Robot link mechanism, end effector, mapping device, load port, and end effector control method

Abstract

The present invention aims to provide a linkage mechanism for a robot, an end effector, and a control method for the end effector. The linkage mechanism (7) includes: a linkage component (71), a guide (73), and a defining part (72); the linkage component (71) is a chain-like structure in which unit units (U) are rotatably connected to each other and extends along a first direction; the guide (73) converts the stroke of the actuator (8) in the first direction into the displacement of the actuating part (6) in the second direction; the defining part (72) defines the angle between the first direction and the second direction of the linkage component (71) and supports the actuating part (6) together with the linkage component (71).

Description

[Technical Field]

[0001] The technical relationship disclosed herein is a linkage mechanism for a robot, an end effector, a mapping device, a loading port, and a control method for the end effector. [Previous Technology]

[0002] Patent Document 1 describes a conventional substrate handling robot. The robot's hand has a pitch conversion mechanism that converts the vertical spacing of a plurality of substrates. The pitch conversion mechanism raises four linear moving bodies to different heights. Each linear moving body is a longitudinally elongated plate with a receiving portion on the lower surface of its peripheral edge supporting the substrate. The pitch conversion mechanism has a linkage mechanism connected to the linear moving bodies. The linkage mechanism converts the forward and backward movement of a slider sliding within the main body into vertical movement. The ends of the linkage mechanism are connected to each other in a manner that allows free upward rotation. Corresponding to the forward and backward movement of the slider, the connecting portions of the linkage mechanism each rotate upward by a predetermined amount, lifting the linear moving bodies. In this way, the four linear moving bodies rise to predetermined different height positions. [Prior Art Documents] [Patent Documents]

[0003] Patent Document 1: Japanese Patent No. 6314089 [Summary of the Invention]

[0004] —Technical Problem to be Solved by the Invention— In the aforementioned existing substrate handling robot, the required height of the storage space corresponds to the rising amount of the four linear moving bodies. As a result, for example, depending on the number of substrates held simultaneously and the height at which the uppermost substrate is raised, the thickness of the main body increases, leaving room for improvement from the perspective of hand miniaturization. —Technical Means for Solving the Technical Problem—

[0005] The technology disclosed herein relates to a linkage mechanism for a robot. The linkage mechanism includes a linkage component, a guide, and a defining part. The linkage component is a chain-like structure in which unit cells are rotatably connected to each other, extends along a first direction, and has a first end connected to the actuator. The guide guides the second end of the linkage component, connected to the actuating part, in a second direction, converting the stroke of the actuator in the first direction into a displacement of the actuating part in the second direction. The defining part defines the angle between the first and second directions of the linkage component and, together with the linkage component, supports the actuating part. –Effects of the Invention-

[0006] Since the linkage component is made into a chain, the stroke of the actuator in the first direction is converted into the displacement of the actuating part in the second direction via the linkage component, thus miniaturization of the robot including the aforementioned linkage mechanism can be achieved.

Implementation Method

[0008] The following description, with reference to the accompanying drawings, illustrates the implementation of the robot's end effector and linkage mechanism. The robot described herein is merely an example.

[0009] (Substrate handling robot) Figure 1 is a perspective view of a substrate handling robot 2 that applies the end effector and linkage mechanism disclosed herein.

[0010] Robot 2 is arranged within a substrate processing apparatus. The substrate processing apparatus has one or more FOUPs (Front Opening Unified Pods) 92. FOUPs 92 house substrates 91. FOUPs 92 can house multiple substrates 91 arranged in the Z direction. The substrates 91 are semiconductor wafers or glass substrates. Robot 2 removes substrates 91 from FOUPs 92 and transports them to other locations for specified processing. Robot 2 can also transport the processed substrates 91 to other FOUPs 92 or other locations for further processing.

[0011] (Robot Structure) Robot 2 is a horizontal multi-joint robot. As shown in Figure 1, robot 2 has a base 21. The base 21 is disposed in the transport space within the substrate processing equipment. Robot 2 has a robotic arm 200. The robotic arm 200 includes an arm 22, a base 26, and an end effector 1. The end effector 1 has a hand 3 that holds the substrate 91. Hereinafter, the forward and backward direction of the hand 3 relative to the FOUP 92 is referred to as the first direction or the Y direction. The direction in the Y direction where the hand 3 faces the FOUP 92 is referred to as forward, and the direction where the hand 3 moves away from the FOUP 92 is referred to as backward. The X direction is orthogonal to the Y direction. Both the X direction and the Y direction are horizontal directions. The vertical direction orthogonal to the X direction and the Y direction is referred to as the Z direction. The upward direction in the Z direction is an example of the second direction, and the downward direction is an example of the third direction. It should be noted that the X direction, Y direction (forward and backward direction), and Z direction (up and down direction) are used for describing the implementation configuration and are not used to limit the construction of robot 2, linkage mechanism 7, and end effector 1.

[0012] The base 21 supports the arm 22 via an actuator 23. The arm 22 is capable of moving up and down in the Z direction relative to the base 21. The actuator 23 causes the arm 22 to move up and down. The arm 22 has a link 221. The arm 22 of the robot 2 in the illustration has one link 221. It should be noted that the number of links forming the arm 22 is not limited to one, and may be two or more.

[0013] The first end of the link 221 is supported on the base 21 via an actuator 23. The link 221 is rotatable relative to the base 21 and is rotatable about a first axis Z1 extending in the Z direction. The actuator 24 rotates the link 221. The second end of the link 221 is connected to the first end of the base 26. The base 26 is rotatable relative to the link 221 and is rotatable about a second axis Z2 extending in the Z direction. The actuator 25 rotates the base 26 about the second axis Z2. The base 26 supports the end effector 1.

[0014] (Structure of the end effector) Figure 2 is a top view showing the positional relationship between the main body 4, the linkage mechanism 7, the actuating part 6, and the actuator 8.

[0015] As described above, the robot 2 includes an end effector 1. The end effector 1 has a hand 3 for holding a substrate 91. The hand 3 has a body 4, an actuator 8, an actuating part 6, and a linkage mechanism 7. The hand 3 is fixed and supported on a base 26. The hand 3 typically holds the substrate 91 by various means such as gripping, adsorption, placement, or fitting, and can also release the held substrate 91.

[0016] The main body 4 includes a first main body 41, a second main body 42, and a drive unit 44. The first main body 41 is approximately Y-shaped in plan view, with an opening at the front end. The first main body 41 has two front end portions 410. The two front end portions 410 are arranged symmetrically about a center line CL. The center line CL extends along the Y direction from the center in the X direction of the main body 4. In other words, the two front end portions 410 have the same structure in symmetrical positions in plan view.

[0017] Figure 3 is a top view of the area III within the dashed box in Figure 2. Figure 4 is a top view of the area IV within the dashed box in Figure 2. Figure 5 is a side view showing the fixed state of the actuator 6s, which will be described later. Figure 6 is a side view viewed from line VI-VI in Figures 3 and 4. Figure 7 is a side view viewed from line VII-VII in Figures 3 and 4. Figure 8 is a side view viewed from line VIII-VIII in Figures 3 and 4. Figure 9 is a side view viewed from line IX-IX in Figures 3 and 4.

