Double-layer antenna and optical phased array chip

Abstract

A dual-layer antenna structure for an optical phase array chip includes: a substrate; a bottom protective layer disposed on the substrate; a light guide layer disposed on the bottom protective layer; a grating layer disposed on the light guide layer and having a plurality of gratings, the gratings being periodically arranged at a spacing along a first axis of the light guide layer, and each grating being disposed along a second axis of the light guide layer; and a top protective layer disposed on the light guide layer and the gratings; wherein the refractive index of the grating layer is different from the refractive index of the light guide layer.

Description

Technical Field

[0001] This disclosure relates to an antenna structure, particularly an antenna structure used in optical phase array wafers. Prior Technology

[0002] Optical phase array chips typically used in LiDAR (LiDAR) systems comprise light-emitting units, complex phase-shifting units, antenna units, and receiving units. The light-emitting units generate emitted light signals. The complex phase-shifting units receive, phase-shift, and transmit the emitted light signals. The antenna units emit the emitted light signals. The complex phase-shifting units change the phase of the emitted light signals. Through the interference principle of wave optics, the emitted light signals are used to form light spots in the far field. The complex phase-shifting units can change the phase of the emitted light signals in different modes, thereby forming light spots at different far-field locations.

[0003] However, conventional antenna elements suffer significant energy loss when emitting light towards the target, with nearly half of the energy radiating back towards the target, resulting in low energy efficiency. Furthermore, some light energy is reflected by the substrate (usually a silicon substrate), causing destructive interference with the light from the target side and creating a blind zone in the far-field viewing angle. A well-designed antenna should have a wide Gaussian energy envelope in its far-field viewing angle. In addition, a longer propagation length (effective length) of light within the antenna is beneficial for the quality of the emitted beam; however, conventional antenna structures struggle to achieve millimeter-level precision.

[0004] In view of this, how to design an antenna element that can emit most of the energy toward the target side, whose energy envelope formed by its far-field view is close to a Gaussian distribution and increases the effective length of the antenna is one of the problems that urgently need to be solved. Summary of the Invention

[0005] This disclosure provides a dual-layer antenna structure that can emit most of the energy toward the target side, and the energy envelope formed by its far-field view is close to a Gaussian distribution and can increase the effective length of the antenna.

[0006] This disclosure provides a dual-layer antenna structure for an optical phase array chip, comprising: a substrate; a bottom protective layer disposed on the substrate; a light guide layer disposed on the bottom protective layer; a grating layer disposed on the light guide layer and having a plurality of gratings, the gratings being periodically arranged at a spacing along a first axis of the light guide layer, and each grating being disposed along a second axis of the light guide layer; and a top protective layer disposed on the light guide layer and the gratings; wherein the refractive index of the grating layer is different from the refractive index of the light guide layer.

[0007] In some embodiments, the grating layer is in direct contact with the light guide layer.

[0008] In some embodiments, the top protective layer is further disposed between the grating layer and the light guide layer.

[0009] In some embodiments, the width of each gate along the first axis is approximately equal to the spacing between the gates.

[0010] In some embodiments, the gates are arranged symmetrically along the first axis, and the length of each gate along the second axis is greater than or equal to the length of the light guide layer along the second axis.

[0011] In some embodiments, the dual-layer antenna structure further includes: a plurality of light guide blocks disposed adjacent to both sides of the light guide layer, the light guide blocks being periodically arranged at intervals along a first axis of the light guide layer, and each light guide block being disposed along a second axis of the light guide layer.

[0012] In some embodiments, the light guide blocks and the grating are staggered along the first axis; the light guide blocks are symmetrically arranged along the first axis.

[0013] In some embodiments, the spacing between the light guide blocks is approximately equal to the spacing between the gratings; the width of each light guide block along the first axis is approximately equal to the spacing between the light guide blocks.

[0014] In some embodiments, the light guide blocks are arranged symmetrically along the first axis, and the height of each light guide block along the third axis is approximately equal to the height of the light guide layer along the third axis, with the third axis perpendicular to the second axis and the first axis.

[0015] In some embodiments, the light guide layer further includes: a plurality of protruding structures protruding from the light guide layer, the protruding structures being periodically arranged at a spacing along a first axis of the light guide layer.

[0016] In some embodiments, the protruding structure and the gate body are staggered along the first axis.

[0017] In some embodiments, the spacing between the protruding structures is approximately equal to the spacing between the gate bodies; the width of each protruding structure along the first axis is approximately equal to the spacing between the protruding structures.

[0018] In some embodiments, the dual-layer antenna structure further includes: a plurality of light guide blocks disposed adjacent to both sides of the light guide layer, the light guide blocks being periodically arranged at intervals along a first axis of the light guide layer, and each light guide block being disposed along a second axis of the light guide layer.

[0019] In some embodiments, the protruding structure, light guide block, and grating are staggered along a first axis.

[0020] This disclosure provides a dual-layer antenna structure for an optical phase array chip, comprising: a substrate; a bottom protective layer disposed on the substrate; a light guide layer disposed on the bottom protective layer; a grating layer disposed on the light guide layer and having a plurality of gratings, each grating being disposed along a second axis of the light guide layer; and a top protective layer disposed on the light guide layer and the gratings; the light guide layer is disposed on the bottom protective layer via a first process, and the grating layer is formed via a second process.

[0021] In some embodiments, the grating layer is in direct contact with the light guide layer.

[0022] In some embodiments, the top protective layer is further disposed between the grating layer and the light guide layer.

[0023] In some embodiments, the dual-layer antenna structure further includes: a plurality of light guide blocks disposed adjacent to both sides of the light guide layer, the light guide blocks being periodically arranged at intervals along a first axis of the light guide layer, and each light guide block being disposed along a second axis of the light guide layer.

[0024] In some embodiments, the light guide layer further includes: a plurality of protruding structures protruding from the light guide layer, the protruding structures being periodically arranged at a spacing along a first axis of the light guide layer.

[0025] This disclosure provides an optical phase array chip, including: a light-emitting unit that generates an emitted light signal; a beam-splitting unit connected to the light-emitting unit that transmits the emitted light signal; a dual-layer antenna structure as described above, connected to the beam-splitting unit, that emits the emitted light signal; a light-sensing unit that receives a diffusely reflected light signal; and a processing unit connected to the light-sensing unit that generates sensing information based on the diffusely reflected light signal.

