Semiconductor process carrier rescue equipment

Abstract

A semiconductor process carrier rescue device is installed in a storage facility including multiple storage locations. The device includes a trolley and a transfer mechanism. At least one coarse positioning sensor is installed on the trolley. The transfer mechanism includes a lifting device and a robotic arm. The lifting device is mounted on the trolley, and the robotic arm is mounted on the lifting device. The robotic arm has at least one X-axis direction sensor, at least one Y-axis direction sensor, and at least one Z-axis direction sensor. The trolley can be pushed along the X-axis and performs coarse positioning in the X-axis direction using the coarse positioning sensors. It can also control the transfer mechanism to activate the X-axis and Z-axis direction sensors to detect the X and Z axes, respectively, and operate the lifting device and robotic arm to complete positioning in the X and Z axes. Furthermore, the robotic arm can move along the Y-axis and activate the Y-axis direction sensor to detect the Y-axis direction, thereby retrieving the carrier from the storage location. As a result, personnel can easily salvage goods, and the operation is precise and safe.

Claims

1. A semiconductor process carrier rescue device, disposed in a storage unit, the storage unit having a frame with multiple storage positions, each storage position capable of holding a tray, the tray capable of supporting a carrier, the multiple storage positions arranged in multiple layers along a Z-axis, each layer having multiple storage positions, the multiple storage positions in each layer arranged along an X-axis, the carrier capable of moving in and out of the storage positions along a Y-axis, the semiconductor process carrier rescue device comprising: A handcart, the handcart having a body and multiple wheels, the multiple wheels being disposed on the underside of the body, the body being provided with at least one coarse positioning sensing device; and a transfer mechanism, the transfer mechanism including a lifting device and a robotic arm, the lifting device being disposed on the body of the handcart, the robotic arm being disposed on the lifting device, the lifting device being able to drive the robotic arm to move in the Z-axis direction, the robotic arm being able to move in the X-axis direction and the Y-axis direction, one end of the robotic arm being provided with a toothed fork mechanism for supporting the carrier, the robotic arm being provided with at least one X-axis direction sensing device, at least one Y-axis direction sensing device and at least one Z-axis direction sensing device; The trolley can be pushed along the X-axis and coarsely positioned in the X-axis direction by detecting the at least one coarse positioning sensor. It can also control the operation of the transfer mechanism, activate the at least one X-axis sensor and the at least one Z-axis sensor to detect the X-axis and Z-axis directions respectively, and operate the lifting device and the robotic arm to complete the positioning in the X-axis and Z-axis directions. The robotic arm can also be used to move along the Y-axis and activate the at least one Y-axis sensor to detect the Y-axis direction in order to retrieve the carrier from the storage space.

2. The semiconductor process carrier salvage equipment as described in claim 1, wherein, It also includes a touch screen, which is electrically connected to the trolley and the transfer mechanism via wired or wireless means, and can be used to control the operation of the trolley and the transfer mechanism. The touch screen can input the number of the storage compartment, and then activate the at least one X-axis direction sensing device and the at least one Z-axis direction sensing device to detect the X-axis direction and the Z-axis direction, respectively, and operate the lifting device and the robotic arm to complete the positioning in the X-axis direction and the Z-axis direction. The touch screen can also be used to operate the robotic arm to remove the carrier from the storage compartment.

3. The semiconductor process carrier salvage equipment as described in claim 1, wherein, At least one pair of alignment targets are provided on the frame, and the at least one coarse positioning sensing device can be aligned with the at least one pair of alignment targets for coarse positioning.

4. The semiconductor process carrier salvage equipment as described in claim 1, wherein, The at least one X-axis direction sensing device and the at least one Z-axis direction sensing device are image capturing devices. At least one positioning target is provided on the support plate. The lifting device and the robotic arm can be operated and moved. The image captured by the image capturing device is aligned with the at least one positioning target on the support plate to complete the positioning in the X-axis and Z-axis directions.

5. The semiconductor process carrier salvage equipment as described in claim 1, wherein, The at least one X-axis direction sensing device and the at least one Z-axis direction sensing device are image capturing devices that can take pictures and calculate error values ​​to complete the positioning in the X-axis and Z-axis directions.

6. The semiconductor process carrier salvage equipment as described in claim 1, wherein, The at least one Y-axis direction sensing device is a laser sensor, and at least one reflective sticker mark is provided on the tray. The laser light from the laser sensor can be used to illuminate the at least one reflective sticker mark on the tray to measure the distance in the Y-axis direction.

7. The semiconductor process carrier salvage equipment as described in claim 1, wherein, Each of the multiple wheels is equipped with a braking mechanism.

8. The semiconductor process carrier salvage equipment as described in claim 1, wherein, The robotic arm can also rotate, allowing it to turn in different directions to retrieve the vehicle from the storage location.

9. The semiconductor process carrier salvage equipment as described in claim 1, wherein, The trolley can move on a temporary track laid on the ground near the storage device.

10. The semiconductor process carrier salvage equipment as described in claim 1, wherein, The robotic arm has at least one pressure sensor on its toothed fork mechanism, which can be used to detect whether the vehicle is placed flat.

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