Resin Conjugate Manufacturing Method

Abstract

A method for manufacturing a resin bond, comprising bonding molded bodies formed from fluorinated resin materials to manufacture a resin bond, includes the following steps: forming a first resin assembly 51 having a receiving portion 51a from a first fluorinated resin material that gels and maintains its shape above its melting point; receiving a second resin assembly 53 formed from a second fluorinated resin material that melts into a liquid above its melting point within the receiving portion 51a; heating the first resin assembly 51, in which the second resin assembly 53 is disposed within the receiving portion 51a, above the melting points of the first and second fluorinated resin materials, and then cooling it, so that the first resin assembly 51 becomes a first resin molded body and the second resin assembly 53 becomes a second resin molded body, and bonding the first resin molded body and the second resin molded body together.

Description

Technical Field

[0001] This invention relates to a method for manufacturing a resin bond, wherein the resin bond system is bonded to two resin molded bodies formed of different fluorinated resin materials. Prior Technology

[0002] For example, in controlling the flow rate of pharmaceutical solutions used in semiconductor manufacturing equipment, diaphragm valves with diaphragms are often used. These diaphragms have a diaphragm section that divides the flow path or valve chamber of the pharmaceutical solution from the drive section, and a valve body section supported in the center of the diaphragm section. In a diaphragm valve, the valve body section is repeatedly elastically deformed to contact or move away from the valve seat, thereby controlling the flow rate. Such a diaphragm section, due to its contact with the pharmaceutical solution, needs to be resistant to pharmaceutical substances, while also requiring flexural durability due to repeated elastic deformation. Therefore, the diaphragm is generally formed from polytetrafluoroethylene (PTFE), which has high flexural durability. Since PTFE cannot be injection molded, the diaphragm is manufactured by compressing powdered PTFE into a block, which is then fired and machined. However, when the diaphragm is formed from PTFE, there is a risk of particles being generated from the valve body section of the diaphragm, which repeatedly contacts or moves away from the valve seat, due to the tendency of PTFE to generate dust. In semiconductor manufacturing, the presence of particulate matter in the chemical solution can significantly impact the yield rate. Therefore, it is preferable to suppress dust generation originating from the valve body of the diaphragm valve that comes into contact with the chemical solution.

[0003] One method to suppress dust generation in the valve body is to form the valve body using a perfluoroalkoxyalkane (PFA), a fluoropolymer material that is less prone to dust generation. However, PFA has low flexural durability and is unsuitable for diaphragm parts that undergo repeated elastic deformation. Therefore, it has been proposed to join a diaphragm part formed from PTFE to a valve body part formed from PFA. This raises the requirement to join molded bodies composed of dissimilar fluoropolymers, and solutions to this requirement have also been proposed.

[0004] For example, Patent Document 1 discloses a fluid control valve in which a diaphragm member (i.e., diaphragm portion) is formed from a first fluoropolymer material PTFE, having a diaphragm membrane and a rod-shaped portion disposed in the center of the diaphragm membrane, with an outer peripheral concave-convex surface provided on the outer periphery of a portion of the rod-shaped portion. This diaphragm member is formed from the first fluoropolymer material PTFE, and a valve seat abutment member (i.e., valve body portion) having a valve seat abutment surface and a recess disposed on the opposite side of the valve seat abutment surface is formed from a second fluoropolymer material PFA that can be injection molded. The rod-shaped portion and the recess are fitted together so that the outer peripheral concave-convex surface of the rod-shaped portion formed on the diaphragm member closely engages with the inner peripheral concave-convex surface of the recess formed on the valve seat abutment member, thereby engaging the diaphragm member and the valve seat abutment member. Furthermore, Patent Document 1 discloses a method for manufacturing a fluid control valve, which involves an embedding molding step in which a second cylinder is injection molded from a second fluorinated resin material while a first cylinder formed from a first fluorinated resin material is embedded therein. The first cylinder is then machined into the shape of the aforementioned diaphragm member, and the second cylinder is machined into the shape of the aforementioned valve seat abutment member. Patent Document 2 discloses a method for manufacturing a fluid control machine, which constructs a valve body by combining a body component and a seat abutment member that abuts against a valve seat. The combined body is manufactured by cutting the material bond obtained by melting the contact surfaces of the seat abutment member material and the body component material using infrared light irradiation or a heating plate. [Previous Technical Documents] [Patent Documents]

[0005] Patent Document 1: Japanese Patent No. 6873991 Patent Document 2: Japanese Patent Application Publication No. 2020-200840 Summary of the Invention

[0006] [The problem that the invention aims to solve] As disclosed in Patent Document 1, when two resin molded bodies made of different fluoropolymer materials are joined by the engagement of their concave and convex surfaces (mechanical joining), when the valve body and valve seat impact the resin joint, for example, during valve closure, slight gaps may form between the concave and convex surfaces due to differences in material hardness. Furthermore, due to temperature changes in the fluid, the joint may expand and contract, potentially creating further gaps between the concave and convex surfaces. Especially in fluid machinery such as valves, if liquid intrudes and accumulates in these gaps, it can lead to deterioration of the valve body and a problem of particle accumulation over time.

[0007] Furthermore, as disclosed in Patent Document 1, when a joint is formed by insert molding, the temperature difference between the molded body that becomes the insert and the injection-molded resin material increases, which may cause thermal strain on the uneven surfaces and reduce the strength of the joint surface. Similarly, as disclosed in Patent Document 2, when two resin molded bodies are fused at the joint surface by an infrared beam or a heating plate, the temperature difference between the molten joint surface and the unmolded part increases, which may cause thermal strain and reduce the strength of the joint surface. [Technical means to solve the problem]

[0008] Therefore, the object of the present invention is to solve the problems existing in the prior art by joining two resin molded bodies formed of dissimilar fluorinated resin materials in a manner that is not mechanically bonded and does not cause a reduction in the strength of the joint surface.

[0009] In view of the above objectives, the present invention provides a method for manufacturing a resin bond, which manufactures a resin bond system for bonding two resin molded bodies formed of different fluorinated resin materials, comprising the following steps: forming a first resin assembly having a cylindrical receiving portion from a first fluorinated resin material, wherein the first fluorinated resin material gels and maintains its shape above its melting point; receiving a second resin assembly formed from a second fluorinated resin material in the receiving portion, wherein the second fluorinated resin material melts into a liquid above its melting point; and heating the first resin assembly containing the second resin assembly in the receiving portion to above the melting points of the first and second fluorinated resin materials, followed by cooling, thereby transforming the first resin assembly into a first resin molded body and the second resin assembly into a second resin molded body, and bonding the first resin molded body and the second resin molded body together.

[0010] In the above-described method for manufacturing a resin composite, a second resin assembly made of a second fluorinated resin material is housed within a barrel-shaped receiving portion of a cup-shaped first resin assembly formed from a first fluorinated resin material. Therefore, the second fluorinated resin material can be easily supported within the first resin assembly regardless of its shape. Furthermore, since the first resin assembly is formed from a first fluorinated resin material that can gel (i.e., become colloidal) and maintain its shape even when it melts above its melting point, even if the second resin assembly made of the second fluorinated resin material melts and becomes liquid at a temperature higher than the melting point of the first and second fluorinated resin materials (i.e., the higher of the melting points of the first and second fluorinated resin materials), it can still maintain its state of being supported within the receiving portion of the first resin assembly. Furthermore, when the first resin assembly containing the second resin assembly is housed in the heating and receiving section, both the first and second resin assemblies are heated to above their melting points and melted, causing the first fluorinated resin material constituting the first resin assembly and the second fluorinated resin material constituting the second resin assembly to become one. Cooling this process allows for the creation of a molded body where the first resin assembly formed from the first fluorinated resin material and the second resin assembly formed from the second fluorinated resin material are molded as one (hereinafter referred to as "integral melt molding"), thus forming a single bonded body. Since the first and second resin molded bodies are heated and melted into one body, the generation of thermal strain can be suppressed.

