An environment-forming device, a program for controlling the computer operating the environment-forming device to set parameters, and a method for controlling the air supply fan.

Abstract

The environmental testing apparatus includes: a plurality of air supply fans for circulating air between the air-conditioned room and the test room; a plurality of temperature sensors for measuring the temperature at a plurality of locations within the test room and outputting the temperature data; and a control unit capable of individually setting the rotation speed of each air supply fan. During a setting period prior to the test, the control unit performs setting processing to determine the rotation speed of each air supply fan for the test period. During this setting processing, the control unit changes the rotation speed of the plurality of air supply fans multiple times, obtaining multiple temperature data from the plurality of temperature sensors after each change.

Description

Technical Field

[0001] The present invention relates to an environment forming device, a program and a control method of an air supply fan. Prior Art

[0002] Environmental testing is known as a test for evaluating the performance of a test object such as an electronic component. In environmental testing, the performance of the test object is evaluated by applying environmental pressure such as temperature to the test object placed in the test room. In addition, environmental testing devices are known as devices for implementing environmental testing. For example, as shown in Japanese Patent Publication No. 2014-115205, the environmental testing device of the prior art is configured to include: a test room surrounded by a heat-insulating shell, an air-conditioning room connected to the test room, an air-conditioning device such as a heater and a cooler arranged in the air-conditioning room, and a blower that sends the air-conditioned air generated by the air-conditioning device from the air-conditioning room to the test room. As the blower, a blower fan is arranged at one side wall of the test room.

[0003] In the environmental test device related to the above-mentioned prior art, one air supply fan is arranged in the center of the side wall. In such an environmental test device, the air supply volume sent to the peripheral part of the internal space of the test room becomes smaller than the air supply volume sent to the central part. Therefore, a temperature difference occurs between the peripheral part and the central part of the internal space of the test room. In addition, when a plurality of test objects are placed side by side in the test room, the conditioned air sent from the air supply fan is shielded by the test objects at the upwind position and cannot be sent to the test objects at the downwind position, and a temperature difference occurs between the upwind side and the downwind side of the air supply path in the internal space of the test room. In this way, the environmental test device related to the above-mentioned prior art will produce undesirable differences in the temperature distribution of the internal space of the test room due to various factors. Summary of the invention

[0004] The purpose of the present disclosure is to obtain an environment forming device, a program and a control method for an air supply fan that can eliminate or reduce the difference in environmental factors in an environment forming room.

[0005] An environment forming device according to one aspect of the present disclosure includes: an environment forming chamber, in which a target object to be processed is placed; an air conditioning chamber, which is connected to the aforementioned environment forming chamber; an air conditioning means, which is arranged in the aforementioned air conditioning chamber and generates air-conditioned air by adjusting the environmental factors of the air; a plurality of air supply fans, which circulate the aforementioned air-conditioned air between the aforementioned air conditioning chamber and the aforementioned environment forming chamber; a plurality of measuring means, which measures the aforementioned environmental factors at a plurality of locations in the aforementioned environment forming chamber and outputs a plurality of measured values; and a setting means, which can individually set the rotation speed of each of the aforementioned plurality of air supply fans; wherein: the aforementioned setting means changes the rotation speed of the aforementioned plurality of air supply fans a plurality of times during a setting period before a processing period during which the aforementioned processing is executed, obtains the aforementioned plurality of measured values ​​after each change, and executes a setting process for setting the rotation speed of each of the aforementioned air supply fans based on the aforementioned plurality of measured values ​​during the aforementioned processing period. Simple diagram description

[0006] FIG. 1 is a schematic diagram showing the structure of an environment forming device according to an embodiment of the present invention. FIG. 2 is a schematic diagram showing the configuration layout of a plurality of air supply fans. FIG. 3 is a schematic diagram showing the configuration layout of multiple DC motors. FIG. 4 is a schematic diagram showing the configuration layout of a plurality of temperature sensors. FIG. 5 is a schematic diagram showing the configuration layout of a plurality of temperature sensors. FIG. 6 is a diagram showing a control unit and a memory unit included in the environmental test device. FIG. 7 is a timing diagram showing the environmental test flow of the simplified environmental test device. FIG8 is a flow chart showing the flow of setting processing executed by the display control unit. FIG. 9 is a schematic diagram showing the structure of an environment forming device according to a modified example. FIG. 10 is a schematic diagram showing the structure of an environment forming device according to a modified example. FIG. 11 is a schematic diagram showing the structure of an environment forming device according to a modified example. FIG. 12 is a schematic diagram showing the structure of an environment forming device according to a modified example. Implementation

[0007] For the purpose of illustration, in the following embodiments, various details are described to provide a comprehensive understanding of the disclosed embodiments. However, it is apparent that one or more embodiments may be implemented without the specific details. In other examples, conventional structures and devices are schematically depicted to simplify the illustration.

[0008] The embodiments of the present invention are described in detail below with reference to the drawings. Elements with the same reference symbols in different drawings represent the same or corresponding elements.

[0009] Device composition FIG. 1 is a schematic diagram showing the configuration of an environment forming device according to an embodiment of the present invention. In the example of the present embodiment, the environment forming device is configured as an environmental test device 1 for evaluating the performance of the object under test 6 by applying a specific temperature pressure to the object under test 6 as a target object. However, the environmental test device 1 may also be configured as a temperature and humidity test device for applying a specific temperature pressure and humidity pressure to the object under test 6 by additionally installing a humidifier. In addition, the environmental test device 1 may also be configured as a burn-in test device for screening out initial defective products by applying temperature pressure and voltage pressure to the object under test 6. The object under test 6 is, for example, an electronic component such as a circuit board. In addition, in the following description, as shown in FIG. 1, the direction is specified by a rectangular coordinate system having an X-axis extending in the horizontal direction, a Y-axis extending in the vertical direction, and a Z-axis perpendicular to both the X-axis and the Y-axis. In the rectangular coordinate system shown in FIG. 1, a W-axis extending in the opposite direction to the extending direction of the X-axis is shown.

[0010] The environmental testing device 1 includes a test room 3 (environment forming room) surrounded by a heat-insulating outer shell 2 and an air-conditioning room 4. The test room 3 has a first wall 7 and a second wall 9 facing each other. The air-conditioning room 4 has: a first space part 41, which is separated from the inner surface 2A of the outer shell 2 by the first wall 7; a second space part 42, which is separated from the inner surface 2B of the outer shell 2 by the second wall 9; and a connecting space part 43, which is connected to the first space part 41 and the second space part 42. A plurality of vents 8 are formed on the first wall 7, and a plurality of vents 10 are formed on the second wall 9. The test room 3 and the air-conditioning room 4 are connected to each other via these plurality of vents 8 and 10. In addition, the first wall 7 forming the plurality of vents 8 may also be omitted, in which case the inner surface 2A of the outer shell 2 becomes the first wall of the test room 3. In addition, the first wall 7 or the inner surface 2A may also be the inner surface of a door for entering the test room 3 from the outside, in which case the inner surface of the door becomes the first wall of the test room 3.

