Method of fabricating test probe

Abstract

A method for manufacturing a test probe is disclosed, the test probe comprising a tubular cylinder and a plunger slidably and partially inserted into the cylinder. The method includes: forming a diameter-reduced portion at one end portion of the cylinder; machining the inner surface of the front end of the diameter-reduced portion by making a cylindrical cut along the axial direction of the cylinder; and forming a plurality of slits along the axial direction in at least the diameter-reduced portion.

Description

Technical Field

[0001] This disclosure relates to a method for manufacturing a test probe for testing the electrical properties of semiconductors or similar test objects. Prior Technology

[0002] Figure 1 is a diagram showing the conventional test probe 10.

[0003] Referring to Figure 1, the test probe 10 includes a cylindrical tube 11, a plunger 12, a terminal 13, and a spring 14. The plunger 12 is coupled to one side of the tube 11 and can slide within said one side. The terminal 13 is securely attached to the other side of the tube 11. The spring 14 is inserted in the tube 11 between the plunger 12 and the terminal 13 and provides elasticity.

[0004] The test signal can be transmitted from the plunger 12 to the terminal 13 via the cylinder 11 and the spring 14. More specifically, the test signal applied to the plunger 12 is transmitted to the terminal 13, which is securely attached to the second end portion of the cylinder 11, via the first end portion of the cylinder 11, the inner wall of the cylinder 11, and the spring 14. In this case, a suitable gap needs to be maintained between the plunger 12 and the cylinder 11 in order to allow the plunger 12 to slide smoothly. This gap leads to unstable contact during testing and results in unstable resistance as shown in FIG. 2, thereby causing the problem of misclassifying a good test object as a defective product.

[0005] Furthermore, the end of the cylinder is closed to prevent the plunger from falling off during sliding. During testing, the plunger slides and applies a large load to the sharp end of the cylinder, thereby causing damage to the plating on the outer surface of the plunger. Summary of the Invention

[0006] The present invention discloses a test probe in which a stable signal transmission path is ensured during testing, thereby improving test reliability, and a method thereof for manufacturing the same.

[0007] Another aspect of this disclosure aims to provide a test probe with excellent durability and a method for manufacturing it.

[0008] According to an embodiment of this disclosure, a method for manufacturing a test probe is provided, the test probe comprising a tubular cylinder and a plunger slidably and partially inserted into the cylinder. The method includes: forming a diameter-reduced portion at one end portion of the cylinder; machining the inner front surface of the diameter-reduced portion by performing a cylindrical cut along the axial direction of the cylinder; and forming a plurality of slits along the axial direction in at least the diameter-reduced portion.

[0009] The axial length of the inner surface of the front end of the diameter-reduced portion, machined by the cutting process, can be greater than the thickness of the cylinder. Therefore, the contact area with the terminal is increased, and sufficient length is ensured for chamfering the front edge of the diameter-reduced portion.

[0010] The diameter-reduced portion may be thicker than the cylinder. Therefore, the durability of the diameter-reduced portion is improved, and the axial length of the end portion of the diameter-reduced portion is increased.

[0011] The method may further include chamfering the leading edge of the reduced diameter portion. This prevents the leading edge of the reduced diameter portion from damaging the plating on the terminal contact portion during testing.

[0012] The slit can be formed to extend along the axial direction of the cylinder from the portion with decreasing diameter. Therefore, the skirt portion is prone to elastic transformation in the radial direction.

[0013] The method may further include partially machining the outer diameter of the cylinder by performing cylindrical cutting to create a thickness difference between the portion including the plurality of slits and other portions. Therefore, the elasticity of the skirt portion in the radial direction can be adjusted.

