Tilted large area manipulator for collimated deposition

Abstract

This invention discloses a dual-tilt-angle large-area collimated coating apparatus. The dual-tilt-angle large-area collimated coating apparatus includes a base module, a rotating module, and a loading module. The rotating module is movably disposed on the base module. The loading module includes a module body, a loading assembly, a first driving assembly, and a second driving assembly. The module body is connected to the rotating module and has an accommodating space, a first opening, and multiple shielding elements. The accommodating space communicates with the first opening, and the multiple shielding elements are configured to open or shield the first opening. The loading assembly is configured to hold an object. At least one first driving assembly is configured to drive the loading assembly to reciprocate in a first direction or a second direction. The second driving assembly is configured to drive the loading assembly to rotate about a first axial direction. Therefore, the dual-tilt-angle large-area collimated coating apparatus of this invention enables a more uniform film thickness when the object is coated at an angle.

Description

Technical Field

[0001] This invention relates to a coating apparatus and a loading module, and more particularly to a dual-tilt large-area collimation coating apparatus and loading module that can make the coating thickness of objects more uniform when coating at an angle. Prior Technology

[0002] In the manufacturing processes of various products such as semiconductors, displays, or optical discs, it is sometimes necessary to form thin films on workpieces such as wafers or glass substrates.

[0003] However, during the coating process, it is sometimes necessary to tilt the workpiece for coating due to requirements, but current coating equipment cannot coat the workpiece evenly when it is tilted.

[0004] Therefore, how to overcome the above-mentioned defects through structural design improvements has become one of the important issues that this project aims to address. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a dual-tilt angle large-area collimation coating device and a loading module to address the shortcomings of the prior art.

[0006] To address the aforementioned technical problems, one technical solution adopted by the present invention is to provide a large-area collimation coating device with dual tilt angles, comprising a base module, a rotating module, and a loading module. The rotating module is movably disposed on the base module. The loading module includes a module body, a loading component, at least one first driving component, and a second driving component. The module body is connected to the rotating module and has an accommodating space, a first opening, and multiple shielding elements. The accommodating space communicates with the first opening, and the multiple shielding elements are movably disposed on the module body and configured to open or shield the first opening. The loading component is located in the accommodating space and is configured to hold at least one object. At least one first driving component is movably connected to the loading component and is configured to drive the loading component to reciprocate in a first direction or a second direction. A second drive assembly is movably connected to the cargo assembly and is configured to drive the cargo assembly to rotate about a first axis.

[0007] In one feasible or preferred embodiment, the rotating module is configured to drive the module body to rotate about a second axis, so that the module body is in a horizontal, tilted or vertical state, the second axis being different from the first axis.

[0008] In one feasible or preferred embodiment, the first drive assembly includes a linkage element and a first drive element. The linkage element is movably disposed in the accommodating space and connected to the module body, and is movably connected to the carrying assembly. The first drive element is disposed in the accommodating space and connected to the module body, and is movably connected to the linkage element. The first drive element is configured to drive the linkage element to rotate, thereby causing the linkage element to displace the carrying assembly.

[0009] In one feasible or preferred embodiment, the dual-tilt large-area collimation coating apparatus further includes a plurality of the first drive components, which are disposed opposite to each other in the accommodating space and movably connected to the carrier component. The second drive component includes a component body and a second drive element. The component body is disposed on the module body. The second drive element is disposed on the component body and movably connected to the carrier component, and the second drive element is configured to drive the carrier component to rotate.

[0010] In one feasible or preferred embodiment, the loading assembly includes a limiting element and a main element. The limiting element is movably connected to the first driving assembly and has a through hole. The main element passes through the through hole and is movably disposed on the limiting element, one end of the main element is movably connected to the at least one first driving assembly, and the other end of the main element is configured to hold the at least one object.