[0026] As described above, the disclosed dual-layer antenna structure comprises a substrate, a bottom protective layer, a light guide layer with protruding structures, a grating layer, a top protective layer, and multiple light guide blocks. This allows the dual-layer antenna structure to primarily emit light towards the target side; the light propagation distance along the first axis of the dual-layer antenna structure can be increased; the relative energy distribution of the dual-layer antenna structure between -90 degrees and 90 degrees is close to a Gaussian distribution; and the relative energy is highest at the angle directly facing the antenna. In contrast, conventional antenna elements emit approximately 50% energy towards the target side and approximately 50% towards the non-target side, resulting in significant energy loss. Furthermore, the energy envelope formed by conventional antenna elements at the far-field viewpoint differs significantly from the Gaussian distribution, and even shows relatively low energy at the angle directly facing the conventional antenna element. Moreover, when the light propagation distance along the axis of a conventional antenna element is less than 100 micrometers, the effective length of the conventional antenna element is short.

[0027] Furthermore, the optical phase array chip disclosed herein can use lower energy to detect at greater distances and improve detection accuracy. Simple Explanation of the Diagram

[0028] Details of one or more embodiments of the subject matter described herein are set forth in the following drawings and description. Other features, aspects, and advantages of the subject matter of this specification will become apparent from the description, drawings, and claims, wherein:

[0029] Figure 1A is a side view of the double-layer antenna structure of the first embodiment disclosed herein.

[0030] Figure 1B is a three-dimensional schematic diagram of the double-layer antenna structure of the first embodiment disclosed herein.

[0031] Figure 2 is a side view of a variation of the double-layer antenna structure of the first embodiment disclosed herein.

[0032] Figure 3A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the first embodiment disclosed herein.

[0033] Figure 3B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the first embodiment disclosed herein.

[0034] Figure 4A is a simulation of the energy distribution of the dual-layer antenna structure of the first embodiment disclosed herein from a far-field perspective.

[0035] Figure 4B is an energy distribution diagram at section AB of the far-field view simulation of the dual-layer antenna structure of the first embodiment disclosed herein.

[0036] Figure 5A is a top view schematic diagram of the double-layer antenna structure of the second embodiment disclosed herein.

[0037] Figure 5B is a three-dimensional schematic diagram of the double-layer antenna structure of the second embodiment disclosed herein.

[0038] Figure 6A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the second embodiment of this disclosure.

[0039] Figure 6B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the second embodiment of this disclosure.

[0040] Figure 7A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the second embodiment disclosed herein.

[0041] Figure 7B is an energy distribution diagram at section AB of the far-field view simulation of the dual-layer antenna structure of the second embodiment disclosed herein.

[0042] Figure 8A is a top view schematic diagram of the double-layer antenna structure of the third embodiment disclosed herein.

[0043] Figure 8B is a three-dimensional schematic diagram of the double-layer antenna structure of the third embodiment disclosed herein.

[0044] Figure 9A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the third embodiment of this disclosure.

[0045] Figure 9B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the third embodiment of this disclosure.

[0046] Figure 10A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the third embodiment of this disclosure.

[0047] Figure 10B is an energy distribution diagram at section AB of the far-field view simulation of the dual-layer antenna structure of the third embodiment of this disclosure.

[0048] Figure 11A is a top view schematic diagram of the double-layer antenna structure of the fourth embodiment of this disclosure.

[0049] Figure 11B is a three-dimensional schematic diagram of the double-layer antenna structure of the fourth embodiment of this disclosure.

[0050] Figure 12A is an energy distribution diagram from one perspective of the near-field simulation of the double-layer antenna structure of the fourth embodiment of this disclosure.

[0051] Figure 12B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure.

[0052] Figure 13A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure.

[0053] Figure 13B is an energy distribution diagram at section AB of the far-field view simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure.

[0054] Figure 14 is a schematic diagram of an optical phase array chip according to one embodiment of this disclosure. Implementation

[0055] The detailed description and technical content of this disclosure are illustrated below with reference to the accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit this disclosure.

[0056] As used herein, terms such as "first," "second," and "third" describe various elements, components, regions, layers, and / or parts, which should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or part from another. Unless the context clearly indicates otherwise, the use of terms such as "first," "second," and "third" herein does not imply any order or sequence.

[0057] Figure 1A is a side view of the dual-layer antenna structure of the first embodiment disclosed herein. Figure 1B is a perspective view of the dual-layer antenna structure of the first embodiment disclosed herein. Figure 2 is a side view of a variation of the dual-layer antenna structure of the first embodiment disclosed herein. Referring to Figures 1A, 1B, and 2, the dual-layer antenna structure 11 of this embodiment is used in an optical phase array chip, and includes a substrate 110, a bottom protective layer 113B, a light guide layer 111, a grating layer 112, and a top protective layer 113T.

[0058] The substrate 110 may be made of silicon, for example. The substrate 110 may support the bottom protective layer 113B, for example. The refractive index of the bottom protective layer 113B may be different from that of the light guide layer 111, for example. The material of the bottom protective layer 113B may be silicon dioxide, for example. The bottom protective layer 113B may support the light guide layer 111, for example.

[0059] A light guide layer 111 is disposed above the bottom protective layer 113B. The material of the light guide layer 111 can be, for example, silicon or silicon nitride. The light guide layer 111 can, for example, have a surface 1F extending along the first axis SA1. The light guide layer 111 can transmit light such as infrared, microwave, or visible light.

[0060] A grating layer 112 is disposed on top of a light guide layer 111. The refractive index of the grating layer 112 may be the same as or different from that of the light guide layer 111, and the grating layer 112 and the light guide layer 111 may be in contact (as shown in Figure 2) or not in contact (as shown in Figure 1A, for example, a 300-nanometer top protective layer 113T is disposed between the grating layer 112 and the light guide layer 111). The material of the grating layer 112 may be, for example, silicon or silicon nitride. The grating layer 112 may, for example, have a surface 2F extending along the first axis SA1 and facing the surface 1F. The refractive index may, for example, be the refractive index of the grating layer 112 and the light guide layer 111 relative to light rays such as infrared, microwave, or visible light. The grating layer 112 may reflect, refract, interfere with, or diffract infrared, microwave, or visible light. For example, the combination of the light guide layer 111 and the grating layer 112 may include the configurations shown in Table 1, but is not limiting.