[0014] The slit can gradually widen towards the open end portion. Therefore, it is easier to machine the slit and reduces burrs at the inner surface edge of the skirt portion. Simple Explanation of the Diagram

[0015] Figure 1 shows a diagram of a conventional test probe. Figure 2 is a graph showing the distribution of resistance measured during a test using a conventional test probe. Figure 3 is a perspective view of a test probe according to the first embodiment of this disclosure. Figure 4 is a cross-sectional view of the test probe taken along line AA shown in Figure 3. Figure 5 is a diagram showing the contact state between the skirt portion of the plunger and the terminal contact portion in Figure 3. Figure 6 is a diagram showing a test probe according to a second embodiment of the present disclosure. Figure 7 is a diagram showing a test probe according to a third embodiment of this disclosure. Figure 8 is a diagram showing the tube of a test probe according to the fourth embodiment of this disclosure. Figure 9 is a diagram showing the tube of a test probe according to a fifth embodiment of this disclosure. Figure 10 is a diagram showing a test probe according to a sixth embodiment of the present disclosure. Figure 11 is a diagram showing a test probe according to a seventh embodiment of the present disclosure. Figure 12 is a diagram showing a test probe according to the eighth embodiment of this disclosure. Figure 13 is a schematic diagram illustrating the method for manufacturing the cylinder shown in Figure 3. Figure 14 is a schematic diagram illustrating the method for manufacturing the cylinder shown in Figure 6. Figure 15 is a schematic diagram illustrating the method for manufacturing the cylinder shown in Figure 7. Implementation

[0016] The test probe 100 according to an embodiment of this disclosure will now be described in detail with reference to the accompanying drawings.

[0017] For example, a test apparatus for testing the electrical properties of a semiconductor or similar test object includes a probe support (not shown) shaped like a plate and a test probe 100 supported between the top and bottom surfaces of the probe support such that two end portions of the test probe 100 can partially protrude from the top and bottom surfaces of the probe support.

[0018] Figure 3 is a perspective view of the test probe 100 according to the first embodiment of the present disclosure, Figure 4 is a cross-sectional view of the test probe 100 taken along line AA shown in Figure 3, and Figure 5 is a diagram showing the contact state between the skirt portion 112 of the plunger 120 in Figure 3 and the terminal contact portion 122.

[0019] Referring to Figures 3 to 5, the test probe 100 includes, for example, a cylindrical tube 110, a plunger 120, a terminal 130, and an elastic body 140. The plunger 120 is coupled to a first side of the tube 110 and can slide within the first side. The terminal 130 is securely attached to a second side of the tube 110. The elastic body 140 is sandwiched between the plunger 120 and the terminal 130 within the tube 110 and provides elasticity.

[0020] The cylinder 110 includes a main body 111 and a skirt portion 112 separated by a plurality of slits 113, which are formed at predetermined intervals along the circumferential direction at a first end portion. The number of slits 113 is not limited to three and may be two, four, or more. The slits 113 may extend diagonally or spirally relative to the longitudinal direction of the test probe 100. The slits 113 may be cut to have a uniform width.

[0021] The plunger 120 may include a sliding portion 121 and a terminal contact portion 122. The sliding portion 121 is housed in and slides within the barrel body 111. The terminal contact portion 122 extends from the sliding portion 121, is exposed to the outside via the skirt portion 112, and contacts the skirt portion 112.

[0022] The sliding portion 121 has a diameter corresponding to the inner diameter of the cylindrical body 111. The diameter of the sliding portion 121 is set to be smaller than the diameter of the cylindrical body 111 so as to slide within the cylindrical body 111.

[0023] The terminal contact portion 122 has a smaller diameter than the sliding portion 121. The diameter of the terminal contact portion 122 is set such that the terminal contact portion 122 can pass through the front end of the skirt portion 112 while facing the front end of the skirt portion 112. The end portion of the terminal contact portion 122 contacts a contact terminal (not shown).

[0024] The terminal 130 is securely attached to the second end portion of the cylinder 110 by means of dimping or caulking. Alternatively, the terminal 130 may be inserted in a sliding rather than fixed manner.

[0025] During the test, the elastomer 140 is compressed and restored as the plunger 120 slides. The elastomer 140 can be implemented, for example, by a coil spring.

[0026] Referring to FIG5, the skirt portion 112 includes a skirt body 1121 and a skirt diameter reduction portion 1122. The skirt body 1121 extends along the tube body 111, and the diameter of the skirt diameter reduction portion 1122 decreases in a curved manner in the axial direction X of the tube 110 in the front end region of the skirt body 1121.

