This rotor device with an improved lid for counterbalance

Abstract

This invention discloses a rotor device with an improved counterweight balancing cover, which is used in a turbomolecular vacuum pump. The rotor device with the improved counterweight balancing cover includes a rotating shaft, a rotor body, a cover, and a counterweight unit; one end of the rotating shaft is disposed on the turbomolecular vacuum pump, and the other end of the rotating shaft is connected to the rotor body, with the rotor body having a locking space relative to one end of the rotating shaft; the cover includes a reinforcing unit, a connecting unit, and a counterweight unit, with one end of the connecting unit disposed on one end of the rotating shaft, and one end of the reinforcing unit connected to the other end of the connecting unit; the counterweight unit is disposed on the connecting unit and located between the reinforcing unit and the rotating shaft.

Description

Technical Field

[0001] The present invention relates to a rotor device with an improved cover that can be counterbalanced, and more particularly to a rotor device with an improved cover that can be counterbalanced and balanced in a turbomolecular vacuum pump. Prior Technology

[0002] In semiconductor manufacturing, turbomolecular vacuum pumps play a crucial role, primarily used in processes requiring high vacuum. Semiconductor manufacturing necessitates highly controlled environments to ensure stability and precision. Common applications of turbomolecular vacuum pumps in semiconductor manufacturing include chemical vapor deposition (CVD), physical vapor deposition (PVD), photolithography, and etching. In these scenarios, turbomolecular vacuum pumps not only ensure process stability and precision but also effectively control the concentration of trace gases due to their high pumping speed and high vacuum, achieving higher production quality and yield. However, due to their use in these environments, the pumps operate at extremely high speeds and have a compact structure, posing a risk of dust accumulation. If dust-containing gases are drawn in, fine particles may deposit on the internal structure. Excessive dust accumulation can affect the pump's vacuum efficiency, rotor balance, and even lead to malfunctions.

[0003] Currently known methods for preventing dust accumulation primarily involve regular maintenance or maintaining a clean environment. Some manufacturers even pre-treat the gas, using a backing pump or filter to reduce particulate matter intake before it enters the molecular pump. While these methods can slow down dust accumulation, it will still occur if cleaning is neglected for extended periods or if the vacuum pump operates for a long time. To address this, some manufacturers have designed covers to cover the rotor opening. While these covers effectively prevent dust buildup, their locking mechanisms can still cause vibration or center of gravity shift during high-speed rotor rotation. If this is not detected in time, it can lead to wear and tear between the cover and the rotor, or even loosening, causing malfunctions or damage.

[0004] Therefore, how to design a device that can prevent dust accumulation at the rotor opening of a turbomolecular vacuum pump while maintaining its center of gravity and sufficient stability is a problem that the industry urgently needs to solve. Summary of the Invention

[0005] Accordingly, the present invention proposes a rotor device with an improved cover that can be counterweighted and balanced, comprising:

[0006] A rotating shaft, one end of which is disposed on a turbomolecular vacuum pump; a rotor body, the rotor body being connected to the other end of the rotating shaft and having a locking space relative to one end of the rotating shaft; a cover, the cover including a connecting unit, one end of which is disposed on one end of the rotating shaft; a reinforcing unit, the reinforcing unit being connected to the other end of the connecting unit relative to the rotating shaft; and a counterweight unit, the counterweight unit being disposed on the connecting unit and located between the reinforcing unit and the rotating shaft. Accordingly, this rotor assembly with a counterweight-balanced cover avoids dust accumulation and center of gravity shift that may occur during high-speed operation of the turbomolecular vacuum pump.

[0007] The rotor device with an improved cover that can be balanced by counterweight, wherein the counterweight unit is provided with a plurality of counterweight slots.

[0008] The rotor device with the improved cover that can be counterweighted and balanced, wherein the plurality of counterweight slots can be filled with weights and can be adjusted according to the rotor balance to achieve high-speed and stable operation.

[0009] The rotor device with the improved cover that can be counterweighted and balanced, wherein the counterweight unit is further provided with a fixing element, which is disposed on the bottom side of the counterweight unit.

[0010] The rotor device with the improved cover that can be counterweighted and balanced, wherein the cover is further provided with a reinforcing unit, which is located at the bottom of the cover and connected to the connecting unit.

[0011] The rotor device with a counterweight-balanced improved cover, wherein the connecting unit has at least one fixing groove.

[0012] The rotor device with a counterweight-balanced improved cover, wherein the rotor body has a locking space at one end of the rotating shaft.

[0013] The rotor device with the improved cover that can be counterweighted and balanced, wherein the counterweight unit is an aluminum alloy counterweight unit.

[0014] The rotor device with the improved cover that can be counterweighted and balanced, wherein the bottom of the locking space is provided with a plurality of fixing elements.