[0061] Table 1 state Refractive index of light guide layer 111 and grating layer 112 Material of light guide layer 111 Material of grating layer 112 Connection relationship between light guide layer 111 and grating layer 112 1 same Silicon Silicon touch 2 same Silicon Silicon No contact 3 same Silicon nitride Silicon nitride touch 4 same Silicon nitride Silicon nitride No contact 5 different Silicon Silicon nitride touch 6 different Silicon Silicon nitride No contact 7 different Silicon nitride Silicon touch 8 different Silicon nitride Silicon No contact

[0062] In some embodiments, the light guide layer 111 is disposed on the bottom protective layer 113B via a first process, and the grating layer 112 is formed via a second process. The first and second processes can be the same or different semiconductor processes. For example, the first process can fabricate the light guide layer 111 and part of the top protective layer 113T; the second process can, for example, fabricate the grating layer 112 and the remaining top protective layer 113T; the finished product is such as the dual-layer antenna structure 11 (as shown in FIG1A). Alternatively, the first process can fabricate the light guide layer 111; the second process can, for example, fabricate the grating layer 112 and the top protective layer 113T; the finished product is such as the dual-layer antenna structure 11A (as shown in FIG2). However, this is not a limitation.

[0063] The grating layer 112 has a plurality of gratings 1121, which are periodically arranged at a spacing of 2G along a first axis SA1 of the light guide layer 111. The first axis SA1 may be, for example, the major axis of the light guide layer 111, and may be parallel to the direction in which the light guide layer 111 transmits light. The light guide layer 111 is, for example, symmetrical about the first axis SA1. The gratings 1121 are repeatedly arranged at substantially the same spacing of 2G along the direction of the first axis SA1, creating a periodic perturbation effect on the light.

[0064] Each gate 1121 is disposed along the second axis SA2 of the light guide layer 111. The second axis SA2 may be, for example, the minor axis of the light guide layer 111. The light guide layer 111 may have the second axis SA2 as its structural axis of symmetry. The shape of the gate 1121 may be, for example, a cube, a cuboid, a cylinder, or other three-dimensional shape. Each gate 1121 may be disposed along the second axis SA2, for example, by means of its axis of symmetry, edges, faces, or other geometric features.

[0065] In some embodiments, each grating body 1121 may have a surface 2F extending along the first axis SA1 and facing surface 1F, but this is not limiting. The grating layer 112 is not energized, but this is not limiting; the grating layer 112 may also be energized.

[0066] In some embodiments, the gate 1121 is arranged symmetrically to the first axis SA1. For example, the geometric center of the gate 1121 is aligned with the center of the light guide layer 111, so that the gate 1121 is symmetrical with respect to the first axis SA1.

[0067] In some embodiments, the width 2W of each gate 1121 along the first axis SA1 is approximately equal to the spacing 2G of the gate 1121. The spacing 2G and the width 2W are defined in the direction of the first axis SA1. For example, the width 2W of the gate 1121 is 300 nanometers, and the spacing 2G is also 300 nanometers; or the width 2W of the gate 1121 is 330 nanometers, and the spacing 2G is 300 nanometers.

[0068] In some embodiments, the length 2L of each gate 1121 along the second axis SA2 is greater than or equal to the length 1L of the light guide layer 111 along the second axis SA2. In other words, viewed from the direction of the third axis SA3, the gate 1121 covers the light guide layer 111 in the direction of the second axis SA2, but this is not limiting. The length 2L of each gate 1121 along the second axis SA2 may also be less than the length 1L of the light guide layer 111 along the second axis SA2.

[0069] The top protective layer 113T covers the light guide layer 111 and the gate 1121. The material of the top protective layer 113T can be, for example, silicon dioxide. The top protective layer 113T can maintain the structure of the gate 1121 to protect the gate 1121.

[0070] Figure 3A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the first embodiment of this disclosure. Figure 3B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the first embodiment of this disclosure. Please refer to Figures 1A, 1B, 3A, and 3B. The grayscale depth in Figures 3A and 3B represents the relative energy of the light. The dual-layer antenna structure 11 of this embodiment can receive, transmit, and radiate infrared, microwave, or visible light. The dual-layer antenna structure 11 of this embodiment enables light (electromagnetic waves) to undergo wave optical phenomena such as reflection, refraction, interference, or diffraction in the substrate 110, bottom protective layer 113B, light guide layer 111, grating layer 112, and top protective layer 113T. This ensures that approximately 70% of the energy of the light emitted by the dual-layer antenna structure 11 towards the target side is equal to approximately 30% of the energy emitted by the dual-layer antenna structure 11 towards the non-target side. The target side is the side facing the surface 1F of the light guide layer 111; in other words, the target side is the side where the grating layer 112 is located. Furthermore, in this embodiment, the light propagation distance along the first axis SA1 of the light guide layer 111 of the dual-layer antenna structure 11 is greater than 500 micrometers; in other words, the effective length is greater than 500 micrometers.

[0071] Figure 4A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the first embodiment of this disclosure. Figure 4B is an energy distribution diagram of the AB section of the far-field view simulation of the dual-layer antenna structure of the first embodiment of this disclosure. Please refer to Figures 1A, 1B, 4A, and 4B. The grayscale shades in Figure 4A represent the relative energy magnitude of the light rays. The relative energy distribution of the dual-layer antenna structure 11 at various angles of the far-field view in this embodiment is shown in Figure 4A. Figure 4B is drawn using the AB section of Figure 4A. The 0° to 90° range in Figure 4A corresponds to the 0° to 90° range in Figure 4B; the 270° to 360° range in Figure 4A corresponds to the -90° to 0° range in Figure 4B. The maximum relative energy value in Figure 4B is defined as 1. As shown by curve PD in Figure 4B, the relative energy distribution of the dual-layer antenna structure 11 between -90° and 90° is close to a Gaussian distribution, and the relative energy is highest at the angle directly opposite the antenna (0° in Figure 4B).

