Substrate transport robot

Abstract

This substrate transport robot includes: a support portion, which is a support hand that holds the substrate; and a housing having a grooved opening, on which the support portion is disposed for linear sliding movement. Furthermore, the substrate transport robot includes: a strip-shaped sealing member that closes the grooved opening of the housing; and opposing portions that arrange the periphery of the opening and the sealing member in a labyrinthine configuration.

Description

[Technical Field]

[0001] This invention relates to a substrate transport robot. [Previous Technology]

[0002] Previously, substrate transport robots have been disclosed. International Publication No. 2022 / 049789 discloses a substrate transport robot equipped with a substrate holding hand and an arm that moves the substrate holding hand. This substrate transport robot has a cylindrical housing covering an arm lifting mechanism that raises and lowers the arm. The housing has an opening for mounting the arm that moves up and down. Furthermore, a transport belt is mounted at the opening.

[0003] However, in the substrate transport robot described in International Publication No. 2022 / 049789, when the substrate is transported and moved linearly by lifting or sliding, a groove-shaped opening is disposed in the housing. In this case, the substrate transport robot described in International Publication No. 2022 / 049789 may have a strip-shaped member disposed to cover the opening. However, when the strip-shaped member is disposed to cover the opening, foreign matter such as liquid may enter the interior of the housing with the opening due to the gap between the opening and the strip-shaped member. Furthermore, particles generated inside the housing may leak out through the gap between the opening and the strip-shaped member. Therefore, it is desirable to suppress the entry and leakage of foreign matter from the opening of the housing when the substrate is transported by linear sliding. [Summary of the Invention]

[0004] The present invention was made to solve the problems mentioned above. One object of the present invention is to provide a substrate transport robot that can prevent foreign objects from entering and leaking out from the opening of the housing when the substrate is transported in a straight sliding motion.

[0005] The substrate transport robot constructed according to the first aspect of the present invention comprises: a support portion, which is a support hand that holds the substrate; a housing having a groove-shaped opening, the opening being provided with a support portion that can slide linearly; a sealing member that closes the groove-shaped opening; and an opposing portion, in which the periphery of the opening and the sealing member are facing each other in a labyrinthine manner.

[0006] The substrate transport robot according to the first aspect disclosed in this invention, as described above, includes: a sealing member that closes a groove-shaped opening; and a facing portion that faces the periphery of the opening and the sealing member in a labyrinthine configuration. Herein, by facing the periphery of the groove-shaped opening of the housing and the sealing member that seals the opening, a labyrinthine configuration is formed by the periphery of the opening and the sealing member, thus preventing foreign objects from entering and leaking through the gap between the sealing member and the periphery of the opening. As a result, when the substrate is transported in a linear sliding motion, it is possible to prevent foreign objects from entering and leaking from the opening of the housing.

[0007] According to the present invention, when the substrate is moved in a straight line during transport, it is possible to suppress the entry and leakage of foreign objects from the opening of the housing.

Implementation Method

[0009] The first embodiment of the present invention, which is embodied in the present invention, will be described below with reference to the drawings.

[0010] The substrate transport robot 100 configured according to the first embodiment will be described with reference to Figures 1 to 5.

[0011] (Substrate Processing System) As shown in FIG1, a substrate transfer robot 100 is disposed in a substrate processing system 102. The substrate processing system 102 includes a substrate transfer robot 100 and a processing device 103. The substrate transfer robot 100 performs a transfer operation involving the processing device 103 to and from the substrate mounting section 104, moving the substrate 101 in and out. The processing device 103 includes a plurality of substrate mounting sections 104. The substrate transfer robot 100 includes a hand 11 and a hand 12, which are separated from each other along the Z direction, which is the vertical direction, and each holds the substrate 101. The substrate 101 is, for example, a wafer used to produce semiconductors. The substrate 101 has a circular plate shape. The substrate 101 includes silicon wafers, gallium nitride wafers, sapphire wafers, etc. The processing device 103 is, for example, a polishing device for polishing the substrate 101. In addition, the processing device 103 can be a device for etching or sintering the substrate 101. In addition, hands 11 and 12 are examples of the first hand and the second hand, respectively.

[0012] The substrate transport robot 100 includes an upper arm 30 and a lower arm 40, an arm support 50, a lifting unit 60, and a control unit 70. Furthermore, in the first embodiment of the substrate transport robot 100, the upper arm 30 and the arm support 50 support the hand 11, and the lower arm 40 and the arm support 50 support the hand 12. That is, the upper arm 30, lower arm 40, and arm support 50 are examples of support units. Moreover, the upper arm 30 is an example of a horizontal movement unit and a robotic arm unit. The lower arm 40 is also an example of a horizontal movement unit and a robotic arm unit. Furthermore, the lifting unit 60 is an example of a lifting movement unit.

[0013] Hands 11 and 12 each hold one substrate 101. Hands 11 and 12 have a double-forked shape with two front ends. Hands 11 and 12 are active type substrate holding hands, for example, that fix and hold the substrate 101 by means of an edge grip holding the periphery of the substrate 101. Hands 11 and 12 have a holding mechanism that abuts against the substrate 101 by moving in a direction from the base end toward the front end. The holding mechanism has, for example, a cylinder as a drive source. Furthermore, the base end of each of hands 11 and 12 may also be provided with a hand rotating part that allows each of hands 11 and 12 to rotate about a horizontal axis of rotation.

[0014] The upper arm 30 is a horizontally multi-jointed robotic arm that moves the hand 11 horizontally. The lower arm 40 is a horizontally multi-jointed robotic arm that is separately provided from the upper arm 30 and moves the hand 12 horizontally. The upper arm 30 and the lower arm 40 operate independently of each other. The hand 11 is disposed at the front end of the upper arm 30. The hand 11 rotates horizontally relative to the upper arm 30. Furthermore, the hand 12 is disposed at the front end of the lower arm 40. The hand 12 rotates horizontally relative to the lower arm 40. The upper arm 30 is connected to the upper Z1 side of the arm support 50. The lower arm 40 is connected to the lower Z2 side of the arm support 50. In addition, as shown in FIG2, the upper arm 30 and the lower arm 40 each have a drive unit 30a and a drive unit 40a that rotate each of the plurality of joints. Each of the drive unit 30a and the drive unit 40a includes, for example, a servo motor. Furthermore, each of the drive units 30a and 40a has a transmission mechanism such as a timing belt or gears for transmitting the driving force of the motor. Furthermore, each of the drive units 30a and 40a includes an encoder and a reducer. The drive unit 30a is disposed in at least one of, for example, the interior of the housing of the upper arm 30 and the interior of the housing of the arm support 50. Additionally, the drive unit 40a is disposed in at least one of, for example, the interior of the housing of the lower arm 40 and the interior of the housing of the arm support 50.

[0015] As shown in Figure 3, the upper arm 30 includes a link member 31 and a link member 32 that rotate relative to each other along an XY plane belonging to a horizontal plane. The lower arm 40 also includes a link member 41 and a link member 42 that rotate relative to each other along an XY plane belonging to a horizontal plane. The link members 31 and 32 of the upper arm 30 and the link members 41 and 42 of the lower arm 40 are arm members of a robotic arm arranged in a horizontally extending manner. In the upper arm 30, the link member 31 is disposed at the base end side, and the link member 32 is disposed at the front end side. The link members 31 and 32 are connected to each other by rotation via joints. In the lower arm 40, the link member 41 is disposed at the base end side, and the link member 42 is disposed at the front end side. The link members 41 and 42 are connected to each other by rotation via joints. The link members 31 and 41 have the same shape. Linkage member 32 and link member 42 have the same shape.

