Vapor chambers, capillary sheets for vapor chambers, and electronic devices

Abstract

The capillary sheet (30) for the vapor chamber (1) of the present invention comprises a first body surface (31a), a second body surface (31b), a frame portion (32), and a plurality of shore portions (33). A vapor passage (51) is formed through the first body surface (31a) and the second body surface (31b) for the passage of vapor (2a) of the actuating fluid. A liquid flow path portion (60) is formed on the second body surface (31b) side of the shore portion (33) and communicates with the vapor passage (51) for the passage of liquid actuating fluid (2b). The extending end of the vapor passage (51B) is connected to at least one shore portion (33A). A first body surface side flow path (70) communicating with the vapor passage (51B) is formed in the connection region (MR) on the first body surface (31a) side of the shore portion (33A) and connected to the extending end of the vapor passage (51B).

Description

Technical Field

[0001] This disclosure relates to a vapor chamber, a capillary sheet for the vapor chamber, and an electronic device. Prior Technology

[0002] Central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors used in mobile terminals such as portable devices and tablets are devices that generate heat. These heat-generating devices are cooled by heat dissipation components such as heat pipes. In recent years, the need for thinner heat dissipation components has also increased for mobile terminals. Therefore, the development of vapor chambers that allow for thinner heat pipes has been continuously progressing. An actuating fluid is sealed inside the vapor chamber. The actuating fluid absorbs and diffuses the heat from the device, thereby cooling the device. For example, Patent Document 1 discloses a sheet-type heat pipe with two or more overlapping metal foil sheets.

[0003] More specifically, the actuating fluid in the vapor chamber receives heat from the device and evaporates into vapor (actuating vapor) near the device (evaporation section). This actuating vapor diffuses and cools and condenses in the vapor flow path away from the evaporation section, becoming liquid. A liquid flow path, acting as a capillary structure, is provided in the vapor chamber. The condensed actuating fluid (actuating liquid) enters the liquid flow path from the vapor flow path and flows through the liquid flow path to the evaporation section. Furthermore, the actuating liquid is heated again and evaporates in the evaporation section. In this way, the actuating fluid undergoes a phase change, that is, repeated evaporation and condensation, while flowing back in the vapor chamber, thereby moving the heat of the device and improving heat dissipation efficiency. [Previous Technical Documents] [Patent Literature]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2016-017702

[0005] This embodiment provides a steam cavity that allows actuating steam to be distributed throughout a large area of ​​the steam cavity, a capillary structure sheet for the steam cavity, and an electronic device. Furthermore, this embodiment provides a steam cavity that allows heat from a heat source to be uniformly distributed throughout the surface of the steam cavity, a capillary structure sheet for the steam cavity, and an electronic device. Summary of the Invention

[0006] The capillary sheet of this embodiment is used for a vapor chamber and includes: a first body surface; a second body surface located on the opposite side of the first body surface; a frame portion; and a plurality of shore portions, which are arranged separately from each other within the frame portion; and a vapor passage is formed between the frame portion and the shore portions, or between the plurality of shore portions, through the first body surface and the second body surface, for the passage of vapor of the actuating fluid; a liquid flow path is formed on the second body surface side of at least one of the shore portions, communicating with the vapor passage for the passage of the liquid actuating fluid; the extending end of the vapor passage is connected to at least one of the plurality of shore portions; and a first body surface side flow path communicating with the vapor passage is formed in the connection area on the first body surface side of the shore portion and connected to the extending end of the vapor passage. Simple Explanation of the Diagram

[0007] Figure 1 is a schematic perspective view illustrating the electronic device of the first embodiment. Figure 2 is a top view showing the steam chamber of the first embodiment. Figure 3 shows a cross-sectional view of the vapor chamber in Figure 2 along line III-III. Figure 4 is a top view of the capillary structure sheet shown in Figure 3. Figure 5 is a bottom view of the capillary sheet shown in Figure 3. Figure 6 shows a sectional view of the steam chamber in Figure 2 along line VI-VI. Figure 7 is a partially enlarged top view of the liquid flow path shown in Figure 4. Figure 8 is a partially enlarged bottom view of the first body surface side flow path shown in Figure 5. Figure 9 is an enlarged bottom view of the periphery of the connection area of ​​the capillary sheet (enlarged view of part VIII in Figure 5). Figures 10(a)-(c) illustrate the manufacturing method of the steam cavity in the first embodiment. Figure 11 is an enlarged bottom view of the periphery of the connection area of ​​the capillary sheet in the first variation of the first embodiment. Figure 12 is an enlarged bottom view of the periphery of the connection area of ​​the capillary sheet in the second variation of the first embodiment. Figure 13 is an enlarged bottom view of the periphery of the connection area of ​​the capillary sheet in the third variation of the first embodiment. Figure 14 is an enlarged bottom view of the periphery of the connection area of ​​the capillary sheet in the fourth variation of the first embodiment. Figure 15 is an enlarged bottom view of the periphery of the connection area of ​​the capillary sheet in the fifth variation of the first embodiment. Figures 16(a) and (b) are enlarged bottom views of the periphery of the connecting area of ​​the capillary sheet in the fifth variation of the first embodiment. Figures 17(a) and (b) are enlarged bottom views of the periphery of the connecting area of ​​the capillary sheet in the fifth variation of the first embodiment. Figures 18(a)-(c) are cross-sectional views showing the connection area of ​​the capillary sheet in the fifth variation of the first embodiment (cross-sectional views along lines XVIII-XVIII in Figures 15 to 17). Figure 19 is a schematic perspective view illustrating the electronic device of the second embodiment. Figure 20 shows a top view of the steam chamber in the second embodiment. Figure 21 shows a cross-sectional view of the vapor chamber in Figure 20 along line XXI-XXI. Figure 22 is a top view of the capillary sheet of the second embodiment. Figure 23 is a bottom view of the capillary sheet of the second embodiment. Figure 24 is a partially enlarged top view of the liquid flow path shown in Figure 22. Figures 25(a) and (b) are schematic top views showing capillary sheet. Figures 26(a)-(c) are top views showing the flow of actuating fluid within a capillary sheet. Figure 27 is a top view of the capillary sheet of the first variation of the second embodiment. Figures 28(a) and (b) are top views showing the capillary sheet of the second variation of the second embodiment. Figures 29(a) and (b) are top views showing the capillary sheet of the third variation of the second embodiment. Figures 30(a)-(c) are top views showing the capillary sheet of the fourth variation of the second embodiment. Figures 31(a) and (b) are top views showing the capillary sheet of the fifth variation of the second embodiment. Figure 32 is a top view of the capillary sheet of the sixth variation of the second embodiment. Figure 33 is a top view of the capillary sheet of the seventh variation of the second embodiment. Figure 34 is a top view of the capillary sheet of the eighth variation of the second embodiment. Figure 35 is a top view of the capillary sheet of the 9th variation of the second embodiment. Figures 36(a)-(c) are cross-sectional views showing the steam chamber of a variation of the second embodiment. Implementation

[0008] The first embodiment disclosed herein is a capillary sheet material for use in a vapor chamber, comprising: a first body surface; a second body surface located on the opposite side of the first body surface; a frame portion; and a plurality of shore portions, which are disposed separately from each other within the frame portion; and a vapor passage is formed between the frame portion and the shore portions, or between the plurality of shore portions, through the first body surface and the second body surface, for the passage of vapor of the actuating fluid; a liquid flow path is formed on the second body surface side of at least one of the shore portions, communicating with the vapor passage for the passage of the liquid actuating fluid; the extending end of the vapor passage is connected to at least one of the plurality of shore portions; and a first body surface side flow path communicating with the vapor passage is formed in the connection area on the first body surface side of the shore portion and connected to the extending end of the vapor passage.

[0009] In the capillary sheet of the first state disclosed herein, the second state may also have an additional vapor passage on the opposite side of the side of the connection region that is connected to the end of the vapor passage in the extension direction.

[0010] The third state of the disclosed sample may also be an evaporation region on the capillary sheet of the first or second state of the sample, where an evaporation source is provided for placement, and the first body surface side flow path is continuously formed along the shore portion to the evaporation region.

[0011] In the capillary sheet of any of the above-mentioned first to third states, the fourth state disclosed herein may also have the first body surface side flow path formed on other shore portions extending along the above-mentioned vapor passage.

[0012] In the fifth state of this disclosure, in the capillary sheet of any of the first to fourth states, the shore portion and the vapor passage do not intersect perpendicularly when viewed from above in the connection region where they are connected to the end of the vapor passage extending in the direction of extension.

[0013] The sixth state of this disclosure may also be the portion of the capillary sheet in any of the first to fifth states of the above-mentioned connecting area located at the curved part of the above-mentioned shore platform.

[0014] The seventh state disclosed herein may also have a shape in which the width of the vapor passage gradually narrows towards the end in the extension direction in any of the capillary structure sheets of the first to sixth states.

[0015] In the capillary sheet of any of the above-mentioned first to seventh states, the eighth state disclosed herein may also be a confluence of at least two of the above-mentioned plurality of shore sections, and in the confluence portion, the end of the extension direction of the above-mentioned vapor passage is connected to the above-mentioned shore section.

[0016] The ninth state disclosed herein may also be located at the position where the end of the vapor passage in the extension direction of the above-mentioned vapor passage connects with the above-mentioned shore portion in the capillary structure sheet of any of the above-mentioned states 1 to 4, and the vapor passage and the above-mentioned shore portion are orthogonal when viewed from above.

[0017] The 10th state of this disclosure is a vapor chamber, which is sealed with an actuating fluid, and includes: a first sheet; a second sheet; and a capillary sheet of any of the states described in the first to ninth states, which is disposed between the first sheet and the second sheet.

[0018] The 11th embodiment disclosed herein is an electronic device comprising: a housing; a device housed within the housing; and a vapor chamber as described in the 10th embodiment, which is in thermal contact with the device.

[0019] According to the first to eleventh states disclosed herein, the actuating vapor can be distributed throughout a large area of ​​the vapor chamber.

[0020] The 12th embodiment disclosed herein is a capillary sheet material for use in a vapor chamber, comprising: a vapor passage through which vapor of an actuating fluid passes; and a liquid flow path connected to the vapor passage for through which the liquid actuating fluid passes; and on the capillary sheet material, a first heat source region for arranging a first heat source and a second heat source region for arranging a second heat source are disposed, wherein the first heat source region and the second heat source region are interconnected by at least one connecting vapor passage having a length of less than twice the distance between the centers of the first heat source region and the second heat source region, or by at least one connecting liquid flow path having a length of less than twice the distance between the centers of the first heat source region and the second heat source region.

[0021] The 13th embodiment disclosed herein is a capillary sheet for a vapor chamber, which is in the same capillary sheet as the 12th embodiment. It includes: a vapor passage through which vapor of an actuating fluid passes; and a liquid flow path that communicates with the vapor passage for through which liquid of the actuating fluid passes. A first heat source region for arranging a first heat source and a second heat source region for arranging a second heat source are disposed on the capillary sheet. The first heat source region and the second heat source region are interconnected by at least one vapor passage and at least one liquid flow path.

[0022] The 14th state of this disclosure, in the capillary sheet of the 12th or 13th state above, may also include a separate vapor passage that is connected to either the first heat source region or the second heat source region, but not to the other.

[0023] In the capillary sheet of any of the 12th to 14th states disclosed herein, the first heat source region and the second heat source region may be interconnected by at least one connecting vapor passage, wherein the vapor passage includes a branch vapor passage connected in the middle of the connecting vapor passage.

[0024] The 16th state of this disclosure may also include a separate liquid flow path in the capillary structure sheet of any of the 12th to 15th states, which is connected to either the first heat source region or the second heat source region, but not to the other.

[0025] In the capillary structure sheet of any of the above-mentioned 12th to 16th states, the 17th state of this disclosure may also be such that the first heat source region and the second heat source region are interconnected by at least one connecting liquid flow path, and the liquid flow path includes a branch liquid flow path connected in the middle of the connecting liquid flow path.

[0026] In the capillary structure sheet of the above-mentioned 17th state sample, the 18th state sample disclosed herein may also have the above-mentioned branch liquid flow path bent in the connection portion with the above-mentioned connecting liquid flow path, and there is a connection recess where no liquid flow path exists in the connection portion between the above-mentioned branch liquid flow path and the above-mentioned connecting liquid flow path.

[0027] In the capillary structure sheet of the 17th state of this disclosure, the branch liquid flow path may be bent in the connection portion with the connecting liquid flow path, and a connecting liquid flow path may exist in the connection portion between the branch liquid flow path and the connecting liquid flow path.

[0028] In the capillary sheet of any of the above-mentioned 12th to 19th states, the 20th state of this disclosure may also have a third heat source region configured on the capillary sheet for configuring a third heat source, wherein the third heat source region is interconnected with the first heat source region or the second heat source region by at least one of the above-mentioned connecting vapor passages or at least one of the above-mentioned connecting liquid flow paths.

[0029] In the capillary sheet of any of the 12th to 20th states disclosed herein, the 21st state may also have a third heat source region configured on the capillary sheet for configuring the third heat source. The second heat source region and the third heat source region are interconnected by at least one of the aforementioned connecting vapor passages or at least one of the aforementioned connecting liquid flow paths. The third heat source region and the first heat source region are interconnected by at least one of the aforementioned connecting vapor passages or at least one of the aforementioned connecting liquid flow paths.

[0030] In the capillary sheet of any of the above-mentioned 12th to 21st states, the 22nd state of this disclosure may also include at least two branch vapor passages connected in the middle of the above-mentioned connecting vapor passages, one of the at least two branch vapor passages extending outward in the direction of the surface of the capillary sheet, and the other branch vapor passage extending inward in the direction of the surface of the capillary sheet.

[0031] The 23rd state of this disclosure is a vapor chamber, which is sealed with an actuating fluid, and has at least one sheet and a capillary sheet of any of the states 12 to 22 above, laminated on the sheet.

[0032] The 24th embodiment disclosed herein is a vapor chamber, which is sealed with an actuating fluid. It includes: a vapor passage through which the vapor of the actuating fluid passes; and a liquid flow path connected to the vapor passage for through which the liquid actuating fluid passes; and a first heat source region for arranging a first heat source and a second heat source region for arranging a second heat source. The first heat source region and the second heat source region are connected to each other by at least one connecting vapor passage with a length of less than twice the distance between the centers of the first heat source region and the second heat source region, or by at least one connecting liquid flow path with a length of less than twice the distance between the centers of the first heat source region and the second heat source region.

[0033] The 25th embodiment disclosed herein is a vapor chamber, which is sealed with an actuating fluid. It includes: a vapor passage through which the vapor of the actuating fluid passes; and a liquid flow path connected to the vapor passage for the liquid form of the actuating fluid to pass through; and a first heat source region for arranging a first heat source and a second heat source region for arranging a second heat source, wherein the first heat source region and the second heat source region are interconnected by at least one vapor passage and at least one liquid flow path.

[0034] The 26th embodiment disclosed herein includes: a housing; the first heat source and the second heat source housed within the housing; and a vapor chamber, such as any of the 23rd to 25th embodiments, which are in thermal contact with the first heat source and the second heat source.

[0035] According to the 12th to 26th states disclosed herein, heat from the heat source can be uniformly distributed throughout the surface of the vapor chamber.

[0036] (First Implementation) The following description refers to the first embodiment. Note that, for ease of illustration and understanding, the accompanying drawings have been appropriately exaggerated relative to the actual object in terms of scale and aspect ratio.

[0037] Furthermore, the terms used in this specification to describe specific shapes, geometric conditions, physical properties, and their degrees, such as "parallel," "orthogonal," and "identical," as well as lengths, angles, and physical property values, are not strictly defined. These terms or values ​​are interpreted within the range of expected similar functions. Moreover, in the drawings, the shapes of multiple parts expected to have the same function are shown for clarity and regularity, but are not strictly defined; within the scope of expected function, the shapes of these parts may differ. Also, in the drawings, for convenience, boundary lines representing the joint surfaces of components are represented only as straight lines. Boundary lines are not strictly straight lines. Within the scope of expected joint performance, the shape of the boundary line is arbitrary.

[0038] Using Figures 1 to 9, the vapor chamber, the capillary sheet for the vapor chamber, and the electronic device of this embodiment will be described. The vapor chamber 1 of this embodiment is a device mounted on the electronic device E to cool the device D, which serves as a heat source (heat-generating element) housed within the electronic device E. Examples of device D include electronic devices (cooled devices) that generate heat and are used in mobile terminals such as portable terminals or tablet terminals. Examples of electronic devices that generate heat include central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors.

[0039] Here, we will first describe an electronic device E equipped with the vapor chamber 1 of this embodiment, taking a tablet terminal as an example. As shown in FIG1, the electronic device E (e.g., a tablet terminal) includes a housing H, a device D housed within the housing H, and a vapor chamber 1. In the electronic device E shown in FIG1, a touch panel display TD is provided on the front side of the housing H. The vapor chamber 1 is housed within the housing H and is configured to be in thermal contact with the device D. In this way, the vapor chamber 1 can receive the heat generated in the device D when the electronic device E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via the actuating fluids 2a and 2b, which will be described later. In this way, the device D is effectively cooled. When the electronic device E is a tablet terminal, the device D is equivalent to a central processing unit, etc.

[0040] Next, the vapor chamber 1 of this embodiment will be described. As shown in Figures 2 and 3, the vapor chamber 1 has a sealed space 3 containing the actuating fluids 2a and 2b. The vapor chamber 1 is configured to effectively cool the device D of the aforementioned electronic device E by the repeated phase changes of the actuating fluids 2a and 2b within the sealed space 3. Examples of actuating fluids 2a and 2b include pure water, ethanol, methanol, acetone, and mixtures thereof. Furthermore, the actuating fluids 2a and 2b may also have freeze-expansion properties. That is, the actuating fluids 2a and 2b may also be fluids that expand upon freezing. Examples of actuating fluids 2a and 2b with freeze-expansion properties include pure water, or an aqueous solution of pure water with additives such as alcohol.