[0018] As shown in Figure 3 or Figure 5, the front end portion 410 has a first wall 411, a second wall 412, a third wall 413, and an upper wall 414. The first wall 411, the second wall 412, and the third wall 413 are walls perpendicular to the upper surface 261 of the base 26. The first wall 411 and the third wall 413 are opposite each other in the X direction. The second wall 412 connects the first wall 411 and the third wall 413. The upper wall 414 connects the upper ends of the first wall 411, the second wall 412, and the third wall 413 to each other. The first wall 411, the second wall 412, the third wall 413, and the upper wall 414 form a closed storage space R1 (see Figure 5). The second wall 412 has an opening Q1 communicating with the storage space R1 (see Figure 5). In other words, the front end portion 410 has a storage space R1 and an opening Q1 communicating with the storage space R1. The opening Q1 has a width through which five link members 71 arranged in the X direction and extending in the Y direction on the upper surface 261 of the base 26 can pass.

[0019] As shown in Figure 2, the first body 41 has recesses 43, each approximately rectangular in shape, located at the midpoint of the Y-direction from both sides in the X-direction toward the inward side. The second body 42 is located on both sides of the first body 41 in the X-direction. The second body 42, viewed from above, has an approximately rectangular shape along the inner side of the recesses 43. The second body 42 is arranged symmetrically about the center line CL. In other words, the second body 42 has the same structure in symmetrical positions when viewed from above.

[0020] As shown in Figure 4 or Figure 5, the second main body 42 has a first wall 421, a second wall 422, a third wall 423, and an upper wall 424. The first wall 421, the second wall 422, and the third wall 423 are walls perpendicular to the upper surface 261 of the base 26. The first wall 421 and the third wall 423 are opposite each other in the X direction. The second wall 422 connects the first wall 421 and the third wall 423. The upper wall 424 connects the upper ends of the first wall 421, the second wall 422, and the third wall 423 to each other. The first wall 421, the second wall 422, the third wall 423, and the upper wall 424 form a closed storage space R2. The second wall 422 has an opening Q2 communicating with the storage space R2. In other words, the second main body 42 has a storage space R2 and an opening Q2 communicating with the storage space R2. The opening Q2 has a width through which five link members 71 arranged in the X direction and extending in the Y direction on the upper surface 261 of the base 26 can pass. Hereinafter, the storage space R1 and the storage space R2 are collectively referred to as the storage space R. The opening Q1 and the opening Q2 are collectively referred to as the opening Q.

[0021] Referring back to Figure 1, the drive unit 44 causes the second body 42 to be displaced along the Y direction. When the second body 42 is displaced along the Y direction, the actuator 8, linkage mechanism 7, and actuation unit 6 housed in the second body 42 also undergo the same amount of displacement along the Y direction. Specifically, the second body 42, under the action of the drive unit 44, is displaced along the Y direction between the holding position of the holding substrate 91 and the releasing position of the releasing substrate 91. In the illustration, the drive unit 44 is supported by the upper surfaces of the two second bodies 42 and the upper surface of the first body 41.

[0022] As described above, the hand 3 includes an actuating part 6, a linkage mechanism 7, and an actuator 8. The linkage mechanism 7 includes a linkage member 71, a guide part 72, and a guide member 73. The hand 3 holds the substrate 91 by gripping the edge of the substrate 91 with a plurality of actuating parts 6. The hand 3 releases the gripping of the substrate 91 by disengaging the actuating parts 6 from the edge of the substrate 91. It should be noted that the hand 3 in the illustration is an edge gripping hand. The edge gripping hand has a size corresponding to the diameter of the substrate 91.

[0023] The actuating part 6 holds the substrate 91. As shown in FIG2, the actuating part 6 is located at four points in top view: the front ends of the two front ends 410 and the front ends of the two second bodies 42. The actuating parts 6 are arranged at intervals from each other so that the center of the substrate 91 is within the quadrilateral formed by connecting the actuating parts 6. It should be noted that the position of the actuating part 6 is not limited to four points. The actuating part 6 has a plurality of holding parts 61 arranged close to each other in the circumferential direction of the substrate at each position. In the illustration, the actuating part 6 has actuating parts 6s, 6a, 6b, 6c, and 6d. Actuating part 6s has holding part 61s. Actuating part 6a has holding part 61a. Actuating part 6b has holding part 61b. Actuating part 6c has holding part 61c. Actuating part 6d has holding part 61d. Holding parts 61s, 61a, 61b, 61c, and 61d have the same structure. When collectively referred to as actuating parts 6s, 6a, 6b, 6c, and 6d, they are called actuating parts 6. When collectively referred to as holding parts 61s, 61a, 61b, 61c, and 61d, they are called holding parts 61. In the front end portion 410, the actuating parts 6 are arranged in the order 6s, 6a, 6b, 6c, and 6d from the outer side in the X direction toward the center line CL. In the second body 42, the actuating parts 6 are arranged in the order 6d, 6c, 6b, 6a, and 6s from the outer side in the X direction toward the center line CL.

[0024] The holding portion 61 includes a receiving portion 62, a connecting portion 63, and a connecting portion 64. The receiving portion 62 has a supporting surface that contacts the outer peripheral edge of the lower surface of the substrate 91 and supports the substrate 91 from below. The receiving portion 62 includes the receiving portion 62s of the holding portion 61s (see FIG5), the receiving portion 62a of the holding portion 61a (see FIG6), the receiving portion 62b of the holding portion 61b (see FIG7), the receiving portion 62c of the holding portion 61c (see FIG8), and the receiving portion 62d of the holding portion 61d (see FIG9). The receiving portion 62s is fixed at a height position H0 from the upper surface of the upper wall 414 or the upper surface of the upper wall 424. Hereinafter, for ease of explanation, the height position of the receiving portion 62s will be referred to as the height position H0. The receiving parts 62a, 62b, 62c, and 62d move up and down between a height position aligned with the receiving part 62s (see Figure 11(a)) and a height position corresponding to the Z-direction interval HF of FOUP92 (see Figure 11(b)).

[0025] As shown in Figure 6, the receiving part 62a rises and falls between height position H0 and height position H1 (H1 > H0). For example, H1 - H0 = HF. As shown in Figure 7, the receiving part 62b rises and falls between height position H0 and height position H2 (H2 > H1). For example, H2 - H0 = 2 × HF (2HF). As shown in Figure 8, the receiving part 62c rises and falls between height position H0 and height position H3 (H3 > H2). For example, H3 - H0 = 3 × HF (3HF). As shown in Figure 9, the receiving part 62d rises and falls between height position H0 and height position H4 (H4 > H3). For example, H4 - H0 = 4 × HF (4HF). In the following description, the receiving parts 62s, 62a, 62b, 62c, and 62d are collectively referred to as receiving part 62.

[0026] The connecting portion 64 is connected to the second end of the connecting rod member 71. As shown in FIG10, in this embodiment, the connecting portion 64 is U-shaped in plan view and has an open rear end. The connecting portion 64 surrounds the outside of the unit unit U located at the second end of the connecting rod member 71 and is connected to the unit unit U. The method of connecting the connecting portion 64 to the unit unit U is not particularly limited. For example, bolts are used for connection. For example, it can be fixed by embedding or adhesive. The connecting portion 64 includes the connecting portion 64s of the retaining portion 61s (see FIG5), the connecting portion 64a of the retaining portion 61a (see FIG6), the connecting portion 64b of the retaining portion 61b (see FIG7), the connecting portion 64c of the retaining portion 61c (see FIG8), and the connecting portion 64d of the retaining portion 61d (see FIG9). When collectively referred to as the connecting portions 64s, 64a, 64b, 64c, and 64d, they are referred to as the connecting portion 64.

[0027] The connecting portion 63 connects the lower front end of the receiving portion 62 to the upper front end of the connecting portion 64. The connecting portion 63 is a plate-shaped body with a specified rigidity. The connecting portion 63 includes the connecting portion 63s of the retaining portion 61s (see Figure 5), the connecting portion 63a of the retaining portion 61a (see Figure 6), the connecting portion 63b of the retaining portion 61b (see Figure 7), the connecting portion 63c of the retaining portion 61c (see Figure 8), and the connecting portion 63d of the retaining portion 61d (see Figure 9). When collectively referred to as the connecting portions 63s, 63a, 63b, 63c, and 63d, it is called the connecting portion 63.