[0027] The skirt body 1121 extends parallel to the tube body 111 and has the same thickness as the tube body 111.

[0028] The skirt diameter reduction portion 1122 has a facing end portion 1122E, which is disposed in the front end region and faces the surface of the terminal contact portion 122. The facing length L of the facing end portion 1122E in the axial direction X is greater than the thickness d1 of the skirt diameter reduction portion 1122 and / or the thickness d2 of the skirt body 1121. The thickness d1 of the skirt diameter reduction portion 1122 is substantially the same as the thickness d2 of the skirt body 1121.

[0029] The inner diameter of the end portion 1122E can be formed by making a cylindrical cut along the axial direction X of the cylinder.

[0030] The front edge of the reduced diameter portion 1122 may have a chamfered portion. Since the face length L in the axial direction X is greater than the thickness d1 of the reduced diameter portion 1122 and / or the thickness d2 of the main body 1121, the front edge of the reduced diameter portion 1122 may be chamfered. If the front edge of the reduced diameter portion 1122 is chamfered without sufficiently ensuring the face length L in the axial direction X, the face end portion 1122E becomes sharp and may scratch and peel off the plating on the surface of the terminal contact portion 122 during testing.

[0031] Furthermore, when the test probe 100 is pressed during testing, the terminal contact portion 122 can tilt at an angle. In this case, if the skirt portion 112 is not present, strong friction may occur between the terminal contact portion 122 and the front end portion of the cylinder 110, thereby scraping and peeling off the surface of the terminal contact portion 122. On the other hand, according to the embodiment, the skirt portion 112 is transformed in the radial direction, thereby reducing the friction between the terminal contact portion 122 and the front end portion of the cylinder 110.

[0032] Figure 6 is a diagram showing a test probe according to a second embodiment of the present disclosure.

[0033] Referring to FIG6, the skirt portion 112 includes a skirt body 1121 and a skirt diameter reduction portion 1122. The skirt diameter reduction portion 1122 is bent relative to the skirt body 1121 so that the diameter of the skirt diameter reduction portion 1122 decreases in the axial direction X of the tube 110.

[0034] The skirt body 1121 extends substantially in the longitudinal direction of the tube body 111.

[0035] The skirt diameter reduction portion 1122 includes a thick portion 1123, which is disposed in the region facing the terminal contact portion 122 and expands outward in the radial direction. The thick portion 1123 gradually thickens along the axial direction X of the cylinder 110. Due to the thick portion 1123, the thickness d1 of the skirt diameter reduction portion 1122 is greater than the thickness d2 of the skirt body 1121. The thick portion 1123 can be formed by extrusion.

[0036] The front edge of the reduced diameter portion 1122 of the skirt has a chamfered portion 1124. The thick portion 1123 enlarges the facing length L of the facing end portion 1122E that contacts the terminal contact portion 122, and the chamfered portion 1124 shortens the facing length L to prevent the facing end portion 1122E from becoming sharp.

[0037] Figure 7 is a diagram illustrating a test probe 100 according to a third embodiment of this disclosure.

[0038] Referring to FIG7, the skirt portion 112 includes a skirt body 1121 and a skirt diameter reduction portion 1122. The skirt diameter reduction portion 1122 is bent relative to the skirt body 1121 so that the diameter of the skirt diameter reduction portion 1122 decreases in the axial direction X of the tube 110.

[0039] The skirt diameter reduction portion 1122 includes a thick portion 1123, which expands radially outward in the region facing the terminal contact portion 122. The thick portion 1123 is formed to gradually thicken and then thin along the longitudinal direction of the cylinder 110. In other words, the outer surface of the thick portion 1123 extends along the longitudinal direction of the skirt body 1121 and then extends in a transverse direction substantially perpendicular to the longitudinal direction.

[0040] Figure 8 is a diagram showing the tube 110 of the test probe according to the fourth embodiment of this disclosure.

