Integrated metrology system

Abstract

This invention relates to an integrated metrology system for evaluating semiconductor wafers, comprising: a body having a rear side and a front side, the front side defining a front boundary of the body; a detachable support unit detachably coupled to the body and supporting the body while extending to the outside of the front boundary; an auxiliary support unit configured to support the body in the absence of the detachable support unit; a front interface; and a keyboard movably coupled to the body, the keyboard being configured to move between a plurality of positions including a first position and a second position, wherein when positioned in the first position, the keyboard extends to the outside of the front boundary by a first distance, and when positioned in the second position, the keyboard does not extend beyond an imaginary line located at a distance of up to a second distance from the front boundary, the second distance being less than the first distance.

Description

Integrated metering system The present invention relates to an integrated metering system. An integrated metrology system should be suitable for integration with another system, such as a semiconductor manufacturing system. This integration typically involves connecting the integrated metrology system to the manufacturing system and allowing wafers to be exchanged between the integrated metrology system and the manufacturing system. An integrated metering system should meet different conflicting requirements; it should be compact (eg present a minimal footprint), easy to service and perform a highly accurate metering process. An integrated metrology system may include a strong light source that dissipates a large amount of heat. The dissipated heat may deform the optics of the integrated metrology system. There is an increasing need to provide an efficient integrated metering system. The present invention provides an integrated metrology system for evaluating semiconductor wafers, the integrated metrology system comprising: a main body having a rear side and a front side, the front side defining a front boundary of the main body; one or more detachable support units detachably coupled to the main body and supporting the main body while extending outside the front boundary; at least one auxiliary support unit configured to support the main body in the absence of the one or more detachable support units; a front interface; and a keyboard movably coupled to the main body, wherein the keyboard is configured to move between a plurality of positions, the plurality of positions comprising a first position and a second position, wherein when positioned in the first position, the keyboard extends a first distance outside the front boundary, and wherein when positioned in the second position, the keyboard does not extend beyond an imaginary line located up to a second distance from the front boundary, wherein the second distance is less than the first distance. Further, the integrated metering system includes the at least one auxiliary support unit configured to support the main body without extending to the outside of the front boundary. Further, the at least one auxiliary supporting unit is movable relative to the main body. Further, the at least one auxiliary support unit is configured to move relative to the main body along a first direction, wherein the one or more detachable support units are configured to move relative to the main body along a second direction, wherein the first direction is different from the second direction. Further, the second direction is a vertical direction, and the first direction is a horizontal direction. Further, the one or more detachable support units include wheels and arms. Further, the main body includes a support frame defining a support frame interior space, wherein the rear portion of the arm is shaped and dimensioned to move within the support frame interior space. Further, the integrated metrology system includes a fixing element configured to maintain the arm in a fixed position while the arm is partially positioned within the interior space of the support frame. Further, the arm includes a cavity, and wherein the fixation element has an edge shaped and dimensioned to enter the cavity. Furthermore, the integrated metering system includes at least one additional supporting unit positioned below the main body. Further, the at least one additional supporting unit is closer to the rear side of the main body than the detachable supporting unit. Further, the at least one additional support unit has a single degree of freedom. Further, the one or more detachable support units include wheels and arms, wherein the wheels are rotatable around wheel axles, and wherein the wheel axles are rotatable relative to the arms. Further, the one or more detachable support units include a wheel and an arm, wherein the wheel is rotatable around a wheel axle, wherein the wheel axle is coupled to a wheel housing, and wherein the wheel housing is rotatable relative to the arm. Further, the integrated metering system includes a display located at the front side. Further, the second position is a folded position, and the first position is an extended position. Further, the keyboard is rotatably coupled to the main body. Further, when positioned in the second position, the keyboard is rotatably coupled to the body via a shaft positioned proximate a bottom of the keyboard. Further, the second position is a vertical position, and the first position is a horizontal position. Further, the keyboard is non-rotatably coupled to the main body. Further, when positioned at the second position, the keyboard does not extend outside of the front border. Further, when positioned at the second position, the keyboard extends outside of the front boundary by the second distance. Furthermore, the integrated metering system includes a rear interface for mechanically connecting the integrated metering system to another system. Furthermore, the integrated metrology system includes a rear interface for mechanically connecting the integrated metrology system to an equipment front-end module of a semiconductor manufacturing system. Further, the front interface includes an axis, and wherein the keyboard is configured to rotate about the axis while moving between the plurality of positions. Furthermore, the integrated metering system includes a fixing