Gate valve and substrate processing apparatus including the same

Abstract

The gate valve and the substrate processing apparatus including the gate valve (10) are disclosed. The gate valve (10) includes: a valve body (100) having an opening (O) defining a flow passage (P) and a valve seat (101); and a valve plate (200) configured to move between a closed position in which the valve plate (200) contacts the valve seat (101) in the valve body (100) to close the flow passage (P) and an open position in which the valve plate (200) opens the flow passage (P).

Description

[Technical Field]

[0001] Embodiments of the present invention relate to a gate valve and a substrate processing device including the same, and more specifically, to a gate valve having an inclined sealing surface and a substrate processing device including the same. [Previous Technology]

[0002] Semiconductor substrate processing apparatus used in semiconductor manufacturing processes and similar processes typically includes: multiple processing chambers for performing substrate processing processes; a load locking chamber that creates an environment for the substrate to enter the respective processing chamber; and a transfer chamber that connects the load locking chamber and the processing chamber and is equipped with a robotic arm to transfer the substrate between the load locking chamber and the respective processing chamber.

[0003] The processing chamber may include: a vacuum pipe for exhaust or a pipe for the flow of process gases; and valves configured on the pipe for blocking or allowing fluid flow.

[0004] The valve uses a wedge-shaped circular valve plate to control fluid flow. The valve plate has a seal on one surface and is configured to slide between a position where the valve plate contacts the valve seat and a position where the valve plate is separated from the valve seat.

[0005] However, typical valve structures have problems such as the seals mounted on the valve plate wear down with repeated use, leading to reduced maintainability, or the generation of undesirable particles due to excessive friction of the seals during sliding. [Summary of the Invention]

[0006] The object of the present invention is to provide a gate valve that can minimize wear on valve components, thereby ensuring improved maintainability, and can minimize particles generated due to friction during valve opening and closing, as well as a substrate treatment device including the gate valve.

[0007] According to one aspect of the present invention, a gate valve (10) is provided, comprising: a valve housing (100) including an opening (O) defining a flow passage (P) and a valve seat (101); and a valve plate (200) configured to move between a closed position in which the valve plate (200) contacts the valve seat (101) within the valve housing (100) to close the flow passage (P) and an open position in which the valve plate (200) opens the flow passage (P).

[0008] The valve plate (200) may include a plate (210) having a sealing surface (212) facing the valve seat (101).

[0009] The gate valve (10) may include: a seal (220) disposed on the sealing surface (212) or the valve seat (101); and a sliding member (240) disposed on the valve plate (200) for guiding the movement path of the valve plate (200).

[0010] The sealing surface (212) may have an angle (α) relative to the direction of movement (L) of the plate (210).

[0011] When the valve plate (200) is in the closed position, the sliding member (240) can be configured to be adjacent to a surface of the valve housing (100) on the valve seat (101) side.

[0012] The sliding component (240) may include a plurality of roller elements (242, 244) disposed on the valve plate (200).

[0013] When the direction of movement from the closed position to the open position is defined as the forward direction, at least one of the plurality of roller elements (242, 244) may be configured on the front side of the valve plate (200) in reference to the forward direction.

[0014] At least one of the plurality of roller elements (242, 244) may be configured on the rear side of the valve plate (200) in the forward direction.

[0015] The gate valve 10 may further include: a valve stem (300) coupled to the rear side of the plate (210) in the forward direction; and a drive unit (400) configured to drive the valve stem (300) to move.

[0016] The gate valve (10) may further include: a position adjustment unit configured to adjust the position of the plate (210) in the closed position.

[0017] The position adjustment unit may include: a fixing hole (218) formed on the rear side of the plate (210); a rod end (302) formed on the distal end of the valve stem (300) and inserted into the fixing hole (218); and a fixing member (304) configured to fix the rod end (302) to the fixing hole (218).

[0018] The fixing position of the fixing hole (218) can be adjusted within the rod end (302).

[0019] When the sealing surface (212) is the front surface of the plate (210), the plate (210) may include a sealing plate (219a) having the sealing surface (212) and a sidewall (219b) surrounding the sealing plate (219a).

[0020] The sidewall (219b) may have a predetermined height (H) along an axis (K) perpendicular to the center of the opening (O), the predetermined height (H) being measured on the rear surface of the plate (210) opposite to the front surface.

[0021] The fixing hole (218) may be an opening that passes through the side wall (219b).

[0022] According to another aspect of the present invention, a substrate processing apparatus including the gate valve 10 according to the present invention is provided.