[0028] Linkage component 71 is located between actuator 8 and actuating part 6. Linkage component 71 includes link components 71a, 71b, 71c, and 71d. Actuator 8 includes actuators 8a, 8b, 8c, and 8d. As shown in FIG6, link component 71a is located between actuator 8a and holding part 61a. A first end of link component 71a is connected to actuator 8a. A second end of link component 71a is connected to connecting part 64a. As shown in FIG7, link component 71b is located between actuator 8b and holding part 61b. A first end of link component 71b is connected to actuator 8b. A second end of link component 71b is connected to connecting part 64b. As shown in FIG8, link component 71c is located between actuator 8c and holding part 61c. A first end of link component 71c is connected to actuator 8c. The second end of the connecting rod component 71c is connected to the connecting portion 64c. As shown in FIG9, the connecting rod component 71d is located between the actuator 8d and the holding portion 61d. The first end of the connecting rod component 71d is connected to the actuator 8d. The second end of the connecting rod component 71d is connected to the connecting portion 64d. When collectively referred to as connecting rod components 71a, 71b, 71c, and 71d, they are called connecting rod component 71. When collectively referred to as actuators 8a, 8b, 8c, and 8d, they are called actuators 8.

[0029] The link member 71 is a chain-like structure in which unit units U are rotatably connected to each other. The unit unit U has relatively high rigidity, for example, it is made of metal. The unit unit U allows the link member 71 to be displaced in the forward upward direction. The unit units U are connected to each other in a manner in which the link member 71 does not displace in the forward downward direction. In the example of FIG10, the unit unit U has two side plates opposite each other in the X direction and a connecting plate connecting the side plates. The connecting plate connects the upper ends of the two side plates to each other at a midpoint in the Y direction, and connects the lower ends to each other. The two side plates have holes through in the X direction at one end. The two side plates have pins protruding outward in the X direction at the other end, and the diameter is slightly smaller than the aforementioned holes. By inserting the pins of each side plate into the holes of the unit units U at adjacent positions, a plurality of unit units U are rotatably connected to each other.

[0030] As shown in Figure 10, a cable support (Cableveyor) 77 can be used as the connecting rod component 71. The cable support 77 is a chain-like structure in which unit units U are rotatably connected to each other. The unit units U of the cable support are, for example, formed of resin. It should be noted that the specific structure of the unit unit U is as described in the previous paragraph. Inside the cable support 77, there is a storage space that communicates along the length direction of the cable support 77. Wiring and conduit can pass through the storage space of the cable support 77. In the example of Figure 10, the storage space of the cable support 77 extends along the Z direction via the Y direction. It should be noted that an example of a hollow unit unit U is shown in Figure 10, but it is not necessary to be hollow. A different structure than that of Figure 10 can also be used to achieve the same function as the unit unit U.

[0031] As shown in Figure 3 or Figure 4, the connecting rod components 71a, 71b, 71c, and 71d are arranged in the X direction. The connecting rod components 71 respectively contact the upper surface 261 of the base 26 and extend along the upper surface 261 in the Y direction. The connecting rod components 71 extend from the storage space R1 of the first body 41 through the opening Q1 in the Y direction to the outside of the first body 41. Alternatively, the connecting rod components 71 extend from the storage space R2 of the second body 42 through the opening Q2 in the Y direction to the outside of the second body 42.

[0032] The guide 73 guides the second end of the connecting rod member 71 in a second direction (Z direction in the illustration). The guide 73 converts the stroke of the actuator 8 in the first direction (Y direction in the illustration) into the displacement of the actuating part 6 in the second direction (Z direction in the illustration). In the illustration, the guide 73 has a guide 731 located in front of the opening Q1 of the first body 41 and a guide 732 located in front of the opening Q2 of the second body 42.

[0033] Guide 731 is a wall perpendicular to the upper surface 261 of base 26. A gap exists between the second wall 412 and guide 731 through which the connecting rod member 71, guided upward by guide 731, can pass. It should be noted that the construction of guide 731 is not limited to a wall. For example, it can be a cylindrical body that is approximately L-shaped in side view. Guide 731 can also be a structure separate from the first body 41. Guide 732 is a wall perpendicular to the upper surface 261 of base 26. A gap exists between the second wall 422 and guide 732 through which the connecting rod member 71, guided upward by guide 732, can pass. It should be noted that the construction of guide 732 is not limited to a wall. For example, it can be a cylindrical body that is approximately L-shaped in side view. Guide 732 can also be a structure separate from the body 4. In the following description, guide 731 and 732 are collectively referred to as guide 73.

[0034] The defining part 72 defines the angle θ between the Y direction and the upward direction of the link member 71. The defining part 72 is located on the surface opposite to the direction in which the link member 71 is guided. The first end of the defining part 72 is fixed to the first end of the link member 71. For example, the first end of the defining part 72 is fixed to the lower surface of the unit unit U located at the rear end of the link member 71. The second end of the defining part 72 is fixed to the second end of the link member 71. For example, the second end of the defining part 72 is fixed to the front surface of the unit unit U located at the upper end of the link member 71.

[0035] In the illustration, the defining portion 72 extends along the outer surface of the connecting rod member 71. The defining portion 72 has defining portions 72a, 72b, 72c, and 72d. The defining portion 72a defines the angle θ between the Y direction and the upward direction of the connecting rod member 71a. The defining portion 72b defines the angle θ between the Y direction and the upward direction of the connecting rod member 71b. The defining portion 72c defines the angle θ between the Y direction and the upward direction of the connecting rod member 71c. The defining portion 72d defines the angle θ between the Y direction and the upward direction of the connecting rod member 71d. When collectively referred to as defining portions 72a, 72b, 72c, and 72d, it is referred to as defining portion 72. In this embodiment, the defining portion 72 defines the angle θ between the Y direction and the upward direction of the connecting rod member 71 as 90 degrees. The defining portion 72 has relatively high tensile stiffness and relatively low bending stiffness. The defining portion 72 is a strip or a line. The defining part 72 is, for example, a strip formed from a thin sheet of iron or steel. The defining part 72 is, for example, a strip formed from stainless steel, iron, or aluminum. The defining part 72 is a wire formed from piano wire or stainless steel wire. According to the above structure, the defining part 72 defines the angle θ between the Y direction and the upward direction of the connecting rod member 71, and supports the actuating part 6 together with the connecting rod member 71. It should be noted that the defining part 72 only needs to be able to apply a specified tension to the connecting rod member 71, and the specific structure is not limited to the above.

[0036] Actuator 8 drives the first end of link member 71 in the Y direction (front-back direction). The drive source of actuator 8 is, for example, a motor. The drive source of actuator 8 is, for example, a cylinder. Actuator 8 has actuators 8a, 8b, 8c, and 8d. As shown in FIG6, actuator 8a drives the first end of link member 71a in the Y direction. The driving amount is, for example, HF. The stroke of actuator 8a in the Y direction is converted into an upward displacement of actuating part 6a via guide 73. As shown in FIG7, actuator 8b drives the first end of link member 71b in the Y direction. The driving amount is, for example, 2HF. The stroke of actuator 8b in the Y direction is converted into an upward displacement of actuating part 6b via guide 73. As shown in FIG8, actuator 8c drives the first end of link member 71c in the Y direction. The driving amount is, for example, 3HF. The Y-direction stroke of actuator 8c is converted into an upward displacement of actuating part 6c by guide member 73. As shown in FIG9, actuator 8d drives the first end of linkage member 71d in the Y direction. The driving amount is, for example, 4HF. The Y-direction stroke of actuator 8d is converted into an upward displacement of actuating part 6d by guide member 73.