element for retaining the keyboard in the second position. Further, the integrated metering system includes a recess, wherein at least a portion of the keyboard is located within the recess when in the second position. Further, the body includes an optical head and a light source; wherein the light source is positioned at a lower portion of the body, and wherein the optical head is positioned at an upper portion of the body, and wherein the optical head is optically coupled to the light source via an optical path, the optical path including an optical cable. Further, the light source and the optical head are positioned at different compartments of the main body, wherein the optical head is positioned above the light source. Further, the main body includes a plurality of intermediate compartments positioned between the light source and the optical head. Furthermore, the integrated metering system includes a detachable module detachably coupled to the intermediate compartment. Further, the light source is positioned within the perforated compartment. Further, the main body includes a main body frame and a plurality of panels detachably coupled to the main body frame. Furthermore, the integrated metering system includes an air suction element positioned at the bottom of the main body. Further, the integrated metering system includes an air suction element configured to discharge air from at least a vicinity of the light source toward a space below a lowermost compartment of the main body. Furthermore, the air suction element is a fan. Further, the integrated metering system includes an air suction element configured to exhaust air from at least a majority of the body. Further, the integrated metering system includes an air suction element configured to exhaust air from the light source rather than from the optical head. Further, the light source is positioned in the lowest compartment of the main body. Furthermore, the optical head is positioned below a high-power mechanical stage control unit of the integrated metrology system. Furthermore, the integrated metering system includes a plurality of compartments and a plurality of detachable modules detachably coupled to the plurality of compartments. Furthermore, the plurality of detachable modules include computer modules. Furthermore, the light source is a laser-driven light source. Furthermore, the power consumption of the light source exceeds 50 watts. Further, the integrated metering system includes a plurality of compartments, wherein at least some of the compartments are sealed and at least some other of the compartments are not sealed. Further, the integrated metering system comprises a plurality of compartments, wherein at least one of the compartments has a perforated bottom and at least one other of the compartments has a non-perforated bottom. The integrated metering system of the present invention is compact, easy to maintain, and can perform a highly accurate metering process. In the detailed description below, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be understood by those skilled in the art that the present invention may be practiced without these specific details. In other instances, well-known methods, procedures, and components have not been described in detail in order not to obscure the present invention. The subject matter which is regarded as the invention is particularly pointed out and distinctly claimed in the concluding portion of the specification.The invention, however, both as to its organization and method of operation, together with objects, features, and advantages thereof, will be best understood from the following detailed description when read with reference to the accompanying drawings. It will be understood that for simplicity and clarity of illustration, the elements shown in the drawings are not necessarily drawn to scale. For example, for clarity, the dimensions of some elements may be exaggerated relative to other elements. Further, where deemed appropriate, reference numerals may be repeated in the drawings to indicate corresponding or similar elements. Because most of at least one of the illustrated embodiments of the present invention can be implemented using electronic components and circuits known to those skilled in the art, the details will not be explained to a greater extent than is considered necessary than shown above in order to understand and appreciate the basic concepts of the present invention and in order not to obscure or contradict the teachings of the present invention. Any numbers or values ​​shown below should be considered as non-limiting examples. Any of the drawings may or may not be to scale. FIG1 is a perspective view of an example of an integrated metrology system 100 and another system 10, wherein the other system in FIG1 includes an equipment front-end module. FIG2 is a side view of an example of the integrated metrology system 100 and another system 10. FIG3 is a perspective view of an example of the integrated metrology system 100 and another system 10. FIG4 is a side view of an example of the integrated metrology system 100 and another system 10. FIG5 is a top view of an example of the integrated metrology system 100 and another system 10. FIG6 is a top view of an example of the integrated metrology system 100 and a portion of another system 10. FIG7 is a top view of an example of the integrated metrology system 100 and another system 10 and a so-called safety boundary 142. FIG8 is a top view of an example of the integrated metrology system 100 and a portion of another system 10. FIG9 is a perspective view of an example of the integrated metrology system 100 and another system 10. FIG10 is a perspective view of an example of the integrated metrology system 100 and another system 10. FIG11 is a side view of an example of the integrated metrology system 100 and another system 10. FIG12 is a perspective view of an example of a portion of the integrated metrology system 100 and a portion of another system 10. FIG13 is a perspective view of an example of a portion of the integrated metrology system 100. FIG14 is a rear view of an example of the integrated metrology system 100 without some of its external panels. FIG15 is a perspective view of an example of the integrated metrology system 100 without some of its external panels. FIG16 is a rear view of an example of a portion of the integrated metrology system 100 without some of its external panels. FIG17 is a perspective view of an example of a mechanical stage and chuck of the integrated metrology system 100. FIG18 is a rear view of an example of a mechanical stage and chuck of the integrated metrology system 100. FIG19 is a perspective view of an example of a mechanical stage and chuck of the integrated metrology system 100. FIG20 is a perspective view of an example of an optical component of the integrated metrology system 100. FIG21 is a perspective view of an example of a portion of the integrated metrology system 100 without some of its external panels. FIG22 and FIG23 are schematic diagrams of a keyboard in different positions. 