Test circuits, test devices, and test methods

Abstract

This invention provides a test circuit comprising: a measurement circuit that generates an output voltage and uses the output voltage to perform a voltage-current measurement test on a device under test; a pulse generation circuit that, in functional testing of the device under test, uses the output voltage of the measurement circuit to generate a pulse signal and supplies the pulse signal to the terminals of the device under test, and in voltage-current measurement testing, allows the output voltage of the measurement circuit to pass through and supplies the output voltage as a test voltage to the terminals of the device under test; and an output feedback line connected to the output side of the pulse generation circuit to feed back the voltage from the output side to the measurement circuit.

Description

[Technical Field]

[0001] This invention relates to a test circuit, a test device, and a test method. [Previous Technology]

[0002] Patent Document 1 describes "a testing device including a determination unit, which determines the quality of the device under test based on the load voltage or load current applied to the device under test when supplying a test signal of constant current or constant voltage from a driver circuit to the device under test. The driver circuit includes: a driver unit that outputs a test signal; a power supply current detection unit that detects the power supply current supplied to the driver unit; and an input control unit that controls the voltage or current of the test signal output by the driver unit to a predetermined value based on the power supply current detected by the power supply current detection unit" (paragraph 0008 of Patent Document 1).

[0003] Patent Document 2 describes that: a digital control loop (DCL) 302 supplies control output to an output stage 310 via a digital-to-analog converter (DAC) 304; feedback from the output stage 310 is supplied to an analog-to-digital converter (ADC) 306 and a voltage ADC output terminal 320 via a current sensing component 312 and a voltage sensing component 314, respectively; current feedback is obtained from the current flowing in the current shunt resistor 316; voltage feedback is obtained between the output terminal 320 and the output terminal 322, etc. (paragraph 0034 of Patent Document 2).

[0004] Patent Document 3 describes a power supply device comprising: "an analog-to-digital (A / D) converter for voltage, which receives, via a feedback line, an analog voltage observation corresponding to the power supply voltage supplied to the power supply terminal of the device, and performs analog-to-digital conversion on the analog voltage observation to generate a digital voltage observation; a digital arithmetic unit, which generates, through digital arithmetic processing, a main control value adjusted so that the digital voltage observation matches the voltage target value; and a main digital-to-analog (D / A) converter." A converter performs a digital-to-analog conversion on the main control value and supplies the analog power signal obtained from the digital-to-analog conversion to the power terminals of the device via the power line; a main sensing resistor is disposed on the path of the power line and its resistance value is switchable; a main sensing amplifier generates an analog main current observation value representing the amount of power current flowing in the power line based on the voltage between the two ends of the main sensing resistor; and a main current A / D converter performs an analog-to-digital conversion on the analog main current observation value to generate a digital main current observation value (claim 1 of Patent Document 3). [Prior Art Documents] [Patent Documents] [Patent Document 1] International Publication No. 2009 / 157126 [Patent Document 2] U.S. Patent Application Publication No. 2009 / 0121908 [Patent Document 3] Japanese Patent Application Publication No. 2014-10010 [Summary of the Invention]

[0005] In a first aspect of the present invention, a test circuit is provided, comprising: a measurement circuit that generates an output voltage and uses the output voltage to perform a voltage-applied current measurement test on a device under test; a pulse generation circuit that, in a functional test of the device under test, uses the output voltage of the measurement circuit to generate a pulse signal and supplies the pulse signal to a terminal of the device under test, and in the voltage-applied current measurement test, allows the output voltage of the measurement circuit to pass through and supplies the output voltage as a test voltage to a terminal of the device under test; and an output feedback line connected to the output terminal side of the pulse generation circuit to feed back the voltage of the output terminal side to the measurement circuit.

[0006] In the test circuit, the pulse generation circuit may, during the functional test, use the output voltage of the measuring circuit to generate a pulse signal with multiple signal values ​​and supply the pulse signal to the terminals of the device under test. During the voltage-applied current measurement test, the circuit consistently outputs the signal value that allows the output voltage to pass through, thereby allowing the output voltage of the measuring circuit to pass through, and supplying the output voltage as a test voltage to the terminals of the device under test. In any of the test circuits, during the voltage-applied current measurement test, the measuring circuit may also use the test voltage fed back from the output feedback line to adjust the output voltage.

[0007] Any of the test circuits may also include an input feedback line, which is connected to the input side of the pulse generation circuit to feed back the voltage at the input side to the measurement circuit.

[0008] In either of the test circuits, or in the functional test, the measuring circuit uses the voltage fed back from the input feedback line to adjust the output voltage.

[0009] In any of the test circuits, the pulse generation circuit may also have a resistor connected between the input terminal and the output terminal. In the voltage applied current measurement test, the measurement circuit uses the potential difference between the input terminal feedback line and the output terminal feedback line to measure the current flowing in the terminals of the device under test.

