prior Technology

[0002] A valve plate is known to have a joint serving as a connecting device for connection to a support device formed by the valve stem of a vacuum valve, thereby giving the valve plate a certain degree of pivotability about an axis perpendicular to the valve stem. This allows for more uniform compression of the seals arranged on the front side of the valve plate in the closed state of the vacuum valve, compensating for structural tolerances and elastic deformations, particularly the slight bending of the valve stem in the closed state. However, hinged connections within the vacuum region of the vacuum valve are undesirable because they can generate particles during relative movement of the surfaces.

[0003] US 2011 / 0108750 A1 discloses a valve plate of the type described at the beginning. On the back side of a plate section of the valve plate—and on the front side of the plate section—a seal made of an elastomeric material is arranged a longitudinally extending connecting section as a connecting device, the connecting section being connected to the plate section at both ends. Between the ends, the connecting section is spaced apart from the plate section, and a connecting structure is provided at the longitudinal center of the connecting section for connecting the connecting section to one end of the valve stem, wherein one end of the valve stem is inserted into and screwed into a recess in the connecting section. A certain degree of pivoting of the valve plate relative to the valve stem is achieved by the elastic deformation of the connecting section in the form of torsion. Summary of the Invention

[0004] The objective of this invention is to provide an advantageous valve plate of the type described at the beginning, wherein uniform compression of the resilient seal is achieved when the vacuum valve is closed. According to the invention, this is achieved by a valve plate having the features of claim 1.

[0005] The valve plate according to the invention has longitudinally extending first and second connecting sections, wherein the first connecting section is located on one side of the longitudinal center of the plate section, and the second connecting section is located on the other side of the longitudinal center. Each connecting section is connected to the back side of the plate section by means of its longitudinally spaced ends. Each connecting section is spaced apart from the plate section in the region between its ends, thereby forming a corresponding slit between the plate section and the corresponding connecting section. Each connecting section has a connecting structure in the central region of its longitudinal extension for connection with a corresponding valve stem of the carrier device of the vacuum valve.

[0006] By bending the connecting section in a torsional sense, the angular position of the valve plate can be adapted to the precise position of the sealing surface. This (slight) tilt of the valve plate occurs in this case around an axis perpendicular to the valve stem. In this case, the bending of the valve plate relative to an axis perpendicular to the valve stem can be reduced by the construction of the connecting device according to the invention, which has first and second connecting sections. In this case, the compression uniformity of the longitudinal legs of the seal extending in the longitudinal direction of the valve plate can be improved over the length of these longitudinal legs. The compression difference of the narrow side legs of the seal extending in the width direction can also be reduced in this way compared with the compression of the longitudinal legs of the seal.

[0007] In an advantageous embodiment of the invention, the respective connecting sections have plate-shaped first and second connecting arms that extend from their respective ends to the central region of the longitudinal extension of the connecting section. Preferably, these plate-shaped connecting arms are located in planes that form an angle of less than 20° with the positive side of the plate section of the valve plate, respectively, in a plane, wherein these planes extend from the respective ends of the connecting section toward the longitudinal center of the connecting section away from the positive side of the plate section.

[0008] The plate-shaped connecting arms can be interconnected by a thickened portion in the central region of the longitudinal extension of the respective connecting arms, forming the connecting structure in the thickened portion.

[0009] In an advantageous embodiment of the invention, the connecting structure is formed in the region of the first narrow side of the corresponding connecting segment, and the corresponding connecting segment is reinforced in its extension region in the width direction adjacent to the second narrow side of the corresponding connecting segment relative to its extension region in the width direction adjacent to the first narrow side, preferably by a reinforcing web protruding in the direction toward the plate segment of the valve plate. Simple diagram description

[0010] Further advantages and details of the invention are explained below with reference to the accompanying drawings. In the drawings:

[0011] Figures 1 and 2 show oblique views of an embodiment of the valve plate according to the invention from different viewing directions;

[0012] Figures 3 and 4 show the front and rear views;

[0013] Figures 5 and 6 show side views of the narrow, longitudinally extending sides of the valve plates opposite each other;

[0014] Figures 7 and 8 show cross-sectional views along lines AA and BB in Figure 5;

[0015] [Figure 9] shows a simplified diagram of a vacuum valve with a valve plate according to the invention, based on the embodiment shown in Figures 1-8;

[0016] [Figure 10] and [Figure 11] show cross-sectional views along lines CC and DD of Figure 9 (with the vacuum valve open);

[0017] [Figure 12] shows a cross-sectional view in a central position similar to that in Figure 10;

[0018] [Figure 13] shows a cross-sectional view similar to that in Figure 10 with the vacuum valve closed. Implementation Method

[0019] An embodiment of the valve plate according to the invention is shown in Figures 1 to 8. The valve plate has a plate section 1 on which an annular seal 2 made of an elastic material is mounted, preferably at least substantially flat, on its front side. For example, the seal 2 can be vulcanized onto the plate section 1. An O-ring may also be provided that is received in a groove.

