Detection device for the inflation valve of the front-opening wafer transfer box

Abstract

A detection device for the inflation valve of a front-opening wafer transfer box includes: a platform, multiple detection modules, a power mechanism, and an adjustment mechanism. The platform has multiple front holes and multiple rear holes, each of which has an extension section extending along the arrangement direction of the rear holes, thereby allowing inflation valves of at least two sizes of front-opening wafer transfer boxes to be accommodated in the rear holes. The multiple detection modules are located below the platform, with each module positioned corresponding to one of the front holes and one of the rear holes. Each detection module... The measurement module includes a flow detection mechanism and a distance detection mechanism. The flow detection mechanism detects the flow rate of the inflation valve of the front-opening wafer transfer box. The distance detection mechanism, located to one side of the flow detection mechanism, detects the positioning of the inflation valve. A power mechanism connects to multiple detection modules to move their positions. An adjustment mechanism connects to multiple detection modules whose positions correspond to the rear apertures, and adjusts the distance between these modules. This detection device for the inflation valve of the front-opening wafer transfer box is compatible with various sizes of front-opening wafer transfer boxes.

Claims

1. A detection device for an inflation valve of a front-opening wafer transfer box, comprising: a platform having a plurality of front openings and a plurality of rear openings, each of the plurality of rear openings having an extension section extending along the arrangement direction of the plurality of rear openings, thereby allowing inflation valves of at least two specifications of front-opening wafer transfer boxes to be accommodated in the plurality of rear openings; a plurality of detection modules located below the platform, the plurality of detection modules being respectively positioned corresponding to the plurality of front openings and the plurality of rear openings, each detection module including a flow detection mechanism and a distance detection mechanism, the flow detection mechanism being used to detect the flow rate of the inflation valve of the front-opening wafer transfer box, and the distance detection mechanism being disposed on one side of the flow detection mechanism for detecting the positioning of the inflation valve of the front-opening wafer transfer box; A power mechanism is provided to power the plurality of detection modules to move the position of the plurality of detection modules; and an adjustment mechanism is provided to adjust the distance between the plurality of detection modules whose positions correspond to the plurality of rear holes.

2. The detection device for the inflation valve of the previously open wafer transfer box as described in claim 1, wherein the power mechanism includes a translational force member and a vertical force member, the translational force member and the vertical force member being poweredly connected to the plurality of detection modules to provide translational force and vertical force respectively.

3. The detection device for the inflation valve of the previously open wafer transfer box as described in claim 1, wherein the distance detection mechanism is a reflective optical ranging mechanism.

4. The detection device for the inflation valve of the previously open wafer transfer box as described in claim 1, further includes a control mechanism that is signal-connected to the flow detection mechanism, the distance detection mechanism and the power mechanism.

5. The detection device for the gas valve of the previously open wafer transfer box as described in claim 1, further comprising a gas source connected to at least one of the plurality of front holes and the plurality of rear holes.

6. The detection device for the inflation valve of the previously open wafer transfer box as described in claim 1, wherein the adjustment mechanism includes two racks and a gear, the two racks being respectively connected to a plurality of detection modules whose positions correspond to the plurality of rear holes, and the gear meshing with the two racks.

7. The detection device for the inflation valve of the open wafer transfer box as described in claim 1, wherein each of the plurality of front holes has an extension section, the extension section of the plurality of front holes extends along the arrangement direction of the plurality of front holes, the adjustment mechanism is connected to the plurality of detection modules corresponding to the plurality of front holes, and the adjustment mechanism is used to adjust the distance between the plurality of detection modules corresponding to the plurality of front holes.

8. The detection device for the inflation valve of the previously open wafer transfer box as described in claim 1, wherein the flow detection mechanism and the distance detection mechanism of any of the detection modules are integrated, thereby maintaining a fixed distance between the flow detection mechanism and the distance detection mechanism.

Images