[0011] In one feasible or preferred embodiment, the dual-tilt large-area collimation coating apparatus further includes a working chamber and multiple blocking modules. The working chamber has a cavity and a blocking element that divides the cavity into a first space and a second space. The first space is configured to accommodate the loading module, and the blocking element has a third opening. Multiple blocking modules are disposed opposite each other in the working chamber. Each blocking module includes a shielding component and a third driving component. Each shielding component is located in the first space and is movably connected to its corresponding third driving component. Each third driving component is configured to drive the corresponding shielding component to move, thereby opening or blocking the third opening. The second space is configured to accommodate an external coating source, and the third opening corresponds to the external coating source.

[0012] To address the aforementioned technical problems, another technical solution adopted by the present invention is to provide a loading module applied to a dual-tilt large-area collimation coating device. The loading module includes a module body, a loading component, at least one first driving component, and a second driving component. The module body is connected to the dual-tilt large-area collimation coating device. The module body has an accommodating space, a first opening, and multiple shielding elements. The accommodating space communicates with the first opening. The multiple shielding elements are movably disposed on the module body and configured to open or shield the first opening. The loading component is located in the accommodating space and is configured to hold at least one object. At least one first driving component is movably connected to the loading component and is configured to drive the loading component to reciprocate in a first direction or a second direction. A second drive assembly is movably connected to the cargo assembly and is configured to drive the cargo assembly to rotate about a first axis.

[0013] In one feasible or preferred embodiment, the first drive assembly includes a linkage element and a first drive element. The linkage element is movably disposed in the accommodating space and connected to the module body, and is movably connected to the carrying assembly. The first drive element is disposed in the accommodating space and connected to the module body, and is movably connected to the linkage element. The first drive element is configured to drive the linkage element to rotate, thereby causing the linkage element to displace the carrying assembly.

[0014] In one feasible or preferred embodiment, the loading module further includes a plurality of the first driving components, which are disposed opposite to each other in the accommodating space and movably connected to the loading component. The second driving component includes a component body and a second driving element. The component body is disposed on the module body. The second driving element is disposed on the component body and movably connected to the loading component, and the second driving element is configured to drive the loading component to rotate.

[0015] In one feasible or preferred embodiment, the loading assembly includes a limiting element and a main element. The limiting element is movably connected to the first driving assembly and has a through hole. The main element passes through the through hole and is movably disposed on the limiting element, one end of the main element is movably connected to the at least one first driving assembly, and the other end of the main element is configured to hold the at least one object.

[0016] One of the beneficial effects of the present invention is that the dual-tilt-angle large-area collimation coating equipment and the carrier module provided by the present invention can make the film thickness deposited on the object more uniform when the object is coated at the tilt angle by means of the above-mentioned technical solution.

[0017] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Simple Explanation of the Diagram

[0018] Figure 1 is a perspective view of one angle of the double-tilt large-area collimation coating equipment of the first embodiment of the present invention.

[0019] Figure 2 is a three-dimensional schematic diagram of the double-tilt large-area collimation coating equipment of the first embodiment of the present invention from another perspective.

[0020] Figure 3 is a partially exploded schematic diagram of the rotating module according to the first embodiment of the present invention.

[0021] Figure 4 is a partial cross-sectional schematic diagram of the double-tilt large-area collimation coating equipment according to the first embodiment of the present invention.

[0022] Figure 5 is a top view of the double-tilt-angle large-area collimation coating equipment according to the first embodiment of the present invention.

[0023] Figure 6 is a three-dimensional schematic diagram of the cargo module according to the first embodiment of the present invention.

[0024] Figure 7 is an exploded view of the cargo module according to the first embodiment of the present invention.

[0025] Figure 8 is a schematic diagram of the first usage state of the double-tilt large-area collimation coating equipment according to the first embodiment of the present invention.

[0026] Figure 9 is a schematic diagram of the second operating state of the dual-tilt large-area collimation coating equipment according to the first embodiment of the present invention.

[0027] Figure 10 is a schematic diagram of the blocking module according to the second embodiment of the present invention.

[0028] Figure 11 is a functional block diagram of the double-tilt large-area collimation coating equipment according to the second embodiment of the present invention. Implementation

[0029] The following specific embodiments illustrate the implementation of the "Dual-angle Large-Area Collimation Coating Equipment and Carrier Module" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated in advance. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0030] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein may, depending on the context, include any combination of one or more of the associated listed items.

