Upper electrode device and magnetron sputtering equipment

Abstract

An upper electrode device and a magnetron sputtering apparatus are disclosed. The device includes a magnetron sputtering component, a cooling chamber, a sleeve assembly, a hollow shaft, and a drive mechanism. A target assembly is fixedly disposed at the bottom of the cooling chamber, and the magnetron sputtering component is disposed within the cooling chamber. A portion of the hollow shaft extends into the cooling chamber, and a medium channel is provided inside the hollow shaft for conveying coolant into the cooling chamber. The sleeve assembly is sleeved around the outer circumference of the hollow shaft and supports the hollow shaft. One of the hollow shaft and the sleeve assembly is fixedly disposed, and the other is connected to the magnetron sputtering component and connected to the drive mechanism for driving the magnetron sputtering component to rotate around the axis of the hollow shaft.

Description

[Technical Field]

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to an upper electrode device and a magnetron sputtering apparatus. [Previous Technology]

[0002] Magnetron sputtering is a physical vapor deposition (PVD) coating technique used to prepare metals, insulators, and other materials. In semiconductor equipment, magnetron sputtering applies a cathode electric field to the target material under low pressure. The gas ionizes under the electric field and bombards the target surface, sputtering the material from the target surface onto the substrate surface. Magnetron sputtering utilizes the magnetic field to confine charged particles, thereby increasing the plasma density and sputtering rate. During the process, the ion bombardment of the target generates a significant amount of heat, necessitating target cooling. As the power applied to the target increases, the demand for efficient cooling becomes particularly critical.

[0003] Therefore, how to ensure the improvement of the cooling efficiency of the target material is a technical problem that urgently needs to be solved by those skilled in the art. [Summary of the Invention]

[0004] This application aims to solve at least one of the technical problems existing in the prior art, and proposes an upper electrode device and a magnetron sputtering device, which improves the heat dissipation efficiency of the target assembly.

[0005] To achieve the purpose of this application, an upper electrode device is provided, applied to a magnetron sputtering equipment, including a magnetron component, a cooling chamber, a sleeve assembly, a hollow shaft, and a drive mechanism. A target assembly is fixedly disposed at the bottom of the cooling chamber, and the magnetron component is disposed within the cooling chamber. A portion of the hollow shaft extends into the cooling chamber, and a medium channel is provided inside the hollow shaft for supplying coolant to the cooling chamber. The sleeve assembly is sleeved around the outer periphery of the hollow shaft and supports the hollow shaft. One of the hollow shaft and the sleeve assembly is fixedly disposed, while the other is connected to the magnetron component and connected to the drive mechanism, for driving the magnetron component to rotate around the axis of the hollow shaft.

[0006] In some embodiments, the sleeve assembly is sealed to the cooling chamber, and the upper electrode device further includes a first sealing assembly for achieving a dynamic seal between the sleeve assembly and the hollow shaft.

[0007] In some embodiments, the sleeve assembly includes a cylindrical body and a bottom cover. The cylindrical body is sleeved on the outer periphery of the hollow shaft. The bottom cover is fixedly connected to the lower end of the cylindrical body. The bottom cover has a through hole in the center. The hollow shaft passes through the through hole and is supported by the bottom cover. The first sealing assembly is disposed between the bottom cover, the cylindrical body and the hollow shaft.

[0008] In some embodiments, the first sealing assembly includes a first stationary ring and a first rotating ring. The first stationary ring seals and connects one of the hollow shaft and the sleeve assembly that is fixedly disposed therein, and the first rotating ring seals and connects the other of the hollow shaft and the sleeve assembly that is connected to the magnetic control component. The end faces of the first rotating ring and the first stationary ring are rotatably fitted and sealed to each other.

[0009] In some embodiments, the sleeve assembly is fixedly disposed, the hollow shaft is connected to the magnetic control component, and connected to the drive mechanism; the bottom cover has an annular boss surrounding the through hole on the side near the cylinder body, and the outer peripheral surface of the boss and the inner peripheral surface of the cylinder body are provided with a second sealing ring; the inner peripheral surface of the boss and the outer peripheral surface of the hollow shaft are spaced apart, the first stationary ring is disposed in the space and fits against the inner peripheral surface of the boss and the upper end surface of the bottom cover; the first moving ring is located above the first stationary ring and is sleeved on the outer peripheral surface of the hollow shaft; the hollow shaft is also provided with a first stepped surface, the first stepped surface abuts against the upper end surface of the first moving ring, and the upper end surface of the bottom cover supports the first stationary ring.

[0010] In some embodiments, the hollow shaft is fixedly disposed, the sleeve assembly is connected to the magnetic control component, and connected to the drive mechanism; the bottom cover has an annular boss arranged around the through hole on the side near the cylinder, the outer peripheral surface of the boss is spaced apart from the inner peripheral surface of the cylinder, the first moving ring is disposed in the gap, and the inner peripheral surface of the first moving ring is in contact with the outer peripheral surface of the boss; the first stationary ring is located above the first moving ring and is sleeved on the hollow shaft, and the inner peripheral surface of the first stationary ring is in contact with the outer peripheral surface of the hollow shaft, the hollow shaft is also provided with a first stepped surface, the first stepped surface abuts against the upper end surface of the first stationary ring, and the upper end surface of the bottom cover supports the first moving ring.

[0011] In some embodiments, the sleeve assembly is fixedly disposed, the hollow shaft is connected to the magnetic control component, and connected to the drive mechanism; the drive mechanism includes a drive unit and a transmission assembly, the transmission assembly includes a drive wheel, a transmission belt and a driven wheel, the drive wheel is connected to the drive unit, the driven wheel is fixedly disposed on the outer periphery of the hollow shaft, and the transmission belt is tensioned through the drive wheel and the driven wheel.