[0011] In the above-described method for manufacturing resin conjugates, it is preferable that the first resin assembly is formed into a cup shape with a recess at its end.

[0012] Alternatively, the first resin assembly may include a cylindrical tubular body, with the interior of the tubular body serving as the receiving portion. In this case, the first resin assembly is preferably composed of a cylindrical tubular body and a solid rod-shaped or plate-shaped body disposed adjacent to the lower part of the tubular body.

[0013] In the above-described method for manufacturing a resin assembly, the first resin assembly can be a round bar or plate formed by molding the first fluorinated resin material, or a round bar or plate formed by molding the first fluorinated resin material and then cutting it. Alternatively, the first resin assembly can be a cold-pressed or pre-formed product of the first fluorinated resin material.

[0014] Furthermore, in this resin assembly manufacturing method, the second resin assembly can also be formed by shaping the second fluorinated resin material into a shape and size that can be housed within the housing portion. In this case, the second resin assembly is formed by cold pressing or pre-forming the second fluorinated resin material into a shape and size that can be housed within the housing portion. Moreover, the second resin assembly can also be composed of powder or particles of the second fluorinated resin material. Since the second fluorinated resin material is housed and supported within the housing portion of the first resin assembly, even materials that melt and become liquid above their melting point can take on various forms.

[0015] It is preferable that the first fluorinated resin material is polytetrafluoroethylene (PTFE) and the second fluorinated resin material is perfluoroalkoxyalkane (PFA).

[0016] As another embodiment, the above-described resin bonding body manufacturing method can include a diaphragm manufacturing step, which involves manufacturing a diaphragm for a diaphragm valve from the resin bonding body. The diaphragm valve includes a diaphragm portion and a valve body portion supported at the center of the diaphragm portion and in contact with or away from a valve seat. The diaphragm manufacturing step further includes the following steps: cutting the portion of the resin bonding body formed by the second resin molding body to form at least the portion of the valve body portion that abuts against the valve seat, and cutting the portion of the resin bonding body formed by the first resin molding body to form the remaining portions of the diaphragm portion and the valve body portion.

[0017] In the diaphragm manufacturing steps described above, a diaphragm portion capable of repeated deformation can be formed from PTFE, which has high flexural durability, and a portion of the valve body portion that at least abuts the valve seat can be formed from PFA, which has low dust generation. Therefore, while ensuring the flexural durability of the diaphragm portion, it is possible to suppress the generation of particles caused by contact or separation between the valve body portion and the valve seat.

[0018] As another embodiment, the above-described resin bonding body manufacturing method can include a diaphragm valve manufacturing step, in which a diaphragm valve is manufactured from the resin bonding body. The diaphragm valve includes a valve body and a diaphragm. The valve body forms a first flow path, a second flow path, and a valve chamber communicating with the first flow path and the second flow path. The diaphragm includes a diaphragm portion and a valve body portion supported in the center of the diaphragm portion. The diaphragm valve manufacturing step further includes the step of machining the resin bonding body to form the first flow path, the second flow path, and the valve chamber by forming the valve seat at least on the second resin molding body of the resin bonding body.

[0019] In the aforementioned diaphragm valve manufacturing process, the valve seat, which is in contact with or away from the valve body and is prone to generating particles, can be manufactured from a second resin molded from PFA, which has low dust generation properties. This suppresses dust generation caused by contact or separation between the valve body and the valve seat. Furthermore, since the remaining part of the diaphragm valve body can be manufactured from PTFE, which is cheaper than PFA, the amount of PFA used in the diaphragm valve (specifically, the valve body) can be reduced compared to forming the entire valve body from PFA, thereby lowering raw material costs.

[0020] [Effects Compared to Prior Art] According to the present invention, when a first resin assembly containing a second resin assembly is heated within a cylindrical receiving portion, both the first and second resin assemblies are heated to above their melting points, causing the first and second fluorinated resin materials constituting the first and second resin assemblies to melt and integrate. At this time, since the first resin assembly will gel and maintain its shape, the molten second resin assembly will be supported within the cylindrical receiving portion that supports the first resin assembly, thus becoming integrated with it. Upon cooling, the first resin molded body formed from the first fluorinated resin material and the second resin molded body formed from the second fluorinated resin material are integrally melt-molded, enabling the manufacture of a bonded body. Because it is possible to manufacture molded bodies of dissimilar fluorinated resins that are joined together by integral melt molding, when manufacturing a diaphragm from the integral body, even if subjected to impact during valve closure, gaps can be prevented from forming between the joint surfaces of the two resin molded bodies. Furthermore, because the two resin assemblies are heated simultaneously, the generation of thermal strain can be suppressed, thereby preventing a decrease in the strength of the joint surface between the first and second resin molded bodies. Simple Explanation of the Diagram

[0021] Figure 1 is a cross-sectional view showing the overall structure of one embodiment of a diaphragm valve having a valve body and a diaphragm manufactured according to the resin bonding manufacturing method of the present invention. Figure 2 is a perspective view illustrating a first embodiment of the resin bond manufacturing method according to the present invention. Figure 3 is a cross-sectional view of a resin joint manufactured according to the resin joint manufacturing method of the present invention. Figure 4 is a perspective view illustrating a second embodiment of the resin bond manufacturing method according to the present invention. Figure 5 is a perspective view illustrating a third embodiment of the resin bond manufacturing method according to the present invention. Figure 6 is a cross-sectional view of the resin joint shown in Figure 3, which is used to illustrate the steps of machining the resin joint shown in Figure 3 to manufacture the diaphragm of the diaphragm valve shown in Figure 1. The cross-section shows the shape of the resin joint after machining, which is superimposed on the resin joint, with dashed lines. Figure 7 is a cross-sectional view showing a diaphragm manufactured by machining the resin bond shown in Figure 6. Figure 8 is a cross-sectional view showing the deformed shape of a diaphragm manufactured by machining the resin bond shown in Figure 3. Figure 9 is a cross-sectional view of the resin joint shown in Figure 3, which is used to illustrate the steps of machining the resin joint shown in Figure 3 to manufacture the valve body of the diaphragm valve shown in Figure 1. The cross-section of the resin joint, which overlaps the resin joint and has been cut, is shown in dashed lines. Figure 10 is a cross-sectional view showing the valve body manufactured by machining the resin joint shown in Figure 9. Figure 11 is a cross-sectional view showing a first deformed form of a resin bond manufactured according to the resin bond manufacturing method of the present invention. Figure 12 is a cross-sectional view showing the first deformed form of the valve body manufactured by machining the resin joint shown in the first deformed form of Figure 11. Figure 13 is a cross-sectional view showing a second modified form of a resin bond manufactured according to the resin bond manufacturing method of the present invention. Figure 14 is a cross-sectional view showing a second deformed form of the valve body manufactured by machining the resin joint shown in the second deformed form of Figure 13. Figure 15 is a cross-sectional view showing other variations of the diaphragm manufactured by machining the resin bond shown in Figure 3. Figure 16 is a cross-sectional view showing a third modified form of a resin bond manufactured according to the resin bond manufacturing method of the present invention. Figure 17 is a cross-sectional view showing the third modified form of the valve body manufactured by machining the resin joint shown in the third modified form of Figure 16. Figure 18 is a cross-sectional view showing a wafer transport box manufactured by machining a resin bond produced according to the resin bond manufacturing method of the present invention. Figure 19 is a cross-sectional view showing a water tank manufactured by machining a resin joint produced according to the resin joint manufacturing method of the present invention. Implementation

[0022] The following describes an embodiment of the resin bond manufacturing method according to the present invention with reference to the drawings.