[0023] Embodiments of the present invention provide a gate valve that minimizes wear on valve components, thereby ensuring improved maintainability and minimizing particles generated due to friction during valve opening / closing, as well as a substrate treatment device including the gate valve.

[0024] The above and other aspects, features and advantages of the present invention will become apparent from the following detailed description of embodiments taken in conjunction with the accompanying drawings.

Implementation Method

[0026] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0027] The gate valve 10 according to the invention may be a gate valve provided to a substrate processing apparatus configured to perform substrate processing, such as deposition and substrate etching on a substrate.

[0028] The substrate processing apparatus may include a chamber forming a sealed processing space, a gate for loading and unloading the substrate into and out of the chamber, a support platform configured to support the substrate, etc., and may be connected to a gas introduction system, a power application system, a pressure control system, an exhaust system, etc.

[0029] The gate valve 10 is disposed in a fluid flow conduit of the base processing apparatus for opening / closing the flow passage P of the conduit, and may include: a valve housing 100 including an opening O defining the flow passage P and a valve seat 101; and a valve plate 200 configured to move within the valve housing 100 between a closed position in which the valve plate 200 contacts the valve seat 101 to close the flow passage P and an open position in which the valve plate 200 opens the flow passage P.

[0030] The valve housing 100 is a housing that includes an opening O defining the flow path P and a valve seat 101 and provides a receiving space for receiving the valve plate 200, and can be configured in various forms.

[0031] For example, the valve housing 100 may include a first flow channel forming member 122 having an opening O, a valve seat 101 on one surface thereon, and a second flow channel forming member 124 having an opening O and facing the valve seat 101 of the first flow channel forming member 122.

[0032] The first flow channel forming component 122 may have a predetermined length in a direction parallel to the axis K passing through the center of the opening O, and may have a flange at one end extending in an outward direction perpendicular to the axis K.

[0033] The flange, as a connecting part coupled to the end of the pipe defining the flow path P, can be designed in various forms. The valve seat 101 can be an area formed on a surface of the first flow path forming member 122, which is opposite to the flange and is used to contact the valve plate 200 described below.

[0034] The second flow channel forming component 124 is positioned opposite to the first flow channel forming component 122, and there is a space between them in the direction of the axis K passing through the center of the opening O. A flange extending in an outward direction perpendicular to the axis K can be formed thereon. The flange is coupled to the end of the pipe defining the flow channel P as a connecting part, and can be positioned in the middle of the flow channel P of the pipe by means of the first flow channel forming component 122 and the second flow channel forming component 124.

[0035] The valve housing 100 may also include a plurality of dividing parts 112, 114, 116, 118, which separate the receiving space for receiving the valve plate 200 from the outside.

[0036] The dividing parts 112, 114, 116, and 118 are housing elements surrounding the first flow channel forming component 122 and the second flow channel forming component 124 and defining the receiving space, and may include a top plate 112, a bottom plate 112, and side plates 114, 116, and 118.

[0037] The top plate 112 and the bottom plate 112 may extend to a predetermined length or longer in the moving direction L of the valve plate 200 to define the moving path of the valve plate 200.

[0038] The height of the side plates 114, 116, and 118 in the direction of axis K can correspond to the distance between the flange of the first flow channel forming component 122 and the flange of the second flow channel forming component 124.

[0039] The valve plate 200 is configured to move within the valve housing 100, between a closed position where the valve plate 200 contacts the valve seat 101 to close the flow channel P and an open position where the valve plate 200 opens the flow channel P, and can be configured in various forms.

[0040] For example, valve plate 200 may include plate 210 having a sealing surface 212 facing valve seat 101.

[0041] Plate 210 is a shut-off plate having a sealing surface 212 facing the valve seat 101, and can be configured in various forms.

[0042] When the valve plate 200 is in the closed position, the sealing surface 212 can be pressed against the valve seat 101. When the valve plate 200 is in the open position, the sealing surface 212 can be spaced apart from the valve seat 101.

[0043] Referring to FIG6, when the sealing surface 212 is the front surface of the plate 210, the plate 210 may include a sealing plate 219a having the sealing surface 212 and a sidewall 219b surrounding the sealing plate 219a.

[0044] The sealing plate 219a is a plate that includes a sealing surface 212 on its front surface, as shown in FIG5B, and may have a generally rectangular shape in a plan view.

[0045] The gate valve 10 may further include: a sealing element 220 disposed on the sealing surface 202 or the valve seat 101; and a sliding member 240 disposed on the valve plate 200 to guide the movement path of the valve plate 200.

