Multi-channel optical interferometric microscope system and focusing method thereof

Abstract

A multi-channel optical interferometric microscopy system and its focusing method are proposed. The method includes: a sample supported on a stage plane; at least three lenses of a multi-lens device taking multiple images of the sample at multiple different scanning distances; and a photosensitive device generating multiple sets of corresponding scanned images. A computing device runs an interference judgment model to identify at least three interference scanned images with interference fringes in the scanned image sets and outputs the corresponding interference fringe positions. The computing device determines the corresponding sample height based on the interference fringe positions and sample specifications, and calculates the initial tilt angle of the stage plane based on the relative positions of the lenses and the scanning distances. The computing device drives an adjustment device to correct the stage plane based on the initial tilt angle.

Claims

1. A focusing method for a multi-channel optical interference microscope system, the multi-channel optical interference microscope system comprising a multi-lens device, a photosensitive device, a stage, an adjustment device, and a computing device, the focusing method comprising: A sample is supported on a platform plane of the platform; The sample is photographed multiple times using at least three lenses of the multi-lens device, and multiple scan image sets are generated via the photosensitive device. These scan image sets correspond to multiple different scanning distances between the multi-lens device and the stage plane, and each of the scan image sets includes at least three scan images corresponding to the at least three lenses. The computing device runs an interference judgment model to find at least three interference scan images in the scan image sets that contain interference fringes and correspond to the at least three lenses, and outputs the positions of at least three interference fringes corresponding to the at least three interference scan images. The computing device runs a tilt correction program to determine at least three sample heights corresponding to the at least three interference scan images based on the positions of the at least three interference fringes and a specification of the sample, and calculates an initial tilt angle of the stage plane based on the scanning distances corresponding to the at least three interference scan images, the at least three sample heights, and the relative positions of the at least three lenses, and drives the adjustment device to correct the stage plane based on the initial tilt angle.

2. The focusing method of the multi-channel optical interference microscope system as described in claim 1, wherein the multi-channel optical interference microscope system has a central optical axis, and the scanning distance is the distance between the multi-lens device and the stage plane on the central optical axis.

3. The focusing method of the multi-channel optical interference microscope system as described in claim 2, wherein correcting the stage plane with the adjustment device based on the initial tilt angle includes: Make the plane of the stage perpendicular to the central optical axis.

4. A focusing method for a multichannel optical interference microscope system as claimed in claim 1, wherein the photosensitive device includes at least three photosensitive elements corresponding to the at least three lenses, the at least three photosensitive elements being used to generate the at least three scan images respectively.

5. The focusing method of the multi-channel optical interference microscope system as described in claim 1 further includes: The computing device divides each of the scanned image groups into the at least three scanned images.

6. The focusing method of the multi-channel optical interference microscope system as described in claim 1, wherein for any of the at least three lenses, when the interference judgment model finds that multiple candidate images all contain the interference fringes, the computing device selects one of the candidate images as one of the at least three interference scan images based on the distance between the interference fringes and a reference point, wherein the reference point is the center point of any of the lenses projected onto the candidate images.

7. The focusing method for a multichannel optical interference microscope system as described in claim 1, wherein the interference judgment model is a triplet net comprising multiple branches, each of which is a YOLO model used to find the interference fringes.

8. The focusing method of the multichannel optical interference microscope system as described in claim 1, wherein the interference fringe is a zero-order interference fringe.

9. A focusing method for a multichannel optical interference microscope system as claimed in claim 1, wherein the sample includes a plurality of regions of interest, and each of the at least three interference fringe positions includes a number of a candidate region among the regions of interest and regional plane coordinates based on the candidate region.

10. The focusing method of the multi-channel optical interferometric microscope system as described in claim 9, wherein the tilt correction program is run by the computing device to calculate the initial tilt angle of the stage plane based on at least three of the scanning distances corresponding to the at least three interferometric scan images, the at least three sample heights, and the relative positions of the at least three lenses, comprising: The X and Y coordinates of at least three global plane coordinates are calculated based on the candidate region number, the planar coordinates of the region, and the relative positions of the at least three lenses; the Z coordinate of the at least three global plane coordinates is calculated based on at least three of the scanning distances and the heights of the at least three samples; a stage plane equation is fitted to a stage plane based on the at least three global plane coordinates; a base plane equation is fitted based on the relative positions of the at least three lenses; and the initial tilt angle is calculated based on the normal vectors of the stage plane equation and the base plane equation, respectively.

