Plasma active particle generation device with replaceable modular housing

Abstract

A plasma active particle generating device with a replaceable modular outer casing mainly comprises an upper housing; a lower housing, the top of which is detachably attached to the bottom of the upper housing; a lower cover, which is detachably attached to the bottom of the lower housing, the lower cover having a connector with a flow channel for connecting to an outlet pipe; an electrode holder; an insulating manifold having a vertical section and a branch section extending to one side from the vertical section, the end of the branch section being exposed outside the upper housing through the reactive gas inlet; a high-voltage electrode, partially extending downward into the vertical section; and a low-voltage electrode.

Claims

1. A plasma active particle generating device with a replaceable modular outer casing, comprising: an upper housing having a top having a connection port, the upper housing also having at least one protective gas inlet and a reactive gas inlet; a lower housing having its top detachably connected to the bottom of the upper housing, thereby forming an internal space together with the upper housing, the internal space communicating with the at least one protective gas inlet; a lower cover having a detachable cover to the bottom of the lower housing, the lower cover having a connector having a flow channel for connecting an outlet pipe and allowing the outlet pipe to communicate with the internal space via the connector; an electrode holder disposed at the connection port of the upper housing; an insulating manifold located in the internal space, having a vertical pipe section and a branch pipe section extending to one side from the vertical pipe section, the vertical pipe section and the branch pipe section being spatially connected, the top of the vertical pipe section being disposed at the electrode holder, and the end of the branch pipe section being exposed outside the upper housing through the reactive gas inlet; A high-voltage electrode, elongated in shape, is mounted on an electrode holder, with a portion extending downwards into the riser section and another portion protruding upwards above the electrode holder; and a low-voltage electrode is located within the internal space; wherein... The upper shell, the lower shell, the lower cover, and the electrode mounting base together enclose the internal space and prevent it from communicating with the outside. The reaction gas system used for plasma reaction enters the riser section from the branch pipe section, flows out from the bottom of the riser section into the internal space, and then flows out through the outlet pipe. The at least one protective gas inlet allows a protective gas to enter the internal space and then flows out through the outlet pipe.

2. The plasma active particle generating apparatus with a replaceable modular housing as described in claim 1, wherein: The lower housing is connected to the upper housing system by a threaded connection, the lower cover is connected to the lower housing system by a threaded connection, and the connector is connected to the lower cover system by a threaded connection.

3. The plasma active particle generating apparatus with a replaceable modular housing as described in claim 1, wherein: The upper housing has a side portion, the at least one protective gas inlet is located at the top of the upper housing, and the reactive gas inlet is located at the side portion of the upper housing.

4. The plasma active particle generating apparatus with a replaceable modular housing as described in claim 1, wherein: The low-voltage electrode is installed on the riser section and is located outside the riser section.

5. The plasma active particle generating apparatus with a replaceable modular housing as described in claim 1, wherein: The high-voltage electrode system does not extend to the connector.

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