[0041] As shown in Figures 2 and 3, the vapor chamber 1 includes a lower sheet 10 (first sheet), an upper sheet 20 (second sheet), and a capillary structure sheet for the vapor chamber (hereinafter simply referred to as capillary structure sheet 30). The capillary structure sheet 30 is disposed between the lower sheet 10 and the upper sheet 20. In this embodiment, the vapor chamber 1 consists of the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 sequentially stacked.

[0042] The steam cavity 1 is formed into a generally thin flat plate shape. The planar shape of the steam cavity 1 is arbitrary, but it can be rectangular as shown in Figure 2. For example, the planar shape of the steam cavity 1 can be a rectangle with one side being 50 mm to 200 mm and the other side being 150 mm to 600 mm, or it can be a square with one side being 70 mm to 300 mm. The planar dimensions of the steam cavity 1 are arbitrary. In this embodiment, as an example, we will describe an example where the planar shape of the steam cavity 1 is a rectangle with the X direction as the long side, as described later. In this case, as shown in Figure 2, the lower sheet 10, the upper sheet 20, and the capillary sheet 30 can have the same planar shape as the steam cavity 1. Furthermore, the planar shape of the steam cavity 1 is not limited to a rectangle, and can also be any shape such as a circle, ellipse, L-shape, T-shape, or U-shape.

[0043] As shown in Figure 2, the vapor chamber 1 has an evaporation region SR for evaporating the working fluids 2a and 2b, and a condensation region CR for condensing the working fluids 2a and 2b.

[0044] The evaporation region SR is the area that coincides with the heat source, i.e., device D, when viewed from above, and is the area for mounting device D. The evaporation region SR can be positioned anywhere in the vapor chamber 1. In this embodiment, the evaporation region SR is formed on one side of the vapor chamber 1 in the X direction (left side of FIG2). Heat from device D is transferred to the evaporation region SR, and the liquid actuating fluid (appropriately referred to as actuating fluid 2b) evaporates in the evaporation region SR due to this heat. The heat from device D not only coincides with device D when viewed from above, but is also transferred to the periphery of this region. Therefore, the evaporation region SR includes the area that coincides with device D and its surrounding area when viewed from above. Here, "viewing from above" refers to the state of being observed from a direction orthogonal to the surface of the vapor chamber 1 that receives heat from device D (the second upper sheet surface 20b, described later) and the surface that releases the received heat (the first lower sheet surface 10a, described later). That is, looking down, for example as shown in Figure 2, is equivalent to observing the state of the steam chamber 1 from above or from below.

[0045] The condensation region CR is the area that does not coincide with the heat source, i.e., device D, when viewed from above, and is the main area for the actuating vapor 2a to release heat and condense. The condensation region CR can also be referred to as the area surrounding the evaporation region SR. In the condensation region CR, the heat from the actuating vapor 2a is released to the lower sheet 10, and the actuating vapor 2a is cooled and condensed in the condensation region CR.

[0046] Furthermore, when the vapor chamber 1 is located inside a mobile terminal, the vertical arrangement may be disrupted depending on the orientation of the mobile terminal. However, in this embodiment, for convenience, the sheet that receives heat from device D is referred to as the upper sheet 20, and the sheet that releases the received heat is referred to as the lower sheet 10. Therefore, the following description will be based on the condition that the lower sheet 10 is positioned on the lower side and the upper sheet 20 is positioned on the upper side.

[0047] As shown in Figure 3, the lower sheet 10 has a first lower sheet surface 10a located opposite to the capillary sheet 30, and a second lower sheet surface 10b located opposite to the first lower sheet surface 10a (i.e., the side opposite to the capillary sheet 30). The lower sheet 10 can be integrally formed into a flat shape, and the lower sheet 10 can have an integral thickness. A housing member Ha, which constitutes part of the housing of a mobile terminal or the like, is installed on the first lower sheet surface 10a. The entire first lower sheet surface 10a can be covered by the housing member Ha.

[0048] As shown in Figure 3, the upper sheet 20 has a first upper sheet surface 20a disposed on the side of the capillary sheet 30, and a second upper sheet surface 20b located on the opposite side of the first upper sheet surface 20a. The upper sheet 20 can be formed entirely flat, and the upper sheet 20 can have a certain thickness. The aforementioned device D is mounted on the second upper sheet surface 20b.

[0049] As shown in Figure 3, the capillary sheet 30 includes a vapor flow path 50, a liquid flow path 60 adjacent to the vapor flow path 50, and a first body surface side flow path 70 disposed on the opposite side of the liquid flow path 60 in the thickness direction of the capillary sheet 30. Furthermore, the capillary sheet 30 has a first body surface 31a and a second body surface 31b located on the opposite side of the first body surface 31a. The first body surface 31a is disposed on the side of the lower sheet 10, and the second body surface 31b is disposed on the side of the upper sheet 20.

[0050] The second lower sheet surface 10b of the lower sheet 10 and the first body surface 31a of the capillary sheet 30 can be diffusely bonded together for permanent bonding. Similarly, the first upper sheet surface 20a of the upper sheet 20 and the second body surface 31b of the capillary sheet 30 can be diffusely bonded together for permanent bonding. Alternatively, the lower sheet 10, upper sheet 20, and capillary sheet 30 can be permanently bonded, but can also be bonded by welding or other methods other than diffusion bonding, provided they can be permanently bonded. Furthermore, the term "permanent bonding" is not strictly defined. "Permanent bonding" means that when the vapor chamber 1 is in operation, the bonding between the lower sheet 10 and the capillary sheet 30 can be maintained to a degree that maintains the sealing of the sealed space 3, and to a degree that maintains the bonding between the upper sheet 20 and the capillary sheet 30.

[0051] As shown in Figures 3 to 5, the capillary sheet 30 of this embodiment has a frame portion 32 that is rectangular in shape when viewed from above, and a shore portion 33 disposed within the frame portion 32. The frame portion 32 and the shore portion 33 are the material residues of the capillary sheet 30 that were not removed by etching in the etching step described later. In this embodiment, the frame portion 32 is rectangular in shape when viewed from above, but it is not limited to this and can also be any frame shape such as circular, elliptical, L-shaped, T-shaped, or U-shaped. A vapor flow path portion 50 is defined inside the frame portion 32. That is, actuating vapor 2a flows through the inside of the frame portion 32 and around the shore portion 33.

[0052] In this embodiment, the shore section 33 can also extend in a slender shape when viewed from above. The planar shape of the shore section 33 can be any shape, such as a slender rectangle, an arc, a U-shaped or S-shaped curve, a V-shaped or L-shaped flexed line, etc. In Figures 4 and 5, the plurality of shore sections 33 include: those extending in a straight line in the X direction (first direction) when viewed from above (second shore section 33B, third shore section 33C); and those composed of a straight portion and a generally S-shaped curved portion (first shore section 33A). Furthermore, each shore section 33 can also be arranged separately from other shore sections 33 in the width direction of the shore section 33. This configuration allows the actuating vapor 2a to flow around each shore section 33 and be transported to the condensation region CR. In this way, the flow of the actuating vapor 2a is suppressed. The width w1 of the shore portion 33 (refer to Figure 3) can be, for example, 30 μm or more and 3000 μm or less. Here, the width w1 of the shore portion 33 refers to the dimension of the shore portion 33 in the direction orthogonal to the extension direction of the shore portion 33 (width direction), and the dimension at the thickest position of the shore portion 33 (for example, the position where the protrusion 55 described later exists).

[0053] The frame portion 32 and each shore portion 33 are diffusely bonded to the lower sheet 10 and to the upper sheet 20. This improves the mechanical strength of the steam chamber 1. The first wall surface 53a and the second wall surface 54a of the steam passage 51, described later, constitute the sidewalls of the shore portion 33. The first body surface 31a and the second body surface 31b of the capillary sheet 30 can be formed in a flat manner throughout the frame portion 32 and each shore portion 33.

[0054] As shown in Figures 4 and 5, the plurality of shore sections 33 include a first shore section 33A, a second shore section 33B, and a third shore section 33C. Each of the first shore section 33A, the second shore section 33B, and the third shore section 33C has a liquid flow path 60 for the actuating fluid 2b to pass through; however, each of the first shore section 33A, the second shore section 33B, and the third shore section 33C may also lack a liquid flow path 60. The first shore section 33A, the second shore section 33B, and the third shore section 33C may extend in a straight line, or may have any shape such as an arc, an S-shape, a V-shape, an L-shape, or other flexural lines. Furthermore, in this specification, the first shore section 33A, the second shore section 33B, and the third shore section 33C are collectively referred to as shore section 33.

[0055] The first shore section 33A extends from the evaporation region SR side, and is connected to the second shore section 33B or the third shore section 33C midway along its extension direction. One end of the extension direction of the first shore section 33A (negative side in the X direction) coincides with the evaporation region SR. The other end of the extension direction of the first shore section 33A (positive side in the X direction) is preferably a condensation region CR located at a position away from the evaporation region SR in the planar direction, and may terminate, for example, at the support section 39 described later. In this case, one or more second shore sections 33B and / or one or more third shore sections 33C are connected to the first shore section 33A. In this embodiment, the first shore section 33A has a generally S-shaped bend midway, and extends in the X direction when viewed from above. Furthermore, in this embodiment, there are a plurality of (2) first shore platform sections 33A, which are arranged substantially parallel to each other. In addition, the other end of the extension direction of the first shore platform section 33A can also be connected to other first shore platform sections 33A.

[0056] The second shore section 33B extends from the evaporation region SR and connects to the first shore section 33A. That is, one end of the extension direction of the second shore section 33B (negative side in the X direction) coincides with the evaporation region SR, and the other end of the extension direction (positive side in the X direction) connects to the first shore section 33A. In this embodiment, the second shore section 33B extends in a straight line along the X direction when viewed from above, but it can also have any shape such as an arc, an S-shape, a V-shape, an L-shape, or a flexed line. Furthermore, in this embodiment, a plurality of second shore sections 33B (3 in total) are provided, and these plurality of second shore sections 33B are arranged parallel to each other.

[0057] The third shore section 33C is located outside the evaporation zone SR and is connected to the first shore section 33A. That is, one end (negative side in the X direction) of the extension direction of the third shore section 33C is connected to the first shore section 33A. The other end (positive side in the X direction) of the extension direction of the third shore section 33C is preferably a condensation zone CR located at a position away from the evaporation zone SR in the surface direction, and may terminate at the support section 39 described later. In this embodiment, the third shore section 33C extends in a straight line in the X direction when viewed from above, but it may also have any shape such as an arc, an S-shaped curve, a V-shaped curve, an L-shaped curve, or a flexible line. Furthermore, in this embodiment, there are a plurality of third shore sections 33C (3 strips), and these plurality of third shore sections 33C are arranged parallel to each other.

[0058] The vapor flow path 50 is mainly a flow path for the vapor of the actuating fluid (appropriately referred to as actuating vapor 2a). The vapor flow path 50 extends from the first body surface 31a to the second body surface 31b and penetrates the capillary sheet 30.

[0059] As shown in Figures 4 and 5, the steam flow path 50 of this embodiment has a plurality of steam passages 51. The steam passages 51 are formed inside the frame portion 32 and outside the shore portion 33, that is, between the frame portion 32 and the shore portion 33, and between adjacent shore portions 33. The planar shape of each steam passage 51 can be any shape, including elongated rectangular shapes, curved shapes such as arcs, S-shapes, V-shapes, L-shapes, etc. Through the plurality of shore portions 33, the steam flow path 50 is divided into a plurality of steam passages 51.

[0060] As shown in Figure 3, the vapor passage 51 is formed by extending from the first body surface 31a of the capillary sheet 30 to the second body surface 31b. Furthermore, the vapor passage 51 is formed by penetrating the capillary sheet 30 from the first body surface 31a to the second body surface 31b. The vapor passage 51 can also be referred to as a penetrating space.

[0061] The vapor passage 51 can be formed by etching from the first body surface 31a and the second body surface 31b of the capillary sheet 30 in the etching step described later. In this case, as shown in FIG3, the vapor passage 51 has a curved first wall surface 53a and a curved second wall surface 54a. The first wall surface 53a is located on the side of the first body surface 31a and is curved in a shape that is recessed inward in the width direction (Y direction) toward the shore portion 33. The second wall surface 54a is located on the side of the second body surface 31b and is curved in a shape that is recessed inward in the width direction (Y direction) toward the shore portion 33. The first wall surface 53a and the second wall surface 54a merge in a protrusion 55 formed in a manner that extends toward the inner side of the vapor passage 51. The protrusion 55 can be formed with an acute angle when viewed in section. The planar area of ​​the vapor passage 51 is minimized at the location where the protrusion 55 exists. The width w2 of the steam passage 51 (see Figure 3) can be, for example, 100 μm or more and 5000 μm or less. Here, the width w2 of the steam passage 51 is the width at the narrowest part of the steam passage 51. In this case, it refers to the distance measured at the location where the protrusion 55 exists in a direction orthogonal to the extending direction of the steam passage 51 (width direction). Furthermore, the width w2 of the steam passage 51 is equivalent to the gap between adjacent shore portions 33 in the width direction (Y direction).

[0062] The position of the protrusion 55 in the thickness direction (Z direction) of the capillary sheet 30 is more biased towards the second body surface 31b than the center position between the first body surface 31a and the second body surface 31b. When the distance between the protrusion 55 and the second body surface 31b is set as t5 (see Figure 3), the distance t5 can be more than 5%, more than 10%, or more than 20% of the thickness t4 of the capillary sheet 30 (see Figure 3). The distance t5 can be less than 50%, less than 40%, or less than 30% of the thickness t4 of the capillary sheet 30. Alternatively, the position of the protrusion 55 in the thickness direction (Z direction) of the capillary sheet 30 can also be the center position between the first body surface 31a and the second body surface 31b, or it can be a position biased towards the first body surface 31a from the center position. As long as the vapor passage 51 penetrates the capillary sheet 30 in the thickness direction (Z direction), the position of the protrusion 55 is arbitrary.

[0063] Furthermore, in this embodiment, the cross-sectional shape of the steam passage 51 is defined by the protrusion 55 that extends toward the inside of the steam passage 51, but is not limited thereto. For example, the cross-sectional shape of the steam passage 51 may be trapezoidal or rectangular, or it may also be barrel-shaped.

[0064] The vapor passage 51, which includes the vapor flow path 50 configured in this way, constitutes a part of the aforementioned sealed space 3. As shown in FIG3, the vapor flow path 50 of this embodiment is mainly defined by the lower sheet 10, the upper sheet 20, the frame portion 32 of the aforementioned capillary structure sheet 30, and the shore portion 33. Each vapor passage 51 has a relatively large flow path cross-sectional area to allow the actuating vapor 2a to pass through.

[0065] As shown in Figures 4 and 5, the plurality of vapor passages 51 include a first vapor passage 51A, a second vapor passage 51B, and a third vapor passage 51C. The first vapor passage 51A, the second vapor passage 51B, and the third vapor passage 51C are all flow paths for the actuating vapor 2a, formed between the plurality of shore portions 33 or between the frame portion 32 and the shore portions 33. The first vapor passage 51A, the second vapor passage 51B, and the third vapor passage 51C can each extend in a straight line, or they can have any shape such as an arc, an S-shape, a V-shape, an L-shape, or other flexural lines. Furthermore, the substrate configuration, including the cross-sectional shape, of the first vapor passage 51A, the second vapor passage 51B, and the third vapor passage 51C is the same as the configuration of the vapor passages 51 described above. In addition, in this specification, the first steam passage 51A, the second steam passage 51B and the third steam passage 51C are collectively referred to as steam passage 51.

[0066] The first vapor passage 51A extends from the evaporation region SR side, and its extending end does not connect with the shore section 33. One end of the first vapor passage 51A (negative side in the X direction) in the extending direction coincides with the evaporation region SR. The other end of the first vapor passage 51A in the extending direction (positive side in the X direction) is preferably a condensation region CR located outside the evaporation region SR in the planar direction, and may terminate, for example, at the support section 39 described later. In this case, there are a plurality of first vapor passages 51A (3 in total), including those arranged along the first shore section 33A and those arranged along the frame section 32. Among them, the first vapor passages 51A arranged along the first shore section 33A are located between the two first shore sections 33A. The first vapor passage 51A has a generally S-shaped bend in the middle, and extends in the X direction when viewed from above. Furthermore, the two first vapor passages 51A arranged along the frame portion 32 extend in a straight line along the X direction when viewed from above.

[0067] The second steam passage 51B extends from the evaporation region SR, and its extending end connects to the first shore portion 33A. That is, one end (negative side in the X direction) of the second steam passage 51B in the extending direction coincides with the evaporation region SR, and the other end (positive side in the X direction) terminates by connecting to the first shore portion 33A. The first shore portion 33A or the second shore portion 33B is respectively arranged on both sides of the width direction (Y direction) of the second steam passage 51B. In this embodiment, the second steam passage 51B extends in a straight line along the X direction when viewed from above. Furthermore, in this embodiment, a plurality of (3) second steam passages 51B are provided, and these plurality of second steam passages 51B are arranged parallel to each other.

[0068] The third steam passage 51C is located outside the evaporation region SR, and its extending end is connected to the first shore portion 33A. That is, one end (negative side in the X direction) of the extending direction of the third steam passage 51C is connected to the first shore portion 33A. The other end (positive side in the X direction) of the extending direction of the third steam passage 51C is preferably a condensation region CR located at a position away from the evaporation region SR in the planar direction, and may terminate at the support portion 39 described later. The first shore portion 33A or the third shore portion 33C is respectively arranged on both sides of the width direction (Y direction) of the third steam passage 51C. In this embodiment, the third steam passage 51C extends in a straight line along the X direction when viewed from above. Furthermore, in this embodiment, there are a plurality of third steam passages 51C (3 in total), and these plurality of third steam passages 51C are arranged parallel to each other.

