Measurement system

Abstract

A system is provided for measuring the state of a rotating member that can rotate around a rotating member axis as a center. The system 100 includes a measuring device 105, which includes a rotating mechanism 106, a support member 107 that can rotate around a support member axis 108 via the rotating mechanism 106, and a displacement meter 109 disposed on the support member 107. The system 100 further includes a reference inclined surface 110, and is configured such that: the displacement meter 109 measures the distance to the reference inclined surface 110; the rotating member 101 is fixed at a designated measuring position; the rotating mechanism 106 rotates the support member 107 at the measuring position of the rotating member 101; and the displacement meter 109 measures the distance to the reference inclined surface 110 in a plurality of scanning angles formed by the rotation of the support member 107, and measures the state of the rotating member 101 based on the distance in the plurality of scanning angles.

Description

Technical Field

[0001] The present invention relates to a measuring system capable of measuring the state of a rotating component in a direct, high-precision and simple manner. Prior Art

[0002] A workpiece is placed at an arbitrary position on the surface of a rotating member, and the workpiece is machined and / or inspected while the rotating member rotates. When the workpiece must be positioned with high precision for machining and / or inspection, the position on the rotating member's surface must be used as the measurement position to directly and accurately measure the rotational angle. For example, if a gyroscope sensor is placed at the measurement position, the rotational angle can be directly measured. Alternatively, the rotational angle can be measured using a rotary encoder. Furthermore, the rightness or parallelism of the rotating member's surface relative to the rotating member's axis and the rotating member's axis relative to a reference plane must be measured with high precision. Machining a workpiece placed on the rotating member's surface without adjusting the rightness or parallelism can result in machining errors. Rightness and parallelism are measured by scanning the rotating member's surface with a displacement meter using, for example, a precision stage or a three-dimensional measuring instrument, and calculating the scan results.

[0003] Patent Document 1 discloses a mobile environment recognition method. The mobile environment recognition method projects conical scanning detection light from a sensor origin, scanning along a conical surface with a collimation direction as its center, onto a measurement object. The conical scanning detection light is then reflected from an intersection circle formed by the conical scanning detection light and the surface of the measurement object. The method measures the distance from the sensor origin to the measurement object, calculates a characteristic value of the intersection circle based on the measured distance, and uses the characteristic value of the intersection circle to determine the shape of the surface of the measurement object. Prior Art Literature Patent Literature

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2011-059071 Summary of the Invention

[0005] Problems that the invention aims to solve

[0006] Even at high precision, the detection resolution of a gyro sensor is only on the order of 1 / 10°. This poses the problem of being unable to measure rotational angles with high accuracy, for example, at the order of 1 / 3600°. Furthermore, the rotary encoder's scale plate must be coaxial with the axis of the rotating component, making it impossible to directly measure the rotational angle at the measured position. Furthermore, due to deformation of the components between the rotating component axis and the measured position, rotary encoders suffer from discrepancies between the rotational angle at the rotating component axis and the actual rotational angle at the measured position. This problem is particularly pronounced when the rotating component axis is horizontal and a gravity load is applied in the rotational direction of the measured position. Furthermore, measuring squareness and parallelism generally requires large-scale equipment, making it difficult to construct a measurement environment in a confined space.

[0007] In the mobile environment recognition method of Patent Document 1, since the measurement result of the distance from the sensor origin to the measurement object changes according to the posture of the measurement object, the characteristic value of the intersection circle obtained from the measurement result also changes. Therefore, there is the following problem: the shape of the surface of the measurement object to be measured will also change.

[0008] Therefore, the object of the present invention is to provide a measuring system that solves the above-mentioned problems and can measure the state of a rotating component in a direct, high-precision and simple manner. Means used to solve problems

[0009] According to one aspect of the present invention, a system for measuring the state of a rotating member rotatable about an axis of the rotating member comprises a measuring device, the measuring device comprising a rotating mechanism, a support member rotatable about the axis of the support member by the rotating mechanism, and a displacement meter disposed on the support member. The system further includes a reference inclined surface and is configured such that the displacement meter measures the distance to the reference inclined surface. The rotating member is fixed at a designated measurement position, the rotating mechanism rotates the supporting member at the measurement position of the rotating member, and the displacement meter measures the distance to the reference inclined surface at a plurality of scanning angles formed by the rotation of the supporting member, and measures the state of the rotating member based on the distances at the plurality of scanning angles.

[0010] According to a specific example of the present invention, in this system, a rotating member is fixed at a plurality of designated measuring positions, a rotating mechanism rotates a supporting member at each designated measuring position of the rotating member, and a displacement meter measures the distance to a reference inclined surface at a plurality of scanning angles formed by the rotation of the supporting member.

[0011] According to a specific example of the present invention, in the system, the displacement meter measures the distance waveform formed by the distance to the reference inclined surface for each scanning angle at each designated measuring position, and measures the rotational movement angle of each designated measuring position of the rotating component based on the phase difference between the distance waveforms at multiple designated measuring positions.

[0012] According to a specific example of the present invention, in the system, the rotating mechanism starts rotating the displacement meter from the same position relative to the rotating member through the supporting member at each designated measuring position.

[0013] According to a specific example of the present invention, in the system, the axis of the supporting member is parallel to the axis of the rotating member.

[0014] According to a specific example of the present invention, in the system, the displacement meter measures the distance to the reference inclined surface along a direction parallel to the axis of the support member.

[0015] According to a specific example of the present invention, in the system, the displacement meter measures the distance to the reference inclined surface along a direction inclined relative to the axis of the supporting member.

[0016] According to one specific example of the present invention, in this system, a measuring device is disposed on the surface of a rotating member, and a reference inclined surface is disposed so as to face the measuring device while being inclined at a specific angle relative to a plane perpendicular to the axis of the rotating member. Alternatively, the reference inclined surface is disposed on the surface of the rotating member while being inclined at a specific angle relative to a plane perpendicular to the axis of the rotating member, and the measuring device is disposed so as to face the reference inclined surface in a plane perpendicular to the axis of the rotating member.

