METHOD FOR FORMING NiTi INTERMETALLIC PHASES IN NANOSIZED FILMS ON FLEXIBLE POLYMER SUBSTRATES

Abstract

The method of forming intermetallic phases of NiTi in nano-sized films on flexible polymer substrates includes magnetron deposition of a film from a NiTi alloy target on a flexible polymer substrate of polyimide with subsequent heating of the composition to a temperature of 450±10 °C in a vacuum. In this case, a polymer substrate of polyimide with a thickness of 7.5-12.7 μm is heated to a temperature of 300±10 °C to form crystallization centers of intermetallic phases. A film with a thickness of less than 100 nm is deposited on a heated polymer substrate, and after heating the composition to the specified temperature, it is immediately cooled.