probe structure

Abstract

This invention discloses a probe structure comprising a conductive needle body and an insulating protective layer. The conductive needle includes a middle section and a first contact section and a second contact section respectively connected to both ends of the middle section. The insulating protective layer comprises a first material surrounding the middle section and a second material surrounding the first material. The first material and the second material have a weight ratio between 1:9 and 9:1. The first material is selected from at least one of alumina and silicon oxide. The second material is selected from at least one of poly(p-xylene), hexamethyldisiloxane, ethyl silicate, 1,1,3,3-tetramethyldisiloxane, tetramethylsilane, octamethylcyclotetrasiloxane, octafluorocyclobutane, trifluoromethane, hexafluoropropylene oxide, methane, acetylene, toluene, allyl, acrylic acid, allyl alcohol, and maleic anhydride.

Claims

1. A probe structure comprising: A conductive needle body includes a middle section and a first contact section and a second contact section respectively connected to both ends of the middle section; and an insulating protective layer disposed on the conductive needle body, the insulating protective layer comprising: a first material surrounding the middle section; and a second material surrounding the first material; wherein the first material and the second material have a weight ratio between 1:9 and 9:1; wherein the first material is selected from at least one of alumina, silicon oxide, gallium oxide, titanium oxide, tantalum oxide, magnesium oxide, boron oxide, niobium oxide, molybdenum oxide, hafnium oxide, and indium oxide; wherein the second material is selected from at least one of poly(p-xylene), hexamethyldisiloxane, tetraethyl orthosilicate, 1,1,3,3-tetramethyldisiloxane, tetramethylsilane, octamethylcyclotetrasiloxane, octafluorocyclobutane, trifluoromethane, hexafluoropropylene oxide, methane, acetylene, toluene, allyl, acrylic acid, allyl alcohol, and maleic anhydride.

2. The probe structure as described in claim 1, wherein, The first material has an average thickness between 10 nanometers (nm) and 1000 nanometers, and the second material has an average thickness between 10 nanometers and 1000 nanometers.

3. The probe structure as described in claim 2, wherein, The average thickness of the second material is not greater than the average thickness of the first material.

4. The probe structure as described in claim 1, wherein, The first material covers the outer periphery of the second material and contacts the conductive needle.

5. The probe structure as described in claim 1, wherein, The conductive needle body defines a central axis, and the length of the intermediate segment on the central axis has a ratio between 50% and 70% relative to the length of the conductive needle body on the central axis.

6. The probe structure as described in claim 5, wherein, The length of the first contact segment on the central axis is between 10% and 30% of the length of the conductive needle body on the central axis, and the length of the second contact segment on the central axis is between 10% and 30% of the length of the conductive needle body on the central axis.

7. The probe structure as described in claim 1, wherein, The first material has a hardness between 5 GPa and 10 GPa, and the second material has a hardness between 5 GPa and 10 GPa.

8. The probe structure as described in claim 1, wherein, The middle section of the conductive needle is selected from at least one of the following: straight, arc-shaped, wavy, and spiral.

9. The probe structure as described in claim 1, wherein, The insulating protective layer has a resistance range of 1x10⁸ ohms per unit area to 9x10¹¹ ohms per unit area.

10. A probe structure comprising: A conductive needle body includes a middle section, and a first contact section and a second contact section respectively connected to both ends of the middle section; An insulating protective layer surrounds the intermediate segment, the insulating protective layer comprising an alternating mixture of a first material and a second material; wherein the first material and the second material have a weight ratio between 1:9 and 9:1; wherein the first material is selected from at least one of alumina, silicon oxide, gallium oxide, titanium oxide, tantalum oxide, magnesium oxide, boron oxide, niobium oxide, molybdenum oxide, hafnium oxide, and indium oxide; wherein the second material is selected from at least one of poly(p-xylene), hexamethyldisiloxane, tetraethyl orthosilicate, 1,1,3,3-tetramethyldisiloxane, tetramethylsilane, octamethylcyclotetrasiloxane, octafluorocyclobutane, trifluoromethane, hexafluoropropylene oxide, methane, acetylene, toluene, allyl, acrylic acid, allyl alcohol, and maleic anhydride.

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