[0011] A shelf 5 is provided in the test room 3. The shelf 5 has a lattice appearance in which a plurality of rod-shaped parts are interlaced. The object to be tested 6 is placed on the shelf 5. In the example shown in FIG. 1, a plurality of layers of shelves 5 are provided in the test room 3, and a plurality of objects to be tested 6 are placed in parallel on each shelf 5, so that the plurality of objects to be tested 6 are placed in the center of the internal space of the test room 3. However, the number of layers of shelves 5 provided in the test room 3 may be more than one layer, and the number of objects to be tested 6 placed on each shelf 5 may be more than one. In addition, the shelf 5 may be omitted, and the object to be tested 6 may be placed directly on the floor of the test room 3.

[0012] A cooler 11 as a cooling device and a heater 12 as a heating device are arranged in the connection space portion 43 of the air-conditioning room 4. The cooler 11 and the heater 12 operate as air-conditioning means, and generate air-conditioned air adjusted to a desired temperature by cooling or heating the air flowing from the test room 3 through the vent 8 of the first wall 7 into the air-conditioning room 4. The air-conditioning temperature of the cooler 11 and the heater 12 is controlled by the control unit 30 described later.

[0013] In addition, a plurality of temperature sensors 17 and 18 described below are arranged in the test chamber 3 .

[0014] A plurality of air supply fans 13 are arranged on the second wall 9 side of the test room 3. The air supply fan 13 is arranged as an axial flow fan, and has a DC motor 14 and a plurality of blades fixed to the front end of the rotating shaft 15 of the DC motor 14. The DC motor 14 is arranged outside the housing 2. The rotating shaft 15 penetrates the outer wall of the housing 2 and extends toward the test room 3 along the W direction in the air conditioning room 4. The front end of the rotating shaft 15 is arranged at a position concentric with the center of the vent 10 on the second wall 9. The blades of the air supply fan 13 are arranged in the same plane as the vent 10. When the DC motor 14 is driven and the air supply fan 13 rotates, the air conditioning air is sent from the air conditioning room 4 to the test room 3 through the vent 10. Since the blades of the air supply fan 13 rotate in the YZ plane, the air conditioning air sent into the test room 3 by the air supply fan 13 moves in the general direction as shown by the thick straight line arrow in the first figure, passes through the test room 3, and is exhausted to the air conditioning room 4 from the vent 8 on the first wall 7.

[0015] FIG. 2 is a schematic diagram showing the arrangement layout of the plurality of air supply fans 13, which is equivalent to a plan view of the position along the straight line II-II shown in FIG. 1 viewed in the X direction. In the example of the present embodiment, the environmental test device 1 includes a total of 4 air supply fans 131-134, and 2 air supply fans 13 are separated and arranged in parallel along each direction of the Y direction and the Z direction, and arranged in a matrix of 2 columns × 2 rows. The air supply fans 131-134 are dispersedly arranged across all areas of the second wall surface 9. The rotation speed of each of the air supply fans 131-134 is individually controlled by the control unit 30 described later.

[0016] In addition, a plurality of vents 10 having the same number and the same layout as the plurality of air supply fans 13 are formed on the second wall surface 9. In the example of the present embodiment, a matrix of 2 columns × 2 rows, a total of 4 circular vents 101 to 104 are formed. Each vent 101 to 104 is formed at a position where the center of the circle is concentric with the rotation axis 15 of each air supply fan 131 to 134.

[0017] FIG. 3 is a schematic diagram showing the layout of the plurality of DC motors 14, which is equivalent to a plan view of the position along the straight line III-III shown in FIG. 1 viewed in the X direction. In the example of this embodiment, a matrix of 2 columns × 2 rows is arranged, with a total of 4 DC motors 141-144.

[0018] As shown in FIG. 1 , a plurality of temperature sensors 17 are arranged close to the first wall 7 of the test chamber 3. Since the first wall 7 is located at the most downwind position of the air supply path of the conditioned air passing through the air supply fan 13, the temperature sensor 17 measures the air temperature (environmental factor) in the test chamber 3 at the most downwind position.

[0019] FIG. 4 is a schematic diagram showing the arrangement layout of the plurality of temperature sensors 17, which is equivalent to a plan view of the position along the straight line IV-IV shown in FIG. 1 viewed in the W direction. The same number of temperature sensors 17 and the same arrangement as the plurality of air supply fans 13 are arranged. In the example of this embodiment, a total of 4 temperature sensors 171-174 are arranged in a matrix of 2 columns × 2 rows. The temperature data displayed by the temperature measurement values ​​output from each temperature sensor 171-174 is input to the control unit 30 described later. The temperature sensors 171-174 are arranged at each intersection of a lattice-shaped frame 20 in which a plurality of rod-shaped members are interlaced. This frame 20 is close to the first wall surface 7 and is fixed to the inner wall of the test chamber 3. In addition, as shown in FIG. 1, each temperature sensor 171-174 is arranged on the extension line of the rotation axis 15 corresponding to the air supply fan 131-134.

[0020] In addition, as shown in FIG. 1 , a plurality of temperature sensors 18 are arranged close to the second wall surface 9 of the test chamber 3. The temperature sensors 18 are arranged close to the air supply fan 13. Since the second wall surface 9 is located at the most upwind position of the air supply path of the conditioned air passing through the air supply fan 13, the temperature sensors 18 measure the air temperature in the test chamber 3 at the most upwind position.

[0021] FIG. 5 is a schematic diagram showing the arrangement layout of the plurality of temperature sensors 18, which is equivalent to a plan view of the position along the straight line VV shown in FIG. 1 viewed in the X direction. The same number of temperature sensors 18 and the same arrangement as the plurality of air supply fans 13 are arranged. In the example of this embodiment, a total of four temperature sensors 181 to 184 are arranged in a matrix of 2 columns × 2 rows. The temperature data displayed by the temperature measurement values ​​output from each temperature sensor 181 to 184 is input to the control unit 30 described later. The temperature sensors 181 to 184 are arranged at each intersection of a lattice-shaped frame 21 in which a plurality of rod-shaped members are interlaced. This frame 21 is close to the second wall surface 9 and is fixed to the inner wall of the test chamber 3. In addition, as shown in FIG. 1, each temperature sensor 181 to 184 is arranged on the extension line of the rotation axis 15 of the corresponding air supply fan 131 to 134.