[0017] According to one specific example of the present invention, in this system, when a rotating member rotates in a manner such that the surface of the rotating member is approximately perpendicular to the axis of the rotating member, the right angle of a portion of the surface of the rotating member where the measuring device or the reference inclined surface is disposed relative to the axis of the rotating member is measured from the distance to the reference inclined surface.

[0018] According to one specific example of the present invention, in this system, when a rotating member rotates so that the surface of the rotating member is approximately parallel to the axis of the rotating member, the parallelism of a portion of the surface of the rotating member where the measuring device or the reference inclined surface is located relative to the axis of the rotating member is measured from the distance to the reference inclined surface. Effects of the Invention

[0019] According to the present invention, the measuring system can measure the state of the rotating component in a direct, high-precision and simple manner.

[0020] Furthermore, other objects, features and advantages of the present invention will become apparent from the following description of the embodiments of the present invention with reference to the accompanying drawings. Simple diagram description

[0021] FIG1 is a front view of a system according to one embodiment of the present invention, which is for measuring the state of a rotating member rotatable about its axis. FIG. 2A is a perspective view of a rotating member and a rotating device in the system of the embodiment of FIG. 1 . FIG2B is a perspective view of the rotating member, the rotating device, and the measuring device in the system of the embodiment of FIG1. FIG2C is a perspective view of a measuring device in the system of the embodiment of FIG1. 3A is a front view and a top view of the embodiment of the system of FIG. 1 , in which the rotational movement angle of the rotating member is 0° and the displacement meter is located at the scanning starting point. 3B is a front view and a top view of the embodiment of the system of FIG. 1 , in which the rotational movement angle of the rotating member is 180° and the displacement meter is located at the scanning starting point. 4A is a graph showing calculated values ​​of measured distances with respect to scanning angles when the rotational movement angles of the rotating member in the system of the embodiment of FIG. 1 are 0° and 180°. FIG. 4B is a graph showing measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 1 is 0°. FIG. 5A is a graph showing a scanning radius with respect to an inclination angle when a target measurement resolution of the rotational movement angle of the rotating member is satisfied in the system of the embodiment of FIG. 1 . FIG. 5B is a graph showing double amplitudes of a distance waveform with respect to an inclination angle in the system of the embodiment of FIG. 1 . 6A is a perspective view showing a case where the arrangement position of the measuring device relative to the rotating member is changed from the system of the embodiment of FIG. 1 so that the axis of the supporting member and the axis of the rotating member are aligned. FIG6B is a perspective view showing a case where the system of the embodiment of FIG1 is modified so that the reference inclined surface is arranged on the rotating member. FIG7A is a front view of a system according to another embodiment of the present invention, the system being for measuring the state of a rotating member rotatable about its axis. FIG. 7B is a perspective view of the system according to the embodiment of FIG. 7A . FIG8A is a perspective view of a rotating member and a rotating device in the system of the embodiment of FIG7A. FIG8B is a perspective view of the rotating member, the rotating device, and the measuring device in the system of the embodiment of FIG7A. 9A is a side view of the system of the embodiment of FIG. 7A , in which the rotational movement angle of the rotating member is 0° and the displacement meter is located at the scanning start point. 9B is a side view of the system of the embodiment of FIG. 7A , in which the rotational movement angle of the rotating member is 90° and the displacement meter is located at the scanning start point. 9C is a side view of the system of the embodiment of FIG. 7A , in which the rotational movement angle of the rotating member is 180° and the displacement meter is located at the scanning start point. FIG. 10A is a graph showing measured values ​​of measured distances with respect to scan angles when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 7A is 0°. FIG. 10B is a graph showing measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 7A is 90°. FIG. 10C is a graph showing measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 7A is 180°. FIG11 is a perspective view showing a case where the system of the embodiment of FIG7A is modified so that the reference inclined surface is arranged on the rotating member. FIG. 12 is a front view of a system according to another embodiment of the present invention, wherein the system is for measuring the state of a rotating member that can rotate about the axis of the rotating member. FIG13 is a perspective view of a measuring device in the system of the embodiment of FIG12. FIG. 14 is a graph showing calculated values ​​of measured distances with respect to scanning angles when the rotational movement angles of the rotating member in the system of the embodiment of FIG. 12 are 0° and 180°. 15A is a front view showing a situation in which the rotational movement angle of the rotating member in the system of the embodiment of FIG. 1 is 0° and the scanning angle of the displacement meter is fixed. 15B is a front view showing a case where the rotational movement angle of the rotating member in the system of the embodiment of FIG. 1 is 90° and the scanning angle of the displacement meter is fixed. 15C is a front view showing a situation in which the rotational movement angle of the rotating member in the system of the embodiment of FIG. 1 is 180° and the scanning angle of the displacement meter is fixed. 16 is a front view of the system of the embodiment of FIG. 1 in which the rotational movement angle of the rotating member is fixed and the displacement meter is used to measure the right angle of the surface of the rotating member. 17 is a front view of the system of the embodiment of FIG. 7A in which the rotational movement angle of the rotating member is fixed and the parallelism of the surface of the rotating member is measured by the rotation displacement meter. 18A is a front view and a top view of a system according to another embodiment of the present invention, wherein the system is for measuring the state of a rotating member rotatable about the axis of the rotating member. FIG. 18B is a front view and a top view of the system of the embodiment of FIG. 18A when the rotational movement angle of the rotating member is 180°. 18C is a front view and a top view of the embodiment of FIG. 18A in which the rotational movement angle of the rotating member in the system is 180° and the reference inclined surface is configured so that the inclination angle becomes the same as that of FIG. 18A . FIG. 19A is a graph showing measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 18A is 0°. FIG. 19B is a graph showing measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 18A is 180°. 19C is a graph showing measured values ​​of the measured distance for the scanning angle when the rotational movement angle of the rotating member in the system of the embodiment of FIG. 18A is 180° and the reference inclined surface is configured so that the inclination angle is the same as that in FIG. 18A . Implementation Method

[0022] Mode for carrying out the invention

[0023] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the inventions of these embodiments.