[0012] In some embodiments, the hollow shaft is further provided with two locking nuts on its outer periphery. The two locking nuts are threadedly connected to the hollow shaft and lock the driven wheel from both sides of the hollow shaft in the axial direction.

[0013] In some embodiments, the driven wheel is provided with a receiving cavity on the side near the cooling cavity, and the sleeve assembly is partially disposed in the receiving cavity.

[0014] In some embodiments, the sleeve assembly is fixedly disposed, the hollow shaft is connected to the magnetic control component, and connected to the drive mechanism; the upper electrode device further includes a connecting assembly, the connecting assembly including a rotating shield and a second sealing assembly, the rotating shield being rotatably connected to the hollow shaft, the second sealing assembly being used to achieve a dynamic seal between the rotating shield and the end of the hollow shaft away from the magnetic control component, and the rotating shield being provided with an inlet communicating with the medium channel.

[0015] In some embodiments, the second sealing assembly includes a second moving ring and a second stationary ring. The second moving ring is disposed on the outer periphery of the hollow shaft. The inner peripheral surface of the second moving ring is in contact with the outer peripheral surface of the hollow shaft. The outer peripheral surface of the second stationary ring is in contact with the inner peripheral surface of the rotating shield. The lower end surface of the second stationary ring is rotatably in contact with the upper end surface of the second moving ring.

[0016] In some embodiments, the sleeve assembly is fixedly installed, the hollow shaft is connected to the magnetic control component and connected to the drive mechanism; the cooling cavity is provided with a mounting hole, the hollow shaft passes through the mounting hole and partially enters the cooling cavity, the outer circumferential surface of the cylinder is provided with a connecting platform, the connecting platform is stacked on the upper surface of the cooling cavity, and a first sealing ring is provided between the connecting platform and the cooling cavity.

[0017] In some embodiments, the hollow shaft is fixedly installed, the sleeve assembly is connected to the magnetic control component, and connected to the drive mechanism; the upper electrode device further includes a shaft fixing member, and the hollow shaft is fixedly connected to the cooling cavity through the shaft fixing member; the drive mechanism includes a drive unit and a transmission assembly, the transmission assembly includes a drive wheel and a transmission belt, the transmission belt is tensioned through the drive wheel and the cylinder, the cooling cavity is provided with a mounting hole, the lower end of the sleeve assembly is dynamically sealed to the mounting hole through a third sealing assembly, and the drive unit is used to drive the sleeve assembly to rotate around the axis of the hollow shaft.

[0018] In some embodiments, the third sealing assembly includes a third rotating ring and a third stationary ring. The cooling chamber is provided with a mounting hole. The cylindrical body portion is located in the mounting hole. The third stationary ring is located in the mounting hole, and the outer peripheral surface of the third stationary ring is in contact with the hole wall of the mounting hole. The third rotating ring is located above the third stationary ring in the mounting hole and is sleeved on the outer periphery of the portion of the cylindrical body located in the mounting hole. The inner peripheral surface of the third rotating ring is in contact with the outer peripheral surface of the cylindrical body. The upper end face of the third stationary ring and the lower end face of the third rotating ring are rotatably in contact with each other.

[0019] As another technical solution, this application also provides a magnetron sputtering apparatus, including a process chamber and any of the above-described upper electrode devices.

[0020] This application has the following beneficial effects: The upper electrode device provided by this application, by allowing coolant to be transported into the cooling chamber through the medium channel inside the hollow shaft, and by using a drive mechanism to drive the magnetic control component to rotate around the axis of the hollow shaft through the hollow shaft or sleeve component, can drive the coolant entering the cooling chamber from the medium channel to flow away from the hollow shaft, thereby making the coolant uniformly diffused in the cooling chamber and increasing the flow rate of the coolant, thereby improving the cooling efficiency of the target assembly. In addition, the coolant can be more uniformly distributed in the cooling chamber, improving the uniformity of the cooling of the target assembly.

[0021] This application also provides a magnetron sputtering apparatus including an upper electrode device, and has the above-mentioned advantages.

Implementation Method

[0023] In order to enable those skilled in the art to better understand the technical solution of this application, the upper electrode device and magnetron sputtering equipment provided in this application will be described in detail below with reference to the accompanying drawings.

[0024] In related technologies, the inlet and outlet of the upper electrode are both located on the electrode cover. After the coolant enters the cooling chamber, it flows from the inlet to the outlet. The coolant tends to flow along the electrode cover. This flow path is short and has low resistance, resulting in a large coolant flow rate and forming a short-circuit flow. The short-circuit flow reduces the amount of coolant in contact with the target assembly, affecting the cooling efficiency of the target assembly.

[0025] The upper electrode device provided in this application is applied to semiconductor manufacturing equipment. As shown in Figure 1 or Figure 3, the upper electrode device includes a magnetic control component 300, a cooling cavity 100, a sleeve assembly 220, a hollow shaft 210, and a drive mechanism. A target assembly 140 is disposed at the bottom of the cooling cavity 100, and the target assembly 140 is fixedly connected to the cooling cavity 100, for example. The magnetic control component 300 is disposed in the cooling cavity 100; the hollow shaft 210 partially penetrates into the cooling cavity 100, and a medium channel is provided inside the hollow shaft 210 for supplying coolant to the cooling cavity 100.

[0026] In some embodiments, the cooling chamber 100 includes a cylindrical upper electrode shield 110 and an upper electrode cover plate 120. The upper electrode cover plate 120 is sealed to the upper end of the upper electrode shield 110, and the target assembly 140 is sealed to the lower end of the upper electrode shield 110. The lower end of the hollow shaft 210 passes through the central hole of the upper electrode cover plate 120 and enters the interior of the cooling chamber 100. The cooling chamber 100 is also provided with a liquid outlet 130. Coolant can be transported into the cooling chamber 100 by the hollow shaft 210 and flows out from the liquid outlet 130. During the flow, the medium comes into contact with the target assembly 140, reducing the temperature of the target assembly 140.

