Fixing device and top-opening substrate carrier using the same

Abstract

A fixing device and an upper-opening substrate carrier using the same are disclosed. The upper-opening substrate carrier is used to receive a substrate tray. The fixing device includes a fixing base and a sliding rod. The fixing base is fixed to the side wall of the upper-opening substrate carrier, and the sliding rod is slidably assembled with the fixing base to indirectly connect to the upper-opening substrate carrier. When the door of the upper-opening substrate carrier is locked, the sliding rod is pushed to the pressing position by the door, so that a plurality of positioning blocks of the sliding rod press against and fix the substrate tray.

Description

Technical Field

[0001] This invention relates to a fixing device and a substrate carrier, and more particularly to a fixing device and an openable substrate carrier used in the semiconductor field.

[0002] This patent application claims international priority to US Provisional Application No. 63 / 721,583, filed November 18, 2024, entitled "FIXING DEVICE AND TOP-OPENING SUBSTRATE CARRIER USING THE SAME," the contents of which are incorporated herein by reference and form part of the specification. Prior Technology

[0003] In the semiconductor industry, various types of substrates are widely used in processes related to semiconductor device manufacturing. These substrates, whether used in the early, middle, or late stages of the process, require movement and transport between different workstations. In known applications, substrates are placed in substrate carriers to prevent collisions and contamination from the external environment. These substrate carriers can stably accommodate and support multiple substrates and facilitate automated substrate loading and unloading operations.

[0004] A known type of substrate carrier utilizes multiple parallel-stacked trays to support and secure the substrate. However, during the movement or transport of the substrate carrier, the trays stored within are prone to displacement. Even slight tray movement can generate particulate contamination of the substrate, or even damage it.

[0005] Therefore, there is currently a need in the industry for a way to securely mount the tray in the substrate carrier. Summary of the Invention

[0006] In view of this, the present invention provides a fixing device and an openable substrate carrier using the same. When the door of the substrate carrier is locked with the housing, the door closes the accommodating space, and the door causes the fixing device to press against and fix the substrate tray, thereby reliably fixing the substrate tray and effectively restricting its movement in the horizontal and vertical directions. This can prevent the substrate tray from being contaminated by particles due to friction, or even cause damage to the semiconductor substrate.

[0007] One aspect of the present invention provides an upper-opening substrate carrier, comprising a housing and a door. The housing includes a continuous surrounding sidewall and a bottom, which together define an accommodating space. The housing has an upper opening relative to the bottom for one or more substrate trays to enter and exit the accommodating space. The door is disposed at the upper opening and engages with the housing to lock and close the accommodating space.

[0008] Another aspect of the present invention provides a fixing device suitable for an upward-opening substrate carrier, which is used to accommodate multiple substrate trays. The fixing device includes a fixing base and a sliding rod. The fixing base is fixed to one side wall of the upward-opening substrate carrier, and the sliding rod is slidably assembled with the fixing base, thereby indirectly connecting to the upward-opening substrate carrier. The sliding rod includes a plurality of spaced positioning blocks, which are used to press against and fix the multiple substrate trays. When one door of the upward-opening substrate carrier is locked, the sliding rod is pushed by the door to a pressing position to press against and fix the substrate trays.

[0009] In one embodiment, each positioning block has a positioning ramp for contacting one side edge of the base plate tray, and when the sliding rod is pushed by the door, a portion of the side edge moves along the positioning ramp.

[0010] In another embodiment, one of the sliding rods has at least one protruding rib at its top end for contacting a sliding ramp of the door body and sliding relative to the sliding ramp.

[0011] In another embodiment, at least one sliding bolt is provided on one side of the sliding rod, and the fixed seat has a guide groove for the sliding bolt to slide within it, thereby guiding the relative movement of the sliding rod on the fixed seat.

[0012] In another embodiment, the fixing device further includes an elastic member connected between the fixing base and the sliding rod. When the sliding rod is in the pressing position, the elastic member has a restoring potential energy to move the sliding rod to a loose position, thereby releasing the substrate tray.

[0013] In another embodiment, the fixing device further includes a support column disposed inside the sliding rod to enhance the mechanical strength of one of the sliding rods.