[0069] As shown in Figures 4 and 5, a support portion 39 is provided within the vapor flow path 50 to support the long side (X direction) end of the shore portion 33 to the frame portion 32. The support portion 39 supports adjacent shore portions 33. The support portion 39 is provided on one side (the positive side in the X direction) of the shore portion 33 in the long side (X direction). Alternatively, the support portion 39 may be provided on both sides of the shore portion 33 in the long side (X direction). Preferably, the support portion 39 is formed in a manner that does not obstruct the flow of actuating vapor 2a diffused in the vapor flow path 50. In this case, the support portion 39 is disposed on the first body surface 31a side of the capillary sheet 30, and on the second body surface 31b side, a space communicating with the vapor flow path 50 is formed. In Figures 4 and 5, the support portion 39 is indicated in gray. The support portion 39 is thinned by half-etching from the second body surface 31b side. The support portion 39 is a region that does not penetrate the capillary sheet 30 in the thickness direction, and its thickness is thinner than that of the frame portion 32. This allows the support portion 39 to be thinner than the capillary sheet 30, preventing the vapor passage 51 from being interrupted in the X and Y directions. However, it is not limited to this; the support portion 39 can also be disposed on the second body surface 31b side. Furthermore, spaces communicating with the vapor flow path portion 50 can be formed on both the first body surface 31a side and the second body surface 31b side of the support portion 39.

[0070] Furthermore, as shown in Figure 2, the vapor chamber 1 may have an injection section 4 at one end edge in the X direction (negative side of the X direction) for injecting the actuating fluid 2b into the sealed space 3. In the configuration shown in Figure 2, the injection section 4 is positioned on the side of the evaporation region SR. The injection section 4 has an injection flow path 37 formed on the capillary sheet 30. This injection flow path 37 is formed on the second body surface 31b side of the capillary sheet 30 and is concave from the second body surface 31b side. After the vapor chamber 1 is completed, the injection flow path 37 becomes sealed. Furthermore, the injection flow path 37 communicates with the vapor flow path 50, and the actuating fluid 2b is injected into the sealed space 3 through the injection flow path 37. Alternatively, the injection flow path 37 can also communicate with the liquid flow path 60 by the arrangement of the liquid flow path 60.

[0071] In this embodiment, an example has been shown where the injection section 4 is located on one side edge of one pair of end edges in the X direction of the vapor chamber 1, but it is not limited to this and can be located at any position.

[0072] As shown in Figures 3, 4, and 6, a liquid flow path 60 is provided on the second body surface 31b of the capillary structure sheet 30. The liquid flow path 60 is primarily for the passage of the actuating fluid 2b. This liquid flow path 60 constitutes a part of the aforementioned sealed space 3 and communicates with the vapor flow path 50. The liquid flow path 60 is configured as a capillary structure (wick) for transporting the actuating fluid 2b to the evaporation zone SR. In this embodiment, the liquid flow path 60 is provided on the second body surface 31b of each shore portion 33 of the capillary structure sheet 30. The liquid flow path 60 may be formed throughout the entire second body surface 31b of each shore portion 33. Alternatively, the liquid flow path 60 may not be formed on only a portion of the shore portions 33. The liquid flow path 60 may also be referred to as a second body surface side groove.

[0073] As shown in Figure 7, the liquid flow path section 60 has a plurality of main flow path channels 61 through which the actuating fluid 2b passes and arranged in parallel with each other, and a plurality of liquid flow path connecting channels 65 communicating with the main flow path channels 61. In the example shown in Figure 7, each shore section 33 includes six main flow path channels 61, but this is not a limitation. The number of main flow path channels 61 included in each shore section 33 is arbitrary, for example, it can be more than three and less than twenty.

[0074] As shown in Figure 7, each main flow channel 61 is formed by extending along the extension direction (long side direction, X direction) of the shore platform 33. Multiple main flow channels 61 are arranged parallel to each other. Furthermore, when the shore platform 33 is curved in a top view, each main flow channel 61 may also extend in a curved shape along the curvature direction of the shore platform 33. That is, each main flow channel 61 is not necessarily formed as a straight line, and it may also extend in a direction other than parallel to the X direction.

[0075] The main flow channel 61 of the liquid flow path has a flow path cross-sectional area smaller than that of the vapor passage 51 of the vapor flow path section 50, and mainly uses capillary action to flow the actuating liquid 2b. The main flow channel 61 of the liquid flow path is configured to transport the actuating liquid 2b generated by the condensation of the actuating vapor 2a to the evaporation zone SR. Each main flow channel 61 of the liquid flow path is arranged at intervals with each other in the width direction (the direction orthogonal to the extension direction of the shore section 33, the Y direction).

[0076] The main flow channel trench 61 is formed by etching from the second body surface 31b of the capillary sheet 30 in the etching step described later. As shown in Figures 3 and 6, the main flow channel trench 61 has a curved wall surface 62. This wall surface 62 defines the main flow channel trench 61 and is curved in a way that it is recessed from the second body surface 31b side toward the first body surface 31a side. Furthermore, in the cross-sections shown in Figures 3 and 6, it is preferable that the radius of curvature of each wall surface 62 is smaller than the radius of curvature of the second wall surface 54a of the vapor passage 51.

[0077] In Figure 7, the width w3 of the main flow channel 61 can be, for example, 2 μm or more and 500 μm or less. The width w3 of the main flow channel 61 is the length in the direction orthogonal to the extension direction of the shore 33 (the direction perpendicular to the long side direction), which is the dimension in the Y direction. Furthermore, the width w3 of the main flow channel 61 refers to the dimension on the second body surface 31b. Also, as shown in Figure 3, the depth h1 of the main flow channel 61 can be, for example, 3 μm or more and 300 μm or less. Additionally, the depth h1 of the main flow channel 61 is the distance measured from the second body surface 31b in a direction perpendicular to the second body surface 31b, which is the dimension in the Z direction. Furthermore, the depth h1 refers to the deepest point of the main flow channel 61.

[0078] As shown in Figure 7, each liquid flow path connecting groove 65 extends in a direction different from the extension direction (X direction) of the shore portion 33. In this embodiment, each liquid flow path connecting groove 65 is formed extending in the width direction (Y direction) of the shore portion 33, and is formed perpendicularly to the main liquid flow path groove 61. Several liquid flow path connecting grooves 65 are arranged to connect adjacent main liquid flow path grooves 61 to each other. Other liquid flow path connecting grooves 65 are arranged to connect the vapor flow path portion 50 (vapor passage 51) to the main liquid flow path groove 61 closest to the vapor flow path portion 50. That is, the liquid flow path connecting groove 65 extends from the end side of the shore portion 33 in the width direction to the main liquid flow path groove 61 adjacent to that end. In this way, the vapor passage 51 of the vapor flow path portion 50 is connected to the main liquid flow path groove 61.

[0079] The liquid flow path connecting groove 65 has a flow path cross-sectional area smaller than that of the vapor passage 51 of the vapor flow path section 50, and mainly uses capillary action to make the actuating fluid 2b flow. Each liquid flow path connecting groove 65 can also be equally spaced apart in the extension direction (long side direction, X direction) of the shore section 33.

[0080] The liquid flow path connecting trench 65, like the main liquid flow path trench 61, is formed by etching and has a wall surface (not shown) with the same curved shape as the main liquid flow path trench 61. As shown in FIG7, the width w4 (the dimension in the extension direction of the shore portion 33) of the liquid flow path connecting trench 65 can be set to 5 μm or more and 300 μm or less. The depth of the liquid flow path connecting trench 65 can be set to 3 μm or more and 300 μm or less.

[0081] As shown in Figure 7, protrusions 63 are provided between the adjacent main flow channels 61 of the liquid flow path section 60. In the example shown in Figure 7, each bank section 33 contains 7 rows of protrusions 63, but this is not a limitation. The number of protrusions 63 in each bank section 33 is arbitrary; for example, it can be 3 to 20 rows.

[0082] As shown in Figure 7, each row of protrusions 63 is formed by extending along the extension direction (X direction) of the embankment portion 33. Multiple rows of protrusions 63 are arranged parallel to each other. Furthermore, when the embankment portion 33 is curved in a top view, each row of protrusions 63 may also extend in a curved manner along the curvature direction of the embankment portion 33. That is, each row of protrusions 63 is not necessarily formed in a straight line, and may also extend in a direction not parallel to the extension direction of the embankment portion 33. The rows of protrusions 63 are spaced apart from each other in the width direction (Y direction) of the embankment portion 33.

[0083] Each row of protrusions 63 includes a plurality of protrusions 64 (liquid flow path protrusions) arranged in the extending direction of the shore portion 33. The protrusions 64 are disposed within the liquid flow path portion 60, protruding from the main liquid flow path groove 61 and the connecting liquid flow path groove 65, and abutting against the upper sheet 20. Each protrusion 64, when viewed from above, is rectangular with its long side aligned with the extending direction of the shore portion 33. Main liquid flow path grooves 61 are respectively arranged between adjacent protrusions 64 in the width direction of the shore portion 33. Connecting liquid flow path grooves 65 are respectively arranged between adjacent protrusions 64 in the extending direction of the shore portion 33. The connecting liquid flow path grooves 65 are formed to extend in the width direction of the shore portion 33, connecting adjacent main liquid flow path grooves 61 in the width direction of the shore portion 33. This allows the actuating fluid 2b to travel back and forth between these main liquid flow path grooves 61.

[0084] The protrusion 64 is the portion of material remaining in the capillary sheet 30 that was not removed by etching in the etching step described later. In this embodiment, as shown in FIG7, the planar shape of the protrusion 64 (the shape at the position of the second body surface 31b of the capillary sheet 30) is rectangular. The width w5 of the protrusion 64 can be, for example, more than 5 μm and less than 500 μm.

[0085] In this embodiment, the protrusions 64 are arranged in an alternating (different from each other) configuration. More specifically, the protrusions 64 of adjacent rows 63 in the width direction of the shore platform 33 are offset from each other in the extending direction of the shore platform 33. This offset can also be half the spacing between the protrusions 64 in the extending direction of the shore platform 33. Furthermore, the arrangement of the protrusions 64 is not limited to an alternating configuration; they can also be arranged side by side. In this case, the protrusions 64 of adjacent rows 63 in the width direction of the shore platform 33 are also neatly arranged in the extending direction of the shore platform 33.

[0086] The length L1 of the protrusion 64 (the dimension in the extension direction of the shore portion 33) can be uniform among the protrusions 64. Furthermore, the length L1 of the protrusion 64 can also be longer than the width w4 of the liquid flow path connecting groove 65 (L1>w4). Additionally, the length L1 of the protrusion 64 refers to the maximum dimension measured along the extension direction of the shore portion 33 on the second body surface 31b.

[0087] As shown in Figures 3, 5, and 6, a first body surface side flow path 70 is provided on the first body surface 31a of the capillary structure sheet 30. The first body surface side flow path 70 primarily functions as a liquid storage section for storing the actuating fluid 2b, or allows the actuating vapor 2a to pass through by communicating with the vapor passage 51. This first body surface side flow path 70 constitutes a part of the aforementioned sealed space 3. The first body surface side flow path 70 communicates with the vapor passage 51 and, via the vapor passage 51, with the liquid flow path section 60. In this embodiment, the first body surface side flow path 70 is provided on the first body surface 31a side of both the first shore section 33A and the second shore section 33B. The first body surface side flow path 70 may not be formed on only a portion of the plurality of shore sections 33. The first body surface side flow path 70 may also be referred to as a first body surface side groove.

[0088] As shown in Figure 5, the first body surface side flow path 70 can be disposed on the evaporation region SR side. The first body surface side flow path 70 can be continuously or discontinuously formed from the end of the extension direction of the shore portion 33 on the evaporation region SR side to the end of the other extension direction to a specific position. The first body surface side flow path 70 can also be disposed on the evaporation region SR, and a portion of the first body surface side flow path 70 can extend beyond the outer side of the evaporation region SR. When at least a portion of the first body surface side flow path 70 is disposed on the evaporation region SR, the heat from the receiving device D makes the actuating liquid 2b stored in the first body surface side flow path 70 easily evaporate.

[0089] In this embodiment, a first body surface side flow path 70 is also formed in the first shore portion 33A, and the area where it connects with the extension end of the second steam passage 51B or the third steam passage 51C is called the connection region MR. For example, in FIG5, the connection region MR is surrounded by a circle and exists at the position where the extension end of the second steam passage 51B or the third steam passage 51C connects with the first shore portion 33A. At least in this connection region MR, a first body surface side flow path 70 is formed on the first body surface 31a side of the first shore portion 33A. The first body surface side flow path 70 communicates with the second steam passage 51B or the third steam passage 51C connected to the first shore portion 33A. Thereby, the actuating steam 2a from the second steam passage 51B or the third steam passage 51C flows through the first body surface side flow path 70, crosses the first shore portion 33A, and flows to the first steam passage 51A. Alternatively, the connecting region MR can also be located in the curved portion of the first shore platform 33A when viewed from above. In this case, the vapor resistance of the actuating vapor 2a flowing in the flow path 70 on the first body surface can be reduced in the connecting region MR, making it easier to transfer heat within the surface of the vapor chamber 1.

[0090] As shown in Figure 5, in the first shore section 33A located on the positive side in the Y direction, the first body surface side flow path 70 is continuously formed from the connecting region MR to the evaporation region SR along the first shore section 33A. Also, in the first shore section 33A located on the negative side in the Y direction, the first body surface side flow path 70 is formed in both the connecting region MR and the evaporation region SR, but it is not continuously formed from the connecting region MR to the evaporation region SR. Furthermore, in each of the second shore sections 33B, the first body surface side flow path 70 is continuously formed from the connecting region MR to the evaporation region SR along the second shore section 33B. However, the first body surface side flow path 70 is not formed in the third shore section 33C. However, it is not limited to this; the first body surface side flow path 70 may also be formed in the third shore section 33C.

[0091] As shown in Figure 8, the first body surface side flow path 70 has a plurality of first body surface side main flow channels 71 arranged in parallel with each other, and a plurality of first body surface side connecting channels 75 communicating with the first body surface side main flow channels 71. The first body surface side main flow channels 71 and the first body surface side connecting channels 75 are channels for the passage of actuating liquid 2b or actuating vapor 2a. In the example shown in Figure 8, each shore platform 33 contains 5 first body surface side main flow channels 71, but it is not limited to this. The number of first body surface side main flow channels 71 contained in each shore platform 33 is arbitrary, for example, it can be more than 2 and less than 20.

[0092] As shown in Figure 8, each of the first body surface side main channel grooves 71 is formed by extending along the long side direction (X direction) of the shore platform 33. Multiple first body surface side main channel grooves 71 are arranged parallel to each other. Furthermore, when the shore platform 33 is curved when viewed from above, each first body surface side main channel groove 71 may also extend in a curved manner along the curvature direction of the shore platform 33. That is, each first body surface side main channel groove 71 is not necessarily formed in a straight line, and may also extend in a direction other than parallel to the X direction.

[0093] Each first body surface side main channel 71 is formed within a specific range along the extension direction of the bank platform 33. The first body surface side main channel 71 may have a flow path cross-sectional area that allows the actuating fluid 2b to flow via capillary action. The flow path cross-sectional area of ​​the first body surface side main channel 71 is smaller than that of the vapor passage 51. The flow path cross-sectional area of ​​the first body surface side main channel 71 may be larger than that of the aforementioned liquid flow path main channel 61. The capillary force acting on the actuating fluid 2b within the first body surface side main channel 71 may be less than the capillary force acting on the actuating fluid 2b within the liquid flow path main channel 61. Thus, the first body surface side main channel 71 can introduce the actuating fluid 2b into the first body surface side flow path 70 and ensure the storage amount of the actuating fluid 2b. Each first body surface side main channel 71 may be equally spaced in the width direction (Y direction).

[0094] The first body surface-side mainstream trench 71 is formed by etching from the first body surface 31a of the capillary sheet 30 in the etching step described later. Thus, as shown in Figures 3 and 6, the first body surface-side mainstream trench 71 has a curved wall 72. This wall 72 defines the first body surface-side mainstream trench 71, which curves in a shape that bulges towards the second body surface 31b.

[0095] As shown in Figure 8, the width w6 of the main flow channel 71 on the first body surface side can be greater than the width w3 of the main flow channel 61 of the liquid flow path described above. The width w6 can be, for example, 10 μm or more and 750 μm or less. Furthermore, the width w6 of the main flow channel 71 on the first body surface side refers to the dimension on the first body surface 31a. The width w6 is the length in the direction perpendicular to the long side of the shore portion 33, which is the dimension in the Y direction. Also, as shown in Figure 6, the depth h2 of the main flow channel 71 on the first body surface side can be greater than the depth h1 of the main flow channel 61 of the liquid flow path described above. The depth h2 can be, for example, 5 μm or more and 500 μm or less. The depth h2 corresponds to the dimension in the Z direction.

[0096] As shown in Figure 8, each first body surface-side connecting groove 75 extends in a direction different from the X direction. In this embodiment, each first body surface-side connecting groove 75 is formed extending in the Y direction and is formed perpendicular to the first body surface-side mainstream groove 71. Several first body surface-side connecting grooves 75 connect adjacent first body surface-side mainstream grooves 71 to each other. Other first body surface-side connecting grooves 75 connect the steam flow path 50 (steam passage 51) to the first body surface-side mainstream groove 71. That is, the first body surface-side connecting groove 75 extends from the end side of the shore platform 33 in the Y direction to the first body surface-side mainstream groove 71 adjacent to that end. In this way, the steam passage 51 of the steam flow path 50 is connected to the first body surface-side mainstream groove 71.

[0097] The first body surface side connecting groove 75 may have a flow path cross-sectional area that allows the actuating fluid 2b to flow via capillary action. The flow path cross-sectional area of ​​the first body surface side connecting groove 75 is smaller than that of the vapor passage 51. The flow path cross-sectional area of ​​the first body surface side connecting groove 75 may be larger than that of the aforementioned liquid flow path connecting groove 65. The capillary force acting on the actuating fluid 2b within the first body surface side connecting groove 75 may be less than the capillary force acting on the actuating fluid 2b within the liquid flow path connecting groove 65. In this way, the first body surface side connecting groove 75 can introduce the actuating fluid 2b into the first body surface side flow path 70 and ensure the storage amount of the actuating fluid 2b. Each of the first body surface side connecting grooves 75 may be equally spaced along the long side direction (X direction) of the shore portion 33.