[0027] The sleeve assembly 220 is sleeved on the outer periphery of the hollow shaft 210 to support the hollow shaft 210. One of the hollow shaft 210 and the sleeve assembly 220 is fixedly installed, and the other is connected to the magnetic control component 300 and connected to the drive mechanism to drive the magnetic control component 300 to rotate around the axis of the hollow shaft 210.

[0028] The hollow shaft 210 is fixedly installed, and the sleeve assembly 220 rotates around the axis of the hollow shaft 210. The magnetic control component 300 is connected to the sleeve assembly 220. Alternatively, the sleeve assembly 220 is fixedly installed, the hollow shaft 210 rotates around its axis, and the magnetic control component 300 is connected to the hollow shaft 210. In both embodiments, the coolant is delivered into the cooling chamber 100 by the hollow shaft 210. During the rotation of the magnetic control component 300 around the axis of the hollow shaft 210, it can drive the coolant in the cooling chamber 100 to rotate. Under the action of centrifugal force, the coolant will flow away from the hollow shaft 210, thus playing a role in diffusing the coolant.

[0029] In this embodiment, the hollow shaft 210 penetrates the interior of the cooling cavity 100. The hollow shaft 210 is usually close to or located in the center of the cooling cavity 100. The lower end of the hollow shaft 210 is close to the target assembly 140. After the coolant enters the cooling cavity 100 through the hollow shaft 210, it flows downward and can directly contact the target assembly 140, thereby improving the heat dissipation efficiency of the target assembly 140. In addition, the magnetic control component 300 rotates under the drive of the hollow shaft 210 or the sleeve assembly 220, and pushes the coolant flowing out of the hollow shaft 210 to flow in various directions within the cooling cavity 100. The rotation of the magnetic control component 300 can not only increase the relative speed between the coolant and the target assembly 140 and improve the heat exchange efficiency of the target assembly 140, but also make the flow speed of the coolant in various directions within the cooling cavity 100 approximately equal, thereby making the coolant distribution in the cooling cavity 100 more uniform, and thus improving the temperature uniformity of the target assembly 140.

[0030] In some embodiments, the sleeve assembly 220 is sealed to the cooling chamber 100, and the upper electrode device further includes a first sealing assembly 230, which is used to achieve a dynamic seal between the sleeve assembly 220 and the hollow shaft 210.

[0031] Further, in some embodiments, as shown in FIG1, the outlet 130 is disposed on the upper electrode cover plate 120, and the coolant needs to be under positive pressure to be discharged from the outlet 130. Therefore, to prevent coolant leakage from the installation position of the sleeve assembly 220, the sleeve assembly 220 and the cooling chamber 100 are sealed together. Moreover, to prevent coolant from entering between the sleeve assembly 220 and the hollow shaft 210, a first sealing assembly 230 is used to achieve dynamic sealing. Since there is relative movement between the sleeve assembly 220 and the hollow shaft 210, the first sealing assembly 230 can refer to a dynamic sealing structure, such as a dynamic and static ring seal, a labyrinth seal, etc. In embodiments where the sleeve assembly 220 is fixedly disposed, for example, fixedly connected to the cooling chamber 100, the sleeve assembly 220 and the cooling chamber 100 can be sealed using a sealing ring or other structure. For example, in the specific embodiment shown in FIG1, the sleeve assembly 220 and the cooling chamber 100 are sealed together by a first sealing ring 228. In the embodiment where the sleeve assembly 220 is connected to the drive mechanism, the sleeve assembly 220 is used to drive the magnetic control component 300 to rotate under the drive of the drive mechanism, and the sleeve assembly 220 and the cooling chamber 100 also need to be sealed by a dynamic sealing structure.

[0032] In some embodiments, as shown in Figures 2 and 4, the sleeve assembly 220 includes a cylindrical body 221 and a bottom cover 222. The cylindrical body 221 is sleeved on the outer periphery of the hollow shaft 210. The bottom cover 222 is fixedly connected to the lower end of the cylindrical body 221. The bottom cover 222 is provided with a through hole, through which the hollow shaft 210 passes and is supported by the bottom cover 222. The first sealing assembly 230 is disposed between the bottom cover 222, the cylindrical body 221 and the hollow shaft 210, and is used to ensure that the cylindrical body 221 and the hollow shaft 210 can move relative to each other by means of dynamic sealing, while sealing the through hole.

[0033] As shown in Figures 2 and 4, the cylindrical body 221 is sleeved on the outer circumference of the hollow shaft 210 and rotates relative to the hollow shaft 210 via sleeve bearings 224. In some embodiments, the number of sleeve bearings 224 may be two, distributed along the axial direction of the cylindrical body 221. The inner ring of the sleeve bearing 224 is fixedly connected to the hollow shaft 210, and the outer ring of the sleeve bearing 224 is fixedly connected to the cylindrical body 221. The sleeve bearings 224 can reduce the frictional resistance when the cylindrical body 221 moves relative to the hollow shaft 210.

[0034] Further, in some embodiments, the sleeve assembly 220 further includes a bushing 225, which is sleeved on the outer periphery of the hollow shaft 210 and located between the two sleeve bearings 224. The two ends of the bushing 225 abut against the inner rings of the two sleeve bearings 224, respectively, serving a limiting function. The inner circumferential surface of the cylinder 221 is provided with a support surface for abutting against the end face of the outer ring of the sleeve bearing 224 located below the bushing 225, for axial positioning of the sleeve bearing 224. The sleeve assembly 220 also includes a pressure cap 226, which is installed at the upper end of the cylinder 221 and abuts against the end face of the outer ring of the sleeve bearing 224. The pressure cap 226 and the support surface cooperate to axially position the sleeve bearing 224, and the bushing 225 is located between the two sleeve bearings 224, for limiting the distance between the two sleeve bearings 224. Of course, other structures can also be used to position the sleeve bearing 224 in the sleeve assembly 220, which is not limited here.