[0072] As described above, the dual-layer antenna structure 11 of this embodiment has a substrate 110, a bottom protective layer 113B, a light guide layer 111, a grating layer 112, and a top protective layer 113T. Therefore, the dual-layer antenna structure 11 primarily emits light towards the target side (e.g., with an energy ratio of approximately 70%); the light propagation distance along the first axis SA1 of the dual-layer antenna structure 11 can be increased (e.g., an effective length greater than 500 micrometers); the relative energy distribution of the dual-layer antenna structure 11 between -90 degrees and 90 degrees is close to a Gaussian distribution; and the relative energy is highest at the angle directly facing the antenna (0 degrees as shown in Figure 4B). In contrast, conventional antenna elements emit approximately 50% energy towards the target side and approximately 50% energy towards the non-target side, resulting in significant energy loss. Moreover, as shown by curve RA in Figure 4B, the energy envelope formed by conventional antenna elements at the far-field viewpoint differs significantly from the Gaussian distribution, and even exhibits relatively low energy at the angle directly facing the conventional antenna element (0 degrees as shown in Figure 4B). Furthermore, when the axial propagation distance of a conventional antenna element is less than 100 micrometers, the effective length of the conventional antenna element is short.

[0073] Figure 5A is a top view of the dual-layer antenna structure of the second embodiment disclosed herein. Figure 5B is a perspective view of the dual-layer antenna structure of the second embodiment disclosed herein. Referring to Figures 5A and 5B, the dual-layer antenna structure 11B of this embodiment includes a substrate 110, a bottom protective layer 113B, a light guide layer 111, a grating layer 112, a top protective layer 113T, and a plurality of light guide blocks 115. The difference between the second embodiment and the first embodiment is that the dual-layer antenna structure 11B further includes a plurality of light guide blocks 115. The substrate 110, bottom protective layer 113B, light guide layer 111, grating layer 112, and top protective layer 113T are similar to those in the first embodiment and will not be described again here.

[0074] A plurality of light guide blocks 115 are disposed adjacent to both sides of the light guide layer 111. The light guide blocks 115 and the grating layer 112 are located, for example, on different sides of the light guide layer 111. The light guide blocks 115 may or may not be in contact with the light guide layer 111. The material of the light guide blocks 115 may be, for example, silicon or silicon nitride. The light guide blocks 115 may, for example, have a surface 5F extending along the first axis SA1 and facing the side of the light guide layer 111. The light guide blocks 115 can reflect, refract, interfere with, or diffract infrared, microwave, or visible light. The plurality of light guide blocks 115 can produce a periodic perturbation effect on the light. In this embodiment, the light guide blocks 115 are not powered; however, this is not a limitation, the light guide blocks 115 may also be powered. The scale of the light guide blocks 115 may be, for example, at the nanometer scale.

[0075] In some embodiments, the light guide blocks 115 are periodically arranged along the first axis SA1 of the light guide layer 111 at a spacing of 5G. The light guide blocks 115 are repeatedly arranged in the direction of the first axis SA1 at substantially the same spacing of 5G.

[0076] In some embodiments, each light guide block 115 is disposed along the second axis SA2 of the light guide layer 111. The shape of the light guide block 115 may be, for example, a cube, cuboid, cylinder, or other three-dimensional shape. Each light guide block 115 is disposed along the second axis SA2, for example, by means of its geometric features such as its axis of symmetry, edges, and faces.

[0077] In some embodiments, the light guide block 115 is arranged symmetrically to the first axis SA1. For example, the geometric center of the light guide block 115 is aligned with the center of the light guide layer 111, so that the light guide block 115 is symmetrical with respect to the first axis SA1.

[0078] In some embodiments, the light guide blocks 115 are arranged symmetrically along the first axis SA1. For example, one light guide block 115 is adjacent to one side of the light guide layer 111, and another light guide block 115 is adjacent to the opposite side of the light guide layer 111, so that the light guide blocks 115 are arranged symmetrically along the first axis SA1.

[0079] In some embodiments, the width 5W of each light guide block 115 along the first axis SA1 is approximately equal to the spacing 5G of the light guide blocks 115. The spacing 5G and the width 5W are defined in the direction of the first axis SA1. For example, the width 5W of the light guide block 115 is 300 nanometers, and the spacing 5G is also 300 nanometers; or the width 5W of the light guide block 115 is 330 nanometers, and the spacing 5G is 300 nanometers. In some embodiments, the spacing 2G is also 300 nanometers, such that the spacing 5G of the light guide blocks 115 is approximately equal to the spacing 2G of the gate 1121.

[0080] In some embodiments, the height 5H of each light guide block 115 along the third axis SA3 is approximately equal to the height 1H of the light guide layer 111 along the third axis SA3, which is perpendicular to the second axis SA2 and the first axis SA1. The third axis SA3 can, for example, be another minor axis of the light guide layer 111. The light guide layer 111 has the third axis SA3 as its structural axis of symmetry, for example. In other words, viewed from the direction of the second axis SA2, the height 5H is approximately the same as the height 1H.

[0081] In some embodiments, the light guide block 115 and the grating body 1121 are staggered along the first axis SA1. The arrangement of the light guide block 115 and the grating body 1121 in the direction of the first axis SA1 is misaligned. The light guide block 115 can be staggered sequentially from the left side (left side of FIG. 5A) or the right side (right side of FIG. 5A) of the grating body 1121 in the direction of the first axis SA1. The light guide block 115 and the grating body 1121 are staggered along the first axis SA1, for example, by a width of 2W and a spacing of 2G, or a width of 5W and a spacing of 5G, which is one-quarter of the total width.

[0082] Figure 6A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the second embodiment of this disclosure. Figure 6B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the second embodiment of this disclosure. Referring to Figures 5A, 5B, 6A, and 6B, the grayscale depth in Figures 6A and 6B represents the relative energy of the light rays. The dual-layer antenna structure 11B of this embodiment can receive, transmit, and radiate infrared, microwave, or visible light rays. The dual-layer antenna structure 11B of this embodiment enables light rays (electromagnetic waves) to undergo wave optical phenomena such as reflection, refraction, interference, or diffraction in the substrate 110, bottom protective layer 113B, light guide layer 111, grating layer 112, top protective layer 113T, and light guide block 115. This results in approximately 76% of the energy of the light emitted by the dual-layer antenna structure 11B towards the target side, and approximately 24% of the energy emitted by the dual-layer antenna structure 11B towards the non-target side. The target side is the side facing the surface 1F of the light guide layer 111; in other words, the target side is the side where the grating layer 112 is located. Furthermore, in this embodiment, the light propagation distance along the first axis SA1 of the light guide layer 111 of the dual-layer antenna structure 11B is greater than 500 micrometers; in other words, the effective length is greater than 500 micrometers.