[0046] The seal 220 is disposed on the sealing surface 212, which is the front surface of the sealing plate 219a, or disposed on the valve seat 101, and may be configured as an O-ring.

[0047] When the seal 220 is disposed on the sealing surface 212 of the sealing plate 219a, a groove for mounting the seal 220 can be formed around the sealing surface 212. The seal 220 can be inserted into the groove, with a portion protruding above the sealing surface 212. When the sealing plate 219a is close to the valve seat 101, the protruding portion of the seal 220 can tightly contact the valve seat 101, thereby achieving a seal on the flow channel P.

[0048] Furthermore, referring to FIG2, the sealing surface 212 of the sealing plate 219a may have an inclination angle α relative to the moving direction L of the plate 210.

[0049] The direction of movement L may be tilted relative to the axis K that is perpendicular to the center of the opening O. For example, the direction of movement L may be perpendicular to the axis K.

[0050] The sealing surface 212 may be formed as an inclined surface with an angle α relative to the direction of movement L. That is, the plate 210 may be a wedge-shaped valve plate, wherein the sealing surface 212 forms an inclined surface. Here, when the sealing surface 212 of the plate 210 is an inclined surface with an angle α relative to the direction of movement L, and the plate 210 has a tapered shape with a decreasing thickness in the forward direction, the plate 210 is defined as a wedge-shaped valve plate. It should be understood that the rear surface of the plate 210 opposite to the sealing surface 212 may be parallel to the direction of movement L, or may be formed as an inclined surface similar to the sealing surface 212.

[0051] Since the sealing surface 212 has an inclination angle α relative to the moving direction L, the valve seat 101 configured to be in close contact with the sealing surface 212 can also form an inclination surface with the same inclination angle α as the sealing surface 212.

[0052] Because the sealing surface 212 has an inclination angle α, when the plate 210 moves forward toward the valve seat 101 in the moving direction L, the plate 210 can come into close contact with the valve seat 101. Although the rear surface of the plate 210 opposite the sealing surface 212 is shown in the figure to be parallel to the moving direction L, the present invention is not limited thereto. That is, the rear surface of the plate 210 opposite the sealing surface 212 can also form an inclination surface with an inclination angle relative to the moving direction L. It should be understood that the inclination angle of the rear surface of the plate 210 opposite the sealing surface 212 can be the same as or different from the inclination angle α of the sealing surface 212.

[0053] Referring to FIG6, the sidewall 219b may have a predetermined height H along an axis K perpendicular to the center of the opening O, which is measured on the rear surface of the plate 210 (i.e., the surface opposite to the front surface (i.e., the sealing surface 212)). Although the sidewall 219b is described as different from the sealing plate 219a, this is only for the sake of description, and the sidewall 219b may be integrally formed with the sealing plate 219a.

[0054] Since the sealing surface 212 has an inclination angle α, the height H of the side wall 219b may vary depending on its position. That is, when the direction of movement of the plate 210 from the closed position to the open position is defined as the forward direction, the height H of the side wall 219b may gradually decrease from the rear of the plate 210 to the front of the plate 210 with reference to the forward direction.

[0055] The sidewall 219b may surround the sealing plate 219a, so that the plate 210 has a hollow recessed space 219c inside the sidewall 219b. Forming the recessed space 219c can reduce the weight of the plate 210. It should be understood that the recessed space 219c is an optional feature, not a necessary component.

[0056] The sliding component 240 is a sliding element mounted on the plate 210 to guide the movement path of the plate 210, and can be configured in various forms.

[0057] When the valve plate 200 is in the closed position, the sliding member 240 can be configured to contact a surface of the valve housing 100 on the valve seat 101 side.

[0058] For example, the sliding component 240 may include a plurality of roller elements 242, 244 disposed on the valve plate 200.

[0059] For example, when the direction of movement of plate 210 from closed position to open position is defined as the forward direction, at least one of the plurality of roller elements 242, 244 may be configured on the front side of valve plate 200 with reference to the forward direction.

[0060] As another example, with reference to the forward direction, at least one of the plurality of roller elements 242, 244 may be configured on the rear side of the valve plate 200.

[0061] To take a further example, with reference to the direction of travel, at least one of the plurality of roller elements 242, 244 may be configured at the center of the valve plate 200.

[0062] Roller elements 242 and 244 may be rollers that guide the movement of the guide plate 210.