[0031] [First Embodiment]

[0032] Please refer to Figures 1 to 9, which are, respectively, a perspective view of the dual-tilt-angle large-area collimation coating equipment of the first embodiment of the present invention, a perspective view of the dual-tilt-angle large-area collimation coating equipment of another perspective view, a partially exploded view of the rotating module, a partially cross-sectional view of the dual-tilt-angle large-area collimation coating equipment, a top view of the dual-tilt-angle large-area collimation coating equipment, a perspective view of the loading module, an exploded view of the loading module, a first usage state diagram of the dual-tilt-angle large-area collimation coating equipment, and a second usage state diagram of the dual-tilt-angle large-area collimation coating equipment. As shown in the above figures, the first embodiment of the present invention provides a dual-tilt-angle large-area collimation coating equipment Z, which includes a base module 1, a rotating module 2, and a loading module D.

[0033] As shown in Figures 1 to 5, the base module 1 can be configured to support the rotating module 2. The base module 1 may include a base assembly 10 and a barrier assembly 11. The base assembly 10 is detachably fixed to the ground or a platform, and has a positioning element 100 with a recess 100a. The barrier assembly 11 may be a hollow structure, and is connected to and located on the base assembly 10; the barrier assembly 11 may be a single component or assembled from multiple components.

[0034] Next, as shown in Figures 1 to 5, the rotating module 2 is movably disposed on the base module 1. For example, the rotating module 2 can be configured to drive the module body D1 to rotate around a second axis, so that the module body D1 can be in a horizontal, tilted, or vertical state, the second axis being different from the first axis of the second drive assembly D4. The rotating module 2 may include a power assembly 20 and a linkage assembly 21. The power assembly 20 is movably connected to the base module 1, and the power assembly 20 may be a motor or other type of driver. The power assembly 20 is detachably connected to the base assembly 10. The linkage assembly 21 is connected to the power assembly 20 and passes through the base module 1.

[0035] Furthermore, the linkage assembly 21 may include a transmission element 210, a fixed element 211, and a support element 212. The transmission element 210 is movably connected to the power assembly 20; wherein, the transmission element 210 may further include a transmission wheel 2100, a transmission belt 2101, and a movable member 2102. The transmission belt 2101 is movably connected to the transmission wheel 2100 and the power assembly 20. The movable member 2102 has a T-shaped structure and is partially hollow; one end of the movable member 2102 is detachably connected to the transmission element 210, and the other end of the movable member 2102 is movably inserted through the fixed element 211; wherein, there may be a magnetofluid between the movable member 2102 and the fixed element 211, which can seal the gap between the movable member 2102 and the fixed element 211 and lubricate the rotation of the movable member 2102. The fixed element 211 is hollow and is connected to the blocking assembly 11. A support element 212 passes through the barrier assembly 11 and the fixing element 211. One end of the support element 212 is detachably connected to the movable part 2102, and the other end of the support element 212 is exposed outside the barrier assembly 11 and connected to the load-bearing module 3. The support element 212 can be a long strip structure, and it can be a single component or assembled from multiple components. When the support element 212 is assembled from multiple components, the operator can adjust the length of the support element 212 by adjusting the distance between the multiple components. Furthermore, the power assembly 20 can be used to drive the linkage assembly 21 to rotate around a second axis, that is, to rotate in a first rotation direction or a second rotation direction, so that the load-bearing module D is tilted. The first rotation direction can be clockwise or counterclockwise, and the second rotation direction can be clockwise or counterclockwise, and the first and second rotation directions are opposite to each other. In addition, the transmission element 210 also includes a limiting piece 2103, which is detachably mounted on the transmission wheel 2100, and the limiting piece 2103 may be an arc-shaped structure. A first limiting portion 2103a of the limiting piece 2103 is movably located in the recess 100a.