[0098] The first body surface side connecting groove 75, like the first body surface side main channel groove 71, is formed by etching and has a wall surface (not shown) formed in the same curved shape as the first body surface side main channel groove 71. The width w7 of the first body surface side connecting groove 75 may be equal to or different from the width w6 of the first body surface side main channel groove 71. The width w7 corresponds to the dimension in the X direction. The depth of the first body surface side connecting groove 75 may be equal to or different from the depth h2 of the first body surface side main channel groove 71.

[0099] As shown in Figure 8, a row of protrusions 73 is provided between adjacent first body surface side main flow channels 71. Each row of protrusions 73 includes a plurality of protrusions 74 arranged along the long side direction (X direction) of the shore platform 33. The protrusions 74 are disposed within the first body surface side flow path 70. The protrusions 74 protrude from the first body surface side main flow channels 71 and the first body surface side connecting channels 75 and abut against the lower sheet 10. Each protrusion 74 is formed in a rectangular shape with the X direction as the long side direction when viewed from above. The first body surface side main flow channels 71 are interposed between adjacent protrusions 74 in the Y direction. The first body surface side connecting channels 75 are interposed between adjacent protrusions 74 in the X direction. The first body surface side connecting channels 75 extend in the width direction of the shore platform 33, connecting the adjacent first body surface side main flow channels 71 in the width direction to each other. In this way, the actuating fluid 2b or actuating vapor 2a can travel back and forth between the main channel grooves 71 on the first body surface side.

[0100] The protrusion 74 is the portion of the capillary sheet 30 that was not etched during the etching step described later. In this embodiment, as shown in FIG8, the planar shape of the protrusion 74 is rectangular. The planar shape of the protrusion 74 corresponds to the planar shape at the position of the first body surface 31a.

[0101] In this embodiment, the protrusions 74 are arranged in an alternating pattern. More specifically, the protrusions 74 of adjacent rows 73 are offset from each other in the X direction. This offset can be half the spacing between the protrusions 74 in the X direction. The width w8 of the protrusions 74 can be, for example, 10 μm or more and 100 μm or less. The width w8 of the protrusions 74 refers to the dimension on the first body surface 31a. The width w8 is equivalent to the dimension in the width direction of the shore portion 33. Furthermore, the protrusions 74 are not limited to an alternating pattern, but can also be arranged side by side. In this case, the protrusions 74 of adjacent rows 73 in the width direction of the shore portion 33 are also neatly arranged in the X direction. In addition, the width w6 of the main flow channel 71 on the first body surface side can be greater than the width w3 of the main flow channel 61 of the liquid flow path. Also, the width w6 of the main flow channel 71 on the first body surface side can be smaller than the width w2 of the vapor passage 51.

[0102] The length L2 (dimension in the X direction) of the protrusion 74 can be uniform among the protrusions 74. Furthermore, the length L2 of the protrusion 74 can be longer than the width w7 of the connecting groove 75 on the first body surface (L2>w7). Additionally, the length L2 of the protrusion 74 refers to the maximum dimension in the X direction on the first body surface 31a.

[0103] Additionally, the number of main flow channels 71 provided on the first body surface side of the shore section 33 may be less than the number of main flow channels 61 provided on the liquid flow path of the shore section 33.

[0104] Figure 9 is an enlarged bottom view of the periphery of the connecting region MR of the capillary sheet 30 (enlarged view of part VIII in Figure 5). As shown in Figure 9, the extension end (positive end in the X direction) of the second vapor passage 51B is connected to the first shore portion 33A, forming the connecting region MR in this area. The second shore portions 33B are respectively arranged on both sides of the width direction (Y direction) of the second vapor passage 51B. The second vapor passage 51B and the second shore portions 33B are arranged parallel to each other. Furthermore, on the opposite side of the connecting region MR from the extension end (positive end in the X direction) of the second vapor passage 51B, there exists a vapor passage different from the second vapor passage 51B, namely the first vapor passage 51A. That is, the first vapor passage 51A is located opposite to the first shore portion 33A, opposite to the second vapor passage 51B. The first vapor passage 51A and the first shore portion 33A are arranged parallel to each other.

[0105] At least in each connecting region MR of the first shore section 33A, a first body surface side flow path 70 communicating with the second steam passage 51B is formed. In this case, the first body surface side flow path 70 is formed not only in the connecting region MR, but also in the region surrounding the connecting region MR of the first shore section 33A. Furthermore, the first body surface side flow path 70 is also continuously formed in the second shore section 33B that connects to the first shore section 33A around the connecting region MR. Moreover, in the connecting region MR, the first shore section 33A and the second steam passage 51B do not intersect perpendicularly when viewed from above. That is, the angle θ shown in FIG9 is an acute angle or an obtuse angle. In this way, the actuating steam 2a from the second steam passage 51B can easily flow along the extension direction of the first shore section 33A, so that the actuating steam 2a covers a large area of ​​the steam chamber 1.

[0106] As shown in Figure 9, the first body surface side flow path 70 of the first shore platform 33A has a plurality of protrusions 74 arranged in an alternating pattern. A first body surface side main flow groove 71 and a first body surface side connecting groove 75 are formed between each protrusion 74. Thus, the second steam passage 51B and the first steam passage 51A are interconnected via the first body surface side flow path 70 of the first shore platform 33A. Therefore, the actuating steam 2a from the second steam passage 51B can flow to the first steam passage 51A side via the first body surface side flow path 70 of the first shore platform 33A.

[0107] Furthermore, a first body surface side flow path 70 is formed on the second shore section 33B around the connecting region MR. Here, actuating vapor 2a from the second steam passage 51B flows from the first body surface side flow path 70 of the second shore section 33B through the first body surface side flow path 70 of the first shore section 33A to the first steam passage 51A side. Therefore, actuating vapor 2a from the second steam passage 51B can easily flow to the first steam passage 51A adjacent to the first shore section 33A. Additionally, the protrusion 74 of the first shore section 33A and the protrusion 74 of the second shore section 33B can be separated from each other, or the protrusion 74 of the first shore section 33A and the protrusion 74 of the second shore section 33B can be integrated together.

[0108] However, the materials constituting the lower sheet 10, upper sheet 20, and capillary sheet 30 are not particularly limited as long as they have good thermal conductivity. However, the lower sheet 10, upper sheet 20, and capillary sheet 30 may, for example, contain copper or copper alloys. In this case, the thermal conductivity of each sheet 10, 20, and 30 can be increased, thereby improving the heat dissipation efficiency of the vapor chamber 1. Furthermore, when pure water is used as the actuating fluid 2a and 2b, corrosion can be prevented. Additionally, as long as the desired heat dissipation efficiency and corrosion prevention are achieved, other metallic materials such as aluminum or titanium, or other metallic alloy materials such as stainless steel, can also be used for these sheets 10, 20, and 30.

[0109] Furthermore, the thickness t1 of the vapor chamber 1 shown in Figure 3 can be, for example, 100 μm or more and 2000 μm. By setting the thickness t1 to 100 μm or more, the vapor flow path 50 is properly ensured, and the vapor chamber 1 can function properly. On the other hand, by setting the thickness t1 to 2000 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming too thick.

[0110] The thickness t2 of the lower sheet 10 can be, for example, 5 μm or more and 500 μm or less. By setting the thickness t2 to 5 μm or more, the mechanical strength of the lower sheet 10 can be ensured. On the other hand, by setting the thickness t2 to 500 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming too thick. Similarly, the thickness t3 of the upper sheet 20 can be set in the same way as the thickness t2 of the lower sheet 10. The thickness t3 of the upper sheet 20 can also be different from the thickness t2 of the lower sheet 10.

[0111] The thickness t4 of the capillary sheet 30 can be, for example, 50 μm or more and 1000 μm or less. By setting the thickness t4 to 50 μm or more, the vapor flow path 50 is properly ensured, and the vapor chamber 1 can operate properly. On the other hand, by setting the thickness t4 to 1000 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming thicker.

[0112] Next, the manufacturing method of the vapor chamber 1 in this embodiment, which includes this configuration, will be described using Figures 10(a)-(c). Figures 10(a)-(c) show cross-sections that are substantially the same as the cross-sectional view in Figure 3.

[0113] Here, we will first explain the manufacturing steps of the capillary sheet 30.

[0114] First, as shown in Figure 10(a), as a preparatory step, a flat metal sheet M containing a first material surface Ma and a second material surface Mb is prepared.

[0115] After the preparation step, as shown in FIG10(b), the metal material sheet M is etched from the first material surface Ma and the second material surface Mb to form the vapor flow path 50, the liquid flow path 60 and the first body surface side flow path 70.

[0116] More specifically, a patterned resist film (not shown) is formed on the first material surface Ma and the second material surface Mb of the metal sheet M using photolithography. Then, the first material surface Ma and the second material surface Mb of the metal sheet M are etched through openings in the patterned resist film. In this way, the first material surface Ma and the second material surface Mb of the metal sheet M are etched into a pattern, forming the vapor flow path 50, the liquid flow path 60, and the first body surface side flow path 70 as shown in FIG10(b). Furthermore, the etching solution can be, for example, a ferric chloride-based etching solution such as an aqueous solution of ferric chloride, or a copper chloride-based etching solution such as an aqueous solution of copper chloride.

[0117] The first material surface Ma and the second material surface Mb of the metal material sheet M can be etched simultaneously. However, this is not the only possibility; the etching of the first material surface Ma and the second material surface Mb can also be performed in separate steps. Furthermore, the vapor flow path 50, the liquid flow path 60, and the first body surface side flow path 70 can be formed simultaneously by etching, or they can be formed in separate steps. Moreover, in the etching step, by etching the first material surface Ma and the second material surface Mb of the metal material sheet M, a specific external contour shape as shown in Figures 4 and 5 can be obtained. That is, the end edge of the capillary structure sheet 30 is formed.

[0118] Thus, the capillary sheet 30 of this embodiment can be obtained.

[0119] Following the step of fabricating the capillary sheet 30, as a joining step, as shown in FIG10(c), the lower sheet 10, the upper sheet 20, and the capillary sheet 30 are joined together. Furthermore, the lower sheet 10 and the upper sheet 20 can be formed from rolled materials of desired thickness.

[0120] More specifically, firstly, the lower sheet 10, the capillary sheet 30, and the upper sheet 20 are laminated sequentially. In this case, the first body surface 31a of the capillary sheet 30 is aligned with the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface 20a of the upper sheet 20 is aligned with the second body surface 31b of the capillary sheet 30.

[0121] Next, the lower sheet 10, the capillary sheet 30, and the upper sheet 20 are temporarily fixed. For example, spot resistance welding can be performed to temporarily fix the sheets 10, 20, and 30, or laser welding can be used to temporarily fix the sheets 10, 20, and 30.

[0122] Next, the lower sheet 10, capillary sheet 30, and upper sheet 20 are permanently bonded by diffusion bonding. Diffusion bonding is performed as follows: First, the lower sheet 10 to be bonded is brought into close contact with the capillary sheet 30, and the capillary sheet 30 is brought into close contact with the upper sheet 20. Next, the lower sheet 10, capillary sheet 30, and upper sheet 20 are pressurized and heated in a controlled atmosphere such as a vacuum or inert gas in the lamination direction, and bonding is achieved by diffusion of atoms generated at the bonding surfaces. Diffusion bonding heats the materials of each sheet 10, 20, and 30 to a temperature close to their melting point, but because it is below the melting point, melting and deformation of each sheet 10, 20, and 30 can be avoided. More specifically, the first body surface 31a of the frame portion 32 and each shore portion 33 of the capillary sheet 30 is diffusely bonded to the second lower sheet surface 10b of the lower sheet 10. Furthermore, the second body surface 31b of the frame portion 32 and each shore portion 33 of the capillary sheet 30 is diffusely bonded to the first upper sheet surface 20a of the upper sheet 20. Thus, by diffusely bonding the sheets 10, 20, and 30, a sealed space 3 is formed between the lower sheet 10 and the upper sheet 20, comprising a vapor flow path 50, a liquid flow path 60, and a first body surface side flow path 70.

[0123] After the joining step, the actuating fluid 2b is injected into the sealed space 3 by the injection unit 4.

[0124] Subsequently, the injection flow path 37 is sealed. For example, the injection section 4 can be partially melted to seal the injection flow path 37. In this way, the communication between the sealed space 3 and the outside is cut off, and the actuating fluid 2b is sealed into the sealed space 3 to prevent the actuating fluid 2b in the sealed space 3 from leaking to the outside.

[0125] As described above, the vapor chamber 1 of this embodiment can be obtained.

[0126] Next, the operation method of the vapor chamber 1, i.e. the cooling method of device D, will be explained.

[0127] The vapor chamber 1 obtained as described above is disposed within the casing H of an electronic device E, such as a mobile terminal. Furthermore, a device to be cooled, such as a CPU, is mounted on the second upper sheet surface 20b of the upper sheet 20 (or the vapor chamber 1 is mounted on the device D). The actuating fluid 2b within the sealed space 3 adheres to the walls of the sealed space 3 due to its surface tension, namely the first wall surface 53a and the second wall surface 54a of the vapor passage 51, the wall surface 62 of the main flow channel groove 61 of the liquid flow path 60, and the wall surface of the liquid flow path connecting groove 65. Furthermore, the actuating fluid 2b may also adhere to the portion of the lower sheet 10's second lower sheet surface 10b exposed in the vapor passage 51. Moreover, the actuating fluid 2b may also adhere to the portion of the upper sheet 20's first upper sheet surface 20a exposed in the vapor passage 51, the main flow channel groove 61, and the liquid flow path connecting groove 65.

[0128] If device D heats up in this state, the actuating fluid 2b in the evaporation region SR (see Figures 4 and 5) receives heat from device D. The received heat is absorbed as latent heat, and the actuating fluid 2b evaporates (vaporizes), generating actuating vapor 2a. Most of the generated actuating vapor 2a diffuses within the vapor passages 51 that constitute the sealed space 3 (see the solid arrows in Figure 4). The actuating vapor 2a in each vapor passage 51 leaves the evaporation region SR, and most of the actuating vapor 2a is transported to the relatively cooler condensation region CR (see the right side of Figures 4 and 5). In the condensation region CR, the actuating vapor 2a is cooled mainly by dissipating heat towards the lower sheet 10. The heat received by the lower sheet 10 from the actuating vapor 2a is transferred to the outside air via the outer casing member Ha (see Figure 3).

[0129] In this embodiment, the first vapor passage 51A of the plurality of vapor passages 51 extends directly from the evaporation region SR to the condensation region CR. Therefore, the actuating vapor 2a passing through the first vapor passage 51A directly reaches the condensation region CR. On the other hand, the second vapor passage 51B extends from the evaporation region SR, and its extending end connects to the first shore portion 33A. Therefore, the actuating vapor 2a passing through the second vapor passage 51B is blocked by the first shore portion 33A and is not directly transported to the condensation region CR. In this embodiment, a first body surface side flow path 70 communicating with the second vapor passage 51B is formed in the connection region MR on the first body surface 31a side of the first shore portion 33A, which connects to the extending end of the second vapor passage 51B. In this way, the actuating vapor 2a from the second vapor passage 51B flows through the first body surface side flow path 70, crosses the first shore portion 33A, and flows to the first vapor passage 51A located on the opposite side of the second vapor passage 51B. Then, the actuating vapor 2a reaches the condensation region CR through the first vapor passage 51A. Alternatively, a portion of the actuating vapor 2a crosses the first body surface side flow path 70 formed in another first shore portion 33A and flows to the third vapor passage 51C. Then, the actuating vapor 2a reaches the condensation region CR through the third vapor passage 51C.

[0130] The actuating vapor 2a dissipates heat towards the lower sheet 10 in the condensation zone CR, loses the latent heat absorbed in the evaporation zone SR, and condenses to produce actuating liquid 2b. The produced actuating liquid 2b adheres to the first wall surface 53a and the second wall surface 54a of each vapor passage 51, the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface 20a of the upper sheet 20. Here, the actuating liquid 2b continues to evaporate in the evaporation zone SR. Therefore, the actuating liquid 2b in the area outside the evaporation zone SR (i.e., the condensation zone CR) of the liquid flow path 60 is transported to the evaporation zone SR by the capillary action of the main flow channel 61 of each liquid flow path (see the dashed arrow in Figure 4). In this way, the actuating fluid 2b attached to each vapor passage 51, the second lower sheet surface 10b, and the first upper sheet surface 20a moves to the liquid flow path section 60 and enters the main flow path groove 61 through the liquid flow path connecting groove 65. Thus, the actuating fluid 2b fills each main flow path groove 61 and each liquid flow path connecting groove 65. Therefore, the filled actuating fluid 2b, through the capillary action of each main flow path groove 61, gains propulsion towards the evaporation zone SR and is smoothly transported to the evaporation zone SR.

[0131] In the liquid flow path section 60, each main flow channel 61 is connected to adjacent main flow channels 61 via a corresponding connecting channel 65. This allows the actuating fluid 2b to travel back and forth between the adjacent main flow channels 61, preventing the main flow channels 61 from drying out. Therefore, a capillary effect is applied to the actuating fluid 2b within each main flow channel 61, allowing the actuating fluid 2b to be smoothly transported to the evaporation zone SR.

[0132] The actuating fluid 2b, upon reaching the evaporation zone SR, receives heat again from the device D and evaporates. The actuating vapor 2a, evaporated from the actuating fluid 2b, moves through the liquid flow path connecting groove 65 within the evaporation zone SR to the vapor passage 51 with a larger flow path cross-sectional area, and diffuses within each vapor passage 51. In this way, the actuating fluids 2a and 2b undergo phase change, i.e., repeated evaporation and condensation, while simultaneously flowing back within the sealed space 3, transporting and releasing heat from the device D. As a result, the device D is cooled.

[0133] Furthermore, a portion of the actuating fluid 2b condensed in the condensation region CR is not only transported to the liquid flow path 60, but also to the first body surface side flow path 70, filling the first body surface side flow path 70. As described above, a portion of the first body surface side flow path 70 is disposed in the evaporation region SR. Therefore, the actuating fluid 2b filled in the first body surface side flow path 70 gains propulsion through the capillary action of the first body surface side flow path 70 and moves to the evaporation region SR. The actuating fluid 2b that reaches the evaporation region SR through the first body surface side flow path 70 receives heat again from the device D and evaporates, and diffuses again in each vapor passage 51.