[0037] (Substrate Handling Operation) Next, the handling operation of the substrate by the robot 2 will be described with reference to FIG11. FIG11 is a timing diagram showing a portion of the substrate handling operation. For convenience, FOUP 92 is not shown in FIG11(b) and (c). Here, the basic operation of the robot 2 related to this embodiment is to take out five substrates 91 before processing from FOUP 92 at a time, change the spacing between the substrates 91 in the height direction, and transport them to other locations for the prescribed processing. The robot 2 may also transport the five substrates after the prescribed processing is completed to other FOUP 92 or other locations for processing. The robot 2 repeats the handling of substrates 91 between FOUP 92 and other processing locations until the processing of all substrates 91 is completed.

[0038] With the holding parts 61s, 61a, 61b, 61c, and 61d aligned with H0, robot 2 moves hand 3 to a frontal position opposite FOUP 92 (see Figure 1). Robot 2 lowers actuator 23 from the position shown in Figure 1. Robot 2 drives actuators 24 and 25 to rotate arm 22 and base 26 in the horizontal plane. Robot 2 moves hand 3 forward. Specifically, hand 3 moves forward to the position shown in Figure 11(a) via the underside of FOUP 92. As shown in Figure 11(a), the actuating part 6, located at the front end 410 of the first body 41, is located at the peripheral end of the front side of the substrate 91. The actuating part 6, located at the front end of the second body 42, is located at the peripheral end of the rear side of the substrate 91.

[0039] When the state shown in FIG. 11(a) is reached, the actuator 8 causes the linkage member 71 to generate a predetermined amount of displacement in the Y direction. The actuating part 6 rises to a predetermined height position corresponding to the substrate holding position of the FOUP 92 (for example, a position slightly lower than the lower surface of the substrate 91). Specifically, the holding part 61a rises to height position H1, the holding part 61b rises to height position H2, the holding part 61c rises to height position H3, and the holding part 61d rises to height position H4. The robot 2 rotates the arm 22 and the base 26 in the horizontal plane, causing the hand 3 to retract slightly (see FIG. 11(b)).

[0040] When the state shown in FIG. 11(b) is reached, the drive unit 44 causes the second main body 42 to move forward. As the second main body 42 moves, the actuator 6 moves forward, and the holding units 61s, 61a, 61b, 61c, and 61d move to the periphery of the corresponding substrate 91. After the movement, by slightly raising all the actuators 6, the substrate 91 is slightly lifted from the FOUP 92. The robot 2 rotates the arm 22 and the base 26 in the horizontal plane, and the hand 3 moves backward while holding the five substrates 91. That is, the state of removing the five substrates 91 from the FOUP 92 is reached.

[0041] After removing five substrates 91 from FOUP92, actuator 8 further displaces the linkage member 71 in the forward direction. For example, as shown in FIG11(c), actuator 8 displaces the linkage member 71 by increasing the stroke of actuators 8a, 8b, 8c, and 8d at a predetermined ratio. Specifically, actuator 8a causes the linkage member 71 to generate an additional displacement HA in the forward direction. The height position of holding part 61a is H1+HA. Actuator 8b causes the linkage member 71b to generate an additional displacement 2×HA (2HA) in the forward direction. The height position of holding part 61b is H2+2HA. Actuator 8c causes the linkage member 71c to generate an additional displacement 3×HA (3HA) in the forward direction. The height position of holding part 61c is H1+3HA. Actuator 8d causes the linkage member 71c to generate an additional displacement 4×HA (4HA) in the forward direction. The height position of holding part 61d is H1+4HA. The height position of the holding part 61s is maintained at H0. The robot 2 transports the substrate 91 with the pitch changed to another location for the prescribed processing. When the transport is finished, the robot 2 performs a transfer operation to the state shown in FIG1. ​​Then, the transfer operation from the state shown in FIG1 to the state shown in FIG11(b) and FIG11(c) is repeated.

[0042] (Function and Effect) In the end effector 1 of this embodiment, the linkage member 71 is chain-shaped, and the stroke of the actuator 8 in the first direction is converted into the displacement of the actuating part 6 in the second direction via the linkage member 71. For example, as in the above embodiment, when the end effector 1 is applied to the hand 3 of the robot 2 for substrate handling, the hand 3 can be made thinner compared to the prior art. By making the hand 3 thinner, the robot 2 can be miniaturized.

[0043] The linkage mechanism 7 includes linkage components 71a, 71b, 71c, and 71d, which are driven by corresponding actuators 8a, 8b, 8c, and 8d. Since the actuators 8a, 8b, 8c, and 8d drive the linkage components 71a, 71b, 71c, and 71d respectively, the degree of freedom in changing the height position of the actuating part 6 is high. For example, in the linkage mechanism described in Patent Document 1, the spacing between the plurality of substrates in the height direction is uniquely determined by the shape of the linkage. In this embodiment, since the displacement of the actuators 8a, 8b, 8c, and 8d can be set and changed individually, the spacing between the substrates 91 can be set individually and freely.

[0044] (Modification 1) The end effector 1 and linkage mechanism 7 of this disclosure can be applied to robots other than the robot 2 for substrate handling. For example, they can be applied to the linear motion mechanism of a robot. An example of a modification will be described using FIG12. For ease of explanation, the structures corresponding to those in FIG10 are labeled with the same symbols in FIG12. However, it is not intended that the structures labeled with the same symbols in FIG12 and FIG10 be limited to the same structures.

[0045] As shown in Figure 12, the end effector 1 of the modified example has a main body 4, an actuating part 6, a linkage mechanism 7 and an actuator 8.

[0046] The main body 4 is a columnar body extending along the Z direction. The main body 4 has a first wall 461, a second wall 462, a third wall 463, and a fourth wall 464. The first wall 461 and the third wall 463 are opposite each other in the X direction. The second wall 462 and the fourth wall 464 are opposite each other in the Y direction. The first wall 461 is connected to the second wall 462, and the first wall 461 is connected to the fourth wall 464. The third wall 463 is connected to the second wall 462, and the third wall 463 is connected to the fourth wall 464. The upper end of the main body 4 is open. That is, the main body 4 has an opening Q3 at the upper end. The fourth wall 464 extends to a position above the opening Q3.

[0047] The linkage mechanism 7 includes a linkage member 71, a defining part 72, and a guide member 73. The linkage member 71 and the defining part 72 have the same structure as in the embodiment described above. In this variation, there is one linkage member 71. Specifically, the linkage member 71 is located between the actuator 8 and the actuating part 6. The first end 711 of the linkage member 71 is connected to the actuator. The second end 712 of the linkage member 71 is connected to the actuating part 6. The linkage member 71 is a chain-like structure in which unit units U are rotatably connected to each other. The unit units U allow the linkage member 71 to be displaced in a second direction from the Z direction. The second direction is, for example, a horizontal direction (X direction or Y direction). The second direction is, for example, a direction having a defined angle θ2 relative to the horizontal direction. The unit units U have the same construction as in the embodiment described above. Specifically, the unit units U allow the linkage member 71 to be displaced in the second direction from the Z direction. The unit units U are connected to each other in such a way that the linkage member 71 will not be displaced in a third direction from the Z direction. The third direction is the direction opposite to the second direction.