[0036] Next, referring to Figures 1, 2, 4 to 7, the loading module D may include a module body D1, a loading component D2, at least one first driving component D3, and a second driving component D4. For example, the module body D1 may be connected to the rotating module 2; wherein, the module body D1 may be a hollow box-shaped structure, but is not limited thereto. The module body D1 may have an accommodating space D10, a first opening D11, and a plurality of blocking elements D12. The accommodating space D10 may communicate with the first opening D11, and the plurality of blocking elements D12 may be movably disposed on the module body D1. The plurality of blocking elements D12 may be configured to open or block the first opening D11; wherein, the blocking element D12 may be a thin plate structure. In addition, the module body D1 may also have a second opening D13, which is located on one side of the module body D1, and a first opening D11 is located on the other side of the module body D1. The accommodating space D10 can communicate with the first opening D11 and the second opening D13.

[0037] The loading assembly D2 may be located in the accommodating space D10, and the loading assembly D2 may be configured to hold at least one object B. Further, the loading assembly D2 may include a limiting element D20 and a main body element D21. The limiting element D20 is movably connected to the first driving assembly D3, and the limiting element D20 may have a through hole D200 penetrating the body of the limiting element D20. The main component D21 can be inserted into the through hole D200 and can be movably disposed on the limiting element D20. One end of the main component D21 can be movably connected to the second driving element D41 of the second driving assembly D4. The other end of the main component D21 can be configured to hold the object B. One end of the main component D21 can have a serrated or other engaging structure. One end of the main component D21 can be exposed in the second opening D13. The other end of the main component D21 can be a claw structure or other type of clamping element, but is not limited thereto.

[0038] The first drive component D3 is movably connected to the carrier component D2. The first drive component D3 can be configured to drive the carrier component D2 to reciprocate in a first direction F1 or a second direction F2. In this embodiment, two are used as an example, that is, the dual-tilt large-area collimation coating device Z further includes multiple first drive components D3. The multiple first drive components D3 are disposed opposite to each other in the accommodating space D10 and are movably connected to the carrier component D2, but this is not a limitation. In other optional embodiments, a single first drive component D3 and a guide rod element can be provided in conjunction with the limiting element D20. Further, the first drive component D3 may include a connecting rod element D30 and a first drive element D31. The connecting rod element D30 is movably disposed in the accommodating space D10 and connected to the module body D1. The connecting rod element D30 is movably connected to one side of the carrier component D2. The connecting rod element D30 may be a screw or other type of guiding member. The first drive element D31 is disposed in the accommodating space D10 and connected to the module body D1. The first drive element D31 is movably connected to the linkage element D30. The first drive element D31 can be configured to drive the linkage element D30 to rotate so that the linkage element D30 drives the load assembly D2 to move. The first drive element D31 can be a motor or other type of driver.

[0039] The second drive assembly D4 is movably connected to the carrier assembly D2 and is configured to drive the carrier assembly D2 to rotate about a first axis. Further, the second drive assembly D4 may include a component body D40 and a second drive element D41. The component body D40 may be disposed on the module body D1; wherein, the component body D40 may be a frame structure, but is not limited thereto. The second drive element D41 may be disposed on the component body D40 and movably connected to one end of the main body element D21 of the carrier assembly D2. The second drive element D41 is configured to drive the carrier assembly D2 to rotate; wherein, the second drive element D41 may be a motor or other type of driver. Furthermore, the second drive assembly D4 may correspond to the second opening D13.

[0040] Therefore, as shown in Figures 1 to 9, during the coating process, the dual-tilt large-area collimation coating equipment Z of the present invention can have the carrier module 3 and a portion of the support element 212 exposed outside the barrier component 11 located in the vacuum working chamber 3. An external coating source E (e.g., a crucible, but not limited thereto) is provided in the working chamber 3, and the external coating source E is located below the carrier module D (i.e., the first opening D11 of the carrier module D faces the external coating source E). Furthermore, the carrier component D2 of the carrier module D can hold an object B (in this embodiment, a wafer is used as an example, but not limited thereto).