[0083] Figure 7A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the second embodiment of this disclosure. Figure 7B is an energy distribution diagram of the AB section of the far-field view simulation of the dual-layer antenna structure of the second embodiment of this disclosure. Please refer to Figures 5A, 5B, 7A, and 7B. The grayscale shades in Figure 7A represent the relative energy magnitude of the light rays. The relative energy distribution of the dual-layer antenna structure 11B of this embodiment at various angles of the far-field view is shown in Figure 7A. Figure 7B is drawn by taking the AB section of Figure 7A. The 0° to 90° range in Figure 7A corresponds to the 0° to 90° range in Figure 7B; the 270° to 360° range in Figure 7A corresponds to the -90° to 0° range in Figure 7B. The maximum relative energy value in Figure 7B is defined as 1. As shown by curve PD in Figure 7B, the relative energy distribution of the dual-layer antenna structure 11B between -90° and 90° is close to a Gaussian distribution, and the relative energy is highest at the angle directly opposite the antenna (0° in Figure 7B).

[0084] As described above, the dual-layer antenna structure 11B of this embodiment has a substrate 110, a bottom protective layer 113B, a light guide layer 111, a grating layer 112, a top protective layer 113T, and a light guide block 115. Therefore, the dual-layer antenna structure 11B primarily emits light towards the target side (e.g., with an energy ratio of approximately 76%); the light propagation distance along the first axis SA1 of the dual-layer antenna structure 11B can be increased (e.g., an effective length greater than 500 micrometers); the relative energy distribution of the dual-layer antenna structure 11B between -90 degrees and 90 degrees is close to a Gaussian distribution; and the relative energy is highest at the angle directly opposite the antenna (0 degrees as shown in Figure 7B). In contrast, conventional antenna elements emit approximately 50% energy towards the target side and approximately 50% energy towards the non-target side, resulting in significant energy loss. Furthermore, as shown by curve RA in Figure 7B, the energy envelope formed by the conventional antenna element at the far-field viewpoint differs significantly from the Gaussian distribution, and even shows relatively low energy at the angle directly opposite the conventional antenna element (0 degrees in Figure 10B). Moreover, when the axial light propagation distance of the conventional antenna element is less than 100 micrometers, the effective length of the conventional antenna element is short.

[0085] Figure 8A is a top view of the dual-layer antenna structure according to the third embodiment of this disclosure. Figure 8B is a perspective view of the dual-layer antenna structure according to the third embodiment of this disclosure. Referring to Figures 8A and 8B, the dual-layer antenna structure 11C of this embodiment includes a substrate 110, a bottom protective layer 113B, a light guide layer 111, a grating layer 112, and a top protective layer 113T. The difference between the third embodiment and the first embodiment is that the light guide layer 111 of the dual-layer antenna structure 11C further includes a plurality of protruding structures 114. The substrate 110, the bottom protective layer 113B, the grating layer 112, and the top protective layer 113T are similar to those in the first embodiment and will not be described again here.

[0086] The light guide layer 111 further includes a plurality of protruding structures 114 protruding from the light guide layer 111. The protruding structures 114 are periodically arranged along the first axis SA1 of the light guide layer 111 at a spacing of 4G. The shape of the protruding structures 114 can be, for example, a cube, cuboid, cylinder, or other three-dimensional shape. The protruding structures 114 can, for example, protrude from the surface 1F of the light guide layer 111, or protrude from the surface 1F of the light guide layer 111 and both sides of the light guide layer 111. The protruding structures 114 are repeatedly arranged at substantially the same spacing 4G in the direction of the first axis SA1, forming a fishbone-like structure, which produces a periodic disturbance effect on the light.

[0087] In some embodiments, the width 4W of each protruding structure 114 along the first axis SA1 is approximately equal to the spacing 4G of the protruding structures 114. The spacing 4G and the width 4W are defined in the direction of the first axis SA1. For example, the width 4W of the protruding structure 114 is 300 nanometers, and the spacing 4G is also 300 nanometers; or the width 4W of the protruding structure 114 is 330 nanometers, and the spacing 4G is 300 nanometers. In some embodiments, the spacing 2G is also 300 nanometers, such that the spacing 4G of the protruding structures 114 is approximately equal to the spacing 2G of the gate 1121.

[0088] In some embodiments, the protruding structure 114 and the gate body 1121 are staggered along the first axis SA1. The arrangement of the protruding structure 114 and the gate body 1121 in the direction of the first axis SA1 is misaligned. The protruding structure 114 can be staggered sequentially from the left side (left side of FIG. 8A) or the right side (right side of FIG. 8A) of the gate body 1121 in the direction of the first axis SA1. For example, the protruding structure 114 and the gate body 1121 are staggered along the first axis SA1 by a width of 4W and a spacing of 4G, or a width of 5W and a spacing of 5G, which is one-quarter of the total width.

[0089] Figure 9A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the third embodiment of this disclosure. Figure 9B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the third embodiment of this disclosure. Referring to Figures 8A, 8B, 9A, and 9B, the grayscale depth in Figures 9A and 9B represents the relative energy of the light. The dual-layer antenna structure 11C of this embodiment can receive, transmit, and radiate infrared, microwave, or visible light. The dual-layer antenna structure 11C of this embodiment enables light (electromagnetic waves) to undergo wave optical phenomena such as reflection, refraction, interference, or diffraction in the substrate 110, the bottom protective layer 113B, the light guide layer 111 with protruding structure 114, the grating layer 112, and the top protective layer 113T. This results in approximately 82% of the energy of the light emitted by the dual-layer antenna structure 11C towards the target side, and approximately 18% of the energy emitted by the dual-layer antenna structure 11C towards the non-target side. The target side is the side facing the surface 1F of the light guide layer 111; in other words, the target side is the side where the grating layer 112 is located. Furthermore, in this embodiment, the light propagation distance along the first axis SA1 of the light guide layer 111 of the dual-layer antenna structure 11C is greater than 500 micrometers; in other words, the effective length is greater than 500 micrometers.