[0023] Referring first to FIG1, the overall structure of one embodiment of a diaphragm valve employing a valve body and a diaphragm manufactured by a resin bonding body manufactured according to the resin bonding body manufacturing method of the present invention will be described. The diaphragm valve 11 includes a valve body 13, a diaphragm 15, and a drive unit 17 for driving the diaphragm 15, the drive unit 17 being mounted on the upper part of the valve body 13.

[0024] A valve chamber 19 is formed at the upper center of the valve body 13, and a first flow path and a second flow path are formed communicating with the valve chamber 19. In the valve chamber 19, an annular valve seat 21 is formed around the opening of the valve chamber 19 from the first flow path, and is either in contact with or away from the diaphragm 15. In the embodiment shown in the figure, as the first flow path, an inlet flow path 25 is formed extending from the inlet 23 formed on one side of the valve body 13 and opening at the bottom center of the valve chamber 19; and as the second flow path, an outlet flow path 29 is formed extending from the outlet 27 formed on the other side of the valve body 13 and opening at the side of the valve chamber 19; and an annular valve seat 21 is formed around the opening of the valve chamber 19 from the inlet flow path 25.

[0025] The drive unit 17 includes a drive unit housing 31 mounted on the upper part of the valve body 13 and having a mechanism storage space inside, a cover member 33 mounted on the upper part of the drive unit housing 31, a rod 35 connected to the diaphragm 15, and a drive mechanism that is housed in the mechanism storage space and drives the rod 35. In this embodiment, a cylinder portion is formed inside the drive unit housing 31 as the mechanism storage space, and the drive mechanism is composed of a piston 37 housed in the cylinder portion and a coil spring 39 serving as a biasing member.

[0026] The piston 37 has a piston body 37a that is slidably housed within the cylinder portion of the drive housing 31, and a guide shaft 37b extending upward from the piston body 37a. A rod 35 is connected to the piston body 37a and extends downward from the piston body 37a. The rod 35 is slidably inserted into a through hole provided at the bottom of the drive housing 31, and a diaphragm 15 (specifically, the valve body 15c described later) is connected to its front end. The outer peripheral surface of the piston body 37a contacts the inner peripheral surface of the cylinder portion in a vertically slidable manner, dividing the internal space of the cylinder portion into an upper space 41 and a lower space 43. The upper space 41 is surrounded by the upper surface of the piston body 37a, the inner peripheral wall of the cylinder portion, and the top surface of the cylinder portion (i.e., the lower surface of the cover member 33). The lower space 43 is surrounded by the lower surface of the piston body 37a, the inner peripheral wall of the cylinder portion, and the bottom surface of the cylinder portion (i.e., the bottom surface of the drive housing 31). The guide shaft 37b is a through hole provided in the through cover member 33 so as to guide the up and down movement of the piston 37.

[0027] The cover member 33 has a vent 45 that communicates with the cylinder section which is divided into an upper space 41, allowing for ventilation between the upper space 41 and the outside. Furthermore, a working fluid supply port 47 is formed on the side of the drive housing 31, communicating with the bottom of the cylinder section which is divided into a lower space 43, allowing for the supply of working fluid to the lower space 43. Additionally, a coil spring 39 is disposed in a compressed state between the lower surface of the cover member 33 (the top surface of the cylinder section) and the upper surface of the piston body 37a.

[0028] The diaphragm 15 includes a diaphragm portion 15b having a base portion 15a protruding downwards in the central portion and a valve body portion 15c joined to the base portion 15a. The diaphragm portion 15b is formed to extend radially outward from the outer periphery of the upper end of the base portion 15a, and the outer periphery of the diaphragm portion 15b is approximately circular. The outer peripheral edge of the diaphragm portion 15b is sandwiched between the upper surface of the area surrounding the upper opening of the valve chamber 19 of the valve body 13 and the bottom surface of the drive housing 31. The valve body portion 15c has a shape with a frustum of a cone connected to a cylinder, and its bottom surface (valve seat abutment surface) is configured to face the valve seat 21. The base portion 15a is joined to the valve body portion 15c by smoothly connecting its circumferential surface to the side surface of the frustum of a cone portion. Thus, the diaphragm 15, in a state where it supports the valve body 15c above the valve chamber 19 through the diaphragm portion 15b, divides the space between the valve chamber 19 and the drive portion 17.

[0029] In the embodiment shown in the figure, a connecting hole 49 is provided, extending from the base portion 15a through the diaphragm 15 to the valve body portion 15c. The connecting hole 49 includes a small-diameter hole portion 49a located near the drive portion 17 and a large-diameter hole portion 49b located at the lower end of the connecting hole 49 within the valve body portion 15c. The front end (lower end) of the rod 35 is provided with a locking portion 35a that is larger than the middle portion. By pressing the locking portion 35a through the small-diameter hole portion 49a into the large-diameter hole portion 49b, the diaphragm 15 and the rod 35 are connected. With the up and down movement of the piston 37, the diaphragm 15 (more specifically, its valve body portion 15c) passes through the rod 35 so that the diaphragm 15 (more specifically, its valve body portion 15c) can contact or move away from the valve seat 21. As described above, the rod 35 is connected to the valve body 15c, so even if the base 15a is separated from the valve body 15c, the rod 35 can be prevented from detaching from the diaphragm 15. In the embodiment shown in the figure, although the rod 35 is connected to the valve body 15c, it can also have other configurations as long as the valve body 15c can contact or move away from the valve seat 21 by the piston 37 through the up and down movement of the rod 35. For example, the rod 35 can be connected only to the base 15a that is connected to the valve body 15c.

[0030] In the embodiment shown in the figure, the valve body 13 includes a first valve body portion 13a forming the valve chamber 19 and a remaining second valve body portion 13b. The first valve body portion 13a is formed from a low-dust-generating perfluoroalkoxyalkane (PFA), and the second valve body portion 13b is formed from polytetrafluoroethylene (PTFE), which is cheaper than PFA and has high flexural durability. Thus, since the valve chamber 19, including the valve seat 21 which is in contact with or away from the valve body portion 15c, is formed from PFA, the generation of particles caused by the contact between the valve body portion 15c and the valve seat 21 can be suppressed. Furthermore, since the second valve body portion 13b is formed from PTFE, which is cheaper than PFA, compared to a valve body 13 entirely formed from PFA, the generation of particles can be suppressed and the raw material cost of the valve body 13 can be reduced. Furthermore, since the diaphragm 15, especially the diaphragm portion 15b, involves repeated bending, the base portion 15a and the diaphragm portion 15b are formed from PTFE, which has high bending durability. On the other hand, the valve body portion 15c, due to its contact with the valve seat 21, is prone to generating particles, and therefore is formed from PFA, which has low self-dust generation. The PTFE or PFA used to form the valve body 13 or the diaphragm 15 can be chemically modified or ionized radiation-bridging materials. In particular, chemically modified PTFE is preferred. The drive housing 31, cover member 33, rod 35, and piston 37 of the drive portion 17 can be formed from suitable materials such as polyvinylidene fluoride (PVDF), PTFE, PFA, or polychlorotrifluoroethylene (PCTFE).

