Nonlinear optical multi-channel detection system for large-area samples

Abstract

A nonlinear optical multi-channel inspection system for large-area samples includes multiple laser source modules, multiple optomechanical modules, a sample displacement mechanism, and a system controller. Its key feature is that the objective lens spacing between the multiple optomechanical modules can be dynamically adjusted according to the size of the sample under test via a distance adjustment mechanism, so that each optomechanical module corresponds to a specific area on the sample under test, with each module responsible for only one area. The laser source modules generate excitation beams and distribute them to each optomechanical module. With the cooperation of the sample displacement mechanism, each optomechanical module synchronously performs multi-channel parallel scanning on its assigned area and independently acquires nonlinear optical signals. Finally, the system controller performs image stitching and correction to reconstruct a complete structural image. The advantage of this invention is that it significantly reduces the time required for full inspection of large-area samples, including those with through-glass vias (TGV) substrates.

Claims

1. A nonlinear optical multiplexing system for detecting large-area samples, comprising: A plurality of laser source modules are used to generate a plurality of excitation beams with the same wavelength, the wavelength of which is between 1200 nm and 1800 nm; a plurality of optomechanical modules are coupled to a distance adjustment mechanism, which adjusts the objective lens spacing between the plurality of optomechanical modules according to the size of a sample under test, so that the plurality of optomechanical modules are respectively aligned with a plurality of blocks on the sample under test; each optomechanical module receives its respective excitation beam and performs point scanning synchronously on the plurality of blocks, and respectively captures a nonlinear optical signal; a sample displacement mechanism carries and horizontally displaces the sample under test, so that the plurality of optomechanical modules synchronously perform scanning on the plurality of blocks of the sample under test; a system controller is responsible for synchronizing the image acquisition sequence of the plurality of optomechanical modules and integrating the received nonlinear optical signals and data from the plurality of blocks for image stitching and correction to reconstruct a complete structural image of the sample under test.

2. The nonlinear optical multiplexing detection system for large-area samples as described in claim 1 further includes a bidirectional imaging control module coupled to the system controller and each of the optomechanical modules, for scanning and imaging during the reciprocating motion of the sample under test.

3. The nonlinear optical multiplexing system for large-area samples as described in claim 1, wherein, Each of these optical modules is equipped with a low-magnification, wide-field objective lens to magnify the field of view and expand the scanning area.

4. The nonlinear optical multiplexing system for large-area samples as described in claim 1, wherein, The sample to be tested includes a glass through-hole (TGV) substrate.

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