excimer lamp

Abstract

This invention provides an excimer lamp that expands the light-emitting area. The excimer lamp comprises: a light-emitting tube having an outer tube having an exhaust pipe remnant near the end of its outer peripheral surface and an inner tube inserted into the outer tube, and forming a sealed space by joining the outer tube and the inner tube at both ends; an inner electrode disposed inside the inner tube; and an outer electrode connected to the outer peripheral surface of the outer tube, the outer electrode also being formed in the exhaust pipe remnant; and a conductive member disposed in the sealed space having a base near the inner electrode and a front end near the outer electrode and the exhaust pipe remnant, extending from the base to the front end, the front end of the conductive member being located at the center of the outer tube along its length direction, closer to the exhaust pipe remnant than the exhaust pipe remnant.

Description

[Technical Field]

[0001] This invention relates to excimer lamps. [Previous Technology]

[0002] Excimer lamps have been used as light sources for emitting ultraviolet light in processes such as FPDs, semiconductor manufacturing equipment, and photo-cleaning equipment.

[0003] In recent years, in the field of FPD optical cleaning apparatus, with the increasing size of display substrates, there is a demand to extend the effective light emission length. Patent Document 1 describes an excimer lamp apparatus in which a plurality of excimer lamps are arranged in the tube axis direction of the excimer lamp to extend the effective light emission length. [Prior Art Documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2004-192823 [Summary of the Invention]

[0005] [Problem to be Solved by the Invention] The object of the present invention is to provide an excimer lamp that expands the light-emitting area. [Means for Solving the Problem]

[0006] In order to extend the effective light-emitting length, the inventors of this invention studied a scheme in which the end region of the excimer lamp is also used as the light-emitting region. The process of this invention will be described.

[0007] There is an excimer lamp with an exhaust pipe remnant in the end region of the outer peripheral surface of the excimer lamp's light-emitting tube. The exhaust pipe remnant has irregularities relative to the surrounding outer tube, or has a different thickness or varying thickness than the surrounding outer tube, or therefore inherently has strain. Therefore, conventionally, an outer electrode is not provided above the exhaust pipe remnant, and it is not used as a light-emitting area. However, in order to expand the light-emitting area, a scheme to provide an outer electrode in the end region including the exhaust pipe remnant has been studied.

[0008] Figure 4 shows an enlarged cross-sectional view of the main part of an excimer lamp in which an outer electrode is also disposed in the end region including the exhaust pipe remnant. The excimer lamp 500 shown in Figure 4 has a light-emitting tube 10 sealed with a luminescent gas. The light-emitting tube 10 is inserted into an inner tube 2 in an outer tube 1, and the end of the outer tube 1 and the end of the inner tube 2 are joined together to form a sealed end 3. An inner electrode 6 is formed on the inner peripheral surface 2i of the inner tube 2. A mesh-like outer electrode 7 is formed on the outer peripheral surface 1s of the outer tube 1. Moreover, a mesh-like outer electrode 7 is also formed in the end region of the outer tube 1 including the exhaust pipe remnant 5. In this way, excimer light emission is also performed in the end region including the exhaust pipe remnant 5.

[0009] However, the inventors of this invention, through in-depth research, have determined that if an outer electrode 7 is provided near the end of the light-emitting tube 10, which includes the exhaust pipe remnant 5, the following problems will occur. If a mesh-like outer electrode 7 is present in the exhaust pipe remnant 5, linear discharge dc tends to concentrate due to the specific shape of the exhaust pipe remnant 5. Linear discharge dc is a discharge with higher discharge energy compared to its surroundings. If linear discharge dc occurs in the already strained exhaust pipe remnant 5, further strain will accumulate in the exhaust pipe remnant 5 due to the high discharge energy, and cracks will soon form in the exhaust pipe remnant 5, causing leakage of luminescent gas and the excimer lamp 500 to reach its lifespan. That is, the excimer lamp 500 becomes short-lived.

[0010] When the outer electrode 7 is disposed in the end region of the outer pipe 1, it is also possible to consider not disposing of the outer electrode 7 only around the exhaust pipe residue 5. However, if the outer electrode 7 is not disposed only around the exhaust pipe residue 5, the manufacturing method will become more complicated, the technical difficulty will increase, or the manufacturing cost will rise, regardless of how the outer electrode 7 is manufactured.