[0090] Figure 10A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the third embodiment of this disclosure. Figure 10B is an energy distribution diagram at section AB of the far-field view simulation of the dual-layer antenna structure of the third embodiment of this disclosure. Referring to Figures 8A, 8B, 10A, and 10B, the grayscale shades in Figure 10A represent the relative energy magnitude of the light rays. The relative energy distribution of the dual-layer antenna structure 11C of this embodiment at various angles of the far-field view is shown in Figure 10A. Figure 10B is drawn using section AB of Figure 10A. The 0° to 90° range in Figure 10A corresponds to the 0° to 90° range in Figure 10B; the 270° to 360° range in Figure 10A corresponds to the -90° to 0° range in Figure 10B. The maximum relative energy value in Figure 10B is defined as 1. As shown by curve PD in Figure 10B, the relative energy distribution of the double-layer antenna structure 11C between -90 degrees and 90 degrees is close to a Gaussian distribution, and the relative energy is highest at the angle directly opposite the antenna (0 degrees in Figure 10B).

[0091] As described above, the dual-layer antenna structure 11C of this embodiment has a substrate 110, a bottom protective layer 113B, a light guide layer 111 with a protruding structure 114, a grating layer 112, and a top protective layer 113T. Therefore, the dual-layer antenna structure 11C primarily emits light towards the target side (e.g., with an energy ratio of approximately 82%); the light propagation distance along the first axis SA1 of the dual-layer antenna structure 11C can be increased (e.g., an effective length greater than 500 micrometers); the relative energy distribution of the dual-layer antenna structure 11C between -90 degrees and 90 degrees is close to a Gaussian distribution; and the relative energy is highest at the angle directly opposite the antenna (0 degrees as shown in Figure 10B). In contrast, conventional antenna elements emit approximately 50% energy towards the target side and approximately 50% energy towards the non-target side, resulting in significant energy loss. Furthermore, as shown by curve RA in Figure 10B, the energy envelope formed by the conventional antenna element at the far-field viewpoint differs significantly from the Gaussian distribution, and even shows relatively low energy at the angle directly opposite the conventional antenna element (0 degrees in Figure 10B). Moreover, when the axial light propagation distance of the conventional antenna element is less than 100 micrometers, the effective length of the conventional antenna element is short.

[0092] Figure 11A is a top view of the dual-layer antenna structure according to the fourth embodiment of this disclosure. Figure 11B is a perspective view of the dual-layer antenna structure according to the fourth embodiment of this disclosure. Referring to Figures 11A and 11B, the dual-layer antenna structure 11D of this embodiment includes a substrate 110, a bottom protective layer 113B, a light guide layer 111, a grating layer 112, a top protective layer 113T, and a plurality of light guide blocks 115. The difference between the fourth embodiment and the second embodiment is that the light guide layer 111 of the dual-layer antenna structure 11D further includes a plurality of protruding structures 114. The substrate 110, the bottom protective layer 113B, the grating layer 112, the top protective layer 113T, and the plurality of light guide blocks 115 are similar to those in the second embodiment and will not be described again here. The plurality of protruding structures 114 are similar to those in the third embodiment and will not be described again here.

[0093] It is worth mentioning that, in some embodiments, the protruding structure 114, the light guide block 115, and the grating 1121 are staggered along the first axis SA1. The arrangement of the protruding structure 114, the light guide block 115, and the grating 1121 along the first axis SA1 is misaligned. For example, the protruding structure 114 and the grating 1121 are staggered along the first axis SA1 by a width of 4W and a spacing of 4G, or a width of 5W and a spacing of 5G, respectively. Similarly, the light guide block 115 and the grating 1121 are staggered along the first axis SA1 by a width of 2W and a spacing of 2G, or a width of 5W and a spacing of 5G, respectively.

[0094] Figure 12A is an energy distribution diagram from one perspective of the near-field simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure. Figure 12B is an energy distribution diagram from another perspective of the near-field simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure. Referring to Figures 11A, 11B, 12A, and 12B, the grayscale depth in Figures 12A and 12B represents the relative energy of the light. The dual-layer antenna structure 11D of this embodiment can receive, transmit, and radiate infrared, microwave, or visible light. The dual-layer antenna structure 11D of this embodiment enables light (electromagnetic waves) to undergo wave optical phenomena such as reflection, refraction, interference, or diffraction in the substrate 110, the bottom protective layer 113B, the light guide layer 111 with protruding structure 114, the grating layer 112, the top protective layer 113T, and the light guide block 115. This results in approximately 86% of the energy of the light emitted by the dual-layer antenna structure 11D towards the target side, and approximately 14% of the energy emitted by the dual-layer antenna structure 11D towards the non-target side. The target side is the side facing the surface 1F of the light guide layer 111; in other words, the target side is the side where the grating layer 112 is located. Furthermore, in this embodiment, the light propagation distance along the first axis SA1 of the light guide layer 111 of the dual-layer antenna structure 11D is greater than 500 micrometers; in other words, the effective length is greater than 500 micrometers.

[0095] Figure 13A is an energy distribution diagram of the far-field view simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure. Figure 13B is an energy distribution diagram at section AB of the far-field view simulation of the dual-layer antenna structure of the fourth embodiment of this disclosure. Referring to Figures 11A, 11B, 13A, and 13B, the grayscale shades in Figure 13A represent the relative energy magnitude of the light rays. The relative energy distribution of the dual-layer antenna structure 11D of this embodiment at various angles of the far-field view is shown in Figure 13A. Figure 13B is drawn using section AB of Figure 13A. The 0° to 90° range in Figure 13A corresponds to the 0° to 90° range in Figure 13B; the 270° to 360° range in Figure 13A corresponds to the -90° to 0° range in Figure 13B. The maximum relative energy value in Figure 13B is defined as 1. As shown by curve PD in Figure 13B, the relative energy distribution of the double-layer antenna structure 11D between -90 degrees and 90 degrees is close to a Gaussian distribution, and the relative energy is highest at the angle directly opposite the antenna (0 degrees in Figure 13B).