[0020] The length a of plate segment 1 is greater than the width b, preferably more than twice the width b. Therefore, plate segment 1 has a longitudinal extension in the longitudinal direction 3, which is greater than the width extension in the width direction 4 perpendicular to the longitudinal direction, preferably more than twice the width extension.

[0021] The thickness of plate section 1 is significantly less than the width b, preferably less than half the width b.

[0022] From the plan view of the front side of plate section 1, the plate section in this embodiment preferably has a rectangular outline with rounded corners.

[0023] To connect the valve plate to the valve stem, a connecting device is used with first and second connecting sections 5 having longitudinal extension. Therefore, the extension of the connecting section 5 in the longitudinal direction 3 is greater than its extension in the width direction 4. Preferably, the longitudinal extension of the connecting section 5 is more than twice the width extension.

[0024] Two connecting sections 5 are located on either side of the longitudinal center of the plate section 1 (= the center of the extension in the longitudinal direction 3). The connecting sections 5 are preferably arranged symmetrically about the longitudinal center of the plate section 1 and the longitudinal extensions of the connecting sections are parallel to each other, wherein the connecting sections extend parallel to the longitudinal extensions of the plate sections in the central region of the extensions of the plate sections in the width direction.

[0025] The connecting section 5 extends to the back side of the plate section 1, opposite to the front side, only at its two ends spaced apart from each other along the longitudinal direction 3. In this embodiment, a longitudinally extending reinforcing rib 1a is formed on the back side of the plate section 1, in which the plate section has a greater thickness and the reinforcing rib extends in the longitudinal direction 3. The reinforcing rib 1a forms a stepped ridge on the back side of the plate section 1. The two ends of the connecting section 5 are connected to the plate section 1 in the region of the reinforcing rib 1a.

[0026] The reinforcing rib 1a can also be removed, so that the plate section can also be constructed to be at least substantially flat on the back side. If desired, the plate section can have a slightly greater overall thickness.

[0027] In the region between the two ends of the connecting section 5, the connecting section has a distance from the plate section 1, thereby forming a slit 6 between the plate section 1 and the corresponding connecting section 5.

[0028] In this embodiment, plate segment 1 and connecting segment 5 are integrally constructed with each other and form the metal substrate of the valve plate. Alternatively, multiple parts with compatible construction and materials can also be provided. Thus, for example, connecting segments 5 can be constructed as separate components, with their ends welded to plate segment 1. It is also conceivable and possible to screw the ends of the respective connecting segments 5 to plate segment 1.

[0029] In the region at the longitudinal center of plate segment 1, two connecting segments 5 can be constructed integrally with each other and integrally with plate segment 1 using their two opposing ends as shown in the figure.

[0030] The connecting section 5 has opposing first and second narrow sides 5a and 5b (=edge surfaces), which define the respective connecting section in the width direction 4. Specifically, the narrow sides 5a and 5b are perpendicular to the plane 15 on the front side of the valve plate. In the central region of the longitudinal extension of the first narrow side 5a, a connecting structure 5c is formed in the respective connecting section 5. This connecting structure is used to connect with the end section of the corresponding valve stem. For this purpose, the connecting structure 5c is oriented in the width direction 4. In this embodiment, the connecting structure is constructed as a recess in the first narrow side 5a of the connecting section 5. The valve stem 8 is inserted into this recess with its end section. In Figure 4, a portion of the valve stem 8 connected to the connecting section 5 is shown in dashed lines. A hole 5d is provided at the bottom of the recess, extending to the second narrow side 5b of the corresponding connecting section. A fastening screw 7 (also shown in dashed lines in Figure 4) can be screwed into the thread of the end of the corresponding valve stem through this hole. The valve stem 8, which is connected to the valve plate, then protrudes from the connecting section 5 at the first narrow side 5a, as can be seen from Figure 4.

