Contact probe component and test apparatus using same

Abstract

This invention provides a contact probe assembly and a suitable testing apparatus thereof, which is used to assemble and electrically connect to a wafer for wafer testing. The contact probe assembly includes a needle shaft element, a first conductive flexible body, a needle shaft base, and an elastic member. The needle shaft element includes a top abutment and an annular wall portion. The annular wall portion extends axially from the top abutment to form a receiving space and an opening, the receiving space communicating with the outside through the opening. The first conductive flexible body is disposed on the top abutment and assembles and electrically connects to the wafer. The needle shaft base is movably connected to the needle shaft element, and at least a portion of it is disposed axially through the opening in the receiving space, allowing the needle shaft element and the needle shaft base to slide relative to each other axially. The elastic member is disposed axially in the receiving space and abuts between the top abutment and the needle shaft base, providing a restoring force to drive the needle shaft element and the first conductive flexible body to abut against the wafer.

Claims

1. A contact probe assembly for electrically connecting a chip, the contact probe assembly comprising: A pin shaft element includes a top abutment and an annular wall portion, wherein the annular wall portion extends axially from the top abutment to form an accommodating space and an opening, the accommodating space communicating outward through the opening; a first conductive flexible body is connected to the pin shaft element, disposed on the top abutment, and is used to connect the chip, and the top abutment is disposed between the first conductive flexible body and the annular wall portion. A needle shaft base movably connected to the needle shaft element, wherein at least a portion of the needle shaft base passes through the opening along the axial direction and is disposed in the receiving space, and the needle shaft element and the needle shaft base are allowed to slide relative to each other along the axial direction, wherein the needle shaft element is disposed between the first conductive flexible body and the needle shaft base; and an elastic member disposed between the needle shaft element and the needle shaft base, wherein the elastic member is disposed along the axial direction in the receiving space, and the elastic member abuts against the abutting top and the needle shaft base, wherein the elastic member assembly provides a restoring force to drive the needle shaft element and the first conductive flexible body to abut against the wafer.

2. The contact probe assembly as claimed in claim 1, wherein the annular wall portion includes an extension and a positioning section, the top of the extension being connected to the abutment, the positioning section extending axially from the bottom of the extension, wherein the positioning section protrudes radially from the extension.

3. The contact probe assembly as claimed in claim 2, wherein the annular wall portion further includes a limiting segment, the positioning segment being located between the extension segment and the limiting segment, the limiting segment extending axially from the positioning segment, the limiting segment including a first segment surface and a second segment surface, the first segment surface being located between the positioning segment and the second segment surface, wherein at least a portion of the first segment surface is inclined radially toward the second segment surface, assembling to provide a sloped area, and the sloped area of ​​the first segment surface being connected to the second segment surface.

4. The contact probe assembly as claimed in claim 1, wherein the needle shaft base includes a head, a body and a bottom, the head, the body and the bottom being sequentially connected along the axial direction, wherein the body is disposed between the head and the bottom, the body extends through the opening, and the head is disposed in the receiving space.

5. The contact probe assembly as claimed in claim 4, wherein the receiving space has a first diameter, the opening has a second diameter, the head has a third diameter, the body has a fourth diameter, and the bottom has a fifth diameter, wherein the first diameter is larger than the second and third diameters, the second diameter is smaller than the third diameter, the second diameter is larger than the fourth diameter, the third diameter is larger than the fourth diameter, and the fourth diameter is larger than the fifth diameter.

6. The contact probe assembly as claimed in claim 4, wherein the needle shaft base includes a recessed portion spatially opposite the receiving space, the recessed portion communicating with the receiving space through the opening, and the recessed portion extending through the head and the body of the needle shaft base, wherein at least a portion of the elastic member is disposed in the recessed portion.

7. The contact probe assembly as claimed in claim 1, wherein the contact probe assembly includes a second conductive flexible body disposed adjacent to the needle shaft base along the axial direction.

8. The contact probe assembly as claimed in claim 1, wherein the needle shaft base is a conductive silicone needle shaft base.

9. The contact probe assembly as claimed in claim 1, wherein the elastic element is a spring.

10. The contact probe assembly as claimed in claim 1, wherein the first conductive flexible body is composed of a colloid and a conductive particle.