[0134] During the period when device D stops heating, the actuating fluid 2b in the evaporation zone SR does not evaporate, but fills and remains in the liquid flow path 60. Therefore, the actuating fluid 2b in the condensation zone CR is not transported to the evaporation zone SR and remains there. A portion of the actuating fluid 2b in the liquid flow path 60 flows through the vapor passage 51 and moves into the first body surface side flow path 70. In this way, the actuating fluid 2b fills and remains in the first body surface side flow path 70. When the amount of actuating fluid 2b sealed into the sealing space 3 is greater than the total volume of the space in the liquid flow path 60, a portion of the actuating fluid 2b easily fills the first body surface side flow path 70. Therefore, the actuating fluid 2b can be dispersed and retained not only in the liquid flow path 60, but also in the first body surface side flow path 70.

[0135] In this state, when the electronic device E equipped with the vapor chamber 1 is placed in a temperature environment below the freezing point of the actuating liquids 2a and 2b, even if the actuating liquid 2b in the liquid flow path 60 freezes and expands, the expansion force of the actuating fluids 2a and 2b is weakened. This suppresses deformation of the upper sheet 20 due to the expansion force. Therefore, the flatness reduction of the second upper sheet surface 20b of the upper sheet 20 of the mounting device D can be suppressed, and the formation of a gap between the second upper sheet surface 20b and the device D can be suppressed. In this case, heat conduction from the device D can be prevented from being obstructed, and the performance degradation of the vapor chamber 1 can be suppressed. Similarly, even if the actuating liquid 2b in the first body surface side flow path 70 freezes and expands, the expansion force is weakened. This suppresses deformation of the lower sheet 10 due to the expansion force. Therefore, the flatness reduction of the first lower sheet surface 10a of the lower sheet 10 can be suppressed.

[0136] Thus, according to this embodiment, the extending end of the second steam passage 51B is connected to at least the first shore portion 33A among the plurality of shore portions 33. Furthermore, a first body surface side flow path 70 communicating with the second steam passage 51B is formed in the connection region MR on the first body surface 31a side of the first shore portion 33A, which is connected to the extending end of the second steam passage 51B. This allows the actuating steam 2a transported from the evaporation region SR side via the second steam passage 51B to be sent to other first steam passages 51A via the first body surface side flow path 70. Therefore, the actuating steam 2a can be transported in a direction away from the evaporation region SR, reducing the area in the steam chamber 1 where heat is difficult to transfer. Furthermore, since a larger area of ​​the steam chamber 1 can be used for heat transfer, heat from the heat source can be uniformly distributed throughout the surface of the steam chamber 1. As a result, the actuating fluids 2a and 2b can be promoted to circulate back within the sealed space 3, thereby improving the heat uniformity of the steam chamber 1.

[0137] Furthermore, according to this embodiment, the first body surface side flow path 70 is continuously formed along the first shore portion 33A to the evaporation zone SR. Therefore, the first body surface side flow path 70 can be used as a liquid flow path for transporting the actuating fluid 2b to the evaporation zone SR. As a result, the recirculation of the actuating fluids 2a and 2b within the sealed space 3 can be promoted.

[0138] Furthermore, according to this embodiment, the first body surface side flow path 70 is also formed on the second shore portion 33B extending along the second steam passage 51B. In this case, the actuating steam 2a transported from the evaporation zone SR side via the second steam passage 51B can be sent to the first body surface side flow path 70 of the first shore portion 33A via the first body surface side flow path 70 of the second shore portion 33B. In this way, a larger area of ​​the steam chamber 1 can be used for heat transfer, so that the heat from the heat source can be uniformly distributed throughout the surface of the steam chamber 1.

[0139] (Example of variation) Next, referring to Figures 11 to 18, various variations of the first embodiment will be described. Figures 11 to 18 are enlarged bottom views showing a portion of the capillary sheet 30 in the variations. In Figures 11 to 18, the same symbols are used to mark the parts with the same shape as those shown in Figures 1 to 10, and detailed descriptions are omitted.

[0140] (Example of the first variation) As shown in Figure 11, the first body surface side flow path 70 may not be formed on each of the second shore portions 33B located on both sides of the width direction of the second steam passage 51B. The first body surface side flow path 70 may also not cover the entire area of ​​the second shore portion 33B. Alternatively, the first body surface side flow path 70 may be formed on the evaporation region SR side of the second shore portion 33B, but not on the connecting region MR side of the second shore portion 33B. In this case, the actuating vapor 2a from the second steam passage 51B can be concentrated and flow along the extension direction (positive side of the X direction) of the second steam passage 51B, transporting more actuating vapor 2a towards the extension direction side (positive side of the X direction) of the second steam passage 51B.

[0141] (Second variation example) As shown in Figure 12, the first shore platform 33A and the second steam passage 51B can also be orthogonal when viewed from above in the connecting region MR. That is, the angle θ in Figure 12 can also be 90°. In this case, the actuating steam 2a from the second steam passage 51B crosses perpendicularly to the extension direction of the first shore platform 33A, so the distance of the actuating steam 2a through the first shore platform 33A is minimized. In this way, the steam resistance of the actuating steam 2a crossing the first shore platform 33A can be minimized.

[0142] (Example 3) As shown in Figure 13, two second shore sections 33B can also merge and connect to the fourth shore section 33D. At this merging point, the extending end of the second vapor passage 51B connects to the fourth shore section 33D. Furthermore, on the first body surface 31a side of the fourth shore section 33D, a connection region MR connecting to the extending end of the second vapor passage 51B is formed, creating a first body surface side flow path 70 communicating with the second vapor passage 51B. One end (negative end in the X direction) of the extending direction of the fourth shore section 33D connects to the two second shore sections 33B, while the other end (positive end in the X direction) exists in the condensation region CR, which extends outward from the evaporation region SR in the surface direction. In this case, the second vapor passage 51B has a shape where its width (distance in the Y direction) gradually narrows towards the connection region MR located at the extending end of the second vapor passage 51B.

[0143] According to this variation, the actuating steam 2a from the second steam passage 51B can branch near the connecting region MR and flow to the steam passages 51 located on both sides of the width direction (Y direction) of the fourth shore section 33D. This allows the actuating steam 2a to spread throughout a larger area of ​​the steam chamber 1. Furthermore, three or more second shore sections 33B can also merge and connect to the fourth shore section 33D.

[0144] (Example 4) As shown in Figure 14, the portion of the second shore section 33B located on the connecting region MR side may be bent or flexed and connected to the first shore section 33A. In this case, the extending end of the second steam passage 51B is connected to the first shore section 33A. On the first body surface 31a side of the first shore section 33A, the connecting region MR that is connected to the extending end of the second steam passage 51B forms a first body surface side flow path 70 that communicates with the second steam passage 51B. The second steam passage 51B has a shape in which the width (distance in the Y direction) gradually narrows toward the connecting region MR located at the extending end of the second steam passage 51B.

[0145] According to this variation, the actuating steam 2a from the second steam passage 51B can be branched near the connecting region MR and flow to the steam passages 51 located on both sides of the width direction (Y direction) of the first shore platform 33A. In this way, the actuating steam 2a can be distributed throughout a larger area of ​​the steam chamber 1.

[0146] (5th variation example) Figures 15 to 18 show the fifth variation. Among them, Figures 15 to 17 are enlarged bottom views of the periphery of the connecting region MR of the capillary sheet 30 in this variation.

[0147] As shown in Figures 15 to 17, a first body surface side flow path 70A is formed in the connection region MR on the first body surface 31a side of the first shore portion 33A, which connects to the extension end of the third vapor passage 51C. The first body surface side flow path 70A communicates with both the first vapor passage 51A and the third vapor passage 51C. The connection region MR is thinned from the first body surface 31a side. In this case, the thickness of at least the portion of the first shore portion 33A where the first body surface side flow path 70A is formed is thinner than the overall thickness of the capillary sheet 30.

[0148] Additionally, in Figures 15 to 17, gray represents the portions of shore sections 33A and 33C that are thinned from the first body surface 31a side and form the first body surface side flow path 70A. Also, in Figures 15 to 17, white represents the portions of shore sections 33A and 33C that are not thinned from the first body surface 31a side and where the first body surface side flow paths 70 and 70A are not formed.

[0149] As shown in Figure 15, a first body surface side flow path 70A is formed in the connection region MR that connects to the end of the third steam passage 51C in the extension direction, and communicates with the first steam passage 51A and the third steam passage 51C. The portion of the first shore platform 33A adjacent to the connection region MR is not thinned from the side of the first body surface 31a, and neither the first body surface side flow path 70 nor 70A is formed.

[0150] In this case, when the steam chamber 1 stops, the actuating fluid 2b can be stored in the first body surface side flow path 70A. Also, when the steam chamber 1 is in operation, the actuating steam 2a can easily flow through the first body surface side flow path 70A into the third steam passage 51C.

[0151] As shown in Figure 16(a), a first body surface side flow path 70A is formed in the connection region MR that connects to the end of the third steam passage 51C in the extending direction, communicating with the first steam passage 51A and the third steam passage 51C. Furthermore, the first body surface side flow path 70A is also formed in the connection portion between the first shore platform 33A and the third shore platform 33C, and in the connection portion between the third shore platform 33C and the first shore platform 33A.

[0152] In this situation, when the steam chamber 1 stops, more actuating fluid 2b can be stored in the first body surface side flow path 70A. Furthermore, when the steam chamber 1 operates, the area through which the actuating steam 2a can pass can be expanded. Moreover, the flow direction of the actuating steam 2a can be controlled.

[0153] As shown in Figure 16(b), a first body surface side flow path 70A is formed in the connection region MR that connects to the end of the third steam passage 51C in the extending direction, communicating with the first steam passage 51A and the third steam passage 51C. The first body surface side flow path 70A is also formed in the connection portion between the first shore portion 33A and the third shore portion 33C, and in the connection portion between the third shore portion 33C and the first shore portion 33A. Furthermore, a first body surface side flow path 70 that is not thinned from the first body surface 31a side is formed in the third shore portion 33C at a position adjacent to the first body surface side flow path 70A.

[0154] In this case, it is particularly preferable to position the first body surface side flow path 70 of the third shore platform 33C close to the condensation region CR. In this way, the first body surface side flow path 70 can draw in the actuating liquid 2b present in the third vapor passage 51C, and make it easy for the actuating liquid 2b to flow into the adjacent first body surface side flow path 70A.

[0155] As shown in Figure 17(a), a first body surface side flow path 70A is formed in the connection region MR, which connects to the end of the third vapor passage 51C in the extending direction, and communicates with the first vapor passage 51A and the third vapor passage 51C. Furthermore, the first body surface side flow path 70A is also formed in the portion of the first shore section 33A that is farther from the evaporation region SR than the connection region MR. Moreover, in the portion of the first shore section 33A that is closer to the evaporation region SR than the connection region MR, a first body surface side flow path 70 that is not thinned from the first body surface 31a side is formed. Additionally, the first body surface side flow path 70 of the first shore section 33A extends continuously to the evaporation region SR. Furthermore, the first body surface side flow path 70 is also formed in the third shore section 33C.

[0156] In this case, the first body surface side flow path 70 of the first shore section 33A can be used as a liquid flow path to transport the actuating liquid 2b to the evaporation zone SR. Furthermore, it is easy to transport the actuating liquid 2b stored in the first body surface side flow path 70A to the evaporation zone SR using the first body surface side flow path 70.

[0157] As shown in Figure 17(b), a first body surface side flow path 70A is formed in the connection region MR, which connects to the end of the third vapor passage 51C in the extension direction, and communicates with the first vapor passage 51A and the third vapor passage 51C. In the first shore portion 33A, the portion farther from the evaporation region SR than the connection region MR is not thinned from the first body surface 31a side, and neither the first body surface side flow path 70 nor 70A is formed there. Furthermore, in the portion of the first shore portion 33A closer to the evaporation region SR than the connection region MR, a first body surface side flow path 70 is formed that is not thinned from the first body surface 31a side. Additionally, the first body surface side flow path 70 of the first shore portion 33A extends continuously to the evaporation region SR. Moreover, the first body surface side flow path 70 is also formed in the third shore portion 33C.

[0158] In this case, since the portion of the first shore platform 33A adjacent to the connecting region MR is not thinned from the first body surface 31a side, the deformation of the connecting region MR in the thickness direction can be suppressed.

[0159] Additionally, although not shown in Figures 15 to 17, the first body surface side flow path 70A can also be formed in the connection area MR that connects to the extension direction end of the second vapor passage 51B.

[0160] Figures 18(a)-(c) show cross-sections of the connecting region MR of the first shore platform 33A (cross-sections along lines XVIII-XVIII in Figures 15 to 17). The connecting region MR of the first shore platform 33A shown in Figures 15 to 17 may have any of the cross-sectional shapes shown in Figures 18(a)-(c).

[0161] As shown in Figure 18(a), the first body surface side flow path 70A may have a plurality of first body surface side main flow channels 71A and a plurality of protrusion rows 73A. The plurality of first body surface side main flow channels 71A are arranged in parallel with each other. Each protrusion row 73A is disposed between adjacent first body surface side main flow channels 71A. Each protrusion row 73A includes a plurality of protrusions 74A arranged along the long side direction of the first shore portion 33A. The protrusions 74A are located on the side of the second body surface 31b closer to the first body surface 31a, and are separated from the lower sheet 10. Alternatively, the protrusions 74A may also be arranged in an alternating manner when viewed from above. Alternatively, each protrusion row 73A may include one protrusion 74A, and the protrusion 74A may extend linearly along the long side direction of the first shore portion 33A.

[0162] In this situation, since the protrusion 74A of the first body surface side flow path 70A is separated from the first body surface 31a, the space between the first shore portion 33A and the lower sheet 10 becomes larger. This allows more actuating fluid 2b to be stored in the first body surface side flow path 70A. Furthermore, when the vapor chamber 1 operates, the actuating vapor 2a can be distributed throughout a larger area of ​​the vapor chamber 1.

[0163] In Figure 18(a), the main channel groove 71A and the protrusion 73A on the first body surface can extend in the flow direction of the actuating vapor 2a (the direction of the arrow in Figure 18(a)). In this case, since the flow of the actuating vapor 2a transported from the first vapor passage 51A is less turbulent, the actuating vapor 2a can be delivered to the third vapor passage 51C more efficiently and effectively. In this way, the heat from the evaporation region SR can be uniformly distributed throughout the surface of the vapor chamber 1.

[0164] As shown in Figure 18(b), the first body surface side flow path 70A may have a first body surface side main flow groove 71A and a pair of protrusions 74A located at both ends of the first body surface side main flow groove 71A in the width direction. Each protrusion 74A is located closer to the second body surface 31b than the first body surface 31a. That is, the protrusions 74A are separate from the lower sheet 10. In this case, more actuating fluid 2b can be stored in the first body surface side flow path 70A.

[0165] As shown in Figure 18(c), the first body surface side flow path 70A may have a flat surface 70s. The flat surface 70s is located closer to the second body surface 31b than the first body surface 31a. That is, the flat surface 70s is separate from the lower sheet 10. In this case, the actuating steam 2a can be delivered to the third steam passage 51C with better efficiency.

[0166] (Second Implementation) Next, referring to Figures 19 to 36, the second embodiment will be described. Figures 19 to 36 show the second embodiment. In Figures 19 to 36, the same symbols are used for the parts that are the same as those in the first embodiment shown in Figures 1 to 18, and detailed descriptions are omitted.

[0167] Using Figures 19 to 26, the vapor chamber, the capillary sheet for the vapor chamber, and the electronic device of this embodiment will be described. The vapor chamber 1 of this embodiment is a device mounted on the electronic device E to cool the devices D1 and D2, which serve as heat sources (heat-generating elements) housed in the electronic device E. Devices D1 and D2 may also be the same as those described above.

[0168] As shown in Figure 19, an electronic device E (e.g., a tablet terminal) includes a housing H, a plurality of devices D1 and D2 (in this case, two) housed within the housing H, and a vapor chamber 1. The vapor chamber 1 is housed within the housing H and is arranged in thermal contact with devices D1 and D2. Thus, when the electronic device E is used, the vapor chamber 1 can receive heat generated in devices D1 and D2. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via actuating fluids 2a and 2b, described later. This effectively cools devices D1 and D2. When the electronic device E is a tablet terminal, devices D1 and D2 correspond to a central processing unit, etc. In this embodiment, device D1 corresponds to the first heat source, and device D2 corresponds to the second heat source.

[0169] Next, the vapor chamber 1 of this embodiment will be described. As shown in Figures 20 and 21, the vapor chamber 1 includes a lower sheet 10 (first sheet), an upper sheet 20 (second sheet), and a capillary structure sheet for the vapor chamber (hereinafter simply referred to as capillary structure sheet 30). The capillary structure sheet 30 is disposed between the lower sheet 10 and the upper sheet 20.

[0170] As shown in Figure 20, the capillary sheet 30 is provided with regions for the evaporation of the actuating fluids 2a and 2b, namely the first heat source region SR1 and the second heat source region SR2 (hereinafter also referred to as heat source regions SR1 and SR2), and regions for the condensation of the actuating fluids 2a and 2b, namely the condensation region CR.

[0171] The first heat source region SR1 is the area that overlaps with the first heat source, i.e., device D1, when viewed from above, and is the area for mounting device D1. The second heat source region SR2 is the area that overlaps with the second heat source, i.e., device D2, when viewed from above, and is the area for mounting device D2. Heat source regions SR1 and SR2 can be arranged anywhere in the vapor chamber 1. In this embodiment, heat source regions SR1 and SR2 are formed with a gap between them in the X direction. Heat from devices D1 and D2 is transferred to evaporation regions SR1 and SR2, respectively, and the liquid actuating fluid (appropriately referred to as actuating fluid 2b) evaporates in heat source regions SR1 and SR2 by means of this heat. Therefore, heat source regions SR1 and SR2 constitute evaporation regions for the evaporation of actuating fluids 2a and 2b. Heat from devices D1 and D2 can be transferred not only to the area that overlaps with devices D1 and D2 when viewed from above, but also to the periphery of that area. Here, the top view is the view taken from a direction orthogonal to the surfaces of the vapor cavity 1 from which heat is received (the second upper sheet surface 20b of the upper sheet 20) and the surfaces from which the received heat is released (the first lower sheet surface 10a of the lower sheet 10). That is, the top view, for example as shown in Figure 20, is equivalent to the view of the vapor cavity 1 from above or from below.