[0016] The upper arm 30 and the lower arm 40 rotate individually relative to the arm support 50 along a horizontal plane belonging to the XY plane. The upper arm 30 and the lower arm 40 rotate relative to the arm support 50 about a common axis of rotation A1 shown in FIG3. The axis of rotation A1 is arranged to extend along the Z direction belonging to the vertical direction. Specifically, in the upper arm 30, the connecting member 31 is connected to the surface of the arm support 50 on the upper Z1 direction side via a first joint on the lower Z2 direction side belonging to the base end side, rotating about the axis of rotation A1. The connecting member 32 is connected to the surface of the connecting member 31 on the upper Z1 direction side of the front end side via a second joint on the lower Z2 direction side belonging to the base end side, rotating about the axis of rotation A12. Furthermore, the hand 11 is connected to the upper Z1 direction side of the front end side of the connecting member 32 via a third joint on the upper Z1 direction side of the front end side, rotating about the axis of rotation A13. Similarly, in the lower arm 40, the link member 41 is connected to the surface of the arm support 50 in the lower Z2 direction via a first joint, rotating about a rotation axis A1 in the Z1 direction above the base end side. The link member 42 is connected to the surface of the link member 41 in the lower Z2 direction via a second joint, rotating about a rotation axis A22 in the Z1 direction above the base end side. Furthermore, the hand 12 is connected to the surface of the link member 42 in the lower Z2 direction via a third joint, rotating about a rotation axis A23.

[0017] In the upper arm 30 and the lower arm 40, the rotation axes A1, A12, A13, A22, and A23 are parallel to each other, and a plurality of joints are arranged in a Z-direction perpendicular to the horizontal plane. The drive unit 30a is arranged according to each joint of the rotation axes A1, A12, and A13 of the upper arm 30. Similarly, the drive unit 40a is arranged according to each joint of the rotation axes A1, A22, and A23 of the lower arm 40.

[0018] As shown in Figure 1, the lifting unit 60 causes the hands 11 and 12 to move up and down in the Z direction by moving the arm support 50 up and down. The lifting unit 60 causes the arm support 50 to slide linearly in the Z direction. Furthermore, "sliding movement" as referred to here means linear movement of the arm support 50 along the housing 61 of a linearly extending columnar member, rather than linear movement of the arm support 50 by the movement of mutually rotating linkage members. That is, sliding movement means linear movement along the housing 61 of the lifting unit 60, which is a linearly arranged member. Specifically, in the lifting unit 60, the upper arm 30 and the lower arm 40 are connected via the arm support 50. The lifting unit 60 causes the upper arm 30, to which the hand 11 is connected, and the lower arm 40, to which the hand 12 is connected, to move up and down in a linked manner by moving the arm support 50 up and down. The lifting unit 60 has a cylindrical housing 61 extending along the Z direction, which belongs to the vertical direction. The lifting unit 60 causes the arm support 50 to move vertically along the housing 61. Furthermore, as shown in FIG2, the lifting unit 60 includes a drive unit 60a. The drive unit 60a includes, for example, a servo motor as a drive source. Furthermore, the drive unit 60a has, for example, a ball screw mechanism and a linear guide. The lifting unit 60 has the arm support 50 connected to its side on the X1 side, and the arm support 50 is moved vertically along the Z direction by the driving force of the drive unit 60a.

[0019] The control unit 70 is a robot controller that controls the actions of each part of the control board transport robot 100. The control unit 70 includes a computing device such as a CPU (Central Processing Unit). Furthermore, the control unit 70 includes memory devices such as RAM (Random Access Memory) and ROM (Read Only Memory) and hard disks. The control unit 70 executes control processing based on the computing device according to the programs and parameters stored in the memory devices. Specifically, the control unit 70 controls the operation of the holding mechanisms of each of the hands 11 and 12. In addition, the control unit 70 controls the operation of the drive unit 30a of the upper arm 30 and the drive unit 40a of the lower arm 40, as well as the operation of the drive unit 60a of the lifting unit 60. For example, the control unit 70 includes a main CPU for controlling the overall movement of the board-carrying robot 100 and a servo CPU for controlling the power supplied to the servo motors of each of the drive units 30a, 40a, and 60a. As shown in FIG1, the control unit 70 is individually configured with, for example, hands 11 and 12, upper arm 30, lower arm 40, and lifting unit 60, and is connected to the housing 61 of the lifting unit 60 via a cable member. The control unit 70 outputs signals to control the movement of each unit via the cable member connected to the lifting unit 60.

[0020] The control unit 70 executes the transfer operation of the substrate 101 according to the control quantity set in advance. The control unit 70 performs a transfer operation by holding the substrate 101, which has been supplied to the supply position of the substrate processing system 102, with the hand 11 or the hand 12, to transfer it from the supply position to the substrate mounting section 104. Furthermore, the control unit 70 performs a transfer operation by holding the substrate 101 mounted on the substrate mounting section 104 of the processing device 103 with the hand 11 or the hand 12, to a removal position for removing the substrate 101 from the substrate mounting section 104. In addition, the supply position and the removal position can be equal to each other or different from each other. Furthermore, the control unit 70 causes the hand 11 or hand 12 to hold the substrate 101 placed on one of the plurality of substrate placement sections 104 of the processing device 103, and performs a transport operation to move the held substrate 101 to the same substrate placement section 104 or another substrate placement section 104 different from the one on the substrate placement section 104. For example, the control unit 70 uses the hand 11 to hold the substrate 101 placed on one substrate placement section 104 of the processing device 103. The control unit 70 uses the operation of the upper arm 30 and the lifting part 60 to cause the hand 11, which is holding the substrate 101, to place the substrate 101 to another substrate placement section 104 different from the one on the substrate placement section 104 of the processing device 103 that holds the substrate 101, or to the same substrate placement section 104.

[0021] The control unit 70 controls the actions of moving the substrate 101 by hand 11 and by hand 12. The actions of holding the substrate 101 by hand 11 and moving it and the actions of moving the substrate 101 by hand 12 can be performed independently and in separate timing, or the moving actions of one of the hands 11 and 12 can be performed simultaneously in coordination with the moving actions of the other. For example, after each of the hands 11 and 12 has held the substrate 101, the control unit 70 sequentially performs the actions of placing the substrate 101 held by hand 11 onto the substrate mounting section 104 and the actions of placing the substrate 101 held by hand 12 onto the substrate mounting section 104. For example, in the processing apparatus 103 which belongs to the polishing apparatus, the control unit 70 holds the substrate 101 before processing by hand 11 and holds the substrate 101 after processing by hand 12. The processing in the processing apparatus 103 referred to herein can be a polishing process of the substrate 101 or a cleaning process of the polished substrate 101. Furthermore, it is also possible to hold the substrate 101 before processing with hand 12 and to hold the substrate 101 after processing with hand 11. The polishing apparatus for polishing the substrate 101 applies a liquid such as a polishing agent for the substrate 101 or a cleaning solution for cleaning the substrate 101 to the substrate 101. By using hand 11 and hand 12 separately according to the methods corresponding to before and after processing, it is possible to prevent foreign matter from adhering to the substrate 101 before polishing or to the substrate 101 after cleaning.

