Graphite disk surface temperature monitoring system

Abstract

A graphite disk surface temperature monitoring system is used to detect the temperature differences between the mother disk and the daughter disk during wafer rotation processes. The system comprises a base module, a mother disk module, a daughter disk module, a rotation module, a sensing module, and a display module. Several daughter disk modules are placed in the daughter disk slots above the mother disk module. The crossbar of the sensing module is adjusted so that the dual laser units at the bottom of the sensor illuminate the wafer slots of the daughter disk modules. When the cyclone within the mother disk module drives the daughter disk modules to rotate at high speed, and the motor drives the mother disk module to rotate via a shaft and shaft base, both the daughter disk and mother disk modules rotate simultaneously. Illuminated by the dual laser unit light source, the operating temperatures of the bottom surface of the daughter disk slots, the surface of the daughter disk, and the surface of the mother disk at different locations can be sensed and transmitted to the display module, where a temperature comparison graph is displayed on the screen. This system effectively detects and monitors the temperature differences between the surfaces of the daughter disk modules and the mother disk module due to different materials and surface treatments.

Claims

1. A graphite disk surface temperature monitoring system for detecting the temperature difference between the mother disk and daughter disks during wafer rotation processes; the system comprises a base module, a mother disk module, several daughter disk modules, a rotation module, a sensing module, and a display module; wherein, The base module consists of a base at the bottom and a platform on top. An air inlet is located at the front of the platform, and a track is located at the rear. The mother disk module is flat and contains several daughter disk slots. Each daughter disk slot has a pin hole in the center of its bottom surface and several outward-radiating spiral channels around it. The bottom surface of each spiral channel is a spiral inclined surface sloping from the inside out, with an air outlet at the bottom end. It is then inserted into the shaft of the rotating module and locked to the shaft base via a through hole. The daughter disk module is flat and contains several wafer slots. The daughter disk module is placed within the daughter disk slots of the mother disk module. The rotating module consists of a… The motor is connected to a shaft that drives the shaft base to rotate. Several air pipes are installed inside the shaft base, and the motor is locked to the front end of the crossbar. The tail end of the crossbar is locked to the upper end of the upright. The lower end of the upright has a track seat, which is fitted into the track on the rear side of the base module and locked in place. The sensing module consists of a sensor with dual laser units at its front end, which is locked to the front end of the crossbar. The tail end of the crossbar is locked to the upper end of the upright. The lower end of the upright has a base, which is locked to the rear corner of the base module. The display module consists of a main unit, a screen, and several function keys, and is electrically connected to the sensor.

2. The graphite disk surface temperature monitoring system as described in claim 1 involves placing several sub-disk modules in the sub-disk slots above the mother disk module. The crossbar of the sensing module is adjusted so that the dual laser units at the bottom of the sensor irradiate the wafer slots of the sub-disk modules. When the mother disk module's cyclone is activated, gas is distributed through the air inlet and several ventilation pipes to the interior of the mother disk module and ejected through various air outlets at the bottom of the sub-disk slots. The cyclone drives the sub-disk modules to rotate at high speed, and the motor drives the mother disk module to rotate via the shaft and shaft base. Simultaneously, the sub-disk modules and the mother disk module rotate. Irradiated by the dual laser unit light source, the operating temperatures of the bottom surface of the sub-disk slots, the surface of the sub-disk, and the surface of the mother disk at different locations can be sensed and transmitted to the display module, where a temperature comparison graph is displayed on the screen. This allows for the sensing and monitoring of the differences in operating temperatures between the surfaces of the sub-disk modules and the mother disk module due to different materials and surface treatments.

3. As described in claim 1, the graphite disk surface temperature monitoring system removes the sub-disk module from above the mother disk module, adjusts the crossbar of the sensing module so that the dual laser unit at the bottom of the sensor illuminates the sub-disk slot of the mother disk module; the mother disk module is rotated by a motor via a shaft and shaft base, and the working temperature of the bottom surface of the sub-disk slot and the surface of the mother disk can be sensed by the light source of the dual laser unit, and transmitted to the display module, and displayed on the screen as a temperature comparison graph; thus, the differences in the working temperature of the mother disk module surface due to different materials and different surface treatments can be sensed and monitored.

4. The graphite disk surface temperature monitoring system described in claim 1, 2 or 3 can also be used to adjust the irradiation position and irradiation height of the laser unit by loosening the end of the crossbar of the sensing module.

5. The graphite disk surface temperature monitoring system described in claim 1, 2 or 3 can also be used to adjust the height of the rotating module by loosening the end of the crossbar of the rotating module.

6. The graphite disk surface temperature monitoring system described in claim 1, 2 or 3 can also be used to adjust the lateral position of the rotating module by loosening the track seat of the rotating module.

7. The graphite disk surface temperature monitoring system as described in claim 1, wherein the mother disk module can be made with different sizes of sub-disk slots and the number of sub-disk slots according to the size requirements of the sub-disk.

8. The graphite disk surface temperature monitoring system as described in claim 1, wherein the sub-disk module can be made into sub-disk modules with different sizes of wafer slots and the number of wafer slots according to the size requirements of the wafer.

9. The graphite disk surface temperature monitoring system as described in claim 1, wherein the mother disk module and the daughter disk module can be made into different types of mother disk modules and daughter disk modules for temperature testing and monitoring according to different material and surface processing requirements.

10. The graphite disk surface temperature monitoring system as described in claim 1, wherein the sensor may have one or more laser units at its bottom, and the laser wavelength may be changed as needed.

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