[0022] FIG. 6 is a diagram showing a control unit 30 and a memory unit 31 included in the environmental test device 1. The control unit 30 includes a CPU, etc., and the memory unit 31 includes a hard disk drive (HDD), a solid state disk (SSD) or a semiconductor memory, etc. A specific program 32 for making the CPU operate as the control unit 30 (control device) is stored in the memory unit 31, and the aforementioned CPU is used as a computer for controlling the environmental test device 1. The control unit 30 and the memory unit 31 can be mounted in the environmental test device 1, or can be connected to the environmental test device 1 from the outside. The temperature data S11 to S14 from the temperature sensors 171 to 174 are respectively input to the control unit 30. In addition, the temperature data S21 to S24 from the temperature sensors 181 to 184 are respectively input to the control unit 30. The control unit 30 controls the driving of the cooler 11 with the driving signal S3. The control unit 30 controls the driving of the heater 12 with the driving signal S4. The control unit 30 controls the outputs of the DC motors 141 - 144 respectively through the driving signals S51 - S54 , thereby controlling the rotation speeds of the air supply fans 131 - 134 respectively.

[0023] Device Action FIG. 7 is a timing chart showing the simplified environmental test process of the environmental test device 1. The operator places the test object 6 in the test chamber 3 at time T0, and then starts the operation of the environmental test device 1 by button operation at time T1. The control unit 30 performs a setting process for setting the rotation speed of each air supply fan 131 to 134 during the test period P2 (time T2 to T3) before the test period P2 (time T2 to T3) of the environmental test. As an example, the environmental test is a constant temperature test in which the set temperature in the test chamber 3 is fixed, the test period is tens to thousands of hours, and the upper limit time of the set period P1 is tens to thousands of hours. However, the lengths of the test period P2 and the set period P1 are not limited to the above examples. In addition, the environmental test is not limited to a constant temperature test in which the set temperature is fixed, and it can also be a test including multiple set temperatures or a cycle test in which a high temperature period and a low temperature period are repeated alternately.

[0024] Fig. 8 is a flow chart showing the flow of the setting process executed by the display control unit 30. In the initial state, the air conditioning means (cooler 11 and heater 12) and the air supply fan 13 are all stopped.

[0025] At time T1, when the operation start command of the environmental test device 1 is input, the control unit 30 obtains various parameters in step SP101. The various parameters include the target setting temperature of the test chamber 3, the allowable temperature range (upper limit temperature and lower limit temperature) of the error allowed for the target setting temperature, the upper limit time of the setting period P1, and the upper limit value and lower limit value of the rotation speed of the air supply fans 131~134. The upper limit value and lower limit value of the rotation speed are set based on the required amount of heat exchange or required efficiency in the above-mentioned air conditioning means. These various parameters are input in advance, and the setting information thereof is stored in the memory unit 31.

[0026] Next, in step SP102, the control unit 30 drives the DC motors 141-144 with the drive signals S51-S54 to start driving the air supply fans 131-134 at the initial rotation speed. The initial rotation speed of each air supply fan 131-134 is preset, and the setting information is stored in the memory unit 31.

[0027] Next, in step SP103, the control unit 30 starts driving the cooler 11 or the heater 12 using the drive signals S3 and S4 based on the target setting temperature.

[0028] After waiting for a specific time (e.g., tens of seconds to minutes) for the temperature in the test chamber 3 to stabilize, in step SP104, the control unit 30 obtains temperature data S11 to S14 and S21 to S24 from the temperature sensors 171 to 174 and the temperature sensors 181 to 184.

[0029] Next, in step SP105, the control unit 30 determines whether or not any of the temperature data S11 to S14 and S21 to S24 acquired in step SP104 deviates from the permissible temperature range for the target setting temperature.

[0030] When all temperature data S11~S14, S21~S24 converge within the allowable temperature range (step SP105: No), the control unit 30 sets the above-mentioned initial value of the rotation speed of each air supply fan 131~134 as the rotation speed of each air supply fan 131~134 during the test period P2, and ends the setting process.

[0031] When any of the temperature data S11 to S14, S21 to S24 is out of the allowable temperature range (step SP105: Yes), then in step SP106, the control unit 30 calculates a specific evaluation value based on the temperature data S11 to S14, S21 to S24 obtained in step SP104. This evaluation value is an error index, and the greater the error between the target setting temperature and the complex temperature data S11 to S14, S21 to S24, the greater the value of this evaluation value. As the evaluation value, the difference between the target value and the representative value (maximum value or minimum value) of the complex measurement data, the difference between the target value and the average value of the complex measurement data, the sum of absolute differences, the sum of square root errors, or the mean square root error can be used. In addition, the evaluation value can also be an indicator of the difference between the complex measurement data, using the difference between the maximum value and the minimum value, the difference between the average value and the representative value (maximum value or minimum value), the sum of absolute differences, the variance, or the standard deviation.

[0032] Next, in step SP107, the control unit 30 changes the rotation speed of the air supply fans 131 to 134 within a range of above the lower limit value and below the upper limit value of the rotation speed. The control unit 30 uses the current rotation speed of each air supply fan 131 to 134 (rotation speed before change) as a reference value, and sets each of the air supply fans 131 to 134 as a value obtained by increasing or decreasing the random change value of each of the air supply fans 131 to 134 from each reference value as the changed rotation speed. The change value is, for example, a random value selected from the range of plus or minus several hundred (rpm).

[0033] After waiting for the specific time mentioned above to stabilize the temperature in the test chamber 3, in step SP108, the control unit 30 obtains temperature data S11-S14, S21-S24 from the temperature sensors 171-174, 181-184.

[0034] Next, in step SP109, the control unit 30 determines whether or not any of the temperature data S11 to S14 and S21 to S24 acquired in step SP108 deviates from the permissible temperature range for the target setting temperature.

[0035] When all temperature data S11~S14, S21~S24 are within the allowable temperature range (step SP109: No), the control unit 30 sets the changed rotation speed set in step SP107 as the rotation speed of the air supply fans 131~134 during the test period P2, and ends the setting process.

[0036] When any of the temperature data S11~S14, S21~S24 deviates from the allowable temperature range (step SP109: yes), then in step SP110, the control unit 30 calculates the same evaluation value as above based on the temperature data S11~S14, S21~S24 obtained in step SP108.

[0037] Next, in step SP111, the control unit 30 determines whether the temperature difference in the test chamber 3 has improved by comparing the evaluation value calculated in step SP106 (the evaluation value before the change) with the evaluation value calculated in step SP110 (the evaluation value after the change).

[0038] When the evaluation value after the change is greater than the evaluation value before the change (step SP111: No), the temperature difference in the test chamber 3 is not improved even if the rotation speed of the air supply fans 131 to 134 is changed. In this case, in the next step SP112, the control unit 30 returns the rotation speed of each air supply fan 131 to 134 to the value before the change by not adopting the rotation speed changed in step SP107.