1 to 5 and 9 to 11 , the integrated metering system 100 is connected to another system 10 through an interface (such as a rear interface). The rear interface can mechanically detachably connect the integrated metering system to the other system. The integrated metering system 100 has a front side 114, a rear side 112, and may include: a. Main body 110. The front of the main body defines a (virtual) front boundary 140 located on the floor below the integrated metering system 100. A safety boundary 142 can be defined (eg, by a user of the integrated metering system) further away (away from the main body) than the front boundary 140. b. Display 201. c. Keyboard 200. d. A front interface 210 for supporting a keyboard. e. A high-power mechanical stage control unit 260 for providing a high-voltage control signal to the mechanical stage. f. Various panels, including a first front panel 101, a second front panel 105, a side panel 103, and another side panel 106. The panels are detachable and can be detachably coupled to the main body frame 111 of the main body 110. g. One or more detachable support units 130 , each of which may include wheels 132 and arms 134 . h. At least one auxiliary support unit 150, each of which may include a leg. i. At least one additional support unit 160 , each additional support unit may include an additional wheel 163 . The display 201 , the keyboard 200 , the front interface 210 , the first front panel 101 , and the second front panel 105 are positioned at the front side 114 of the integrated meter system. Integrated metrology system with multiple support units Provides a stable and compact integrated metering system. It has been found that the integrated metering system should have a large support base, which will contribute to the stability of the integrated metering system during transportation of the integrated metering system. After the integrated metering system is transported to the desired location, the large support base may not be needed, especially since the large support base unnecessarily increases the footprint of the integrated metering system. An integrated metering system is provided, comprising: a main body 110 having a rear side and a front side, the rear side facing another system, the front side defining a front boundary 140 of the main body; one or more detachable support units 130, which are detachably coupled to the main body and support the main body while extending to the outside of the front boundary; and at least one auxiliary support unit 150, which is configured to support the main body in the absence of the one or more detachable support units. After the integrated metering system 100 is installed (e.g., see FIG9 ), the one or more detachable support units 130 may be removed, and the main body 110 may be supported by the at least one auxiliary support unit 150. The at least one auxiliary support unit 150 does not extend as far beyond the front boundary as the one or more detachable support units, and may not even extend beyond the front boundary at all. The support base may be defined by at least one additional support unit 160 positioned below the main body; and any one of one or more detachable support units 130 (when still connected to the main base) and at least one auxiliary support unit 150 (when positioned to support the main body). The distance between the at least one additional supporting unit 160 and the one or more detachable supporting units 130 exceeds the distance between the at least one additional supporting unit 160 and the at least one auxiliary supporting unit 150 . Each of the at least one additional support unit, the one or more detachable support units, and the at least one auxiliary support unit may be movable relative to a floor on which the integrated metering system is located, or may be fixed. At least one auxiliary support unit 150 is configured to move relative to the main body along a first direction (e.g., upward and downward) between one position (upper position) in which the at least one auxiliary support unit contacts the floor and another position (lower position) in which the at least one auxiliary support unit does not contact the floor. The one or more detachable supporting units 130 are configured to move relative to the main body along a second direction (eg, outside the main body, in a horizontal direction). The first direction may be different from the second direction. The one or more detachable support units 130 may be removed after at least one additional support unit 160 is moved to a lower position in which they support the main body. Examples of various support units are shown in Figures 12-13. There may be any number of any type of support units (detachable support units, auxiliary support units, and additional support units). Each detachable support unit 130 comprises a wheel 132 and an arm 134. The wheel 132 is shown to have two degrees of freedom. The wheel 132 is rotatable about an axle 131. The axle 131 is connected to a wheel housing 137 which in turn is rotatable (relative to the body) along another axis 135. In Figures 12 and 13, the axle is horizontal and the other axis is vertical. The arm 134 may be supported by a support frame 119 that defines a support frame interior space 113 within which the arm 134 may be moved toward and outside the body, eg, performing horizontal movement. In FIG. 12 , the arm 134 is located outside the support frame interior space 113 , and in FIG. 13 , the arm 134 is located partially within the support frame interior space 113 . To move within the frame interior space, the rear portion of the arm 134 is shaped and dimensioned to move within the support frame interior space 113 . The arm 134 can be secured to the support frame 119 by a securing element 