[0096] As described above, the dual-layer antenna structure 11D of this embodiment has a substrate 110, a light guide layer 111 with a protruding structure 114, a bottom protective layer 113B, a grating layer 112, a top protective layer 113T, and a light guide block 115. Therefore, the dual-layer antenna structure 11D primarily emits light towards the target side (e.g., energy ratio approximately 86%); the light propagation distance along the first axis SA1 of the dual-layer antenna structure 11D can be increased (e.g., an effective length greater than 500 micrometers); the relative energy distribution of the dual-layer antenna structure 11D between -90 degrees and 90 degrees is close to a Gaussian distribution; and the relative energy is highest at the angle directly opposite the antenna (0 degrees as shown in Figure 13B). In contrast, conventional antenna elements emit approximately 50% energy towards the target side and approximately 50% energy towards the non-target side, resulting in significant energy loss. Furthermore, as shown by curve RA in Figure 13B, the energy envelope formed by the conventional antenna element at the far-field viewpoint differs significantly from the Gaussian distribution, and even shows relatively low energy at the angle directly opposite the conventional antenna element (0 degrees in Figure 13B). Moreover, when the axial light propagation distance of the conventional antenna element is less than 100 micrometers, the effective length of the conventional antenna element is short.

[0097] Figure 14 is a schematic diagram of an optical phase array chip according to one embodiment of the present disclosure. Please refer to Figures 1A, 1B and 14. The optical phase array chip 1 of this embodiment includes a light-emitting unit 12, a beam-splitting unit 13, a dual-layer antenna structure 11, a light-sensing unit 14 and a processing unit 15.

[0098] The light-emitting unit 12 generates an emitted light signal LT. The light-emitting unit 12 can be a light-emitting diode, but it is not limited to this. The frequency band of the emitted light signal LT can be infrared, microwave, or visible light. The emitted light signal LT can be a pulse wave signal or a frequency-modulated continuous-wave (FMCW) signal. The emitted light signal LT can be in the form of a square wave or a sine wave. The light-emitting unit 12 can generate the emitted light signal LT by transmitting voltage or current signals.

[0099] The beam splitter 13 is connected to the light-emitting unit 12 and the photosensitive unit 14, and receives and transmits the emitted light signal LT. The beam splitter 13 can, for example, be disposed between the light-emitting unit 12 and the dual-layer antenna structure 11. The beam splitter 13 can, for example, achieve beam splitting by utilizing the wave nature of light to propagate, diffract, and interfere, while retaining the emitted light signal LT. The beam splitter 13 can, for example, split 90% of the energy of the emitted light signal LT to the dual-layer antenna structure 11 to transmit the emitted light signal LT, and use 10% of the energy as a reference light signal LO, which is then transmitted to the photosensitive unit 14. In other embodiments, the beam splitter 13 can also split 10% of the energy to other sensors for monitoring the energy of the emitted light signal LT, but this is not limiting. In other embodiments, the beam splitter 13 may not be connected to the photosensitive unit 14.

[0100] The dual-layer antenna structure 11 is connected to the beam splitter unit 13 and emits an outgoing optical signal LT. The structure of the dual-layer antenna structure 11 has been described in the above embodiments and will not be repeated here. The dual-layer antenna structure 11 is connected to the beam splitter unit 13 (e.g., through an optical waveguide) and emits an outgoing optical signal LT. The object under test O is illuminated by the outgoing optical signal LT, forming a diffusely reflected optical signal RLT. In other embodiments, the dual-layer antenna structure 11 can be replaced by dual-layer antenna structures 11A, 11B, 11C, and 11D (as shown in Figures 2, 5A, 8A, and 11A).

[0101] The light sensing unit 14 receives the diffuse reflected light signal RLT and the reference light signal LO. The light sensing unit 14 can be, for example, an infrared detector, a visible light detector, or a microwave detector. The light sensing unit 14 can receive the diffuse reflected light signal RLT and convert it into a current signal for transmission.

[0102] The processing unit 15 is connected to the photosensing unit 14 and generates sensing information based on the diffuse reflection light signal RLT. The processor can be, for example, a programmable logic controller (PLC), a central processing unit (CPU), a microcontroller unit (MCU), a field programmable gate array (FPGA), or a system-on-a-chip (SoC), etc., but is not limited thereto. The processing unit 15 can receive the diffuse reflection light signal RLT and the reference light signal LO, obtain the distance information of the object under test O through direct time-of-flight (dTOF) or indirect time-of-flight (iTOF), and obtain the speed information of the object under test O through the frequency difference between the diffuse reflection light signal RLT and the reference light signal LO.

[0103] In this embodiment, the light-emitting unit 12 of the optical phase array chip 1 can generate an emitted light signal LT. The beam splitting unit 13 can receive and transmit the emitted light signal LT to the dual-layer antenna structure 11 and the reference light signal LO to the photosensing unit 14. The dual-layer antenna structure 11 can mainly emit the emitted light signal LT towards the target side. The object under test O is illuminated by the emitted light signal LT and forms a diffuse reflection light signal RLT. The photosensing unit 14 receives and transmits the diffuse reflection light signal RLT and the reference light signal LO to the processing unit 15. The processing unit 15 generates sensing information such as distance and speed information based on the diffuse reflection light signal RLT.

[0104] As described above, the dual-layer antenna structure 11 of the optical phase array chip 1 in this embodiment can primarily emit the emitted light signal LT towards the target side (e.g., with an energy ratio of approximately 90%). The light propagation distance of the dual-layer antenna structure 11 along the first axis SA1 can be increased (e.g., by an effective length greater than 500 micrometers). The relative energy distribution of the dual-layer antenna structure 11 between -90 degrees and 90 degrees is close to a Gaussian distribution, and the relative energy is highest at the angle directly opposite the antenna (0 degrees as shown in Figure 4B). Therefore, the optical phase array chip 1 of this embodiment can detect farther distances with lower energy and improve detection accuracy.

[0105] In summary, the disclosed dual-layer antenna structure comprises a substrate, a bottom protective layer, a light guide layer with protruding structures, a grating layer, a top protective layer, and multiple light guide blocks. This allows the dual-layer antenna structure to primarily emit light towards the target side; the light propagation distance along the first axis of the dual-layer antenna structure can be increased; the relative energy distribution of the dual-layer antenna structure between -90 degrees and 90 degrees approximates a Gaussian distribution; and the relative energy is highest at the angle directly opposite the antenna.

[0106] Furthermore, the optical phase array chip disclosed herein can use lower energy to detect at greater distances and improve detection accuracy.