[0039] On the other hand, when the evaluation value after the change does not reach the evaluation value before the change (step SP111: Yes), the temperature difference in the test room 3 is improved by changing the rotation speed of the air supply fans 131-134. At this time, the control unit 30 adopts the rotation speed changed in step SP107, and each air supply fan 131-134 maintains the changed value.

[0040] Next, in step SP113, the control unit 30 determines whether the time elapsed from the time point (time T1) when the execution of the setting process starts has reached the upper limit time of the setting period P1.

[0041] When the elapsed time does not reach the upper limit time (step SP113: No), the control unit 30 repeats the processing starting from step SP107. In the subsequent step SP111, the control unit 30 determines whether the temperature difference in the test chamber 3 has improved by comparing the evaluation value calculated in the previous step SP110 (the evaluation value before the change) with the evaluation value calculated in the step SP110 after the change (the evaluation value after the change).

[0042] When the elapsed time reaches the upper limit time (step SP113: yes), the control unit 30 sets the rotation speed of each air supply fan 131~134 in the current setting (that is, the rotation speed last set in the setting period P1) as the rotation speed of each air supply fan 131~134 in the test period P2, and ends the setting process.

[0043] In addition, as the evaluation value, an evaluation value that becomes smaller as the error increases may be used. At this time, when the evaluation value after the change is less than the evaluation value before the change (equivalent to step SP111: No), even if the rotation speed of the air supply fans 131 to 134 is changed, the temperature difference in the test chamber 3 is not improved. At this time, in the next step SP112, the control unit 30 returns the rotation speed of each air supply fan 131 to 134 to the value before the change by not adopting the rotation speed changed in step SP107. On the other hand, when the evaluation value after the change exceeds the evaluation value before the change (equivalent to step SP111: Yes), the temperature difference in the test chamber 3 is improved by changing the rotation speed of the air supply fans 131 to 134. At this time, each air supply fan 131 to 134 maintains the value after the change by adopting the rotation speed changed in step SP107 by the control unit 30.

[0044] In addition, the temperature data before the rotation speed is changed and the temperature data after the change can be temporarily stored in any memory means, and the control unit 30 obtains the temperature data before the change and the temperature data after the change from the memory means, compares the two, and adopts the rotation speed that obtains the better evaluation value. Furthermore, the temperature data measured each time the rotation speed is changed can be temporarily stored in any memory means, and the control unit 30 obtains three or more temperature data of the time series from the memory means at a time, compares them, and adopts the rotation speed that obtains the best evaluation value.

[0045] Effects According to the environmental test device 1 of the present embodiment, in the setting process, the control unit 30 (setting means) changes the rotation speed of the plurality of air supply fans 131-134 a plurality of times, and obtains the plurality of temperature data S11-S14, S21-S24 (measured values) after each change from the plurality of temperature sensors 171-174, 181-184 (measuring means). Based on this result, the control unit 30 can eliminate or reduce the temperature (environmental factor) difference in the test chamber 3 (environment forming chamber) by appropriately setting the rotation speed of each air supply fan 131-134 during the test period P2.

[0046] In addition, according to the environmental testing device 1 of this embodiment, the control unit 30 can simply search for the global optimal solution for the rotation speed of each air supply fan 131~134 through an algorithm by randomly determining the rotation speed change value when changing the rotation speed of multiple air supply fans 131~134.

[0047] In addition, according to the environmental test device 1 of the present embodiment, the control unit 30 repeatedly performs the setting process, and as the setting process proceeds, the rotation speed of each air supply fan is gradually changed to the most appropriate value. The above setting process is to adopt the change if the evaluation value becomes smaller due to the change in the rotation speed, and not adopt the change if the evaluation value does not become smaller due to the change in the rotation speed. Therefore, the possibility of early discovery of the most appropriate value of the rotation speed of each air supply fan is increased.

[0048] In addition, according to the environmental test device 1 of the present embodiment, the current rotation speed is used as a reference value, and the control unit 30 repeatedly performs the setting process of increasing or decreasing the change value from the reference value. As the setting process is performed, the rotation speed of each air supply fan 131-134 is gradually changed to the most appropriate value. Therefore, the possibility of early discovery of the most appropriate value of the rotation speed of each air supply fan 131-134 is increased.

[0049] In addition, according to the environmental testing device 1 of the present embodiment, if all the complex temperature data S11 to S14 and S21 to S24 converge within the target range, the control unit 30 ends the setting process and the test period P2 can be started early.

[0050] In addition, according to the environmental test device 1 of the present embodiment, if the elapsed time of the setting period P1 reaches the upper limit time, the control unit 30 ends the setting process, thereby avoiding excessive delay in the start of the test period P2.

[0051] Various modifications of the above-described embodiments are described below. These modifications can be combined and applied appropriately.

[0052] First Modification In the above embodiment, the control unit 30 adopts the change if the evaluation value after the rotation speed change does not reach the evaluation value before the change; if the evaluation value after the rotation speed change is above the evaluation value before the change, the change is not adopted, and the rotation speed last set in the setting period P1 is set as the rotation speed of each air supply fan 131~134 in the test period P2.

[0053] Without being limited to this example, the control unit 30 may also change the rotation speed of the air supply fans 131~134 multiple times, record the evaluation value calculated after each change in the memory unit 31 (or the memory within the control unit 30), and set the rotation speed of each air supply fan 131~134 that obtains the minimum evaluation value among the recorded multiple evaluation values ​​as the rotation speed of each air supply fan 131~134 during the test period P2.

[0054] According to this modification, the rotation speed of the air supply fans 131 to 134 is changed multiple times, and the control unit 30 performs the setting process of recording the evaluation value after each change, so that the setting process can avoid falling into the situation of searching for the regional optimal solution. Therefore, the possibility of finding the global optimal solution for the rotation speed of each air supply fan 131 to 134 is increased.

[0055] Second Modification In the above embodiment, the control unit 30 uses the changed rotation speed of the air supply fans 131 to 134 as a condition to improve the temperature difference in the test chamber 3 and adopts the changed rotation speed.

[0056] In addition, the control unit 30 may also set the operating state of the environmental test device 1 after the rotation speed is changed to meet a specific safety standard as an additional condition and adopt the changed rotation speed. For example, regarding the temperature and pressure of the discharge pipe of the refrigeration circuit included in the air conditioning means, a safety standard value that is looser than the critical value that forces the operation of the environmental test device 1 to stop is pre-set, and the setting information is stored in the memory unit 31. The control unit 30 sets the discharge pipe temperature value and pressure value measured after the rotation speed of the air supply fans 131~134 is changed to meet the safety standard value as an additional condition and adopts the changed rotation speed.

[0057] According to this variation, the changed rotation speed of the air supply fans 131~134 is appropriate from the perspective of reducing temperature differences, and by not adopting the change when the reference value of a specific action parameter such as a safety reference is not met, it is possible to avoid situations where the action of the environmental test device 1 is forced to stop.