[0035] The bottom cover 222 can be fixedly connected to the lower end of the cylinder 221 by welding, bolting, or other means. The hollow shaft 210 passes through the through hole of the bottom cover 222 and is supported by the bottom cover 222. The first sealing component 230 is arranged around the hollow shaft 210. The first sealing component 230 can fit against the outer wall of the hollow shaft 210 and has a gap between it and the inner wall of the cylinder 221, and dynamically seals with the bottom cover 222, thereby ensuring that the cylinder 221 and the hollow shaft 210 can move relative to each other, while sealing the through hole. In addition, the bottom cover 226 provides support for the hollow shaft 210 through the first sealing component 230.

[0036] In some embodiments, the first sealing assembly 230 includes a first stationary ring 231 and a first rotating ring 232. The first stationary ring 231 is sealed to one of the hollow shaft 210 and the sleeve assembly 220, which is fixedly disposed (e.g., fixedly connected to the cooling chamber 100). The first rotating ring 232 is sealed to the other of the hollow shaft 210 and the sleeve assembly 220, which is connected to the magnetic control component 300. The end faces of the first rotating ring 232 and the first stationary ring 231 are rotatably fitted together for sealing, thereby achieving a dynamic seal. Embodiment 1

[0037] In an embodiment where the sleeve assembly 220 is fixedly installed, for example, fixedly connected to the cooling chamber 100, as shown in Figures 1 and 2, the bottom cover 222 has an annular boss 222a surrounding a through hole on the side near the cylinder 221. A second sealing ring 223 is provided on the outer circumferential surface of the boss 222a and the inner circumferential surface of the cylinder 221. When the boss 222a is installed inside the cylinder 221, the boss 222a and the cylinder 221 press the second sealing ring 223 together. The second sealing ring 223 can prevent coolant from entering the interior of the cylinder 221 along the gap between the cylinder 221 and the bottom cover 222, thus improving the sealing performance of the sleeve assembly 220. A first stationary ring 231 is disposed in the space between the inner circumferential surface of the boss 222a and the outer circumferential surface of the hollow shaft 210, and is tightly fitted against the inner circumferential surface of the boss 222a and the upper end face of the bottom cover 222. The first stationary ring 231 is rotatably fitted with the hollow shaft 210. The first moving ring 232 is located above the first stationary ring 231 and is sleeved on the outer circumferential surface of the hollow shaft 210. The hollow shaft 210 may also be provided with a first stepped surface for limiting the first moving ring 232 in the axial direction of the hollow shaft 210. The first stepped surface abuts against the upper end surface of the first moving ring 232, and the upper end surface of the bottom cover 222 supports the first stationary ring 231, thereby allowing the lower end surface of the first moving ring 232 and the upper end surface of the first stationary ring 231 to be rotatably fitted and sealed. When the hollow shaft 210 rotates, the first stationary ring 231 tightly fits the inner circumferential surface of the boss 222a and the upper end surface of the bottom cover 222, and the first stationary ring 231 is fixed relative to the hollow shaft 210; the first moving ring 232 tightly fits the outer circumferential surface of the hollow shaft 210 and the first step surface, and rotates synchronously with the hollow shaft 210; the lower end surface of the first moving ring 232 and the upper end surface of the first stationary ring 231 can rotate relative to each other to form a seal, thereby blocking the passage of coolant into the interior of the cylinder 221 while ensuring that the cylinder 221 and the hollow shaft 210 can move relative to each other, thus achieving a seal between the sleeve assembly 220 and the hollow shaft 210.

[0038] In some embodiments, as shown in FIG1, the drive mechanism includes a drive unit and a transmission assembly. The transmission assembly includes a drive wheel 252, a transmission belt and a driven wheel 253. The drive wheel 252 is connected to the drive unit, and the driven wheel 253 is fixedly disposed on the outer periphery of the hollow shaft 210. The transmission belt is tensioned through the drive wheel 252 and the driven wheel 253.

[0039] In this embodiment, the drive unit is connected to the hollow shaft 210 via a transmission assembly to drive the hollow shaft 210 to rotate. The sleeve assembly 220 is fixedly connected to the cooling chamber 100, and the hollow shaft 210 is rotatably connected to the sleeve assembly 220, so that the hollow shaft 210 can be installed in the cooling chamber 100 through the sleeve assembly 220. In addition, the hollow shaft 210 passes through the cooling chamber 100 and is connected to the magnetic control component 300 inside the cooling chamber 100, thereby driving the magnetic control component 300 to rotate. The lower end of the hollow shaft 210 is located inside the cooling chamber 100, and the coolant flows out from the lower end of the hollow shaft 210, thus reducing the inlet height of the coolant. The low-temperature coolant will flow downwards, thereby contacting the target assembly 140 more quickly.

[0040] In some embodiments, the driving unit is a drive motor 240, which is fixed to the upper electrode cover plate 120 by a motor fixing member 241. The driving pulley 252 and the driven pulley 253 are at approximately the same height. The driving pulley 252 and the driven pulley 253 are inserted into the transmission belt and tensioned to realize the transmission between the driving pulley 252 and the driven pulley 253. To improve the synchronization rate between the drive motor 240 and the hollow shaft 210, the transmission belt can be a synchronous belt 251, and the driving pulley 252 and the driven pulley 253 can be synchronous pulleys. Of course, ordinary belts and pulleys can also be used for the transmission components, which are not limited here.