[0010] In any of the test circuits, the measuring circuit may also generate an output current and use the output current to perform a current-applied voltage measurement test on the device under test. In the current-applied voltage measurement test, the pulse generating circuit makes the output current of the measuring circuit pass through and supplies the output current as a test current to the terminal of the device under test.

[0011] In any of the test circuits, the measuring circuit may also measure the voltage fed back from the output feedback line in the current applied voltage measurement test.

[0012] In a second aspect of the present invention, a test apparatus is provided, which includes any of the test circuits.

[0013] In a third aspect of the present invention, a test method is provided, comprising: a measuring circuit generating an output voltage and using the output voltage to perform a voltage-applied current measurement test on a device under test; a pulse generating circuit using the output voltage of the measuring circuit to generate a pulse signal during a functional test of the device under test, and supplying the pulse signal to the terminals of the device under test; during the voltage-applied current measurement test, allowing the output voltage of the measuring circuit to pass through, and supplying the output voltage as a test voltage to the terminals of the device under test; and an output feedback line connected to the output terminal side of the pulse generating circuit to feed back the voltage of the output terminal side to the measuring circuit.

[0014] Furthermore, the above description does not list all the features of the present invention. Additionally, further combinations of these feature groups can also constitute an invention.

Implementation Method

[0016] Hereinafter, the present invention will be described by way of embodiments, but the following embodiments do not limit the scope of the invention to the claims. In addition, not all combinations of the features described in the embodiments are necessarily necessary for the solution of the invention.

[0017] Figure 1 shows the structure of the test apparatus 1 and the device under test (DUT) 10 of this embodiment. The device under test 10 is a device having a circuit formed thereon, which is the object of testing by the test apparatus 1. The device under test 10 may be a wafer with a circuit formed thereon, an integrated circuit / large scale integrated circuit (IC / LSI) chip obtained by monolithizing a wafer, or an IC / LSI package formed by packaging an IC / LSI chip, etc. In the example of this figure, the test apparatus 1 is equipped with one device under test 10, but it is also possible to replace this by equipping the test apparatus 1 with multiple devices under test 10 to perform tests simultaneously.

[0018] The test apparatus 1 performs electrical tests on the device under test 10. Alternatively or based on this, the test apparatus 1 can also perform optical input / output tests on the device under test 10. In this embodiment, the case where the test apparatus 1 performs electrical tests on the device under test 10 will be described as an example. When the test apparatus 1 performs optical input / output tests on the device under test 10, the test apparatus 1 and the device under test 10 can also be connected by an optical connection on the basis of an electrical connection.

[0019] The test apparatus 1 includes a test head 100, a plurality of pin electronics 110, a connection device 120, and a main frame 150. The test head 100 is a housing capable of housing the plurality of pin electronics 110. In the example of this figure, the test head 100 has a plurality of slots for inserting the plurality of pin electronics 110.

[0020] Multiple pin-based electronic devices 110 are inserted into slots in the test head 100, thereby being detachably connected to the backplane of the test head 100. The pin-based electronic devices 110 may also be referred to as "pin-based electronic cards," "test boards," or "test modules," etc. Each pin-based electronic device 110 is electrically connected to the device under test 10 via a connection device 120. Each pin-based electronic device 110 inputs / outputs signals to and from the device under test 10, and the device under test 10 is tested by checking the signals input from the device under test 10.

[0021] The connection device 120 is mounted on the test head 100 and electrically connected to a plurality of pin-mounted electronic devices 110. The connection device 120 is mounted on the device under test 10 and electrically connected to a plurality of terminals of the device under test 10. The connection device 120 serves as an interface between the terminals of the plurality of pin-mounted electronic devices 110 and the device under test 10, and electrically connects each terminal of one or more devices under test 10 to the corresponding terminals of the plurality of pin-mounted electronic devices 110 via signal cables or board wiring, etc.

[0022] The main frame 150 controls the various parts within the test apparatus 1 to perform tests on the device under test 10. In this embodiment, the main frame 150 is a frame independent of the frame on which the test head 100 is provided. Alternatively, the various structures within the main frame 150 may be housed in the same frame as the test head 100. The main frame 150 includes a main power supply 160 and a control device 170.

[0023] The main power supply unit 160 receives power from a commercial power supply or the like and supplies power to the various devices and circuits within the test apparatus 1. The control unit 170 is connected to the main power supply unit 160 and receives power from it. The control unit 170 controls the testing of the device under test 10. When implemented via a computer, the control unit 170 can control the testing of the device under test 10 by executing a test control program. The control unit 170 supplies test programs to each pin electronic device 110, causing each pin electronic device 110 to execute the supplied test programs, thereby testing the device under test 10. The control unit 170 collects and records the test results of the device under test 10 from each pin electronic device 110.