[0048] The guide 73 guides the second end of the connecting rod member 71 in the second direction. The guide 73 converts the stroke of the actuator 8 in the Z direction into the displacement of the actuating part 6 in the second direction. In the illustration, the guide 73 is located above the opening Q3. The guide 73 is the wall that covers the opening Q3 when viewed from above, at the upper end of the fourth wall 464. A gap is provided between the opening Q3 and the lower surface of the guide 73, through which the connecting rod member 71, guided in the second direction, can pass. It should be noted that the structure of the guide 731 is not limited to the wall structure shown in FIG12. For example, the guide 731 may be a structure separate from the main body 4.

[0049] The defining part 72 defines the angle θ2 between the upward direction and the second direction of the link member 71. The defining part 72 is located on the surface opposite to the direction in which the link member 71 is guided. In the illustration, the defining part 72 extends along the outer surface of the link member 71. The structure and function of the defining part 72 are the same as in the embodiment described above. In the example of FIG12, the second end of the defining part 72 is fixed to the unit unit U located at the front end in the second direction using a fixing part 76.

[0050] The actuator 8 drives the first end of the linkage member 71 in the Z direction. The drive source of the actuator 8 is, for example, a motor. The drive source of the actuator 8 is, for example, a cylinder. The actuation part 6 performs the function of the end effector 1 of each robot 2. If the robot 2 is used for welding, the actuation part 6 is, for example, a welding torch for welding objects. If the robot 2 is used for picking, the actuation part 6 is, for example, a gripping part for holding objects. Furthermore, the guide 73 converts the stroke of the actuator 8 in the Z direction into the displacement of the actuation part 6 in the second direction.

[0051] (Function and effect of variation 1) According to this variation, similar to the above embodiment, the actuator 8 is configured to convert the stroke in the first direction into the displacement in the second direction of the actuating part 6, thereby enabling the miniaturization of the robot 2.

[0052] When the robot 2 rotates the main body 4 to perform operations, (1) the main body 4 is rotated while the actuator 6 is close to the main body 4. (2) After the main body 4 rotates, the actuator 6 is extended to perform operations. (3) After the operations are completed, the actuator 6 is rotated to another location while the main body 4 is close to the main body 4. (4) After the main body 4 rotates, the actuator 6 can be extended to perform operations. That is, the arm can be extended to a distance with a small rotation radius. By reducing the rotation angle, the space for component arrangement can be ensured, thus achieving miniaturization of the entire device including the robot 2. If the device is miniaturized, the installation space in the factory becomes smaller, thus enabling the miniaturization of the factory's air conditioning equipment or reducing the load on the air conditioning equipment.

[0053] In the example of FIG. 12, the linkage mechanism 7 includes an adjustment section 78 connected to the first end of the regulating section 72 to adjust the tension of the regulating section 72. The adjustment section 78 is, for example, a motor. The adjustment section 78 adjusts the tension of the regulating section 72, for example, by introducing or outputting the regulating section 72. By changing the tension of the regulating section 72, the angle θ2 between the upward direction and the second direction of the linkage member 71 changes. That is, by adjusting the tension of the regulating section 72, the second direction in which the actuating section 6 produces displacement can be adjusted.

[0054] (Modification 2) In the above embodiment, an example of the end effector 1 having an actuator 8 has been described, but it is not limited to this. The actuator 8 may be located outside the end effector 1. For example, the actuator 8 may also be arranged in the link 221 or the base 26 of the robot 2. For example, the main body 4 may also be separated at the middle position in the Y direction. For example, the main body 4 may be divided into a main body for housing the end effector and an attachment located between the end effector 1 and the arm 22. The actuator 8 may be located inside the attachment between the end effector 1 and the arm 22.

[0055] (Modification 3) In the above embodiment, an example of the actuator 8 including a plurality of actuators 8a, 8b, 8c, and 8d has been described, but it is not limited to this. For example, it may be a single actuator 8 that causes the plurality of substrates 91 to have different height positions. For example, it may be possible to adopt a structure in which the stroke of a single actuator 8 in the Y direction is distributed into a plurality of strokes in the Y direction, and transmitted to the link members 71a, 71b, 71c, and 71d as different strokes. For example, (1) a rod-shaped actuator extending in the X direction is prepared. (2) Rotational drive is performed with one end of the rod-shaped actuator as the rotation axis. (3) The link members 71a, 71b, 71c, and 71d are moved in the Y direction at different positions in the radial direction of the rod-shaped actuator. By means of (1) to (3) above, the different displacements of the connecting rod components 71a, 71b, 71c, and 71d along the Y direction can be achieved by a single actuator 8.

[0056] (Modification 4) The end effector 1 and linkage mechanism 7 disclosed herein can also be applied to the end effector of a robot that maps a substrate. As shown in Figures 13 and 14, the end effector 1 of this modification includes a mapping sensor 51, a main body 4, a linkage mechanism 7, and an actuator 8. The end effector 1 shown in Figures 13 and 14 is, for example, separately from the hand 3. The difference between Figures 13 and 14 is that the mapping sensor 51 in Figure 13 is a light-transmitting sensor, while the mapping sensor 51 in Figure 14 is a reflective sensor. It should be noted that the type of mapping sensor 51 is not limited to light-transmitting or reflective sensors. For example, a retroreflective sensor can be used as the mapping sensor 51.

[0057] It should be noted that, for ease of explanation, the structures corresponding to those in Figure 12 are labeled with the same symbols in Figures 13 and 14. However, it is not intended that the structures labeled with the same symbols in Figures 12, 13, and 14 be limited to the same structures. In Figures 13 and 14, the Z direction is, for example, the vertical direction. The X and Y directions are both horizontal directions. The X and Y directions are orthogonal. In the Y direction, the direction in which the mapping sensor 51 faces the FOUP 92 (described later) is referred to as "front," and the direction in which the mapping sensor 51 moves away from the FOUP 92 is referred to as "rear."

[0058] In FIG. 13, the mapping sensor 51 has a sensor body 52. ​​The sensor body 52 is roughly Y-shaped when viewed from above, with an opening at the front end. In the two front ends 521 of the sensor body 52, a light-emitting portion 53 is arranged on one of the inner surfaces 522 of the opposing inner surfaces. The light emitted by the light-emitting portion 53 is not particularly limited, and can be, for example, visible light, infrared light, or laser. The mapping sensor 51 may also be a fiber optic sensor that connects an optical fiber to the light-emitting portion 53. The light-receiving portion 54 is located on the inner surface 523 of the front end 521 opposite to the light-emitting portion 53 and receives the light emitted from the light-emitting portion 53. The mapping sensor 51 confirms the presence or absence of the substrate 91 and the storage state of the substrate 91 by detecting whether the light emitted from the light-emitting portion 53 toward the light-receiving portion 54 is blocked.

[0059] In FIG. 14, the mapping sensor 51 has a sensor body 52. ​​The shape of the sensor body 52 is not particularly limited, for example, it is roughly Y-shaped when viewed from above. The light-emitting part 53 is located at the front end face 524 of the sensor body 52. ​​The light-emitting part 53 illuminates the substrate 91 housed in the FOUP 92, for example. The light illuminated by the light-emitting part 53 is not particularly limited, for example, visible light, infrared light, or laser. The mapping sensor 51 may also be a fiber optic sensor with an optical fiber connected to the light source of the light-emitting part 53. The light-receiving part 54 is located at the front end face 524 of the sensor body 52. ​​The light-emitting part 53 and the light-receiving part 54 are arranged close to each other, for example. The light-receiving part 54 receives the light that is illuminated from the light-emitting part 53 and reflected onto the substrate 91. The mapping sensor 51 determines the presence or absence of the substrate 91 and the housing state of the substrate 91 based on the intensity of the light that is illuminated from the light-emitting part 53 and received by the light-receiving part 54. It should be noted that in Figure 14, an example is shown where the light-emitting part 53 and the light-receiving part 54 are located on both sides of the open end of the sensor body 52, but the light-emitting part 53 and the light-receiving part 54 may also be located on only one side of the open end of the sensor body 52.

