Wet process device

Abstract

A wet processing apparatus includes a rotating mechanism, a plurality of recovery rings, and a recovery cup. The rotating mechanism includes a rotating table for placing a substrate. Each recovery ring includes a sleeve and a disc surrounding the sleeve. The sleeve surrounds the rotating table, and each recovery ring is used to collect process liquid corresponding to one of a plurality of processes. The recovery cup includes a cup bottom and a baffle wall. The cup bottom is fitted onto the rotating mechanism, and the baffle wall surrounds the cup bottom and is located between the rotating table and the sleeve of one of the plurality of recovery rings, depending on the corresponding process.

Claims

1. A wet process apparatus suitable for multiple processes, the wet process apparatus comprising: A rotating mechanism includes a rotating table for placing a substrate; A plurality of recycling rings, each recycling ring including a sleeve and a disc surrounding the sleeve, the sleeve being fitted around the rotary table, and each recycling ring being used to collect process liquid corresponding to one of the plurality of processes; and a recycling cup including a cup bottom and a baffle wall, the cup bottom being fitted onto the rotating mechanism, the baffle wall being arranged around the cup bottom, and the baffle wall being located between the rotary table and the sleeve of one of the plurality of recycling rings according to the corresponding process.

2. The wet process apparatus as claimed in claim 1, wherein the top of the baffle of the recovery cup is located above the disc surface of the corresponding recovery ring.

3. The wet process apparatus as claimed in claim 1, wherein the bottom of the recycling cup is located below the corresponding recycling ring.

4. The wet process apparatus as claimed in claim 1, wherein the top of the baffle of the recovery cup is located between the disc surface of the corresponding recovery ring and one of the upper surfaces of the rotary table.

5. The wet process apparatus as claimed in claim 1, wherein the width between the baffles of the recovery cup is greater than the diameter of the rotary table.

6. The wet process apparatus as claimed in claim 1, wherein the recovery cup further includes at least one discharge port connected to the recovery cup.

7. The wet process equipment as claimed in claim 6 further includes a discharge device comprising at least one discharge pipe and at least one valve, one end of the discharge pipe being connected to the discharge port and the other end being connected to the valve, wherein the valve is opened or closed according to the corresponding process.

8. The wet process apparatus as claimed in claim 6, wherein the bottom of the recovery cup is located above the discharge port near the rotating mechanism.

9. The wet process apparatus as claimed in claim 1, wherein the recycling cup further includes at least one cleaning device disposed on the baffle wall for cleaning the interior of the recycling cup.

10. The wet process apparatus as claimed in claim 1, wherein the rotating mechanism further includes a shaft with one end connected to the rotary table, and the recovery cup further includes a sleeve disposed on the bottom of the cup for fitting onto the shaft.

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