[0063] Although there are no particular limitations on the number and position of the roller elements 242, 244, the sliding component may include, for example, four roller elements 242, 244 respectively arranged at the front right corner, rear right corner, front left corner and rear left corner of the plate 210.

[0064] The roller elements 242 and 244 can be configured on the plate 210 in various ways.

[0065] For example, roller elements 242 and 244 can be mounted on plate 210 via roller connecting shafts 214 and 216.

[0066] Although the roller connecting shafts 214, 216 are shown to protrude outward from the plate 210 in Figures 5A and 5B, it should be understood that the invention is not limited thereto. As another example, the roller connecting shafts 214, 216 may be provided to the roller elements 242, 244, and various other methods may be used, as long as the method allows the roller elements 242, 244 to be coupled to the plate 210.

[0067] The protruding direction of the roller connecting shafts 214 and 216 can be perpendicular to the moving direction L and the axis K.

[0068] Although there is coupling between the plate 210 and the roller elements 242, 244, in order to minimize the area occupied by the plate 210 and the roller elements 242, 244, that is, in order to minimize the degree to which the roller elements 242, 244 protrude outward from the plate 210, the plate 210 may form an inwardly recessed stepped portion 215 to ensure space for placing the roller elements 242, 244.

[0069] Since the roller elements 242, 244 are installed in the hollow space defined by the inwardly recessed stepped portion 215, the roller elements 242, 244 are prevented from protruding excessively outward from the plate 210 and causing an increase in the overall valve size, thereby allowing the realization of a valve with an overall compact structure.

[0070] Multiple roller elements 242, 244 may all have the same diameter. When multiple roller elements 242, 244 have the same diameter, all roller elements 242, 244 can abut the inner surface 112a of the valve housing 100 during the movement of the plate 210, thereby stably supporting the plate 210. Furthermore, this feature can stably support the plate 210 during movement and flow channel closure even when differential pressure is applied in two directions, thereby ensuring improved sealing performance.

[0071] However, it should be understood that the invention is not limited thereto, and at least one of the plurality of roller elements 242, 244 may have a different diameter than the other roller elements 242, 244.

[0072] For example, the diameter D2 of the roller element 244 disposed on the rear side of the plate 210 may be larger than the diameter D1 of the roller element 242 disposed on the front side of the plate 210. Therefore, the rear roller element 244 can avoid interference with the valve housing 100 during the movement of the plate 210.

[0073] Roller elements 242, 244 may protrude beyond the sidewall 219b of plate 210 to abut the inner surface 112a of valve housing 100 within valve housing 100.

[0074] That is to say, the roller elements 242 and 244 can be configured to be adjacent to the valve housing 100, specifically adjacent to the inner surface 112a of the top plate 112 or the bottom plate 112 of the valve housing 100. The roller elements 242 and 244 can roll and be adjacent to the inner surface 112a during the movement of the plate 210, thereby guiding the forward / backward movement of the plate 210.

[0075] For example, the sliding member 240 may be configured to abut the inner surface 112a of the base plate 112 of the valve housing 100 and may be slightly spaced from the top plate 112 facing the base plate 112. Because the sliding member 240 abuts the inner surface 112a of the valve housing 100, the plate 210 can be stably supported during its movement and flow path closure, thereby ensuring improved sealing performance.

[0076] However, it should be understood that the invention is not limited thereto. By another example, the roller elements 242, 244 can move in a state spaced apart from the inner surface 112a during the movement of the plate 210, and can abut a surface of the valve housing 100 on the valve seat 101 side when the valve plate 200 is in the closed position.

[0077] When the direction of movement of plate 210 from closed position to open position is defined as the forward direction, gate valve 10 may further include: valve stem 300 coupled to the rear side of plate 210 with reference to the forward direction; and drive unit 400 configured to drive valve stem 300 to move.

[0078] The valve stem 300, as the valve shaft coupled to the plate 210, can be configured in various ways. The valve stem 300 can be driven by the drive unit 400, so that the plate 210 coupled to the valve stem 300 can move forward or backward in the movement direction L.

[0079] Here, the plate 210 may include a fixing hole 218 formed on its rear sidewall 219b to facilitate coupling of the plate 210 with the valve stem 300.

[0080] The fixing hole 218 may be an opening formed on the side wall 219b, allowing one end of the valve stem 300 to be securely inserted therein.

[0081] The drive unit 400 is the drive source that drives the valve stem 300 to move. It can be configured in various forms, such as hydraulic or pneumatic actuators, motors, etc.