[0024] FIG2 shows the structure of the pin electronics device 200 of the comparative example of this embodiment. The pin electronics device 200 of the comparative example can be used as the pin electronics device 110 of the test device 1. The pin electronics device 200 includes a power supply unit 205, a test circuit 220 and a test control circuit 210.

[0025] The power supply unit 205 receives power from the main power supply device 160, generates power to supply to the circuits within the pin electronics device 200, and supplies power to the circuits within the pin electronics device 200. The power supply unit 205 has multiple power sources and can output various types of power with different rated voltages or rated currents.

[0026] The test circuit 220 is connected to the device under test 10 via the connection device 120 and receives power from the power supply unit 205 to test the device under test 10. This figure representatively shows the circuit portion of the test circuit 220 corresponding to one terminal of the device under test 10. The test circuit 220 can be connected to multiple terminals and has circuit portions corresponding to each terminal.

[0027] The test circuit 220 includes a test signal generator 230 for performing operational tests (also referred to as "functional tests") on the device under test 10. The test signal generator 230 receives power supply from the power supply unit 205 and control from the test control circuit 210, generates test signals to be supplied to the device under test 10 during the functional test, and supplies test signals to the terminals of the device under test 10. Here, the test signals generated by the test signal generator 230 can be pulse signals with a desired signal pattern, such as digital signals or multi-valued signals, that should be supplied to the device under test 10.

[0028] The test signal generator 230 includes a voltage generation circuit 240, a pattern generator 245, a timing generator 250, and a pulse generation circuit 255. The voltage generation circuit 240 receives power supply from the power supply unit 205 and control from the test control circuit 210, and generates the power supply voltage required by the pulse generation circuit 255 as the output voltage during functional testing. The voltage generation circuit 240 can supply the pulse generation circuit 255 with a power supply voltage corresponding to the high-level voltage in the pulse signal supplied to the terminals of the device under test 10 as the output voltage.

[0029] The pattern generator 245 receives power supply from the power supply unit 205 and control from the test control circuit 210, and generates a specified test pattern for the waveform of the pulse signal to be supplied to the terminals of the device under test 10 during functional testing. The pattern generator 245 can execute a test command for each test cycle with a predefined period and output a test pattern associated with the test command. The test pattern of each test cycle specifies the variation pattern of the test signal within the test cycle. Although it varies depending on the model, the pattern generator 245 may also be able to specify a pattern identifier representing the waveform shape, such as Return to Zero (RZ) or Non Return to Zero (NRZ), and the polarity of the waveform shape as such a variation pattern of the test signal.

[0030] The timing generator 250 receives power supply from the power supply unit 205 and control from the test control circuit 210, generating a timing sequence of pulse signals to be supplied to the terminals of the device under test 10 during functional testing. The timing generator 250 assigns a real-time timing sequence to the changing pattern of the test signal for each test cycle, thereby generating the waveform of the pulse signal to be supplied to the device under test 10. Furthermore, depending on the type of test apparatus 1, the pattern generator 245 can generate the test pattern for each test cycle, the timing generator 250 can generate the timing sequence for each test cycle, and the waveform shaper can use the timing sequence generated by the timing generator 250 to shape the waveform of the pulse signal supplied to the device under test 10.

[0031] The pulse generation circuit 255 receives the output voltage from the voltage generation circuit 240 and uses the output voltage from the voltage generation circuit 240 to generate a pulse signal and supply it to the terminals of the device under test 10 during functional testing. The pulse generation circuit 255 can drive the output to a high level or a low level (in the case of two values) or to multiple levels respectively, according to the waveform of the test signal after real-time timing changes are assigned to each test cycle, thereby outputting a pulse signal that changes the test mode generated by the pattern generator 245 due to the timing generated by the timing generator 250.

[0032] The test signal generator 230 shown above can be implemented by a group of discrete ICs, LSIs, or application-specific integrated circuits (ASICs), or by a single test signal generating ASIC. The test signal generator 230 may also have the following functions: receiving the response signal output by the device under test 10 according to the test signal, and determining whether the device under test 10 is good or bad. In this case, the test signal generator 230 may have a comparator that compares the response signal from the device under test 10 with a target value, and a determiner that uses the comparison result obtained by the comparator to determine whether the device under test 10 is good or bad.

[0033] A relay 260 is disposed between terminal Py of the test circuit 220, which is connected to the terminals of the device under test 10, and the test signal generator 230. The relay 260 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When performing functional tests on the device under test 10, the relay 260 is turned on by the test control circuit 210 or the like, connecting the test signal generator 230 to the terminals of the device under test 10. Conversely, when the measurement circuit 270 performs parametric tests on the device under test 10 (such as voltage-applied current measurement tests or current-applied voltage measurement tests), the relay 260 is turned off by the test control circuit 210 or the like, disconnecting the test signal generator 230 from the terminals of the device under test 10.

