Piping components and chemical vapor deposition equipment

TWM687211UActive Publication Date: 2026-09-01NORTH LATITUDE TECHNOLOGY CO LTD
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Patent Information

Application Number
TW115205675
Authority / Receiving Office
TW · TW
Patent Type
Utility models
Current Assignee / Owner
Priority Date
2025-07-10
Filing Date
2026-06-22
Publication Date
2026-09-01
Estimated Expiration
2036-06-21

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    Figure TWG2TB001909590_003
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Abstract

This invention relates to a pipe element and a chemical vapor deposition (CVD) device. The pipe includes a fixed ring on its outer surface, a movable groove on the side of the fixed ring, a movable plate inside the movable groove, a connecting pipe on the surface of the vacuum pump body, a sealing groove on the surface of the connecting pipe, a sealing gasket on the surface of the sealing groove, and a positioning groove on the side of the connecting pipe. First, pulling the movable plate allows one end of the pipe to be inserted into the sealing groove. The compression of the pipe against the sealing gasket in the sealing groove increases the seal between the pipe and the connecting pipe. Then, inserting one end of the movable plate into the positioning groove allows for quick connection between the pipe and the connecting pipe, thus connecting the pipe to the vacuum pump body. When the pipe needs to be removed, simply pulling the movable plate to detach one end from the positioning groove separates the pipe from the connecting pipe.
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Claims

1. A piping element comprising: a pipe having a fixed ring on its outer surface, a movable groove formed on the side of the fixed ring, a movable plate disposed within the movable groove, one end of the pipe being connected to an external chemical vapor deposition (CVD) apparatus, a vacuum pump body disposed on the side of the external CVD apparatus; a connecting pipe having a sealing groove formed on the surface of the vacuum pump body, a sealing gasket disposed on the surface of the sealing groove, and a positioning groove formed on the side of the connecting pipe.

2. The piping element as claimed in claim 1, wherein, A limiting opening is provided on the upper surface of the movable groove, and a limiting block is provided inside the limiting opening. The limiting block is slidably connected to the limiting opening and is fixedly connected to the surface of the movable plate.

3. The piping element as claimed in claim 1, wherein, A positioning spring is provided on the end face of the movable groove. One end of the positioning spring is fixedly connected to the end face of the movable plate, and the other end of the positioning spring is fixedly connected to the end face of the movable groove. One end of the movable plate is inserted into the positioning groove.

4. The piping element as claimed in claim 1, wherein, A fixing groove is provided on the end face of the pipe, and an auxiliary spring is installed in the fixing groove. One end of the auxiliary spring is fixedly connected to the end face of the fixing groove, and a pressing plate is provided on the other end of the auxiliary spring.

5. The piping element as claimed in claim 4, wherein, The pressing plate is a ring-shaped plate structure, and the pressing plate is slidably connected to the fixing groove.

6. The piping element as claimed in claim 1, wherein, The sealing gasket is fixedly connected to the surface of the sealing groove, and the sealing gasket has an annular plate structure.

7. A chemical vapor deposition apparatus comprising the piping element described in any one of claims 1 to 6 above.