Shutter ring

TWM687508UActive Publication Date: 2026-09-11FASTENING E-BEAM TECHNOLOGY CO LTD
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Patent Information

Application Number
TW115205310
Authority / Receiving Office
TW · TW
Patent Type
Utility models
Current Assignee / Owner
Filing Date
2026-06-09
Publication Date
2026-09-11
Estimated Expiration
2036-06-08

Smart Images

  • Figure TWG2TB001911259_001
    Figure TWG2TB001911259_001
  • Figure TWG2TB001911259_002
    Figure TWG2TB001911259_002
  • Figure TWG2TB001911259_003
    Figure TWG2TB001911259_003
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Abstract

A shielding ring configured to protect the edge of a wafer includes a ring body and a protrusion. The ring body has an inner circumferential surface. The protrusion is disposed on the inner circumferential surface and extends toward the center of the shielding ring. The protrusion is configured to correspond to a notch at the edge of the wafer.
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Claims

1. A shielding ring configured to shield an edge of a wafer, the shielding ring comprising: a ring body having an inner peripheral surface; and a protrusion disposed on the inner peripheral surface and extending toward a center of the shielding ring, the protrusion being configured to correspond to a notch corresponding to the edge of the wafer.

2. The shielding ring as described in claim 1, wherein, in a top-view direction, the profile of an edge of the protrusion is substantially V-shaped.

3. The protective ring as described in claim 2, wherein, in the top-view direction, the inner peripheral mask has an inner edge connecting the edge of the protrusion, and a contour of the inner edge is part of a circle.

4. The shielding ring as claimed in claim 3, wherein, in the top-view direction, the edge of the protrusion includes a curve that connects the inner edge of the inner circumferential surface.

5. The protective ring as claimed in claim 3, wherein the diameter of the circle is about 297.8 mm to about 298.2 mm.

6. The protective ring as claimed in claim 3, wherein the diameter of the circle is about 197.8 mm to about 198.2 mm.

7. The protective ring as claimed in claim 1, wherein the ring body further has a top surface and a bottom surface opposite each other, the top surface being connected to the inner peripheral surface, and the bottom surface having an annular recess extending to the inner peripheral surface.

8. The protective ring as claimed in claim 7, wherein the inner peripheral surface is a substantially annular tapering surface that tapers in a direction from the top surface to the bottom surface.

9. The protective ring as described in claim 7, wherein the bottom surface has a plurality of locating pins.

10. The protective ring as claimed in claim 1, wherein the ring body has an outer peripheral surface opposite to the inner peripheral surface, the outer peripheral surface having a plurality of lugs extending from the center away from the protective ring, each of the lugs having a positioning hole.