[0034] Wiring connections between the terminals of the measurement circuit 270 and the test signal generator 230 that output pulse signals and the terminals of the device under test 10. In the example of this figure, the measurement circuit 270 is connected via a relay 280 to a force line that applies voltage or current to the terminals of the device under test 10, and via a resistor 290 to a sensing line used to sense the voltage at the terminals of the device under test 10. Wiring connections between the force line, the sensing line, and the relay 260 to the terminals Py of the test circuit 220 connected to the terminals of the device under test 10.

[0035] The measurement circuit 270 receives power supply from the power supply unit 205 and control from the test control circuit 210 to perform parametric testing of the device under test 10. Regarding the measurement circuit 270, although it varies depending on the model, it can include various circuits, such as at least one of a voltage generator that generates a voltage supplied to the terminals of the device under test 10, a current generator that generates a current supplied to the device under test 10, a voltage measuring device that measures the voltage output by the device under test 10, a current measuring device that measures the current output by the device under test 10, and a frequency measuring device that measures the frequency of the signal output by the device under test 10. In the example shown in this figure, the measurement circuit 270 is housed within the pin electronics 200. Alternatively, the measurement circuit 270 can be implemented by other pin electronics 110 within the test apparatus 1.

[0036] In the case of performing a voltage-applied current measurement test, the measurement circuit 270 outputs a desired test voltage via a force line and measures the current flowing through the terminals of the device under test 10 that has received the test voltage. In the case of performing a current-applied voltage measurement test, the measurement circuit 270 flows a desired test current between itself and the terminals of the device under test 10 via a force line and measures the voltage at the terminals of the device under test 10 via a sensing line.

[0037] Relay 280 is disposed in the wiring between terminal Py of test circuit 220 and test signal generator 230, at a connection point closer to terminal Py than relay 260, and between relay 280 and measurement circuit 270. Relay 280 may be a mechanical relay or a semiconductor relay using a semiconductor switch, etc. During functional testing of device under test 10, relay 280 is disconnected by test control circuit 210, etc., disconnecting measurement circuit 270 from terminals of device under test 10. During parametric testing of device under test 10, relay 280 is connected by test control circuit 210, etc., connecting measurement circuit 270 to terminals of device under test 10.

[0038] Resistor 290 is disposed in the wiring between terminal Py of test circuit 220 and test signal generator 230, on the connection point closer to terminal Py than relay 260, and the sensing line between the connection point and the measuring circuit 270. Resistor 290 may be a relatively large resistor, such as 10 KΩ, which can substantially isolate the terminals of device under test 10 from the measuring circuit 270, while inputting the voltage of the terminals of device under test 10 to the measuring circuit 270.

[0039] The test control circuit 210 controls the test circuit 220 to perform tests on the device under test 10. The test control circuit 210 may also be referred to as a "site controller". The test control circuit 210 executes the test program supplied from the control device 170 and controls the various parts within the test circuit 220, thereby causing the test circuit 220 to perform tests such as operation tests or parameterization tests on the device under test 10.

[0040] In the pin electronics 200 shown above, a measurement circuit 270 is connected to the wiring between the terminal Px of the test signal generator 230 that outputs the pulse signal and the terminal of the device under test 10. During the functional test of the device under test 10, the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10 transmits a high-speed pulse signal. Here, during the functional test of the device under test 10, the relay 260 is turned on and the relay 280 is turned off, but the relay 260 has parasitic capacitance even when it is turned on, and the relay 280 has parasitic capacitance even when it is turned off. Therefore, the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10 generates a resistance-capacitance (RC) delay due to the parasitic capacitance of the relays 260 and 280, which hinders the transmission of the high-speed pulse signal.

[0041] FIG3 shows the structure of the pin electronics device 300 of this embodiment. The pin electronics device 300 is a variation of the pin electronics device 200. In this figure, structural components labeled with the same symbols as in FIG2 have the same functions and structures as in FIG2, therefore, descriptions are omitted except for the following differences.

[0042] The test circuit 320 is connected to the device under test 10 via the connection device 120 and receives power from the power supply unit 205 to test the device under test 10. This figure representatively shows the circuit portion of the test circuit 320 corresponding to one terminal of the device under test 10. The test circuit 320 can be connected to multiple terminals and has circuit portions corresponding to each terminal.

[0043] The test circuit 320 includes a test signal generator 330. In this embodiment, the test signal generator 330 receives power from the power supply unit 205 and control from the test control circuit 310, performing both functional and parametric tests on the device under test 10. The test circuit 320 can perform both functional and parametric tests on the same device under test 10 depending on the user's method of use. The test circuit 320 can perform functional tests on one device under test 10 and parametric tests on another device under test 10. Alternatively, depending on the user's method of use, the test circuit 320 can perform only one of the functional or parametric tests without using the other test function. The test signal generator 330 includes a measurement circuit 370, a pattern generator 245, a timing generator 250, a pulse generation circuit 255, and a resistor 290.