[0041] In some embodiments, the driven wheel 253 is provided with a receiving cavity on the side near the cooling cavity 100, and the sleeve assembly 220 is partially disposed in the receiving cavity.

[0042] As shown in Figure 2, in this embodiment, the driven wheel 253 is provided with a cavity for accommodating the sleeve assembly 220. Therefore, the driven wheel 253 and the sleeve assembly 220 can partially overlap in the axial direction, thereby reducing the space occupied by the driven wheel 253 and the sleeve assembly 220 and making the upper electrode device structure more compact.

[0043] In some embodiments, as shown in FIG2, two locking nuts 254 are also provided on the outer periphery of the hollow shaft 210. The two locking nuts 254 fix the driven wheel 253 from both sides of the hollow shaft 210 along the axial direction. For example, the two locking nuts 254 are respectively locked to the upper end face of the driven wheel 253 and the inner surface of the receiving cavity opposite to it. Specifically, the lower side of the receiving cavity of the driven wheel 253 has an opening, and the cavity wall of the driven wheel 253 that constitutes the receiving cavity and is opposite to the opening is provided with a through hole. The hollow shaft 210 passes through the through hole and is inserted into the driven wheel 253. The two locking nuts 254 are threadedly connected to the hollow shaft 210 and are respectively locked to the upper and lower surfaces of the cavity wall, thereby fixing the driven wheel 253 to the hollow shaft 210. Of course, the driven wheel 253 can also be fixedly connected to the hollow shaft 210 in other ways, which are not limited here.

[0044] In some embodiments, as shown in FIG1, the cooling chamber 100 is provided with a mounting hole 120a. The hollow shaft 210 partially passes through the mounting hole 120a into the cooling chamber 100. The outer peripheral surface of the cylinder 221 is provided with a connecting platform 221a. The connecting platform 221a is stacked on the upper surface of the cooling chamber 100, and a first sealing ring 228 is provided between the connecting platform 221a and the upper surface of the cooling chamber 100 for sealing the mounting hole 120a. Further, in some embodiments, the lower end of the cylinder 221 is provided with an annular positioning part 221b nested in the mounting hole 120a. The positioning part 221b surrounds the hollow shaft 210, and the outer peripheral surface of the positioning part 221b is in a limiting fit with the hole wall of the mounting hole 120a.

[0045] Specifically, the positioning part 221b of the cylinder 221 is inserted into the mounting hole 120a, and the two can be connected by interference fit, threaded connection, or other means. The connecting platform 221a fits against the upper surface of the upper electrode cover plate 120, and the first sealing ring 228 is disposed between the connecting platform 221a and the upper electrode cover plate 120, with the mounting hole 120a located inside the first sealing ring 228. The connecting platform 221a and the upper electrode cover plate 120 press the first sealing ring 228 together, improving the sealing between the cylinder 221 and the cooling chamber 100 and preventing coolant leakage between the cylinder 221 and the cooling chamber 100.

[0046] In some embodiments, as shown in FIG1, the upper electrode device further includes a connecting assembly 260, the connecting assembly 260 including a rotating shield 261 and a second sealing assembly, the rotating shield 261 being rotatably connected to the hollow shaft 210, the second sealing assembly being used to achieve a dynamic seal between the rotating shield 261 and the end of the hollow shaft 210 away from the magnetic control component 300, and the rotating shield 261 being provided with an inlet 266 communicating with the medium channel.

[0047] The hollow shaft 210 rotates under the drive of the drive motor 240, and the hollow shaft 210 needs to be connected to the infusion pipe 280. The rotating shield 261 is provided with an inlet 266, which can be connected to the infusion pipe 280. The upper end of the hollow shaft 210 passes through the rotating shield 261 and is rotatably connected to the rotating shield 261. The coolant enters the rotating shield 261 through the inlet 266 and then enters the medium channel of the hollow shaft 210 through the rotating shield 261. The second sealing assembly is set between the rotating shield 261 and the hollow shaft 210, realizing a dynamic seal between the rotating shield 261 and the hollow shaft 210, and preventing coolant leakage.

[0048] In some embodiments, as shown in FIG2, the connecting assembly 260 further includes a protective bearing 264, which is located between the hollow shaft 210 and the rotating protective cover 261, and on the side of the second sealing assembly away from the liquid inlet 266. In the specific embodiments shown in FIG1 and FIG2, the number of protective bearings 264 may be two, and they are distributed along the axial direction of the hollow shaft 210. Of course, the number of protective bearings 264 is not limited to this. The inner ring of the protective bearing 264 is fixedly connected to the outer peripheral surface of the hollow shaft 210, and the outer ring of the protective bearing 264 is fixedly connected to the inner peripheral surface of the rotating protective cover 261. The protective bearing 264 can support the hollow shaft 210 and reduce the friction between the hollow shaft 210 and the rotating protective cover 261. The connecting assembly 260 also includes two retaining rings 265, an upper retaining ring and a lower retaining ring. The upper retaining ring is connected to the hollow shaft 210. The outer circumferential surface of the hollow shaft 210 is also provided with a shoulder for supporting the inner ring of the protective bearing 264. The inner rings of the two protective bearings 264 are located between the shoulder and the upper retaining ring. The upper retaining ring and the shoulder are used to position the protective bearings 264. The inner circumferential surface of the rotating protective cover 261 is provided with a limiting step. The lower retaining ring is connected to the rotating protective cover 261 and is located below the limiting step. The two protective bearings 264 are located between the limiting step and the lower retaining ring. The lower retaining ring and the limiting step are used to position the protective bearings 264. Of course, the protective bearings 264 can also be positioned in other ways, which are not limited here.