[0024] Referring to Figures 1 to 5B , a system 100, one embodiment of the present invention, will be described. System 100 is used to measure the state of a rotating member 101 that is rotatable about a rotating member axis 102. System 100 includes a measuring device 105, which includes a rotation mechanism 106, a support member 107 that is rotatable about a support member axis 108 by means of the rotation mechanism 106, and a displacement meter 109 disposed on the support member 107. Rotating member 101 can also be rotated by a rotating device 104. While rotating device 104 may include a motor, a speed reducer, a cam mechanism, or the like to rotate rotating member 101, this is not limiting; any configuration capable of rotating rotating member 101 is sufficient. Rotating device 104 may also include a control unit for controlling the rotation of rotating member 101, although the control unit may also be located external to rotating device 104. While the rotating mechanism 106 includes a motor, a speed reducer, a cam mechanism, and the like to rotate the support member 107, this is not limited to these configurations and any configuration may be used as long as it can rotate the support member 107. The rotating mechanism 106 may also include a control unit for controlling the rotation of the support member 107 and the measurement of the displacement meter 109, but the control unit of the rotating mechanism 106 may also be located outside the rotating mechanism 106.

[0025] The system 100 further includes a reference inclined surface 110. The reference inclined surface 110 is configured so that an inclination angle 112 forms an angle φ relative to a plane perpendicular to the axis 102 of the rotating member. The displacement meter 109 is configured to measure the distance to the reference inclined surface 110. Although the displacement meter 109 may include a laser rangefinder to measure the distance to the reference inclined surface 110, the configuration is not limited thereto. For example, a test indicator may be included, as long as the configuration can measure the distance to the reference inclined surface 110. The reference inclined surface 110 may be a flat surface and its material is not particularly limited, but it is preferably configured to provide good compatibility with the displacement meter 109 when measuring the distance to the reference inclined surface 110.

[0026] Rotating member 101 is fixed at a designated measurement position. Rotating mechanism 106 rotates support member 107 at the designated measurement position of rotating member 101. Displacement meter 109 measures the distance to reference inclined surface 110 at multiple scanning angles formed by the rotation of support member 107. FIG3A shows a situation where the designated measurement position of rotating member 101 is at a rotational movement angle θ = 0°, and displacement meter 109 is positioned at the scanning start point (α = 0°) as the position at which displacement meter 109 starts rotation. The rotating member 101 is fixed at a rotational movement angle θ = 0° as the designated measurement position. The rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 0° as the designated measurement position of the rotating member 101. The displacement meter 109 measures the distance to the reference inclined surface 110 at a scan angle α, which is an arbitrary rotation angle formed by the rotation of the support member 107 from the scan start point (α = 0°). Figure 3B shows a case where the designated measurement position of the rotating member 101 is a rotational movement angle θ = 180°, and the displacement meter 109 is located at the scan start point (α = 0°) as the position at which the displacement meter 109 starts rotating. The rotating member 101 is fixed at a rotational movement angle θ = 180° as a designated measurement position, the rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 180° as a designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at an arbitrary rotation angle, i.e., a scanning angle α, formed by the rotation of the support member 107 from the scanning start point (α = 0°).

[0027] When the scanning angle α of the displacement meter 109 is 0° to 360°, the measured distance L from the displacement meter 109 to the reference inclined surface 110 can be obtained as a distance waveform of the following formula. [Formula 1] Here, L max θ is the maximum distance measured from the displacement meter 109 to the reference inclined surface 110 when the rotational movement angle θ is a specified measurement position of the rotating member 101. r is the scanning radius of the displacement meter 109. For example, if the displacement meter 109 is a laser rangefinder, it is the distance from the support member axis 108 to the laser beam emitted by the displacement meter 109. Furthermore, L o θ is the reference distance. The measured distance L from the displacement meter 109 to the reference inclined surface 110 is the same amplitude with the reference distance L o θ as the midpoint. The double amplitude L p can be obtained as shown in the following formula. [Formula 2] According to the above formula, since the dual amplitude Lp has no relationship with the maximum distance detection value Lmaxθ and the reference distance Loθ, even if the maximum distance detection value Lmaxθ and the reference distance Loθ change due to replacement of the displacement meter 109, changes in the installation environment, etc., as long as the scanning radius r and the angle φ of the tilt angle 112 do not change, the same distance waveform of the measured distance L using the dual amplitude Lp can be obtained, and excellent redundancy is achieved.

[0028] As shown in FIG4A , the distance waveforms of the measured distance L for the scanning angle α at the designated measurement position of the rotating member 101 and the rotational movement angle θ of 0° and 180° can be obtained using Equation 1. Furthermore, in FIG4A , the distance waveform is adjusted so that the reference distance L o θ and L o coincide with each other and are independent of the rotational movement angle θ. For example, in Equation 1, the distance waveform is adjusted so that the reference distance L o θ coincides with each other when α + θ = 90° and is independent of the rotational movement angle θ. Since the double amplitude L p is independent of the maximum distance detection value L max θ and the reference distance L o θ, the adjustment of the reference distance L o θ can also be handled numerically. Furthermore, as shown in FIG4B , the distance waveform of the measured distance L for the scanning angle α at the designated measurement position of the rotating member 101 and the rotational movement angle θ of 0° can be obtained using the displacement meter 109. Since the phase of the distance waveform of the measured distance L changes in response to the rotational movement angle θ of the measurement position of the rotating component 101, the displacement meter 109 can measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 for each scanning angle α at the rotational movement angle θ of each specified measurement position, and obtain the rotational movement angle θ of each specified measurement position of the rotating component 101 based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ of multiple specified measurement positions. For example, if the reference distance L o θ is adjusted as described above to be consistent with L o and not dependent on the rotational movement angle θ, and L o is numerically set to 0, when the rotating member 101 is fixed at the rotational movement angle θ=0 as a designated measurement position, L(θ=0)=rcosαtanφ can be obtained by the displacement meter 109 for each scanning angle α as a distance waveform of the measured distance L. When the rotating member 101 is fixed at the rotational movement angle θ=θ 0 as another designated measurement position, L(θ=θ 0)=rcos(α+θ 0)tanφ can be obtained by the displacement meter 109 for each scanning angle α as a distance waveform of the measured distance L. Since the rotating component 101 rotates and causes the measurement position to rotate and move by the rotational movement angle θ0, the displacement meter 109 of the measuring device 105 arranged on the rotating component 101 will also rotate and move by the rotational movement angle θ0, thereby causing the phase of the distance waveform of the measurement distance L to also change by θ0. Therefore, the displacement meter 109 can measure the distance waveform of the measurement distance L for each scanning angle α at each of the rotational movement angles θ=0 and θ0 as two designated measurement positions, and obtain the rotational movement angle θ0 of each designated measurement position of the rotating component 101 based on the phase difference between the distance waveforms of the measurement distance L at the rotational movement angles θ=0 and θ0 as two designated measurement positions.That is, the rotational movement angle θ when the rotating member 101 is rotated can be determined by obtaining the phase difference θ0 between the distance waveforms of the two measured distances L. In this way, the rotational movement angle θ, representing the state of the rotating member 101, or the measured position, can be measured based on the measured distances L within the plurality of scan angles α. Furthermore, while the control unit of the measuring device 105 can also determine the rotational movement angle θ based on the measured distances L obtained by the displacement meter 109, this is not limiting. For example, the rotational movement angle θ can also be determined by a processing device located outside the rotating mechanism 106.

