Automatic coupler for supplying utility

TWI943171BActive Publication Date: 2026-10-21UNITEST INC
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Patent Information

Application Number
TW113127048
Authority / Receiving Office
TW · TW
Patent Type
Patents
Current Assignee / Owner
Priority Date
2024-02-21
Filing Date
2024-07-19
Publication Date
2026-10-21
Estimated Expiration
2044-07-18

AI Technical Summary

Technical Problem

Existing semiconductor manufacturing processes face challenges in maintaining a stable and leak-proof pneumatic connection during the supply of essential materials like air, nitrogen, and pure water, which is crucial for smooth operation.

Method used

An automatic coupler is designed with first and second coupling members and valve bodies, each equipped with elastically supported check balls, allowing for a two-stage contact process that minimizes leakage by ensuring airtight connections through multiple elastic bodies and sealing members.

Benefits of technology

The automatic coupler maintains a stable pneumatic connection by reducing the likelihood of leakage, ensuring consistent and reliable supply of materials in semiconductor manufacturing.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

An automatic coupler for supplying useful materials is proposed. The automatic coupler includes: a first coupling member disposed at either a useful material supply end or a useful material receiving end; a first valve body disposed within the first coupling member and provided with a first check ball that is elastically supported; a second coupling member disposed at the other end of the useful material supply end or the useful material receiving end and coupled to the first coupling member; and a second valve body disposed within the second coupling member and provided with a second check ball that is elastically supported. The second valve body includes a main body, a first floating body, and a second floating body elastically supported to the first floating body, the second floating body elastically supporting the second check ball.
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Description

Technical Field

[0001] Cross-referencing of related applications

[0002] This application claims priority to Korean Patent Application No. 10-2024-0024980, filed on February 21, 2024, the entire contents of which are incorporated herein by reference for all purposes.

[0003] This disclosure relates to an automatic coupler for connecting pneumatic objects. Prior Technology

[0004] Related technical descriptions

[0005] Typically, semiconductor manufacturing processes require various useful materials, such as air, nitrogen, vacuum, pure water (DW), and electricity, and ensuring a smooth supply of these useful materials during the manufacturing process is crucial.

[0006] For example, in the semiconductor device packaging process, after assembly, the unit semiconductor device is electrically tested using a tester and a processor. The processor receives electrical signals to perform mechanical operations, connecting the semiconductor device to a contactor (which is connected to the tester) and testing the electrical characteristics of the semiconductor device. Furthermore, the processor classifies the semiconductor device for defects based on the test results, and then unloads the semiconductor device onto a semiconductor packaging carrier such as a tube or tray. Related technical documents

[0007] (Patent Document 1) Korean Patent Application Publication No. 10-2000-0015678 (published on March 15, 2000) Summary of the Invention

[0008] The purpose of this disclosure is to provide an automatic coupler for supplying useful materials, which is configured to prevent leakage between the useful material supply end and the useful material receiving end, and is capable of stably achieving a pneumatic connection.

[0009] To achieve the purpose of this disclosure, an automatic coupler for supplying useful materials is provided. The automatic coupler includes: a first coupling member disposed at either a useful material supply end or a useful material receiving end; a first valve body disposed in the first coupling member and provided with a first check ball that is elastically supported, for opening and closing a flow path by means of the first check ball; a second coupling member disposed at the other end of the useful material supply end or the useful material receiving end and configured to be coupled to the first coupling member; and a second valve body disposed in the second coupling member and provided with a second check ball that is elastically supported, for opening and closing a flow path by means of the second check ball, wherein the second valve body includes: a main body; a first floating body elastically supported to the main body; and a second floating body elastically supported to the first floating body such that a portion of the second floating body protrudes outside the first floating body, and the second floating body elastically supports the second check ball such that a portion of the second check ball protrudes outside the first floating body.

[0010] Preferably, the second valve body can be configured such that the second floating body protrudes a predetermined height relative to the contact surface of the first floating body that contacts the first valve body, and the second check ball can be configured to protrude higher than the height of the second floating body.

[0011] Preferably, the automatic coupler may further include a sealing member disposed on at least one of two contact surfaces of the first valve body and the second valve body facing each other, for maintaining airtightness.

[0012] Preferably, the automatic coupler may further include: a first elastic body that elastically supports the main body and the first floating body; a second elastic body that elastically supports the first floating body and the second floating body; and a third elastic body that elastically supports the second floating body and the second check ball, wherein the elastic modulus of the first elastic body may be greater than the elastic modulus of the second elastic body, and the elastic modulus of the second elastic body may be greater than the elastic modulus of the third elastic body.

[0013] Preferably, the second valve body may further include a valve stem fixed to the second floating body to support the third elastic body.

