Soft-start gas controller and system thereof

Abstract

This invention provides a soft-start gas control device and system, including a sensing module, an acquisition module, a calculation module, a gas control module, and a monitoring module. The sensing module senses the operating status of the device and generates a sensing signal, which the acquisition module uses as a trigger signal. The calculation module generates a control signal based on the trigger signal and soft-start control parameters, causing the gas control module to adjust the gas flow rate according to a preset time sequence. The monitoring module allows the user to monitor the gas pressure and set control parameters. Through automatic triggering based on device status and gradual flow adjustment, the pressure surge caused by the instantaneous gas introduction is effectively reduced, improving the stability of device operation.

Claims

1. A soft-start gas control device, comprising: A sensing module is used to sense the operating status of the device and generate a sensing signal corresponding to the operating status; an acquisition module is signal-connected to the sensing module and used to acquire the sensing signal as a trigger signal; a calculation module is signal-connected to the acquisition module and used to generate a soft-start gas control signal based on the trigger signal and a soft-start gas control parameter, wherein the soft-start gas control parameter includes a gas flow rate parameter and a time series parameter; a gas control module is signal-connected to the calculation module and used to adjust the gas flow rate according to the soft-start gas control signal, so that the gas flow rate varies according to the time series parameter; and a monitoring module is signal-connected to the calculation module and the gas control module, used to allow the user to monitor the gas pressure value and set the soft-start gas control parameter.

2. The soft-start gas control device as claimed in claim 1, wherein the sensing module includes at least one of a digital signal sensor, an analog signal sensor, a voltage sensor, and a current sensor.

3. The soft-start gas control device as described in claim 1, wherein the device includes at least one of a wafer cleaning device, a chemical reaction tank, and a wafer packaging device.

4. The soft-start gas control device as described in claim 1, wherein the operating states include: The equipment is in at least one of the following states: equipment start-up, equipment stop, equipment standby, equipment cleaning, equipment maintenance, equipment operation, or equipment load.

5. The soft-start gas control device as described in claim 1, wherein the acquisition module includes a quick connector, a conductive core wire, and a signal conversion unit.

6. The soft-start gas control device as described in claim 1, wherein the trigger signal includes a solenoid valve open signal, a solenoid valve close signal, a pump start signal, a pump close signal, a gas pressure signal, or a gas flow signal.

7. The soft-start gas control device as described in claim 1, wherein the computing module includes at least one of a programmable logic controller, a microcontroller, an industrial computer, an embedded controller, a programmable automation controller, an edge computing unit, a field-programmable gate array, a system-on-a-chip, and a central processing unit.

8. The slow-start gas control device as described in claim 1, wherein the slow-start gas control parameters define a gas regulation process of 2 to 8 stages, wherein the gas flow rate setpoint of each stage increases sequentially.

9. The soft-start gas control device as described in claim 1, wherein the gas control module includes at least one of a flow controller, an electronic throttle valve, a pressure control valve, and a proportional control valve.

10. The slow-start gas control device as claimed in claim 1, wherein the monitoring module includes at least one of a display unit, an input unit, a communication unit, and a data storage unit.

11. The slow-start gas control device as described in claim 1, wherein the monitoring module further includes a linear correction unit for establishing a correction parameter based on the difference between the gas flow rate regulated by the slow-start gas control signal and the actual gas flow rate value, and adjusting the slow-start gas control parameter based on the correction parameter.

12. The slow-start gas control device as described in claim 1 further includes an alarm module, signal-connected to the monitoring module, for providing an alarm signal based on an abnormal gas pressure value.

13. The soft-start gas control device as described in claim 12, wherein the warning module includes at least one of a programmable logic controller and a light-emitting diode.

14. The slow-start gas control device as described in claim 1, wherein the slow-start gas control device is disposed between a gas supply end and the equipment end.

15. A soft-start gas control system, comprising: One gas supply end; One device end; A main channel is located between the gas supply end and the equipment end; A soft-start gas control device includes: a sensing module for sensing the operating state of the device and generating a sensing signal corresponding to the operating state; an acquisition module signal-connected to the sensing module for acquiring the sensing signal as a trigger signal; a calculation module signal-connected to the acquisition module for generating a soft-start gas control signal based on the trigger signal and a soft-start gas control parameter, wherein the soft-start gas control parameter includes a gas flow rate parameter and a time series parameter; a first gas control module signal-connected to the calculation module for adjusting the gas flow rate according to the soft-start gas control signal, such that the gas flow rate varies according to the time series parameter, wherein the first gas control module is disposed on the main flow channel and is fluidly connected to the gas supply end and the device end respectively; and a monitoring module signal-connected to the calculation module and the first gas control module for allowing the user to monitor the gas pressure value and set the soft-start gas control parameter.

16. The slow-start gas control system as described in claim 15 further includes a bypass channel connected in parallel with at least a portion of the main channel, the bypass channel being disposed between the gas supply end and the device end.

17. The soft-start gas control system as described in claim 16 further includes a second gas control module disposed on the bypass channel, the second gas control module being in fluid communication with the gas supply end and the equipment end respectively.

18. The soft-start gas control system as described in claim 17, further comprising: A first fluid distribution connector is disposed near the gas supply end and connected between the main flow channel and the bypass channel to guide gas from the gas supply end to the main flow channel or the bypass channel; and a second fluid distribution connector is disposed near the device end relative to the first fluid distribution connector and connected between the main flow channel and the bypass channel to guide gas from the main flow channel or the bypass channel to the device end.

19. The soft-start gas control system as described in claim 18, further comprising: A first gas switching valve is disposed on the main flow channel connecting the first fluid distribution connector and the first gas control module; and a second gas switching valve is disposed on the bypass flow channel connecting the first fluid distribution connector and the second gas control module.

20. The slow-start gas control system as described in claim 19, wherein the first gas switching valve or the second gas switching valve includes at least one of a ball valve switch, a solenoid switching valve, and a pneumatic shut-off valve.

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