[0031] As described above, in the embodiment shown in the figure, the valve body 13 and the diaphragm 15 include portions formed from dissimilar fluoropolymer materials such as PTFE and PFA. Conventionally, two portions formed from dissimilar materials are mechanically joined, as described in Patent Document 1, or welded or bonded using an adhesive, as described in Patent Document 2. However, in the case of mechanical joining, the portion of the diaphragm 15 (especially its valve body portion 15c) that is impacted by contact with or away from the valve seat 21 will, due to deformation caused by the impact, create gaps at the interface between, for example, the base portion 15a and the valve body portion 15c. Material deterioration due to the intrusion of liquid from the valve chamber 19 into these gaps makes it easier for particles to be generated. In the case of welding, since only the interface between, for example, the base portion 15a and the valve body portion 15c, is heated and melted by an infrared beam, thermal strain will occur due to the temperature difference between the molten and unmolded portions, resulting in a decrease in the strength of the interface. Furthermore, when using an adhesive, especially since the base portion 15a and the valve body portion 15c are disposed within the valve chamber 19, there is a risk that components of the adhesive may dissolve from the interface between the base portion 15a and the valve body portion 15c and mix into the liquid within the valve chamber 19.

[0032] In this invention, a first resin assembly 51 having a cylindrical receiving portion 51a is made from PTFE. A second resin assembly 53 made of PFA is contained in the receiving portion 51a of the first resin assembly 51 and heated to a temperature above the melting point of PTFE and PFA (i.e., the higher of the melting point of PTFE and PFA). The first resin assembly 51 formed from PTFE and the second resin assembly 53 formed from PFA are melted and integrally formed (hereinafter referred to as "integral melt molding") to produce an integrally bonded resin body. The resin body is then machined to manufacture a valve body 13 and a diaphragm 15, as described above, including portions formed from PTFE and portions formed from PFA. When heating to above the melting points of the first resin assembly 51 and the second resin assembly 53 (i.e., the PTFE and PFA that constitute the two respectively), it is not particularly necessary to carry out the process under pressure, and it can be carried out in a pressureless state (without being pressurized).

[0033] Furthermore, in this specification, "integral melt molding" refers to the process of melting and integrating two objects to form a single, unified joint. This excludes "fusion welding," which involves melting only the joint surfaces of solidified objects, or "embedding molding," which involves melting only one side. These are distinct concepts. Further, in this specification, "resin assembly" refers to an object in which powdered or granular resin material is shaped into a specified form. This includes objects formed by cold pressing or preforming resin powder into a specified shape, objects formed by cutting and machining resin material shaped into flat or rod-like forms through compression molding or injection molding into a specified shape, and objects in which powdered or granular resin material is filled into a mold, regardless of whether it is solid or not. Moreover, a "resin assembly" does not necessarily need to be a single unit; it can be constructed by combining multiple separate components.

[0034] Referring to Figures 2 and 3, a first embodiment of a method for manufacturing a resin joint that joins a first resin molded body formed from a first fluorinated resin material to a second resin molded body formed from a second fluorinated resin material is described in detail below. Examples using PTFE as the first fluorinated resin material and PFA as the second fluorinated resin material are given below. Chemically modified or ionizingly bridging materials can also be used as PTFE or PFA; chemically modified PTFE is particularly preferred.

[0035] First, a first resin assembly 51 with a cylindrical receiving portion 51a is made from PTFE, which is the first fluoropolymer material. In the first embodiment, as shown in FIG2, a cup-shaped first resin assembly 51 with a recess at the upper end that functions as the receiving portion 51a is made. The first resin assembly 51 can be made by cutting the upper end of a rod or plate formed from PTFE using a mold through a moldless baking method or thermoforming to provide the recess. Similarly, it can also be made by compressing a cup-shaped rod or plate with a recess at the upper end of PTFE using a mold through a moldless baking method or thermoforming. Furthermore, the first resin assembly 51 does not need to be integral; it can also be made by combining, for example, a cylindrical tubular body and a solid rod or plate (including sheet-like objects) disposed adjacent to its lower part. In this case, the tubular body can also be joined to the rod or plate by screwing or interlocking. Furthermore, when tubular and rod-shaped or plate-shaped (including sheet-like) materials are integrated, they can also be manufactured separately and then joined by welding. Welding can be performed by laser welding, hot plate welding, hot air welding, or firing. When the first resin assembly 51 is made from PTFE rods, PTFE rods can also be made by extrusion molding. Furthermore, a second resin assembly 53, as shown in FIG. 2, having a shape and size that can be housed in the housing portion 51a (recess) of the first resin assembly 51, can be made from PFA, a second fluoropolymer material. Preferably, the second resin assembly 53 is a rod-shaped material with an outer peripheral shape that is complementary to the inner peripheral surface of the cylindrical housing portion 51a. However, since the second resin assembly is liquefied by heating to above its melting point and becomes a shape complementary to the inner peripheral surface of the housing portion 51a, it is sufficient that the shape and size can be housed in the housing portion 51a. Furthermore, the height of the second resin assembly can be approximately equal to, or shorter than, the depth of the receiving portion 51a, provided that it does not overflow from the receiving portion 51a when heated above its melting point and liquefied. The second resin assembly can be directly manufactured, for example, from PFA by extrusion molding or injection molding using a mold.

[0036] Next, the object containing the second resin assembly 53 within the receiving portion 51a (recess) of the first resin assembly 51 is heated and fired in a firing furnace. The first resin assembly 51, being formed from PTFE, will gel and maintain a cup shape even when heated above its melting point. On the other hand, the second resin assembly 53, being formed from PFA, will liquefy when heated above its melting point. However, because the second resin assembly 53 is contained within the receiving portion 51a of the first resin assembly 51, which gels and maintains a cup shape even when heated above its melting point, it remains supported within the receiving portion 51a even when it melts into a liquid. Therefore, a mold is not needed to maintain contact with PTFE even when the PFA liquefies, reducing manufacturing costs. The first resin assembly 51 and the second resin assembly 53 are integrally melt-molded and bonded together by heating to a temperature above the melting points of the first fluoropolymer PTFE and the second fluoropolymer PFA (i.e., the higher of the melting points of PTFE and PFA). Furthermore, the heating of the first resin assembly 51 and the second resin assembly does not require a pressurized environment and can be carried out in a pressureless state (without any special pressure). This method of integrally melting and molding the first resin assembly 51 and the second resin assembly 53 by heating in a pressureless state, unlike other methods, can suppress the generation of strain or residual stress.

[0037] With the second resin assembly 53 housed in the receiving portion 51a (recess) of the first resin assembly 51, the first resin assembly 51 and the second resin assembly 53 are heated in a sintering furnace to above the melting points of PTFE and PFA, and then cooled. As shown in Figure 3, the first resin assembly 51 becomes the first resin molded body 55, while the second resin assembly 53 becomes the second resin molded body 57 with a shape that is approximately complementary to the receiving portion 51a (recess). Overall, the first resin molded body 55 and the second resin molded body 57 become a resin bonded body 59 that is joined together across its overall contact surface.