[0014] Another aspect of the present invention provides a top-opening substrate carrier, comprising a housing, multiple substrate trays, a door, and a fixing device. The housing includes a continuous circumferential sidewall and a bottom, which together define an accommodating space. The substrate trays support multiple semiconductor substrates and are housed within the accommodating space. The door engages with the housing and locks to close the accommodating space. The fixing device includes a fixing seat and a sliding rod. The fixing seat is disposed on the sidewall, and the sliding rod is slidably assembled with the fixing seat. The sliding rod includes multiple spaced positioning blocks, which are used to press against and fix the substrate trays. When the door engages with the housing and locks, the sliding rod is pushed by the door to a pressing position to press against and fix the substrate trays.

[0015] In one embodiment, the fixing device further includes an elastic element connected between the fixing base and the sliding rod. When the sliding rod is in the pressing position, the elastic element has a restoring potential energy to move the sliding rod to a loose position, thereby releasing the substrate tray.

[0016] In another embodiment, each positioning block has a positioning ramp for contacting one side edge of the base plate tray, and when the sliding rod is pushed by the door, a portion of the side edge moves along the positioning ramp.

[0017] In another embodiment, each substrate tray includes a body and a stepped structure on its side edge. The stepped structure extends outward from the body and sequentially includes a first stage and a second stage. The first stage is used to press against the adjacent substrate tray, and the second stage is used for each positioning block to press and fix.

[0018] The fixing device and the openable substrate carrier using the same embodiment of the present invention automatically press and fix the substrate tray by the fixing device when the door and the housing are locked together, eliminating the need for complicated operations and improving ease of use. The substrate tray can be fixed in both horizontal and vertical directions, providing excellent fixation. Because the movement of the substrate tray is restricted, particle generation is prevented, avoiding contamination of the semiconductor substrate and preventing damage to the semiconductor substrate. Simple Explanation of the Diagram

[0019] [Figure 1] illustrates a perspective view of an open substrate carrier according to an embodiment of the present invention. [Figure 2] A three-dimensional view of the door in Figure 1 when it is open. [Figure 3] An exploded view of the open substrate carrier shown in Figure 1. [Figure 4] illustrates a perspective view of a substrate tray according to an embodiment of the present invention. [Fig. 5a] shows a perspective view of a fixing device according to an embodiment of the present invention. [Fig. 5b] shows a perspective view of the fixing device in Fig. 5a from another angle. [Figure 6] An exploded view of the fixture in Figure 5a. [Fig. 7a] shows a side sectional view of the door when it is open. [Figure 7b] shows a side sectional view of the door before it is engaged and locked with the housing. [Figure 7c] shows a side sectional view of the door and the housing when they are locked together. Implementation

[0020] The present invention discloses a fixing device and an openable substrate carrier thereof. The fixing device, when the door and housing are locked together, presses against and secures the substrate tray, ensuring the substrate tray is well fixed in both vertical and horizontal directions, thus avoiding numerous problems caused by accidental movement of the substrate tray. Please refer to Figures 1 to 3. Figure 1 shows a perspective view of an openable substrate carrier according to an embodiment of the present invention; Figure 2 shows a perspective view of Figure 1 with the door open; and Figure 3 shows an exploded view of the openable substrate carrier of Figure 1. The openable substrate carrier 100 of the present invention includes a housing 150 and a door 110. The housing 150 includes a continuously surrounding sidewall 153 and a bottom 151, which together define an accommodating space 100a. The housing 150 has an upper opening 150a relative to the bottom 151 for multiple substrate trays 170 to enter and exit the accommodating space 100a. A door 110 is positioned at the upper opening 150a and engages with the housing 150 to lock and enclose the accommodating space 100a. The shape of the door 110 corresponds to the shape of the housing 150 at the upper opening 150a, allowing for a good fit with the housing 150. Furthermore, the door 110 includes a locking mechanism to secure it to the housing 150, achieving a predetermined tight seal. The present invention does not impose many limitations on the locking method between the door 110 and the housing 150, or on the design of the locking mechanism components. Any mechanism that allows the door to engage and lock with the housing, applied to the door or housing of a semiconductor container, can be used in this invention.

[0021] The open-type substrate carrier 100 of this invention includes multiple substrate trays 170 for supporting multiple semiconductor substrates. This invention does not impose many limitations on the shape, type, or thickness of the semiconductor substrates. Any substrate related to semiconductor manufacturing processes and requiring high cleanliness can be supported by the substrate trays 170 of this invention. Applicable examples include, but are not limited to, circular or square substrates, and include semiconductor substrates such as wafers, photomasks, glass, and printed circuit boards (PCBs). In a preferred embodiment, each semiconductor substrate is respectively disposed on a separate substrate tray 170 for positioning and support. Each substrate tray 170 may include multiple elastic support members 175 for elastic contact with the corresponding semiconductor substrate and for providing support and fixation in the vertical direction (Z direction). In practical applications, the multiple substrate trays 170 are housed within a receiving space 100a. When two or more substrate trays 170 are housed, they are stacked sequentially in the housing 150.