[0022] (Details of the lifting unit and sealing member) As shown in FIG1, the housing 61 of the lifting unit 60 has a groove-shaped opening 61a. An arm support 50 is disposed in the opening 61a, which moves up and down by sliding linearly through the lifting unit 60. That is, the arm support 50 is connected to a drive unit 60a disposed inside the lifting unit 60 via the opening 61a. The opening 61a is disposed on the X1 side of the housing 61 of the lifting unit 60 in a Z direction belonging to the vertical direction. Furthermore, the substrate transport robot 100 of the first embodiment has a strip-shaped sealing member 80 disposed in a manner that extends along the groove-shaped opening 61a. The sealing member 80 seals the groove-shaped opening 61a of the housing 61. The sealing member 80 can be formed by sheet-shaped resin or sheet-shaped metal.

[0023] In detail, as shown in FIG3, inside the housing 61 of the lifting unit 60, the ball screw mechanism of the drive unit 60a is arranged to extend in the Z direction, which belongs to the vertical direction. The servo motor of the drive unit 60a is arranged, for example, on the upper Z1 side of the ball screw mechanism. Furthermore, the engagement portion 51 of the arm support portion 50 is arranged to be engaged with the ball screw mechanism of the drive unit 60a. The lifting unit 60 moves the arm support portion 50, which moves integrally with the engagement portion 51, in the Z direction by moving the engagement portion 51 of the ball screw mechanism engaged with the drive unit 60a vertically. The arm support portion 50 is arranged inside the housing 61 with the engagement portion 51 engaged with the drive unit 60a and extends from the engagement portion 51 to the outside of the housing 61 in the X1 direction through the opening 61a arranged on the X1 side of the housing 61. The opening 61a is configured to match the range of motion of the lifting and lowering movement of the arm support 50. The opening 61a is configured on the housing 61 in a manner that spans from the lower end to the upper end. Furthermore, in this specification, the upper and lower ends of the housing are described as a broader concept that includes not only the upper and lower ends themselves, but also the surrounding areas near the upper and lower ends.

[0024] A strip-shaped sealing member 80 is disposed at the opening 61a of the housing 61, extending in the Z direction which belongs to the vertical direction. The sealing member 80 is disposed with one side facing the inside of the housing 61 and the other side facing the outside of the housing 61. That is, the sealing member 80 is a flat member disposed at the opening 61a with one side facing the other side in the X direction. Furthermore, the strip-shaped sealing member 80 is disposed along the opening 61a with the Z direction which belongs to the vertical direction as its long side and the Y direction which belongs to the horizontal direction as its short side. In addition, the strip-shaped sealing member 80 is disposed in a ring shape inside the housing 61. Specifically, the strip-shaped sealing member 80 is disposed at the opening 61a on the X1 side which belongs to the front side of the housing 61, in the Z direction which belongs to the vertical direction, and is disposed at the upper and lower parts of the housing 61, extending back and forth in the X direction. Furthermore, the sealing member 80 is arranged on the X2 side of the rear side of the housing 61, extending in the Z direction, which is the vertical direction. In the first embodiment, the strip-shaped sealing member 80 is connected to the arm support portion 50. One end of the strip-shaped sealing member 80, which is arranged in an annular shape, is connected to the connecting portion 52a above the arm support portion 50, while the other end is connected to the connecting portion 52b below the arm support portion 50. The connecting portions 52a and 52b are arranged in the X direction on the arm support portion 50 at a position overlapping with the opening 61a.

[0025] In detail, the sealing member 80 is wound around four pulleys 81a, 81b, 81c, and 81d disposed inside the housing 61 and rotating about the Y-direction as the axis of rotation. Specifically, the sealing member 80 is disposed upward from the connecting portion 52a above the arm support portion 50 along the opening 61a, and is wound around the pulley 81a at its upper end inside the housing 61 and guided rearward. Furthermore, the sealing member 80 extends towards the rearward X2 side by crossing the pulley 81a to the pulley 81b disposed at the rear of the upper part of the housing 61, and is guided towards the downward Z2 side of the housing 61 from the rearward X2 side by being wound around the pulley 81b. Furthermore, the sealing member 80 extends to the lower end of the housing 61 and is guided towards the front of the housing 61 by being wound around the pulley 81c. It is also wound around the pulley 81d located at the front of the lower end of the housing 61, and is configured to extend along the opening 61a on the front side of the housing 61 to the connecting portion 52b of the arm support 50. Therefore, the strip-shaped sealing member 80 moves integrally with the arm support 50 in the vertical direction, linked to its sliding movement. When the arm support 50 moves vertically by the action of the drive portion 60a of the lifting portion 60, the pulleys 81a, 81b, 81c, and 81d rotate, causing the sealing member 80 to follow the movement of the arm support 50 and move vertically along the long side of the opening 61a.

[0026] Furthermore, as shown in FIG1, the substrate transport robot 100 of the first embodiment has a facing portion 62 at the periphery of the opening 61a of the housing 61. The facing portion 62 is disposed at the periphery of the sealing member 80 in the short side direction, one in each of the left and right directions, opposite to the sealing member 80 disposed in the vertical direction of the opening 61a. As shown in FIG4, the facing portion 62 is arranged such that the periphery of the opening 61a and the sealing member 80 face each other in a labyrinth structure. The facing portion 62 is disposed at the periphery of the opening 61a and faces the sealing member 80 in a labyrinth structure. Specifically, the facing portion 62 is disposed at the periphery of the opening 61a and is disposed at both ends of the strip-shaped sealing member 80 in the short side direction, i.e., the Y direction, by clamping the two ends of the sealing member 80 in a facing manner, and is thus arranged in a labyrinth structure to face the sealing member 80. The opposing portion 62 has a bent member 63 disposed inside the housing 61 at the periphery of the opening 61a. The bent member 63 is a bent plate-shaped member disposed at the periphery of the opening 61a of the housing 61. The bent member 63 is formed, for example, from a metal sheet member. The opposing portion 62 clamps the strip-shaped sealing member 80 from both the surface and back sides of the sealing member 80 by the bent member 63 and the periphery of the opening 61a, and is disposed in the sealing member 80 in a labyrinthine manner. That is, in the first embodiment, the opposing portion 62 that clamps the sealing member 80 from both sides in the X direction is formed by the bent member 63 and the periphery of the opening 61a of the housing 61. The opposing portion 62 is disposed from the lower end to the upper end of the periphery of the opening 61a in the left-right direction, facing the end of the sealing member 80. Furthermore, the opposing portion 62 is not disposed on the periphery of the opening 61a in the Z direction (vertical direction). That is, a pair of curved members 63 extending in the vertical direction are disposed on each of the left and right Y directions of the opening 61a.

