Brush-type conditioner

Abstract

This invention discloses a brush-type dresser for dressing a wafer polishing pad. The brush-type dresser includes a base and multiple plastic polishing components. The base includes an upper surface, a lower surface opposite to the upper surface, and multiple openings extending through the upper and lower surfaces and spaced apart around the center of the base. The multiple plastic polishing components are respectively disposed within the multiple openings. The hardness of the multiple plastic polishing components is greater than the hardness of the wafer polishing pad, and each plastic polishing component includes multiple first brush teeth protruding from the upper surface and / or multiple second brush teeth protruding from the lower surface. Therefore, this invention has excellent processing performance and application advantages.

Claims

1. A brush-type dresser for dressing a wafer grinding pad, the brush-type dresser comprising: A base includes an upper surface, a lower surface opposite to the upper surface, and a plurality of openings that penetrate the upper surface and the lower surface and are spaced apart around the center of the base; And a plurality of plastic abrasive components are respectively disposed in a plurality of said opening structures, wherein the hardness of the plurality of plastic abrasive components is greater than the hardness of said wafer abrasive pad, and each of said plastic abrasive components includes a plurality of first brush teeth protruding from said upper surface and / or a plurality of second brush teeth protruding from said lower surface.

2. The brush dresser as described in claim 1, wherein, The plurality of said plastic abrasive components have a heat distortion temperature of not less than 149°C as tested according to ASTM D648, a flexural strength of not less than 68 MPa as tested at 73°F according to ASTM D790, and a 10% compressive strength of not less than 102 MPa as tested at 73°F according to ASTM D695.

3. The brush dresser as described in claim 2, wherein, The material of the plastic abrasive component includes polyetheretherketone, polyimide, polybenzimidazole, or amide-imide.

4. The brush trimmer as described in claim 3, wherein, The material of the plastic abrasive component further comprises reinforcing fibers.

5. The brush dresser as described in claim 4, wherein, The reinforcing fiber is graphene fiber, carbon fiber, glass fiber, ceramic fiber, or any combination thereof.

6. The brush dresser as described in claim 3, wherein, The material of the plastic abrasive component further comprises at least one functional filler, and the at least one functional filler is selected from the group consisting of graphite, polytetrafluoroethylene and molybdenum disulfide.

7. The brush dresser as described in any one of claims 2 to 6, wherein, Each of the plastic abrasive components includes a first abrasive surface exposed from the upper surface and a second abrasive surface exposed from the lower surface, the first abrasive surface having a plurality of first brush teeth and the second abrasive surface having a plurality of second brush teeth.

8. The brush dresser as described in claim 7, wherein, The plurality of first brush teeth are arranged as one or more first protrusion clusters, and the plurality of second brush teeth are arranged as one or more second protrusion clusters, and each first or second protrusion cluster includes a central protrusion and a plurality of peripheral protrusions surrounding the central protrusion.

9. The brush trimmer as claimed in claim 7, further comprising a mounting pad, wherein the mounting pad is fixed to the upper surface or the lower surface and configured to avoid the locations of the plurality of opening structures.

10. The brush trimmer as described in claim 9, wherein, The thickness of the mounting pad is greater than the height of the first grinding surface relative to the upper surface, or greater than the height of the second grinding surface relative to the lower surface.

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