[0041] Next, during the coating process on object B, an external coating source E can provide a coating material (not shown in the figure) to the carrier module D, and the coating material can be attached to the surface of object B through the first opening D11 of the module body D1, thereby forming a film layer (not shown in the figure).

[0042] During the coating process, the dual-tilt large-area collimation coating equipment Z of the present invention can drive the transmission element 210 to rotate around its own axis AC1 (i.e., the second axis) in either the first or second rotation direction via the power component 20. This causes the transmission element 210 to drive the movable part 2102 and the support element 212 to rotate together. At this time, the support element 212 will drive the entire loading module D to rotate together, causing the loading module D to be tilted (as shown in Figure 9). Then, when the external coating source E provides coating material to the loading module D, more coating material can be attached to the surface of the object B closer to the first opening D11, and less coating material can be attached to the surface of the object B farther from the first opening D11. Furthermore, the dual-tilt-angle large-area collimation coating equipment Z can also drive the connecting rod element D30 to rotate via the first driving element D31, thereby displacing the carrier assembly D2 in the first direction F1 or the second direction F2, so that the surface of the object B to be coated can be closer to or correspond to the first opening D11. Moreover, the dual-tilt-angle large-area collimation coating equipment Z of the present invention can also drive the carrier assembly D2 to rotate axially (i.e., rotate in place) around its own axis AC2 (i.e., the first axial direction) via the second driving element D41 of the second driving assembly D4, so that the surface of the object B to be coated can be closer to or correspond to the first opening D11; wherein, the second driving element D41 can drive the carrier assembly D2 to rotate clockwise or counterclockwise. In addition, the operator can also manually adjust the position of at least one shielding element D12 to adjust the size of the first opening D11.

[0043] Therefore, during the coating process, the dual-tilt-angle large-area collimating coating equipment Z of the present invention can, separately or simultaneously, drive the module body D1 of the carrier module D to move in multiple axes by rotating module 2, first drive component D3, and second drive component D4, thereby adjusting the position or angle of the module body D1. It can also adjust the size of the first opening D11 to solve the problem of uneven film thickness when coating object B at an angle, thus making the coating on the surface of object B or specific areas on its surface more uniform. Furthermore, the dual-tilt-angle large-area collimating coating equipment Z of the present invention can also form a uniform thickness coating on the surface of a large object B, and can also uniformly coat specific areas on the surface of object B, thereby improving the convenience and uniformity of the coating process.

[0044] Furthermore, based on the above description and in conjunction with Figures 1, 2, and 4 to 9, this invention further proposes a loading module D, which can be applied to a double-tilt large-area collimation coating device Z. The loading module D may include a module body D1, a loading component D2, at least one first driving component D3, and a second driving component D4. The module body D1 can be connected to the rotating module 2. The module body D1 may have a receiving space D10, a first opening D11, and multiple shielding elements D12. The receiving space D10 may communicate with the first opening D11. The multiple shielding elements D12 are movably disposed on the module body D1 and can be configured to open or shield the first opening D11. The loading component D2 may be located in the receiving space D10 and can be configured to hold at least one object B. At least one first drive component D3 is movably connected to the load component D2, and the at least one first drive component D3 can be configured to drive the load component D2 to reciprocate in a first direction or a second direction. A second drive component D4 is movably connected to the load component D2, and the second drive component D4 can be configured to drive the load component D2 to rotate about a first axis.

[0045] [Second Embodiment]

[0046] Please refer to Figures 10 and 11, which are schematic diagrams of the blocking module and functional block diagrams of the dual-tilt large-area collimation coating equipment of the second embodiment, respectively. Please also refer to Figures 1 to 9. As shown, the dual-tilt large-area collimation coating equipment Z of this embodiment is generally similar to the dual-tilt large-area collimation coating equipment Z of the above embodiments. Therefore, the configuration or operation of the same components will not be described again here. The difference between this embodiment and the first embodiment is that, in this embodiment, the dual-tilt large-area collimation coating equipment Z of the present invention may further include a working chamber 3 and multiple blocking modules 4. The working chamber 3 may have a cavity 30 and a blocking element 31. The blocking element 31 can divide the cavity 30 into a first space 300 and a second space 301. The first space 300 may be configured to accommodate the loading module D. The blocking element 31 may have a third opening 310. Multiple blocking modules 4 can be disposed opposite to each other in the working cavity 3. Each blocking module 4 may include a shielding component 40 and a third driving component 41. Each shielding component 40 may be located in the first space 300 and movably connected to the corresponding third driving component 41. Each third driving component 41 may be configured to drive the corresponding shielding component 40 to move, so that the multiple shielding components 40 open or block the third opening 310. The second space 301 may be configured to accommodate an external coating source E, and the third opening 310 corresponds to the external coating source E.