[0029] The rotational movement angle θ, which is the measured position of the rotating member 101, can be obtained from the distance waveform of the measured distance L based on the point group data based on the measured values ​​as shown in FIG4B , or can be obtained from the distance waveform of the measured distance L after curve fitting the point group data based on the measured values ​​as shown in FIG4B .

[0030] Furthermore, the scanning starting point, which is the position at which the rotating mechanism 106 begins rotating the displacement meter 109 relative to the rotating member 101 through the support member 107, can be any position relative to the rotating member 101. However, the rotating mechanism 106 must begin rotating the displacement meter 109 through the support member 107 from the scanning starting point, which is the same position relative to the rotating member 101, at the rotational movement angle θ for each designated measurement position. For example, in FIG3A , the designated measurement position of the rotating member 101 is a rotational movement angle θ = 0°, and the displacement meter 109 is located at the scanning starting point (α = 0°) as the position at which the displacement meter 109 begins rotating. In FIG3B , on the other hand, the designated measurement position of the rotating member 101 is a rotational movement angle θ = 180°, and the displacement meter 109 is located at the scanning starting point (α = 0°) as the position at which the displacement meter 109 begins rotating. Thus, while the rotation mechanism 106 must initiate rotation of the displacement meter 109 through the support member 107 from the scan start point (α = 0°) at the same position relative to the rotating member 101, at all designated measurement positions, including the rotational movement angle θ of 0° and 180°, the scan start point α is not limited to 0° and can be any angle. Furthermore, while the displacement meter 109 can rotate in any direction, the rotation mechanism 106 must initiate rotation of the displacement meter 109 in the same direction through the support member 107 at all designated measurement positions, at the rotational movement angle θ.

[0031] According to [Formula 1], the detection sensitivity ΔL becomes maximum when α+θ=90° (or 270°) and can be obtained as the following formula. [Formula 3] Here, Δθ is the target measurement resolution of the rotational movement θ, and can be obtained as the following formula. [Formula 4] The scanning radius r, the angle φ of the tilt angle 112, and the resolution (or detection sensitivity ΔL) of the displacement meter 109 can be selected so as to satisfy the target measurement resolution Δθ for the rotational movement angle θ. For example, if the target measurement resolution Δθ for the rotational movement θ is 1 / 3600° and a displacement meter 109 with a detection sensitivity ΔL of 0.001 mm is used, the scanning radius r for the angle φ of the tilt angle 112 can be obtained, as shown in Figure 5A, while satisfying the target measurement resolution Δθ for the rotational movement angle θ of the rotating member 101. For example, if the angle φ of the tilt angle 112 is set to 45°, the scanning radius r for satisfying the target measurement resolution Δθ for the rotational movement angle θ is greater than 200 mm. Furthermore, according to [Formula 2], the double amplitude Lp for the angle φ of the tilt angle 112 can be obtained, as shown in Figure 5B, while satisfying the target measurement resolution Δθ for the rotational movement angle θ of the rotating member 101. For example, if the angle φ of the tilt angle 112 is set to 45°, the double amplitude Lp that satisfies the target measurement resolution Δθ for the rotational movement angle θ is 400 mm or greater. The relationship between the angle φ of the tilt angle 112 and the scanning radius r is a value that can be practically used for device selection and design, meaning that the present invention can detect rotational movement angle θ with high accuracy, on the order of Δθ = 1 / 3600°. Furthermore, since the method does not process individual distance waveforms for the measured distance L, but only compares distance waveforms for two distances L with different phase differences, the dimensional accuracy of the angle φ of the tilt angle 112 and the scanning radius r is not particularly limited. Furthermore, according to [Equation 4], the displacement meter 109 with the target detection sensitivity ΔL can be selected based on the angle φ of the tilt angle 112 and the scanning radius r.

[0032] In the system 100 of Figures 1 to 3B, the measuring device 105 is arranged on the rotating member 101 such that the supporting member axis 108 is not aligned with the rotating member axis 120, that is, offset from the rotating member axis 120. On the other hand, as shown in FIG6A , the measuring device 105 may be arranged on the rotating member 101 so that the support member axis 108 is aligned with the rotating member axis 120. Even if the arrangement position of the measuring device 105 relative to the rotating member 101 is changed, as long as the support member axis 108 is parallel to the rotating member axis 102, the displacement meter 109 can still measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 for each scanning angle α at the rotational movement angle θ as each designated measurement position, similar to the system 100 of FIG1 to FIG3B . The rotational movement angle θ at each designated measurement position of the rotating member 101 can be obtained based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ as a plurality of designated measurement positions.