[0022] Please refer to Figure 4, which illustrates a perspective view of a substrate tray according to an embodiment of the present invention. Each substrate tray 170 includes a body 171 and a stepped structure 172 connected to each other. The stepped structure 172 extends outward from the body 171 and sequentially includes a first stage 173 and a second stage 174 in a stepped manner. The outermost second stage 174 (e.g., a position with a height much lower than the height of the body 171) is used for pressing and fixing by a fixing device, causing the stepped structure 172 to elastically deform. The innermost first stage 173 (e.g., a position with a height higher than the height of the second stage 174) is used to press against the adjacent substrate tray 170. These technical details will be explained with the aid of drawings below.

[0023] Please refer to Figures 5a, 5b, and 6. Figure 5a shows a perspective view of a fixing device according to an embodiment of the present invention, Figure 5b shows a perspective view of the fixing device of Figure 5a from another perspective, and Figure 6 shows an exploded view of the fixing device of Figure 5a. In this embodiment, the upper-opening substrate carrier 100 further includes a fixing device 130. It should be noted that although only one fixing device 130 is described here, its purpose is only to clearly present the features of this invention and is not to limit the number of fixing devices 130. The upper-opening substrate carrier 100 can, of course, include different numbers of fixing devices 130; in the embodiments shown in Figures 2 and 3, the upper-opening substrate carrier 100 includes eight fixing devices 130, distributed on the sidewall 153 of the housing 150. More specifically, they are distributed on the inward-facing surface of the sidewall 153.

[0024] The fixing device 130 includes a fixing base 131 and a sliding rod 132. The fixing base 131 is fixed to the side wall 153 of the top-opening substrate carrier 100, and the sliding rod 132 is slidably assembled with the fixing base 131 to indirectly connect to the top-opening substrate carrier 100. The fixing device 130 is disposed on the inward-facing surface of the side wall 153. When the door 110 of the top-opening substrate carrier 100 is locked, the sliding rod 132 is pushed by the door 110 to a pressing position to press and fix the substrate tray 170. In one embodiment, the fixing base 131 is provided with a first latching member 139 to engage with a second latching member 159 (shown in FIG. 3) on the side wall 153 of the housing 150 to fix the fixing base 131 to the side wall 153. The first fastener 139 and the second fastener 159 can have various different mechanical shapes and can be designed according to actual needs, with the aim of fixing the fixing seat 131 to the side wall 153 in a detachable or non-detachable manner. The fixing seat 131 can also be fixed to the side wall 153 using known methods such as fusion, welding, and bonding, and the present invention does not impose many limitations.

[0025] In one embodiment, the sliding rod 132 further includes the following mechanism: The sliding rod 132 includes a plurality of positioning blocks 135 spaced apart, which are used to press against and fix each base plate tray 170. In addition, at least one protruding rib 136 is provided at one top end of the sliding rod 132 for contacting a sliding ramp of the door body 110 and sliding relative to the sliding ramp, so that the door body 110 can drive the sliding rod 132 to slide relative to the fixed seat 131. Furthermore, at least one sliding bolt 137 is provided on one side of the sliding rod 132, and the fixed seat 131 has a guide groove 138 for the sliding bolt 137 to slide within it, thereby guiding the relative movement of the sliding rod 132 and the fixed seat 131.

[0026] The fixing device 130 in this embodiment further includes an elastic element 133, which is connected between the fixing base 131 and the sliding rod 132. When the sliding rod 132 is in the pressing position, the elastic element 133 has a restoring potential energy. The restoring potential energy is used to drive the sliding rod 132 to move it to a released position, thereby releasing the substrate tray 170. In this embodiment, the elastic element 133 is a pair of tension springs; however, the elastic element 133 can be other mechanical elements that can store potential energy, and its shape and material are not limited in this invention.

[0027] The fixing device 130 in this embodiment further includes a support column 134, which is disposed inside the sliding rod 132 to enhance the mechanical strength of the sliding rod 132. This prevents the sliding rod 132 from bending, twisting, or other unexpected shaking during sliding and when pressing against the fixed substrate tray 170, thus better securing the substrate tray 170. In this embodiment, the support column 134 can be, for example, a carbon rod; however, the support column 134 can be other mechanical elements that can provide mechanical support, and its shape and material are not limited in this invention.

