Wafer box with metal ion isolation function

Abstract

A wafer cassette with metal ion isolation function is provided, which can be closed by a door and supports at least one substrate in layers. The wafer cassette includes a metal shell, a multi-layer support body, and a metal frame. The metal shell has an opening, and its inner surface is coated with a metal ion isolation layer. The multi-layer support body is concave and recessed within the metal shell, with multiple substrate shelves symmetrically arranged on its inner side, and is made entirely of plastic. The metal frame is mounted at the opening and includes four corner portions and four detachable abutment members. The inner surface of the metal frame and the outer surface of the door are also coated with a metal ion isolation layer. This invention, through its structural design and global coating, effectively blocks metal ion precipitation, prevents substrate contamination, facilitates assembly and maintenance, and is suitable for use in high-cleanliness semiconductor processes.

Claims

1. A wafer cassette with metal ion isolation function, used for a door cover and layered support of at least one substrate, the wafer cassette with metal ion isolation function comprising: A metal casing having an opening, the inner surface of which is provided with at least one coating that isolates metal ions; A multi-layer support body has a concave shape and is recessed into the interior of a metal housing from the opening. The interior of the multi-layer support body has symmetrical multiple substrate shelves on both sides for layering and supporting the substrates. The multi-layer support body is made of plastic. A metal frame is installed in the opening of the metal housing and used to block the door. The metal frame includes four spaced-apart corners and four abutting members. The abutting members are detachably assembled to the corners and abut against the door. Each abutting member has a connecting plate engaged with the corresponding corner and multiple abutting blocks protruding from the connecting plate and abutting against the door. The abutting members are made of plastic. The inner surface of the metal frame is coated with a metal ion-isolating coating, and the outer surface of the door is also coated with the metal ion-isolating coating.

2. The wafer cell with metal ion isolation function as described in claim 1, wherein the metal ion isolation coating is a Teflon (PTFE) coating, a perfluoroalkoxy resin coating, or a fluorinated ethylene propylene coating.

3. The wafer cell with metal ion isolation function as described in claim 1, wherein the metal ion isolation coating is a high-purity silicon oxide nano-ceramic coating, an alumina nano-sealing coating, or a silicon-based composite inorganic corrosion-resistant coating.

4. The wafer cassette with metal ion isolation function as described in claim 1, wherein the inner and outer surfaces of the multilayer support body and the surfaces of the substrate layers are all coated with polytetrafluoroethylene.

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