Extended optical inspection equipment and its attached infrared sensing device

Abstract

This invention provides an attachable infrared sensing device suitable for attachment to an optical inspection device. The optical inspection device includes a stage and a visible light microscope. The stage is adapted to hold an object under test. The visible light microscope includes a first housing and an objective lens that can be connected to the first housing and is adapted to observe the object under test. The attachable infrared sensing device includes: a beam splitter adapted to be connected between the objective lens and the first housing for receiving a light beam from the object under test and splitting it into visible light and infrared light; an infrared light image sensor; and a reflector optically coupled to the beam splitter and the infrared light image sensor, respectively, adapted to receive infrared light from the beam splitter and reflect the infrared light to the infrared light image sensor. An extended optical inspection device with the attachable infrared sensing device is also disclosed.

Claims

1. An attachable infrared sensing device, adapted to be attached to an optical detection device, the optical detection device comprising a stage, a visible light microscope, and an actuation platform, the stage being adapted to carry an object to be measured, the visible light microscope comprising a first housing and an objective lens capable of being connected to the first housing and adapted to observe the object to be measured, the actuation platform being adapted to drive the visible light microscope to move relative to the stage, the attachable infrared sensing device comprising: A beam splitter, adapted to be connected between the objective lens and the first housing, for receiving a light beam from the object under test and splitting it into visible light and infrared light; an infrared light image sensor; a reflector, optically coupled to the beam splitter and the infrared light image sensor respectively, adapted to receive infrared light from the beam splitter and reflect the infrared light to the infrared light image sensor; a second housing, the infrared light image sensor being located inside the second housing; and a support assembly, one end of which is fixed to the second housing, and the other end of which is fixed to several first existing fixing parts of the visible light microscope, and / or fixed to several second existing fixing parts of the actuation platform.

2. The attached infrared sensing device as described in claim 1, wherein, The support assembly includes two side supports. The second housing is provided with several connecting holes. The two side supports are connected to the several connecting holes. The two side supports are respectively fixed to the visible light microscope and / or the actuation platform from the two sides of the first housing.

3. The attached infrared sensing device as described in claim 2, wherein, One of the brackets on this side is provided with several first positioning holes suitable for alignment and engagement with the several existing first fixing parts, and the other bracket on this side is provided with several second positioning holes suitable for alignment and engagement with the several existing second fixing parts.

4. The attached infrared sensing device as described in claim 3, wherein, The bracket assembly includes an auxiliary bracket with several third positioning holes adapted to align with the several first existing fixing parts, and the auxiliary bracket is coupled to a side bracket with several second positioning holes.

5. The attached infrared sensing device as described in claim 2, wherein, The bracket assembly includes a central connecting block with several fourth positioning holes. The central connecting block is connected to the second housing, and the two side brackets are connected to the several fourth positioning holes.

6. The attached infrared sensing device as described in claim 1, wherein, The optical detection device includes a photocoupler assembly adapted to drive the visible light microscope relative to the stage to a moving platform located on a first side of the visible light microscope, and the photocoupler assembly located on a second side of the visible light microscope; the attached infrared sensing device is adapted to be located on the visible light microscope at a position different from the first side and the second side.

7. The attached infrared sensing device as described in claim 1, wherein, The optical detection device includes a dual-coupling optical assembly, which is adapted to drive the visible light microscope to move relative to the stage. The synchronizing platform is located on the first side of the visible light microscope, and the dual-coupling optical assembly is located on the second and third sides of the visible light microscope, respectively. The attached infrared sensing device is adapted to be located on the visible light microscope at a position different from the first, second, and third sides.

8. The attached infrared sensing device as described in claim 1, wherein, The test object is a silicon photonic chip, and the beam splitter is adapted to separate the light beam from the test object into a short-wave infrared beam. The wavelength range of the short-wave infrared beam covers 900 to 1700 nanometers, so that the infrared light image sensor can detect the light leakage location or light loss location of the silicon photonic chip.

9. The attached infrared sensing device as described in claim 8, wherein, The shortwave infrared beam has a wavelength of 1310 nanometers or 1550 nanometers.

10. The attached infrared sensing device as described in claim 8, wherein, The infrared imaging sensor is an indium gallium arsenide sensor.

11. An extended optical inspection device, comprising: An optical detection device includes a stage, a visible light microscope, and an actuation platform. The stage is adapted to carry an object to be tested. The visible light microscope includes a first housing and an objective lens that can be connected to the first housing and is adapted to observe the object to be tested. The actuation platform is adapted to drive the visible light microscope to move relative to the stage. An attached infrared sensing device includes: a beam splitter adapted to be connected between the objective lens and the first housing for receiving a light beam from the object to be tested and splitting it into visible light and infrared light; an infrared image sensor; a reflector optically coupled to the beam splitter and the infrared image sensor, respectively, adapted to receive infrared light from the beam splitter and reflect the infrared light to the infrared image sensor; a second housing with the infrared image sensor located inside; and a support assembly, one end of which is fixed to the second housing, and the other end of which is fixed to several first existing fixing parts of the visible light microscope and / or fixed to several second existing fixing parts of the actuation platform.

12. The extended optical inspection apparatus as described in claim 11, wherein, The test object is a silicon photonic chip, and the beam splitter is adapted to separate the light beam from the test object into a short-wave infrared beam. The wavelength range of the short-wave infrared beam covers 900 to 1700 nanometers, so that the infrared light image sensor can detect the light leakage location or light loss location of the silicon photonic chip.

13. The extended optical inspection apparatus as described in claim 12, wherein, The shortwave infrared beam has a wavelength of 1310 nanometers or 1550 nanometers.

14. The extended optical inspection apparatus as described in claim 12, wherein, The infrared imaging sensor is an indium gallium arsenide sensor.

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