[0028] The following describes the movement mechanism of the sliding rod 132 relative to the fixed seat 131, as well as the related technical details of the pressing position and the loosening position.

[0029] Please refer to Figures 7a to 7c. Figure 7a shows a side cross-sectional view of the door when it is open, Figure 7b shows a side cross-sectional view of the door before it is locked to the housing, and Figure 7c shows a side cross-sectional view of the door when it is locked to the housing. As shown in Figure 7a, when the door 110 is open, the door 110 is not in contact with the sliding rod 132 of the fixing device 130. At this time, the sliding rod 132 is held in the loose position due to the force applied by the elastic member 133. At this time, the positioning block 135 is not in contact with the base plate tray 170, and the sliding rod 132 is not fixing the base plate tray 170. At this time, the base plate tray 170 can be taken out from the receiving space 100a in sequence through the upper opening 150a, or stacked into the housing 150 in sequence.

[0030] When it is necessary to lock the door 110 with the housing 150, the closing process begins. At this time, the door 110 will move downward until the sliding rod 132 contacts the sliding inclined surface 111 of the door 110, as shown in Figure 7b.

[0031] When the door 110 continues to move downward from the state shown in Figure 7b, the door 110 pushes the sliding rod 132 via the sliding ramp 111, causing it to move away from the loosened position relative to the fixed seat 131. In this embodiment, a pair of protruding ribs 136 are provided at the top of the sliding rod 132. The two protruding ribs 136 are, for example, strip-shaped and parallel, which are used to improve the stability of the sliding rod 132 relative to the sliding ramp 111. This pair of protruding ribs 136 is only illustrative. In different embodiments, the protruding ribs 136 can be multiple protrusions protruding from the top of the sliding rod 132 and having the same height. Other contact structures on the relatively sliding mechanism can be applied to the embodiments of the present invention, and the present invention does not impose many limitations. In addition, since the sliding rod 132 slides in the guide groove 138 of the fixed seat 131 through the sliding bolt 137, when the sliding rod 132 is pushed by the door 110, the sliding bolt 137 will move along the guide groove 138. In this embodiment, for example, it moves towards the lower left of the plane shown in FIG7b.

[0032] During the movement of the sliding rod 132, it begins to contact the stepped structure 172 of the substrate tray 170. As the sliding rod 132 continues to be pushed by the door 110 along the guide groove 138, the positioning block 135 of the sliding rod 132 pushes the second stage 174 of the stepped structure 172, causing the stepped structure 172 to undergo elastic deformation. In this embodiment, the stepped structure 172 rotates clockwise relative to the body 171 of the substrate tray 170, as shown in Figures 7b to 7c.

[0033] Furthermore, the positioning blocks 135 of the sliding rod 132 each have a positioning ramp 135a for contacting one side edge 176 of the base plate tray (shown in Figure 4), and the side edge 176 includes a stepped structure 172. In actual operation, when the sliding rod 132 is pushed by the door body 110, a portion of the side edge 176 moves along the positioning ramp 135a. In this embodiment, the second stage 174 of the stepped structure 172 moves along the positioning ramp 135a until the sliding rod 132 is pushed to the pressing position, thereby causing the stepped structure 172 to deform.

[0034] As shown in Figure 7c, when the door 110 finally moves to the state of closing and locking with the housing 150, the sliding rod 132 is pushed to the pressing position by the sliding ramp 111. At this time, the positioning block 135 presses against and fixes the second stage 174 via the positioning ramp 135a, and then fixes the substrate tray 170 through the second stage 174, while the first stage 173 of the stepped structure 172 presses against the first stage 173 of the adjacent substrate tray 170. In this way, the substrate tray 170 can be fixed in the Z-axis direction and the X-axis direction, that is, the movement of the substrate tray 170 in the horizontal and vertical directions is effectively restricted. When the door 110 and the housing 150 are locked together, the substrate tray 170 will be automatically pressed against and fixed by the fixing device 130, without complicated operation, improving the convenience of use.

[0035] As shown in Figure 7c, at this time, the elastic element 133 of the tension spring is in a stretched state and has restoring potential energy. Therefore, when the door 110 is unlocked and opened, the elastic element 133 will drive the sliding rod 132 to move, causing it to move back to the released position along the guide groove 138, thereby releasing the base plate tray 170. The stepped structure 172 of the base plate tray 170 will also elastically return to the natural state shown in Figure 7a.

