Multidimensional dynamic predistortion compensation method and system for non-contact field control

Abstract

This invention provides a multi-dimensional dynamic pre-distortion compensation method and system for non-contact field control, applicable to at least one field generation unit applying electric field, magnetic field, acoustic field, optical field, flow field, thermal field, or a combination thereof to at least one target object without contact. The method includes: receiving an ideal field output control quantity corresponding to a predetermined non-contact action requirement of the target object; obtaining at least one distortion parameter related to the field generation unit, the target object, the transmission environment, channel state, spatial position, process state, or computing resource state; establishing, selecting, or updating a distortion model based on the distortion parameter; generating a pre-distortion compensation quantity based on the distortion model; and before the actual output of the field generation unit, performing linear superposition, nonlinear mapping, parameter recalibration, spatial coordinate transformation, time domain transformation, frequency domain transformation, inverse filtering, temporal deconvolution, or a combination thereof on the ideal field output control quantity to generate a corrected field output control quantity. The distortion model may include a multi-dimensional pre-distortion matrix, a dynamic weighted field spectrum, a field memory model, a cross-channel crosstalk model, a device-specific fingerprint model, a field-object coupling model, a non-planar boundary compensation model, a process property evolution model, or a follow-up update model. Therefore, this invention can pre-compensate for channel delay, bandwidth limitations, field source aging, cross-channel crosstalk, material property changes, geometric boundary distortion, and target object coupling deviations before the non-contact field action output, making the actual non-contact field action on the target object closer to the predetermined action requirements, thereby improving the accuracy, stability, and repeatability of micro-device manipulation, alignment, transfer, packaging, or processing.

Claims

1. A multi-dimensional dynamic predistortion compensation method for non-contact field control, applicable to at least one field generation unit applying a non-contact field to at least one target object, the method comprising: Receive an ideal field output control quantity, wherein the ideal field output control quantity corresponds to a predetermined non-contact action requirement of one of the target objects, and the ideal field output control quantity is provided by an upstream controller, an offline path planner, an instantaneous path generator, a multi-degree-of-freedom decoupled controller, or a combination thereof; obtain at least one distortion parameter, wherein the distortion parameter is associated with the at least one field generation unit, the target object, the transmission environment of the non-contact field, channel state, spatial position, process state, computing resource state, or a combination thereof; establish, select, or update a distortion model based on the at least one distortion parameter; generate a pre-distortion compensation quantity based on the distortion model; Based on the predistortion compensation amount, the ideal field output control quantity is subjected to linear superposition, nonlinear mapping, parameter recalibration, spatial coordinate transformation, time domain transformation, frequency domain transformation, asymmetric correction, table lookup transformation, inverse filtering, time-series deconvolution, or a combination thereof, so as to transform and map the ideal field output control quantity into a corrected field output control quantity; and the at least one field generation unit is driven according to the corrected field output control quantity so that the actual non-contact field action acting on the target object is close to the predetermined non-contact action requirement.

2. The multidimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein the at least one distortion parameter includes ambient temperature, humidity, airflow, pressure, vacuum degree, medium viscosity, dielectric properties, magnetic properties, acoustic properties, optical properties, field source temperature rise, channel gain, phase shift, channel delay, power supply fluctuation, output nonlinearity of the field generation unit, field source aging state, operation history, spatial coordinate position, process stage indicators, or combinations thereof; wherein the at least one distortion parameter further includes at least one internal state variable, which is estimated by the current, voltage ripple, impedance change, equivalent resistance change, equivalent capacitance change, power response, temperature rise, thermal resistance change, hysteresis residual state, piezoelectric response, coil response, driving efficiency change, resonant frequency drift, characteristic frequency change, spectral density change, harmonic component change, noise spectrum change, or combinations thereof of the field generation unit or its driving circuit, and is not obtained solely by direct measurement of external field quantities.

3. The multidimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein the distortion model includes a multidimensional predistortion matrix, a dynamic weighted field map, a field memory model, or an equivalent data structure thereof, wherein the multidimensional predistortion matrix, the dynamic weighted field map, or the field memory model includes at least a spatial dimension, a channel dimension, a temporal dimension, and a frequency band dimension; wherein the spatial dimension is used to characterize local field attenuation, field gradient distortion, phase shift, edge effect, local medium inhomogeneity, or a combination thereof at different spatial coordinate positions; This channel dimension is used to characterize the channel gain difference, phase shift, delay difference, cross-channel crosstalk, channel mutual inductance, or a combination thereof of complex field generating units or complex controlled channels; The time dimension is used to characterize channel establishment time, transient response, prediction time window, hysteresis path, field source aging state, process stage changes, past output sequence, residual field effect, or a combination thereof; the frequency band dimension is used to characterize the frequency response, frequency band attenuation, phase delay, rise time, fall time, high frequency response limit, or a combination thereof of the at least one field generation unit; wherein the distortion model includes complex distortion sub-models, which have different weights, nonlinear orders, spatial applicable regions, channel applicable ranges, time applicable intervals, frequency band applicable ranges, or combinations thereof; and the control unit selects or dynamically weights and combines the corresponding local distortion sub-models according to the target object's current spatial position, predicted spatial position, motion path, location, previous output sequence, frequency band response characteristics, current state, or predicted state, to generate the pre-distortion compensation amount.

4. The multidimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein when the at least one field generating unit is a complex field generating unit or a complex controlled channel, the distortion model includes crosstalk relationship, coupling distortion relationship, channel mutual inductance relationship, field superposition deviation relationship or a combination thereof between the complex field generating units or the complex controlled channels; wherein the predistortion compensation amount includes a component for pre-cancelling the expected interference component caused by another field generating unit or another controlled channel, or a component for compensating for output insufficiency, phase shift, delay shift, field action deviation or a combination thereof of another controlled channel using at least one cross-channel coupling component.