[0172] The condensation region CR is the area that does not coincide with devices D1 and D2 when viewed from above, and it is the main area where the actuating vapor 2a releases heat and condenses. The condensation region CR can also be described as the area existing within the surface of the vapor chamber 1, separate from the heat source regions SR1 and SR2. In the condensation region CR, the heat from the actuating vapor 2a is released to the upper sheet 10, and the actuating vapor 2a is cooled and condensed in the condensation region CR.

[0173] As shown in Figure 21, the capillary sheet 30 includes a vapor flow path 50 and a liquid flow path 60 disposed adjacent to the vapor flow path 50. Furthermore, the capillary sheet 30 has a first body surface 31a and a second body surface 31b located on the opposite side of the first body surface 31a. The first body surface 31a is disposed on the side of the lower sheet 10, and the second body surface 31b is disposed on the side of the upper sheet 20.

[0174] In this embodiment, the shore section 33 extends in a slender shape when viewed from above. The planar shape of the shore section 33 can be any shape, such as a slender rectangle, an arc, a U-shaped or S-shaped curve, a V-shaped or L-shaped flexible line, etc. In Figures 22 and 23, the plurality of shore sections 33 include those that extend in a straight line, those that are L-shaped, and those that are U-shaped when viewed from above. Furthermore, each shore section 33 can also be arranged separately from other shore sections 33 in the width direction. This configuration allows the actuating vapor 2a to flow around each shore section 33 and be transported to the condensation region CR. This suppresses the obstruction of the flow of the actuating vapor 2a. The width w1 of the shore section 33 (refer to Figure 21) can be, for example, 30 μm or more and 3000 μm or less. Here, the width w1 of the shore section 33 refers to the dimension of the shore section 33 in the direction orthogonal to the extension direction of the shore section 33 (width direction), and is the dimension at the thickest position of the shore section 33 (for example, the position where the protrusion 55 exists).

[0175] As shown in Figures 22 and 23, in this embodiment, the plurality of steam passages 51 include connecting steam passages 51F, individual steam passages 51G, and branch steam passages 51H. Connecting steam passages 51F, individual steam passages 51G, and branch steam passages 51H are all flow paths for the passage of actuating steam 2a, formed between the plurality of shore sections 33 or between the frame section 32 and the shore section 33. The basic configurations, such as the cross-sectional shape, of connecting steam passages 51F, individual steam passages 51G, and branch steam passages 51H are the same as those of the steam passages 51 described above. Connecting steam passages 51F, individual steam passages 51G, and branch steam passages 51H can each extend in a straight line, or they can have any shape, such as arcs, S-shaped curves, V-shaped curves, L-shaped curves, etc. Furthermore, in this specification, connecting steam passages 51F, individual steam passages 51G, and branch steam passages 51H are collectively referred to as steam passages 51.

[0176] The connecting steam passage 51F is a steam flow path that connects the first heat source region SR1 and the second heat source region SR2. Specifically, one end of the connecting steam passage 51F extends in the direction of the first heat source region SR1, and the other end extends in the direction of the second heat source region SR2. In the connecting steam passage 51F, actuating steam 2a flows between the first heat source region SR1 side and the second heat source region SR2 side. In particular, when device D1 is driven and device D2 is stopped, actuating steam 2a flows from the first heat source region SR1 side to the second heat source region SR2 side via the connecting steam passage 51F. Conversely, when device D1 is stopped and device D2 is driven, actuating steam 2a flows from the second heat source region SR2 side to the first heat source region SR1 side via the connecting steam passage 51F.

[0177] The individual vapor passage 51G is a vapor flow path connected to either the first heat source region SR1 or the second heat source region SR2, but not to the other. That is, one end of the extension direction of the individual vapor passage 51G coincides with either the first heat source region SR1 or the second heat source region SR2, while the other end does not coincide with either the first heat source region SR1 or the second heat source region SR2. Preferably, the other end of the extension direction of the individual vapor passage 51G is located in the condensation region CR, which is located away from the heat source regions SR1 and SR2 in the planar direction; for example, it may terminate at the support portion 39 described later. In the individual vapor passage 51G, the actuating vapor 2a flows outward in the planar direction from either the first heat source region SR1 or the second heat source region SR2. In particular, the actuating vapor 2a flows outward in the planar direction from the heat source regions SR1 and SR2 corresponding to the driving devices D1 and D2. Alternatively, a separate steam passage 51G connected to either the heat source region SR1 or SR2 can be provided within the capillary sheet 30, but no separate steam passage 51G connected to the other can be provided.

[0178] The branch steam passage 51H is a steam flow path connected midway along the extension direction of the connecting steam passage 51F, and it does not coincide with either of the heat source regions SR1 or SR2. That is, one end of the extension direction of the branch steam passage 51H is connected to the connecting steam passage 51F, and the other end of the extension direction exists at a position other than the heat source regions SR1 and SR2. Preferably, the other end of the extension direction of the branch steam passage 51H exists in a condensation region CR at a position away from the heat source regions SR1 and SR2 in the planar direction, and may terminate at the support part 39 described later. Alternatively, the other end of the extension direction of the branch steam passage 51H may also be connected to other steam passages 51. In the branch steam passage 51H, the actuating steam 2a flows from the side of the connecting steam passage 51F in the planar direction. Specifically, when device D1 is driven and device D2 is stopped, actuating vapor 2a flows outward from the lateral surface of the first heat source region SR1 by connecting vapor passage 51F and branch vapor passage 51H. Conversely, when device D1 is stopped and device D2 is driven, actuating vapor 2a flows outward from the lateral surface of the second heat source region SR2 by connecting vapor passage 51F and branch vapor passage 51H. Furthermore, when both devices D1 and D2 are driven, actuating vapor 2a flows outward from the lateral surface of heat source regions SR1 and SR2 by connecting vapor passage 51F and branch vapor passage 51H. Alternatively, the branch vapor passage 51H may not be provided within the capillary sheet 30. Also, when other heat source regions are provided (e.g., the third heat source region SR3 described later), the branch vapor passage 51H may overlap with other heat source regions.

[0179] As shown in Figures 22 and 23, a support portion 39 is provided within the vapor flow path portion 50 to support the extended ends of the shore portion 33 to the frame portion 32. The support portion 39 can support adjacent shore portions 33, or it can support a single shore portion 33. The support portion 39 is provided along one side of the frame portion 32 (in this case, the side located on the negative side in the Y direction). Alternatively, the support portion 39 can be provided on a portion or all of the side constituting the frame portion 32. Preferably, the support portion 39 is formed in a manner that does not obstruct the flow of the actuating vapor 2a diffused in the vapor flow path portion 50. In this case, the support portion 39 is disposed on the first body surface 31a side of the capillary sheet 30, and on the second body surface 31b side, a space communicating with the vapor flow path portion 50 is formed. In Figures 22 and 23, the support portion 39 is indicated in gray. The support portion 39 is thinned by half-etching from the second body surface 31b side. The support portion 39 does not penetrate the area of ​​the capillary sheet 30 in the thickness direction, and its thickness is thinner than that of the frame portion 32. In this way, the thickness of the support portion 39 can be thinner than that of the capillary sheet 30, which can prevent the vapor flow path portion 50 from being interrupted by the support portion 39. However, it is not limited to this, the support portion 39 can also be arranged on the second body surface 31b side. Also, a space communicating with the vapor flow path portion 50 can be formed on both the surface of the support portion 39 on the first body surface 31a side and the surface of the second body surface 31b side.

[0180] As shown in Figure 22, in this embodiment, the plurality of liquid flow path sections 60 include a connecting liquid flow path 60A, a separate liquid flow path 60B, and an independent liquid flow path 60D. The connecting liquid flow path 60A, the separate liquid flow path 60B, and the independent liquid flow path 60D are all flow paths for the actuating fluid 2b to pass through, and are formed on each of the landscaping sections 33. The basic configuration, such as the shape, of the connecting liquid flow path 60A, the separate liquid flow path 60B, and the independent liquid flow path 60D can be the same as that of the liquid flow path section 60 in the first embodiment. The connecting liquid flow path 60A, the separate liquid flow path 60B, and the independent liquid flow path 60D extend linearly along the shape of each landscaping section 33. Furthermore, in this specification, the connecting liquid flow path 60A, the separate liquid flow path 60B, and the independent liquid flow path 60D are collectively referred to as the liquid flow path section 60.

[0181] The connecting liquid flow path 60A is a liquid flow path that connects the first heat source region SR1 and the second heat source region SR2. That is, one end of the extending direction of the connecting liquid flow path 60A coincides with the first heat source region SR1, and the other end of the extending direction coincides with the second heat source region SR2. In the connecting liquid flow path 60A, the actuating fluid 2b flows between the first heat source region SR1 side and the second heat source region SR2 side. In particular, when device D1 is driven and device D2 is stopped, the actuating fluid 2b flows from the second heat source region SR2 side to the first heat source region SR1 side through the connecting liquid flow path 60A. On the other hand, when device D1 is stopped and device D2 is driven, the actuating fluid 2b flows from the first heat source region SR1 side to the second heat source region SR2 side through the connecting liquid flow path 60A.

[0182] The individual liquid flow path 60B is a liquid flow path connected to either the first heat source region SR1 or the second heat source region SR2, but not to the other. That is, one end of the extension direction of the individual liquid flow path 60B coincides with either the first heat source region SR1 or the second heat source region SR2, while the other end of the extension direction does not coincide with either the first heat source region SR1 or the second heat source region SR2. Preferably, the other end of the extension direction of the individual liquid flow path 60B is a condensation region CR located at a position away from the heat source regions SR1 and SR2 in the surface direction, and may also terminate at the support portion 39 described later. In the individual liquid flow path 60B, the actuating fluid 2b flows from the condensation region CR in the surface direction towards the first heat source region SR1 or the second heat source region SR2. In particular, the actuating fluid 2b flows from the condensation region CR towards the heat source regions SR1 and SR2 corresponding to the driven devices D1 and D2. Alternatively, a separate liquid flow path 60B connected to either the heat source region SR1 or SR2 can be provided within the capillary sheet 30, but no separate liquid flow path 60B connected to the other can be provided.

[0183] The independent liquid flow path 60D is a liquid flow path that is not connected to other liquid flow path sections 60 (such as the connecting liquid flow path 60A and the separate liquid flow path 60B) and does not overlap with either of the heat source regions SR1 or SR2. That is, both ends of the extension direction of the independent liquid flow path 60D are located outside the other liquid flow path sections 60 and outside the heat source regions SR1 and SR2. Preferably, one end of the extension direction of the independent liquid flow path 60D is located in the condensation region CR, away from the heat source regions SR1 and SR2 in the surface direction; for example, it can terminate at the aforementioned support section 39. In the independent liquid flow path 60D, the actuating fluid 2b flows from the surface direction outward towards the heat source regions SR1 and SR2. Alternatively, the independent liquid flow path 60D may not be provided within the capillary structure sheet 30.

[0184] Figure 24 is an enlarged view of the upper surface of each liquid flow path 60 (connecting liquid flow path 60A, individual liquid flow path 60B, or independent liquid flow path 60D). As shown in Figure 24, each liquid flow path 60 has a plurality of main flow channels 61 for the passage of the actuating fluid 2b, arranged in parallel with each other, and a plurality of liquid flow path connection structures 65 communicating with the main flow channels 61. In the example shown in Figure 24, each shore 33 includes six main flow channels 61, but this is not a limitation. The number of main flow channels 61 included in each shore 33 is arbitrary; for example, it can be more than three and less than twenty.

[0185] Next, referring to Figures 25(a) and (b), the configuration relationship between the first heat source region SR1 and the second heat source region SR2, and the connecting vapor passage 51F and the connecting liquid flow path 60A will be explained. Figures 25(a) and (b) are schematic top views showing the capillary sheet 30. For convenience, in Figures 25(a) and (b), illustrations of elements other than the first heat source region SR1, the second heat source region SR2, the connecting vapor passage 51F, and the connecting liquid flow path 60A are omitted.

[0186] As shown in Figure 25(a), a first heat source region SR1 and a second heat source region SR2 are arranged separately on the capillary sheet 30. In this case, La represents the center-to-center distance between the first heat source region SR1 and the second heat source region SR2. The center-to-center distance La is the shortest distance on the capillary sheet 30 between the center C1 of the first heat source region SR1 and the center C2 of the second heat source region SR2. In Figure 25(a), the center-to-center distance La is equal to the length of the line segment connecting the center C1 and the center C2. The center C1 of the first heat source region SR1 and the center C2 of the second heat source region SR2 can also be set as the centroids of the first heat source region SR1 and the second heat source region SR2, respectively.

[0187] As shown in Figure 25(b), the case where the line segment connecting the center C1 of the first heat source region SR1 and the center C2 of the second heat source region SR2 is detached from the plane of the capillary sheet 30 is also considered. In this case, the center-to-center distance La refers to the length of the line connecting the center C1 and the center C2 that is the shortest distance within the plane of the capillary sheet 30.

[0188] In Figure 25(a), the first heat source region SR1 and the second heat source region SR2 are interconnected by a steam passage 51F and a liquid flow path 60A. In this case, the lengths of the steam passage 51F and the liquid flow path 60A are represented by Lb and Lc, respectively. The length Lb of the steam passage 51F refers to the length of the center of the width direction of the steam passage 51F, that is, the length of the region that does not coincide with the heat source regions SR1 and SR2. Similarly, the length Lc of the liquid flow path 60A refers to the length of the center of the width direction of the liquid flow path 60A, that is, the length of the region that does not coincide with the heat source regions SR1 and SR2.

[0189] At this point, the length Lb of the connecting steam passage 51F is preferably set to less than twice the center-to-center distance La (Lb < 2La). By setting the length Lb of the connecting steam passage 51F to less than twice the center-to-center distance La, the middle part of the connecting steam passage 51F will not be excessively separated from the heat source regions SR1 and SR2. This can prevent the actuating steam 2a from condensing into actuating liquid 2b in the middle of the connecting steam passage 51F.

[0190] Similarly, the length Lc of the connecting liquid flow path 60A is preferably set to less than twice the center-to-center distance La (Lc < 2La). By setting the length Lc of the connecting liquid flow path 60A to less than twice the center-to-center distance La, the middle part of the connecting liquid flow path 60A will not be excessively separated from the heat source regions SR1 and SR2. In this way, the condensation of actuating vapor 2a into actuating liquid 2b in the connecting vapor passage 51F adjacent to the connecting liquid flow path 60A at the position away from the heat source regions SR1 and SR2 can be suppressed.

[0191] Additionally, as shown in Figure 22, the lengths Lb and Lc of the connection between the vapor passage 51F and the liquid flow passage 60A can also be set to less than one time the distance La between the centers of the first heat source region SR1 and the second heat source region SR2.

[0192] In this embodiment, the first heat source region SR1 and the second heat source region SR2 are interconnected by at least one steam passage 51F and at least one liquid flow passage 60A. However, this is not a limitation. For example, the first heat source region SR1 and the second heat source region SR2 may also be interconnected by at least one steam passage 51F, without being interconnected by the liquid flow passage 60A. Alternatively, the first heat source region SR1 and the second heat source region SR2 may also be interconnected by at least one liquid flow passage 60A, without being interconnected by the steam passage 51F.

[0193] The vapor chamber 1 and capillary sheet 30 of this embodiment can be manufactured in a substantially similar manner to those of the first embodiment (see Figure 10).

[0194] Furthermore, the operation method of the vapor chamber 1 in this embodiment is largely the same as that in the first embodiment, except that it has a plurality of devices D1 and D2.

[0195] In this embodiment, a plurality of (2) devices D1 and D2 are installed in the vapor chamber 1. In this case, devices D1 and D2 may be driven simultaneously, or only one of devices D1 and D2 may be driven.

[0196] Figures 26(a)-(c) show the capillary sheet 30 shown in Figure 22 with both devices D1 and D2 driven (Figure 26(a)), only device D1 driven (Figure 26(b)), and only device D2 driven (Figure 26(c)). In Figures 26(a)-(c), the heat source regions SR1 and SR2 corresponding to the driven devices D1 and D2 are represented by thick lines, and the heat source regions SR1 and SR2 corresponding to the undriven devices D1 and D2 are represented by two-point chain lines.

[0197] As shown in Figure 26(a), when devices D1 and D2 are both driven, the actuating vapor 2a generated from the heat source regions SR1 and SR2 is sequentially transported from the heat source regions SR1 and SR2 to the condensation region CR via the connecting vapor passage 51F and the branch vapor passage 51H. Subsequently, the actuating vapor 2a is transformed into actuating liquid 2b in the condensation region CR, and the actuating liquid 2b returns to the heat source regions SR1 and SR2 via a separate liquid flow path 60B.

[0198] Alternatively, a portion of the actuating vapor 2a generated from heat source regions SR1 and SR2 is transported to the condensation region CR via a separate vapor passage 51G extending from heat source regions SR1 and SR2. Subsequently, the actuating vapor 2a is transformed into actuating liquid 2b in the condensation region CR, and the actuating liquid 2b returns to the heat source regions SR1 and SR2 via a separate liquid flow path 60B.

[0199] As shown in Figure 26(b), when only device D1 is driven, the actuating vapor 2a generated from the first heat source region SR1 passes through the second heat source region SR2 via the connecting vapor passage 51F, and is transported to the condensation region CR via a separate vapor passage 51G extending from the second heat source region SR2. Subsequently, the actuating vapor 2a becomes actuating liquid 2b in the condensation region CR. The actuating liquid 2b passes through the second heat source region SR2 via a separate liquid flow path 60B extending from the second heat source region SR2, and returns to the first heat source region SR1 via the connecting liquid flow path 60A.