[0031] The corresponding connecting segment 5 has two plate-like connecting arms 5e and 5f, which extend from their respective ends to the longitudinal center of the connecting segment and are connected to each other thereby through a thickened portion in which a connecting structure 7 is formed, and in this embodiment, the materials are integrally connected. The thickness of the connecting arms 5e and 5f is therefore significantly less than their length and width.

[0032] In this embodiment, plate-shaped connecting arms 5e and 5f are located in planes 16 and 17, which form an angle of less than 20° with the positive side of plate segment 1 located in plane 15. Connecting arms 5e and 5f extend from their respective ends of connecting segment 5 away from the positive side of plate segment 1 towards the longitudinal center of the connecting segment (see Figure 5). Therefore, planes 16 and 17 are inclined relative to plane 15. Preferably, the angle between the corresponding planes 16 and 17 and plane 15 is greater than 5°.

[0033] Each connecting segment 5 essentially has a reinforcing web 5g projecting from the plate-like connecting arms 5e, 5f in the direction toward the plate segment 1. The reinforcing web 5g is located in the region of the corresponding connecting segment adjacent to the second narrow side 5b. In cross-section, referring to Figures 8, 9, and 10, the reinforcing web 5g is perpendicular to the connecting arms 5e, 5f. Therefore, the connecting segment 5 is reinforced by the reinforcing web 5g in its extension region in the width direction adjacent to the second narrow side 5b relative to its extension region in the width direction adjacent to the first narrow side 5a. Thus, this reinforcement is located in the region of half of the extension of the connecting segment 5 in the width direction 4, which is adjacent to the second narrow side 5b, directly at the second narrow side 5b in this embodiment.

[0034] In this embodiment, the reinforcing web 5g is located in a plane perpendicular to the plane 15 on the front side of the plate segment 1.

[0035] In a modified embodiment, the reinforcement of the connecting segment in the region adjacent to the second narrow side 5b can also be formed in different ways, particularly by making the connecting segment 5 thicker in that region. For example, the connecting arms 5e, 5f can have steps extending in their longitudinal direction, thereby increasing the thickness of the connecting arms 5e, 5f in the region adjacent to the second narrow side 5b relative to the region adjacent to the first narrow side 5a.

[0036] A simplified partial schematic diagram of a vacuum valve having a valve plate according to the invention is shown in Figures 9 to 13. The vacuum valve has first and second valve stems 8 as support devices for carrying the valve plate. As already described, these valve stems are connected to a connecting structure 5c of a corresponding connecting section 5, wherein a fastening screw 7 is screwed into an internal thread at the end of the valve stem 8. The sections of the valve plate and valve stem 8 adjacent to the valve plate are located within the internal space of the valve housing 9. In the open state of the vacuum valve, the valve plate releases the valve port 10, thereby releasing the passage through the valve housing 9 between the valve port 10 and the opposing opening 11, see Figure 10. In the closed state of the vacuum valve, the valve port 10 is closed and sealed by the valve plate, see Figure 13.

[0037] The valve stem 8 is led out of the internal space of the valve housing 9 in a sealed manner, for example by means of a corresponding bellows 12. To open and close the vacuum valve, the valve stem 8 is moved by means of a valve actuation device located outside the vacuum region. For this purpose, a longitudinal actuation device 13 and a transverse actuation device 14 are schematically shown in the figure. By means of the longitudinal actuation device 13, the valve stem 8 moves longitudinally from the open state of the vacuum valve until the valve plate is opposite the valve port 10, but still raised from the valve port 10, see Figure 12. From this intermediate position, the valve stem 8 and therefore the valve plate also move in a direction perpendicular to the longitudinal axis of the valve stem by means of the transverse actuation device 14, whereby the seal 2 of the valve plate presses against the valve seat surrounding the valve port 10 inside the valve housing 9. This valve seat is formed by a sealing surface.

[0038] The vacuum valve having the valve plate according to the invention can also be constructed in a modified form. For example, in order to close the vacuum valve from the middle position, the valve stem 8 can also pivot about a swing axis perpendicular to the longitudinal axis of the valve stem.

[0039] A common longitudinal drive 13 and / or a common transverse drive 14 may also exist for the valve stem.

[0040] The connecting structure and the corresponding valve stem ends that interact with the connecting structure may also have modified constructions.

[0041] When the valve plate presses against the valve seat, the valve stem 8 bends to a certain extent. In this case, the angular position of the valve plate relative to the valve seat can be adapted by bending the connecting section 5. This bending of the connecting section 5 is particularly a torsion of the connecting section. By reinforcing the connecting section 5 in the width direction 4 in the extended region adjacent to the second narrow side 5b of the connecting section, it is possible to improve the compression of the longitudinal leg of the seal 2, which is located on the side of the valve plate away from the valve actuation device, compared to a construction without such a reinforced connecting section. Thus, the compression of the longitudinal leg of the seal 2 away from the valve actuation device can be adapted to the longitudinal leg of the seal 2 near the valve actuation device.