[0060] In the end effector 1 shown in Figures 13 and 14, the structure of the main body 4, the linkage mechanism 7, and the actuator 8 is the same as that in Figure 12. Their common structure will be explained with reference to Figure 13.

[0061] The main body 4 has a storage space R and an opening Q communicating with the storage space R. In the example of Figure 13, the main body 4 is a columnar body extending along a first direction. The first direction is, for example, vertical (Z direction). It should be noted that the first direction is not limited to the vertical direction. For example, in the application example of Figure 15, the first direction is a direction with a specified angle θ3 relative to the vertical direction.

[0062] The main body 4 has a first wall 461, a second wall 462, a third wall 463, and a fourth wall 464 surrounding the storage space R. The first wall 461 and the third wall 463 are opposite to each other, and the second wall 462 and the fourth wall 464 are opposite to each other. The main body 4 has an opening Q at its upper end that communicates with the storage space R. It should be noted that the position of the opening Q is not limited to the position shown in Figure 13. For example, the opening Q can be located on the first wall 461, the second wall 462, the third wall 463, or the fourth wall 464.

[0063] The linkage mechanism 7 includes a linkage member 71, a guide 72, and a guide 73. The linkage member 71 is located between the actuator 8 and the mapping sensor 51. The linkage member 71 is a chain-like structure in which unit units U are rotatably connected to each other. The unit units U allow the linkage member 71 to be displaced in a first direction and a second direction. The second direction is, for example, a horizontal direction (X direction or Y direction). The unit units U have the same construction as in the embodiment described above. The unit units U are connected to each other in a manner that prevents the linkage member 71 from being displaced in a third direction, such as the Z direction. The third direction is the direction opposite to the second direction.

[0064] The guide 73 is located outside the opening Q of the main body 4. In the example of FIG. 13, the guide 73 is located above the opening Q of the main body 4. The guide 73 guides the second end 712 of the linkage member 71 in the second direction. The guide 73 converts the stroke of the first end 711 of the linkage member 71 moved in the first direction by the actuator 8 into the displacement of the second end 712 of the linkage member 71 in the second direction. A mapping sensor 51 is connected to the second end 712 of the linkage member 71. That is, the guide 73 converts the stroke of the first end 711 of the linkage member 71 moved in the first direction by the actuator 8 into the displacement of the mapping sensor 51 in the second direction. The guide 73 is the wall that covers the opening Q when viewed from above at the upper end of the fourth wall 464. A gap is provided between the opening Q and the lower surface of the guide 73, through which the linkage member 71 guided in the second direction can pass.

[0065] The defining part 72 defines the angle θ2 between the first direction and the second direction, and supports the mapping sensor 51 together with the link member 71. In the illustration, the defining part 72 extends along the outer surface of the link member 71. The structure and function of the defining part 72 are the same as in the embodiment described above. In the example of FIG12, the second end of the defining part 72 is fixed to the unit cell U located at the front end in the second direction using a fixing part 76.

[0066] (Modification 5) The linkage mechanism 7 shown in FIG13 or FIG14 can also be applied to the mapping device 50 supported by the loading port 5. FIG15 shows an example of applying the linkage mechanism 7 shown in FIG13 or FIG14 to the mapping device 50. In this modification, the mapping device 50 has a mapping sensor 51, a main body 4, a linkage mechanism 7, and an actuator 8. It should be noted that the structure of the mapping sensor 51, the main body 4, the linkage mechanism 7, and the actuator 8 related to this modification is the same as that of the aforementioned modification 4.

[0067] As shown in FIG. 15, the loading port 5 includes a mounting stage 55 on which the FOUP 92 is mounted and a mapping device 50. The mapping device 50 maps the substrate 91 housed in the FOUP 92 mounted on the mounting stage 55. The mapping device 50 is supported, for example, by a wall 56 on the side of the opening 93 of the FOUP 92 of the loading port 5. The mapping device 50 is supported such that the mapping sensor 51 is located in front of the opening 93 of the FOUP 92. The support structure of the mapping device 50 is not particularly limited. In the example of FIG. 15, the lower end of the main body 4 is supported on the wall 56 by a support member 57 at a position lower than the FOUP 92. The main body 4 is supported, for example, at an angle θ3 relative to the vertical direction. If the actuator 8 is displaced in the first direction, the stroke of the actuator 8 is converted into a displacement in the front-back direction (Y direction) of the mapping sensor 51. Thus, the mapping sensor 51 can be brought close to the substrate as the object of sensing for mapping.

[0068] As described above, according to Modification 4 or Modification 5, when mapping the substrate 91, even if a horizontal space cannot be obtained, as long as there is a vertical space, the mapping sensor 51 can be extended in the horizontal direction.

[0069] (Pattern) The aforementioned implementation form is a specific example of the following pattern.

[0070] (First type) A linkage mechanism 7 for a robot, the linkage mechanism 7 being located between an actuator 8 and an actuation part 6 of a robot 2, the linkage mechanism 7 including a linkage component 71, a guide 73 and a defining part 72, the aforementioned linkage component 71 being a chain-like structure in which unit units U are rotatably connected to each other, extending along a first direction, and having a first end connected to the aforementioned actuator 8, the aforementioned guide 73 guiding the second end of the aforementioned linkage component 71 connected to the aforementioned actuation part 6 in a second direction, converting the stroke of the aforementioned actuator 8 in the aforementioned first direction into the displacement of the aforementioned actuation part 6 in the aforementioned second direction, the aforementioned defining part 72 defining the angle between the aforementioned first direction and the aforementioned second direction of the aforementioned linkage component 71, and supporting the aforementioned actuation part 6 together with the aforementioned linkage component 71.

[0071] By converting the stroke of the actuator 8 in the first direction into the displacement of the actuating part 6 in the second direction, the robot 2 can be miniaturized compared with the prior art (e.g., Patent Document 1).

[0072] (Second version) The linkage mechanism described in the first version, wherein the aforementioned unit units U are connected to each other in such a way that the aforementioned linkage members 71 are displaced from the aforementioned first direction to the aforementioned second direction and the aforementioned linkage members 71 are not displaced from the aforementioned first direction to the third direction opposite to the aforementioned second direction, and the aforementioned defining part 72 is a strip-shaped body located on the surface of the aforementioned linkage member 71 corresponding to the aforementioned third direction.

[0073] (Third version) The linkage mechanism as described in the second version includes an adjustment part 78, which is connected to the end of the aforementioned strip to adjust the tension of the aforementioned strip.

[0074] (Fourth type) The linkage mechanism as described in the first or second type, wherein the aforementioned defining part 72 defines the angle between the aforementioned first direction and the aforementioned second direction of the aforementioned linkage member 71 as 90 degrees.

[0075] (Fifth Version) An end effector 1 for a robot 2, the end effector 1 holding a substrate 91 includes a main body 4, a linkage member 71, a guide 73, an actuating part 6, and a defining part 72. The main body 4 has storage spaces R1 and R2 and openings Q1 and Q2 communicating with the storage spaces R1 and R2. The linkage member 71 is a chain-like linkage member 71 that rotatably connects unit units U to each other, and extends from the storage spaces R1 and R2 through the openings Q1 and Q2 in a first direction to the outside of the main body 4. The guide 73 is located outside the openings Q1 and Q2 of the main body 4, and converts the stroke of the first end of the linkage member 71 moving in the first direction by the actuator 8 into the displacement of the second end of the linkage member 71 in a second direction. The actuating part 6 is connected to the second end of the linkage member 71 and holds the substrate. The aforementioned defining part 72 defines the angle between the aforementioned first direction and the aforementioned second direction of the aforementioned connecting rod member 71, and together with the aforementioned connecting rod member 71 supports the aforementioned actuating part 6.