[0027] As shown in FIG. 5, the bending member 63 has portions 63a, 63b, and 63c. Portion 63a is disposed inside the housing 61 along the surface of the housing 61. Portion 63a is disposed in the Y direction, which is the left-right direction, on the outside of the opening 61a of the housing 61, closer to the sealing member 80. Furthermore, portion 63a is locked to the periphery of the opening 61a of the housing 61 by a locking member 64. The locking member 64 includes screws or nuts, etc., and is disposed at the periphery of the opening 61a in a vertical direction. Portion 63b is disposed such that it bends from portion 63a toward the X2 side, which is the inner side of the housing 61, and extends in a direction separating from the surface of the housing 61. That is, while portion 63a is disposed along the YZ plane along the surface of the housing 61, portion 63b is bent along the XZ plane, rising vertically from the periphery of the opening 61a toward the inner side of the housing 61. Furthermore, portion 63b is arranged to extend to the X2 side of the sealing member 80, which is the back side, and portion 63c is arranged to extend from portion 63b and cover the sealing member 80. Portion 63c is arranged parallel to portion 63a along the YZ plane. That is, portion 63c is arranged along the YZ plane opposite to the back side of the sealing member 80. In addition, portions 63a, 63b, and 63c are each examples of a locking portion, a separating portion, and a covering portion.

[0028] The opposing portion 62 clamps the strip-shaped sealing member 80 from both sides by the periphery of the opening 61a and the portion 63c of the curved member 63, and is arranged in a labyrinthine configuration on the sealing member 80. The portion 63c of the curved member 63 is arranged to extend from the upper end to the lower end in the vertical direction of the opening 61a. Furthermore, the labyrinthine configuration formed by the opposing portion 62 includes at least a U-shaped path portion in which the entry path of liquid from the outside is bent twice. The size of the short side of the sealing member 80 is larger than the size of the opening 61a of the housing 61 in the horizontal direction. Moreover, the sealing member 80 is disposed inside the housing 61. As shown by the arrow in FIG5, in the labyrinthine configuration formed by the opposing portion 62, liquid from outside the housing 61 first enters along the YZ plane between the surface of the sealing member 80 and the periphery of the opening 61a. Furthermore, the liquid from the outside, at the left and right ends of the sealing member 80, is guided towards the X2 side by the portion 63b of the bending member 63, thus wrapping around to the back of the sealing member 80. Furthermore, the liquid from the outside is guided along the YZ plane between the portion 63c of the bending member 63 and the back of the sealing member 80. Therefore, the liquid from the outside of the housing 61 undergoes fewer than two bends in its entry path until it reaches the interior of the housing 61. Thus, by means of the labyrinth structure formed by the opposing portions 62, the liquid from the outside is difficult to enter the interior of the housing 61. Particles generated inside the housing 61 are also difficult to leak to the outside due to the labyrinth structure formed by the opposing portions 62. In addition, the liquid from the outside, guided by the labyrinth structure formed by the opposing portions 62, moves downwards towards the housing 61 due to gravity and is discharged to the outside through the drain hole 61b located at the lower part of the housing 61, as shown in FIG. 3. Drainage hole 61b is an example of a "hole".

[0029] [Effects of the First Embodiment] As described above, the substrate transport robot 100 has a strip-shaped sealing member 80 that closes a groove-shaped opening 61a, and a facing portion 62 that faces the periphery of the opening 61a and the sealing member 80 in a labyrinthine configuration. Here, since the facing portion 62 forms a labyrinthine configuration by the periphery of the opening 61a and the sealing member 80 that closes the opening 61a, foreign objects can be prevented from entering and leaking through the gap between the sealing member 80 and the periphery of the opening 61a. As a result, during linear sliding movement of the substrate 101 during transport, the entry and leakage of foreign objects from the opening 61a of the housing 61 can be prevented.

[0030] The opposing portions 62 are disposed at the periphery of the opening 61a, and are arranged opposite to the sealing member 80 in a labyrinthine configuration at both ends of the strip-shaped sealing member 80 in the short side direction. Therefore, when the strip-shaped sealing member 80 is arranged extending along the groove-shaped opening 61a, the opposing portions 62 are disposed on both sides of the strip-shaped sealing member 80 in the short side direction, thus a labyrinthine configuration can be appropriately formed along the groove-shaped opening 61a. Therefore, by adequately sealing the groove-shaped opening 61a, the entry and leakage of foreign matter from the opening 61a of the housing 61 can be suppressed.

[0031] The opposing portions 62 are arranged in a labyrinthine manner on the sealing member 80 by clamping the two ends of the sealing member 80 in the short side direction in an opposing manner. Here, since the labyrinthine structure is formed by the opposing portions 62 clamping the two ends of the strip-shaped sealing member 80 in the short side direction, it is possible to prevent foreign objects from entering and leaking through the gap between the sealing member 80 and the opening 61a of the housing 61. Therefore, it is even more effective to prevent the entry and leakage of foreign objects from the opening 61a of the housing 61.

[0032] The opposing portion 62 includes a bent plate-shaped member 63 disposed on the periphery of the opening 61a of the housing 61. The bent member 63 and the periphery of the opening 61a clamp the strip-shaped sealing member 80 from both the surface and back sides of the sealing member 80, thus being disposed in a labyrinthine configuration on the sealing member 80. In this way, by combining the bent member 63 with the periphery of the opening 61a of the housing 61, the strip-shaped sealing member 80 can be easily clamped from both sides. Therefore, since a labyrinthine configuration that appropriately seals the opening 61a of the housing 61 can be easily formed, it is easier to suppress the entry and leakage of foreign matter from the opening 61a of the housing 61.

[0033] The bending member 63 has a locking portion 63a that runs along the surface of the housing 61 and is locked to the periphery of the opening 61a by means of the locking member 64, a separating portion 63b that extends in a direction separate from the surface of the housing 61, and a covering portion 63c that extends from the portion 63b and covers the sealing member 80. The opposing portion 62 clamps the strip-shaped sealing member 80 from both sides by the periphery of the opening 61a and the portion 63c of the bending member 63, and is arranged on the sealing member 80 in a labyrinthine manner. In this way, since the bending member 63 has a portion 63a for locking to the periphery of the opening 61a, it is easier to arrange the bending member 63 on the periphery of the opening 61a. Furthermore, since the bending member 63 has a portion 63b that separates from the surface of the housing 61 and a portion 63c that covers the sealing member 80, the strip-shaped sealing member 80 can be more easily clamped from both sides by the portion 63c covering the sealing member 80 and the periphery of the opening 61a simply by locking the portion 63a onto the periphery of the opening 61a. Therefore, by simply locking the locking member 64, the sealing member 80 can be clamped from both sides more easily to form a labyrinth structure, thus making it easier to suppress the entry and leakage of foreign objects from the opening 61a of the housing 61.

[0034] The opposing portion 62 has a labyrinth structure that includes at least a U-shaped path portion forming a path for the inlet of liquid from the outside to bend twice. Because the labyrinth structure formed by the opposing portion 62 includes a U-shaped path portion forming a path for the inlet of liquid from the outside to bend twice, the gap between the liquid inlet sealing member 80 and the periphery of the opening 61a can be more reliably suppressed. Therefore, the entry and leakage of foreign matter from the opening 61a of the housing 61 can be further suppressed.