[0049] In some embodiments, the second sealing assembly includes a second rotating ring 263 and a second stationary ring 262. The second rotating ring 263 is disposed on the outer periphery of the hollow shaft 210, and the inner peripheral surface of the second rotating ring 263 is in contact with the outer peripheral surface of the hollow shaft 210. The outer peripheral surface of the second stationary ring 262 is in contact with the inner peripheral surface of the rotating cover 261, and the lower end surface of the second stationary ring 262 is rotatably in contact with the upper end surface of the second rotating ring 263. The hollow shaft 210 may, for example, be inserted into the second stationary ring 262.

[0050] As shown in Figure 2, the second sealing assembly uses a dynamic and static ring seal. The interior of the rotating cover 261 has an annular mounting groove with the bottom surface of the groove facing downwards. The second static ring 262 is disposed in the mounting groove and fits tightly against the side and bottom surfaces of the mounting groove. The bottom surface of the mounting groove can limit the second static ring 262 axially. The second dynamic ring 263 is sleeved on the outer circumferential surface of the hollow shaft 210 and fits tightly against it; the hollow shaft 210 may also be provided with a second stepped surface for limiting the second dynamic ring 263 axially, and the second dynamic ring 263 is disposed on the second stepped surface. The second static ring 262 is located above the second dynamic ring 263, and the bottom surface of the mounting groove of the rotating cover 261 abuts against the upper end surface of the second static ring 262, so that the lower end surface of the second static ring 262 and the upper end surface of the second dynamic ring 263 can be rotatably fitted relative to each other. When the hollow shaft 210 rotates, the second stationary ring 262 fits against the side and bottom surface of the mounting groove, and the second moving ring 263 fits against the outer circumferential surface and the second step surface of the hollow shaft 210. The lower end face of the second stationary ring 262 and the upper end face of the second moving ring 263 can be rotatably fitted against each other, thereby blocking the flow channel of coolant between the rotating shield 261 and the hollow shaft 210, and achieving a seal between the connecting assembly 260 and the hollow shaft 210. Example 2

[0051] In an embodiment where the hollow shaft 210 is fixedly installed, for example, fixedly connected to the cooling chamber 100, as shown in Figures 3 and 4, the bottom cover 222 has an annular boss 222a surrounding a through hole on the side near the cylinder 221. The outer peripheral surface of the boss 222a is spaced apart from the inner peripheral surface of the cylinder 221, and the inner peripheral surface of the boss 222a is spaced apart from the outer peripheral surface of the hollow shaft 210. Furthermore, a first moving ring 232 is disposed in the gap between the outer peripheral surface of the boss 222a and the inner peripheral surface of the cylinder 221, and the inner peripheral surface of the first moving ring 232 is in close contact with the outer peripheral surface of the boss 222a. A first stationary ring 231 is located above the first moving ring 232 and is sleeved on the hollow shaft 210, and the inner peripheral surface of the first stationary ring 231 is in close contact with the outer peripheral surface of the hollow shaft 210, and the outer peripheral surface of the first stationary ring 231 is spaced apart from the inner peripheral surface of the cylinder 221. The hollow shaft 210 may also be provided with a first stepped surface for limiting the first stationary ring 231 in the axial direction of the hollow shaft 210. After the hollow shaft 210 and the sleeve assembly 220 are assembled, the first stepped surface abuts against the upper end face of the first stationary ring 231, the upper end face of the bottom cover 222 supports the first moving ring 232, and the lower end face of the first stationary ring 231 and the upper end face of the first moving ring 232 can be rotatably fitted and sealed. When the sleeve assembly 220 rotates, the first moving ring 232 tightly fits the upper end face of the bottom cover 222 and the outer peripheral surface of the boss 222a, and the first moving ring 232 rotates synchronously with the sleeve assembly 220; the first stationary ring 231 tightly fits the outer peripheral surface of the hollow shaft 210 and the first step surface, and remains fixed relative to the sleeve assembly 220; the lower end face of the first moving ring 232 and the upper end face of the first stationary ring 231 can rotate relative to each other to form a seal, thereby blocking the passage for coolant to enter the interior of the cylinder 221 while ensuring that the cylinder 221 and the hollow shaft 210 can move relative to each other, thus achieving a seal between the sleeve assembly 220 and the hollow shaft 210.

[0052] In some embodiments, as shown in FIG3, a shaft fixing member 211 is also included, and the hollow shaft 210 is fixedly connected to the cooling chamber 100 through the shaft fixing member 211. The driving unit is used to drive the sleeve assembly 220 to rotate around the axis of the hollow shaft 210, and the magnetic control component 300 is fixedly connected to the sleeve assembly 220; the driving mechanism includes a driving unit and a transmission assembly, the transmission assembly includes a drive wheel 252 and a transmission belt, the transmission belt is tensioned through the drive wheel 252 and the cylinder 221, the cooling chamber 100 is provided with a mounting hole 120a, and the lower end of the sleeve assembly 220 is dynamically sealed to the mounting hole 120a through a third sealing component 270.

[0053] Specifically, as shown in Figure 3, the shaft fixing member 211 is fixedly connected to the upper electrode cover plate 120. The shaft fixing member 211 has a through hole, through which the hollow shaft 210 passes and is fixed. The sleeve assembly 220 is sleeved on the outer circumference of the hollow shaft 210 and rotates under the drive of the drive assembly. The lower end of the hollow shaft 210 enters the cooling chamber 100. As shown in Figure 3, the lower end of the hollow shaft 210 extends into the interior of the cooling chamber 100. The coolant flows out from the lower end of the hollow shaft 210, thus reducing the inlet height of the coolant. The low-temperature coolant will flow downward, thereby contacting the target assembly 140 more quickly and improving the heat dissipation efficiency of the target.