[0076] Since the stroke of the actuator 8 in the first direction is converted into the displacement of the actuating part 6 in the second direction, the main body 4 can be miniaturized. Furthermore, compared with the prior art (for example, Patent Document 1), the robot 2 can be miniaturized.

[0077] (Sixth type) An end effector as described in the fifth type, including an actuator 8 that drives the first end of the connecting rod member 71 in the first direction.

[0078] (Seventh Embodiment) As described in the sixth embodiment, the end effector further includes second linkage members 71a, 71b, 71c, 71d and second actuating parts 6a, 6b, 6c, 6d. The second linkages 71a, 71b, 71c, 71d extend from the aforementioned storage spaces R1, R2 through the aforementioned openings Q1, Q2 along the aforementioned first direction to the exterior of the aforementioned main body 4. The second actuating parts 6a, 6b, 6c, 6d are connected to the second ends of the aforementioned second linkage members 71a, 71b, 71c, 71d and hold the second substrate 91. The actuator 8 causes the first ends of the aforementioned linkage members 71a, 71b, 71c, 71d to displace a first distance along the aforementioned first direction, and causes the first ends of the aforementioned second linkage members 71a, 71b, 71c, 71d to displace a second distance along the aforementioned first direction. The positions of the aforementioned actuators 6a, 6b, 6c, and 6d are different from those of the aforementioned second actuators 6a, 6b, 6c, and 6d in the aforementioned second direction.

[0079] (Eighth Version) As described in the sixth version, the end effector further includes second linkage members 71a, 71b, 71c, 71d, second actuating parts 6a, 6b, 6c, 6d, and second actuators 8a, 8b, 8c, 8d. The second linkages 71a, 71b, 71c, 71d extend from the aforementioned storage spaces R1, R2 through the aforementioned openings Q1, Q2 along the aforementioned first direction to the exterior of the aforementioned main body 4. The second actuating parts 6a, 6b, 6c, 6d are connected to the second ends of the aforementioned second linkage members and hold the second substrate. The second actuators 8a, 8b, 8c, 8d cause the first ends of the aforementioned second linkage members 71a, 71b, 71c, 71d to be displaced by a second distance along the aforementioned first direction. The positions of the aforementioned actuators 6a, 6b, 6c, and 6d are different from those of the aforementioned second actuators 6a, 6b, 6c, and 6d in the aforementioned second direction.

[0080] (Ninth type) The end effector as described in the sixth type, wherein the aforementioned actuator 8 includes a cylinder.

[0081] (Tenth Mode) The end effector as described in the eighth mode, wherein the aforementioned actuators 8a, 8b, 8c, 8d and the aforementioned second actuators 8a, 8b, 8c, 8d include cylinders.

[0082] (Eleventh state) A control method for an end effector, wherein an actuator 8 causes a first end of a linkage member 71 to be displaced along the aforementioned first direction, the linkage member 71 being a chain that rotatably connects unit units U to each other, and extending from the storage spaces R1, R2 of the main body through openings Q1, Q2 along the first direction to the outside of the aforementioned main body 4, a guide 73 converting the travel related to the movement of the aforementioned first end of the linkage member 71 in the aforementioned first direction into a displacement of the aforementioned second end of the linkage member 71 in the aforementioned second direction, the aforementioned second end of the linkage member 71 being displaced along the aforementioned second direction by a displacement amount corresponding to the aforementioned travel.

[0083] (Twelfth type) An end effector 1 for a robot, which maps a substrate 91, includes a main body 4, a linkage 71, a guide 73, a mapping sensor 51, and a defining part 72. The main body 4 has a storage space R and an opening Q communicating with the storage space R. The linkage 71 is a chain-like linkage 71 that rotatably connects unit units U to each other, and extends from the storage space R through the opening Q in a first direction to the outside of the main body 4. The guide 73 is located outside the opening Q of the main body 4, and converts the stroke of the first end 711 of the linkage 71 moved in the first direction by the actuator 8 into the displacement of the second end 712 of the linkage 71 in a second direction. The mapping sensor 51 is located at the second end of the linkage 71. The aforementioned specification section 72 specifies the angle between the aforementioned first direction and the aforementioned second direction of the aforementioned link member 71, and together with the aforementioned link member 71, supports the aforementioned mapping sensor 51.

[0084] In the twelfth state, the stroke of the actuator 8 in the first direction is converted into the displacement of the mapping sensor 51 in the second direction. Thus, for example, if the first direction is a vertical direction and the second direction is set to a horizontal direction, then during mapping, even if horizontal space cannot be obtained, as long as vertical space is available, the mapping sensor 51 can be extended in the horizontal direction.

[0085] (Thirteenth type) The end effector described in the twelfth type, wherein the aforementioned mapping sensor 51 is a light-transmitting sensor, which includes a light-projecting part 53 that illuminates light, and a light-receiving part 54 located opposite to the aforementioned light-projecting part 53 and receiving light emitted from the aforementioned light-projecting part 53.

[0086] (Fourteenth type) The end effector described in the twelfth type, wherein the aforementioned mapping sensor 51 is a reflective sensor, which includes a light-emitting part 53 that irradiates light onto the aforementioned substrate 91, and a light-receiving part 54 that receives light reflected from the aforementioned substrate 91.

[0087] (Fifteenth Version) A mapping apparatus 50 for mapping a substrate 91 includes a main body 4, a linkage member 71, a guide member 73, a mapping sensor 51, and a defining part. The main body 4 has a storage space R and an opening Q communicating with the storage space R. The linkage member 71 is a chain-like linkage member 71 that rotatably connects unit units U to each other, and extends from the storage space R through the opening Q in a first direction to the outside of the main body 4. The guide member 73 is located outside the opening Q of the main body 4, and converts the stroke of the first end 711 of the linkage member 71 moved in the first direction by the actuator 8 into the displacement of the second end 712 of the linkage member 71 in a second direction. The mapping sensor 51 is located at the second end 712 of the linkage member 71. The aforementioned specification defines the angle between the aforementioned first direction and the aforementioned second direction of the aforementioned link member 71, and together with the aforementioned link member 71, supports the aforementioned mapping sensor 51.

[0088] In the fifteenth state, the stroke of the actuator 8 in the first direction is converted into the displacement of the mapping sensor 51 in the second direction. Thus, for example, if the first direction is a vertical direction and the second direction is set to a horizontal direction, then during mapping, even if horizontal space cannot be obtained, as long as vertical space is available, the mapping sensor 51 can be extended in the horizontal direction.

[0089] (Sixteenth Version) The mapping apparatus described in the fifteenth version, wherein the aforementioned mapping sensor 51 is a light-transmitting sensor, which includes a light-projecting part 53 that illuminates light, and a light-receiving part 54 located opposite to the aforementioned light-projecting part 53 and receiving light emitted from the aforementioned light-projecting part 53.

[0090] (Seventeenth Version) The mapping apparatus described in the fifteenth version, wherein the aforementioned mapping sensor 51 is a reflective sensor, which includes a light-emitting part 53 that irradiates light onto the aforementioned substrate 91, and a light-receiving part 54 that receives light reflected from the aforementioned substrate 91.