[0200] Alternatively, a portion of the actuating vapor 2a generated from the first heat source region SR1 is transported to the condensation region CR via a separate vapor passage 51G extending from the first heat source region SR1. Subsequently, the actuating vapor 2a is converted into actuating liquid 2b in the condensation region CR, and the actuating liquid 2b returns to the first heat source region SR1 via a separate liquid flow path 60B extending from the first heat source region SR1.

[0201] As shown in Figure 26(c), when only device D2 is driven, the actuating vapor 2a generated from the second heat source region SR2 passes through the first heat source region SR1 via the connecting vapor passage 51F, and is transported to the condensation region CR via a separate vapor passage 51G extending from the first heat source region SR1. Subsequently, the actuating vapor 2a becomes actuating liquid 2b in the condensation region CR. The actuating liquid 2b passes through the first heat source region SR1 via a separate liquid flow path 60B extending from the first heat source region SR1, and returns to the second heat source region SR2 via the connecting liquid flow path 60A.

[0202] Alternatively, a portion of the actuating vapor 2a generated from the second heat source region SR2 is transported to the condensation region CR via a separate vapor passage 51G extending from the second heat source region SR2. Subsequently, the actuating vapor 2a is converted into actuating liquid 2b in the condensation region CR, and the actuating liquid 2b returns to the second heat source region SR2 via a separate liquid flow path 60B extending from the second heat source region SR2.

[0203] Thus, according to this embodiment, the first heat source region SR1 and the second heat source region SR2 are interconnected by at least one connecting vapor passage 51F. Therefore, when only one device D1 (D2) is driven, the actuating vapor 2a generated from the heat source region SR1 (SR2) corresponding to the driven device D1 (D2) can be transported to the condensation region CR side via the connecting vapor passage 51F. Furthermore, the first heat source region SR1 and the second heat source region SR2 are interconnected by at least one connecting liquid flow path 60A. Therefore, when only one device D1 (D2) is driven, the actuating liquid 2b generated in the condensation region CR can be returned to the first heat source region SR1 (second heat source region SR2) side via the connecting liquid flow path 60A. In this way, not only when both devices D1 and D2 are driven, but also when only one device D1 (D2) is driven, the actuating vapor 2a can be transported away from the heat source, and the condensed actuating liquid 2b can be returned to the heat source side. As a result, the area in the steam chamber 1 where heat is difficult to transfer can be reduced, and a large area of ​​the steam chamber 1 can be used for heat transfer, so that the heat from the heat source can be evenly distributed throughout the surface of the steam chamber 1.

[0204] Furthermore, according to this embodiment, the vapor passage 51 includes a separate vapor passage 51G connected to either the first heat source region SR1 or the second heat source region SR2, but not connected to the other. In this way, the actuating vapor 2a generated from the heat source region SR1 (SR2) corresponding to the driven device D1 (D2) can be transported to the condensation region CR side via the separate vapor passage 51G.

[0205] Furthermore, according to this embodiment, the vapor passage 51 includes a branch vapor passage 51H connected in the middle of the connecting vapor passage 51F. In this way, when both devices D1 and D2 are driven, the actuating vapor 2a generated from the heat source regions SR1 and SR2 can be sequentially transported to the condensation region CR side via the connecting vapor passage 51F and the branch vapor passage 51H.

[0206] Furthermore, according to this embodiment, the liquid flow path 60 includes a separate liquid flow path 60B connected to either the first heat source region SR1 or the second heat source region SR2, but not connected to the other. This allows the actuating fluid 2b condensed in the condensation region CR to return to either the first heat source region SR1 or the second heat source region SR2 via the separate liquid flow path 60B.

[0207] (Example of a variation of capillary structure sheet) Next, referring to Figures 27 to 35, various variations of the capillary sheet of the second embodiment will be described. Figures 27 to 35 are enlarged top views showing the variations of the capillary sheet 30. In Figures 27 to 35, the same symbols are used to mark the parts that are the same as those shown in Figures 19 to 26, and detailed descriptions are omitted.

[0208] (First variation of capillary structure sheet) As shown in Figure 27, the first heat source region SR1 and the second heat source region SR2 are interconnected by a liquid flow path 60A. On the other hand, in Figure 27, the first heat source region SR1 and the second heat source region SR2 are not interconnected by a vapor passage 51F.

[0209] Furthermore, a branch liquid flow path 60C is connected midway along the extension direction of the connecting liquid flow path 60A. The branch liquid flow path 60C is connected to the liquid flow path 60A and is a liquid flow path that does not overlap with either the heat source regions SR1 or SR2. In this way, by providing the branch liquid flow path 60C, the actuating fluid 2b condensed in the condensation region CR can be sequentially returned to the heat source regions SR1 and SR2 via the branch liquid flow path 60C and the connecting liquid flow path 60A.

[0210] Furthermore, a bridge 41 is formed midway along the extension direction of the connecting liquid flow path 60A. The bridge 41 is thinned from the back side (first body surface 31a). The thinned portion of the bridge 41 connects to the vapor passage 51E that intersects with the connecting liquid flow path 60A. By providing the bridge 41, the flow of the actuating liquid 2b in the connecting liquid flow path 60A on the front side (second body surface 31b) can be ensured, and the flow of the actuating vapor 2a in the vapor passage 51E on the back side is not obstructed.

[0211] (Second variation of capillary structure sheet) In Figures 28(a) and (b), the first heat source region SR1 and the second heat source region SR2 are interconnected by a plurality of connecting vapor passages 51F and a plurality of connecting liquid flow passages 60A, with a branch vapor passage 51H connected to a portion of the connecting vapor passages 51F. Furthermore, an independent liquid flow passage 60D is arranged adjacent to the branch vapor passage 51H. The independent liquid flow passage 60D extends parallel to the plurality of individual liquid flow passages 60B extending from the heat source regions SR1 and SR2 respectively. The arrangement of the independent liquid flow passage 60D facilitates the recovery of the actuating fluid 2b within the surface of the capillary sheet 30.

[0212] As shown in Figure 28(a), a portion of the vapor passage 51F can be connected to several branch vapor passages 51H. In this way, especially when both devices D1 and D2 are driven, the actuating vapor 2a can flow efficiently from the heat source regions SR1 and SR2 to the condensation region CR through the multiple branch vapor passages 51H.

[0213] As shown in Figure 28(b), a portion of the individual vapor passage 51G extending from the second heat source region SR2 may have a curved section R when viewed from above. Furthermore, the individual liquid flow path 60B adjacent to this individual vapor passage 51G also has a curved shape when viewed from above, similar to the individual vapor passage 51G. By having the curved section R in the individual vapor passage 51G, the vapor resistance of the actuating vapor 2a flowing in the individual vapor passage 51G can be reduced, facilitating heat transfer within the surface of the vapor chamber 1. Moreover, not limited to the individual vapor passage 51G, the connecting vapor passage 51F or the branch vapor passage 51H may also have a curved shape when viewed from above.

[0214] (The third variation of capillary structure sheet) As shown in Figures 29(a) and (b), the capillary sheet 30 can also be T-shaped when viewed from above. In this case, the capillary sheet 30 has a first end 30a, a second end 30b located on the opposite side of the first end 30a, and a third end 30c located laterally relative to the first end 30a and the second end 30b.

[0215] In Figure 29(a), the first heat source region SR1 is located on the first end 30a side, and the second heat source region SR2 is located on the third end 30c side. The condensation region CR is located on the second end 30b side. The first heat source region SR1 and the second heat source region SR2 are interconnected by an L-shaped connecting vapor passage 51F (viewed from above) and an L-shaped connecting liquid flow passage 60A (viewed from above). A branch liquid flow passage 60C is connected in part of the connecting liquid flow passage 60A. Furthermore, in the first heat source region SR1, a single, linear vapor passage 51G (viewed from above) and a single, linear liquid flow passage 60B (viewed from above) are respectively connected. Similarly, in the second heat source region SR2, a single, L-shaped vapor passage 51G (viewed from above) and a single, L-shaped liquid flow passage 60B (viewed from above) are respectively connected.

[0216] In Figure 29(b), the first heat source region SR1 is located on the first end 30a side, and the second heat source region SR2 is located on the second end 30b side. The condensation region CR is located on the third end 30c side. The first heat source region SR1 and the second heat source region SR2 are interconnected by a straight-line connecting vapor passage 51F (viewed from above) and a straight-line connecting liquid flow passage 60A (viewed from above). A branch liquid flow passage 60C is connected in part of the connecting liquid flow passage 60A. Furthermore, in the first heat source region SR1, there are separate L-shaped vapor passages 51G (viewed from above) and L-shaped separate liquid flow passages 60B (viewed from above). Furthermore, in the second heat source region SR2, there are L-shaped individual steam passages 51G and L-shaped individual liquid flow paths 60B when viewed from above, and a straight individual steam passage 51G and a straight individual liquid flow path 60B when viewed from above.

[0217] According to this variation, when only one device D1 (D2) is driven, actuating vapor 2a can be supplied to the side of the undriven device D2 (D1). That is, the area on the side of the undriven device D2 (D1) can be used as the condensation area CR. In this way, a large area within the surface of the vapor chamber 1 can be used to transfer heat, so that the heat from the heat source is uniformly distributed within the surface of the vapor chamber 1.

[0218] (4th variation of capillary structure sheet) As shown in Figures 30(a)-(c), the capillary sheet 30 can also be approximately H-shaped when viewed from above. In this case, the capillary sheet 30 has a first end 30a, a second end 30b located on the opposite side of the first end 30a, and a third end 30c located laterally relative to the first end 30a and the second end 30b. In Figures 30(a)-(c), the first heat source region SR1 is located on the side of the first end 30a, and the second heat source region SR2 is located on the side of the second end 30b. The condensation region CR is located on the side of the third end 30c.

[0219] In Figures 30(a)-(c), the first heat source region SR1 and the second heat source region SR2 are interconnected by a linear connecting steam passage 51F (viewed from above) and a linear connecting liquid flow passage 60A (viewed from above). A branch liquid flow passage 60C is connected along a portion of the connecting liquid flow passage 60A. Furthermore, in the first heat source region SR1, a separate steam passage 51G and a separate liquid flow passage 60B are connected. Similarly, in the second heat source region SR2, a separate steam passage 51G and a separate liquid flow passage 60B are connected.

[0220] In Figure 30(a), the individual vapor passage 51G, the individual liquid flow path 60B, and the branch liquid flow path 60C extending from the heat source regions SR1 and SR2 toward the third end 30c each have a flexural portion that bends at a right angle when viewed from above.

[0221] In Figure 30(b), the individual vapor passage 51G, the individual liquid flow path 60B, and the branch liquid flow path 60C extending from the heat source regions SR1 and SR2 toward the third end 30c each have a curved portion R when viewed from above. This reduces the vapor resistance of the actuating vapor 2a flowing in the individual vapor passage 51G, facilitating heat transfer within the surface of the vapor chamber 1. Furthermore, the branch liquid flow path 60C bends at the connection between it and the connecting liquid flow path 60A, and a connecting recess 68 without a liquid flow path exists at this connection. The connecting recess 68 is approximately triangular in shape when viewed from above, but is not limited to this; it can also be a planar shape corresponding to the shapes of the surrounding branch liquid flow path 60C and connecting liquid flow path 60A. This prevents the actuating fluid 2b from remaining at the connection between the branch liquid flow path 60C and the connecting liquid flow path 60A. When the vapor chamber 1 is placed in an environment lower than the freezing point of the actuating fluid 2b, the actuating fluid 2b remaining at the connection can be prevented from freezing and causing damage to the vapor chamber 1.

[0222] In Figure 30(c), the connection between the branch liquid flow path 60C and the connecting liquid flow path 60A is curved, and a connecting liquid flow path 69 with a liquid flow path exists at this connection. The connecting liquid flow path 69 is generally triangular in shape when viewed from above, but it is not limited to this; it can also be designed as a planar shape corresponding to the shapes of the surrounding branch liquid flow path 60C and connecting liquid flow path 60A. In this way, the actuating fluid 2b from the branch liquid flow path 60C can easily flow to the connecting liquid flow path 60A side via the connecting liquid flow path 69. The rest of the configuration is the same as that shown in Figure 30(b).

[0223] (5th variation of capillary structure sheet) As shown in Figures 31(a) and (b), in addition to the first heat source region SR1 and the second heat source region SR2, a third heat source region SR3 is further disposed on the capillary sheet 30. The third heat source, i.e., device D3, is disposed in the third heat source region SR3. In addition, in Figures 31(a) and (b), the first heat source region SR1, the second heat source region SR2, and the third heat source region SR3 are arranged sequentially from the negative side of the X direction, but the positional relationship of the heat source regions SR1, SR2, and SR3 is not limited to this.

[0224] In Figures 31(a) and (b), the first heat source region SR1 and the second heat source region SR2 are interconnected by a steam passage 51F and a liquid flow path 60A. A branch steam passage 51H is connected along a portion of the steam passage 51F. Furthermore, a separate steam passage 51G and a separate liquid flow path 60B are connected to the first heat source region SR1 and the second heat source region SR2, respectively. Alternatively, the first heat source region SR1 and the second heat source region SR2 can also be connected by either the steam passage 51F or the liquid flow path 60A.

[0225] Furthermore, the second heat source region SR2 and the third heat source region SR3 are interconnected by a steam passage 51F and a liquid flow path 60A. A branch steam passage 51H is connected along a portion of the steam passage 51F. Also, in the third heat source region SR3, a separate steam passage 51G and a separate liquid flow path 60B are connected respectively. Alternatively, the second heat source region SR2 and the third heat source region SR3 can also be connected by either the steam passage 51F or the liquid flow path 60A.

[0226] Furthermore, an independent liquid flow path 60D is configured adjacent to the branch vapor passage 51H. The independent liquid flow path 60D extends parallel to the individual liquid flow paths 60B extending from the heat source regions SR1, SR2, and SR3, respectively. By configuring the independent liquid flow path 60D, it is easy to recover the actuating fluid 2b in the plane of the capillary sheet 30.

[0227] In Figure 31(a), a portion of the individual vapor passage 51G extending from the third heat source region SR3 has a curved section R when viewed from above. The individual liquid flow path 60B adjacent to this individual vapor passage 51G also has a curved shape when viewed from above, similar to the individual vapor passage 51G. By having the curved section R in the individual vapor passage 51G, the vapor resistance of the actuating vapor 2a flowing in the individual vapor passage 51G can be reduced, facilitating in-plane heat transfer within the vapor chamber 1.

[0228] In Figure 31(b), the connecting vapor passage 51F, which connects the second heat source region SR2 and the third heat source region SR3, has a curved portion R when viewed from above. The connecting liquid flow path 60A, adjacent to the connecting vapor passage 51F, also has a curved shape when viewed from above, similar to the connecting vapor passage 51F. By having the curved portion R in the connecting vapor passage 51F, the vapor resistance of the actuating vapor 2a flowing in the connecting vapor passage 51F can be reduced, facilitating heat transfer within the surface of the vapor chamber 1.

[0229] According to this variation, when any one or two of the three devices D1-D3 are driven, actuating vapor 2a can be supplied to the side of the undriven device. This allows a large area within the surface of the vapor chamber 1 to be used for heat transfer, ensuring that heat from the heat source is uniformly distributed throughout the surface of the vapor chamber 1. Alternatively, four or more heat source areas can be arranged on the capillary sheet 30.

[0230] (Sixth variation of capillary structure sheet) As shown in Figure 32, a first heat source region SR1, a second heat source region SR2, and a third heat source region SR3 are disposed on the capillary sheet 30. In this case, a portion of the individual vapor passage 51G connected to the first heat source region SR1 has a U-shaped bend Ra when viewed from above. In this bend Ra, the flow direction of the individual vapor passage 51G changes by 180°. The individual liquid flow path 60B adjacent to the individual vapor passage 51G also has a U-shaped bend when viewed from above, similar to the individual vapor passage 51G. By means of the U-shaped bend Ra of the individual vapor passage 51G, actuating vapor 2a can be delivered to positions separate from the heat source regions SR1, SR2, and SR3.

[0231] A branch steam passage 51H is connected along a portion of the connecting steam passage 51F. Furthermore, an independent liquid flow path 60D is arranged adjacent to the branch steam passage 51H. The independent liquid flow path 60D extends parallel to a plurality of individual liquid flow paths 60B extending from the heat source regions SR1, SR2, and SR3 respectively. The arrangement of the independent liquid flow path 60D facilitates the recovery of the actuating fluid 2b within the surface of the capillary sheet 30.

[0232] (Seventh variation of capillary structure sheet) As shown in Figure 33, a first heat source region SR1, a second heat source region SR2, and a third heat source region SR3 are disposed on the capillary sheet 30. In this case, any two of the first heat source regions SR1, the second heat source region SR2, and the third heat source region SR3 are also interconnected by a vapor passage 51F and a liquid flow passage 60A.

[0233] That is, the first heat source region SR1 and the second heat source region SR2 are interconnected by a steam passage 51F and a liquid flow passage 60A. A branch steam passage 51H is connected midway through one portion of the steam passage 51F. Both the steam passage 51F and the liquid flow passage 60A connecting the first heat source region SR1 and the second heat source region SR2 have a curved portion R when viewed from above.

[0234] Furthermore, the second heat source region SR2 and the third heat source region SR3 are interconnected by a steam passage 51F and a liquid flow passage 60A. A branch steam passage 51H is connected midway through one portion of the steam passage 51F. Also, both the steam passage 51F and the liquid flow passage 60A connecting the second heat source region SR2 and the third heat source region SR3 have a curved portion R when viewed from above.

[0235] Furthermore, the third heat source region SR3 and the first heat source region SR1 are interconnected by a steam passage 51F and a liquid flow passage 60A. A branch steam passage 51H is connected midway through a portion of the steam passage 51F. Also, the liquid flow passage 60A connecting the third heat source region SR3 and the first heat source region SR1 is connected at connection point 67 to another liquid flow passage 60A connecting the first heat source region SR1 and the second heat source region SR2. In this case, connection point 67 is located within the first heat source region SR1, but is not limited to this; it can also be located outside the first heat source region SR1. Furthermore, the liquid flow passage 60A connecting the first heat source region SR1 and the second heat source region SR2 is also connected to the liquid flow passage 60A connecting the third heat source region SR3 and the first heat source region SR1. Alternatively, the connecting liquid flow path 60A that connects the second heat source region SR2 and the third heat source region SR3 can also be connected to the connecting liquid flow path 60A that connects the third heat source region SR3 and the first heat source region SR1.