[0054] In some embodiments, the driving unit is a drive motor 240, which is fixed to the upper electrode cover plate 120 by a motor fixing member 241. A transmission structure is provided on the outer circumferential surface of the cylinder 221. The drive wheel 252 and the transmission structure are at approximately the same height. The drive wheel 252 and the cylinder 221 are inserted into a transmission belt and tensioned to achieve transmission between the drive wheel 252 and the cylinder 221. To improve the synchronization rate between the drive motor 240 and the hollow shaft 210, the transmission belt can be a synchronous belt 251, the drive wheel 252 can be a synchronous pulley, and the transmission structure can be a transmission gear. Of course, ordinary belts and pulleys can also be used for the transmission components, and the transmission structure can be a transmission surface or a transmission groove; no limitation is made here.

[0055] As shown in Figure 4, in this embodiment, the transmission structure is set on the outer circumferential surface of the cylinder 221. By setting the transmission structure on the cylinder 221, the cylinder 221 can be used as a driven wheel, so there is no need to set a driven wheel separately, making the upper electrode device structure more compact.

[0056] In some embodiments, as shown in FIG4, the third sealing assembly 270 includes a third moving ring 272 and a third stationary ring 271. The cooling chamber 100 is provided with a mounting hole 120a. A portion of the cylinder 221 is located in the mounting hole 120a. The third stationary ring 271 is located in the mounting hole 120a, and the outer peripheral surface of the third stationary ring 271 is in contact with the hole wall of the mounting hole 120a. The third moving ring 272 is located above the third stationary ring 271 in the mounting hole 120a and is sleeved on the outer periphery of the portion of the cylinder 221 located in the mounting hole 120a. The inner peripheral surface of the third moving ring 272 is in contact with the outer peripheral surface of the cylinder 221. The upper end surface of the third stationary ring 271 and the lower end surface of the third moving ring 272 are rotatably in contact with each other.

[0057] As shown in Figures 3 and 4, the third sealing assembly 270 also employs a dynamic and static ring seal. The mounting hole 120a is provided with a first section, a second section, and a third section from top to bottom. The diameters of the three sections decrease sequentially. The diameters of the first two sections are greater than or equal to the diameter of the third static ring 271, while the diameter of the lowest section is smaller than that of the third static ring 271. The third static ring 271 can be installed in the second section and fits tightly against the inner wall of the second section. The upper end face of the third section can limit the axial movement of the third static ring 271. The outer circumferential surface of the cylinder 221 has a downward-facing third stepped surface. The third dynamic ring 272 is fitted onto the outer circumference of the cylinder 221 and fits tightly against the outer circumferential surface of the cylinder 221 and the third stepped surface. After the sleeve assembly 220 and the cooling chamber 100 are assembled, the third stationary ring 271 is located below the third moving ring 272, the third stepped surface abuts against the upper end surface of the third moving ring 272, and the third hole section supports the third stationary ring 271, so that the lower end surface of the third moving ring 272 and the upper end surface of the third stationary ring 271 can be rotatably fitted together. When the sleeve assembly 220 rotates, the third moving ring 272 fits against the inner circumferential surface of the second hole section and the upper end surface of the third hole section of the mounting hole 120a, and the third stationary ring 271 fits against the outer circumferential surface of the cylinder 221 and the third stepped surface. The lower end surface of the third moving ring 272 and the upper end surface of the third stationary ring 271 can be rotatably fitted together, thereby blocking the channel for coolant to flow out between the cylinder 221 and the mounting hole, and achieving a seal between the sleeve assembly 220 and the cooling chamber 100.

[0058] This application also provides a magnetron sputtering apparatus, including a process chamber and an upper electrode device as described in any of the above embodiments. The structure of other parts of the magnetron sputtering apparatus can be referred to the prior art, and will not be described in detail here.

[0059] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of this application, and this application is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this application, and these modifications and improvements are also considered to be within the scope of protection of this application. [Simplified Explanation of the Diagram]

[0022] Figure 1 is a structural schematic diagram of the upper electrode device provided in one specific embodiment of this application; Figure 2 is a structural schematic diagram of the connection component, hollow shaft and sleeve assembly in Figure 1; Figure 3 is a structural schematic diagram of the upper electrode device provided in another specific embodiment of this application; Figure 4 is a structural schematic diagram of the hollow shaft and sleeve assembly in Figure 3.

Claims

1. An upper electrode device, applied in a magnetron sputtering apparatus, wherein, The device includes a magnetic control component, a cooling chamber, a sleeve assembly, a hollow shaft, and a drive mechanism. A target assembly is located at the bottom of the cooling chamber, and the magnetic control component is disposed within the cooling chamber. A portion of the hollow shaft extends into the cooling chamber, and a medium channel is provided inside the hollow shaft for supplying coolant to the cooling chamber. The sleeve assembly is fitted around the outer circumference of the hollow shaft and supports it. The sleeve assembly includes a cylindrical body and a bottom cover, with the cylindrical body and bottom cover fixedly connected. One of the hollow shaft and the sleeve assembly is fixedly disposed, while the other is connected to the magnetic control component and the drive mechanism, which drives the magnetic control component to rotate around the axis of the hollow shaft, and the cylindrical body and the hollow shaft exhibit relative motion.

2. The upper electrode device according to claim 1, wherein, The sleeve assembly is sealed to the cooling chamber, and the upper electrode device also includes a first sealing assembly for achieving a dynamic seal between the sleeve assembly and the hollow shaft.

3. The upper electrode device according to claim 2, wherein, The cylinder is fitted around the outer periphery of the hollow shaft, and the bottom cover is fixedly connected to the lower end of the cylinder. The bottom cover has a through hole, through which the hollow shaft passes and is supported by the bottom cover. The first sealing assembly is disposed between the bottom cover, the cylinder, and the hollow shaft.