[0082] For example, the drive unit 400 may include a piston 420 disposed at the end of the valve stem 300 and a cylinder 410 therein receiving the piston 420. The cylinder 410 may be coupled to the valve housing 100.

[0083] The internal space of the cylinder 410 can be divided relative to the piston 420 into a first space 412 located behind the piston 420 and a second space 414 located in front of the piston 420.

[0084] Figure 2 shows the closed position where the flow channel P is closed by the plate 210. Referring to Figure 2, when pressure is supplied to the first space 412, the piston 420 moves in the forward direction, causing the plate 210 to move to the closed position by moving forward in the direction of movement L and to come into close contact with the valve seat 101.

[0085] Conversely, Figure 3 shows the open position of the flow channel P. Referring to Figure 3, when the plate 210 is in the closed position, pressure is supplied to the second space 414, and the piston 420 moves in the retracting direction, causing the plate 210 to move to the open position by retracting in the moving direction L and separating from the valve seat 101.

[0086] Since the internal space 112b of the valve housing 100 is a space that communicates with the flow channel P, the valve stem 300 may include a bellows B on its outer peripheral surface to separate the internal space 112b of the valve housing 100 from the drive unit 400 when the valve stem 300 moves forward / backward.

[0087] In addition, the drive unit 400 may further include an elastic member S disposed in the second space 414 of the cylinder 410 to mitigate the impact caused by the piston 420 during the forward movement of the valve stem 300.

[0088] In addition, a protruding structure may be formed in front of the piston 420, and a recessed area that cooperates with the protruding structure may be formed on the side of the second space 414, so that when the piston 420 moves forward, an air cushion may be formed between the protruding structure and the recessed area, thereby providing a buffering mechanism.

[0089] A typical gate valve 10 may experience wear of its valve components during repeated use, and particles may be generated due to friction during valve opening / closing. In particular, the seal 220 may wear or generate particles due to friction during the movement of the plate 210. Furthermore, the service life of the seal 220 may be shortened, and the maintenance cycle may also be shortened, due to excessive pressure of the seal 220 on the valve seat 101.

[0090] Conversely, the gate valve 10 according to the invention can effectively prevent problems such as unnecessary wear on the seal 220 and other valve components by providing a sliding member 240 on the plate 210, the sliding member 240 being used to guide the plate 210 along a movement path between the closed position and the open position, and ensuring that the plate 210 in the closed position is in close contact with the valve body 110.

[0091] Furthermore, the gate valve 10 according to the present invention can prevent damage to the seal 220 due to excessive forward movement of the plate 210 during the closing operation by adjusting the forward stroke distance of the plate 210 when the plate 210 is moved to the closed position.

[0092] For example, the gate valve 10 according to the invention can adjust the maximum forward position of the plate 210 by means of a controller configured to adjust the forward / reverse stroke of the drive unit 400. That is, the controller can adjust the maximum forward position of the plate 210 by controlling the stroke distance of the piston 420 of the drive unit 400 during the forward movement when the plate moves forward to close the flow channel P.

[0093] As another example, the gate valve 10 according to the invention may further include: a position adjustment unit configured to adjust the position of the plate 210 in the closed position.

[0094] The position adjustment unit may include a fixing hole 218 formed on the rear side of the plate 210, a rod end 302 formed at the distal end of the valve stem 300, and a fixing member 304 configured to fix the rod end 302 to the fixing hole 218. Here, the fixing position of the fixing hole 218 can be adjusted within the rod end 302.

[0095] The rod end 302 can be an insert for inserting into the fixing hole 218. The fixing position of the fixing hole 218 can be adjusted within the rod end 302, and the rod end 302 and the fixing hole 218 can be firmly coupled in the adjusted position through the fixing member 304.

[0096] For example, referring to FIG7, the fixing hole 218 and the rod end 302 can be fixed to each other by a threaded engagement. That is, the thread can be formed on the inner circumferential surface of the fixing hole 218 and the outer circumferential surface of the rod end 302. Here, the rod end 302 is a fixing screw that can be screwed into the fixing hole 218. Various fixing means can be used as fixing members 304, as long as the fixing means can securely couple the rod end 302 to the fixing hole 218. For example, the fixing member 304 may include a nut element coupled to the rod end 302, but is not limited thereto.

[0097] By rotating the fixing hole 218 and the rod end 302 relative to each other, the coupling position between the fixing hole 218 and the rod end 302 can be adjusted, and the coupling position can be fixed by the fixing member 304. The closed position of the plate 210 when it reaches its maximum forward position can be adjusted.