[0058] Modification 3 In the above embodiment, the control unit 30 ends the setting process when the time after the setting process starts to be executed reaches a specific upper limit time. Without being limited to this example, the control unit 30 may also end the setting process when the number of rotation speed changes after the setting process starts to be executed (the number of executions of step SP107) reaches a specific upper limit number of times. The upper limit number of times is set to, for example, tens to hundreds of times, and this setting information is stored in the memory unit 31.

[0059] In the above embodiment, the control unit 30 uses temperature as the environmental factor. However, the control unit 30 may also use other environmental factors such as humidity or wind speed.

[0060] In the above embodiment, the control unit 30 ends the setting process on the condition that all the temperature data S11 to S14 and S21 to S24 acquired after the rotation speed is changed converge to the allowable temperature range. Without being limited to this example, the control unit 30 may also end the setting process on the condition that the evaluation value calculated after the rotation speed is changed is below a specific threshold.

[0061] In the above embodiment, the initial value of the rotation speed of each of the air supply fans 131 to 134 is set individually. However, the present invention is not limited to this example, and a common initial value for all the air supply fans 131 to 134 may be set.

[0062] In the above embodiment, the control unit 30 uses the current rotation speed of each air supply fan 131-134 as the reference value. Without being limited to this example, the control unit 30 may also use the initial value of the rotation speed of each air supply fan 131-134 as the reference value.

[0063] In the above embodiment, the control unit 30 sets the value increased or decreased by the change value from the reference value as the changed rotation speed. Without being limited to this example, the control unit 30 may also set a rotation speed randomly selected from a range above the lower limit value and below the upper limit value of the rotation speed as the changed rotation speed.

[0064] As another modification, only one of the temperature sensor 17 and the temperature sensor 18 may be arranged in the test room 3. In addition, in addition to the temperature sensors 17 and 18, other temperature sensors may be arranged at a specific location in the test room 3 (for example, the center of the test room 3). In addition, the temperature sensors 17 and 18 may be arranged at a position deviated from the extension line of the rotation axis 15 of the corresponding air supply fan 13. In addition, the air conditioning room 4 may be arranged at a location not adjacent to the test room 3, and the two may be connected to each other by a pipeline or the like. In addition, instead of the structure in which the air supply fan 13 blows out air-conditioned air from the air conditioning room 4 to the test room 3, the air supply fan 13 may suck air-conditioned air from the test room 3 to the air conditioning room 4.

[0065] According to this variation, the same effect as the above-mentioned embodiment can also be obtained.

[0066] Modification 4 In the above embodiment, although the environmental test device 1 includes a total of 4 air supply fans 131-134 arranged in a matrix of 2 columns × 2 rows, the configuration layout of the plurality of air supply fans 13 is not limited to this example. The environmental test device 1 only needs to include at least 2 or more air supply fans 13, for example, it can include a total of 9 air supply fans arranged in a matrix of 3 columns × 3 rows, or it can include a total of 16 air supply fans arranged in a matrix of 4 columns × 4 rows. In addition, the number of the plurality of air supply fans 13 belonging to each column and the number of the plurality of air supply fans 13 belonging to each row can also be different from each other. Furthermore, the plurality of air supply fans 13 do not necessarily have to be arranged in a matrix, and the sizes of the plurality of air supply fans 13 do not need to be all the same. According to this modified example, the same effect as the above embodiment can also be obtained.

[0067] Modification 5 In the above embodiment, although the environment forming device is configured as an example of the environment testing device 1, it is not limited to this example. The environment forming device can also be configured as a heat treatment device that forms a specific high temperature environment for heat treatment of a workpiece as a target object. In addition, the environment forming device can also be configured as a cooking device that forms a specific high temperature environment for heating food as a target object. According to this modified example, the same effect as the above embodiment can also be obtained.

[0068] Modification 6 FIG. 9 and FIG. 10 are schematic diagrams of the configuration of the environment forming device of the sixth modification. As shown in FIG. 9, the blades of the air supply fan 13 can be arranged further in the X direction (on the second space portion 42 side) than the vent 10. In addition, as shown in FIG. 10, the blades of the air supply fan 13 can also be arranged further in the W direction (on the test chamber 3 side) than the vent 10. According to this modification, the same effect as the above-mentioned embodiment can also be obtained.

[0069] Modification 7 FIG. 11 and FIG. 12 are schematic diagrams of the configuration of the environment forming device of the seventh modification. As shown in FIG. 11, the test room 3 may not have the first wall 7, the air conditioning room 4 may not have the first space 41 and the connecting space 43, the vent 8A may be formed at the lower part of the second wall 9, and the cooler 11 and the heater 12 may be arranged at the lower part of the air conditioning room 4. In addition, as shown in FIG. 12, the test room 3 may not have the first wall 7, the air conditioning room 4 may not have the first space 41 and the connecting space 43, the upper and lower parts of the second wall 9 may respectively form vents 8B and 8C, and the cooler 11 and the heater 12 may respectively be arranged at the upper and lower parts of the air conditioning room 4. According to this modification, the same effect as that of the above-mentioned embodiment can also be obtained.

[0070] Modification 8 Air conditioning means including the cooler 11 and the heater 12 and air supply means including the air supply fan 13 may also be configured as an environment forming unit that can be installed in the test room 3 later.

[0071] At this time, the environment forming unit is connected to the environment forming room where the processing target is placed, including: an air-conditioning room, which is connected to the aforementioned environment forming room; an air-conditioning means, which is arranged in the aforementioned air-conditioning room and generates air-conditioned air by adjusting the environmental factors of the air; a plurality of air-supply fans, which circulate the aforementioned air-conditioned air between the aforementioned air-conditioning room and the aforementioned environment forming room; and a setting means, which can individually set the rotation speed of each of the aforementioned plurality of air-supply fans; the aforementioned setting means performs a setting process for setting the rotation speed of each of the aforementioned air-supply fans during the aforementioned processing period before the processing period during which the aforementioned processing is performed, and in the aforementioned setting process, the aforementioned setting means changes the rotation speed of the aforementioned plurality of air-supply fans a plurality of times, and after each change, the measurement means for measuring the aforementioned environmental factors at a plurality of locations in the environment forming room obtains a plurality of measurement values.

[0072] According to this variation, the same effect as the above-mentioned embodiment can also be obtained.

[0073] Modification 9 In the above embodiment, when the operation of the environmental test device 1 is started, although the configuration of executing the setting process for setting the rotation speed of each of the air supply fans 131 to 134 is described, the present invention is not limited thereto.

[0074] When the door of the test room 3 is opened for the test object 6 to enter or exit during the test execution, and the environment of the test room 3 changes, the setting process can also be performed when the environment of the test room 3 is restored. In this case, the period of restoring the environment and executing the test is the test period P2, and the setting process period before the test period P2 is the setting period P1. According to this modified example, the same effect as the above embodiment can also be obtained.