[0014] In the automatic coupler for supplying useful materials disclosed in this application, the automatic coupler includes: a first coupling member disposed at either a useful material supply end or a useful material receiving end; a first valve body disposed in the first coupling member and provided with a first check ball that is elastically supported, for opening and closing the flow path by means of the first check ball; a second coupling member disposed at the other end of the useful material supply end or the useful material receiving end and coupled to the first coupling member; and a second valve body disposed in the second coupling member and provided with a second check ball that is elastically supported, for opening and closing the flow path by means of the second check ball, wherein the second valve body includes: a main body; a first floating body that is elastically supported to the main body; and a second floating body that is elastically supported to the first floating body such that a portion of the second floating body protrudes outside the first floating body, and the second floating body elastically supports the second check ball such that a portion of the second check ball protrudes outside the first floating body. Therefore, it has the effect of maintaining a stable pneumatic connection state by minimizing the possibility of leakage when the two valve bodies are connected to each other. Simple Explanation of the Diagram

[0015] The above and other objectives, features and other advantages of this disclosure will become clearer from the following detailed description, which is taken in conjunction with the accompanying diagrams, wherein:

[0016] Figures 1A and 1B are perspective views illustrating the disconnected and connected states of an automatic coupler for supplying useful items according to an embodiment of this disclosure;

[0017] Figure 2 is a cross-sectional view illustrating an automatic coupler for supplying useful items according to an embodiment of this disclosure; and

[0018] Figures 3 through 6 are cross-sectional views illustrating the connection process of an automatic coupler for supplying useful items according to an embodiment of this disclosure. Implementation

[0019] The specific structures and functions described in the following embodiments of this disclosure are illustrated to demonstrate embodiments in accordance with the spirit of this disclosure, and embodiments in accordance with the spirit of this disclosure can be achieved in various ways. Furthermore, this disclosure should not be construed as limited to the following embodiments, but should be construed as including all changes, equivalents, and substitutions included within the spirit and scope of this disclosure.

[0020] The present disclosure will be described in detail below with reference to the accompanying drawings.

[0021] Figures 1A and 1B are perspective views illustrating the disconnected and connected states of an automatic coupler for supplying useful items according to an embodiment of the present disclosure.

[0022] Referring to Figures 1A and 1B, the automatic coupler 1 for supplying useful items according to an embodiment of this disclosure includes a first coupling member 110, a first valve body 120, a second coupling member 210, and a second valve body 220.

[0023] The first coupling member 110 and the second coupling member 210 are respectively disposed at the useful object receiving end and the useful object supply end, and may include corresponding concave and convex coupling guide members. In this embodiment, a guide arm 211 and a guide groove 111 as coupling guide members are illustrated, wherein the guide arm 211 protrudes from the second coupling member 210 along the coupling direction, and the guide groove 111 is formed in the first coupling member 110 corresponding to the guide arm 211, into which the guide arm 211 is inserted. Such coupling guide members can be modified in various forms within the range where the first coupling member 110 and the second coupling member 210 can be coupled to each other. At the same time, although not shown, a separate locking member capable of mechanically fixing or releasing the coupling state of the first coupling member 110 and the second coupling member 210 can be added.

[0024] The first valve body 120 is disposed in the first flow path 112 of the first coupling member 110, and is provided with a first check ball 121 that is elastically supported, and the first flow path 112 is opened and closed by the first check ball 121. Preferably, the first check ball 121 is elastically supported within the first valve body 120, such that at least a portion of the first check ball 121 protrudes to the outside of the first valve body 120.

[0025] The second valve body 220 is disposed in the second flow path 212 of the second coupling member 210, and is provided with a second check ball 221 that is elastically supported, and the second flow path 212 is opened and closed by the second check ball 221. Preferably, the second check ball 221 is elastically supported within the second valve body 210, such that at least a portion of the second check ball 221 protrudes to the outside of the second valve body 220.

[0026] When the first coupling member 110 and the second coupling member 210 are in a state where the first valve body 120 and the second valve body 220 are separated from each other, the air pressure is blocked by the check ball 121 and check ball 221 of each of the first valve body 120 and the second valve body 220. At the same time, when the first coupling member 110 and the second coupling member 210 are coupled to each other, the check balls 121 and 221 of each of the first valve body 120 and the second valve body 220 are pushed inward, and the useful object (air pressure) supply end and the useful object (air pressure) receiving end are connected to each other.

[0027] In particular, in this disclosure, since the contact process between the first valve body 120 and the second valve body 220 has two stages, the possibility of leakage when the first valve body 120 and the second valve body 220 are connected to each other can be minimized.

[0028] In the following, the configuration of each valve body, which is a major component of this disclosure, will be described in detail with reference to the accompanying drawings. Figure 2 is a cross-sectional view illustrating an automatic coupler for supplying useful items according to an embodiment of this disclosure.