117 configured to maintain the arm in a fixed position while the arm is partially positioned within the interior space of the frame. The securing element 117 can be a pin that can be pushed or rotated within a hole (which can be a threaded hole) formed in the support frame, thereby pressing the arm toward the other side of the support frame. The arm 134 may include an arm cavity 133 in which an edge of the fixation element 117 may be positioned when fixing the position of the arm. Each additional supporting unit 160 may be positioned below the main body and may include an additional wheel 163 and an additional housing 167. The additional wheel 163 may rotate around an additional shaft 161 rotatably coupled to the additional housing 167. The additional housing 167 may be fixed to the main body, or may be rotatably coupled to the main body by yet another axle (not shown), thereby allowing the additional wheel to have two degrees of freedom. Each additional supporting unit 160 may be located closer to the rear side of the main body than the detachable supporting unit 130. Any other position of any supporting unit may be provided. The auxiliary support unit 150 may be a leg, may include wheels, may be fixed to the main body or may be movable relative to the main body. Movement (between the upper position and the lower position) may be accomplished by rotation in a linear or nonlinear manner. [Removable keyboard] A safety boundary (also referred to as a "safety light barrier" and also as a "light curtain") (shown as safety boundary 142 in FIG. 7 ) can be defined by the user of the integrated metrology system 100. If any part of the integrated metrology system 100 crosses safety boundary 142, the user cannot operate the integrated metrology system 100 (and / or even another system 10). One or more sensors can be provided to monitor the safety boundary and detect whether a keyboard or any other component crosses the safety boundary. If so, they can generate an alarm, prevent the manufacturing process from proceeding, and so on. In FIG. 7 , safety boundary 142 is defined by a portion 143 of the frame of another device. The integrated meter system 100 includes a keypad that extends outside of the main body when in use. Keeping the keyboard open may cross the safety boundary or may force the body of the integrated meter system 100 to be small enough so that the integrated meter system 100 does not cross the safety boundary even when the keyboard is open. An integrated metering system may be provided that may include a body 110 having a rear side facing another system and a front side defining a front boundary 140 of the body; a front interface 210; and a keyboard 200 movably coupled to the body via the front interface 210. The keyboard 200 is configured to move between a plurality of positions, including a first position and a second position. When positioned in the first position (extended or open position), the keyboard extends a first distance outside the front border 140. The first distance can be approximately the width of the keyboard. When positioned in the second position (folded or closed position), the keyboard does not extend beyond an imaginary line located up to a second distance from the front border, the second distance being less than the first distance. The imaginary line can fall on the front border 140 or can be spaced apart from the front border 140. In Figures 1 to 5, the keyboard is in a first position. In Figures 7 to 11, the keyboard is in the second position. 22 and 23 show the keyboard in a first position and an additional embodiment of the keyboard in a second position. Figures 22 and 23 show the second position in which the keyboard still extends slightly beyond the first boundary and also show a recess 209 formed in the body into which the keyboard and front interface can fully or partially enter when positioned in the second position. The keyboard (more precisely, the front interface) may be rotatably coupled to the main body, for example, via a keyboard shaft 207 . The keyboard shaft may be positioned near the top of the keyboard. Figure 22 shows a keyboard shaft 207 positioned near the bottom of the keyboard. The second position may be a vertical position or a nearly vertical position (see FIG. 22 ), and the first position may be a horizontal position. The keyboard can be non-rotatably coupled to the body. A keyboard securing element may be provided for retaining the keyboard in the second position (by mechanical or electromagnetic means). The keyboard may be replaced by another unit that is movable between different positions, including an open position and a closed position. [Integrated metering system for heat removal and serviceability] The integrated metering system 100 is connected to another system (via a rear interface). It may be desirable to perform maintenance operations without disconnecting the integrated metering system 100 from the other system. The integrated metering system 100 may include a body frame protecting the body and a plurality of panels. The panels are removably coupled to the body frame (e.g., via clips, screws, bolts, and nuts) so that they can be easily removed during maintenance operations. The body frame may include openings (such as opening 109 in FIG. 16 ) that provide easy access to various portions of the body. Furthermore, the integrated metering system 100 may have a modular construction for ease of maintenance and / or upgrade of the integrated metering system 100. The various components of the integrated metering system 100 may be arranged as detachable modules positioned in multiple compartments of the integrated metering system 100. The integrated metrology system 100 may include a very intense light source that can dissipate a large amount of heat. The light source is spaced apart from the optical head to prevent heat from deforming the optical components of the optical hardware and damaging or deforming other components of the integrated metrology system 100. In addition, heat is transferred to the exterior of the body via one or more air extraction elements (e.g., vents). An integrated metrology system 100 for evaluating semiconductor wafers may be provided. The metrology system may include a main body 110 , which may include an optical head 230 and a light source 220 . The light source 220 is positioned at the lower portion of the main body. The optical head 230 is positioned at the upper portion of the main body. The optical head 230 is optically coupled to the light source 220 via an optical pathway that includes an optical cable (represented as optical cable 208 in FIG. 14 ) and may include additional optical components. 