[0075] The environment forming device of the instrumental type of the present invention comprises: an environment forming chamber, in which a target object to be processed is placed; an air-conditioning chamber, which is connected to the aforementioned environment forming chamber; an air-conditioning means, which is arranged in the aforementioned air-conditioning chamber, and generates air-conditioned air by adjusting the environmental factors of the air; a plurality of air-supply fans, which circulate the aforementioned air-conditioned air between the aforementioned air-conditioning chamber and the aforementioned environment forming chamber; a plurality of measuring means, which measures the aforementioned environmental factors at a plurality of locations in the aforementioned environment forming chamber and outputs a plurality of measured values; and a setting means, which can individually set the rotation speed of each of the aforementioned plurality of air-supply fans; the aforementioned setting means changes the rotation speed of the aforementioned plurality of air-supply fans a plurality of times during a setting period before a processing period during which the aforementioned processing is executed, obtains the aforementioned plurality of measured values ​​after each change, and executes a setting process for setting the rotation speed of each of the aforementioned air-supply fans during the aforementioned processing period based on the aforementioned plurality of measured values.

[0076] According to this aspect, in the setting process, the setting means changes the rotation speed of the plurality of air supply fans a plurality of times, and obtains the plurality of measurement values ​​after each change from the plurality of measurement means. Based on this result, the setting means appropriately sets the rotation speed of each air supply fan during the process, thereby eliminating or reducing the difference in environmental factors in the environment forming room.

[0077] In the above-mentioned aspect, the above-mentioned setting means randomly determines the change value of the rotation speed when changing the rotation speed of the above-mentioned multiple air supply fans.

[0078] According to this aspect of the setting means, by randomly determining the change value of the rotation speed when changing the rotation speed of multiple air supply fans, the global optimal solution for the rotation speed of each air supply fan 131~134 can be simply searched through an algorithm.

[0079] In the above-mentioned aspect, the above-mentioned setting means calculates the changed evaluation value based on the error between the target value of the above-mentioned environmental factor and the above-mentioned multiple measurement values ​​or the difference in the measurement values. If the above-mentioned evaluation value after the change in the rotation speed of the above-mentioned multiple air supply fans is compared with the above-mentioned evaluation value before the change, the above-mentioned error or the above-mentioned difference becomes a smaller value, the change is adopted; if the above-mentioned evaluation value after the change is the same as the above-mentioned evaluation value before the change, or the above-mentioned error or the above-mentioned difference becomes a larger value, the change is not adopted; the rotation speed of each of the above-mentioned air supply fans last set in the above-mentioned setting period is set as the rotation speed of each of the above-mentioned air supply fans in the above-mentioned processing period.

[0080] According to this aspect, the setting process is repeatedly performed by the setting means, and the rotation speed of each air supply fan is gradually changed to the most appropriate value as the setting process is performed. The above setting process is to adopt the change if the error or difference is reduced by changing the rotation speed, and not adopt the change if the error or difference is not reduced by changing the rotation speed. Therefore, the possibility of early discovery of the most appropriate value of the rotation speed of each air supply fan is increased.

[0081] In the above-mentioned aspect, the above-mentioned setting means calculates the changing evaluation value based on the error or difference between the target value of the above-mentioned environmental factor and the above-mentioned multiple measured values; changes the rotation speed of the above-mentioned multiple air supply fans multiple times, and records the above-mentioned evaluation value after each change; and sets the rotation speed of the above-mentioned each air supply fan obtained by the evaluation value with the smallest error or difference among the recorded multiple evaluation values ​​as the rotation speed of the above-mentioned each air supply fan during the above-mentioned processing period.

[0082] According to this aspect, by performing a setting process of changing the rotation speeds of the plurality of air supply fans a plurality of times and recording the evaluation values ​​after each change, the setting process can avoid being trapped in the search for a regional optimal solution. Therefore, the possibility of finding a global optimal solution for the rotation speeds of the air supply fans 131 to 134 is increased.

[0083] In the above-mentioned aspect, after the rotation speed of the plurality of air supply fans is changed, the setting means determines whether to adopt the change based on the specific action parameters of the environment forming device and the specific reference value related to the action parameters.

[0084] According to this aspect, the changed air supply fan rotation speed is appropriate from the perspective of reducing temperature differences, and by not adopting the change when the benchmark value for a specific action parameter is not met, situations such as the forced stop of the action of the environmental test device can be avoided.

[0085] In the above-mentioned aspect, the above-mentioned setting means uses the current rotation speed of each of the above-mentioned air supply fans as a reference value, and uses the rotation speed change value from the reference value as the increase or decrease value to set the next rotation speed of each of the above-mentioned air supply fans.

[0086] According to this aspect, the setting means repeatedly performs the setting process, and as the setting process proceeds, the rotation speed of each air supply fan is slowly changed to the most appropriate value, and the above setting process is to use the current rotation speed as a reference value and increase or decrease the change value from the reference value. Therefore, the possibility of early discovery of the most appropriate value of the rotation speed of each air supply fan is increased.

[0087] In the above aspect, the setting means ends the setting process by converging all the above multiple measurement values ​​into the specific target range of the above environmental factor.

[0088] According to this aspect, the processing period can be started early by causing the setting means to end the setting process when all the complex measurement values ​​converge within a specific target range.

[0089] In the above aspect, the setting means ends the setting process when the elapsed time from the start of the setting process or the number of changes in the rotation speed reaches a specific upper limit value.

[0090] According to this aspect, by terminating the setting process when the elapsed time or the number of changes in the rotation speed reaches an upper limit value, it is possible to avoid excessively delaying the start of the processing period.

[0091] In the above-mentioned aspect, a lower limit value and an upper limit value of the rotation speed of the aforementioned multiple air supply fans are pre-set; the aforementioned setting means changes the rotation speed of the aforementioned multiple air supply fans within a range above the lower limit value and below the upper limit value.

[0092] According to this aspect, by changing the rotation speed within the range above the lower limit value and below the upper limit value in the setting process by the setting means, it is possible to avoid the rotation speed being set to an excessively low speed or an excessively high speed.

[0093] A program for one aspect of the present invention is used to use a computer that controls an environment forming device as a setting means, wherein the environment forming device includes: an environment forming chamber, in which a target object to be processed is placed; an air-conditioning chamber, which is connected to the environment forming chamber; an air-conditioning means, which is arranged in the air-conditioning chamber, and generates air-conditioned air by adjusting the environmental factors of the air; a plurality of air-supply fans, which circulate the air-conditioned air between the air-conditioning chamber and the environment forming chamber; and a plurality of measuring means, which measure the aforementioned environmental factors at a plurality of locations in the environment forming chamber and output a plurality of measured values; the setting means can individually set the rotation speed of each of the plurality of air-supply fans; in a setting period before a processing period for executing the aforementioned processing, the rotation speed of the plurality of air-supply fans is changed a plurality of times, the plurality of measured values ​​after each change are obtained, and a setting process for setting the rotation speed of each of the air-supply fans is executed in the aforementioned processing period based on the obtained plurality of measured values.