[0033] In system 100 of Figures 1-3B , measuring device 105 is disposed on surface 103 of rotating member 101, and reference inclined surface 110 is disposed so as to be inclined at an angle φ of 112 relative to a plane perpendicular to rotating member axis 102 and facing measuring device 105. On the other hand, as shown in FIG6B , a reference inclined surface 110 may be arranged on the surface 103 of the rotating member 101 at an angle φ of 112 relative to a plane perpendicular to the rotating member axis 102, and the measuring device 105 may be arranged in a plane perpendicular to the rotating member axis 102 so as to face the reference inclined surface 110. Even if the arrangement positions of the measuring device 105 and the reference inclined surface 110 are changed, as long as the support member axis 108 is parallel to the rotating member axis 102, the displacement meter 109 can still measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 for each scanning angle α at the rotational movement angle θ as each designated measurement position, similar to the system 100 of FIG1 to FIG3B . The rotational movement angle θ for each designated measurement position of the rotating member 101 can be obtained based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ as a plurality of designated measurement positions.

[0034] Referring to Figures 7A to 10C , a system 100, another embodiment of the present invention, will be described. This system 100 is used to measure the state of a rotating member 101 that is rotatable about its axis 102. In the system 100 of Figures 1 to 3B , the rotating member 101 is positioned so that its surface 103 is approximately perpendicular to its axis 102. In contrast, in the system 100 of Figures 7A to 9C , the rotating member 101 is positioned so that its surface 103 is approximately parallel to its axis 102. Otherwise, the configuration of the system 100 of Figures 7A to 9C is identical to that of the system 100 of Figures 1 to 3B .

[0035] Rotating member 101 is fixed at a designated measurement position. Rotating mechanism 106 rotates support member 107 at the designated measurement position of rotating member 101. Displacement meter 109 measures the distance to reference inclined surface 110 at multiple scanning angles formed by the rotation of support member 107. Figure 9A shows the rotating member 101 at a designated measurement position with a rotational movement angle θ = 0°, and displacement meter 109 at the scanning start point (α = 0°) as the position at which displacement meter 109 begins rotation. The rotating member 101 is fixed at a rotational movement angle θ = 0° as the designated measurement position. The rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 0° as the designated measurement position of the rotating member 101. The displacement meter 109 measures the distance to the reference inclined surface 110 at a scan angle α, which is an arbitrary rotation angle formed by the rotation of the support member 107 from the scan start point (α = 0°). Figure 9B shows a case where the designated measurement position of the rotating member 101 is a rotational movement angle θ = 90°, and the displacement meter 109 is located at the scan start point (α = 0°) as the position where the displacement meter 109 starts rotating. The rotating member 101 is fixed at a rotational movement angle θ = 90° as a designated measurement position. The rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 90° as the designated measurement position of the rotating member 101. The displacement meter 109 measures the distance to the reference inclined surface 110 at a scan angle α, which is an arbitrary rotation angle formed by the rotation of the support member 107 from the scan starting point (α = 0°). Figure 9C shows a case where the designated measurement position of the rotating member 101 is a rotational movement angle θ = 180°, and the displacement meter 109 is located at the scan starting point (α = 0°) as the position where the displacement meter 109 starts rotating. The rotating member 101 is fixed at a rotational movement angle θ = 180° as a designated measurement position, the rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 180° as a designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at an arbitrary rotation angle, i.e., a scanning angle α, formed by the rotation of the support member 107 from the scanning start point (α = 0°).

[0036] As shown in FIG10A , the displacement meter 109 can obtain a distance waveform of the measured distance L for the scanning angle α when the rotational movement angle θ is 0° at the designated measurement position of the rotating member 101. Furthermore, as shown in FIG10B , the displacement meter 109 can obtain a distance waveform of the measured distance L for the scanning angle α when the rotational movement angle θ is 90° at the designated measurement position of the rotating member 101. Furthermore, as shown in FIG10C , the displacement meter 109 can obtain a distance waveform of the measured distance L for the scanning angle α when the rotational movement angle θ is 180° at the designated measurement position of the rotating member 101. Because the phase of the distance waveform of the measured distance L changes depending on the rotational movement angle θ of the measured position of the rotating member 101, the displacement meter 109 can measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 for each scan angle α at the rotational movement angle θ of each designated measured position. The rotational movement angle θ at each designated measured position of the rotating member 101 can be obtained based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ of the plurality of designated measured positions. In other words, the rotational movement angle θ when the rotating member 101 is rotationally moved can be obtained by obtaining the phase difference θ between the distance waveforms of the two measured distances L. In this way, the rotational movement angle θ at the measured position, i.e., the state of the rotating member 101, can be measured based on the measurement distance L at the plurality of scan angles α.

[0037] The rotational movement angle θ, which serves as the measured position of the rotating member 101, can be obtained from the distance waveform of the measured distance L based on the point group data based on the measured values, as shown in Figures 10A to 10C . Alternatively, it can be obtained from the distance waveform of the measured distance L obtained by curve fitting the point group data based on the measured values, as shown in Figures 10A to 10C . Furthermore, the distance waveform of the measured distance L does not need to be obtained within the range of scanning angle α from 0° to 360°. The distance waveform of the measured distance L within the range of scanning angle α that is not measured can also be supplemented with a distance waveform obtained by curve fitting the point group data based on the measured values, as shown in Figures 10A to 10C .

[0038] In the system 100 of Figures 7A to 9C, the measuring device 105 is disposed on the surface 103 of the rotating member 101, and the reference inclined surface 110 is configured to be inclined at an angle φ of inclination angle 112 relative to a plane perpendicular to the rotating member axis 102 and facing the measuring device 105. On the other hand, as shown in FIG11 , a reference inclined surface 110 may be arranged on the surface 103 of the rotating member 101 at an angle φ of 112 relative to a plane perpendicular to the rotating member axis 102, and the measuring device 105 may be arranged in a plane perpendicular to the rotating member axis 102 so as to face the reference inclined surface 110. Even if the arrangement positions of the measuring device 105 and the reference inclined surface 110 are changed, as long as the support member axis 108 is parallel to the rotating member axis 102, the displacement meter 109 can still measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 for each scanning angle α at the rotational movement angle θ as each designated measurement position, similar to the system 100 of FIG7A to FIG9C . The rotational movement angle θ for each designated measurement position of the rotating member 101 can be obtained based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ as a plurality of designated measurement positions.

