Multi-point detection sensor

TWI942474BActive Publication Date: 2026-10-11MICROPROGRAM INFORMATION CO LTD +1
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
TW114134339
Authority / Receiving Office
TW · TW
Patent Type
Patents
Current Assignee / Owner
Filing Date
2025-09-08
Publication Date
2026-10-11
Estimated Expiration
2045-09-07

Smart Images

  • Figure TWG2TB001915651_001
    Figure TWG2TB001915651_001
  • Figure TWG2TB001915651_002
    Figure TWG2TB001915651_002
  • Figure TWG2TB001915651_003
    Figure TWG2TB001915651_003
Patent Text Reader

Abstract

A multi-point detection sensor includes: a carrier, generally square in shape, used to simulate at least one of the transportation and manufacturing processes of a square panel of a predetermined size; and a sensing module disposed on the carrier; the sensing module has a plurality of sensing units distributed at different positions on the carrier to sense environmental information at different positions on the carrier and generate a plurality of sensing signals accordingly.
Need to check novelty before this filing date? Find Prior Art

Claims

1. A multi-point detection sensor, comprising: a carrier, generally square in shape, used to simulate at least one of a transportation process and a manufacturing process of a square panel of a predetermined size; and a sensing module disposed on the carrier; the sensing module having a plurality of sensing units distributed at different positions on the carrier for sensing environmental information at different positions on the carrier and generating a plurality of sensing signals; wherein the sensing module has a substrate and a processing unit; the substrate is disposed on the carrier; the processing unit is on the substrate and electrically connected to the sensing units for receiving each of the sensing signals from the sensing units and calculating at least one measurement data; wherein the The substrate has a central portion and a plurality of extensions; one end of each extension is connected to the central portion, and the other end extends away from the central portion, for at least a portion of the sensing units to be disposed at one end of each extension; a cover plate covers the central portion of the substrate, and the extensions extend outward from the side of the cover plate respectively; wherein the carrier has four sides, and the four corners are formed by any two of the adjacent sides respectively; the extensions include four first extensions and four second extensions; the four first extensions extend toward the four sides of the carrier respectively; the four second extensions extend toward the four corners of the carrier respectively.

2. The multi-point detection sensor as described in claim 1, wherein the extended portions extend in different directions.

3. The multi-point detection sensor as described in claim 1, wherein the length of the second extension is greater than the length of the first extension.

4. The multi-point detection sensor as claimed in claim 1, wherein the carrier has a base groove for embedding the substrate in the base groove; the base groove has a central groove, four first extension grooves and four second extension grooves; the central groove corresponds to the shape of the central portion; the four first extension grooves communicate with the central groove and extend toward the four sides of the carrier respectively, and the four first extension grooves correspond to the shape of the four first extension portions respectively; the four second extension grooves communicate with the central groove and extend toward the four corners of the carrier respectively, and the four second extension grooves correspond to the shape of the four second extension portions respectively.

5. The multi-point detection sensor as claimed in claim 1, wherein the sensing module further includes a power supply unit disposed on the substrate and electrically connected to the processing unit and the sensing units, for providing the power required for the operation of the sensing module.

6. The multi-point detection sensor as described in claim 5, wherein the sensing module further includes a wireless charging receiver unit disposed on the substrate and electrically connected to the power supply unit for charging the power supply unit by being driven by an external force.

Citation Information

Patent Citations

  • Multi-point detection sensor

    TWM677771U

  • Sensor mounted wafer

    US20210375699A1

  • Method for automatic measurement and for teaching-in of location positions of objects within a substrate processing system by means of sensor carriers and associated sensor carrier

    US9099508B2