[0094] According to this aspect, in the setting process, the setting means changes the rotation speed of the plurality of air supply fans a plurality of times, and obtains the plurality of measured values ​​after each change from the plurality of measuring means. By appropriately setting the rotation speed of each air supply fan during the processing period based on the result, the difference in environmental factors in the environment forming room can be eliminated or reduced.

[0095] Regarding an air supply fan control method of one aspect of the present invention, the air supply fan is controlled in an environment forming device, and the aforementioned environment forming device includes: an environment forming chamber, in which a target object to be processed is placed; an air-conditioning chamber, which is connected to the aforementioned environment forming chamber; an air-conditioning means, which is arranged in the aforementioned air-conditioning chamber, and generates air-conditioned air by adjusting the environmental factors of the air; a plurality of air supply fans, which circulate the aforementioned air-conditioned air between the aforementioned air-conditioning chamber and the aforementioned environment forming chamber; a plurality of measuring means, which measures the aforementioned environmental factors at a plurality of locations in the aforementioned environment forming chamber and outputs a plurality of measured values; and a setting means, which can individually set the rotation speed of each of the aforementioned plurality of air supply fans; the aforementioned setting means changes the rotation speed of the aforementioned plurality of air supply fans a plurality of times during a setting period before a processing period in which the aforementioned processing is performed, obtains the aforementioned plurality of measured values ​​after each change, and performs a setting process for setting the rotation speed of each of the aforementioned air supply fans during the aforementioned processing period based on the obtained aforementioned plurality of measured values.

[0096] According to this aspect, in the setting process, the setting means changes the rotation speed of the plurality of air supply fans a plurality of times, and obtains the plurality of measured values ​​after each change from the plurality of measuring means. By appropriately setting the rotation speed of each air supply fan during the processing period based on the result, the difference in environmental factors in the environment forming room can be eliminated or reduced.

[0097] Although the details of the present invention have been described in detail, the above description is illustrative and not restrictive in all aspects. It should be understood that various other modifications and variations can be designed without departing from the scope of the present invention.

[0098] 1: Environmental test equipment 2: Shell 2A:Inside 2B:Inside 3: Test room 4: Air-conditioned room 5: Shed board 6: Test object 7: 1st wall 8: Ventilation 9: 2nd wall 10: Ventilation 11: Cooler 12: Heater 13: Air supply fan 14: DC motor 15: Rotation axis 17: Temperature sensor 18: Temperature sensor 30: Control Department 31: Memory Department 32: Program 41: 1st Space Department 42: Second Space Department 43: Connecting Space Department 101~104: Ventilation vents 131~134: Air supply fan 141~144: DC motor 171~174: Temperature sensor 181~184: Temperature sensor S3~S4: driving signal S11~S14: Temperature data S21~S24: Temperature data S51~S54: drive signal SP101~SP113: Flowchart steps

Claims

1. An environment-forming device, comprising: An environmental formation room is used to house the objects to be processed. The air-conditioned room is connected to the aforementioned environmental formation room; An air conditioning system is installed in the aforementioned air-conditioned room to generate air-conditioned air by regulating environmental factors. A plurality of air supply fans circulate the air-conditioned air between the aforementioned air-conditioned room and the aforementioned environment-forming room. A plurality of measurement devices measure the aforementioned environmental factors at multiple locations within the aforementioned environment-forming room and output multiple measurement values. A setting device can individually set the rotational speed of each of the plurality of air supply fans. Specifically: the setting device performs a setting process to set the rotational speed of each air supply fan during the aforementioned processing period, after the operation of the aforementioned environment-forming device begins and before the processing period of the aforementioned process is executed. During the setting process, the setting device changes the rotational speed of the plurality of air supply fans multiple times and obtains the multiple measurement values ​​after each change from the plurality of measurement devices. An evaluation value of the change is calculated based on the error between the target value of the aforementioned environmental factor and the multiple measurement values, or the difference between the measurement values. If the error or difference between the evaluation value after the change in the rotation speed of the aforementioned plurality of air supply fans and the evaluation value before the change becomes smaller, then the change is adopted; if the evaluation value after the change is the same as the evaluation value before the change, or if the error or difference becomes larger, then the change is not adopted; the rotation speed of each of the aforementioned air supply fans set at the last time during the aforementioned setting period is set as the rotation speed of each of the aforementioned air supply fans during the aforementioned processing period.

2. An environment forming apparatus, comprising: An environmental formation room is used to house the objects to be processed. The air-conditioned room is connected to the aforementioned environmental formation room; An air conditioning system is configured in the aforementioned air-conditioned room to generate air-conditioned air by regulating environmental factors; a plurality of air supply fans circulate the air-conditioned air between the aforementioned air-conditioned room and the aforementioned environment-forming room; a plurality of measurement means measures the aforementioned environmental factors at a plurality of locations within the aforementioned environment-forming room and outputs a plurality of measurement values; and a setting means is configured to individually set the rotational speed of each of the plurality of air supply fans; wherein: the aforementioned setting means performs a setting process to set the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period after the aforementioned environment-forming device starts operating and before the processing period of the aforementioned processing is executed; in the aforementioned setting process, the aforementioned setting means changes the rotational speed of the plurality of air supply fans a plurality of times and obtains the aforementioned plurality of measurement values ​​after each change from the aforementioned plurality of measurement means; calculates an evaluation value of the change based on the error or difference between the target value of the aforementioned environmental factor and the aforementioned plurality of measurement values; and changes the rotational speed of the aforementioned plurality of air supply fans a plurality of times and records the aforementioned evaluation value after each change; The rotational speed of each of the aforementioned air supply fans is set as the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period, based on the evaluation value with the smallest error or difference among the recorded complex evaluation values.

3. The environment forming apparatus as claimed in claim 1 or 2, wherein the aforementioned setting means, after the rotational speed of the aforementioned plurality of air supply fans is changed, determines whether to adopt the change based on specific operating parameters of the aforementioned environment forming apparatus and specific reference values ​​related to the operating parameters.

4. The environment forming apparatus as claimed in claim 1 or 2, wherein the aforementioned setting means uses the current rotational speed of each of the aforementioned air supply fans as a reference value, and uses the change in rotational speed from the reference value as an increment or decrement value to set the next rotational speed of each of the aforementioned air supply fans.

5. An environment-forming apparatus as claimed in claim 1 or 2, wherein the aforementioned setting means terminates the aforementioned setting process by converging all the aforementioned complex measurement values ​​into a specific target range of the aforementioned environmental factors.