[0039] Referring to Figures 12 to 14 , a system 100, another embodiment of the present invention, will be described. System 100 is used to measure the state of a rotating member 101 that is rotatable about a rotating member axis 102. In the system 100 of Figures 1 to 3B , displacement meter 109 measures the distance to a reference inclined surface 110 along a direction parallel to support member axis 108. In contrast, in the system 100 of Figures 12 and 13 , displacement meter 109 measures the distance to a reference inclined surface 110 along a direction that is tilted relative to support member axis 108 by an angle β. Furthermore, in the system 100 of Figures 1 to 3B , the displacement meter 109 is disposed on the support member 107 at a distance from the support member axis 108 that scans the radius r. Meanwhile, in the system 100 of Figures 12 and 13 , the displacement meter 109 is disposed on the support member 107 so that the starting point for measuring the distance to the reference inclined surface 110 is substantially aligned with the support member axis 108. For example, if the displacement meter 109 is a laser rangefinder, the portion of the laser beam emitted by the displacement meter 109 is substantially aligned with the support member axis 108. Otherwise, the configuration of the system 100 of Figures 12 and 13 is the same as that of the system 100 of Figures 1 to 3B .

[0040] When the displacement meter 109 scans at an angle α of 0° to 360°, the measured distance L c from the displacement meter 109 to the reference inclined surface 110 can be obtained as a distance waveform represented by the following equation. [Formula 5] Here, LmaxCθ is the maximum distance detected from displacement meter 109 to reference inclined surface 110 when the rotational movement angle θ is at a specified measurement position of rotating member 101. Furthermore, the double amplitude LpC of the measured distance LC from displacement meter 109 to reference inclined surface 110 can be obtained as the following formula. [Formula 6]

[0041] As shown in Figure 14, the distance waveforms for the measured distance LC for the scanning angle α at the specified measurement position of the rotating member 101, when the rotational movement angle θ is 0° and 180°, can be obtained from [Equation 5]. Furthermore, in Figure 14, the distance waveforms are adjusted so that the reference distance L o θ coincides with the reference distance L o θ, independent of the rotational movement angle θ. For example, in [Equation 5], the distance waveforms are adjusted so that the reference distance L o θ coincides with L o, independent of the rotational movement angle θ, when α + θ = 90°. Because the phase of the distance waveform of the measured distance LC changes depending on the rotational movement angle θ of the measurement position of the rotating member 101, the displacement meter 109 can measure the distance waveform of the measured distance LC from the displacement meter 109 to the reference inclined surface 110 for each scan angle α at the rotational movement angle θ of each designated measurement position. The rotational movement angle θ at each designated measurement position of the rotating member 101 can be obtained based on the phase difference between the distance waveforms of the measured distance LC at the rotational movement angle θ of the plurality of designated measurement positions. In other words, the rotational movement angle θ when the rotating member 101 is rotationally moved can be obtained by obtaining the phase difference θ between the distance waveforms of the two measured distances LC. In this way, the rotational movement angle θ at the measurement position, i.e., the state of the rotating member 101, can be measured based on the measured distance LC at the plurality of scan angles α.

[0042] Referring to Figures 15A to 16 , a system 100 for measuring the state of a rotating member 101 capable of rotating about its axis 102 will be described. The configuration of system 100 in Figures 15A to 16 is identical to that of system 100 in Figures 1 to 3B . Displacement meter 109 of measuring device 105 is fixed relative to rotating member 101 at a scanning angle α. Displacement meter 109 measures the distance to reference inclined surface 110 while rotating member 101 through 360°. For example, as shown in FIG15A , the displacement meter 109 measures the distance to the reference inclined surface 110 when the rotational movement angle θ of the rotating member 101 is 0°. As shown in FIG15B , the displacement meter 109 measures the distance to the reference inclined surface 110 when the rotational movement angle θ of the rotating member 101 is 90°. As shown in FIG15C , the displacement meter 109 measures the distance to the reference inclined surface 110 when the rotational movement angle θ of the rotating member 101 is 180°. While rotating the rotating member 101 360°, the inclination of the rotating member 101 and / or the reference inclined surface 110 is adjusted so that the distance to the reference inclined surface 110 measured by the displacement meter 109 remains constant. For example, the reference inclined surface 110 may be fixed, and the inclination of the rotating device 104 that rotates the rotating member 101 may be adjusted relative to the reference inclined surface 110. Alternatively, the rotating device 104 may be fixed to the reference surface 111, and the inclination of the reference inclined surface 110 may be adjusted relative to the rotating member 101. In this way, the reference inclined surface 110 is positioned perpendicular to the rotating member axis 102 of the rotating member 101. Furthermore, the rotating member 101 may not rotate 360°, but may rotate less than 360°, such as 180°.

[0043] As shown in Figure 16, while the rotating member 101 is rotating so that its surface 103 is approximately perpendicular to the rotating member axis 102, the rotational movement angle θ of the rotating member 101 is fixed, and the rotation mechanism 106 rotates the displacement meter 109. The displacement meter 109 measures the distance to the reference inclined surface 110 at two scanning angles α. For example, as shown in Figure 16, the displacement meter 109 is fixed so that the scanning angle α = αs, and the displacement meter 109 measures the distance Ls to the reference inclined surface 110. The displacement meter 109 is rotated and fixed so that the scanning angle α = αe = αs + 180°, and the displacement meter 109 measures the distance Le to the reference inclined surface 110. The right angle δv of the portion of the surface 103 of the rotating member 101 where the measuring device 105 is located relative to the rotating member axis 102 per any reference length Lref can be defined by the displacement amount according to the following equation. [Formula 7] Furthermore, the term "substantially perpendicular" means that the portion of the surface 103 of the rotating member 101 where the measuring device 105 is disposed is inclined relative to a plane perpendicular to the rotating member axis 102 by a right angle δv. The right angle δv of the portion of the surface 103 of the rotating member 101 where the measuring device 105 is disposed relative to the rotating member axis 102 can be obtained using [Formula 7]. Furthermore, the right angle δv0 of the rotating member axis 102 relative to the reference plane 111 and the angle φ of the reference inclined plane 110 relative to the reference plane 111 are the same value. The right angle δv0 can be obtained, for example, using a precision level or by calculating the maximum and minimum heights of the reference inclined plane 110 from the reference plane 111. Similarly to the system 100 of Figure 15A to Figure 16, the right angle δv of the portion of the surface 103 of the rotating member 101 where the reference inclined plane 110 is disposed relative to the rotating member axis 102 can be obtained.