[0041] Referring to Figure 8, the cylinder 110 includes a skirt portion 112 formed by a slit 113-1. The slit 113-1 has a tapering shape that tapers toward the flange 114. The tapering shape of the slit 113-1 is easier to machine than the slit 113 with a uniform width shown in Figure 3 and reduces burrs remaining at the inner edge of the skirt portion 112.

[0042] Figure 9 is a diagram showing the tube 110 of the test probe according to the fifth embodiment of this disclosure.

[0043] Referring to FIG9, the cylinder 110 includes a skirt portion 112 formed by slits 113-1. The skirt portion 112 may be formed with different thicknesses to adjust for elasticity in the radial direction.

[0044] As shown in Figure 9(a), the outer diameter d5 of the skirt body 1121 can be equal to the outer diameter d4 of the tube body 111. In this case, the skirt body 1121 and the tube body 111 have the same inner diameter.

[0045] As shown in Figure 9(b), the outer diameter d5 of the skirt body 1121 can be smaller than the outer diameter d4 of the tube body 111. In other words, the skirt portion 112 can be thinned by cutting the outer diameter on the left side relative to the flange 114. In this case, the skirt body 1121 and the tube body 111 have the same inner diameter. When the skirt body 1121 is thin, the elasticity of the skirt portion 112 in the radial direction decreases.

[0046] As shown in Figure 9(c), the skirt body 1121 can be machined to have an outer diameter d5 larger than the outer diameter d4 of the tubular body 111. In other words, the skirt portion 112 can be thickened by cutting the outer diameter on the right side relative to the flange 114. In this case, the skirt body 1121 and the tubular body 111 have the same inner diameter. When the skirt body 1121 is thick, the elasticity of the skirt portion 112 in the radial direction increases.

[0047] Figure 10 is a diagram illustrating a test probe 100 according to a sixth embodiment of the present disclosure.

[0048] Referring to FIG10, the tube 110 includes a skirt portion 112 formed by a slit, the end portion of which extends in the longitudinal direction on a first side. The skirt portion 112 includes a skirt body 1121 and a skirt diameter reduction portion 1122, the skirt body 1121 extending from the tube body 111 in the longitudinal direction, and the skirt diameter reduction portion 1122 bending relative to the skirt body 1121 such that the diameter of the skirt diameter reduction portion 1122 decreases in the axial direction X of the tube body 111.

[0049] The plunger 120 includes: a sliding portion 121, which is inserted into the barrel body 111 and slides; a terminal contact portion 122, which is exposed to the outside while the sliding portion 121 passes through the front end of the skirt portion 112 and contacts the terminal of the object to be tested; and an inclined contact portion 123, which is formed between the sliding portion 121 and the terminal contact portion 122.

[0050] The sliding portion 121 includes a large-diameter portion 1211 and a small-diameter portion 1212. The outer diameter of the large-diameter portion 1211 is almost adjacent to the inner surface of the main body 111, and the outer diameter of the small-diameter portion 1212 forms a predetermined gap G1 relative to the inner surface of the skirt portion 112. The gap G1 formed by the small-diameter portion 1212 prevents burrs remaining at the inner edge of the skirt portion 112 from hindering the movement of the sliding portion 121 and prevents the surface of the sliding portion from being scratched.

[0051] The reduced diameter portion 1122 of the skirt has an inclined inner surface 1122S with a predetermined linear slope, and the inclined contact portion 123 has an inclined outer surface 123S with a predetermined curvature. Therefore, the inclined inner surface 1122S and the inclined outer surface 123S contact each other with minimal area. This prevents burrs remaining at the inner edge of the reduced diameter portion 1122 from damaging the inclined outer surface 123S of the inclined contact portion 123.

[0052] According to an alternative embodiment, the skirt diameter reduction portion 1122 may have an inclined inner surface 1122S with a predetermined curvature, and the inclined contact portion 123 may have an inclined outer surface 123S with a predetermined linear slope.

[0053] According to an alternative embodiment, the skirt diameter reduction portion 1122 may have an inclined inner surface 1122S with a first linear slope, and the inclined contact portion 123 may have an inclined outer surface 123S with a second linear slope, the second linear slope being different from the first linear slope.