[0044] The measurement circuit 370 receives power supply from the power supply unit 205 and control from the test control circuit 310. The measurement circuit 370 performs parametric tests on the device under test 10. The measurement circuit 370 may vary depending on the type of parametric test it supports, but as an example, it may include at least one of the following: a voltage generator that generates a voltage supplied to the terminals of the device under test 10; a current generator that generates a current supplied to the device under test 10; a voltage measuring device that measures the voltage output by the device under test 10; a current measuring device that measures the current output by the device under test 10; and a frequency measuring device that measures the frequency of the signal output by the device under test 10.

[0045] The measurement circuit 370 of this embodiment may also perform at least one of a voltage-applied current measurement test or a current-applied voltage measurement test as a parametric test. In the voltage-applied current measurement test, the measurement circuit 370 generates an output voltage and uses the output voltage to perform a voltage-applied current measurement test on the device under test 10. The output voltage of the measurement circuit 370 is supplied to the terminals of the device under test 10 as a test voltage via the pulse generation circuit 255. In the current-applied voltage measurement test, the measurement circuit 370 generates an output current and uses the output current to perform a current-applied voltage measurement test on the device under test 10. The output current of the measurement circuit 370 is supplied to the terminals of the device under test 10 as a test current via the pulse generation circuit 255. Here, the output current of the measuring circuit 370 can be a positive current, that is, a current flowing from the measuring circuit 370 toward the terminal of the device under test 10 (ejection current, source current), or it can be a negative current, that is, a current flowing from the terminal of the device under test 10 toward the measuring circuit 370 (sink current, sink current).

[0046] In the functional test, the measuring circuit 370, like the voltage generating circuit 240 shown in FIG2, generates the power supply voltage required by the pulse generating circuit 255 in the functional test as the output voltage. The voltage generating circuit 240 can supply the power supply voltage corresponding to the high-level voltage in the pulse signal supplied to the terminals of the device under test 10 as the output voltage to the pulse generating circuit 255.

[0047] The pattern generator 245, timing generator 250, and pulse generation circuit 255 have the same functions and structure as those shown in FIG. 2. In the functional test of the device under test 10, the pulse generation circuit 255 uses the output voltage of the measurement circuit 370 to generate a pulse signal and supplies the generated pulse signal to the terminals of the device under test 10. In the voltage-applied current measurement test, the pulse generation circuit 255 allows the output voltage of the measurement circuit 370 to pass through and supplies the passed output voltage as a test voltage to the terminals of the device under test 10. In the current-applied voltage measurement test, the pulse generation circuit 255 allows the output current of the measurement circuit 370 to pass through and supplies the passed output current as a test current to the terminals of the device under test 10. Furthermore, the test circuit 320 can also use any circuit other than the pattern generator 245 and timing generator 250 to cause the pulse generation circuit 255 to generate a pulse signal.

[0048] The pulse generation circuit 255 has the function of outputting a digital signal or a multi-value signal during functional testing. Therefore, in at least one signal value (e.g., a high level in a digital signal, or the maximum value in a multi-value signal), the output voltage supplied from the measurement circuit 370 is passed through at least one of the resistors or switching elements within the pulse generation circuit 255, and the passed output voltage is output to the terminals of the device under test 10. The control device 170, the test control circuit 210, or the pattern generator 245 and the timing generator 250 are controlled in such a way that the pulse generation circuit 255 always outputs this signal value during the parameterized test. This allows the input and output terminals of the pulse generation circuit 255 to be connected via at least one of the resistors or switching elements, and the output voltage or output current of the measurement circuit 370 is supplied to the device under test 10 as a test voltage or test current via the pulse generation circuit 255.

[0049] The test signal generator 330 may also include an output feedback line FBo, which is connected to the output side of the pulse generation circuit 255 and feeds back the voltage at the output side to the measurement circuit 370. The output feedback line FBo may have the same function as the voltage sensing line shown in FIG2, and is connected to the connection point on the wiring between the output of the pulse generation circuit 255 and the terminal of the device under test 10, feeding back the voltage at the connection point to the measurement circuit 370. In the pin electronics 300 of this embodiment, the connection point is located near the output of the pulse generation circuit 255 within the test signal generator 330. Alternatively, the connection point may be located outside the test signal generator 330 within the test circuit 320, for example, near the terminal of the device under test 10, or outside the test circuit 320. The resistor 290 may be provided on the output feedback line FBo. The resistor 290 has the same function and structure as the resistor 290 shown in FIG2.

[0050] The test signal generator 330 may also include an input feedback line FBi, which is connected to the input side of the pulse generation circuit 255 and feeds back the voltage at the input side to the measurement circuit 370. In embodiments including the input feedback line FBi, the measurement circuit 370 can use the voltage fed back from the input feedback line to adjust the output voltage during functional testing. Furthermore, the resistor for the input feedback line FBi can be set in the same manner as the resistor 290 for the output feedback line FBo.