[0038] The resin bond 59 manufactured in this way, because the first resin molded body 55 and the second resin molded body 53 are bonded together across their entire contact surface, will not produce gaps between the first resin molded body 55 and the second resin molded body 57 even when external force is applied to the resin bond 59. Furthermore, because the first resin molded body 55 and the second resin molded body 57 are melted as a whole by heating, no thermal strain is generated, and the strength of the joint surface between the first resin molded body 55 and the second resin molded body 57 will not decrease due to thermal strain. In addition, when a rod-shaped test piece made using the resin bond 59 manufactured by the above method is subjected to tensile testing, other parts will break before the joint between the first resin molded body 55 and the second resin molded body 57, confirming that the resin bond 59 has a bonding strength sufficient to prevent peeling at the joint.

[0039] According to the present invention, in a method for manufacturing a resin bond 59 that joins a first resin molded body 55 formed from a first fluorinated resin material and a second resin molded body 57 formed from a second fluorinated resin material, a first resin assembly 51 having a receiving portion 51a is made from the first fluorinated resin material, and a second resin assembly 53 composed of the second fluorinated resin material is received in the receiving portion 51a (recess) of the first resin assembly 51. As long as the second fluorinated resin material of the liquefied second resin assembly 53 can be supported in the receiving portion 51a of the colloidal first resin assembly 51 when heated above the melting points of the first and second fluorinated resin materials, the method is not limited to the first embodiment.

[0040] In the first embodiment, PFA powder or particles filled in the receiving portion 51a (recess) of the first resin assembly 51 can also be used as the second resin assembly 53, replacing the second resin assembly 53 made from PFA by molding methods such as extrusion molding or injection molding. Since the first resin assembly 51 is formed in a cup shape, even if the second resin assembly is composed of PFA powder or particles, it can be supported in the receiving portion 51a. Furthermore, when the PFA powder or particles of the second fluoropolymer material are heated above the melting point in a firing furnace, they melt and liquefy in the receiving portion 51a of the first resin assembly 51, which can maintain its shape even when gelled, similar to the second resin assembly 53 in the resin bond manufacturing method according to the first embodiment. Therefore, the PFA of the second fluoropolymer material is in seamless contact with the bottom and peripheral surfaces of the receiving portion 51a of the first resin assembly 51, and is integrated with the PTFE of the gelled first resin assembly 51. By cooling it, similar to the resin joint manufacturing method of the first embodiment, a resin joint 59 can be manufactured without using a mold, in which a first resin molded body 55 formed from a first resin assembly 51 and a second resin molded body 57 formed from a second resin assembly 53 are joined together. Furthermore, the resin joint 59 manufactured by this method can have the same characteristics as the resin joint 59 manufactured according to the resin joint manufacturing method of the first embodiment.

[0041] In a second embodiment of the resin assembly manufacturing method for manufacturing a resin assembly 59 that joins the first resin molded body 55 and the second resin molded body 57, a cup-shaped object having a cylindrical receiving portion 51a (recess) formed by cold pressing PTFE powder can be used as the first resin assembly 51 instead of the molded body made from PTFE powder in the first embodiment. Furthermore, an object having a shape and size that can be housed within the receiving portion 51a of the first resin assembly 51 can be formed by cold pressing PFA powder, replacing the molded body made from PFA powder in the first embodiment as the second resin assembly 53. Additionally, similar to the first embodiment, the first resin assembly 51 does not need to be integral; it can be manufactured by combining, for example, a cylindrical tubular body and a solid rod-shaped body or plate-shaped body (including sheet-like objects) separately cold-pressed and arranged adjacent to its lower part. Furthermore, even when tubular bodies and rod-shaped or plate-shaped bodies (including sheet-like objects) are integrated into one unit, they can also be manufactured separately and then joined together by welding. Welding can be performed by methods such as laser welding, hot plate welding, hot air welding, or firing.

[0042] The cup-shaped first resin assembly 51, formed by cold pressing and having a cylindrical receiving portion 51a (recess) at its upper end, also maintains its cup shape even when melted, similar to the cup-shaped first resin assembly 51 formed by extrusion molding or injection molding, when heated above its melting point in a firing furnace. Similarly, the second resin assembly 53, formed by cold pressing, also melts and liquefies when heated above its melting point in a firing furnace, similar to the second resin assembly 53 formed by extrusion molding or injection molding. Therefore, the PFA of the second fluorinated resin material is in seamless contact with the bottom and peripheral surfaces of the receiving portion 51a of the first resin assembly 51, and is integrated with the PTFE of the gelled first resin assembly 51. By cooling it, similar to the resin bond manufacturing method of the first embodiment, a resin bond 59 can be manufactured without a mold, by integrally melting and molding the first resin molded body 55 formed by the first resin assembly 51 and the second resin molded body 57 formed by the second resin assembly 53 together. Furthermore, the resin bond 59 manufactured in this way can have the same characteristics as the resin bond 59 manufactured according to the resin bond manufacturing method of the first embodiment.

[0043] In the second embodiment of the resin bond manufacturing method, as shown in FIG4, the first resin assembly 51, in which the second resin assembly 53 is housed in the receiving portion 51a (recess), is placed in the mold 61, and the side of the mold 61 in which the second resin assembly 53 is placed is covered by a heat insulation material 63. The mold 61 is then heated in a firing furnace. By covering the side of the second resin assembly 53, which is composed of PFA with a low melting point, with the heat insulation material 63, the heat of the firing furnace is difficult to transfer to the second resin assembly 53, and the PTFE forming the first resin assembly 51 and the PFA forming the second resin assembly 53 can melt almost simultaneously.

[0044] In the second embodiment of the resin assembly manufacturing method, the second resin assembly 53 can also be made by replacing the second resin assembly 53 manufactured by cold pressing with PFA powder or granules filled in the receiving portion 51a (recess) of the first resin assembly 51. The use of granules instead of powder PFA in the second fluoropolymer material can delay the melting time.

[0045] Furthermore, in a third embodiment of the resin assembly manufacturing method for the resin assembly 59 that joins the first resin molded body 55 and the second resin molded body 57, a cup-shaped object with a recess functioning as a receiving portion 51a can be formed from PTFE powder through preforming, replacing the molded body made from PTFE powder in the first embodiment as the first resin assembly 51. Similarly, an object with the shape and size to be received within the receiving portion 51a of the first resin assembly 51 can be formed from PFA powder through preforming, replacing the molded body made from PFA powder in the first embodiment as the second resin assembly 53. The resin assembly 53 is then manufactured using a hot molding method. In this case, the first resin assembly 51, in which the second resin assembly 53 is received within the receiving portion 51a, is placed in the mold 61 and heated. In addition, similar to the first embodiment, the first resin assembly 51 does not need to be integral; it can be made into a composite that is pre-molded separately from the cylindrical tubular body and the solid rod or plate (including sheet-like objects) disposed adjacent to its lower part and then combined with each other.

[0046] The first resin assembly 51, formed by preforming and having a recessed portion at its upper end that functions as a receiving portion 51a, also gels and maintains its cup shape when heated above its melting point, similar to the first resin assembly 51 formed by extrusion molding or injection molding. Similarly, the second resin assembly 53, formed by preforming, also melts and liquefies when heated above its melting point, similar to the second resin assembly 53 formed by extrusion molding or injection molding. Therefore, the PFA of the second fluorinated resin material is in seamless contact with the bottom and peripheral surfaces of the receiving portion 51a of the first resin assembly 51, and is integrated with the gelled PTFE of the first resin assembly 51. By cooling it, a resin joint 59 can be manufactured in the same way as the resin joint manufacturing method of the first embodiment, by integrally melting and molding a first resin molded body 55 formed by a first resin assembly 51 and a second resin molded body 57 formed by a second resin assembly 53 together. Furthermore, the resin joint 59 manufactured in this way can also have the same characteristics as the resin joint 59 manufactured by the first resin joint manufacturing method.