[0047] For example, as shown in Figures 8 to 10, the working chamber 3 can be a vacuum chamber. The blocking element 31 can be a partition structure. Each shielding component 40 can be a claw-shaped plate structure, and the third drive component 41 can be a motor or other type of driver, but is not limited thereto. Therefore, in addition to the aforementioned embodiment where the rotating module 2, the first drive component D3, and the second drive component D4 drive the module body D1 of the loading module D to move in multiple axes to adjust the position or angle of the module body D1 and to adjust the size of the first opening D11, the dual-tilt large-area collimation coating equipment Z of the present invention can also use the third drive component 41 to drive multiple shielding components 40 arranged opposite each other to approach, overlap, or move away from each other, so as to adjust the size of the area blocked by the third opening 310, thereby further improving the accuracy of uniform coating of the object B.

[0048] Furthermore, as shown in Figures 1 to 11, the dual-tilt large-area collimation coating apparatus Z of the present invention may further include a control module 5 and a sensing module 6. The control module 5 may be a circuit board or control unit with processing functions, but is not limited thereto. The control module 5 may be connected to the power assembly 20 of the rotation module 2, the first drive element D31 and the second drive assembly D4 of the first drive assembly D3, and the third drive assembly 41 of the blocking module 4. The control module 5 may, according to at least one control command (e.g., instruction or signal, but not limited thereto), drive at least one of the power assembly 20, the first drive element D31, the second drive assembly D4, and the third drive assembly 41 to operate. The sensing module 6 can be a film thickness sensor. The sensing module 6 can be disposed on the inner wall of the barrier element 31 and adjacent to the module body D1, or disposed on the outside of the module body D1 of the carrier module D and adjacent to the first opening D11, or disposed inside the module body D1 (i.e., in the accommodating space D10). The sensing module 6 can be connected to the control module 5. The sensing module 6 can be configured to detect the thickness of the coating on the object B and generate at least one film thickness signal. The control module 5 can be configured to receive a film thickness signal and determine whether the film thickness deposited on the object B is uniform based on the film thickness signal. Therefore, if the control module 5 determines that the film thickness deposited on the object B is not uniform based on the film thickness signal, the control module 5 can drive at least one of the power assembly 20, the first drive element D31, the second drive assembly D4, and the third drive assembly 41 to move the thicker part of the object B away from the first opening D11 or the external coating source E, and the thinner part of the object B approaching or adjacent to the first opening D11 or the external coating source E.

[0049] However, the examples given above are merely one possible embodiment and are not intended to limit the invention.

[0050] [Beneficial Effects of the Examples]

[0051] One of the beneficial effects of the present invention is that the dual-tilt-angle large-area collimation coating equipment Z and the carrier module D provided by the present invention can, through the above-mentioned technical solution, make the film thickness of the object B more uniform when coating at the tilt angle.

[0052] Furthermore, during the coating process, the dual-tilt large-area collimation coating equipment Z of the present invention can, individually or simultaneously, drive the module body D1 of the carrier module D to move in multiple axes via the rotating module 2, the first driving component D3, and the second driving component D4. This allows adjustment of the position or angle of the module body D1, and can also adjust the size of the first opening D11 to solve the problem of uneven film thickness when coating object B at an angle, thereby making the coating on the surface of object B or a specific area on the surface more uniform. Moreover, the dual-tilt large-area collimation coating equipment Z of the present invention can also use the third driving component 41 to drive multiple opposing shielding components 40 to move closer or further apart, adjusting the size of the area shielded by the third opening 310, further improving the accuracy of uniform coating on object B.

