Replacement mechanism for the filter structure of the wafer box

Abstract

This invention relates to a replacement mechanism for the filter structure of a wafer cassette, comprising: a wafer stage, a multi-axis moving device, a suction and discharge device, a pressurizing device, and a clamping device. The wafer stage carries a wafer cassette. The multi-axis moving device includes a plurality of moving components, respectively disposed on the side and top of the wafer stage. The suction and discharge device and the pressurizing device are arranged adjacent to each other. The clamping device is located on one side of the pressurizing device; wherein the wafer stage moves the wafer cassette to a preset position, and the multi-axis moving device moves the suction and discharge device, the pressurizing device, and the clamping device to the preset position respectively according to a replacement sequence. By providing an automated replacement mechanism, the replacement efficiency of the filter structure of the wafer cassette can be effectively improved.

Claims

1. A replacement mechanism for the filter structure of a wafer cassette, comprising: A wafer stage is used to support a wafer box; A multi-axis moving device includes a plurality of moving components, which are movably disposed on the side and above of the wafer stage; a pick-and-place device is disposed on one of the moving components; a pressurizing device is disposed on one side adjacent to the pick-and-place device; and a clamping device is disposed on one side adjacent to the pressurizing device; wherein the wafer stage moves the wafer cassette to a preset position, and the moving device moves the pick-and-place device, the pressurizing device, and the clamping device to the preset position respectively according to a replacement step sequence.

2. The replacement mechanism for the filter structure of the wafer cassette as described in claim 1, wherein the wafer cassette has a wafer cassette body, a filter screen and a separator, the wafer cassette body has at least one vent hole, wherein the suction and release device is used to suction out the filter screen from the vent hole or place the filter screen in the vent hole; the pressurizing device pressurizes the separator toward the vent hole; and the clamping and placing device is used to clamp out the separator from the vent hole or place the separator in the vent hole.

3. The replacement mechanism for the filter structure of the wafer cassette as described in claim 2, wherein the suction and discharge device includes a suction and discharge component and a lifting drive component, the suction and discharge component being disposed on one side of the lifting drive component, wherein the lifting drive component drives one end of the suction and discharge component into the vent of the wafer cassette.

4. The replacement mechanism for the filter structure of the wafer cassette as described in claim 2, wherein the clamping device includes a clamp and a clamping drive, the clamping drive driving the clamp to clamp the separator or release the separator.

5. The replacement mechanism for the filter structure of the wafer cassette as described in claim 2, wherein the pressurizing device includes a pressurizing member and a pressurizing driving member, the pressurizing driving member driving the pressurizing member to press the separator toward the vent.

6. The wafer cassette filter structure replacement mechanism as described in claim 1, wherein the moving components of the multi-axis moving device include a first moving component, a second moving component, and a third moving component; the first moving component is disposed on the side of the wafer stage, the second moving component is disposed on the first moving component and is located above the wafer stage, and the third moving component is disposed on the second moving component and is located above the wafer stage.

7. The replacement mechanism for the filter structure of the wafer cassette as described in claim 6, wherein the first moving component includes a first slide rail, a first sliding member and a moving bracket, the first sliding member is slidably disposed on the first slide rail, the moving bracket is disposed on the first sliding member, wherein the first sliding member drives the moving bracket to move along the first slide rail, and the second moving component is disposed on the moving bracket.

8. The replacement mechanism for the filter structure of the wafer cassette as described in claim 7, wherein the second moving component includes a second slide rail, a second sliding member and a moving plate, the second slide rail extending along the frame of the moving bracket, the second sliding member slidably disposed on the second slide rail, the moving plate disposed on the second sliding member, and the third moving component disposed on the moving plate.

9. The replacement mechanism for the filter structure of the wafer cassette as described in claim 8, wherein the third moving component includes a first lifting member, a first moving member, a second lifting member, and a second moving member, wherein the first moving member is movably disposed on one side of the first lifting member, and the suction and release device is disposed on the first moving member; the second moving member is movably disposed on one side of the second lifting member, and the pressurizing device and the clamping device are disposed on the second moving member.

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