[0236] Individual steam passages 51G and 51B are connected to heat source regions SR2 and SR3, respectively. Individual liquid flow paths 60B are also connected to heat source regions SR2 and SR3. Furthermore, an independent liquid flow path 60D is arranged adjacent to the branch steam passage 51H. The independent liquid flow path 60D extends parallel to the individual liquid flow paths 60B extending from heat source regions SR2 and SR3, respectively. The arrangement of the independent liquid flow path 60D facilitates the recovery of the actuating fluid 2b within the surface of the capillary sheet 30.

[0237] According to this variation, any two of the three heat source regions SR1, SR2, and SR3 are interconnected by a vapor passage 51F and a liquid flow path 60A. This allows actuating vapor 2a to be supplied to the undriven device side when any one of the three devices D1-D3 is driven. This enables the use of a large area within the surface of the vapor chamber 1 for heat transfer, ensuring uniform heat distribution throughout the surface of the vapor chamber 1. Furthermore, any two of the three heat source regions SR1, SR2, and SR3 can be interconnected by at least one vapor passage 51F, but not by a liquid flow path 60A. Furthermore, any two of the first heat source regions SR1, the second heat source region SR2, and the third heat source region SR3 can be interconnected by at least one liquid flow path 60A, but not by a vapor flow path 51F.

[0238] (8th variation of capillary structure sheet) As shown in Figure 34, a first heat source region SR1, a second heat source region SR2, and a third heat source region SR3 are disposed on the capillary sheet 30. In this case, any two of the first heat source regions SR1, the second heat source region SR2, and the third heat source region SR3 are also interconnected by a vapor passage 51F and a liquid flow passage 60A.

[0239] Specifically, the first heat source region SR1 and the second heat source region SR2 are interconnected by a steam passage 51F and a liquid flow passage 60A. A branch steam passage 51H1 is connected midway through one of the steam passages 51F, and a branch steam passage 51H2 is connected midway through the other steam passage 51F. Furthermore, the second heat source region SR2 and the third heat source region SR3 are interconnected by a steam passage 51F and a liquid flow passage 60A. A branch steam passage 51H1 is connected midway through one of the steam passages 51F, and a branch steam passage 51H2 is connected midway through the other steam passage 51F. Furthermore, the third heat source region SR3 and the first heat source region SR1 are interconnected by a steam passage 51F and a liquid flow passage 60A. A branch steam passage 51H1 is connected in the middle of one of the connecting steam passages 51F, and a branch steam passage 51H2 is connected in the middle of the other connecting steam passage 51F.

[0240] In Figure 34, one of the branch vapor passages 51H1 and 51H2, 51H1, extends outward toward the surface of the capillary sheet 30, while the other branch vapor passage 51H2 extends inward toward the surface of the capillary sheet 30. This allows the actuating vapor 2a from the first heat source region SR1, the second heat source region SR2, and the third heat source region SR3 to be transported to a larger area within the surface of the vapor chamber 1, ensuring uniform heat distribution within the surface of the vapor chamber 1. Alternatively, a single connecting vapor passage 51F can connect both branch vapor passages 51H1 and 51H2.

[0241] Furthermore, within the first heat source region SR1, the connecting steam passage 51F and the connecting liquid flow passage 60A connecting the third heat source region SR3 and the first heat source region SR1 are respectively connected to the connecting steam passage 51F and the connecting liquid flow passage 60A connecting the first heat source region SR1 and the second heat source region SR2. Also, within the second heat source region SR2, the connecting steam passage 51F and the connecting liquid flow passage 60A connecting the first heat source region SR1 and the second heat source region SR2 are respectively connected to the connecting steam passage 51F and the connecting liquid flow passage 60A connecting the second heat source region SR2 and the third heat source region SR3. Furthermore, within the third heat source region SR3, the connecting steam passage 51F and the connecting liquid flow passage 60A connecting the second heat source region SR2 and the third heat source region SR3 are respectively connected to the connecting steam passage 51F and the connecting liquid flow passage 60A connecting the third heat source region SR3 and the first heat source region SR1.

[0242] Individual steam passages 51G are connected to heat source regions SR1, SR2, and SR3. Individual liquid flow paths 60B are also connected to heat source regions SR1, SR2, and SR3. Furthermore, an independent liquid flow path 60D is provided along the individual liquid flow path 60B located inside the surface of the capillary sheet 30. By providing an independent liquid flow path 60D, the recovery of the actuating fluid 2b within the surface of the capillary sheet 30 is facilitated.

[0243] The capillary sheet 30 can be configured with a planar shape corresponding to the shapes of each heat source region SR1, SR2, and SR3, for example, it can be roughly triangular in shape when viewed from above (an equilateral triangle with rounded corners in Figure 34). The center of the first heat source region SR1, the center of the second heat source region SR2, and the center of the third heat source region SR3 can be respectively positioned at positions corresponding to the vertices of the triangle. Furthermore, the capillary sheet 30 is not limited to a triangular shape; it can also be configured with any shape such as rectangular, circular, elliptical, L-shaped, T-shaped, or U-shaped. The capillary sheet 30 of any shape can also be configured with the connecting vapor passage 51F, individual vapor passage 51G, branch vapor passages 51H1 and 51H2, connecting liquid flow path 60A, individual liquid flow path 60B, and / or independent liquid flow path 60D as shown in Figure 34.

[0244] According to this variation, any two of the three heat source regions SR1, SR2, and SR3 are also interconnected by a vapor passage 51F and a liquid flow passage 60A. Thus, when any one of the three devices D1-D3 is driven, actuating vapor 2a can be supplied to the side of the undriven device. This allows a large area within the surface of the vapor chamber 1 to be used for heat transfer, ensuring that heat from the heat source is uniformly distributed throughout the surface of the vapor chamber 1.

[0245] (9th variation of capillary structure sheet) As shown in Figure 35, a first heat source region SR1, a second heat source region SR2, and a third heat source region SR3 are disposed on the capillary sheet 30. In this case, any two of the first heat source regions SR1, the second heat source region SR2, and the third heat source region SR3 are also interconnected by a vapor passage 51F and a liquid flow passage 60A.

[0246] Specifically, the first heat source region SR1 and the second heat source region SR2 are interconnected by a steam passage 51F and a liquid flow passage 60A. A plurality of branch steam passages 51H1 are connected along one of the steam passages 51F, and a plurality of branch steam passages 51H2 are connected along the other steam passage 51F. Furthermore, the second heat source region SR2 and the third heat source region SR3 are interconnected by a steam passage 51F and a liquid flow passage 60A. A plurality of branch steam passages 51H1 are connected along one of the steam passages 51F, and a plurality of branch steam passages 51H2 are connected along the other steam passage 51F. Furthermore, the third heat source region SR3 and the first heat source region SR1 are interconnected by a steam passage 51F and a liquid flow passage 60A. In one of the connecting steam passages 51F, a plurality of branch steam passages 51H1 are connected, and in another connecting steam passage 51F, a plurality of branch steam passages 51H2 are connected.

[0247] In Figure 35, one of the branch vapor passages 51H1 and 51H2, 51H1, extends outward toward the surface of the capillary sheet 30, while the other branch vapor passage 51H2 extends inward toward the surface of the capillary sheet 30. This allows the actuating vapor 2a from the first heat source region SR1, the second heat source region SR2, and the third heat source region SR3 to be transported to a larger area within the surface of the vapor chamber 1, ensuring uniform heat distribution within the surface of the vapor chamber 1. Alternatively, a single connecting vapor passage 51F can connect both branch vapor passages 51H1 and 51H2.

[0248] Individual steam passages 51G are connected to heat source regions SR1, SR2, and SR3. Individual liquid flow paths 60B are also connected to heat source regions SR1, SR2, and SR3. Furthermore, independent liquid flow paths 60D are arranged adjacent to branch steam passages 51H1 and 51H2. The independent liquid flow path 60D extends parallel to the individual liquid flow paths 60B extending from heat source regions SR1, SR2, and SR3 respectively. The arrangement of the independent liquid flow path 60D facilitates the recovery of the actuating fluid 2b within the surface of the capillary sheet 30.

[0249] The capillary sheet 30 can be configured with a planar shape corresponding to the shapes of each heat source region SR1, SR2, and SR3, for example, it can be roughly triangular in shape when viewed from above (an equilateral triangle with rounded corners in Figure 35). The center of the first heat source region SR1, the center of the second heat source region SR2, and the center of the third heat source region SR3 can be respectively positioned at positions corresponding to the vertices of the triangle. Furthermore, the capillary sheet 30 is not limited to a triangular shape; it can also be rectangular, circular, elliptical, L-shaped, T-shaped, U-shaped, or any other shape. The capillary sheet 30 of any shape can be configured with the connecting vapor passage 51F, individual vapor passage 51G, branch vapor passages 51H1 and 51H2, connecting liquid flow path 60A, individual liquid flow path 60B, and / or independent liquid flow path 60D as shown in Figure 35.

[0250] According to this variation, any two of the three heat source regions SR1, SR2, and SR3 are also interconnected by a vapor passage 51F and a liquid flow passage 60A. Thus, when any one of the three devices D1-D3 is driven, actuating vapor 2a can be supplied to the side of the undriven device. This allows a large area within the surface of the vapor chamber 1 to be used for heat transfer, ensuring that heat from the heat source is uniformly distributed throughout the surface of the vapor chamber 1.

[0251] (Example of variations in the vapor chamber) Next, referring to Figures 36(a)-(c), various variations of the steam chamber will be described. Figures 36(a)-(c) are cross-sectional views showing variations of steam chamber 1. In Figures 36(a)-(c), the same symbols are used to mark the parts with the same shape as those shown in Figures 19 to 35, and detailed descriptions are omitted.

[0252] As shown in Figure 36(a), a liquid storage section 70B for storing the actuating fluid 2b can also be provided on the first body surface 31a of the capillary sheet 30. This liquid storage section 70B is connected to the vapor flow path 50 and, via the vapor flow path 50, to the liquid flow path 60. The liquid storage section 70B can also be positioned in the heat source regions SR1 and SR2 when viewed from above. In this way, during periods when devices D1 and D2 cease heating, the actuating fluid 2b can be stored not only in the liquid flow path 60 but also dispersed and stored in the liquid storage section 70B. Therefore, even when the actuating fluid 2b in the liquid flow path 60 freezes and expands at temperatures below its freezing point, the expansion force acting on the upper sheet 20 and the lower sheet 10 can be reduced, thus suppressing deformation of the upper sheet 20 and the lower sheet 10. As a result, deformation of steam chamber 1 can be suppressed, and performance degradation of steam chamber 1 can be suppressed.

[0253] As shown in Figures 36(b) and (c), the vapor chamber 1 can also be composed of two layers of sheets. That is, the vapor chamber 1 has a capillary sheet 30 and an upper sheet (sheet) 20 laminated on the capillary sheet 30. The vapor passage 51 of the capillary sheet 30 is formed concavely on the first body surface 31a of the capillary sheet 30 and is formed as a groove without penetrating the capillary sheet 30.

[0254] Furthermore, in Figures 36(b) and (c), the upper sheet 20 has an upper vapor flow path recess 25 disposed on the first upper sheet surface 20a. The upper vapor flow path recess 25 is formed concavely on the first upper sheet surface 20a of the upper sheet 20 and is not penetrating the upper sheet 20, forming a groove. The upper vapor flow path recess 25 and the vapor passage 51 of the capillary structure sheet 30 integrally constitute the vapor flow path portion 50.

[0255] In Figure 36(c), the upper sheet 20 has an upper liquid flow path recess 26 disposed on the first upper sheet surface 20a. The upper liquid flow path recess 26 is formed concavely on the first upper sheet surface 20a of the upper sheet 20 and is formed as a groove without penetrating the upper sheet 20. The upper liquid flow path recess 26, the main liquid flow path groove 61 and the liquid flow path connecting groove 65 of the capillary structure sheet 30 are integrally formed to constitute the liquid flow path portion 60. In Figure 36(b), the upper liquid flow path recess 26 is not provided, and the liquid flow path portion 60 exists only in the capillary structure sheet 30.

[0256] Alternatively, although not illustrated, the steam chamber 1 only needs to have a steam passage and a liquid flow passage. It can be composed of four or more sheet-like components, or it can be constructed without stacking multiple sheet-like components.

[0257] This disclosure is not limited to the above-described embodiments and variations. During the implementation phase, the constituent elements can be varied and specified without departing from its main purpose. Furthermore, various inventions can be formed by appropriately combining the multiple constituent elements disclosed in the above-described embodiments and variations. It is also possible to delete certain constituent elements from all the constituent elements shown in the embodiments and variations.

[0258] 1: Steam chamber 2a: Actuating steam 2b: Actuating fluid 3: Sealed space 4: Injection section 10: Lower side sheet 10a: 1st lower sheet surface 10b: Second lower side sheet surface 20: Upper side sheet 20a: 1st upper sheet surface 20b: Second upper side sheet surface 25: Upper vapor flow path recess 26: Upper liquid flow path recess 30: Capillary Structure Sheets 30a: First end 30b: Second end 30c: Third end 31a: First body surface 31b: Second body surface 32: Frame section 33: Coastal Taiwan Department 33A: First Coastal Platform 33B: Second Coastal Platform 33C: Third Coastal Platform 37:Injection flow path 39: Support Department 41: Bridge 50: Steam Flow Path Section 51: Vapor Passage 51A: First vapor passage 51B: Second Vapor Passage 51C: Third vapor passage 51E: Vapor Pathway 51F: Connects the vapor passage 51G: Separate vapor pathway 51H: Branch vapor passage 51H1: Branch vapor passage 51H2: Branch vapor pathway 53a: 1st wall 54a: 2nd wall 55: Protrusion 60: Liquid flow path part 60A: Connecting liquid flow path 60B: Separate liquid flow path 60C: Branched liquid flow path 60D: Independent liquid flow path 61: Main flow channel of liquid 62: Wall 63:convex row 64:convex part 65: Liquid flow path connection groove 67: Connection Point 70: First body surface side flow path 70A: First body surface side flow path 70B: Liquid Storage Section 70s: Flat surface 71: Mainstream groove on the first body surface 71A: Mainstream groove on the first body surface side 72:Wall 73:convex row 73A:Protruding row 74:convex part 74A:Protrusion 75: First body surface side connecting groove C1: Center C2: Center CR: Condensation area D: Device D1: Device D2: Device E: Electronic machinery H: Outer shell h1: Depth Ha: Shell component L1: Length L2: Length La: Distance between centers Lb: Length Lc: Length M: Metal sheet material Ma: First material surface Mb: Second material surface MR: Connecting Region R: Bend SR: Evaporation zone SR1: First heat source area SR2: Second heat source region SR3: Third heat source region t1~t4: Thickness t5: Distance TD: Touch panel display w1~w8: Width θ: angle

Claims

1. A capillary sheet for use in a vapor chamber, comprising: a first body surface; a second body surface located on the opposite side of the first body surface; a frame portion; and a plurality of shore portions, which are disposed separately from each other within the frame portion; and a vapor passage for the passage of an actuating fluid is formed between the frame portion and the shore portions, or between the plurality of shore portions, penetrating the first body surface and the second body surface; a liquid flow path for the passage of the actuating fluid in liquid form is formed on the second body surface side of at least one of the shore portions, communicating with the vapor passage; an end of the vapor passage in the extending direction is connected to at least one of the plurality of shore portions in the extending direction of the vapor passage; and a first body surface side flow path communicating with the vapor passage is formed in the connection area on the first body surface side of the shore portion and connected to the end of the vapor passage in the extending direction of the vapor passage in the extending direction of the vapor passage.

2. The capillary sheet of claim 1, wherein on the opposite side of the connection region that is connected to the end of the vapor passage in the extension direction, there is an additional vapor passage.

3. The capillary sheet of claim 1, wherein an evaporation region for arranging a heat source is provided on the capillary sheet, and the first body surface side flow path is continuously formed along the shore platform to the evaporation region.

4. The capillary sheet as claimed in claim 1, wherein the first body surface side flow path is also formed on other shore portions extending along the vapor passage.

5. The capillary sheet of claim 1, wherein in the connection region where it connects to the end of the steam passage in the extension direction, the shore portion and the steam passage do not intersect perpendicularly when viewed from above.

6. The capillary sheet as claimed in claim 1, wherein the aforementioned connecting area is located at the curved portion of the aforementioned shore section.

7. The capillary sheet of claim 1, wherein at least two of the plurality of shore sections merge, and at the portion of the merging, the end of the vapor passage extending in the direction of the merging is connected to the shore section.

8. The capillary sheet of claim 1, wherein at the position where the end of the vapor passage in the extending direction connects with the shore portion, the vapor passage and the shore portion are orthogonal when viewed from above.

9. The capillary sheet of claim 1, wherein the connecting region is thinned from the first body surface side.

10. A capillary sheet for use in a vapor chamber, comprising: a first body surface; a second body surface located on the opposite side of the first body surface; a frame portion; and a plurality of shore portions, which are disposed separately from each other within the frame portion; and a through space is formed between the frame portion and the shore portions, or between the plurality of shore portions, penetrating the first body surface and the second body surface; a second body surface groove communicating with the through space is formed on the second body surface side of at least one of the shore portions; an end of the through space in the extending direction of the through space is connected to at least one of the plurality of shore portions in the extending direction of the through space; and a first body surface side groove communicating with the through space is formed in the connection area on the first body surface side of the shore portion and connected to the end of the through space in the extending direction of the through space.

11. A vapor chamber containing an actuating fluid, comprising: a first sheet; a second sheet; and a capillary sheet as claimed in any one of claims 1 to 10, disposed between the first sheet and the second sheet.

12. An electronic machine comprising: a housing; a device housed within the housing; and a vapor chamber as claimed in claim 11 that is in thermal contact with the device.

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