6. An environment forming apparatus as described in claim 1 or 2, wherein the aforementioned setting means terminates the aforementioned setting process by reaching a specific upper limit value after the elapsed time or the number of changes in rotation speed since the start of the aforementioned setting process.

7. An environment-forming apparatus as claimed in claim 1 or 2, wherein: A lower limit and an upper limit for the rotational speed of the aforementioned plurality of air supply fans are preset; the aforementioned setting means changes the rotational speed of the aforementioned plurality of air supply fans within the range of the lower limit and the upper limit.

8. A program for operating a computer controlling an environment-forming device as a setting means, the environment-forming device comprising: An environmental formation room is used to house the objects to be processed. The air-conditioned room is connected to the aforementioned environmental formation room; An air conditioning system is configured in the aforementioned air-conditioned room to generate air-conditioned air by regulating environmental factors; a plurality of air supply fans circulate the air-conditioned air between the aforementioned air-conditioned room and the aforementioned environment-forming room; and a plurality of measurement means measures the aforementioned environmental factors at a plurality of locations within the aforementioned environment-forming room and outputs a plurality of measurement values; wherein: the aforementioned setting means can individually set the rotational speed of each of the aforementioned plurality of air supply fans; during a setting period after the aforementioned environment-forming device starts operating and before the aforementioned processing is performed, a setting process is executed to set the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period; during the aforementioned setting process, the aforementioned setting means changes the rotational speed of the aforementioned plurality of air supply fans a plurality of times and obtains the aforementioned plurality of measurement values ​​after each change from the aforementioned plurality of measurement means; and calculates an evaluation value of the change based on the error or difference between the target value of the aforementioned environmental factor and the aforementioned plurality of measurement values; If the error or difference between the evaluation value after the change in the rotation speed of the aforementioned plurality of air supply fans and the evaluation value before the change becomes smaller, then the change is adopted; if the evaluation value after the change is the same as the evaluation value before the change, or if the error or difference becomes larger, then the change is not adopted; the rotation speed of each of the aforementioned air supply fans set at the last time during the aforementioned setting period is set as the rotation speed of each of the aforementioned air supply fans during the aforementioned processing period.

9. A program for operating a computer controlling an environment-forming device as a setting means, the environment-forming device comprising: An environmental formation room is used to house the objects to be processed. The air-conditioned room is connected to the aforementioned environmental formation room; An air conditioning system is configured in the aforementioned air-conditioned room to generate air-conditioned air by regulating environmental factors; a plurality of air supply fans circulate the air-conditioned air between the aforementioned air-conditioned room and the aforementioned environment-forming room; and a plurality of measurement means measures the aforementioned environmental factors at a plurality of locations within the aforementioned environment-forming room and outputs a plurality of measurement values; wherein: the aforementioned setting means can individually set the rotational speed of each of the aforementioned plurality of air supply fans; during a setting period after the aforementioned environment-forming device starts operating and before the aforementioned processing period, a setting process is performed to set the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period; during the aforementioned setting process, the aforementioned setting means repeatedly changes the rotational speed of the aforementioned plurality of air supply fans and obtains the aforementioned plurality of measurement values ​​after each change from the aforementioned plurality of measurement means; calculates an evaluation value of the change based on the error or difference between the target value of the aforementioned environmental factor and the aforementioned plurality of measurement values; repeatedly changes the rotational speed of the aforementioned plurality of air supply fans and records the aforementioned evaluation value after each change; The rotational speed of each of the aforementioned air supply fans is set as the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period, based on the evaluation value with the smallest error or difference among the recorded complex evaluation values.

10. A method for controlling a blower fan, wherein the blower fan is controlled in an environment forming apparatus, the environment forming apparatus comprising: An environmental formation room is used to house the objects to be processed. The air-conditioned room is connected to the aforementioned environmental formation room; An air conditioning system is configured in the aforementioned air-conditioned room to generate air-conditioned air by regulating environmental factors; a plurality of air supply fans circulate the air-conditioned air between the aforementioned air-conditioned room and the aforementioned environment-forming room; a plurality of measurement means measures the aforementioned environmental factors at a plurality of locations within the aforementioned environment-forming room and outputs a plurality of measurement values; and a setting means is configured to individually set the rotational speed of each of the plurality of air supply fans; wherein: the aforementioned setting means performs a setting process to set the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period after the aforementioned environment-forming device starts operating and before the processing period of the aforementioned processing is executed; in the aforementioned setting process, the aforementioned setting means changes the rotational speed of the aforementioned plurality of air supply fans a plurality of times and obtains the aforementioned plurality of measurement values ​​after each change from the aforementioned plurality of measurement means; and calculates an evaluation value of the change based on the error or difference between the target value of the aforementioned environmental factor and the aforementioned plurality of measurement values; If the error or difference between the evaluation value after the change in the rotation speed of the aforementioned plurality of air supply fans and the evaluation value before the change becomes smaller, then the change is adopted; if the evaluation value after the change is the same as the evaluation value before the change, or if the error or difference becomes larger, then the change is not adopted; the rotation speed of each of the aforementioned air supply fans set at the last time during the aforementioned setting period is set as the rotation speed of each of the aforementioned air supply fans during the aforementioned processing period.

11. A method for controlling a blower fan, wherein the blower fan is controlled in an environment forming apparatus, the environment forming apparatus comprising: An environmental formation room is used to house the objects to be processed. The air-conditioned room is connected to the aforementioned environmental formation room; An air conditioning system is configured in the aforementioned air-conditioned room to generate air-conditioned air by regulating environmental factors; a plurality of air supply fans circulate the air-conditioned air between the aforementioned air-conditioned room and the aforementioned environment-forming room; a plurality of measurement means measures the aforementioned environmental factors at a plurality of locations within the aforementioned environment-forming room and outputs a plurality of measurement values; and a setting means is configured to individually set the rotational speed of each of the plurality of air supply fans; wherein: the aforementioned setting means performs a setting process to set the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period after the aforementioned environment-forming device starts operating and before the processing period of the aforementioned processing is executed; in the aforementioned setting process, the aforementioned setting means changes the rotational speed of the aforementioned plurality of air supply fans a plurality of times and obtains the aforementioned plurality of measurement values ​​after each change from the aforementioned plurality of measurement means; calculates an evaluation value of the change based on the error or difference between the target value of the aforementioned environmental factor and the aforementioned plurality of measurement values; and changes the rotational speed of the aforementioned plurality of air supply fans a plurality of times and records the aforementioned evaluation value after each change; The rotational speed of each of the aforementioned air supply fans is set as the rotational speed of each of the aforementioned air supply fans during the aforementioned processing period, based on the evaluation value with the smallest error or difference among the recorded complex evaluation values.

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