[0051] According to the pin electronics 300 shown above, the functions of the measurement circuit 270 and the voltage generation circuit 240 shown in FIG2 are implemented by the measurement circuit 370. Therefore, the voltage generation circuit 240 that generates the output voltage of the pulse generation circuit 255 in the functional test and the voltage generation circuit 270 that generates the test voltage in the voltage application current measurement test can be replaced by the voltage generation circuit in the measurement circuit 370 and shared in both the functional test and the voltage application current measurement test, thereby reducing the circuit size of the pin electronics 300.

[0052] Furthermore, according to the pin electronics 300 shown above, it is not necessary to connect the wiring from the pulse generation circuit 255 to the terminal of the device under test 10 to the measurement circuit 270, and relays 260 and 280 are not required. This reduces the circuit size of the pin electronics 300, eliminates the parasitic capacitance of relays 260 and 280, and prevents degradation of the high-speed pulse signal. In addition, in the pin electronics 300 of this embodiment, an output feedback line FBo (corresponding to the sensing line in FIG2) is also connected to the wiring from the pulse generation circuit 255 to the terminal of the device under test 10. Here, the output feedback line FBo has a resistor 290 with a relatively large resistance value, substantially isolating the wiring from the pulse generation circuit 255 to the terminal of the device under test 10 from the measurement circuit 370, while simultaneously feeding back the voltage of the terminal of the device under test 10 to the measurement circuit 370. Therefore, the degradation of the high-speed pulse signal caused by the output feedback line FBo is minimal.

[0053] FIG4 focuses on the operation of the pin electronics 300 in FIG3 and shows the operation flow of the functional test of the device under test 10 performed by the test apparatus 1 of this embodiment. Before the start of this operation flow, the test apparatus 1 electrically connects one or more pin electronics 300 to the device under test 10 via the connection device 120.

[0054] In step S400, the measurement circuit 370, under the control of the test control circuit 310, generates the power supply voltage required for pulse generation by the pulse generation circuit 255 during functional testing as the output voltage. During functional testing, the measurement circuit 370 can adjust the output voltage using the voltage fed back from the input feedback line FBi. For example, the measurement circuit 370 compares the feedback voltage fed back from the input feedback line FBi with the target output voltage, and increases the output voltage when the feedback voltage is lower than the target output voltage, and decreases the output voltage when the feedback voltage is higher than the target output voltage. Thus, the measurement circuit 370 can adjust the output voltage to be close to the target output voltage. Furthermore, the measurement circuit 370 can also perform output voltage feedback and adjustment internally.

[0055] In S410, the pattern generator 245, under the control of the test control circuit 310, generates a test pattern for each test cycle. In S420, the timing generator 250, under the control of the test control circuit 310, generates a timing sequence of pulse signals corresponding to the test pattern of each test cycle. In S430, the pulse generation circuit 255 uses the output voltage of the measurement circuit 370 to generate a pulse signal corresponding to the timing sequence from the timing generator 250 for each test cycle, and supplies the generated pulse signal to the terminals of the device under test 10. The pin electronics 300 can also receive the response signal output by the device under test 10 according to the test signal to determine whether the device under test 10 is good or bad.

[0056] According to the pin electronics 300 shown above, the voltage generator in the measurement circuit 370 used in the parametric testing of the device under test 10 can be used to supply the power supply voltage required by the pulse generation circuit 255 during functional testing. In addition, the measurement circuit 370 can use the feedback voltage from the input feedback line FBi to adjust the output voltage and reduce the error with the target output voltage.

[0057] FIG5 focuses on the operation of the pin electronics 300 in FIG3 and shows the operation flow of the voltage applied current measurement test of the device under test 10 performed by the test apparatus 1 of this embodiment. Before this operation flow begins, the test apparatus 1 electrically connects one or more pin electronics 300 to the device under test 10 via the connection device 120.

[0058] In S500, the measurement circuit 370 generates an output voltage for voltage application and current measurement testing. In S510, the pulse generation circuit 255 passes the output voltage of the measurement circuit 370 input from the measurement circuit 370, and supplies the passed output voltage as a test voltage to the terminals of the device under test 10.

[0059] In S520, the measurement circuit 370 uses the test voltage fed back from the output feedback line to adjust the output voltage. For example, the measurement circuit 370 compares the test voltage fed back from the output feedback line FBo with the target test voltage, and increases the output voltage when the fed-back test voltage is lower than the target test voltage, and decreases the output voltage when the fed-back test voltage is higher than the target test voltage. Thus, in the structure where the measurement circuit 370 supplies the test voltage to the terminals of the device under test 10 via the pulse generation circuit 255, even when there is resistance between the input and output terminals of the pulse generation circuit 255, the test voltage at the output terminal of the pulse generation circuit 255 can be adjusted to be close to the target value.