[0011] Alternatively, after configuring the outer electrode 7 in the end region including the exhaust pipe residue 5, a method can be considered to remove the outer electrode 7 only around the exhaust pipe residue 5. However, the manufacturing cost increases due to the additional removal process of removing the outer electrode 7 only around the exhaust pipe residue 5. Furthermore, since a portion of the conductive wire constituting the mesh electrode is cut off, new technical problems arise, such as the mesh being unraveled from the end of the conductive wire remaining after the cut-off.

[0012] Therefore, the inventors of the present invention have created the following excimer lamp. The excimer lamp of the present invention comprises: a light-emitting tube having an outer tube having an exhaust pipe residue near the end of the outer peripheral surface, and an inner tube inserted into the outer tube, and forming a sealed space by joining the outer tube and the inner tube; an inner electrode disposed inside the inner tube; and an outer electrode being in contact with the outer peripheral surface of the outer tube, the outer electrode also being formed in the exhaust pipe residue; a conductive member disposed in the sealed space having a base near the inner electrode and a front end near the outer electrode and the exhaust pipe residue, extending from the base to the front end, the front end of the conductive member being located at the center of the outer tube in the longitudinal direction beyond the exhaust pipe residue.

[0013] In the aforementioned excimer lamp, an outer electrode is also present in the exhaust pipe residue. However, the conductive member disposed within the sealed space has a structure and arrangement that makes it difficult for linear discharge to occur in the exhaust pipe residue. The structure and arrangement of the conductive member will be specifically described. In the aforementioned excimer lamp, the conductive member has a structure having a base and a front end, and the conductive member is configured such that the base is close to the inner electrode and the front end of the conductive member is close to the outer electrode. Therefore, when a voltage for generating dielectric barrier discharge is applied between the inner electrode and the outer electrode, a linear discharge is generated between the inner electrode and the base of the conductive member, and a linear discharge is generated between the outer electrode and the front end of the conductive member. The front end near the exhaust pipe residue directs the linear discharge intended to be directed toward the exhaust pipe residue toward the outer electrode formed outside the aforementioned exhaust pipe residue. That is, due to the presence of the front ends near both the outer electrode and the exhaust pipe residue, the conductive member can release the linear discharge directed toward the exhaust pipe residue.

[0014] Strain accumulates in the exhaust pipe remnant, while no strain accumulates in the outer pipe outside the exhaust pipe remnant, which is the destination for releasing linear discharge. Because the outer pipe and the outer electrode have uniform shapes, linear discharge is not easily concentrated in the outer pipe outside the exhaust pipe remnant. Therefore, even if the discharge energy of linear discharge is applied to the outer pipe outside the exhaust pipe remnant, cracks are not easily generated in the outer pipe.

[0015] Furthermore, as a result, the light-emitting portion is enlarged by placing an outer electrode at the end of the outer peripheral surface where the exhaust pipe residue is located.

[0016] In the aforementioned excimer lamp, the aforementioned front end of the aforementioned conductive member may not contact the aforementioned outer tube. In this way, when the aforementioned conductive member is inserted into the aforementioned outer tube, damage to the aforementioned conductive member or the aforementioned outer tube can be prevented.

[0017] In the aforementioned excimer lamp, a fixing member for fixing the aforementioned conductive component may also be provided in the aforementioned sealed space.

[0018] In the aforementioned excimer lamp, the aforementioned fixing member may also be an annular shape extending radially from the aforementioned inner tube and located between the aforementioned exhaust pipe residue and the aforementioned front end.

[0019] Alternatively, the aforementioned inner tube may be composed of a first portion located at the center of the length direction and having a small thickness, and a second portion located at the end of the length direction and having a large thickness, with the aforementioned fixing member located in the second portion. [Effects of the Invention]

[0020] This enables the provision of an excimer lamp that expands the luminescent area.

Implementation Method

[0022] The above-mentioned excimer lamp will be explained below with reference to the drawings as appropriate. Furthermore, each of the following drawings is a schematic illustration, and the dimensions and number shown in the drawings may not be consistent with the actual dimensions and number.

[0023] First, an embodiment of the excimer lamp will be described with reference to Figures 1 and 2. Figure 1 is an overall view of the excimer lamp 100. Figure 2 is an enlarged cross-sectional view of the main part of the excimer lamp in Figure 1. In the following description, the direction (tube axis direction) in which the light-emitting tube 10 of the excimer lamp 100 extends is defined as the X direction. Moreover, when representing the direction, if the orientation is positive or negative, it will be marked with symbols such as "+X direction" and "-X direction". If the orientation is not positive or negative, it will only be represented as "X direction".