[0029] Referring to Figure 2, the second valve body 220 includes a second check ball 221, a main body 222, a first floating body 223, and a second floating body 224.

[0030] The main body 222 is hollow, forming the main appearance of the second valve body 220, and is assembled with the second coupling member 210. The main body 222 is provided with a first elastic body S1 that elastically supports the first floating body 223. The lower end of the main body 222 is provided with a first locking step 222a that bends along its inner diameter. The lower end portion of the first floating body 223, inserted into the main body 222 and elastically supported on the first elastic body S1, is supported on the first locking body 222a. In this embodiment, the second flow path 212 is located inside the first floating body 223.

[0031] The second floating body 224 is inserted into the first floating body 223 and is elastically supported by the second elastic body S2. A second locking step 222a supporting the second check ball 221 is provided on the open end outside the flow path, and the diameter of the opening portion on which the second locking step 222a is formed is smaller than the diameter of the second check ball 221.

[0032] The second floating body 224 is configured such that it is elastically supported on the first floating body 223 by a second elastic body S2, such that a portion of the second floating body 224 protrudes a predetermined height d1 from the outside of the first floating body 223. Furthermore, the second floating body 224 is provided with a third elastic body S3, such that the second check ball 221 is elastically supported, such that a portion of the second check ball 221 protrudes to the outside of the first floating body 223.

[0033] Preferably, the second floating body 224 further includes a first sealing member 225 for maintaining airtightness on a contact surface facing and in contact with the first valve body 120. For example, such a first sealing member 225 can be a well-known O-ring. While this embodiment illustrates the first sealing member 225 being disposed within the second floating body 224, the first sealing member 225 can be disposed around the open end of the first floating body 223, achieving airtightness with the first valve body 120.

[0034] In this type of second valve body 220, the first floating body 223 protrudes a predetermined height d1 based on the contact surface of the first floating body 223 that contacts the first valve body 120. Additionally, the second check ball 221 protrudes a predetermined height d2, which is higher than the protrusion height d1 of the first floating body 223. <d2)。

[0035] Preferably, the second valve body 220 further includes a first valve stem 226, which is fixed to the first floating body 223 and positioned in the flow path to support the third elastic body S3, and further includes a first guide rod 226a, which extends from the first valve stem 226 and is inserted into the portion of the third elastic body S3.

[0036] Preferably, the elastic modulus of the first elastic body S1 is greater than that of the second elastic body S2, and the elastic modulus of the second elastic body S2 is greater than that of the third elastic body S3. Therefore, when the second valve body 220 and the first valve body 120 come into contact with each other, the third elastic body S3, the second elastic body S2, and the second check ball 221 are inserted into the inner side of the second floating body 224 (compressing the third elastic body), and then the first floating body 223 is inserted into the inner side of the main body 222 (compressing the second and third elastic bodies).

[0037] The first valve body 120 is hollow, which constitutes the main appearance of the first valve body 120 and is assembled with the first coupling member 110. Preferably, the first valve body 120 may be provided with a second sealing member 126 to maintain the airtightness of the first coupling member 110. In the first valve body 120, a second locking step 120a supporting the first check ball 121 is provided on the open end outside the flow path, and the diameter of the open end on which the second locking step 120a is formed is smaller than the diameter of the first check ball 121. The first valve body 120 further includes a second valve stem 124 supporting the fourth elastic body S4, and may further include a second guide rod 124a extending from the second valve stem 124 and inserted into the portion of the fourth elastic body S4.

[0038] The first valve body 120 is configured such that a portion of the first check ball 121 protrudes outward by a predetermined height d3 relative to the contact surface with the second valve body 220.

[0039] Preferably, the first valve body 120 further includes a valve body head 122 coupled to the first coupling member 110 and protruding outward, and the outer diameter D1 of the valve body head 122 is smaller than the inner diameter D2 of the open end of the body 222.

[0040] Figures 3 through 6 are cross-sectional views illustrating the connection process of an automatic coupler for supplying useful items according to an embodiment of this disclosure.

[0041] The connection process of the automatic coupler for supplying useful items as described above will be described below with reference to Figures 3 through 6. Furthermore, for ease of understanding, it is described that the first valve body 120 is fixed and the second valve body 220 is moved, such that the first valve body 120 and the second valve body 220 are connected to each other.

[0042] As illustrated in Figures 3 and 4, the second valve body 220 moves downward, causing the first check ball 121 and the second check ball 221 to come into contact with each other, and the first check ball 121 and the second check ball 221 are pushed (see Figure 3). Furthermore, when the second elastic body S2 and the fourth elastic body S4 are compressed, the first check ball 121 and the second check ball 221 are correspondingly inserted into the inner sides of the first valve body 120 and the second floating body 224, and the flow paths of the first valve body 120 and the second valve body 220 begin to connect with each other (see Figure 4). Simultaneously, with the first check ball 121 and the second check ball 221 fully inserted into the inner sides of the first valve body 120 and the second floating body 224, the upper surface of the valve body head 122 and the lower surface of the second floating body 224 are in close contact with each other.