[0047] In the third embodiment of the resin bond manufacturing method, as shown in FIG5, a first resin assembly 51, in which a second resin assembly 53 is housed within a receiving portion 51a (recess), is placed in a mold 61. The portion of the mold 61 containing the second resin assembly 53 is heated around the mold by a first strip heater 65, and the lower portion is heated by a second strip heater 67. By using different strip heaters 65 and 67, the heating temperature of the first strip heater 65, used to heat the portion containing the second resin assembly 53 composed of PFA with a relatively low melting point, can be set lower than the heating temperature of the second strip heater 67, used to heat the portion containing the first resin assembly 51 composed of PTFE with a relatively high melting point. This allows the PTFE forming the first resin assembly 51 and the PFA forming the second resin assembly 53 to melt almost simultaneously. In addition, the first strip heater 65 and the second strip heater 67 only need to be able to heat the mold, and other heating appliances such as rod heaters can also be used instead.

[0048] In the third embodiment of the resin assembly manufacturing method, the second resin assembly 53 can also be made by replacing the pre-formed second resin assembly 53 with PFA powder or granules filled in the receiving portion 51a (recess) of the first resin assembly 51. The use of granules instead of powder allows for a longer melting time for PFA.

[0049] The resin bond 59 thus manufactured can be used as an intermediate material for various components. The following is an example of a method for manufacturing a diaphragm valve 11 from the resin bond 59.

[0050] Figure 6 shows a method for manufacturing the diaphragm 15 from the resin bond 59. By machining the resin bond 59 as indicated by the dashed lines in Figure 6, the diaphragm 15 shown in Figure 7 can be manufactured. The diaphragm 15 shown in Figure 7 is used in the diaphragm valve 11 shown in Figure 1. The diaphragm portion 15b of the diaphragm 15, which has a base portion 15a in the center, is made from a first resin molded body 55 formed from a first fluorinated resin material in the resin bond 59, specifically from PTFE, which has high flexural durability. The valve body portion 15c of the diaphragm 15 is made from a second resin molded body 57 formed from a second fluorinated resin material in the resin bond 59, specifically from PFA, which has low dust generation. Since the first resin molded body 55 and the second resin molded body 57 of the resin bond 59 are integrally melt-molded, the interface (joining surface) between the base portion 15a and the valve body portion 15c of the diaphragm 15 is also integrally joined. Therefore, even when the valve body 15c abuts against the valve seat 21 and undergoes impact deformation during valve closure, no gap will form at the interface between the base 15a and the valve body 15c, preventing the reduction in strength caused by liquid intrusion into the valve chamber 19. Furthermore, since the first resin assembly 51 and the second resin assembly 53 are heated and cooled together as a whole, the generation of thermal strain can be suppressed, as well as the reduction in strength caused by thermal strain.

[0051] Furthermore, by changing the cutting position as shown in Figure 6, it is possible to manufacture only the second resin molded body 57 of the resin bond 59 near the valve seat abutment surface of the valve seat 21, as shown in Figure 8, and to form only the PFA with low self-dust content near the abutment surface of the valve seat 21. In this case, the connecting hole 49 is only provided in the base portion 15a. Since the first resin molded body 55 and the second resin molded body 57 of the resin bond 59 are integrally fused, the base portion 15a and the valve body portion 15c are formed as a whole. Therefore, with the up and down movement of the rod 35, the valve body portion 15c moves through the base portion 15a and can contact or move away from the valve seat 21.

[0052] Figure 9 shows a method for manufacturing the valve body 13 from the resin bond 59. The valve body 13 shown in Figure 10 can be manufactured by machining the resin bond 59 as shown by the dashed lines in Figure 9. The valve body 13 shown in Figure 10 is used in the diaphragm valve 11 shown in Figure 1. The first valve body portion 13a, which has a valve chamber 19, is manufactured from a second resin molded body 57 formed from a second fluorinated resin material in the resin bond 59, specifically using PFA, which has low dust generation. The second valve body portion 13b, which has an inlet 23 and an outlet 27, is manufactured from a first resin molded body 55 formed from a first fluorinated resin material in the resin bond 59, specifically using PTFE, which is less expensive than PFA. The inlet flow path 25 and the outlet flow path 29 are configured to extend from the inlet 23 and the outlet 27 to the valve chamber 19, spanning the first valve body portion 13a and the second valve body portion 13b. The valve seat 21 provided in the first valve body portion 13a is formed of PFA with low dust generation. Therefore, even when the valve body portion 15c abuts against the valve seat 21 during valve opening and closing, the generation of particulate matter can be suppressed, thereby reducing the contamination of the liquid in the valve chamber 19 caused by the generated particulate matter. Furthermore, the first valve body portion 13a is made of a second resin molded body 57 formed from the relatively expensive PFA, and the second valve body portion 13b of the valve body 13 is made of a first resin molded body 55 formed from the relatively inexpensive PTFE. Therefore, compared to the situation where both the first valve body portion 13a and the second valve body portion 13b of the valve body 13 are made from PFA, the material cost of the valve body 13 can be reduced while suppressing the generation of particulate matter caused by the valve body portion 15c abutting against the valve seat 21.

[0053] Furthermore, by heating and cooling a third resin assembly, which is further disposed on top of the second resin assembly 53 located in the receiving portion 51a (recess) of the first resin assembly 51, to its melting point, a resin joint 59' can be manufactured. As shown in FIG11, the resin joint 59' is formed by integrally melting and molding a first resin molded body formed from the first fluorinated resin material and a second resin molded body formed from the second fluorinated resin material sandwiched between the first resin molded body formed from the first fluorinated resin material and the third resin molded body 69 formed from the third fluorinated resin material. PTFE is used as the first and third fluorinated resin materials, and PFA is used as the second fluorinated resin material. By performing the cutting process shown in the dashed lines in FIG11, the valve body 13' shown in FIG12 can be manufactured.

[0054] The valve body 13' includes, in addition to the second valve body portion 13b made from the first resin molding body 55 formed from the first fluorinated resin material and the first valve body portion 13a made from the second resin molding body 57 formed from the second fluorinated resin material, a third valve body portion 13c made from the third resin molding body 69 formed from the third fluorinated resin material. As the valve seat 21 is made from the second resin molding body 57, the valve chamber 19 is constructed to span the first valve body portion 13a and the third valve body portion 13c. Furthermore, the inlet 23 and outlet 27 of the valve body 13 are located in the second valve body portion 13b made from the first resin molding body 55, and the inlet flow path 25 and outlet flow path 29 are configured to extend from the inlet 23 and outlet 27 to the valve chamber 19, spanning the second valve body portion 13b made from the first resin molding body 55 made from the resin bonding body 59 and the first valve body portion 13a made from the second resin molding body 57. Such a valve body 13', only the part of the valve chamber 19 that contacts or moves away from the valve seat 21 when the valve is opened or closed, is made of PFA, which has low dust generation but relatively high cost. On the one hand, it can suppress the generation of particulate matter caused by the impact when the valve body 15c comes into contact with the valve seat 21 when the valve is closed, and on the other hand, it can further reduce the raw material cost compared to the valve body 13 shown in FIG10.