[0060] In S530, the measurement circuit 370 measures the current flowing through the terminals of the device under test 10 while a test voltage is supplied to the terminals of the device under test 10. In this embodiment, the measurement circuit 370 uses a resistor connected between the input and output terminals of the pulse generation circuit 255 as a sensing resistor to measure the current flowing through the terminals of the device under test 10. In this case, the measurement circuit 370 measures the current flowing through the terminals of the device under test 10 using the potential difference between the input feedback line FBi and the output feedback line FBo. For example, assuming the internal resistance of the pulse generation circuit 255 when the output voltage of the measurement circuit 370 passes from the input terminal to the output terminal is R, the voltage at the input terminal of the pulse generation circuit 255 measured using the input feedback line FBi is Vi, and the voltage at the output terminal of the pulse generation circuit 255 measured using the output feedback line FBo is Vo. The current flowing through the terminals of the device under test 10 is essentially the same as the current flowing through the pulse generation circuit 255, and is the value obtained by dividing the potential difference (Vi-Vo) between the input feedback line FBi and the output feedback line FBo by the internal resistance R.

[0061] According to the pin electronics 300 shown above, the voltage applied current measurement test of the device under test 10 can be performed by the pulse generation circuit 255 used in the functional test of the device under test 10. The measurement circuit 370 can measure the test voltage at the output terminal of the pulse generation circuit 255 and adjust the output voltage. In addition, the measurement circuit 370 can calculate the current flowing in the terminals of the device under test 10 using the internal resistance of the pulse generation circuit 255.

[0062] FIG6 focuses on the operation of the pin electronics 300 and shows the operation flow of the current applied voltage measurement test of the device under test 10 performed by the test apparatus 1 of this embodiment. Before the start of this operation flow, the test apparatus 1 electrically connects one or more pin electronics 300 to the device under test 10 via the connection device 120.

[0063] In S600, the measuring circuit 370 generates a current, applies a voltage, and measures the output current for testing. Depending on the test requirements, the output current can be either a positive current or a negative current. In S610, the pulse generating circuit 255 allows the output current of the measuring circuit 370, which is input from the measuring circuit 370, to pass through it, and supplies the passed output current as a test current to the terminals of the device under test 10.

[0064] In S620, the measurement circuit 370 measures the voltage fed back from the output feedback line FBo. The measurement circuit 370 can use the measured voltage to measure or calculate the voltage at the terminal of the device under test 10. For example, if the wiring resistance from the connection point of the output feedback line FBo to the terminal of the device under test 10 in the wiring from the output of the pulse generation circuit 255 to the terminal of the device under test 10 can be ignored, the measurement circuit 370 can measure the voltage fed back from the output feedback line FBo as the voltage at the terminal of the device under test 10. If the wiring resistance from the connection point of the output feedback line FBo to the terminal of the device under test 10 in the wiring from the output of the pulse generation circuit 255 to the terminal of the device under test 10 is taken into account, the measurement circuit 370 can add the voltage obtained by measuring the voltage drop (in the case of positive current) or voltage rise (in the case of negative current) caused by the test current flowing in the known wiring resistance, thereby calculating the voltage at the terminal of the device under test 10.

[0065] According to the pin electronics 300 shown above, the current applied voltage measurement test of the device under test 10 can be performed by the pulse generation circuit 255 used in the functional test of the device under test 10. The measurement circuit 370 can measure the voltage at the terminals of the device under test 10 at the output end of the pulse generation circuit 255.

[0066] Furthermore, in S600 and S610, the measurement circuit 370 can measure the current flowing in the terminals of the device under test 10 using the potential difference between the input feedback line FBi and the output feedback line FBo, as shown in relation to S530 in FIG5, and use the measured current to adjust the test current. For example, the measurement circuit 370 compares the measured current with a target test current, and increases the output current when the measured current is smaller than the target test current, and decreases the output current when the measured current is larger than the target test current. Thus, the measurement circuit 370 can adjust the test current to be close to the target value in a structure in which the test current is supplied to the terminals of the device under test 10 via the pulse generation circuit 255.

[0067] The present invention has been described above using embodiments, but the technical scope of the present invention is not limited to the scope described in the embodiments. Those skilled in the art will understand that various modifications or improvements can be made to the embodiments. It is clear from the description within the scope of the claims that such modifications or improvements can also be included within the technical scope of the present invention.

[0068] It should be noted that the execution order of actions, processes, steps, and stages in the apparatus, system, program, and method shown in the claims, specification, and drawings can be implemented in any order unless specifically indicated by "before," "before," etc., or the output of the preprocessing is used in the post-processing. Even if the action flow in the claims, specification, and drawings is described using "firstly," "nextly," etc. for convenience, it does not mean that it must be implemented in this order. [Simplified Explanation of the Diagram]

[0015] Figure 1 shows the structure of the test apparatus 1 of this embodiment. Figure 2 shows the structure of the pin electronics 200 of the comparative example of this embodiment. Figure 3 shows the structure of the pin electronics 300 of this embodiment. Figure 4 shows the operation flow of the functional test of the device under test 10 performed by the test apparatus 1 of this embodiment. Figure 5 shows the operation flow of the voltage application current measurement test of the device under test 10 performed by the test apparatus 1 of this embodiment. Figure 6 shows the operation flow of the current application voltage measurement test of the device under test 10 performed by the test apparatus 1 of this embodiment.