[0024] The excimer lamp 100 has a light-emitting tube 10 and two electrodes (6, 7) respectively disposed on the outer and inner sides of the light-emitting tube 10. The light-emitting tube 10 has a double tube shape consisting of an outer tube 1 and an inner tube 2 inserted into the outer tube 1. The tube axis of the outer tube 1 and the tube axis of the inner tube 2 are both located on line L1. The ends of the outer tube 1 and the inner tube 2 are joined together to form a sealing end 3. The light-emitting tube 10 has an outer tube 1, an inner tube 2, and a sealing end 3, and the interior of the light-emitting tube 10 is sealed. That is, the space between the outer tube 1 and the inner tube 2 is a sealed space 9 (see Figure 2).

[0025] Referring to Figure 2, various dimensions related to the light-emitting tube 10 are disclosed. The radius r1 of the outer tube 1 is preferably 15 mm or more and 35 mm or less, and more preferably 15 mm or more and 30 mm or less. The radius r2 of the inner tube 2 is preferably 5 mm or more and less than 15 mm, and more preferably 7 mm or more and 13 mm or less. The distance g1 between the inner circumferential surface 1i of the outer tube 1 and the outer circumferential surface 2s of the inner tube (the outer circumferential surface at the thinnest part when there is a thickness deviation in the inner tube 2) is preferably 8 mm or more and 20 mm or less, and more preferably 10 mm or more and 15 mm or less.

[0026] The two electrodes (6, 7) are composed of an inner electrode 6 connected to the inner peripheral surface 2i of the inner tube 2 and an outer electrode 7 connected to the outer peripheral surface 1s of the outer tube 1. The outer electrode 7 is an electrode formed by connecting to the outer peripheral surface 1s. In this embodiment, the outer electrode 7 is a mesh electrode with a large number of openings for light transmission. The mesh electrode in this embodiment is an electrode with a mesh pattern in which a plurality of conductive lines connected to the outer peripheral surface 1s and extending along the X direction intersect each other, and a plurality of conductive lines extending along the circumferential direction of the outer peripheral surface 1s. In Figures 1 and 2, only one cross-section of the excimer lamp 100 along the XY plane is shown. Therefore, the cross-sections of the conductive lines of the mesh outer electrode 7 are shown separately, but in reality, the separately shown conductive lines are connected to each other. In Figure 2, the cross-section of the conductive lines constituting the outer electrode 7 is shown to be rectangular, but the cross-sectional shape of the conductive lines is not particularly limited, and the cross-sectional shape can also be approximately circular. The wire diameter is not particularly limited, but a diameter of 0.1 mm or more and 2 mm or less is preferred. The mesh size of the mesh electrode is preferably 1 mm or more and 10 mm or less, and more ideally 2 mm or more and 8 mm or less. The outer electrode 7 can also be a shape other than a mesh electrode, such as a coil electrode wound into a spiral shape on its outer circumference. Both the mesh electrode and the coil electrode have light-transmitting portions in the arrangement area of ​​the outer electrode 7, thus allowing light emitted by the light-emitting diode to pass through the arrangement area of ​​the outer electrode 7 and be extracted. It is preferable that the outer electrode 7 is formed to the boundary between the outer tube 1 and the sealing end 3. Furthermore, as shown in FIG. 2, the outer electrode 7 can also be formed to extend beyond the boundary between the outer tube 1 and the sealing end 3 and cover a portion of the sealing end 3. The outer electrode 7 can also cover most of the sealing end 3, but if the outer electrode 7 is too close to the inner electrode 6, it is difficult to generate dielectric barrier discharge. Therefore, it is preferable to arrange the outer electrode 7 and the inner electrode 6 such that the distance between the outer electrode 7 and the inner electrode 6 is 25 mm or more.

[0027] The inner electrode 6 is a sheet electrode formed without gaps along the inner circumferential surface 2i. The thickness of the inner electrode 6 is preferably 0.1 mm or more and 1.5 mm or less. Furthermore, the inner electrode 6 can be a mesh electrode like the outer electrode 7, or it can be a coil electrode connected to the inner circumferential surface 2i and wound into a spiral shape. The outer electrode 7 and the inner electrode 6 are respectively connected to a power supply member (not shown). A luminescent gas is filled in the sealed space 9. By applying a voltage between the two electrodes (6, 7) via the power supply member, a dielectric barrier discharge is generated, and the luminescent gas in the light-emitting tube 10 emits excimer light. In this embodiment, xenon gas is used as the luminescent gas, and light with a wavelength of 172 nm is emitted by excimer light emission. Of course, other luminescent gases can also be used to emit light with wavelengths different from 172 nm.