[0044] Referring to FIG17 , a system 100 for measuring the state of a rotating member 101 capable of rotating about a rotating member axis 102 will be described. The configuration of the system 100 in FIG17 is the same as that of the system 100 in FIG7A to FIG9C . The displacement meter 109 of the measuring device 105 is fixed relative to the rotating member 101 at a scanning angle α. The displacement meter 109 measures the distance to a reference inclined surface 110 while rotating the rotating member 101. While rotating the rotating member 101, the inclination of the rotating member 101 and / or the reference inclined surface 110 is adjusted so that the distance to the reference inclined surface 110 measured by the displacement meter 109 remains constant. This arrangement positions the reference inclined surface 110 perpendicular to the rotating member axis 102 of the rotating member 101.

[0045] As shown in FIG17 , when rotating member 101 rotates so that surface 103 of rotating member 101 is approximately parallel to rotating member axis 102, similar to the systems of FIG15A to FIG16 , while rotational movement angle θ of rotating member 101 is fixed, rotation mechanism 106 rotates displacement meter 109, causing displacement meter 109 to measure the distance to reference inclined surface 110 at two scanning angles α. For example, as shown in FIG17 , if displacement meter 109 is fixed so that scanning angle α = αs, displacement meter 109 will measure distance Ls to reference inclined surface 110. If displacement meter 109 is rotated and fixed so that scanning angle α = αe = αs + 180°, displacement meter 109 will measure distance Le to reference inclined surface 110. The parallelism δp of the portion of the surface 103 of the rotating member 101 where the measuring device 105 is disposed relative to the rotating member axis 102 per any reference length Lref can be defined by the displacement amount in the following formula. [Formula 8] Furthermore, the term "substantially parallel" means that the portion of the surface 103 of the rotating member 101 on which the measuring device 105 is disposed is tilted relative to a plane parallel to the rotating member axis 102 according to parallelism δp. The parallelism δp of the portion of the surface 103 of the rotating member 101 on which the measuring device 105 is disposed relative to the rotating member axis 102 can be obtained using [Formula 8]. Furthermore, the parallelism δp0 of the rotating member axis 102 relative to the reference plane 111 is the same as the angle φ of the reference inclined plane 110 and can be obtained using, for example, a square. Similarly to the system 100 of FIG. 17 , the parallelism δp of the portion of the surface 103 of the rotating member 101 on which the reference inclined plane 110 is disposed relative to the rotating member axis 102 can be obtained for the system 100 of FIG. 11 .

[0046] Referring to Figures 18A to 19C , a system 100, another embodiment of the present invention, is described. System 100 is used to measure the state of a rotating member 101 rotatable around a rotating member axis 102. A reference inclined surface 110 is perpendicular to the surface 103 of the rotating member 101 and is arranged with an inclination angle 112 at an angle φ relative to the rotating member axis 102. The central axis 113 is set perpendicular to the rotating member axis 102 and is contained within the reference inclined surface 110. The measuring device 105 is arranged such that the supporting member axis 108 is perpendicular to both the rotating member axis 102 and the central axis 113, and the measuring device 105 faces the reference inclined surface 110. Figure 18A shows a rotational movement angle θ = 0° as the designated measurement position of the rotating member 101, and the displacement meter 109 is positioned at the scanning start point (α = 0°) as the position at which the displacement meter 109 begins rotation. The rotating member 101 is fixed at a rotational movement angle θ = 0° as a designated measurement position. The rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 0° as the designated measurement position of the rotating member 101. The displacement meter 109 measures the distance to the reference inclined surface 110 at a scanning angle α, which is an arbitrary rotation angle formed by the rotation of the support member 107 from the scanning start point (α = 0°). As shown in Figure 19A , the displacement meter 109 obtains a distance waveform of the measured distance L for the scanning angle α when the rotational movement angle θ is 0° as the designated measurement position of the rotating member 101. In Figure 19A , the measured distance L is measured at scanning angles α = 0° to 180°.

[0047] FIG18B shows a case where the designated measurement position of the rotating member 101 is at a rotational movement angle θ = 180°, and the displacement meter 109 is located at the scanning start point (α = 0°) as the position at which the displacement meter 109 starts rotation. The rotating member 101 is fixed at a rotational movement angle θ = 180° as the designated measurement position. The rotation mechanism 106 rotates the support member 107 at a rotational movement angle θ = 180° as the designated measurement position of the rotating member 101. The displacement meter 109 measures the distance to the reference inclined surface 110 at a predetermined rotation angle, i.e., a scanning angle α, formed by the rotation of the support member 107 from the scanning start point (α = 0°). As shown in FIG19B , the displacement meter 109 obtains a distance waveform of the measured distance L for the scanning angle α when the designated measurement position of the rotating member 101 is at a rotational movement angle θ of 180°. 19B , the measured distance L is measured when the scanning angle α is 90° to 180°.

[0048] By comparing the distance waveforms of the measured distance L obtained in FIG. 19A and FIG. 19B , a phase difference of 180° + 2δp is observed. This allows the parallelism δp of the portion of the surface 103 of the rotating member 101 on which the reference inclined surface 110 is disposed relative to the rotating member axis 102 to be determined. Furthermore, since the distance waveform of the measured distance L is obtained relative to one surface of the reference inclined surface 110 in FIG. 18A , and the distance waveform of the measured distance L is obtained relative to the other surface of the reference inclined surface 110 in FIG. 18B , the parallelism of the two surfaces of the reference inclined surface 110 is preferably high.