Claims

1. A test circuit, comprising: The measurement circuit generates an output voltage and uses the output voltage to perform voltage and current measurement tests on the device under test. A pulse generation circuit, in the functional test of the device under test, uses the output voltage of the measurement circuit to generate a pulse signal and supplies the pulse signal to the terminals of the device under test. In the voltage applied current measurement test, the output voltage of the measurement circuit is passed through and supplied as a test voltage to the terminals of the device under test. An output feedback line is connected to the output side of the pulse generation circuit to feed the voltage from the output side back to the measurement circuit. In the functional test, the pulse generation circuit uses the output voltage of the measurement circuit to generate a pulse signal with multiple signal values ​​and supplies the pulse signal to the terminals of the device under test. In the voltage applied current measurement test, it consistently outputs the signal value from the multiple signal values ​​that allows the output voltage to pass through, thereby allowing the output voltage of the measurement circuit to pass through and supplying the output voltage as a test voltage to the terminals of the device under test.

2. The test circuit as described in claim 1, wherein, In the voltage applied current measurement test, the measurement circuit uses the test voltage fed back from the output feedback line to adjust the output voltage.

3. The test circuit as described in claim 1, wherein, The measuring circuit generates an output current and uses the output current to perform a current-applied voltage measurement test on the device under test. The pulse generating circuit allows the output current of the measuring circuit to pass through during the current-applied voltage measurement test and supplies the output current as a test current to the terminals of the device under test.

4. The test circuit as described in claim 3, wherein, In the current-applied voltage measurement test, the measurement circuit measures the voltage fed back from the output feedback line.

5. A test circuit, comprising: The measurement circuit generates an output voltage and uses the output voltage to perform voltage and current measurement tests on the device under test. The pulse generation circuit generates a pulse signal using the output voltage of the measurement circuit during the functional testing of the device under test (DUT), and supplies the pulse signal to the terminals of the DUT. During the voltage-current measurement test, the output voltage of the measurement circuit is passed through, and the output voltage is supplied as the test voltage to the terminals of the DUT. An output feedback line is connected to the output side of the pulse generation circuit to feed the voltage from the output side back to the measurement circuit. And an input feedback line, which is connected to the input side of the pulse generation circuit to feed back the voltage at the input side to the measurement circuit.

6. The test circuit as described in claim 5, wherein, In the functional test, the measuring circuit uses the voltage fed back from the input feedback line to adjust the output voltage.

7. The test circuit as described in claim 5, wherein, The pulse generation circuit has a resistor connected between the input terminal and the output terminal. In the voltage applied current measurement test, the measurement circuit uses the potential difference between the input terminal feedback line and the output terminal feedback line to measure the current flowing in the terminals of the device under test.

8. A testing apparatus comprising a test circuit as described in any one of claims 1 to 7.

9. A testing method, comprising: The measuring circuit generates an output voltage, and uses the output voltage to perform voltage-current measurement tests on the device under test. In the functional testing of the device under test (DUT), the pulse generation circuit uses the output voltage of the measurement circuit to generate a pulse signal and supplies the pulse signal to the terminals of the DUT. In the voltage-applied current measurement test, the output voltage of the measurement circuit is passed through, and the output voltage is supplied as a test voltage to the terminals of the DUT. An output feedback line connected to the output terminal of the pulse generation circuit feeds the voltage from the output terminal back to the measurement circuit. Specifically, in the functional testing, the pulse generation circuit uses the output voltage of the measurement circuit to generate a pulse signal with multiple signal values ​​and supplies the pulse signal to the terminals of the DUT. In the voltage-applied current measurement test, it consistently outputs the signal value from the multiple signal values ​​that allows the output voltage to pass through, thereby allowing the output voltage of the measurement circuit to pass through and supplying the output voltage as a test voltage to the terminals of the DUT.

10. A testing method, comprising: The measuring circuit generates an output voltage, and uses the output voltage to perform voltage-current measurement tests on the device under test. In the functional testing of the device under test, the pulse generation circuit uses the output voltage of the measurement circuit to generate a pulse signal and supplies the pulse signal to the terminals of the device under test. In the voltage-current measurement test, the output voltage of the measurement circuit is passed through and supplied as a test voltage to the terminals of the device under test. The output feedback line connected to the output terminal of the pulse generation circuit feeds the voltage from the output terminal to the measurement circuit. The input feedback line connected to the input terminal of the pulse generation circuit feeds the voltage from the input terminal to the measurement circuit.

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