14-15 illustrate the body 110 as including a plurality of compartments, such as a first compartment 211 to a fourth compartment 214. The first compartment 211 is the lowest compartment, and the fourth compartment 214 is the highest compartment. The optical head 230 is positioned within the fourth compartment 214 . The mechanical stage 280 and the chuck 281 are positioned within the third compartment 213 . The computer module 270 is positioned within the second compartment 212 . The light source 220 is positioned within the first compartment 211 . As described above, the light source 220 and the optical head 230 are positioned at different compartments of the main body, wherein the optical head 230 is positioned above the light source 220. In the example illustrated in Figures 14 and 15, the second compartment 212 and the third compartment 213 are intermediate compartments positioned between the light source 220 and the optical head 230. As shown in Figures 14 and 15, and particularly in Figure 21, air from the vicinity of the light source is exhausted (e.g., drawn) through one or more air suction elements 250 positioned below the light source 220. A perforated plate 290 (including holes 291) is positioned between the one or more air suction elements 250 and the light source 220 and allows the one or more air suction elements 250 to draw air from the space above the one or more air suction elements 250 through openings formed in the perforated plate 290. An additional perforated plate is shown in Figure 15. Multiple perforated plates may be provided at the bottom of one or more compartments. The air suction element 250 is positioned at the bottom of the main body and may (partially) extend outside the main body and is located in the space 102 positioned below the lowest compartment of the main body. The air suction element may even exhaust air from at least a large portion of the body, for example via holes formed in the compartments, air may be sucked from the second compartment 212 and from any other compartment that is not sealed. 14-15 also illustrate that the optical head 230 is positioned below (and even just below) the high-powered mechanical stage control unit 260 of the integrated metrology system. The light source 220 may be a laser-driven light source. The power consumption of the light source may exceed 50 watts, for example, it may range from 70 to 140 watts. 17 and 18 illustrate a robotic stage 280 that supports a chuck 281 and allows the chuck to move in various directions (e.g., X, Y, and Z). A first end effector 301 and a second end effector 302 are also provided. The first end effector 301 is positioned above the second end effector 302. The first and second end effectors can move in various ways (e.g., upward and downward) to allow the first end effector 301 to receive a first wafer (from another system 10) while the second end effector can receive another wafer from the chuck support that can be accessed by another system. The following reference numerals are used in the drawings and description: 10 Another system (other system) 100 Integrated Metering System 101 First Front Panel 102 Space below the main body 103 Side Panel 104 Top Panel 105 Second front panel 106 Other side panel 109 Opening 110 Main Body 111 Main frame 112 rear side 113 Support frame internal space 114 front side 116 rear interface 117 Arm fixing element 119 Support frame 130 Removable support unit 131 Axle 132 rounds 133 Arm cavity 134 Arm 135 Another Axis 137 wheel housing 140 Front Boundary 142 Security Boundary 143 Part of the frame of other devices 150 auxiliary support unit 151 Interface with auxiliary support unit 160 Additional support unit 161 additional axis 163 Additional Wheel 167 Additional Shell 200 keyboards 201 Display 207 keyboard switches 208 optical cables 209 concavity 210 front interface Compartment 211-214 219 board 220 light source 230 Optical Head 240 optical cables 250 air suction element 270 Computer Modules 280 Mechanical Table 281 Chuck 290 perforated plate 291 holes 292 Nitrogen Source 293 Locking parts 301 First End Effector 302 Second end effector 310 Optocoupler 312 Optical input unit 314 Light output unit 316 Gas input 318 Gas output An integrated metrology system for evaluating semiconductor wafers may be provided, the metrology system including: a main body having a rear side and a front side, the front side defining a front boundary of the main body; one or more detachable support units that may be detachably coupled to the main body and support the main body while extending outside the front boundary; and at least one auxiliary support unit that may be configured to support the main body when the one or more detachable support units are absent. The integrated metering system may include at least one auxiliary support unit, and the auxiliary support unit may be configured to support the main body without extending outside the front boundary. At least one auxiliary supporting unit may be movable relative to the main body. At least one auxiliary support unit may be configured to move relative to the main body along a first direction; wherein the one or more detachable support units may be configured to move relative to the main body along a second direction; wherein the first direction is different from the second direction. The second direction may be a vertical direction, and the first direction may be a horizontal direction. The one or more detachable support units may comprise wheels and arms. The body may include a support frame defining a support frame interior space; wherein the rear portion of the arm may be shaped and dimensioned to move within the frame interior space. The integrated metering system may include a securing element that may be configured to maintain the arm in a fixed position while the arm is partially positionable within the interior space of the support frame. The arm may include a cavity, and wherein the fixation element may have an edge that may be shaped and dimensioned to enter the cavity. The integrated metering system may include at least one additional support unit positioned below the main body. The at least one additional supporting unit may be