[0015] The rotor device with a modified cover that can be balanced by counterweights, wherein the plurality of counterweight slots are of equal size and spacing. Simple Explanation of the Diagram

[0016] Figure 1 is a side sectional view of a rotor device with a counterweight-balanced cover according to the present invention.

[0017] Figure 2 is a perspective view of a rotor device with an improved cover that can be counterweighted and balanced according to the present invention.

[0018] Figure 3 is a side view of a rotor device with a counterweight-balanced cover according to the present invention. Implementation

[0019] Since this invention discloses a rotor device with an improved cover that can be counterweighted and balanced, the basic principles of the structure or other accommodating methods used are already understood by those skilled in the art. Therefore, the following description will not be fully presented. Furthermore, the drawings used in the following text are schematic representations of the structure related to the features of this invention and are not, and do not need to be, drawn to actual dimensions. This is to be clarified beforehand.

[0020] Please refer to Figure 1, which is a schematic diagram of the rotor device 1 of the improved cover with counterweight balance proposed in this invention; Figure 2 is a perspective view of the cover 15 proposed in this invention; and Figure 3 is a schematic diagram of the combination of the cover 15 and the counterweight unit 17 proposed in this invention.

[0021] The rotor device 1 of the counterweight-balanced improved cover includes a rotating shaft 12, one end of which is disposed on a turbomolecular vacuum pump 11; a rotor body 13 connected to the other end of the rotating shaft 12, and the rotor body 13 having a locking space 14 relative to one end of the rotating shaft 12; a cover 15, the cover 15 including a connecting unit 16, one end of which is disposed on one end of the rotating shaft 12; a reinforcing unit 18 connected to the connecting unit 16 relative to the other end of the rotating shaft 12; and a counterweight unit 17 disposed on the connecting unit 16 and located between the reinforcing unit 18 and the rotating shaft 12.

[0022] For example, when the rotor device of the improved cover with counterweight balance is installed, the turbomolecular vacuum pump 11 is started when processing is required. The turbomolecular vacuum pump 11 can drive the rotating shaft 12 to rotate, and the rotating shaft 12 will drive the rotor body 13 to rotate. The above can achieve the function of vacuum pumping. The connecting unit 16 is connected to the rotating shaft 12, and the counterweight unit 17 is placed in the locking space 14. Finally, the reinforcing unit 18 at the bottom of the cover 15 is connected to the connecting unit 16, so that the cover 15 can rest against the top of the rotor body 13 and completely cover the opening of the locking space 14. This can prevent particulate dust generated during processing from depositing in the locking space 14. The above is only an example and is not limited thereto.

[0023] Preferably, the counterweight unit 17 is further provided with a plurality of counterweight slots 25; for example, when the turbomolecular vacuum pump is running, its rotor device operates at high speed. If the attached dust cover is not properly secured or the weight distribution is unbalanced, it may cause wear or loosening of related components, resulting in equipment damage. Therefore, before operation, the user can place weights in the counterweight slots 25 according to different situations and the angle of equipment connection, based on the formula for moment of inertia. When weights are added around the axis of rotation, the mass distribution is further away from the center of rotation. The greater the mass, the farther away from the center, and the greater the moment of inertia. This increases the stability of angular momentum and makes the center of rotation less likely to deviate from its direction due to small disturbances, thereby maintaining the center of gravity.

[0024] Preferably, the counterweight unit 17 is further provided with a fastening element 35, which is disposed on the bottom side of the counterweight unit 17. During installation, the fastening element 35 is first fixed at a specific height of the connecting unit 16. The actual height adjustment varies depending on the usage scenario. Then, the counterweight unit 17 is inserted and connected to the connecting unit 16. The top of the fastening element 35 has an internal thread that is opposite to the direction of the rotor device during operation. The internal thread can be engaged with the external thread at the bottom of the counterweight unit 17. Thus, when the rotor device is running, the counterweight unit 17 and the fastening element 35 can achieve the function of strengthening fixation and providing stability because the thread direction is opposite to that during operation.

[0025] Preferably, the cover 15 is further provided with a reinforcing unit 18, which is located at the bottom of the cover 15 and connected to the other end of the connecting unit 16 relative to the rotating shaft 12. When the connecting unit 16 and the counterweight unit 17 are installed into the locking space 14, the cover 15 will be screwed tightly over the locking space 14. The connecting unit 16 and the reinforcing unit 18 also have internal and external threads that are opposite to the direction of the rotor device during operation. When the cover 15 is screwed to the tightest position, the reinforcing unit 18 will engage with the corresponding snap-fit ​​structure in the locking space 14, thereby achieving the effect of reinforcing and stabilizing the cover.

