Edge-reinforced carrier plate structure

Abstract

An edge-reinforced carrier structure includes a wafer carrier, at least one anti-deformation frame, and an adhesive layer. The wafer carrier includes a substrate, a rigid carrier, a plurality of metal pillars, a resin layer, a first circuit layer, and a second circuit layer. Each anti-deformation frame includes a first frame portion, a second frame portion, and a side frame portion. The first frame portion is located on an upper surface, corresponding to at least a portion of a peripheral region. The second frame portion is located below a lower surface, corresponding to the first frame portion. The side frame portions are located outside at least one of the four side surfaces of the substrate, connecting the first frame portion and the second frame portion, such that an accommodating space is formed between the first frame portion, the second frame portion, and the side frame portions. The adhesive layer is located in the accommodating space, bonding at least one anti-deformation frame to a portion of the peripheral region of the substrate.

Claims

1. An edge-reinforced carrier structure, comprising: a wafer carrier, comprising: a substrate, including a top surface, a bottom surface, and four side surfaces, the four side surfaces being respectively connected to the top surface and the bottom surface, the substrate defining an active region and a peripheral region, the peripheral region surrounding the active region, the substrate having a plurality of first through holes penetrating the top surface and the bottom surface in the active region; a rigid carrier disposed in the active region of the top surface of the substrate, the rigid carrier having a plurality of second through holes penetrating a first surface and a second surface of the rigid carrier; a plurality of metal pillars respectively filled in the second through holes; a resin layer located on the top surface of the substrate and the rigid carrier, covering the rigid carrier and the top surface of the substrate, the resin layer having a plurality of openings, the openings respectively corresponding to the second through holes; A first circuit layer is located on a portion of a surface of the resin layer and in the openings, and connected to the metal pillars; and a second circuit layer is located on a portion of a lower surface of the substrate and in the first through holes, and connected to the metal pillars; at least one anti-deformation frame, each anti-deformation frame including a first frame portion, a second frame portion and a side frame portion, the first frame portion being located on the upper surface and corresponding to at least a portion of the peripheral region, the second frame portion being located below the lower surface and corresponding to the first frame portion, the side frame portion being located outside at least one of the four side surfaces of the substrate, the side frame portion connecting the first frame portion and the second frame portion, such that an accommodating space is formed between the first frame portion, the second frame portion and the side frame portion; and an adhesive layer is located in the accommodating space, for bonding the at least one anti-deformation frame to a portion of the peripheral region of the substrate.

2. The edge-reinforced carrier structure as described in claim 1, wherein the first frame portion of each of the deformation-resistant frames includes a first horizontal frame and a first vertical frame, the second frame portion includes a second horizontal frame and a second vertical frame, the side frame portion includes a first side frame and a second side frame, the length of the first horizontal frame is less than the length of one horizontal side of the substrate, the length of the first vertical frame is less than the length of one vertical side of the substrate, and extends from the first horizontal frame in a generally vertical direction, the second horizontal frame corresponds to the first horizontal frame, the second vertical frame corresponds to the second vertical frame, the first side frame connects one side of the first horizontal frame and the second horizontal frame, and the second side frame connects one side of the first vertical frame and the second vertical frame.

3. The edge-strengthened carrier plate structure as described in claim 2, wherein the edge-strengthened carrier plate structure includes a four-strength deformation-resistant frame.

4. The edge-reinforced carrier structure as described in claim 2, wherein the edge-reinforced carrier structure includes a second deformation-resistant frame disposed diagonally on the substrate.

5. The edge-reinforced carrier plate structure as described in claim 1, wherein the edge-reinforced carrier plate structure includes two deformation-resistant frames, each deformation-resistant frame having a first frame portion including a first transverse frame and two first longitudinal frames, a second frame portion including a second transverse frame and two second longitudinal frames, and a side frame portion including a first side frame and two second side frames, the length of each first transverse frame being greater than or equal to the length of one transverse side of the substrate, the length of each of the two first longitudinal frames being less than the length of one longitudinal side of the substrate, the two first longitudinal frames extending from both ends of the first transverse frame in a substantially perpendicular direction, the second transverse frame corresponding to the first transverse frame, the two second longitudinal frames corresponding to the two second longitudinal frames, the first side frame connecting one side of the first transverse frame and the second transverse frame, and the two second side frames connecting one of the two first longitudinal frames and one of the two second longitudinal frames.

6. The edge-reinforced carrier plate structure as described in claim 1, wherein the edge-reinforced carrier plate structure includes two deformation-resistant frames, each deformation-resistant frame having a first frame portion including two first transverse frames and a first longitudinal frame, a second frame portion including two second transverse frames and a second longitudinal frame, and a side frame portion including two first side frames and a second side frame, the length of each first transverse frame being less than the length of one transverse side of the substrate, the length of each first longitudinal frame being greater than or equal to the length of one longitudinal side of the substrate, the two ends of each first longitudinal frame being connected to the two first transverse frames respectively and extending in a direction substantially perpendicular to the two first transverse frames, the two second transverse frames corresponding to the two first transverse frames, the second longitudinal frame corresponding to the second longitudinal frame, each first side frame being connected to one of the two first transverse frames and one of the two second transverse frames respectively, and the second side frame being connected to one side of the first longitudinal frame and the second longitudinal frame.

7. The edge-reinforced carrier plate structure as described in claim 1, wherein the edge-reinforced carrier plate structure includes a deformation-resistant frame, the first frame portion of the deformation-resistant frame includes two first transverse frames and two first longitudinal frames, the second frame portion includes two second transverse frames and two second longitudinal frames, the side frame portion includes two first side frames and two second side frames, the length of each first transverse frame is greater than or equal to the length of one transverse side of the substrate, the length of each first longitudinal frame is greater than or equal to the length of one longitudinal side of the substrate, the two ends of each first longitudinal frame are respectively connected to the two first transverse frames and extend in a direction substantially perpendicular to the two first transverse frames, the two second transverse frames correspond to the two first transverse frames, the two second longitudinal frames correspond to the two second longitudinal frames, each first side frame is respectively connected to one of the first transverse frames and one of the two second transverse frames, and each second side frame is connected to one of the two first longitudinal frames and one of the two second longitudinal frames.

8. The edge-reinforced carrier structure as described in claim 1, wherein the rigidity of the at least one deformation-resistant frame is greater than the rigidity of the substrate.

9. The edge-reinforced carrier structure as described in claim 8, wherein the at least one deformation-resistant frame is selected from the group consisting of metal, carbon fiber, graphite fiber, carbon fiber polymer composite, and metal polymer composite.

10. The edge-reinforced carrier structure as claimed in claim 1, wherein the plurality of rigid carriers are selected from the group consisting of a glass carrier, a ceramic carrier, and a carbon fiber carrier.

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