located closer to the rear side of the main body than the detachable supporting unit. The at least one additional support unit may have a single degree of freedom. The one or more detachable support units may comprise a wheel and an arm, wherein the wheel is rotatable about an axle, and wherein the axle is rotatable relative to the arm. The one or more detachable support units may include a wheel and an arm, wherein the wheel is rotatable about a wheel axle, wherein the wheel axle may be coupled to a wheel housing, wherein the wheel housing is rotatable relative to the arm. An integrated metrology system for evaluating semiconductor wafers may be provided, the metrology system may include: a body, the body may have a rear side and a front side, the front side defining a front boundary of the body; a front interface; a keyboard movably coupled to the body, wherein the keyboard may be configured to move between a plurality of positions, the plurality of positions may include a first position and a second position, wherein when positioned at the first position, the keyboard extends a first distance outside the front boundary, and wherein when positioned at the second position, the keyboard does not extend beyond an imaginary line that may be located up to a second distance from the front boundary, wherein the second distance may be less than the first distance. In the integrated metering system, the second position may be a collapsed position and the first position may be an extended position. The keyboard is rotatably coupled to the body. The keyboard may be rotatably coupled to the body via a shaft, the shaft being positioned proximate a bottom of the keyboard when positioned in the second position. The second position may be a vertical position, and the first position may be a horizontal position. The keyboard can be non-rotatably coupled to the body. When positioned in the second position, the keyboard does not extend outside the front border. When positioned in the second position, the keyboard extends a second distance outside the front border. The integrated metering system may include a rear interface that mechanically connects the integrated metering system to another system. The integrated metrology system may include a rear interface that mechanically connects the integrated metrology system to an equipment front-end module of a semiconductor manufacturing system. The front interface may include an axis, and wherein the keyboard may be configured to rotate about the axis while moving between the plurality of positions. The integrated metering system may comprise a fixing element for retaining the unit in the second position. The integrated metering system may include a recess, wherein at least a portion of the keyboard is positionable within the recess when in the second position. An integrated metrology system for evaluating semiconductor wafers may be provided and may include a body that may include an optical head and a light source, wherein the light source may be positioned at a lower portion of the body, and wherein the optical head may be positioned at an upper portion of the body, and wherein the optical head may be optically coupled to the light source via an optical path that may include an optical cable and an optical coupler. The light source and the optical head may be positioned at different compartments of the main body, wherein the optical head may be positioned above the light source. The body may include a plurality of intermediate compartments positionable between the light source and the optical head. The integrated metering system may include a removable module removably coupleable to the intermediate compartment. The light source may be positioned within the perforated compartment. The body may include a body frame and a plurality of panels detachably coupled to the body frame. The integrated metering system may include an air suction element positioned at the bottom of the body. The integrated metering system may include an air suction element configured to exhaust air from at least a vicinity of the light source toward a space positioned below a lowermost compartment of the body. The air suction element may be a fan. The integrated metering system may include an air aspiration element configured to expel air from at least a substantial portion of the body. The integrated metering system may include an air suction element configured to exhaust air from the light source rather than from the optical head. The light source may be positioned within the lowermost compartment of the body. The optical head can be positioned below the high-powered mechanical stage control unit of the integrated metrology system. The integrated metering system may include a plurality of compartments and a plurality of detachable modules detachably coupled to the plurality of compartments. The plurality of detachable modules may include a computer module. The light source may be a laser-driven light source. The power consumption of the light source may exceed 50 watts, for example, it may range from 70 to 140 watts. The integrated metering system may include a plurality of compartments, wherein at least some of the compartments may be sealed and at least some other compartments may not be sealed. The integrated metering system may comprise a plurality of compartments, wherein at least one compartment may have a perforated bottom and at least one other compartment may have a non-perforated bottom. Any arrangement of components that achieve the same functionality is effectively "associated" so that the desired functionality is achieved. Thus, any two components herein combined to achieve a particular functionality may be considered to be "associated" with each other so that the desired functionality is achieved, regardless of any structures or intermediary components. Likewise, any two components so associated may also be considered to be "operably connected" or "operably coupled" to each other so that the desired functionality is achieved. Furthermore, one of ordinary skill in the art will recognize that the boundaries between the operations described above are illustrative only. Multiple operations may be combined into a single operation; a single operation may be distributed among additional operations, and operations may be performed with at least partial overlap in time. Furthermore, alternative embodiments may include multiple instances of operations, and the order of the operations may be altered in various other embodiments. For example, in one embodiment, the examples shown may be implemented as circuits located on a single integrated circuit or within the same device. Alternatively, the examples may be implemented as any number of separate integrated circuits or separate devices interconnected with each other in a suitable manner. As another example, the examples or portions thereof may be implemented as software or code representations of physical circuitry or logical representations convertible into physical circuitry, such as in any appropriate type of hardware description language. However, other modifications, changes, and substitutions are possible. Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The word "comprising" does not exclude the presence of elements or steps other than those enumerated in the claims. Furthermore, as used herein, the terms "a" or "an" are defined as one or more than one. Similarly, introductory phrases such as "at least one" and "one or more" used in multiple claims (even when the same claim includes the introductory phrases "at least one" and "one or more" and an indefinite article such as "a" or "an") should not be construed to imply that the introduction of another claim element defined by the indefinite article "a" or "an" will limit any particular claim to an invention containing only one such element. The same applies to the use of identified items. Unless otherwise specified, terms such as "first" and "second" are used to arbitrarily distinguish between the elements described by such terms. Therefore, these terms are not necessarily intended to indicate a temporal or other priority order of these elements. The mere fact that certain measures are recited in mutually different claims does not indicate that a combination of these measures cannot be used to advantage. Although certain features of the present invention have been shown and described herein, those skilled in the art will now appreciate that many modifications, substitutions, changes, and equivalents may be made. It should be understood that the appended claims are intended to cover all such modifications and changes that fall within the true spirit of the invention. The terms "comprising," "including," "having," "consisting of," and "consisting substantially of" are used interchangeably. For example, any method may include at least the steps included in the drawings and / or description, or only the steps included in the drawings and / or description. 10: Another system 100: Integrated metering system 101: First front panel 102: Space 103: Side panel 104: Top panel 105: Second front panel 106: Another side panel 109: Opening 110: Main body 111: Main body frame 112: Rear side 113: Support frame interior space 114: Front side 116: Rear interface 117: Fixing element 119: Support frame 130: Removable support unit 131: Axle 132: Wheel 133: Arm cavity 134: Arm 135: Another axle 137: Wheel housing 140: Front boundary 142: Safety boundary 143: Part of the frame of the other device 150: Auxiliary support unit 151: Interface with the auxiliary support unit 160: Additional support Unit 161: Additional shaft 163: Additional wheel 167: Additional housing 200: Keyboard 201: Display 207: Keyboard shaft 208: Optical cable 209: Recess 210: Front interface 211: First compartment 212: Second compartment 213: Third compartment 214: Fourth compartment 219: Plate 220: Light source 230: Optical head 240: Optical cable 250: Air suction element 270: Computer module 280: Mechanical stage 281: Chuck 290: Perforated plate 291: Hole 292: Nitrogen source 293: Locking member 301: First end effector 302: Second end effector 310: Optical coupler 312: Light input 314: Light output 316: Gas input 318: Gas output In order to understand the invention and to see how it may be carried out in practice, preferred embodiments will now be described, by way of non-limiting example only, with reference to the accompanying drawings. FIG. 1 is a perspective view of an example of an integrated metering system and another system. 2 is a side view of an example of an integrated metering system and another system. 3 is a perspective view of an example of an integrated metering system and another system. 4 is a side view of an example of an integrated metering system and another system. 5 is a top view of an example of an integrated metering system and another system. 6 is a top view of an example of an integrated metrology system and a portion of another system. 7 is a top view of an example of an integrated metering system and another system. 8 is a top view of an example of an integrated metrology system and a portion of another system. 9 is a perspective view of an example of an integrated metering system and another system. 10 is a perspective view of an example of an integrated metering system and another system. 11 is a side view of an example of an integrated metering system and another system. 12 is a perspective view of an example of a portion of an integrated metering system and a portion of another system. 13 is a perspective view of an example of a portion of an integrated metering system. 14 is a rear view of an example of an integrated metering system without some of its exterior panels. 15 is a perspective view of an example of an integrated metering system without some of its exterior panels. 16 is a rear view of an example of a portion of an integrated metering system without some of its exterior panels. 17 is a perspective view of an example of a mechanical stage and chuck of an integrated metrology system. 18 is a rear view of an example of a mechanical stage and chuck of an integrated metrology system. 19 is a perspective view of an example of a mechanical stage and chuck of an integrated metrology system. 20 is a perspective view of an example of optical components of an integrated metrology system. 21 is a perspective view of an example of a portion of an integrated metering system without some of its exterior panels. FIG. 22 is a schematic diagram of a keyboard in different positions. FIG. 23 is a schematic diagram of a keyboard in different positions. 10: Another system 100: Integrated metering system 101: First front panel 103: Side panel 105: Second front panel 110: Main body 130: Removable support element 132: Wheel 134: Arm 160: Additional support elements 200: Keyboard 201: Display 210: front interface