[0035] The substrate transport robot 100 includes an upper arm 30 and a lower arm 40 as support units, and a lifting unit 60 as a lifting and moving unit that moves the arm support unit 50 up and down. The opposing portion 62 is arranged in a labyrinthine configuration facing the sealing member 80 at the periphery of the openings 61a of the upper arm 30, lower arm 40, and arm support unit 50, which move up and down via the lifting unit 60. This allows the sealing member 80 to more appropriately close the openings 61a of the housing 61 of the lifting unit 60 when the upper arm 30, lower arm 40, and arm support unit 50 move up and down by sliding movement. Therefore, the entry and leakage of foreign objects from the openings 61a of the housing 61 can be suppressed when the upper arm 30, lower arm 40, and arm support unit 50 move up and down. As a result, the lifting movement of the lifting part 60 can expand the area that the hands 11 and 12 can reach in the vertical direction, and the housing 61 of the lifting part 60, which slides to perform the lifting action, can effectively suppress the entry and leakage of foreign objects.

[0036] The substrate transport robot 100 includes an upper arm 30 and a lower arm 40, which are horizontal moving parts for moving hands 11 and 12 in the horizontal direction. The opposing part 62 is arranged in a labyrinthine configuration around the periphery of the opening 61a of the upper arm 30 and lower arm 40, which move vertically by means of the lifting part 60. This allows the upper arm 30 and lower arm 40, which move hands 11 and 12 in the horizontal direction, to slide and move vertically, thus preventing the entry and leakage of foreign objects from the opening 61a of the housing 61. As a result, the upper arm 30 and lower arm 40 can expand the range of motion of hands 11 and 12 in the horizontal direction, and can effectively prevent the entry and leakage of foreign objects from the opening 61a of the housing 61.

[0037] The substrate transport robot 100 includes: an upper arm 30 having a plurality of linkage members 31 and 32 that rotate relative to each other along a horizontal plane, serving as a horizontally articulated robotic arm; and a lower arm 40 having a plurality of linkage members 41 and 42 that rotate relative to each other along a horizontal plane, serving as a horizontally articulated robotic arm. A facing portion 62 is configured in a labyrinthine manner to face the sealing member 80 at the periphery of the opening 61a of the horizontally articulated upper arm 30 and lower arm 40. This allows the entry and leakage of foreign objects from the opening 61a of the housing 61 to be suppressed when the hands 11 and 12 move along a horizontal plane using the horizontally articulated upper arm 30 and lower arm 40. As a result, the horizontally articulated upper arm 30 and lower arm 40 can further expand the range of motion of the hands 11 and 12 in the horizontal direction, and can more effectively suppress the entry and leakage of foreign objects from the opening 61a of the housing 61.

[0038] The upper arm 30, lower arm 40, and arm support 50, which serve as support members, individually support the first hand 11 and the second hand 12 of the substrate 101. The opposing portion 62 is located around the periphery of the opening 61a of the upper arm 30, lower arm 40, and arm support 50, which support the hands 11 and 12, and is arranged in a labyrinthine manner to face the sealing member 80. In this way, in the substrate transport robot 100, when the two hands 11 and 12 are supported by the upper arm 30, lower arm 40, and arm support 50, the opening 61a can be appropriately closed by the sealing member 80 due to the labyrinthine structure. Therefore, when the substrate transport robot 100 uses two hands 11 and 12 to transport the substrate 101, it can also suppress the entry and leakage of foreign objects from the opening 61a of the housing 61. Thus, the operation efficiency of the substrate transport operation can be improved by using hands 11 and 12, and the housing 61 of the lifting part 60 used to slide the hands 11 and 12 can effectively suppress the entry and leakage of foreign objects.

[0039] The strip-shaped sealing member 80 is connected to the arm support 50, which serves as a support portion, among the upper arm 30, lower arm 40, and arm support 50. It moves integrally with the upper arm 30, lower arm 40, and arm support 50 as they slide. Therefore, when the upper arm 30, lower arm 40, and arm support 50 of the supporting hand 11 and hand 12 slide, the strip-shaped sealing member 80 also moves in conjunction with this sliding movement, thus suppressing the formation of gaps in the opening 61a due to sliding movement. As a result, the entry and leakage of foreign matter from the opening 61a of the housing 61 can be further suppressed.

[0040] The opposing portion 62 is located around the periphery of the opening 61a of the upper arm 30, lower arm 40, and arm support portion 50, which are provided in the polishing apparatus for polishing the substrate 101. It is arranged in a labyrinth structure to face the sealing member 80. Here, in the polishing apparatus, liquids such as polishing agents for the substrate 101 or cleaning solutions for cleaning the substrate 101 may adhere to the substrate 101. Therefore, the substrate transport robot 100, which transports the substrate 101 in the polishing apparatus, can effectively prevent liquids adhering to the substrate 101 from entering the interior of the housing 61 by sealing the opening 61a of the housing 61 with the sealing member 80. Furthermore, the substrate transport robot 100 that transports the substrate 101 in the grinding apparatus has its opposing portion 62 configured with a labyrinth structure to face the sealing member 80, which more effectively prevents liquid adhering to the substrate 101 from entering the interior through the opening 61a of the housing 61. As a result, it is more effective to prevent abnormal operation of the lifting portion 60 caused by liquids such as the agent used to grind the substrate 101 or the cleaning solution used to clean the substrate 101.

[0041] The housing 61 has a drain hole 61b that serves as a hole for draining liquid from the outside, which is guided by the labyrinth structure formed by the opposing portions 62. In this way, by means of the labyrinth structure formed by the opposing portions 62, the entry of liquid from the opening 61a of the housing 61 can be suppressed, and the liquid can be properly drained to the outside from the drain hole 61b.

[0042] [Second Embodiment] The substrate transport robot 200 configured according to the second embodiment will be described with reference to FIGS. 6 and 7. In the second embodiment, a maze structure is formed in the lifting section 60 by means of the opposing section 62, and a maze structure is formed in the horizontal sliding section 290 by means of the opposing section 292. In addition, parts with the same configuration as those in the first embodiment described above are illustrated with the same reference numerals and their descriptions are omitted.

[0043] As shown in FIG6, the substrate transport robot 200 configured according to the second embodiment includes a hand 11, a hand support 220, a sliding movement part 290, a lifting support part 250, a lifting part 60, a sealing member 80, and a sealing member 280. Furthermore, in the substrate transport robot 200 configured according to the second embodiment, the hand 11 is supported by the hand support 220, the sliding movement part 290, and the lifting support part 250, and the hand support 220, the sliding movement part 290, and the lifting support part 250 are moved integrally in the vertical direction by the lifting part 60. Moreover, the hand support 220 supporting the hand 11 is moved by the sliding movement part 290. Therefore, in the second embodiment, an example is formed where the hand support 220, the lifting support part 250, and the sliding movement part 290 are combined to form a support part, and an example is formed where only the hand support 220 constitutes a support part. Furthermore, the sliding moving part 290 is an example of a horizontal moving part, and also an example of a horizontal sliding moving part.

[0044] In the second embodiment, the lifting support 250 moves up and down via the lifting section 60. The lifting support 250, like the arm support 50 in the first embodiment, is disposed in the opening 61a of the housing 61 of the lifting section 60. The opening 61a, like in the first embodiment, is closed by the sealing member 80. In the lifting section 60, similarly to the first embodiment, the opposing portions 62 disposed on the periphery of the opening 61a are arranged to face the sealing member 80 in a labyrinthine configuration. The configuration of the lifting support 250 relative to the lifting section 60 is the same as that of the arm support 50 in the first embodiment. Furthermore, the labyrinthine configuration formed by the opposing portions 62 in the lifting section 60 is also the same as in the first embodiment.