11. A multi-channel optical interference microscopy system, comprising: A stage having a stage plane to support a sample; a photosensitive device; A multi-lens device includes at least three lenses for capturing multiple images of a sample to generate multiple sets of scanned images via a photosensitive device, wherein the sets of scanned images correspond to multiple different scanning distances between the multi-lens device and the stage plane, and each set of scanned images includes at least three scanned images corresponding to the at least three lenses; a storage device electrically connected to the photosensitive device to store the sets of scanned images and for storing specification data of the sample and the relative positions of the at least three lenses; and an adjustment device connected to the stage to adjust the stage plane. A computing device, electrically connected to the photosensitive device, the storage device, and the adjustment device, is configured to run an interference judgment model to identify at least three interference scan images in the scan image set that contain interference fringes and correspond to the at least three lenses respectively, and output the positions of at least three interference fringes corresponding to the at least three interference scan images. The computing device is further configured to run a tilt correction program to determine at least three sample heights corresponding to the at least three interference scan images based on the positions of the at least three interference fringes and the specification data, and calculate an initial tilt angle of the stage plane based on the scanning distances corresponding to the at least three interference scan images, the at least three sample heights, and the relative positions of the at least three lenses, and drive the adjustment device to correct the stage plane based on the initial tilt angle.

12. The multi-channel optical interference microscope system as claimed in claim 11 further includes a central optical axis, and the scanning distance is the distance between the multi-lens device and the stage plane on the central optical axis.

13. The multichannel optical interference microscope system as claimed in claim 12, wherein the computing device drives the adjustment device to correct the stage plane system so that the stage plane is perpendicular to the central optical axis based on the initial tilt angle.

14. The multichannel optical interference microscope system as claimed in claim 11, wherein the photosensitive device includes at least three photosensitive elements corresponding to the at least three lenses, the at least three photosensitive elements being used to generate the at least three scan images respectively.

15. The multichannel optical interference microscope system as claimed in claim 11, wherein the computing device is further configured to divide each of the scanned image groups into the at least three scanned images.

16. The multichannel optical interference microscope system as described in claim 11, wherein, For any of the at least three lenses, when the interference judgment model finds that multiple candidate images have the interference fringes, the computing device is further used to select one of the candidate images as one of the at least three interferometric scan images based on the distance between the interference fringes and a reference point, wherein the reference point is the center point of any lens projected onto the candidate images.

17. The multichannel optical interference microscopy system as claimed in claim 11, wherein the interference judgment model is a triplet net comprising multiple branches, each of which is a YOLO model for finding the interference fringes.

18. The multichannel optical interference microscopy system as claimed in claim 11, wherein the interference fringes are zero-order interference fringes.

19. The multichannel optical interference microscopy system of claim 11, wherein the sample includes a plurality of regions of interest, each of the at least three interference fringe locations including a candidate region number among the regions of interest and regional planar coordinates based on the candidate region.

20. The multichannel optical interferometric microscopy system of claim 19, wherein the computing device runs the tilt correction procedure to calculate the initial tilt angle of the stage plane based on at least three of the scanning distances corresponding to the at least three interferometric scan images, the at least three sample heights, and the relative positions of the at least three lenses, including: The X and Y coordinates of at least three global plane coordinates are calculated based on the candidate region number, the planar coordinates of the region, and the relative positions of the at least three lenses; the Z coordinate of the at least three global plane coordinates is calculated based on at least three of the scanning distances and the heights of the at least three samples; a stage plane equation is fitted to a stage plane based on the at least three global plane coordinates; a base plane equation is fitted based on the relative positions of the at least three lenses; and the initial tilt angle is calculated based on the normal vectors of the stage plane equation and the base plane equation, respectively.

Images