[0049] FIG18C shows a case where the rotating member 101 is positioned at a rotational movement angle θ = 180° as the designated measurement position, the reference inclined surface 110 is positioned so that the angle φ of the tilt angle 112 is the same as in FIG18A , and the displacement meter 109 is positioned at the scanning start point (α = 0°) as the position at which the displacement meter 109 starts rotation. The rotating member 101 is fixed at a rotational movement angle θ = 180° as the designated measurement position, the rotating mechanism 106 rotates the support member 107 at a rotational movement angle θ = 180° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at a scan angle α, an arbitrary rotation angle formed by the rotation of the support member 107 from the scanning start point (α = 0°). As shown in FIG19C , the displacement meter 109 can obtain a distance waveform of the measured distance L for the scanning angle α when the rotational movement angle θ is 180° at the designated measurement position of the rotating member 101. In FIG19C , the measured distance L is measured when the scanning angle α is between 90° and 180°.

[0050] By comparing the distance waveforms of the measured distance L obtained in FIG19A and FIG19C , a phase difference 2δp can be obtained. This allows the parallelism δp of the portion of the surface 103 of the rotating member 101 on which the reference inclined surface 110 is disposed relative to the rotating member axis 102 to be determined. Furthermore, in FIG18A and FIG18C , the distance waveforms of the measured distance L can be obtained for the same surface of the reference inclined surface 110. Furthermore, although the angle φ of the inclined angle 112 in FIG18A and the angle φ of the inclined angle 112 in FIG18C are not actually the same, the difference between these angles φ can be simply manifested as the difference in the double amplitudes Lp of the two distance waveforms of the measured distance L. By normalizing the double amplitude Lp to, for example, 1, the phase difference 2δp between the two distance waveforms of the measured distance L can be determined. Furthermore, the distance waveform of the measured distance L does not need to be obtained within the range of the scanning angle α of 0° to 360°. The distance waveform of the measured distance L within the range of the scanning angle α that is not measured can also be supplemented by the distance waveform obtained by curve fitting the point group data based on the measured values, as shown in Figures 19A to 19C.

[0051] Although the above description is made for a specific embodiment, the present invention is not limited thereto. Various changes and modifications can be made within the scope of the principles of the present invention and the scope of the accompanying patent applications. This is clear to those with ordinary knowledge in the technical field.

[0052] 100: System 101: Rotating component 102: Rotating component axis 103: Surface of rotating member 104: Rotating device 105: Measuring device 106: Rotating mechanism 107: Supporting member 108: Support member axis 109: Displacement meter 110: Reference inclined surface 111: Datum 112: Tilt angle 113: Central Axis L 0 θ,L ref: reference distance L c: measuring distance L e,L s: distance L p: double amplitude L max θ, L maxC θ: Maximum distance detection L pc: Double amplitude for measuring distance r: scanning radius α: scanning angle β,φ: angle θ: rotation angle Δθ: Measurement resolution δ v,δ v0: right angle δ p,δ p0: parallelism

Claims

1. A system for measuring the state of a rotating member that can rotate around a rotating member axis as a center, the system comprising a measuring device, the measuring device comprising a rotating mechanism, a support member that can rotate around a support member axis as a center by means of the rotating mechanism, and a displacement meter disposed on the support member, the system further comprising a reference inclined surface, and the displacement meter being configured to measure the distance to the reference inclined surface, the rotating member being fixed at a designated measuring position, the rotating mechanism rotating the support member at the aforementioned measuring position of the rotating member, and the displacement meter measuring the distance to the reference inclined surface in a plurality of scanning angles formed by the rotation of the support member, and measuring the state of the rotating member based on the distance in the plurality of scanning angles.

2. The system of claim 1, wherein the aforementioned rotating member is fixed at a plurality of designated measuring positions, the aforementioned rotating mechanism rotates the aforementioned support member at each of the designated measuring positions of the aforementioned rotating member, and the aforementioned displacement meter measures the distance to the aforementioned reference inclined surface in a plurality of scanning angles formed by the rotation of the aforementioned support member.

3. The system of claim 2, wherein the aforementioned displacement meter measures a distance waveform formed by the distance to the aforementioned reference inclined surface at each specified measurement position, and measures the rotational movement angle of the aforementioned rotating member at each specified measurement position based on the phase difference between the aforementioned distance waveforms at the aforementioned plurality of specified measurement positions.

4. The system of claim 2, wherein the aforementioned rotating mechanism initiates the rotation of the aforementioned displacement gauge from the same position relative to the aforementioned rotating member through the aforementioned support member at each designated measuring position.

5. The system of claim 1, wherein the axis of the aforementioned support member is parallel to the axis of the aforementioned rotating member.

6. The system of any one of claims 1 to 5, wherein the aforementioned displacement gauge measures the distance to the aforementioned reference inclined surface in a direction parallel to the axis of the aforementioned support member.

7. The system of any one of claims 1 to 5, wherein the aforementioned displacement gauge measures the distance to the aforementioned reference inclined surface along a direction inclined relative to the axis of the aforementioned support member.

8. The system of claim 1, wherein the aforementioned measuring device is disposed on the surface of the aforementioned rotating member, and the aforementioned reference inclined surface is disposed at a specific angle relative to a plane perpendicular to the axis of the aforementioned rotating member and is arranged to face the aforementioned measuring device, or the aforementioned reference inclined surface is disposed on the surface of the aforementioned rotating member at a specific angle relative to a plane perpendicular to the axis of the aforementioned rotating member, and the aforementioned measuring device is disposed on a plane perpendicular to the axis of the aforementioned rotating member and is arranged to face the aforementioned reference inclined surface.

9. The system of claim 8, wherein when the aforementioned rotating member rotates in such a manner that the surface of the aforementioned rotating member is substantially perpendicular to the axis of the aforementioned rotating member, the right angle of the portion of the surface of the aforementioned rotating member on which the aforementioned measuring device or the aforementioned reference inclined surface is disposed is measured relative to the axis of the aforementioned rotating member by the distance to the aforementioned reference inclined surface.

10. The system of claim 8, wherein when the aforementioned rotating member rotates such that the surface of the aforementioned rotating member is substantially parallel to the axis of the aforementioned rotating member, the parallelism of the portion of the surface of the aforementioned rotating member on which the aforementioned measuring device or the aforementioned reference inclined surface is disposed is measured relative to the axis of the aforementioned rotating member by the distance to the aforementioned reference inclined surface.

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