[0054] According to an alternative embodiment, the skirt diameter reduction portion 1122 may have an inclined inner surface 1122S with a first curvature, and the inclined contact portion 123 may have an inclined outer surface 123S with a second curvature, the second curvature being different from the first curvature.

[0055] Figure 11 is a diagram showing a test probe 100 according to a seventh embodiment of the present disclosure.

[0056] Referring to FIG11, the tube 110 includes a skirt portion 112 formed by a slit, the end portion of which extends longitudinally on a first side. The skirt portion 112 includes a skirt body 1121 and a skirt diameter reduction portion 1122, the skirt body 1121 extending longitudinally from the tube body 111, and the skirt diameter reduction portion 1122 bending relative to the skirt body 1121 such that the diameter of the skirt diameter reduction portion 1122 decreases in the axial direction X of the tube body 111.

[0057] The plunger 120 includes: a sliding portion 121, which is inserted into the barrel body 111 and slides; a terminal contact portion 122, which is exposed to the outside while the sliding portion 121 passes through the front end of the skirt portion 112 and contacts the terminal of the object to be tested; and an inclined contact portion 123, which is formed between the sliding portion 121 and the terminal contact portion 122.

[0058] The terminal contact portion 122 includes a first tapered portion 1221, the outer diameter of which gradually decreases toward the inclined contact portion 123 in at least a partial section. Before the plunger 120 slides in the arrow direction for testing, the first tapered portion 1221 may not contact the facing end portion 1122E located at the front end of the skirt diameter reduction portion 1122, or may contact the facing end portion 1122E with minimal contact force. When the plunger 120 slides in the arrow direction for testing, the first tapered portion 1221 may contact the facing end portion 1122E of the skirt diameter reduction portion 1122 with a stronger contact force. Therefore, in the standby state when no testing is performed, the constant pressure formed by the facing end portion 1122E of the skirt portion 112 abutting against the terminal contact portion 122 prevents the elasticity of the skirt portion 112 from deteriorating.

[0059] Figure 12 is a diagram showing a test probe 100 according to an eighth embodiment of the present disclosure.

[0060] Referring to FIG12(a), the tube 110 includes a skirt portion 112 formed by a slit, the end portion of which extends in the longitudinal direction on a first side.

[0061] The plunger 120 includes a sliding portion 121 and a terminal contact portion 122. The sliding portion 121 is inserted into the barrel body 111 and slides, while the terminal contact portion 122 is exposed to the outside as the sliding portion 121 passes through the facing end portion 1122E of the skirt portion 112.

[0062] The terminal contact portion 122 includes an extension rod 1222 integrally extended from a sliding portion 121, a tip 1223 that contacts the terminal of the object to be tested, and a second tapering portion 1224 disposed between the extension rod 1222 and the tip 1223. The second tapering portion 1224 extends obliquely to have a diameter that gradually decreases toward the tip 1223.

[0063] When the terminal contact portion 122 passes through the facing end portion 1122E of the skirt portion 112 as shown in FIG12(b), the plunger 120 is exposed to the outside as shown in FIG12(c). In this case, when the terminal contact portion 122 collides with and impacts the inner surface of the skirt portion 112, the skirt portion 112 may deform. To prevent deformation of the skirt portion 112, a second tapered portion 1224 with a predetermined slope is provided adjacent to the tip 1223. Therefore, deformation of the skirt portion 112 due to contact and pressure formed by the terminal contact portion 122 abutting against the inner surface of the skirt portion 112 is prevented.

[0064] Figure 13 is a schematic diagram showing the method of manufacturing the cylinder 110 shown in Figure 3.

[0065] In the first step shown in Figure 13(a), a cylindrical pipe member 110M is formed using a conductive material. The pipe member 110M may include a flange 114.

[0066] In the second step shown in Figure 13(b), a diameter-reduced portion 1122M is formed at one end portion of the tube member 110M by forging, for example, using a die. The diameter-reduced portion 1122M is molded to have a diameter that decreases along the axial direction X of the tube member 110M.

