Automated optical inspection equipment for glass carrier

Abstract

An automated optical inspection device for glass substrates includes a stage, a light source assembly, a moving carrier, an image acquisition device, a control device, and an analysis device. The stage carries the glass substrate to be inspected, which includes a glass core layer and a copper foil layer. The glass core layer contains a plurality of perforations, and the copper foil layer is located on the surface of the glass core layer and fills the perforations. The image acquisition device, driven by the moving carrier, acquires a plurality of images on the copper foil layer. The control device controls the movement of the moving carrier and the start and stop of the image acquisition device. The analysis device receives the images, stores and compares them with built-in standard images, and when the analysis device determines that the copper foil layer in one of the images has lattice misalignment or grain boundary dislocation, it marks it as a defect image, and the glass core layer in the corresponding area of ​​the glass substrate with the defect image has a crack.

Claims

1. An automated optical inspection device for a glass substrate, comprising: a stage for supporting a glass substrate to be inspected, the glass substrate comprising a glass core layer and a copper foil layer, the glass core layer comprising a plurality of perforations, the copper foil layer being located on a surface of the glass core layer and filling the perforations; a first light source assembly located above the stage and illuminating the copper foil layer; a moving carrier; and an image capturing device mounted on the moving carrier and moved by the moving carrier to capture a plurality of images on the copper foil layer. A control device electrically connected to the moving vehicle and the image capturing device controls the movement of the moving vehicle and the start and stop of the image capturing device according to the area of ​​the glass substrate; and an analysis device electrically connected to the control device and the image capturing device receives the images and stores and compares a plurality of built-in standard images. When the analysis device determines that the copper foil layer in one of the images has a lattice misalignment or a grain boundary dislocation, it marks it as a defect image, and the glass core layer in the region of the glass substrate corresponding to the defect image has a crack.

2. The automated optical inspection apparatus for glass substrates as described in claim 1, wherein the wavelength of the first light source group is from 300 nm to 1650 nm.

3. The automated optical inspection apparatus for glass substrates as described in claim 2, wherein the first light source group comprises a blue light source, a red light source, and a near-infrared light source.

4. The automated optical inspection apparatus for glass substrates as described in claim 1, wherein the stage is a transparent stage, and the automated optical inspection apparatus for glass substrates further includes a second light source group located below the stage, which penetrates the glass core layer to irradiate the copper foil layer.

5. The automated optical inspection apparatus for glass substrates as described in claim 4, wherein the wavelength of the second light source group is from 300 nm to 1650 nm, and a light source of a different wavelength band than the first light source group is used.

6. The automated optical inspection apparatus for glass substrates as described in claim 1, wherein the image capturing device comprises a plurality of image capturing elements.

7. The automated optical inspection apparatus for glass substrates as described in claim 6, wherein the image capturing elements are arranged in a linear array or a matrix.

8. The automated optical inspection apparatus for glass substrates as described in claim 1, wherein the resolution of the image capturing device is between 2 megapixels and 30 megapixels.

9. The automated optical inspection apparatus for glass substrates as described in claim 8, wherein the resolution of the image capturing device is between 8 megapixels and 24 megapixels.

10. The automated optical inspection apparatus for glass substrates as described in claim 9, wherein an optical system of the analysis apparatus has a resolution of 1 μm / pixel to 4.5 μm / pixel.

11. The automated optical inspection apparatus for glass substrates as described in claim 10, wherein the optical system of the analysis apparatus has a resolution of 1.5 μm / pixel to 3.5 μm / pixel.

Images