Gas distribution plate

TWM687509UActive Publication Date: 2026-09-11FASTENING E-BEAM TECHNOLOGY CO LTD
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Patent Information

Application Number
TW115205311
Authority / Receiving Office
TW · TW
Patent Type
Utility models
Current Assignee / Owner
Filing Date
2026-06-09
Publication Date
2026-09-11
Estimated Expiration
2036-06-08

Smart Images

  • Figure TWG2TB001911260_001
    Figure TWG2TB001911260_001
  • Figure TWG2TB001911260_002
    Figure TWG2TB001911260_002
  • Figure TWG2TB001911260_003
    Figure TWG2TB001911260_003
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Abstract

A gas distribution disc includes a body and an airtight ring structure. The body has opposing first and second surfaces. The first surface has a groove. The groove has a bifurcation section. The airtight ring structure has a bifurcation portion. The airtight ring structure is disposed in the groove, and the bifurcation portion is disposed in the bifurcation section of the groove.
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Claims

1. A gas distribution disc, comprising: a body having a first surface and a second surface opposite to each other, wherein the first surface has a groove having a closed path; and an airtight ring structure adhered in the groove along the closed path.

2. The gas distribution disc as claimed in claim 1, wherein the airtight ring structure is bonded to the groove with an adhesive.

3. The gas distribution disc as claimed in claim 1, wherein the groove has a bifurcation section, the airtight ring structure has a bifurcation portion disposed in the bifurcation section of the groove.

4. The gas distribution disc as claimed in claim 3, wherein the airtight ring structure is composed of a sealing strip having an end that is engaged with one side edge of the sealing strip to form the bifurcation.

5. A gas distribution disc, comprising: a body having a first surface and a second surface opposite to each other, wherein the first surface has a groove having a bifurcated section; and an airtight ring structure having a bifurcated portion, wherein the airtight ring structure is disposed in the groove, and the bifurcated portion is disposed in the bifurcated section of the groove.

6. The gas distribution disk as described in any one of claims 1 to 5, wherein the groove has a substantially vertical bottom surface and a side wall.

7. The gas distribution disc as described in any one of claims 1 to 5, wherein the body has a first gas through hole and a second gas through hole penetrating the first surface and the second surface, the groove defining a closed first region on the first surface, the first region including a first end and a second end, the first gas through hole and the second gas through hole being located at the first end and the second end, respectively.

8. The gas distribution disc as claimed in claim 7, wherein the body has a third gas through-hole and a fourth gas through-hole penetrating the first surface and the second surface, the groove defining a closed second region on the first surface, the second region including a third end and a fourth end, the third gas through-hole and the fourth gas through-hole being located at the third end and the fourth end, respectively.

9. The gas distribution disc as claimed in claim 8, wherein the first gas through-hole and the third gas through-hole are adjacent to an edge of the body.

10. The gas distribution disc as claimed in claim 8, wherein the second gas through-hole and the fourth gas through-hole are adjacent to a center of the body.