[0067] In the third step shown in Figure 13(c), a facing end portion 1122E is formed on the front end surface of the diameter-reduced portion 1122M. The facing end portion 1122E is essentially formed along the longitudinal direction of the tube member 110M. For example, the facing end portion 1122E can be formed by making a cylindrical cut along the axial direction X of the tube to the inner front end of the diameter-reduced portion 1122M using a drill bit.

[0068] In the fourth step shown in Figure 13(d), a chamfered portion 1122C is formed at the front edge of the diameter-reduced portion 1122M. The chamfered portion 1122C can be formed to have an obtuse angle relative to the facing end portion 1122E by performing the chamfering process.

[0069] In the fifth step shown in Figure 13(e), three slits 113 are formed along the longitudinal direction in a portion of the pipe member 110M and the diameter-reduced portion 1122M shown in Figure 13(d). The three slits 113 are formed at 120-degree intervals in the circumferential direction to form three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 can be formed to have a uniform width, for example, by cutting with a drill bit, or by making the slits 113 gradually widen along the open end portion.

[0070] Figure 14 is a schematic diagram showing the method of manufacturing the cylinder 110 shown in Figure 6.

[0071] In the first step shown in Figure 14(a), a cylindrical tube member 110M is formed using a conductive material. The tube member 110M may include a flange 114.

[0072] In the second step shown in Figure 14(b), a diameter-reduced portion 1122M is formed at one end of the pipe member 110M by forging, for example, using a die. The diameter-reduced portion 1122M is molded to have a diameter that decreases along the axial direction X of the pipe member 110M. The diameter-reduced portion 1122M is molded to have a gradually increasing thickness. The diameter-reduced portion 1122M is thicker than the pipe member 110M.

[0073] In the third step shown in Figure 14(c), a facing end portion 1122E is formed on the front end surface of the diameter-reduced portion 1122M. The facing end portion 1122E is formed substantially along the longitudinal direction of the tube member 110M. For example, the facing end portion 1122E can be formed by making a cylindrical cut along the axial direction X of the tube using a drill bit to the inner surface.

[0074] In the fourth step shown in Figure 14(d), a chamfered portion 1122C is formed at the front edge of the diameter-reduced portion 1122M. The chamfered portion 1122C can be formed to have an obtuse angle relative to the facing end portion 1122E by performing the chamfering process.

[0075] In the fifth step shown in Figure 14(e), three slits 113 are formed along the longitudinal direction in a portion of the tube member 110M and the diameter-reduced portion 1122M shown in Figure 13(d). The three slits 113 are formed at 120-degree intervals in the circumferential direction to form three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 can be formed to have a uniform width, for example, by cutting with a drill bit, or by making the slits 113 gradually widen along the open end portion.

[0076] Figure 15 is a schematic diagram showing the method of manufacturing the cylinder 110 shown in Figure 7.

[0077] In the first step shown in FIG15(a), a cylindrical tube member 110M is formed by means of a conductive material. The tube member 110M may include a flange 114.

[0078] In the second step shown in Figure 15(b), a diameter-reduced portion 1122M is formed at one end of the pipe member 110M by forging, for example, using a die. The diameter-reduced portion 1122M is molded to have a diameter that decreases along the axial direction X of the pipe member 110M. The thickness of the diameter-reduced portion 1122M gradually increases and then decreases. The diameter-reduced portion 1122M is thicker than the pipe member 110M.

[0079] In the third step shown in Figure 15(c), a facing end portion 1122E is formed on the front end surface of the diameter-reduced portion 1122M. The facing end portion 1122E is formed substantially along the longitudinal direction of the tube member 110M. For example, the facing end portion 1122E can be formed by making a cylindrical cut along the axial direction X of the tube using a drill bit to the inner front end surface of the diameter-reduced portion 1122M. The diameter-reduced portion 1122M has a second outer surface that is substantially perpendicular to the first outer surface, and the first outer surface is substantially parallel to the facing end portion 1122E.

[0080] In the fourth step shown in Figure 15(d), a chamfered portion 1122C is formed at the front edge of the diameter-reduced portion 1122M. The chamfered portion 1122C can be formed to have an obtuse angle relative to the facing end portion 1122E by performing the chamfering process.