11. A testing apparatus electrically connected to a chip, wherein the testing apparatus comprises: A test base includes a plurality of through holes and a first surface and a second surface opposite to each other, wherein the plurality of through holes are connected along an axial direction between the first surface and the second surface, and the first surface of the test base is configured to support the wafer; a circuit board is disposed on the second surface of the test base; and a plurality of contact probe assemblies are respectively disposed in the plurality of through holes along the axial direction and are configured to electrically connect the wafer and the circuit board, wherein each of the plurality of contact probe assemblies includes: a needle shaft element including a top and an annular wall portion, wherein the annular wall portion extends from the top along the axial direction to form an accommodating space and an opening, the accommodating space communicating outward through the opening; a first conductive flexible body connected to the needle shaft element, disposed on the top, configured to electrically connect the wafer, and the top is disposed between the first conductive flexible body and the annular wall portion; A needle shaft base movably connected to the needle shaft element, wherein at least a portion of the needle shaft base passes through the opening along the axial direction and is disposed in the receiving space, and the needle shaft element and the needle shaft base are allowed to slide relative to each other along the axial direction, wherein the needle shaft element is disposed between the first conductive flexible body and the needle shaft base; and an elastic member disposed between the needle shaft element and the needle shaft base, wherein the elastic member is disposed along the axial direction in the receiving space, and the elastic member abuts against the abutting top and the needle shaft base, wherein the elastic member assembly provides a restoring force to drive the needle shaft element and the first conductive flexible body to abut against the wafer.

12. The testing apparatus as claimed in claim 11, wherein the testing apparatus includes a first positioning plate and a second positioning plate, respectively disposed on the first surface and the second surface of the testing base, and the second positioning plate is located between the testing base and the circuit board, wherein the first positioning plate and the second positioning plate each include a plurality of positioning holes, and each of the plurality of positioning holes corresponds to the plurality of through holes.

13. The testing apparatus as claimed in claim 11, wherein the annular wall portion includes an extension and a positioning section, the top of the extension being connected to the abutment, the positioning section extending axially from the bottom of the extension, wherein the positioning section protrudes radially from the extension.

14. The testing apparatus as claimed in claim 13, wherein the annular wall portion further includes a limiting segment, the positioning segment being located between the extension segment and the limiting segment, the limiting segment extending axially from the positioning segment, the limiting segment including a first segment surface and a second segment surface, the first segment surface being located between the positioning segment and the second segment surface, wherein at least a portion of the first segment surface is inclined radially toward the second segment surface, assembling to provide a sloped area, and the sloped area of ​​the first segment surface being connected to the second segment surface.

15. The testing apparatus as claimed in claim 11, wherein the needle shaft base includes a head, a body and a bottom, the head, the body and the bottom being sequentially connected along the axial direction, wherein the body is disposed between the head and the bottom, the body extends through the opening, and the head is disposed in the receiving space.

16. The testing apparatus as claimed in claim 15, wherein the accommodating space has a first diameter, the opening has a second diameter, the head has a third diameter, the body has a fourth diameter, and the bottom has a fifth diameter, wherein the first diameter is larger than the second and third diameters, the second diameter is smaller than the third diameter, and the second diameter is larger than the fourth diameter, the third diameter is larger than the fourth diameter, and the fourth diameter is larger than the fifth diameter.

17. The testing apparatus as claimed in claim 15, wherein the needle shaft base includes a recessed portion spatially opposite the receiving space, the recessed portion communicating with the receiving space through the opening, and the recessed portion extending through the head and the body of the needle shaft base, wherein at least a portion of the elastic member is disposed in the recessed portion.

18. The test apparatus as claimed in claim 11, wherein the contact probe assembly includes a second conductive flexible body disposed adjacent to the probe shaft base along the axial direction and electrically connected to the circuit board.

19. The test apparatus as claimed in claim 11, wherein the needle shaft base is a conductive silicone needle shaft base.

20. The testing apparatus as described in claim 11, wherein the elastic element is a spring.

21. The testing apparatus as claimed in claim 11, wherein the first conductive flexible body is composed of a colloid and a conductive particle.

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