[0028] The exhaust pipe remnant 5 is the trace left after the exhaust pipe was removed from the outer pipe 1. The details of the exhaust pipe will be described later. The exhaust pipe remnant 5 has irregularities relative to the surrounding outer pipe 1. More specifically, the outer peripheral surface of the exhaust pipe remnant 5 protrudes slightly more than the surrounding outer peripheral surface 1i, and the inner peripheral surface of the exhaust pipe remnant 5 is slightly recessed than the surrounding inner peripheral surface 1i. The thickness of the exhaust pipe remnant 5 is different from the thickness of the surrounding outer pipe 1, and the thickness varies locally. Furthermore, a mesh-like outer electrode 7 is also formed on the exhaust pipe remnant 5. Since the exhaust pipe remnant 5 is located in the end region of the light-emitting tube 10, the outer electrode 7 is also disposed in the end region of the light-emitting tube 10.

[0029] The exhaust pipe residue 5 has a shape formed by projecting the cross-sectional shape of the exhaust pipe onto the outer peripheral surface 1s of the outer pipe 1. In this embodiment, the exhaust pipe residue 5 is circular when viewed from the -Y direction. The minor diameter w1 of the exhaust pipe residue 5 is preferably 2 mm or more and 10 mm or less, and more preferably 3 mm or more and 7 mm or less. The distance d2 between the exhaust pipe residue 5 and the end of the light-emitting tube 10 is preferably 12 mm or more and 35 mm or less, and more preferably 15 mm or more and 30 mm or less.

[0030] The details of the conductive member 8 will be described with reference to FIG2. The conductive member 8 is disposed within the sealed space 9. The conductive member 8 has a base 8b located near the inner electrode 6 and a front end 8e located near the outer electrode 7 and the exhaust pipe residue 5, and extends from the base 8b to the front end 8e. Since the base 8b is near the inner electrode 6 and the front end 8e is near the outer electrode 7, and extends from the base 8b to the front end 8e, when a voltage for generating dielectric barrier discharge is applied between the inner electrode 6 and the outer electrode 7, a linear discharge is generated between the inner electrode 6 and the base 8b, and a linear discharge is generated between the outer electrode 7 and the front end 8e. The front end 8e is located on the side closer to the center of the outer pipe 1 in the longitudinal direction than the exhaust pipe residue 5, so the linear discharge is generated on the side closer to the center of the longitudinal direction than the exhaust pipe residue 5.

[0031] The front end portion 8e is close to the exhaust pipe remnant 5 and the outer electrode 7. Therefore, the conductive member 8 can attract linear discharges toward the exhaust pipe remnant 5. Furthermore, the attracted linear discharges can be released toward the outer electrode 7, which is closer to the exhaust pipe remnant 5. The exhaust pipe remnant 5 accumulates strain when the exhaust pipe is disassembled. If the linear discharge is concentrated in the exhaust pipe remnant 5 where strain has accumulated, cracks will occur in the exhaust pipe remnant 5 due to the discharge energy of the linear discharge. However, the outer pipe 1, which is the destination for releasing the linear discharge, does not accumulate strain. Since the outer pipe 1 and the outer electrode 7 have uniform shapes, linear discharges are not easily concentrated. Therefore, even if the discharge energy generated by the linear discharge is applied to the outer pipe 1 near the front end portion 8e, cracks are not easily generated. The distance d3 between the front end portion 8e and the exhaust pipe remnant 5 is preferably 10 mm or more and 30 mm or less, and more preferably 15 mm or more and 25 mm or less. It is preferable that the front end 8e is closer to the outer electrode 7 than to the exhaust pipe remnant 5.

[0032] In this embodiment, the front end portion 8e of the conductive member 8 does not contact the outer tube 1, but the front end portion 8e may also contact the outer tube 1. The advantages of the front end portion 8e not contacting the outer tube 1 will be described later. The distance d4 between the front end portion 8e and the outer electrode 7 closest to the front end portion 8e is preferably 10 mm or less, and more preferably 6 mm or less. The distance d4 is greater than the thickness t1 of the outer tube 1.