[0055] Furthermore, by heating a second resin assembly 53, which has a smaller volume than the storage portion 51a, placed inside the storage portion 51a (recess) of the first resin assembly 51, to a temperature above the melting point of the first and second fluorinated resin materials (i.e., a temperature higher than the melting point of the first and second fluorinated resin materials), and then cooling it, it is possible to manufacture a resin joint 59'', as shown in FIG. 13, in which only a portion of the storage portion 51a is filled with a second resin molded body formed from the second fluorinated resin material and integrally melt-molded together. If PTFE is used as the first fluorinated resin material and PFA is used as the second fluorinated resin material, and if the machining is indicated by dashed lines in FIG. 13, a valve body 13'' as shown in FIG. 14 can be manufactured. In the valve body 13'', the portion in the valve chamber 19 where only the valve seat 21 is formed is a first valve body portion 13a made of a second resin molded body 57 formed from a second fluorinated resin material, and the remaining portion is a second valve body portion 13b made of a first resin molded body 55 formed from a first fluorinated resin material. Only a portion of the valve chamber 19, where the valve body portion 15c contacts or moves away from the valve seat 21 during valve opening or closing, is formed of PFA, a material with low self-dust but relatively high cost. This suppresses the generation of particulate matter caused by the impact of the valve body portion 15c against the valve seat 21 during valve closing, and further reduces material costs compared to the valve body 13 shown in FIG. 12. Furthermore, the space of the valve chamber 19 overlaps with the portion of the receiving portion 51a not used as a second resin molded body, thus reducing unnecessary cutting and further suppressing material costs.

[0056] The above describes a method for manufacturing diaphragms 15, 15' or valve bodies 13, 13, 13'' of diaphragm valve 11 using resin couplings 59, 59', 59'' manufactured according to the resin coupling manufacturing method of the present invention. However, even if the resin couplings manufactured according to the resin coupling manufacturing method of the present invention are used to manufacture valve bodies or valve bodies of other types of valves such as pressure regulating valves or flow regulating valves, the same effects as the diaphragms 15, 15' or valve bodies 13, 13, 13'' of diaphragm valve 11 manufactured as described above can be achieved.

[0057] Next, the operation of the diaphragm valve 11 will be explained with reference to FIG1. ​​As shown in FIG1, when the operating fluid is not normally supplied to the drive unit 17 from the operating fluid supply port 47, the piston 37 of the drive unit 17 is biased downward by the coil spring 39 and pressed downward. As a result, the valve body 15c moves towards the valve seat 21 via the rod 35 and presses against the valve seat 21, and the diaphragm valve 11 is in the closed state as shown in FIG1. ​​At the same time, the diaphragm 15b, which supports the valve body 15c via the base 15a, also deforms away from the drive unit 17. From this state, when operating fluid is supplied to the operating fluid supply port 47 of the drive unit 17, the fluid pressure of the operating fluid flowing into the lower space 43 of the cylinder exerts an upward force on the piston body 37a, and the piston 37 is pressed upward against the biasing force of the coil spring 39. At this time, the air in the upper space 41 is released to the outside through the vent 45. As a result, the valve body 15c is moved away from the valve seat 21 by the rod 35, and the diaphragm valve 11 is opened. Simultaneously, the diaphragm 15b is deformed towards the drive unit 17. When the supply of operating fluid to the operating fluid supply port 47 is stopped, the piston 37 is once again biased downwards by the coil spring 39 and pressed downwards, pressing the valve body 15c against the valve seat 21, and it is closed again.

[0058] As described above, in the diaphragm valve 11, the valve body portion 15c repeatedly contacts or moves away from the valve seat 21. In particular, when the valve body portion 15c abuts against the valve seat 21, particles are easily generated due to impact. However, since the valve body portion 15c that abuts against the valve seat 21 in the diaphragm valve 11 is formed of PFA with low self-dust content, the generation of particles from the valve body portion 15c can be suppressed. Similarly, the first valve body portion 13a of the valve body 13 formed in the valve chamber 19 is also formed of PFA with low self-dust content, thus suppressing the generation of particles from the valve seat 21. Furthermore, the intermediate material of the diaphragm 15 is made into a resin bond 59, which is formed by heating and melting the first resin molded body 55 formed from PTFE and the second resin molded body 57 formed from PFA as a whole, and then bonding them together as a single unit through integral melt molding. Therefore, even if the valve body portion 15c is impacted and deformed by contacting the valve seat 21, no gap will be generated between the valve body portion 15c and the base portion 15a, and no thermal strain will occur. Thus, the strength reduction of the valve body 13 and the diaphragm 15 due to heating can be prevented. Furthermore, since the second valve body portion 13b, other than the first valve body portion 13a which repeatedly contacts or moves away from the valve body portion 15c, is formed from PTFE, which is cheaper than PFA, the increase in manufacturing cost of the valve body 13 can be suppressed compared to manufacturing the entire valve body 13 from PFA. In addition to the diaphragm valve 11 described above, the same effect can be obtained when the resin bonding body according to the present invention is applied to a pressure regulating valve or flow regulating valve having a base portion, a valve body portion, and a valve seat that contacts or moves away from the valve body portion.

[0059] The above description, with reference to the illustrated embodiments, outlines a method for manufacturing a resin bond according to the present invention, and a method for manufacturing a diaphragm 15 for a diaphragm valve using the resin bond 59 manufactured by this method, and a method for manufacturing a diaphragm valve 11 using the diaphragm 15. However, the present invention is not limited to the illustrated embodiments. For example, in the above description, PTFE is exemplified as the first fluorinated resin material, and PFA is exemplified as the second fluorinated resin material. However, as long as the first fluorinated resin material can gel and maintain its shape even when heated to above its melting point, and the second fluorinated resin material can melt and liquefy when heated to above its melting point, the first and second fluorinated resin materials are not limited to PTFE and PFA. For example, ethylene tetrafluoroethylene copolymer (ETFE), perfluoroethylene propene copolymer (FEP), or polyvinylidene fluoride (PVDF) can be used instead of PTFE as the second fluorinated resin material. Furthermore, in the resin bonding manufacturing method according to the present invention, as long as the second resin assembly 53 can be received in the receiving portion 51a, it is also possible to place the bottom of the cylindrical first resin assembly 51 on a mold, and close the bottom of the internal space of the cylindrical first resin assembly 51 with the mold to form a recess that functions as the receiving portion 51a, and receive the second resin assembly 53 in the recess formed in this way. In this case, it is preferable that the mold is barrel-shaped or disc-shaped.

[0060] Furthermore, the component made from the resin bond 59 can also be cut from an appropriate position to change which areas of the component are to be formed from different fluorinated resin materials. For example, by changing the cut position of the resin bond 59, it can be made not as the diaphragm 15 shown in FIG. 7 or the diaphragm 15' shown in FIG. 8, where the valve seat contact surface of the valve body portion 15c of the diaphragm 15 or the diaphragm 15' is entirely made from a second resin molding body formed from low-dust PFA, but as shown in FIG. 15, where only a portion of the valve seat contact surface of the diaphragm 15'' is made from the second resin molding body 57.