[0081] In the fifth step shown in Figure 15(e), three slits 113 are formed along the longitudinal direction in a portion of the tube member 110M and the diameter-reduced portion 1122M shown in Figure 13(d). The three slits 113 are formed at 120-degree intervals in the circumferential direction to form three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 can be formed to have a uniform width, for example, by cutting with a drill bit, or by making the slits 113 gradually widen along the open end portion.

[0082] According to the embodiments disclosed herein, the test probe includes a barrel body and a plurality of skirt portions separated by slits formed in the longitudinal direction in an end portion of the barrel body on one side and having a diameter decreasing toward the central axis. Since the inner surface of the front end region of each skirt portion contacts the outer surface of the plunger over the entire predetermined longitudinal section, stable contact between the plunger and the barrel is maintained during testing, thereby improving test reliability. Furthermore, when a large load is applied to the end portion of the barrel during the sliding operation of the plunger, the skirt portions open outward in the radial direction, thereby preventing damage to the plunger's plating due to the load.

[0083] The skirt portion can have low durability due to being separated by slits. Therefore, the facing length of the end portion in contact with the plunger in the axial direction is greater than the thickness of the reduced diameter portion of the skirt or the thickness of the skirt body, thereby improving durability and ensuring the length for chamfering the front edge.

[0084] The front edge of the section with a reduced skirt diameter is chamfered to prevent the outer plating of the plunger from being scratched.

[0085] Although exemplary embodiments of this disclosure have been shown and described, this disclosure is not limited to the specific embodiments described above. Those skilled in the art can implement various alternative modifications without departing from the scope of this disclosure as claimed in the appended claims, and such modified embodiments should not be understood separately from the technical spirit or prospects of this disclosure.

[0086] 10,100: Test probe 11,110: Tube 110M: Pipe Components 111: Main body of the cylinder 112: Skirt section 1121: Main body of the skirt 1122: The part with a reduced skirt diameter 1122C, 1124: Chamfered sections 1122E: Facing the end portion 1122M: Diameter Reduction Section 1122S: Inclined inner surface 1123: Thick part 113,113-1: Slit 114: Flange 12,120: Plunger 121: Sliding part 1211: Large diameter section 1212: Small diameter portion 122: Terminal contact portion 1221: First tapering section 1222: Extension rod 1223: Cutting Edge 1224: Second tapering section 123: Inclined contact portion 123S: Inclined outer surface 13,130:Terminal 14: Spring 140: Elastomer AA: Line d1, d2: Thickness d4, d5: Outer diameter G1: Gap L: Face length X: Axis direction

Claims

1. A method of manufacturing a test probe, the test probe comprising a tubular cylinder and a plunger slidably and partially inserted into the cylinder, the method comprising: A portion with a reduced diameter is formed at one end of the cylinder; The inner surface of the front end of the reduced diameter portion is machined by using a drill bit to make a cylindrical cut along the axial direction of the cylinder; At least a plurality of slits are formed along the axial direction in the diameter-reducing portion; The outer diameter of the cylinder is partially machined by performing a cylindrical cut to create a thickness difference between a portion of the section including the plurality of slits and other sections, wherein the axial length of the inner surface of the front end of the reduced diameter portion machined by the cylindrical cut is greater than the thickness of the cylinder.

2. The method of claim 1, wherein the plurality of slits are formed to extend from the diameter-reducing portion along the axial direction of the cylinder.

3. A method of manufacturing a test probe, the test probe comprising a tubular cylinder and a plunger slidably and partially inserted into the cylinder, the method comprising: A portion with a reduced diameter is formed at one end of the cylinder; The inner surface of the front end of the reduced diameter portion is machined by using a drill bit to make a cylindrical cut along the axial direction of the cylinder; And at least in the diameter-reducing portion, a plurality of slits are formed along the axial direction, wherein the axial length of the inner surface of the front end of the diameter-reducing portion, which is machined by the cylindrical cut, is greater than the thickness of the cylinder, and wherein the plurality of slits gradually widen toward the open end portion.

Images