Photomask container

Abstract

A photomask container is provided, comprising: a top cover having a first surface, with a first surface contact area formed along the periphery of the first surface; and a base having a second surface, with a second surface contact area formed along the periphery of the second surface; wherein, when the top cover and the base are joined, the first surface contact area of ​​the first surface and the second surface contact area of ​​the second surface directly contact and seal with each other to form a sealed area; and the top cover and the base are each made of titanium alloy plates. This novel photomask container, made of titanium alloy plates, achieves environmental friendliness and suitability for use in vacuum environments compared to the prior art's aluminum alloy nickel-plating process.

Claims

1. A photomask container, comprising: a top cover (1) having a first surface (11) having a first surface contact area (110); and a base (2) having a second surface (21) having a second surface contact area (210); wherein, The top cover (1) is joined to the base (2) and a receiving space (S) is formed between the top cover (1) and the base (2) to accommodate a photomask (R). The first surface contact area (110) of the first surface (11) and the second surface contact area (210) of the second surface (21) are in direct contact with each other and are tightly sealed to form a sealing area (C), so that the photomask (R) is sealed in the receiving space (S). The top cover (1) is a first titanium alloy plate and the base (2) is a second titanium alloy plate.

2. The photomask container as claimed in claim 1, wherein the first titanium alloy plate includes the top cover (1), the first surface (11) and the first surface contact area (110), and / or the second titanium alloy plate includes the base (2), the second surface (21) and the second surface contact area (210).

3. The photomask container as claimed in claim 2, wherein there is no covering layer between the first surface contact area (110) and the second surface contact area (210) located in the sealing region (C).

4. The photomask container as described in claim 3, wherein the coating layer refers to any layer of a different material from the first surface contact area (110) and the second surface contact area (210), or any layer of the same material as the first surface contact area (110) and the second surface contact area (210) but not integrally formed with the first surface contact area (110) or the second surface contact area (210).

5. The photomask container as claimed in claim 4, wherein the surface roughness of the first surface contact area (110) is close to or the same as the surface roughness of the second surface contact area (210).

6. The photomask container as claimed in claim 5, wherein the surface roughness of the first surface contact area (110) and the second surface contact area (210) is not greater than 0.02 micrometers.

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