[0053] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention specification and drawings are included in the scope of the patent application of the present invention.

[0054] Z: Dual-tilt large-area collimation coating equipment 1: Base Module 10: Base assembly 100: Positioning element 100a: Recessed portion 11: Barrier Components 2: Rotating Module 20: Power Components 21: Linkage Components 210: Transmission components 2100: Drive wheel 2101: Transmission belt 2102: Active Parts 2103: Limiting plate 2103a: First limiting part 211: Fixed Components 212: Support element 3: Working cavity 30: Chamber 300: First Space 301: The Second Space 31: Barrier element 310: Third opening 4: Blocking Module 40: Shielding components 41: Third drive component 5: Control Module 6: Sensing Module D: Cargo Module D1: Main body of the module D10: Storage space D11: First opening D12: Blocking element D13: Second opening D2: Cargo Assembly D20: Limiting element D200: Perforation D21: Main Components D3: First Drive Component D30: Linkage element D31: First driving element D4: Second Drive Component D40: Component Body D41: Second driving element AC1, AC2: Axis B: Object E: External coating source F1: First Direction F2: Second direction

Claims

1. A large-area collimating coating device with dual tilt angles, comprising: One base module; A rotating module is movably mounted on the base module; The system also includes: a module body connected to the rotating module, the module body having an accommodating space, a first opening, and a plurality of blocking elements, the accommodating space communicating with the first opening, the plurality of blocking elements being movably disposed on the module body, and the plurality of blocking elements being configured to open or block the first opening; a carrying assembly located in the accommodating space, the carrying assembly being configured to hold at least one object; at least one first driving assembly movably connected to the carrying assembly, the at least one first driving assembly being configured to drive the carrying assembly to reciprocate in a first direction or a second direction; and a second driving assembly movably connected to the carrying assembly, the second driving assembly being configured to drive the carrying assembly to rotate about a first axis; wherein the first driving assembly includes: A linkage element movably disposed in the accommodating space and connected to the module body, the linkage element being movably connected to the carrying assembly; and a first driving element disposed in the accommodating space and connected to the module body, the first driving element being movably connected to and adjacent to the linkage element; wherein the first driving element is configured to drive the linkage element to rotate, so that the linkage element drives the carrying assembly to move; wherein the dual-tilt large-area collimation coating equipment further includes: A working chamber has a cavity and a barrier element that divides the cavity into a first space and a second space. The first space is configured to accommodate the loading module. The barrier element has a third opening. A plurality of blocking modules are disposed opposite each other in the working chamber. Each blocking module includes a shielding component and a third driving component. Each shielding component is located in the first space and is movably connected to its corresponding third driving component. Each third driving component is configured to drive its corresponding shielding component to move, thereby opening or blocking the third opening. The second space is configured to accommodate an external coating source, and the third opening corresponds to the external coating source.

2. The dual-tilt-angle large-area collimation coating equipment as described in claim 1, wherein, The rotating module is configured to drive the module body to rotate around a second axis, so that the module body is in a horizontal, tilted or vertical state, the second axis being different from the first axis.

3. The dual-tilt-angle large-area collimation coating apparatus as described in claim 1 further includes a plurality of the first driving components, wherein the plurality of first driving components are disposed opposite to each other in the accommodating space and are movably connected to the carrier component; wherein, The second drive assembly includes: a component body disposed on the module body; and a second drive element disposed on the component body and movably connected to the carrier assembly, the second drive element being configured to drive the carrier assembly to rotate.

4. The dual-tilt-angle large-area collimation coating equipment as described in claim 1, wherein, The loading assembly includes: a limiting element movably connected to the first driving assembly, the limiting element having a through hole; and a main body element passing through the through hole and movably disposed on the limiting element, one end of the main body element being movably connected to the at least one first driving assembly, and the other end of the main body element being configured to hold the at least one object.

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