Transfer device
Patent Information
- Application Number
- TW115205250
- Authority / Receiving Office
- TW · TW
- Patent Type
- Utility models
- Current Assignee / Owner
- Filing Date
- 2026-06-08
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2036-06-07
Smart Images
Figure TWG2TB001909540_001 
Figure TWG2TB001909540_002 
Figure TWG2TB001909540_003
Abstract
Claims
1. A transfer device suitable for gripping a wafer cassette, comprising: a base unit; a gripping unit disposed on the base unit and capable of gripping the wafer cassette, the gripping unit being drivable to move between a retracted position and an extended position along a first direction; and a drive unit disposed on the base unit and capable of driving the gripping unit to move between the retracted position and the extended position, the drive unit comprising a drive mechanism disposed on the base unit, a transmission seat connected to the drive mechanism, and a transmission rod pivotally connected at both ends to the transmission seat and the gripping unit respectively, the transmission seat having a body portion connected to the drive mechanism and drivable by the drive mechanism to rotate about a rotation axis, and a pivot portion offset from the rotation axis and pivotally connected to the transmission rod, wherein when the body portion is driven by the drive mechanism, it causes the pivot portion to move arcuately about the rotation axis, thereby driving the transmission rod, and consequently causing the gripping unit to move.
2. The transfer device as claimed in claim 1, wherein, When the gripping unit is in the retracted position, there is a first length between the rear side of the base unit and the front side of the gripping unit. When the gripping unit is in the extended position, there is a second length between the rear side of the base unit and the front side of the gripping unit. The second length is greater than the first length.
3. The transfer device as claimed in claim 1, wherein, The pivot portion of the transmission seat protrudes away from the rotation axis from the main body portion.
4. The transfer device as claimed in claim 1, wherein, The axis of rotation extends vertically.
5. The transfer device as claimed in claim 1, wherein, The base unit includes a support and a slide rail mechanism disposed on the support, the slide rail mechanism allowing the gripping unit to be slidably disposed.
6. The transfer device as claimed in claim 5, wherein, The slide rail mechanism has two rails that are laterally spaced apart and respectively disposed on opposite sides of the bracket, each rail extending along the first direction.
7. The transfer device as claimed in claim 1, wherein, The gripping unit includes an extension arm disposed on the base unit and extending along the first direction, and a gripping mechanism disposed on the side of the extension arm opposite to the base unit. The gripping mechanism defines a horizontally extending extraction slot with a downward opening, which can be used to engage with the top of the wafer cassette.
8. The transfer device as claimed in claim 7, wherein, The extraction groove extends along a second direction that intersects the first direction horizontally.
9. The transfer device as claimed in claim 8, wherein, The gripping mechanism has two first protrusions that extend downward from the extension arm and are spaced apart along the first direction, and two second protrusions that extend towards each other from the first protrusions. Each of the first protrusions and each of the second protrusions extends along the second direction, and the first protrusions and the second protrusions cooperate to define the extraction groove.