[0045] The sliding movement part 290 causes the hand 11 to slide horizontally by sliding the hand support part 220 of the support hand 11 horizontally. The sliding movement part 290 has a drive unit such as a servo motor driven by the control unit 70, and for example, the hand 11 slides linearly by means of a ball screw mechanism or a belt and pulley mechanism. Furthermore, the sliding movement part 290 is disposed on the upper surface of the lifting support part 250, which moves up and down by the lifting part 60. That is, the sliding movement part 290 moves up and down by the lifting part 60. In addition, the sliding movement part 290 rotates about the rotation axis A201 in the horizontal plane relative to the lifting support part 250. The rotation axis A201 is along the Z direction, which belongs to the vertical direction, and is disposed in the central part of the lifting support part 250 in the Y direction, which belongs to the horizontal direction. The lifting support part 250 has a drive unit such as a servo motor for rotating the sliding movement part 290 in the horizontal plane. In the substrate transport robot 200, the substrate 101 held by the hand 11 is transported by the lifting movement of the lifting part 60, the rotational movement of the sliding part 290 relative to the lifting support part 250, and the sliding movement of the hand 11 of the sliding part 290.

[0046] The sliding part 290 has a box-shaped housing 291. The housing 291 has a groove-shaped opening 291a in which a hand support 220 is disposed. The opening 291a is disposed on the side of the housing 291 and is arranged to extend along the moving direction of the hand 11 of the sliding part 290. The hand support 220 is an L-shaped member that extends upward from the opening 291a and bends horizontally. In the second embodiment, a sealing member 280 is also disposed on the sliding part 290, separately from the lifting part 60. The sealing member 280, like the sealing member 80 relative to the lifting part 60, is a member that closes the groove-shaped opening 291a. In the example of the arrangement in FIG. 6, the sealing member 280 is arranged to extend in the X direction in the opening 291a. That is, the strip-shaped sealing member 280 is a flat member that is arranged in the opening 291a with the X direction as the long side direction and the Z direction as the short side direction, and with its two sides facing each other in the Y direction.

[0047] As shown in FIG. 7, in the sliding moving part 290, a counter-facing part 292 is arranged at the periphery of the opening 291a. Similar to the counter-facing part 62 in the first embodiment, the counter-facing part 292 is arranged to face the sealing member 280 in a labyrinthine configuration. Specifically, like the counter-facing part 62, the counter-facing part 292 clamps the sealing member 280 from both sides in the Y direction (short side direction) at both ends of the strip-shaped sealing member 280, together with the periphery of the opening 291a of the housing 291, in a counter-facing manner, and is arranged to face the sealing member 280 in a labyrinthine configuration. Furthermore, the counter-facing part 292, like the counter-facing part 62, has a bending member 293. The bending member 293, like the bending member 63 of the counter-facing part 62, is a bent plate-shaped member and is arranged at the periphery of the opening 291a of the housing 291. The opposing portions 292 and 62 are similarly arranged in a labyrinthine configuration, clamping the strip-shaped sealing member 280 from both sides by the bending member 293 and the periphery of the opening 291a. That is, in the second embodiment, both the sealing member 80 located at the opening 61a of the lifting portion 60 and the sealing member 280 located at the opening 291a of the sliding moving portion 290, which allows the hand 11 to slide along the horizontal plane, form a labyrinthine configuration. The labyrinthine configuration of the sealing member 280 formed by the opposing portions 292 is the same as the labyrinthine configuration of the sealing member 80 formed by the opposing portions 62 in the first embodiment. In other words, the sealing member 280 is arranged in a ring shape inside the housing 291 and moves integrally with the movement of the hand support portion 220. Furthermore, the other configurations of the second embodiment are the same as those of the first embodiment.

[0048] [Effects of the Second Embodiment] As described above, the second embodiment includes a sliding moving part 290, which is a horizontal sliding moving part that allows the hand 11 to slide horizontally. The opposing part 292 is arranged in a labyrinth configuration opposite to the sealing member 802 at the periphery of the opening 291a, where a hand support part 220, which is a support part that slides horizontally via the sliding moving part 290, is positioned. Therefore, since the sliding moving part 290, which allows the hand 11 to slide horizontally, also forms a labyrinth configuration at the opening 291a via the opposing part 292, the entry and leakage of foreign objects from the opening 291a can be effectively suppressed. Furthermore, other effects of the second embodiment are the same as those of the first embodiment.

[0049] [Modifications] Furthermore, it should be understood that all contents of the embodiments disclosed herein are illustrative and not intended to be limiting. The scope of the present invention is defined by the claims and not by the description of the embodiments described above, and includes all modifications (variations) within the same meaning and scope as the claims.

[0050] For example, in the first and second embodiments described above, although examples are shown where the opposing portions 62 and 292 are opposite to the sealing member 80 and 280 in a labyrinthine configuration at both ends of the short side direction of the sealing member 80 and 280, the present invention is not limited thereto. The present invention may also configure the opposing portions to be opposite to each other only in a labyrinthine configuration on one side of the short side direction of the sealing member.

[0051] Furthermore, although the first embodiment described above illustrates an example of an active type of substrate holding hand, in which the first hand 11 and the second hand 12 are fixed and held by an edge clamp, the present invention is not limited thereto. The present invention may also be an active type of hand other than an edge clamp, such as a vacuum method. Furthermore, the hand may be a passive type of hand that does not have a structure for fixing the substrate.

[0052] Furthermore, in the first embodiment described above, an example was shown where the opposing portions 62 clamp the sealing member 80 from both sides in an opposing manner, thus forming a labyrinth structure on the sealing member 80. In the second embodiment described above, an example was shown where the opposing portions 292 clamp the sealing member 280 from both sides in an opposing manner, thus forming a labyrinth structure on the sealing member 280. However, the present invention is not limited to this. The present invention can also be constructed such that opposing portions are arranged in a labyrinth structure only on one side of the sealing member. For example, the sealing member 380 constructed in the first modified example, as shown in FIG8, can be formed by bending the end of the sealing member 380 in the short side direction and forming a labyrinth structure by the opposing portions 362 facing the one side of the sealing member 380. Furthermore, instead of the end of the sealing member, a protrusion can be arranged at a position separated from the end in the short side direction, and the opposing portions can be arranged facing each other along the shape of the protrusion to form a labyrinth structure. Furthermore, a labyrinth structure can be formed by bending the end of the sealing member or by arranging protrusions at a position separated from the end, so as to clamp the sealing member from both sides.

[0053] Furthermore, in the first and second embodiments described above, examples are shown where the opposing portions 62 and 292 have plate-shaped bent members 63 and 293, respectively; however, the present invention is not limited thereto. The present invention may also be configured to integrally form the opposing portions with the periphery of the opening of the housing. Furthermore, it may be configured not to bend the plate-shaped members, but to form the opposing portions by casting or cutting. Furthermore, it may be configured to combine a plurality of members to form the opposing portions. Furthermore, it may be configured by bending the periphery of the opening of the housing and arranging a straight plate-shaped member, and clamping the sealing member between the bent periphery of the opening and the straight plate-shaped member to form opposing portions. Furthermore, it may be configured to form opposing portions by clamping the short-side end of the sealing member with members separately provided with the periphery of the opening of the housing. For example, the opposing portion 462 in the second modified example shown in Figure 9 can also be configured to clamp the sealing member 80 by means of a Y-shaped member 463. Furthermore, the opposing portion can also be disposed on the sealing member instead of on the opening of the housing.