4. The upper electrode device according to claim 3, wherein, The first sealing assembly includes a first stationary ring and a first rotating ring. The first stationary ring seals and connects one of the hollow shaft and the sleeve assembly that is fixedly disposed therein, and the first rotating ring seals and connects the other of the hollow shaft and the sleeve assembly that is connected to the magnetic control component. The end faces of the first rotating ring and the first stationary ring are rotatably fitted and sealed to each other.

5. The upper electrode device according to claim 4, wherein, The sleeve assembly is fixedly installed. The hollow shaft is connected to the magnetic control component and the drive mechanism. The bottom cover has an annular boss surrounding the through hole on the side near the cylinder. The outer circumferential surface of the boss and the inner circumferential surface of the cylinder are provided with a second sealing ring. The inner circumferential surface of the boss and the outer circumferential surface of the hollow shaft are spaced apart. The first stationary ring is disposed in the space and fits against the inner circumferential surface of the boss and the upper end surface of the bottom cover. The first moving ring is located above the first stationary ring and is sleeved on the outer circumferential surface of the hollow shaft. The hollow shaft is also provided with a first stepped surface. The first stepped surface abuts against the upper end surface of the first moving ring. The upper end surface of the bottom cover supports the first stationary ring.

6. The upper electrode device according to claim 4, wherein, The hollow shaft is fixedly installed, the sleeve assembly is connected to the magnetic control component, and connected to the drive mechanism; the bottom cover has an annular boss around the through hole on the side near the cylinder body, the outer peripheral surface of the boss is spaced apart from the inner peripheral surface of the cylinder body, the first moving ring is disposed in the gap, and the inner peripheral surface of the first moving ring is in contact with the outer peripheral surface of the boss; the first stationary ring is located above the first moving ring and is sleeved on the hollow shaft, and the inner peripheral surface of the first stationary ring is in contact with the outer peripheral surface of the hollow shaft, the hollow shaft is also provided with a first stepped surface, the first stepped surface abuts against the upper end surface of the first stationary ring, and the upper end surface of the bottom cover supports the first moving ring.

7. The upper electrode device according to claim 1, wherein, The sleeve assembly is fixedly installed, the hollow shaft is connected to the magnetic control component, and connected to the drive mechanism; the drive mechanism includes a drive unit and a transmission assembly, the transmission assembly includes a drive wheel, a transmission belt and a driven wheel, the drive wheel is connected to the drive unit, the driven wheel is fixedly installed on the outer periphery of the hollow shaft, and the transmission belt is tensioned through the drive wheel and the driven wheel.

8. The upper electrode device according to claim 7, wherein, The hollow shaft is also provided with two locking nuts on its outer circumference. The two locking nuts are threaded to the hollow shaft and lock the driven wheel from both sides of the hollow shaft in the axial direction.

9. The upper electrode device according to claim 7, wherein, The driven wheel has a receiving cavity on the side near the cooling chamber, and the sleeve assembly is partially disposed in the receiving cavity.

10. The upper electrode device according to claim 1, wherein, The sleeve assembly is fixedly installed, the hollow shaft is connected to the magnetic control component, and connected to the drive mechanism; the upper electrode device also includes a connecting assembly, which includes a rotating shield and a second sealing assembly. The rotating shield is rotatably connected to the hollow shaft, and the second sealing assembly is used to achieve a dynamic seal between the rotating shield and the end of the hollow shaft away from the magnetic control component. The rotating shield is provided with an inlet communicating with the medium channel.

11. The upper electrode device according to claim 10, wherein, The second sealing assembly includes a second rotating ring and a second stationary ring. The second rotating ring is disposed on the outer periphery of the hollow shaft. The inner peripheral surface of the second rotating ring is in contact with the outer peripheral surface of the hollow shaft. The outer peripheral surface of the second stationary ring is in contact with the inner peripheral surface of the rotating shield. The lower end surface of the second stationary ring is rotatably in contact with the upper end surface of the second rotating ring.

12. The upper electrode device according to claim 3, wherein, The sleeve assembly is fixedly installed, the hollow shaft is connected to the magnetic control component and the drive mechanism; the cooling cavity is provided with a mounting hole, the hollow shaft passes through the mounting hole and enters the cooling cavity, the outer circumferential surface of the cylinder is provided with a connecting platform, the connecting platform is stacked on the upper surface of the cooling cavity, and a first sealing ring is provided between the connecting platform and the cooling cavity.

13. The upper electrode device according to claim 3, wherein, The hollow shaft is fixedly installed, the sleeve assembly is connected to the magnetic control component, and connected to the drive mechanism; the upper electrode device also includes a shaft fixing component, and the hollow shaft is fixedly connected to the cooling cavity through the shaft fixing component; the drive mechanism includes a drive unit and a transmission assembly, the transmission assembly includes a drive wheel and a transmission belt, the transmission belt is tensioned through the drive wheel and the cylinder, the cooling cavity is provided with a mounting hole, the lower end of the sleeve assembly is dynamically sealed to the mounting hole through a third sealing component, and the drive unit is used to drive the sleeve assembly to rotate around the axis of the hollow shaft.

14. The upper electrode device according to claim 13, wherein, The third sealing assembly includes a third rotating ring and a third stationary ring. The cooling chamber has a mounting hole, and the cylindrical body portion is located in the mounting hole. The third stationary ring is located in the mounting hole, and the outer peripheral surface of the third stationary ring is in contact with the hole wall of the mounting hole. The third rotating ring is located above the third stationary ring in the mounting hole and is sleeved on the outer periphery of the portion of the cylindrical body located in the mounting hole. The inner peripheral surface of the third rotating ring is in contact with the outer peripheral surface of the cylindrical body. The upper end face of the third stationary ring and the lower end face of the third rotating ring are rotatably fitted relative to each other.

15. A magnetron sputtering apparatus, wherein, Includes the process chamber and the upper electrode device described in any one of claims 1 to 14.

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