[0061] Furthermore, it is possible to adjust the arrangement of different fluorinated resin materials to correspond to desired locations, thereby changing the number of housing portions 51a in the first resin assembly 51 or the volume of the second resin assemblies 53 disposed within each housing portion 51a, to manufacture a resin bond 59. For example, three housing portions 51a are formed in the first resin assembly 51, and PTFE is used as the first fluorinated resin material and PFA is used as the second fluorinated resin material, as shown in FIG. 16. A resin bond 159 is manufactured in which second resin molded bodies 157A, 157B, and 157C made of the second fluorinated resin material are formed at mutually separated positions within the first resin molded body 155 made of the first fluorinated resin material. By performing the cutting process shown by the dashed lines in FIG. 16 on this resin bond 159, the valve body 113 shown in FIG. 17 can be manufactured. In the valve body 113, the portion of the valve chamber 19 that forms the valve seat 21, the inlet connector portion connected to the inlet flow path 25 and having a flow inlet 23, and the outlet connector portion connected to the outlet flow path 29 and having a flow outlet 27 are made of a second resin molded body 57 formed from a second fluorinated resin material. The remaining portion is made of a second valve body portion 13a formed from a first resin molded body 57 formed from a first fluorinated resin material. By making a portion of the valve chamber 19, where the valve body portion 15c contacts or moves away from the valve seat 21 during valve opening and closing, and the connector portion connected to the pipe body, made of PFA, which has low self-dust generation and high wear resistance but is relatively expensive, it is possible to suppress the generation of particles caused by the impact when the valve body portion 15c abuts against the valve seat during valve closing, and to suppress the wear of the connector when connecting the pipe body.

[0062] Furthermore, although the above description illustrates the use of the resin assembly 59 manufactured according to the present invention as a component of the diaphragm valve 11, the components manufactured by the resin assembly according to the present invention are not limited to components of a diaphragm valve, but can also be components of other types of valves or other types of components. For example, as shown in FIG18, by changing the shape of the second resin molding body 57, using PTFE as the first fluorinated resin material and PFA as the second fluorinated resin material to manufacture the resin assembly 59, it is possible to manufacture a wafer transport box 201 (i.e., a ring) having a first portion 203 formed by PFA on the inner side and a second portion 205 formed by PTFE on the outer side. In the wafer transport box 201, since the inner side in contact with the wafer is formed by PFA with high wear resistance, wear can be suppressed. As shown in Figure 19, by using PTFE as the first fluorinated resin material and PFA as the second fluorinated resin material to manufacture the resin bond 59, it is possible to manufacture a water tank 301 having an inner layer 303 formed by PFA on the inner side and an outer layer 305 formed by PTFE on the outer side. Pumps, nozzles, and pressure sensors can also be manufactured from the resin bond 59 manufactured according to the present invention.

[0063] 11: Diaphragm valve 13, 13', 13'', 113: Valve body 13a: First valve body section 13b: Second valve body section 13c: Third valve body part 15, 15', 15'': diaphragm 155, 55: First resin molded body 157A, 157B, 157C, 57: Second resin molded body 159, 59, 59', 59'': Resin bond 15a: Base section 15b: Diaphragm section 15c: Valve body section 17: Drive Unit 19: Valve Chamber 201: Wafer Transport Box 203: Part One 205: Part Two 21: Valve seat 23: Inlet 25: Inlet Flow Path 27: Outlet 29:Exit flow path 301:Sink 303: Inner layer 305: Outer layer 31: Drive unit housing 33: Cover component 35: pole 35a: Locking part 37: Piston 37a: Piston body 37b: Guide shaft 39: Coil Spring 41: Upper Space 43: Lower Space 45: Ventilation port 47: Operating fluid supply port 49: Connecting hole 49a: Small diameter hole section 49b: Large diameter hole 51: First resin aggregate 51a: Storage Department 53: Second resin aggregate 61: Mold 63: Thermal insulation materials 65: First strip heater 67: Second strip heater 69: Third Resin Molded Body

Claims

1. A method for manufacturing a resin bond, comprising the following steps: forming a first resin assembly having a cylindrical receiving portion from a first fluorinated resin material, wherein the first fluorinated resin material gels above its melting point and maintains its shape; receiving a second resin assembly formed from a second fluorinated resin material in the receiving portion, wherein the second fluorinated resin material melts into a liquid above its melting point; and heating the first resin assembly containing the second resin assembly in the receiving portion to above the melting points of the first and second fluorinated resin materials, followed by cooling, thereby transforming the first resin assembly into a first resin molded body and the second resin assembly into a second resin molded body, and bonding the first resin molded body and the second resin molded body together.

2. The method for manufacturing a resin assembly as claimed in claim 1, wherein the first resin assembly is formed into a cup shape with a recess at its end.

3. The method for manufacturing a resin assembly as claimed in claim 1, wherein the first resin assembly includes a cylindrical tubular body, and the interior of the tubular body serves as the receiving portion.

4. The method for manufacturing a resin assembly as claimed in claim 3, wherein the first resin assembly is composed of a cylindrical tubular body and a solid rod-shaped body or plate-shaped body disposed adjacent to the lower part of the tubular body.

5. The method for manufacturing a resin assembly as claimed in claim 1, wherein the first resin assembly is a round bar or plate formed by molding the first fluorinated resin material, or a round bar or plate formed by molding the first fluorinated resin material and then cutting it.

6. The method for manufacturing a resin assembly as claimed in claim 1, wherein the first resin assembly is a product formed by cold pressing or preforming the first fluorinated resin material.

7. The method for manufacturing a resin assembly as claimed in claim 5, wherein the second resin assembly is formed by shaping the second fluorinated resin material into a shape and size that can be housed within the housing portion.

8. The method for manufacturing a resin assembly as claimed in claim 6, wherein the second resin assembly is formed by shaping the second fluorinated resin material into a shape and size that can be housed within the housing portion.

9. The method for manufacturing a resin assembly as described in claim 7, wherein the second resin assembly is formed by cold pressing or preforming the second fluorinated resin material into a shape and size that can be housed within the housing portion.

10. The method for manufacturing a resin assembly as claimed in claim 8, wherein the second resin assembly is formed by cold pressing or preforming the second fluorinated resin material into a shape and size that can be housed within the housing portion.

11. The method for manufacturing a resin conjugate as claimed in claim 5, wherein the second resin conjugate is composed of powder or particles of the second fluorinated resin material.

12. The method for manufacturing a resin conjugate as claimed in claim 6, wherein the second resin conjugate is composed of powder or particles of the second fluorinated resin material.

13. The method for manufacturing a resin bond as claimed in claim 1 further includes a diaphragm manufacturing step, wherein a diaphragm for a diaphragm valve is manufactured from the resin bond, the diaphragm valve including a diaphragm portion and a valve body portion supported at the center of the diaphragm portion and in contact with or away from a valve seat, the diaphragm manufacturing step further including the following steps: cutting the portion of the resin bond formed by the second resin molding body to form at least the portion of the valve body portion that abuts against the valve seat, and cutting the portion of the resin bond formed by the first resin molding body to form the remaining portion of the diaphragm portion and the valve body portion.

14. The method for manufacturing a resin bond as claimed in claim 1 further includes a diaphragm valve manufacturing step, wherein a diaphragm valve is manufactured from the resin bond, the diaphragm valve including a valve body and a diaphragm, the valve body forming a first flow path, a second flow path and a valve chamber communicating with the first flow path and the second flow path, the diaphragm including a diaphragm portion and a valve body portion supported on the central portion of the diaphragm portion, the diaphragm valve manufacturing step further including the step of machining the resin bond in such a way as forming a valve seat at least on the second resin molded body of the resin bond to form the first flow path, the second flow path and the valve chamber from the resin bond.

15. The method for manufacturing a resin bond as described in any one of claims 1 to 14, wherein the first fluorinated resin material is polytetrafluoroethylene (PTFE) and the second fluorinated resin material is perfluoroalkoxyalkane (PFA).

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