[0054] Furthermore, although the first and second embodiments described above illustrate examples of mounting the opposing portions 62 and 292 on the periphery of the housing 61 and 291 by locking the bending members 63 and 293 of the opposing portions 62 and 292, the present invention is not limited thereto. The present invention can also be configured such that the opposing portions are mounted on the periphery of the opening of the housing by means of bonding, welding, or other methods.

[0055] Furthermore, although the first and second embodiments described above illustrate an example where the entry path of liquid from the outside in the labyrinth structure formed by the opposing portions 62 and 292 has a U-shaped path portion, the present invention is not limited thereto. The present invention can also be configured such that the entry path of liquid from the outside has a plurality of U-shaped path portions by bending the bending member of the opposing portions a plurality of times.

[0056] Furthermore, in the second embodiment described above, an example was shown in which a labyrinth structure is formed between the sealing member 80 disposed in the opening 61a of the housing 61 of the lifting part 60 and the sealing member 280 disposed in the opening 291a of the housing 291 of the sliding part 290. However, the present invention is not limited thereto. The present invention may also be configured such that a labyrinth structure is not formed for the sealing member disposed in the opening of the housing of the lifting part that moves the support part up and down. For example, it may also be configured such that a labyrinth structure is formed for the sealing member only in the opening of the housing of the horizontal sliding part that moves the support part of the support hand in the horizontal direction.

[0057] Furthermore, although the first embodiment described above illustrates an example of moving the hands 11 and 12 along a horizontal plane using the upper arm 30 and lower arm 40 of a horizontally multi-jointed robotic arm, the present invention is not limited thereto. The present invention may also be a substrate transport robot having only one robotic arm, or it may have three or more robotic arms. Furthermore, multiple robotic arms may be arranged together above or below the arm support.

[0058] Furthermore, although the second embodiment described above illustrates an example with a sliding moving part 290 that serves as a horizontal sliding moving part for moving a hand 11 in the horizontal direction, the present invention is not limited thereto. The present invention can also be configured with a plurality of sliding moving parts that allow the support portion of the supporting hand to slide linearly.

[0059] Furthermore, although the first and second embodiments described above illustrate examples where the sealing member 80 and sealing member 280 move integrally with the arm support 50, lifting support 250, and hand support 220, which serve as support portions, the present invention is not limited thereto. The present invention can also be configured to move without linking the movement of the sealing member with that of the support portion.

[0060] Furthermore, although the first and second embodiments described above illustrate examples of substrate transfer robot 100 and substrate transfer robot 200 being disposed within a processing apparatus 103 belonging to a polishing apparatus belonging to substrate 101, the present invention is not limited thereto. The present invention may also be configured to dispose of the substrate transfer robot within a processing apparatus performing processes other than polishing. Furthermore, it may also be configured to dispose of the substrate transfer robot within a transfer apparatus for transporting substrates rather than within a processing apparatus.

[0061] Furthermore, although the first embodiment described above illustrates an example where each of the first hand 11 and the second hand 12 holds a substrate 101, the present invention is not limited thereto. The present invention may also be configured such that at least one of the first hand and the second hand holds a plurality of substrates. Furthermore, the hand may be configured as one or more.

[0062] Furthermore, the above embodiment illustrates an example where the control unit 70 has a main CPU for controlling the entire substrate transport robot 100 and a servo CPU for controlling the power supplied to the servo motors; however, the present invention is not limited to this. The present invention can also be configured such that the control unit has a computing device such as a CPU. Furthermore, the control unit can be configured with different hardware to execute the actions of the hand holding mechanism, the drive units of the upper and lower arms, and the drive units of the lifting unit. It can also be configured to control any of the aforementioned units using a shared control unit.

[0063] The functions of the element elements disclosed in this specification can be executed using a general-purpose processor, special-purpose processor, integrated circuit, ASIC (Application Specific Integrated Circuits), conventional circuit, and / or a combination of the above elements that are configured or programmed to perform the disclosed functions. Since a processor includes transistors and other circuits, it can be considered a processing circuit or circuit. In this invention, a circuit, unit, or means is hardware that performs the listed functions, or hardware programmed to perform the listed functions. The hardware may be the hardware disclosed in this specification, or other known hardware configured or programmed to perform the listed functions. When the hardware is conceived as a processor of a circuit, the circuit, means, or unit is a combination of hardware and software, with the software used in the configuration of the hardware and / or processor.

[0064] [Style] Those skilled in the art to which this invention pertains will understand that the above-described embodiments are specific examples of the following styles.

[0065] (Example 1) A substrate transport robot comprising: a support portion, which is a support hand that holds a substrate; a housing having a groove-shaped opening, wherein the opening is disposed on the aforementioned support portion which slides linearly; a sealing member that closes the groove-shaped opening; and an opposing portion that makes the periphery of the aforementioned opening and the aforementioned sealing member face each other in a labyrinthine manner.

[0066] (State 2) The substrate transport robot as described in State 1, wherein the aforementioned opposing portion is disposed at the periphery of the aforementioned opening, and is disposed at both ends of the strip-shaped aforementioned sealing member in the short side direction in a manner having a labyrinth structure to be opposite to the aforementioned sealing member.

[0067] (State 3) The substrate transport robot as described in State 2, wherein the aforementioned opposing portion is clamped in such a way that its two ends are facing each other relative to the short side direction of the aforementioned sealing member, and is arranged in a labyrinthine manner on the aforementioned sealing member.

[0068] (State 4) The substrate transport robot as described in State 3, wherein the aforementioned opposing portion includes a bent plate-shaped bending member disposed on the periphery of the aforementioned opening portion of the aforementioned housing, wherein the aforementioned bending member and the periphery of the aforementioned opening portion clamp the strip-shaped aforementioned sealing member from both the surface and the back side of the aforementioned sealing member, and is disposed on the aforementioned sealing member in a labyrinthine manner.

[0069] (Sample 5) The substrate transport robot as described in Sample 4, wherein the aforementioned bending member has a locking portion along the surface of the aforementioned housing and locked to the periphery of the aforementioned opening by a locking member, a separating portion extending in a direction separate from the surface of the aforementioned housing, and a covering portion extending from the aforementioned separating portion and covering the aforementioned sealing member, wherein the aforementioned opposing portion clamps the strip-shaped aforementioned sealing member from both sides by the periphery of the aforementioned opening and the aforementioned covering portion of the aforementioned bending member, and is arranged on the aforementioned sealing member in a labyrinthine manner.

[0070] (State 6) A substrate transport robot as described in any one of States 1 to 5, wherein the aforementioned opposing portion has a maze structure comprising at least a U-shaped path portion that allows the entry path of liquid from the outside to bend twice.

[0071] (State 7) The substrate transport robot described in any one of States 1 to 6 further includes a lifting and moving part, which moves the aforementioned support part up and down. The aforementioned opposing part is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support part which is provided with the aforementioned lifting and moving part, and is positioned opposite to the aforementioned sealing member.

[0072] (State 8) The substrate transport robot as described in State 7, wherein the aforementioned support portion includes a horizontal moving portion that moves the aforementioned hand in the horizontal direction, and the aforementioned opposing portion is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support portion, which includes the aforementioned horizontal moving portion that moves up and down by the aforementioned lifting moving portion, and is opposite to the aforementioned sealing member.