[0033] The base 8b of the conductive member 8 has an annular portion that winds around the inner tube 2. In this embodiment, the excimer lamp 100 has a start-up assist 12, which is mounted on the annular portion of the base 8b. In this embodiment, the multiple rings of the start-up assist 12 are interconnected to form a chain, with only the ring at the front end of the chain having a protruding portion 12p. When the chain droops under gravity, the protruding portion 12p approaches the outer tube 1 (in FIG. 2, the protruding portion 12p contacts the outer tube 1). The start-up assist 12 is also made of a conductor, just like the conductive member 8. When the protruding portion 12p approaches the outer electrode 7, a linear discharge is generated between the protruding portion 12p and the outer electrode 7. When a voltage is applied between the inner electrode 6 and the outer electrode 7 to generate a dielectric barrier discharge, the linear discharge from the start-up assist 12 triggers the dielectric barrier discharge. Furthermore, the start-up assist 12 is arbitrarily present for the excimer lamp.

[0034] In this embodiment, the conductive member 8 has an anchoring end 8a. The anchoring end 8a is fixed to a fixing member 11 disposed within the sealed space 9. The conductive member 8 is fixed relative to the inner tube 2 through the fixing member 11. The fixing member 11 is an annular plate extending radially from the inner tube 2. The fixing member 11 is fused to the outer peripheral surface 2s of the inner tube 2. The fixing member 11 has a through hole extending through the thickness direction of the plate, through which the conductive member 8 passes. The anchoring end 8a is bent, thereby preventing the conductive member 8 from detaching from the through hole of the fixing member 11. The conductive member 8 has a bent portion 8c midway between its connection to the anchoring end 8a, and the bent portion 8c, together with the bent anchoring end 8a, fixes the position of the conductive member 8 relative to the fixing member 11.

[0035] The fixing member 11 is located between the exhaust pipe residue 5 and the front end portion 8e. The outer diameter of the annular fixing member 11 is smaller than the inner diameter of the outer tube 1, thus creating a gap between the fixing member 11 and the outer tube 1. The sealing space 9 extends to the end region containing the exhaust pipe residue 5, and a dielectric barrier discharge is also generated between the end region of the outer electrode 7 containing the exhaust pipe residue 5 and the inner electrode 6, resulting in excimer light emission. Since the end region also emits light, the luminous area of ​​the excimer lamp is expanded.

[0036] The above-described method for fixing the conductive member 8 is only one example; other methods can also be used to fix the conductive member 8. For example, the base 8b of the conductive member 8 can be welded and fixed to the inner tube 2.

[0037] The outer tube 1 has a uniform thickness t1. A thickness t1 of 1 mm or more and 4 mm or less is preferred, and 1.5 mm or more and 3 mm or less is even more ideal. The inner tube 2 is composed of two parts with different thicknesses. The first part 2b is a thin part located at the center of the length direction. The second part 2a is a thick part located at the end of the length direction. The fixing member 11 is welded at the thicker second part 2a. By welding the fixing member 11 to the thicker second part 2a, the fixing member 11 is stably fixed without affecting the inner tube 2 due to the welding. A thickness t2a of the first part is preferably 1 mm or more and 4 mm or less, and 1.5 mm or more and 3 mm or less is even more ideal. A thickness t2b of the second part is preferably 0.5 mm or more and less than 2 mm, and 0.8 mm or more and 1.5 mm or less is even more ideal.

[0038] Referring to Figures 3A to 3D, an example of the manufacturing process of the excimer lamp 100 will be described. First, the outer tube 1 and the inner tube 2 are prepared. Figure 3A is a diagram showing the outer tube 1. The outer tube 1 has an exhaust pipe 15. The outer tube 1 and the exhaust pipe 15 are made of quartz, for example. The outer electrode 7 has not yet been installed on the outer peripheral surface 1s of the outer tube 1. Figure 3B is a diagram showing the inner tube 2. A conductive member 8 and an activation auxiliary part 12 are installed on the outer peripheral surface 2s, and a fixing member 11 for fixing the conductive member 8 is fused to it. The inner tube 2 and the fixing member 11 are both made of quartz.

[0039] Figure 3C illustrates a situation where an inner tube 2 is inserted into an outer tube 1, and the ends of the outer tube 1 and the inner tube 2 are joined together to form a sealing end 3, thereby forming a sealed space 9. Since the front end 8e does not contact the outer tube 1, the inner wall of the outer tube 1 is less likely to interfere with the front end 8e when the inner tube 2 is inserted into the outer tube 1, making insertion easier. Furthermore, the conductive member 8 having a bent portion 8d also makes it less likely for the inner wall of the outer tube 1 to interfere with the front end 8e when the inner tube 2 is inserted into the outer tube 1, facilitating insertion. The radius of curvature of the bent portion 8d is preferably 5 mm or more and 10 mm or less.