[0098] By means of a position adjustment unit configured to adjust the fixed position of the fixing hole 218 within the rod end 302, the gate valve 10 according to the present invention can effectively prevent excessive friction between the seal 220 and the valve seat 101 when the flow channel P is in the closed position, and can ensure improved maintainability.

[0099] Furthermore, by appropriately adjusting the coupling position of the plate 210 relative to the valve stem 300, the gate valve 10 according to the invention can ensure that when the plate 210 reaches its maximum forward position, the sealing surface 212 is in close contact with the valve seat 101, thereby providing enhanced sealing performance even when there is no pressure difference across the flow path P.

[0100] Although some embodiments have been described, it should be understood that these embodiments are provided for illustrative purposes only and should not be construed as limiting the invention in any way. Those skilled in the art can make various modifications, alterations, changes and equivalent embodiments without departing from the spirit and scope of the invention. [Simplified Explanation of the Diagram]

[0025] FIG1 is a perspective view of a gate valve according to an embodiment of the present invention. FIG2 is a cross-sectional view of the gate valve in the closed position of the flow channel. FIG3 is a cross-sectional view of the gate valve in the open position of the flow channel. FIG4 is a perspective view of the gate valve without the valve body in FIG1. ​​FIG5A and FIG5B are a partial top view and a partial bottom view of the gate valve of FIG4, respectively. FIG6 is a cross-sectional view along line I-I' of FIG5A. FIG7 is a partial enlarged view of the gate valve of FIG3.

Claims

1. A gate valve (10), comprising: The valve housing (100) includes an opening (O) defining a flow path (P) and a valve seat (101). A valve plate (200) is configured to move between a closed position and an open position, wherein in the closed position, the valve plate (200) contacts the valve seat (101) within the valve housing (100) to close the flow channel (P), and in the open position, the valve plate (200) opens the flow channel (P). The valve plate (200) includes a plate (210) having a sealing surface (212) facing the valve seat (101); a seal (220) disposed on the sealing surface (212) or the valve seat (101); a sliding member (240) disposed on the valve plate (200) to guide the movement path of the valve plate (200); and a position adjustment unit configured to adjust the position of the plate (210) in the closed position, wherein the sealing surface (212) has an inclination angle (α) relative to the direction of movement (L) of the plate (210). Wherein, when the direction of movement from the closed position toward the open position is defined as the forward direction, the gate valve (10) further includes: a valve stem (300) coupled to the rear side of the plate (210) with reference to the forward direction, wherein the position adjustment unit includes: a fixing hole (218) formed on the rear side of the plate (210); a rod end (302) formed at the distal end of the valve stem (300) and inserted into the fixing hole (218); and a fixing member (304) configured to fix the rod end (302) to the fixing hole (218), and the fixing position of the fixing hole (218) is adjusted within the rod end (302).

2. The gate valve (10) as described in claim 1, wherein, When the valve plate (200) is in the closed position, the sliding member (240) is configured to be adjacent to a surface of the valve housing (100) on the valve seat (101) side.

3. The gate valve (10) as described in claim 1, wherein, The sliding component (240) includes a plurality of roller components (242, 244) disposed on the valve plate (200).

4. The gate valve (10) as described in claim 3, wherein, When the direction of movement from the closed position toward the open position is defined as the forward direction, at least one of the plurality of roller components (242, 244) is disposed on the front side of the valve plate (200) with reference to the forward direction.

5. The gate valve (10) as described in claim 3, wherein, When the direction of movement from the closed position toward the open position is defined as the forward direction, at least one of the plurality of roller components (242, 244) is disposed on the rear side of the valve plate (200) with reference to the forward direction.

6. The gate valve (10) as described in claim 1, wherein, The gate valve (10) also includes a drive unit (400) configured to drive the movement of the valve stem (300).

7. The gate valve (10) as described in claim 1, wherein, When the sealing surface (212) is the front surface of the plate (210), the plate (210) includes a sealing plate (219a) having the sealing surface (212) and a sidewall (219b) surrounding the sealing plate (219a), the sidewall (219b) having a predetermined height (H) along an axis (K) perpendicular to the center of the opening (O), the predetermined height (H) being measured on the rear surface of the plate (210) opposite to the front surface.

8. The gate valve (10) as described in claim 7, wherein, The fixing hole (218) is an opening that passes through the side wall (219b).

9. A substrate treatment apparatus comprising a gate valve (10) as described in any one of claims 1-8.

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