5. The multi-dimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein the predistortion compensation amount is based on the position, velocity, acceleration, motion vector, prediction time window, sensing delay, channel delay, field establishment time, control cycle, or a combination thereof of the target object to predict the field action deviation in the next time period or a future time period, and corrects the ideal field output control amount before the output of the at least one field generation unit; wherein the predistortion compensation amount is further based on the output sequence of the at least one field generation unit in the previous time window, field residue, thermal residue, flow field wake, residual magnetic effect, medium disturbance, or a combination thereof, through time-series deconvolution, inverse filtering, or equivalent compensation procedures to reduce the residual influence of the previous output on the current field action; The predistortion compensation includes a cross-band pre-emphasis compensation component. This cross-band pre-emphasis compensation component is based on the frequency response, low-pass characteristics, bandwidth attenuation, phase delay, rise time, fall time, or combination thereof of the at least one field generation unit. It pre-emphasizes the change slope, update slope, high-frequency energy component, high-frequency component, pulse component, pulse edge, rising edge, falling edge, dynamic response edge, or combination thereof of the ideal field output control quantity to compensate for the bandwidth-limited response or low-pass characteristics of the at least one field generation unit.

6. The multi-dimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein the distortion model includes a set of device-specific distortion parameters corresponding to one of a specific device, a specific field generation unit, a specific controlled channel, or a specific field source module; wherein the set of device-specific distortion parameters includes the cumulative operating time, cumulative output energy, cumulative pulse count, cumulative power, temperature rise history, drive efficiency attenuation, channel gain drift, output response degradation, internal impedance change, field source health index, or a combination thereof of the at least one field generation unit; thereby enabling the same ideal field output control quantity to generate different predistortion compensation quantities in different devices, different field generation units, different controlled channels, or different field source modules.

7. The multidimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein the predistortion compensation amount is associated with the geometric contour, size, centroid position, orientation, surface morphology, dielectric constant, conductivity, magnetic permeability, acoustic impedance, optical properties, thermal properties, or combinations thereof of the target object; used to compensate for passive distortion, field gradient shift, coupling response deviation, or combinations thereof caused by changes in the geometric features, material properties, or orientation of the target object to the field distribution after the target object enters the non-contact field; wherein the predistortion compensation amount is further associated with the three-dimensional morphology, warpage, tilt, curvature, local height difference, boundary reflection conditions, acoustic field reflection, acoustic impedance boundary, magnetic flux concentration, electric field edge concentration, light field refraction or scattering, flow field separation, local thermal accumulation, obstacle distribution, or combinations thereof of the target substrate, support platform, packaging surface, or working area, used to convert the predetermined non-contact action requirement into a corrected post-field output control amount applicable to non-planar geometric boundaries, irregular working surfaces, or locally warped regions.

8. The multidimensional dynamic pre-distortion compensation method for non-contact field control as described in claim 1, wherein the distortion model is further associated with a process time axis, a process stage index, or a property change index; wherein the property change index includes viscosity, elastic modulus, degree of curing, phase change ratio, thermal expansion state, material hardening degree, bonded material flow state, medium flow state, or a combination thereof; and the pre-distortion compensation amount is dynamically adjusted according to the process stage index or the property change index to compensate for the non-contact field response deviation caused by material property changes during the process.

9. The multidimensional dynamic predistortion compensation method for non-contact field control as described in claim 1, wherein the distortion model includes a first distortion model and a second distortion model, the first distortion model being used to generate the current predistortion compensation amount, and the second distortion model being updated in the background based on newly acquired feedback data, residual data, operational data, perturbation signal response data, test impulse response data, or a combination thereof; wherein the control unit calculates a predistortion quality index based on predicted residual, actual residual, field action error, delay error, model confidence, compensation amount safety margin, or a combination thereof; and when the predistortion quality index of the second distortion model is better than that of the first distortion model, the control unit gradually incorporates or replaces the first distortion model with the second distortion model using progressive weighting, interpolation fusion, weight gradual change, slope limitation, compensation amount slope limitation, output change amplitude limitation, or smooth switching methods.

10. A multi-dimensional dynamic predistortion compensation system for non-contact field control, comprising: At least one field generation unit is used to output at least one non-contact field according to a modified post-field output control quantity, so as to apply a non-contact field action to at least one target object. The system also includes a control unit electrically or communicatively connected to the at least one field generation unit. The control unit comprises: an ideal field output receiving module for receiving an ideal field output control quantity, wherein the ideal field output control quantity corresponds to a predetermined non-contact action requirement of one of the target objects; a distortion parameter acquisition module for acquiring at least one distortion parameter; a distortion model module for establishing, selecting, or updating a distortion model based on the at least one distortion parameter; a pre-distortion compensation module for generating a pre-distortion compensation quantity based on the distortion model; and a pre-output correction module for performing linear superposition, nonlinear mapping, parameter recalibration, spatial coordinate transformation, time domain transformation, frequency domain transformation, asymmetric correction, lookup table transformation, inverse filtering, temporal deconvolution, or combinations thereof on the ideal field output control quantity based on the pre-distortion compensation quantity, to transform and map the ideal field output control quantity into the corrected post-field output control quantity. And a timing synchronization module, used to adjust the output timing of the corrected field output control quantity according to the model solution delay, communication delay, field generation unit response delay, control cycle, target object motion rhythm or combination thereof, so that the corrected field output control quantity is synchronized with the target object's current position, predicted position, motion state or process rhythm; wherein the at least one field generation unit outputs the at least one non-contact field according to the corrected field output control quantity, so that the actual non-contact field action on the target object is close to the predetermined non-contact action requirement.

Images