[0040] After the sealed space 9 is formed, the gas inside the sealed space 9 is replaced with luminescent gas from the exhaust pipe 15. After the gas is replaced with luminescent gas, if the exhaust pipe 15 is melted while sealing is performed, an exhaust pipe residue 5 is formed.

[0041] As shown in FIG3D, after the exhaust pipe residue 5 is formed, an outer electrode 7 and an inner electrode 6 are formed. Regarding the method of forming the inner electrode 6, the inner electrode 6 is formed by attaching a sheet-like inner electrode 6 to the inner peripheral surface 2i of the inner pipe 2. Alternatively, the inner electrode 6 can be formed by forming a film on the inner peripheral surface 2i.

[0042] Regarding the method of forming the outer electrode 7, a cylindrical mesh is formed by rolling up a mesh-like conductive sheet, and this cylindrical mesh is then placed over the light-emitting tube 10 (outer tube 1) shown in FIG. 3D, thereby forming the outer electrode 7. In order to expand the light-emitting area, the cylindrical mesh (outer electrode 7) covers not only the central region of the outer tube 1, but also the end region of the outer tube 1 including the exhaust pipe residue 5. In order to enable the outer electrode 7 to cover the light-emitting tube 10, it is preferable that the outer electrode 7 can be extended or retracted. Furthermore, the outer electrode 7 can also be fixed by hooking the outer electrode 7 to the sealing end 3. In this way, it can be installed on the light-emitting tube 10 while maintaining tension on the outer electrode 7, resulting in a tight fixation relative to the light-emitting tube 10. Moreover, since the outer electrode 7 is provided to the sealing end 3, a greater light-emitting length can be ensured. In this way, the excimer lamp 100 shown in FIG. 1 and FIG. 2, which has the outer electrode 7 up to the end region of the outer tube 1 including the exhaust pipe residue 5, is completed. Furthermore, the outer electrode 7 can also be formed by pattern coating through screen printing or other methods.

[0043] This invention is not limited to the embodiments described above, and various modifications and alterations can be made without departing from the spirit of the invention. [Industrial Applicability]

[0044] The excimer lamp 100 of the above embodiment is used in the manufacture of semiconductors and liquid crystal panels, but can also be used for other purposes. [Simplified Explanation of the Diagram]

[0021] [Fig. 1] Cross-sectional view of one embodiment of the excimer lamp. [Fig. 2] Enlarged cross-sectional view of the main part of the excimer lamp in Fig. 1. [Fig. 3A] Schematic diagram showing the manufacturing process of the excimer lamp. [Fig. 3B] Schematic diagram showing the manufacturing process of the excimer lamp. [Fig. 3C] Schematic diagram showing the manufacturing process of the excimer lamp. [Fig. 3D] Schematic diagram showing the manufacturing process of the excimer lamp. [Fig. 4] Enlarged cross-sectional view of the main part of a comparative embodiment of the excimer lamp.

Claims

1. An excimer lamp, characterized by comprising: a light-emitting tube having an outer tube having an exhaust pipe remnant near the end of its outer peripheral surface, and an inner tube inserted into the outer tube, wherein a sealed space is formed by joining the outer tube and the inner tube at both ends; an inner electrode disposed inside the inner tube; and an outer electrode connected to the outer peripheral surface of the outer tube, the outer electrode also being formed in the exhaust pipe remnant; a conductive member disposed in the sealed space having a base near the inner electrode and a front end near the outer electrode and the exhaust pipe remnant, the conductive member extending from the base to the front end, the front end of the conductive member being located closer to the center of the outer tube in the longitudinal direction than the exhaust pipe remnant.

2. The excimer lamp as described in claim 1, wherein, The aforementioned front end of the aforementioned conductive component does not contact the aforementioned outer tube.

3. The excimer lamp as described in request item 1 or 2, wherein, A fixing member is provided within the aforementioned sealed space to fix the aforementioned conductive component.

4. The excimer lamp as described in claim 3, wherein, The aforementioned fixing member is an annular shape extending radially from the aforementioned inner pipe and is located between the aforementioned exhaust pipe residue and the aforementioned front end.

5. The excimer lamp as described in claim 3, wherein, The aforementioned inner tube is composed of a first part with a small thickness located at the center of the length direction and a second part with a large thickness located at the end of the length direction, and the aforementioned fixing member is located in the aforementioned second part.

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