[0036] The fixing device and the upper-opening substrate carrier using the present invention include a fixing base and a sliding rod. The fixing base is fixed to the side wall of the upper-opening substrate carrier, and the sliding rod is slidably assembled with the fixing base, thereby indirectly connecting to the upper-opening substrate carrier. When the door of the upper-opening substrate carrier is locked, the sliding rod is pushed to the pressing position by the door to press and fix the substrate tray. When the door is locked, the substrate tray is pressed and fixed by the fixing device, eliminating the need for complicated operations and improving ease of use. Furthermore, the substrate tray can be fixed in both horizontal and vertical directions, providing a good fixing effect. In addition, since the movement of the substrate tray is restricted, particle generation can be prevented, which not only avoids contamination of the semiconductor substrate but also prevents damage to the semiconductor substrate.

[0037] 100: Top-opening substrate carrier 110: Door body 111: Sliding Inclined Plane 130: Fixture 131: Fixed base 132: Sliding rod 133: Elastic component 134: Support column 135: Positioning Block 135a: Positioning sloping surface 136: Convex Rib 137: Sliding bolt 138: Guide Slope 139: First fastener 150: Housing 151: Bottom 153: Sidewall 159: Second fastener 170: Baseboard tray 171:Ontology 172: Stepped structure 173: Phase One 174: Second Stage 175: Elastic support component 176: Lateral edge 100a: Accommodation space 150a: Open at the top X: Direction Y: direction Z: Direction

Claims

1. A fixing device suitable for an upward-opening substrate carrier for receiving a plurality of substrate trays, the fixing device comprising: A fixed base is fixed to one side wall of the top-opening substrate carrier; and a sliding rod is slidably assembled with the fixed base to indirectly connect to the top-opening substrate carrier. The sliding rod includes a plurality of positioning blocks spaced apart, which are used to press against and fix the substrate trays respectively. When one door of the top-opening substrate carrier is locked, the sliding rod is pushed by the door to a pressing position to press against and fix the substrate trays.

2. The fixing device as claimed in claim 1, wherein each of the positioning blocks has a positioning ramp for contacting a side edge of the base plate tray, and when the sliding rod is pushed by the door body, a portion of the side edge moves along the positioning ramp.

3. The fixing device as claimed in claim 1, wherein one of the sliding rods has at least one protruding rib at its top end for contacting and sliding relative to a sliding ramp of the door body.

4. The fixing device as claimed in claim 1, wherein at least one sliding bolt is provided on one side of the sliding rod, and the fixing seat has a guide groove for the sliding bolt to slide therein, thereby guiding the relative movement of the sliding rod on the fixing seat.

5. The fixing device as claimed in claim 1 further includes an elastic member connected between the fixing base and the sliding rod. When the sliding rod is in the pressing position, the elastic member has a restoring potential energy to move the sliding rod to a loose position, thereby releasing the substrate trays.

6. The fixing device as described in claim 1 further includes a support column disposed inside the sliding rod to enhance the mechanical strength of the sliding rod.

7. A top-opening substrate carrier, comprising: A housing, including a continuous surrounding sidewall and a bottom, which together define an accommodating space; A plurality of substrate trays for supporting a plurality of semiconductor substrates, the substrate trays being housed within the accommodating space; A door body is used to engage and lock with the housing to seal the accommodating space; And a fixing device, including: a fixing base disposed on the side wall; and a sliding rod slidably assembled with the fixing base, the sliding rod including a plurality of positioning blocks spaced apart, respectively used to press against and fix the substrate trays; wherein, when the door body and the housing are engaged and locked, the sliding rod is pushed by the door body to a pressing position to press against and fix the substrate trays.

8. The openable substrate carrier as described in claim 7, wherein the fixing device further includes an elastic member connected between the fixing base and the sliding rod, wherein when the sliding rod is in the pressing position, the elastic member has a restoring potential energy to move the sliding rod to a releasing position, thereby releasing the substrate trays.

9. The openable substrate carrier as described in claim 7, wherein each of the positioning blocks has a positioning ramp for contacting a side edge of the substrate tray, and a portion of the side edge moves along the positioning ramp when the sliding rod is pushed by the door.

10. The open-type substrate carrier as described in claim 9, wherein each substrate tray includes a body, the side edge includes a stepped structure, the stepped structure extending outward from the body and sequentially including a first stage and a second stage, the first stage for pressing against an adjacent substrate tray, and the second stage for pressing and fixing each positioning block.

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