Claims

1. An integrated metrology system for evaluating semiconductor wafers, the integrated metrology system comprising: A main body, the main body including an optical head and a light source; wherein the optical head is positioned at an upper portion of the main body, wherein the light source is a laser-driven light source, positioned at a lower portion of the main body and connected to the optical head via an optical path including optical cables, and wherein the main body includes a plurality of compartments, wherein at least one of the compartments has a perforated bottom, and wherein the integrated metering system includes an air suction element positioned at the bottom of the main body.

2. The integrated metering system as described in claim 1, wherein, The light source and the optical head are positioned in different compartments of the main body.

3. The integrated metering system as described in claim 2, wherein, The main body includes multiple intermediate compartments, which are positioned between the light source and the optical head.

4. The integrated metering system as described in claim 3, wherein, The integrated metering system includes a detachable electronic module that is detachably coupled to the compartment.

5. The integrated metering system as described in claim 2, wherein, The light source is positioned in a partially perforated compartment.

6. The integrated metering system as described in claim 1, wherein, The main body includes the main framework.

7. The integrated metering system as described in claim 1, wherein, The main body includes a main frame and a plurality of panels detachably coupled to the main frame.

8. The integrated metering system as described in claim 1, wherein, The air suction element is configured to discharge air from at least the vicinity of the light source toward the space located below the lowest compartment of the body.

9. The integrated metering system as described in claim 8, wherein, The air extraction element is a fan.

10. The integrated metering system as described in claim 1, wherein, The air suction element is configured to exhaust air from at least a majority of the body.

11. The integrated metering system as described in claim 1, wherein, The air suction element is configured to exhaust air from the light source rather than from the optical head.

12. The integrated metering system as described in claim 1, wherein, The light source is positioned in the lowest compartment of the main body.

13. The integrated metering system as described in claim 1, wherein, The optical head is positioned below the high-power mechanical stage control unit of the integrated metrology system.

14. The integrated metering system as described in claim 1, wherein, The integrated metering system includes multiple detachable modules that are detachably coupled to multiple compartments.

15. The integrated metering system as described in claim 14, wherein, The plurality of detachable modules includes at least one computer module.

16. The integrated metering system as described in claim 1, wherein, The power consumption of the light source is at least 75 watts.

17. The integrated metering system as described in claim 1, wherein, At least some of the compartments are sealed, and at least some of the other compartments are not sealed.

18. The integrated metering system as described in claim 17, wherein, At least one of the compartments has a perforated bottom, and at least one other compartment has a non-perforated bottom.

19. The integrated metering system as described in claim 1, wherein, The integrated metering system further includes a keyboard that is movably coupled to the main body.

Images