[0073] (State 9) The substrate transport robot as described in State 8, wherein the aforementioned support portion includes a horizontally multi-jointed robotic arm portion having a plurality of linkage members that rotate relative to each other along a horizontal plane as the aforementioned horizontal moving portion, and the aforementioned opposing portion is located at the periphery of the aforementioned opening portion of the aforementioned support portion having the aforementioned horizontally multi-jointed robotic arm portion, and is configured to face the aforementioned sealing member in a labyrinthine manner.

[0074] (Sample 10) A substrate transport robot as described in any of Samples 1 to 9, wherein the aforementioned support portion supports the aforementioned hands, which include a first hand and a second hand that individually hold the aforementioned substrate, and the aforementioned opposing portion is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support portion, which is provided to support the aforementioned first hand and the aforementioned second hand, and is positioned opposite to the aforementioned sealing member.

[0075] (State 11) A substrate transport robot as described in any of the states 1 to 10, wherein the strip-shaped sealing member is connected to the support and moves integrally with the support in conjunction with the sliding movement of the support.

[0076] (State 12) The substrate transport robot described in any one of States 1 to 11, wherein the aforementioned opposing part is disposed in the periphery of the opening of the aforementioned support part of the aforementioned support part for holding the aforementioned substrate in the grinding device for grinding the aforementioned substrate, and is arranged to face the aforementioned sealing member in a labyrinth structure.

[0077] (State 13) The substrate transport robot described in any one of States 1 to 12 further includes a horizontal sliding movement part, which allows the aforementioned hand to slide and move in a horizontal direction. The aforementioned opposing part is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support part which is arranged to slide and move in a horizontal direction, and is positioned opposite to the aforementioned sealing member.

[0078] (State 14) A substrate transport robot as described in any one of States 1 to 13, wherein the aforementioned housing has a hole for discharging liquid from the outside guided by the labyrinth structure formed by the aforementioned opposing portions. [Simplified Explanation of the Diagram]

[0008] FIG1 is a schematic diagram showing the configuration of a substrate processing system equipped with a substrate transport robot according to the first embodiment of the present invention. FIG2 is a block diagram showing the configuration of the substrate transport robot. FIG3 is a schematic cross-sectional view of the substrate transport robot viewed from the side. FIG4 is a cross-sectional view along line IV-IV of FIG3. FIG5 is a cross-sectional view schematically showing the configuration of the opposing portions. FIG6 is a schematic diagram showing the configuration of a substrate transport robot according to the second embodiment. FIG7 is a cross-sectional view for explaining the configuration of the opposing portions and the sealing member in the sliding moving portion. FIG8 is a cross-sectional view showing an example of a sealing member and an opposing portion configured according to a first modification of the first and second embodiments of the present invention. FIG9 is a cross-sectional view showing an example of a sealing member and an opposing portion configured according to a second modification of the first and second embodiments of the present invention.

Claims

1. A substrate transport robot comprising: a support portion, which is a support hand for holding a substrate; a housing having a groove-shaped opening, wherein the opening is disposed with the aforementioned support portion capable of linear sliding; a strip-shaped sealing member for closing the groove-shaped opening; and an opposing portion, wherein the periphery of the aforementioned opening and the aforementioned sealing member are facing each other in a maze-like configuration, the aforementioned maze configuration including at least a U-shaped path portion formed by two bends in the entry path of external liquid.

2. A substrate transport robot comprising: a support portion, which is a support hand for holding a substrate; a housing having a groove-shaped opening, the opening having the aforementioned support portion capable of linear sliding; a strip-shaped sealing member for closing the groove-shaped opening; and an opposing portion having a periphery of the opening and the aforementioned sealing member facing each other in a labyrinthine configuration, the opposing portion comprising a bent plate-shaped curved member disposed on the periphery of the opening of the housing, wherein the curved member and the periphery of the opening clamp the strip-shaped sealing member from both the surface and back of the sealing member, and are disposed on the sealing member in a labyrinthine configuration, the curved member having: a locking portion along the surface of the housing and locked to the periphery of the opening by a locking member; a separating portion extending in a direction separate from the surface of the housing; and a covering portion extending from the separating portion and covering the aforementioned sealing member. The aforementioned opposing portion clamps the strip-shaped sealing member from both sides by the periphery of the aforementioned opening and the aforementioned covering portion of the aforementioned curved member, and is arranged in the aforementioned sealing member in a labyrinthine manner.

3. A substrate transport robot comprising: a support portion, which is a support hand for holding a substrate; a housing having a groove-shaped opening, wherein the opening is provided with the aforementioned support portion which can slide linearly; a strip-shaped sealing member for closing the groove-shaped opening; and opposing portions, wherein the periphery of the aforementioned opening and the aforementioned sealing member are facing each other in a labyrinth structure, the aforementioned housing having a hole for discharging liquid from the outside guided by the labyrinth structure formed by the aforementioned opposing portions.

4. The substrate transport robot as described in any one of claims 1 to 3 further includes a lifting and moving part that moves the aforementioned support part up and down, and the aforementioned opposing part is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support part which is provided by the aforementioned lifting and moving part to face the aforementioned sealing member.

5. The substrate transport robot as described in claim 4, wherein, The aforementioned support includes a horizontally moving part that moves the aforementioned hand in the horizontal direction. The aforementioned opposing part is located on the periphery of the aforementioned opening of the aforementioned support, which includes the aforementioned horizontally moving part that moves up and down by the aforementioned lifting moving part, and is arranged in a labyrinthine manner to face the aforementioned sealing member.

6. The substrate transport robot as described in claim 5, wherein, The aforementioned support includes a horizontally multi-jointed robotic arm with a plurality of linkage members that rotate relative to each other along the horizontal plane as the aforementioned horizontal moving part. The aforementioned opposing part is located at the periphery of the aforementioned opening of the aforementioned support, which is equipped with the aforementioned horizontally multi-jointed robotic arm, and is configured to face the aforementioned sealing member in a labyrinthine manner.

7. The substrate transport robot as described in any one of claims 1 to 3, wherein, The aforementioned support portion supports the aforementioned hands, including the first hand and the second hand that individually hold the aforementioned substrate. The aforementioned opposing portion is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support portion that supports the aforementioned first hand and the aforementioned second hand, and is positioned opposite the aforementioned sealing member.

8. The substrate transport robot as described in any one of claims 1 to 3, wherein, The aforementioned strip-shaped sealing member is connected to the aforementioned support portion and moves integrally with the aforementioned support portion in conjunction with the sliding movement of the aforementioned support portion.

9. The substrate transport robot as described in any one of claims 1 to 3, wherein, The aforementioned opposing portion is the periphery of the opening of the aforementioned support portion of the aforementioned support portion used to hold the aforementioned substrate in the grinding apparatus for grinding the aforementioned substrate, and is arranged in a labyrinth structure to face the aforementioned sealing member.

10. The substrate transport robot as described in any one of claims 1 to 3 further comprises a horizontal sliding movement part, which causes the aforementioned hand to slide and move in a horizontal direction, and the aforementioned opposing part is arranged in a labyrinth structure at the periphery of the aforementioned opening of the aforementioned support part which is disposed in a horizontal direction, and is facing the aforementioned sealing member.

Images