[0026] Preferably, the connecting unit 16 has at least one fixing groove 23. When installing the rotor device of the counterweight-balanced modified cover, since one end of the connecting unit 16 needs to be positioned on the rotating shaft 12 relative to the turbomolecular vacuum pump 11, and the connecting unit 16 is a cylinder, in order to ensure that the connecting unit 16 is fixed tightly enough, the fixing groove 23 allows the installer to clamp the part with a tool, and after ensuring that the surface has a sufficiently stable frictional force, the connecting unit 16 can be screwed onto the rotating shaft 12, thereby achieving the function of tight locking.

[0027] Preferably, the rotor body 13 has a locking space 14 at one end relative to the rotating shaft 12. When the turbomolecular vacuum pump 11 is running, fine dust or particles may still be generated due to different environments and gases used. If the dust or particles fall into the locking space 14, the cover 15 is tightly attached to the top side of the locking space 14, which can effectively intercept the dust or particles that have fallen in and prevent them from drifting out of the locking space 14 again due to airflow disturbance during operation. This can reduce the pollution or damage to the processed products.

[0028] Preferably, the counterweight unit 17 is an aluminum alloy counterweight unit; due to the lightweight and high strength characteristics of aluminum alloy, the counterweight unit 17 can withstand the torque generated by high-speed operation, and its corrosion resistance can also avoid the influence of acid and alkali value differences caused by gases generated by different processed products.

[0029] Preferably, the bottom of the locking space 14 is provided with a plurality of fixing elements 19, which are used to fix the rotating shaft 12 and the rotor body 13. One end of each fixing element 19 is on the bottom side of the locking space 14, and the other end is connected to the rotating shaft 12, thereby fixing the rotor body 13 to the rotating shaft 12.

[0030] Preferably, the size and spacing of the plurality of counterweight slots 25 are equal. In the semiconductor industry, the turbomolecular vacuum pump 11 operates at a speed mostly between 24,000 and 36,000 RPM to achieve a specific vacuum level. To maintain the stability of the mechanism under this high-speed operation, specific weights can be placed in the plurality of counterweight slots 25. Due to its fixed spacing design, the user can adjust the number of weights or the spacing between them according to the environment and the products being processed. This allows for the adjustment of the stability of angular momentum during operation to avoid the center of gravity shifting during high-speed operation.

[0031] The above description is merely a preferred embodiment of the present invention and is not intended to limit the patent rights of the present invention. At the same time, the above description should be clear and implementable to those skilled in the art. Therefore, any equivalent changes or modifications made without departing from the spirit disclosed in the present invention should be included in the scope of the patent application.

[0032] 11: Turbomolecular vacuum pump 12: Rotation axis 13: Rotor body 14: Locked Space 15: Lid 16: Connecting Unit 17: Counterweight Unit 18: Reinforcement Unit 19: Fixed components 21: Lid 22: Connecting Unit 23: Fixing slot 24: Counterweight Unit 25: Counterweight slot 31: Lid 32: Connecting Unit 33: Fixing slot 34: Counterweight Unit 35: Stylized element 36: Reinforcement Unit

Claims

1. A rotor device with a counterweight-balanced improved cover for mounting on a turbomolecular vacuum pump, comprising: a rotating shaft, one end of which is mounted on the turbomolecular vacuum pump; a rotor body connected to the other end of the rotating shaft and having a locking space relative to one end of the rotating shaft; and a cover comprising: a connecting unit, one end of which is mounted on one end of the rotating shaft; a reinforcing unit, one end of which is connected to the other end of the connecting unit; and a counterweight unit mounted on the connecting unit and located between the reinforcing unit and the rotating shaft.

2. The rotor device of the counterweight-balanced improved cover as described in claim 1, wherein, The counterweight unit has multiple counterweight slots.

3. The rotor device of the counterweight-balanced improved cover as described in claim 2, wherein, The multiple counterweight slots can be filled with weights and can be adjusted according to the rotor balance to achieve high-speed and stable operation.

4. The rotor device of the counterweight-balanced improved cover as described in claim 2, wherein, The counterweight unit is further provided with a fastening element, which is located on the bottom side of the counterweight unit.

5. The rotor device of the counterweight-balanced improved cover as described in claim 1, wherein, The cover is further provided with a reinforcing unit, which is located at the bottom of the cover and connected to the connecting unit.

6. The rotor device of the counterweight-balanced improved cover as described in claim 1, wherein, The connecting unit has at least one fixing slot.

7. The rotor device of the counterweight-balanced improved cover as described in claim 1, wherein, The rotor body has a locking space relative to one end of the rotating shaft.

8. The rotor device of the counterweight-balanced improved cover as described in claim 2, wherein, The counterweight unit is an aluminum alloy counterweight unit.

9. The rotor device of the counterweight-balanced improved cover as described in claim 1, wherein, The bottom of the locking space is equipped with a plurality of fixing elements.

10. The rotor device of the counterweight-balanced improved cover as described in claim 2, wherein, The size and spacing of the plurality of counterweight slots are all equal.

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