[0091] (Eighteenth Version) A loading port 5 includes a mounting stage 55 and a mapping device 50. The mounting stage 55 has a FOUP 92 that holds a plurality of substrates 91. The mapping device 50 is the mapping device 50 described in any of the fifteenth to seventeenth versions, which maps the substrates 91 held in the FOUP 92 on the mounting stage 55. [Simplified Explanation of the Diagram]

[0007] Figure 1 shows a horizontal multi-joint robot. Figure 2 is a top view showing the positional relationship between the main body, linkage mechanism, actuator, and actuator. Figure 3 is a top view of area III of Figure 2. Figure 4 is a top view of area IV of Figure 2. Figure 5 is a side view showing the fixed state of the actuator. Figure 6 is a side view viewed from line VI-VI of Figures 3 and 4. Figure 7 is a side view viewed from line VII-VII of Figures 3 and 4. Figure 8 is a side view viewed from line VIII-VIII of Figures 3 and 4. Figure 9 is a side view viewed from line IX-IX of Figures 3 and 4. Figure 10 is a perspective view of the linkage mechanism, actuator, and actuator. Figure 11 is a timing diagram showing the transport action of a part of the substrate. Figure 12 is a perspective view of the linkage mechanism, actuator, and actuator related to the modified example. Figure 13 is a perspective view of the mapping device related to the modified example. Figure 14 is a perspective view of another example of the mapping device related to the modified example. Figure 15 is a diagram showing the loading port related to the modified example.

Claims

1. A linkage mechanism for a robot, located between an actuator and an actuating part of the robot, comprising a linkage component, a guide, a defining part, and an adjusting part, wherein the linkage component is a chain-like structure in which unit units are rotatably connected to each other, extends along a first direction, and a first end is connected to the actuator; the guide guides a second end of the linkage component connected to the actuating part in a second direction, converting the stroke of the actuator in the first direction into a displacement of the actuating part in the second direction; the defining part defines an angle between the first and second directions of the linkage component and supports the actuating part together with the linkage component; the adjusting part is connected to an end of the defining part and adjusts the tension of the defining part; wherein the unit units are connected to each other in a manner that allows the linkage component to displace from the first direction to the second direction and prevents the linkage component from displacing from the first direction to a third direction opposite to the second direction; and the defining part is a strip-like body located on the surface of the linkage component corresponding to the third direction.

2. The linkage mechanism of the robot as described in claim 1, wherein the aforementioned specification defines the angle between the aforementioned first direction and the aforementioned second direction of the linkage component as 90 degrees.

3. An end effector for a robot, holding a base plate, comprising a main body, a linkage member, a guide, an actuating part, and a defining part, wherein the main body has a storage space and an opening communicating with the storage space; the linkage member is a chain-like linkage member that rotatably connects unit units to each other and extends from the storage space through the opening in a first direction to the outside of the main body; the guide is located outside the opening of the main body and converts the stroke of a first end of the linkage member moving in the first direction by an actuator into a displacement of a second end of the linkage member in a second direction; the actuating part is connected to the second end of the linkage member and holds the base plate; and the defining part defines the angle between the first direction and the second direction of the linkage member and supports the actuating part together with the linkage member.

4. The end effector as described in claim 3, wherein the end effector includes the actuator that drives the first end of the linkage member in the first direction.

5. The end effector as described in claim 4, wherein the end effector further includes a second linkage member and a second actuating part, the second linkage member extending from the aforementioned storage space through the aforementioned opening along the aforementioned first direction to the exterior of the aforementioned main body, the aforementioned second actuating part being connected to the second end of the aforementioned second linkage member and holding the second substrate, the aforementioned actuator causing the aforementioned first end of the aforementioned linkage member to be displaced by a first distance along the aforementioned first direction, and causing the aforementioned first end of the aforementioned second linkage member to be displaced by a second distance along the aforementioned first direction, the positions of the aforementioned actuating part and the aforementioned second actuating part being different in the aforementioned second direction.

6. The end effector as described in claim 4, wherein the end effector further includes a second linkage member, a second actuating part, and a second actuator, the second linkage member extending from the aforementioned storage space through the aforementioned opening along the aforementioned first direction to the exterior of the aforementioned main body, the aforementioned second actuating part being connected to the second end of the aforementioned second linkage member and holding the second substrate, the aforementioned second actuator causing the first end of the aforementioned second linkage member to be displaced by a second distance along the aforementioned first direction, and the positions of the aforementioned actuating part and the aforementioned second actuating part being different in the aforementioned second direction.

7. The end effector as described in claim 4, wherein the aforementioned actuator includes a cylinder.

8. The end effector as described in claim 6, wherein the aforementioned actuator and the aforementioned second actuator include a cylinder.

9. A control method for an end effector, wherein an actuator causes a first end of a linkage member to displace along a first direction, the linkage member being a chain that rotatably connects unit units to each other and extends from a storage space of a main body through an opening along the first direction to the outside of the main body; a guide converts a travel related to the movement of the first end of the linkage member in the first direction into a displacement of the second end of the linkage member in a second direction; the second end of the linkage member displaces along the second direction by a displacement amount corresponding to the travel; wherein the unit units are connected to each other in a manner that allows the linkage member to displace from the first direction to the second direction and prevents the linkage member from displacing from the first direction to a third direction opposite to the second direction; a defining part defines the angle between the first direction and the second direction of the linkage member and supports an actuating part together with the linkage member; the defining part is a strip located on the surface of the linkage member corresponding to the third direction; and an adjusting part adjusts the tension of the strip.

10. An end effector for a robot that maps a substrate, comprising a main body, a linkage, a guide, a mapping sensor, and a defining portion, wherein the main body has a storage space and an opening communicating with the storage space, the linkage is a chain-like linkage that rotatably connects unit units to each other, and extends from the storage space through the opening in a first direction to the outside of the main body, the guide is located outside the opening of the main body, and converts the stroke of a first end of the linkage moving in the first direction by an actuator into a displacement of a second end of the linkage in a second direction, the mapping sensor is located at the second end of the linkage, and the defining portion defines the angle between the first direction and the second direction of the linkage, and supports the mapping sensor together with the linkage.

11. The end effector as described in claim 10, wherein the aforementioned mapping sensor is a light-transmitting sensor, which includes a light-projecting part that emits light and a light-receiving part located opposite to the aforementioned light-projecting part and receiving light emitted from the aforementioned light-projecting part.

12. The end effector as described in claim 10, wherein the aforementioned mapping sensor is a reflective sensor, which includes a light-emitting portion that illuminates the aforementioned substrate and a light-receiving portion that receives light reflected from the aforementioned substrate.

13. A mapping apparatus for mapping a substrate, comprising a main body, a linkage member, a guide member, a mapping sensor, and a defining portion, wherein the main body has a storage space and an opening communicating with the storage space, the linkage member is a chain-like linkage member that rotatably connects unit units to each other, and extends from the storage space through the opening in a first direction to the outside of the main body, the guide member is located outside the opening of the main body, and converts the stroke of a first end of the linkage member moving in the first direction by an actuator into a displacement of a second end of the linkage member in a second direction, the mapping sensor is located at the second end of the linkage member, and the defining portion defines the angle between the first direction and the second direction of the linkage member, and supports the mapping sensor together with the linkage member.

14. The mapping apparatus as described in claim 13, wherein the aforementioned mapping sensor is a light-transmitting sensor, comprising an irradiation section for irradiating light and a light-receiving section located opposite the aforementioned irradiation section and receiving light emitted from the aforementioned irradiation section.

15. The mapping apparatus as described in claim 13, wherein the mapping sensor is a reflective sensor, comprising an irradiation section for irradiating light onto the substrate and a light-receiving section for receiving light reflected from the substrate.

16. A loading port comprising a loading stage and a mapping device, wherein the loading stage holds a FOUP for storing a plurality of substrates, and the mapping device is the mapping device described in any one of claims 13 to 15, which maps the substrates stored in the FOUP placed on the loading stage.

Images