[0043] Next, as illustrated in Figures 5 and 6, as the second valve body 220 continues to move downward, the first elastic body S1 is compressed, and the second floating body 224 is inserted into the inside of the first floating body 223, while the first floating body 223 is inserted into the inside of the main body 222, so that the flow paths of the first valve body 120 and the second valve body 220 are completely connected to each other. Simultaneously, with the flow paths of the first valve body 120 and the second valve body 220 connected, the airtightness effect can be increased by the first sealing member 225 disposed between the contact surfaces of the first valve body 120 and the first floating body 223.

[0044] The disconnection of the first valve body 120 and the second valve body 220 is performed in the reverse order of the connection process. When the first valve body 120 and the second valve body 220 are spaced apart from each other, each of the check balls 121 and 221 is pulled outward, thereby blocking the flow path of each of the valve bodies 120 and 220.

[0045] In this embodiment, a first coupling member 110 having a first valve body 120 and a second coupling member 210 having a second valve body 220 are described as being respectively disposed at the useful material receiving end and the useful material supply end. However, the first coupling member 110 and the second coupling member 210 can be respectively disposed at the useful material supply end and the useful material receiving end. Furthermore, the first valve body 120 and the second valve body 210 can be connected to each other by fixing either the first coupling member 110 or the second coupling member 210 and moving the other one, or the first valve body 120 and the second valve body 210 can be connected to each other by moving the first coupling member 110 and the second coupling member 210 together.

[0046] The specific embodiments of this disclosure have been described in detail above. However, this disclosure is not limited to the specific embodiments. It will be apparent to those skilled in the art that various modifications can be made to this disclosure within the scope of its technical concept.

[0047] 1: Automatic Coupler 110: First coupling member 111: Guide groove 112: First flow path 120: First valve body 120a: Second locking step 121: First stop ball 122: Valve head 124: Second valve stem 124a: Second guide rod 126: Second sealing component 210: Second coupling member 211: Guide arm 212: Second Flow Path 220: Second valve body 221: Second stop ball 222: Main Body 222a: First locking step 223: First Floating Body 224: Second floating body 225: First sealing component 226: First valve stem 226a: First guide rod S1: First elastic body S2: Second elastic body S3: Third elastic body S4: Fourth elastic body d1: Height d2: Height D1: Outer diameter D2:Inner diameter

[0048] Domestic storage information (please note in order of storage institution, date, and number) none Overseas storage information (please note in the order of storage country, institution, date, and number) none

Claims

1. An automatic coupler for supplying a useful item, the automatic coupler comprising: a first coupling member disposed at either a useful item supply end or a useful item receiving end; and a first valve body disposed in the first coupling member and provided with a first check ball resiliently supported thereon, for opening and closing a flow path by means of the first check ball; A second coupling member is disposed on the other end of the useful material supply end or the useful material receiving end and is configured to be coupled to the first coupling member; The second valve body is disposed in the second coupling member and has a second check ball that is elastically supported thereon, so as to open and close a flow path by means of the second check ball. The second valve body includes: a main body; a first floating body that is elastically supported to the main body; and a second floating body that is elastically supported to the first floating body such that a portion of the second floating body protrudes outside the first floating body, and the second floating body elastically supports the second check ball such that a portion of the second check ball protrudes outside the first floating body.

2. The automatic coupler as claimed in claim 1, wherein the second valve body is configured such that the second floating body protrudes by a predetermined height relative to a contact surface of the first floating body that contacts the first valve body, and the second check ball is configured to protrude above the height of the second floating body.

3. The automatic coupler as claimed in claim 1 further includes a sealing member disposed on at least one of two mutually facing contact surfaces of the first valve body and the second valve body for maintaining airtightness.

4. The automatic coupler as claimed in claim 1, further comprising: a first elastic body elastically supporting the body and the first floating body; a second elastic body elastically supporting the first floating body and the second floating body; and a third elastic body elastically supporting the second floating body and the second check ball, wherein an elastic modulus of the first elastic body is greater than an elastic modulus of the second elastic body, and the elastic modulus of the second elastic body is greater than an elastic modulus of the third elastic body.

5. The automatic coupler as claimed in claim 4, wherein the second valve body further includes a valve stem fixed to the second floating body to support the third elastic body.

Citation Information

Patent Citations

  • Multi-way valve as well as actuator comprising the same

    CN109996983A

  • Miniature valve coupling

    TW521135B