[0042] The reinforcement of the connecting section 5 of the valve plate is therefore located in the half extension of the connecting section 5 in the width direction 4, away from the valve drive device.

[0043] The uniform compression of the longitudinal leg of seal 2 and the compression of the two narrow side legs of seal 2 with at least the same intensity are achieved by the following design of the valve plate: two connecting sections that are respectively connected to the plate section at both ends of the valve plate and the interaction between the two connecting sections and the two valve stems.

[0044] 1: Plate Section 1a: Reinforcing ribs 2: Seals 3: Vertical direction 4: Width direction 5: Connecting Section 5a: First narrow side 5b: Second narrowest side 5c: Connection structure 5d: Hole 5e: Connecting arm 5f: Connecting arm 5g: Strengthens the abdominal plate 6: Slit 7: Fastening screws 8: Valve stem 9: Valve body 10: Valve port 11: Open your mouth 12: Corrugated pipe 13: Longitudinal drive device 14: Lateral drive device 15: Plane 16: Plane 17: Plane

Claims

1. A valve plate having a plate section (1) on which a seal (2) made of an elastomeric material is mounted on the front side, and the plate section (1) having a longitudinal extension in a longitudinal direction (3) greater than a width extension in a width direction (4) perpendicular to the longitudinal direction (3), the valve plate further having a connecting device arranged on a back side opposite the front side of the plate section (1) for connecting the valve plate to a carrier of a vacuum valve, characterized in that the connecting device has first and second longitudinally extending connecting sections (5), wherein the first connecting section (5) is located on one side of the longitudinal center of the plate section (1), and the second connecting section (5) is located on the other side of the longitudinal center, and the connecting sections are respectively connected to the plate section (1) by means of two ends spaced apart in the longitudinal direction (3), wherein, When a slit (6) is formed between the plate section (1) and the corresponding connecting section (5), the connecting section (5) is spaced apart from the plate section (1) in the region between its two ends, and the connecting section (5) has a connecting structure (5c) in the central region of its longitudinal extension for connecting to the end section of the corresponding valve stem (8) of the carrier device of the vacuum valve, wherein the corresponding connecting section (5) has plate-shaped first and second connecting arms (5e, 5f) extending from the corresponding ends of the connecting section (5) to the central region of the longitudinal extension of the connecting section (5), wherein the plate-shaped connecting arms (5e, 5f) are located in a plane that forms an angle of less than 20° with the positive side of the plate section (1) in a plane, wherein the plane starts from the corresponding ends of the connecting section (5) and moves away from the positive side of the plate section (1) toward the longitudinal center of the connecting section (5).

2. As in request item 1, the valve plate, wherein, The plate-shaped connecting arms (5e, 5f) are connected to each other in the central region of the longitudinal extension of the corresponding connecting section (5) by a thickening portion, in which the connecting structure (5c) is formed.

3. As in request item 1, the valve plate, wherein, The connecting structure (5c) has a recess in the connecting section (5) for accommodating the end section of the valve stem.

4. As in request item 1, the valve plate, wherein, The plate section (1) has a reinforcing rib (1a) extending in the longitudinal direction (3) on the back side opposite to the front side of the plate section, and the two ends of the corresponding connecting section (5) are connected to the reinforcing rib.

5. As in request item 1, the valve plate, wherein, The connecting structure (5c) is formed in the region of the first narrow side (5a) of the corresponding connecting segment (5), and the corresponding connecting segment is reinforced in the width direction (4) of its extension region adjacent to the opposite second narrow side (5b) of the corresponding connecting segment (5) relative to the width direction (4) of its extension region adjacent to the first narrow side (5a).

6. As in request item 5, the valve plate, wherein, In the extension region of the corresponding connecting section (5) in the width direction (4) adjacent to its second narrow side (5b), the reinforcing web (5g) protrudes from the corresponding connecting section (5) in the direction toward the plate section (1) of the valve plate.

7. A vacuum valve having a valve plate as claimed in any one of claims 1 to 6, the valve plate being carried by first and second valve stems (8) of the vacuum valve, the valve stems being adjustable by valve actuation devices (13, 14) to open and close the vacuum valve.

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