[0107] Unless otherwise defined, terms such as "substantially" and "approximately" are used to describe and narrate minor changes. When combined with an event or situation, the term may include the exact moment the event or situation occurred, or an approximate point in time. For example, when combined with a numerical value, the term may include a specific range of variation that is less than or equal to that numerical value.

[0108] The foregoing outlines components of several embodiments to enable those skilled in the art to better understand the concepts of the embodiments disclosed herein. Those skilled in the art should understand that the embodiments disclosed herein can be used as a basis for designing or modifying other processes and structures to achieve the same purpose and / or benefits as the embodiments described herein. Those skilled in the art should also understand that these equivalent structures do not depart from the spirit and scope of this disclosure, and various changes, substitutions, and other options can be made therein without departing from the spirit and scope of this disclosure. Therefore, the scope of protection of this disclosure shall be determined by the appended claims.

[0109] 1: Optical phase array chip 11: Dual-layer antenna structure 11A: Dual-layer antenna structure 11B: Dual-layer antenna structure 11C: Dual-layer antenna structure 11D: Dual-layer antenna structure 12: Light-emitting unit 13: Spectrometer Unit 14: Light sensing unit 15: Processing Unit 110: Base 111: Light guide layer SA1: First Axis SA2: Second Axis SA3: Third Axis 1F: Surface 1H: Height 1L: Length 112: Raster layer 1121: Gate 2G: Spacing 2F: Surface 2L: Length 2W: Width 2H: Height 113B: Bottom protective layer 113T: Top protective layer 114: Emphasize Structure 4G: Spacing 4W: Width 115: Light guide block 5G: Spacing 5F: Surface 5W: Width 5H: Height LT: Emitted light signal RLT: Diffuse Light Signal LO: Reference Light Signal O: Test substance PD: Curve RA: Curve

Claims

1. A dual-layer antenna structure for use in an optical phase array chip, comprising: One base; A bottom protective layer is disposed on the substrate; A light guide layer is disposed on top of a bottom protective layer; a grating layer is disposed on top of the light guide layer and has a plurality of gratings arranged periodically along a first axis of the light guide layer at a certain spacing, each grating being arranged parallel to a second axis of the light guide layer, wherein the first axis extends along a first direction, the second axis extends along a second direction, and the first direction is different from the second direction; a plurality of light guide blocks are disposed below the light guide layer, the light guide blocks being respectively disposed on opposite sides of the gratings in the second direction and arranged periodically in the first direction at a certain spacing; and a top protective layer is disposed on top of the light guide blocks, the light guide layer, and the gratings; wherein the refractive index of the grating layer is different from that of the light guide layer.

2. The dual-layer antenna structure as described in claim 1, wherein the grating layer is in direct contact with the light guide layer.

3. The dual-layer antenna structure as described in claim 1, wherein the top protective layer is further disposed between the grating layer and the light guide layer.

4. The dual-layer antenna structure as described in claim 1, wherein the width of each grating along the first direction is approximately equal to the spacing between the gratings.

5. The dual-layer antenna structure as described in claim 4, wherein the gratings are arranged symmetrically along the first axis, and the length of each grating along the second direction is greater than or equal to the length of the light guide layer along the second direction.

6. The dual-layer antenna structure as described in claim 1, wherein the light guide blocks and the gratings are staggered along the first direction; the light guide blocks are symmetrically arranged along the first axis.

7. The dual-layer antenna structure as described in claim 6, wherein the spacing of the light guide blocks is approximately equal to the spacing of the gratings; and the width of each light guide block along the first direction is approximately equal to the spacing of the light guide blocks.

8. The dual-layer antenna structure as described in claim 7, wherein the light guide blocks are symmetrically arranged along the first axis, and the height of each light guide block along a third direction is approximately equal to the height of the light guide layer along the third direction, the third direction being perpendicular to the second direction and the first direction.

9. The dual-layer antenna structure as described in claim 1, wherein the light guide layer further comprises: A plurality of protruding structures partially cover one of the upper surfaces and two side surfaces of the light guide layer. These protruding structures are periodically arranged along the first axis of the light guide layer at a certain spacing, wherein the side surfaces are adjacent to the upper surface.

10. The dual-layer antenna structure as described in claim 9, wherein the protruding structures and the gratings are staggered along the first direction.

11. The dual-layer antenna structure as claimed in claim 10, wherein the spacing of the protruding structures is approximately equal to the spacing of the gratings; and the width of each protruding structure along the first direction is approximately equal to the spacing of the protruding structures.

12. The dual-layer antenna structure as described in claim 1, wherein the protruding structures, the light guide blocks, and the gratings are staggered along the first direction.

13. A dual-layer antenna structure for use in an optical phase array chip, comprising: One base; A bottom protective layer is disposed on the substrate; A light guide layer is disposed on a bottom protective layer, wherein the light guide layer has a first axis and a second axis, the first axis extending along a first direction and the second axis extending along a second direction, and the first direction is different from the first direction; a grating layer is disposed on the light guide layer and has a plurality of gratings, each grating being arranged parallel to a second axis of the light guide layer; a plurality of light guide blocks are disposed below the light guide layer, the light guide blocks being respectively disposed on opposite sides of the gratings in the second direction and periodically arranged at a spacing in the first direction; and a top protective layer is disposed on the light guide blocks, the light guide layer and the gratings; the light guide layer is disposed on the bottom protective layer via a first process, and the grating layer is formed via a second process.

14. The dual-layer antenna structure as described in claim 13, wherein the grating layer is in direct contact with the light guide layer.

15. The dual-layer antenna structure as described in claim 13, wherein the top protective layer is further disposed between the grating layer and the light guide layer.

16. The dual-layer antenna structure as described in claim 13, wherein the light guide layer further comprises: A plurality of protruding structures are provided on the light guide layer, and these protruding structures are periodically arranged along a first axis of the light guide layer at a certain spacing.

17. An optical phase array chip, comprising: One light-emitting unit generates an emitted light signal; A beam splitter unit connected to the light-emitting unit transmits the emitted light signal; a dual-layer antenna structure as described in claims 1-16 is connected to the beam splitter unit and transmits the emitted light signal; a light-sensing unit receives a diffuse reflection light signal; and a processing unit connected to the light-sensing unit generates sensing information based on the diffuse reflection light signal.

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