Clean room facility

Abstract

Provided is a clean room facility where temperatures of a plurality of clean rooms can be set to appropriate levels while having a simple configuration. A clean room facility-includes a plurality of clean rooms having a first clean room and a second clean room, a chamber provided as a single common space above ceilings of the plurality of clean rooms, an air conditioner, a plurality of air supply fans, at least one air return fan, and a duct shaft for guiding air from the predetermined second clean room to the chamber. The second clean room is provided downstream of the first clean room in an air flow direction inside the chamber. An air flow path inside the chamber is narrowed upstream of the duct shaft.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a clean room facility.Background Art

[0002] A clean room high in air cleanliness is used in regenerative medicine, manufacturing of pharmaceutical products and so on. Regarding such a clean room, for example, Patent Literature 1 discloses a configuration in which “the space above the ceiling of each of a plurality of clean rooms is included in the chamber as a single common space.”CITATION LISTPatent Literature

[0003] Patent Literature 1: Japanese Patent Publication No. 7181425SUMMARY OF INVENTIONTechnical Problem

[0004] As described above, in the technique described in Patent Literature 1, the chamber above the ceiling serves as a single common space for a plurality of clean rooms. In such a configuration, if the thermal loads during air conditioning differ among a plurality of clean rooms, a clean room with a small thermal load (e.g., a changing room) may become too cold. Even in a configuration in which a chamber is shared by the plurality of clean rooms, it is desirable to maintain each clean room at an appropriate temperature. However, Patent Literature 1 does not disclose such a technique.

[0005] Therefore, an object of the present disclosure is to provide a clean room facility capable of maintaining temperatures of a plurality of clean rooms at appropriate levels while having a simple configuration.Solution to Problem

[0006] In order to solve the above described problem, a clean room facility of the present disclosure includes a plurality of clean rooms having a first clean room and a second clean room, a chamber provided as a common space above ceilings of the plurality of clean rooms, an air conditioner of which outlet is connected to the chamber via a duct, a plurality of supply air fans that supply air from the chamber to each of the plurality of clean rooms, a return air fan that returns air from at least one of the plurality of clean rooms to the chamber, and a duct shaft that guides air from a predetermined second clean room to the chamber. Herein, the second clean room is provided downstream of the first clean room in the air flow direction in the chamber, and an air flow path in the chamber is narrowed upstream of the duct shaft.Advantageous Effects of Invention

[0007] According to the present disclosure, it is possible to provide a clean room facility capable of maintaining temperatures of a plurality of clean rooms at appropriate levels while having a simple configuration.BRIEF DESCRIPTION OF DRAWINGS

[0008] FIG. 1 is an explanatory diagram showing a layout of each room in a clean room facility according to the first embodiment.

[0009] FIG. 2 is an explanatory diagram showing an air flow in a clean room facility according to the first embodiment.

[0010] FIG. 3 is an explanatory diagram showing an air flow in a clean room facility according to a second modification of the first embodiment.

[0011] FIG. 4 is an explanatory diagram showing an air flow in a clean room facility according to a second embodiment.

[0012] FIG. 5 is an explanatory diagram showing an air flow in a clean room facility according to a third embodiment.

[0013] FIG. 6 is an explanatory diagram showing an air flow in a clean room facility according to a fourth embodiment.

[0014] FIG. 7 is an explanatory diagram showing an air flow in a clean room facility according to the fifth embodiment.

[0015] FIG. 8 is an explanatory diagram showing an air flow in a clean room facility according to a reference embodiment.

[0016] FIG. 9 is an explanatory diagram showing an air flow in a clean room facility in combination with the first embodiment and the reference embodiment.DESCRIPTION OF EMBODIMENTSFIRST EMBODIMENTConfiguration of Clean Room Facility

[0017] FIG. 1 is an explanatory diagram showing a layout of each room in a clean room facility 100 according to a first embodiment.

[0018] Note, in FIG. 1, an outside air treatment unit 31 (see FIG. 2), which will be described later, is omitted from the illustration. Further, the shaded areas in FIG. 1 indicate ranges of protrusion parts 51, 52 provided in a chamber C1 (see FIG. 2) above a ceiling of each clean room. An open arrow X in FIG. 1 indicates an air flow direction through the chamber C1 (see FIG. 2).

[0019] The clean room facility 100 is a facility that adjusts a temperature, pressure, cleanliness or the like in a plurality of clean rooms such as a preparation room R1, a passing room R2, and a changing room R3. Such a clean room facility 100 is used, for example, for cell culture treatment and production of sterile preparations (vaccines, injections, eye drops, etc.).

[0020] In the example of FIG. 1, the clean room facility 100 has “a plurality of clean rooms” including a preparation room R1 (first clean room), a passing room R2 (second clean room), and a changing room R3 (second clean room).

[0021] An anteroom R4 is a general room where a cleanliness level is not specifically controlled. In the anteroom R4, predetermined pre-treatment, analysis, etc. are carried out. For example, a control panel, monitoring device, and utility device for the equipment (not shown) used in the preparation room R1 may be provided in the anteroom R4. The changing room R3 is a clean room where workers take off and put on clothes, and is located between the preparation room R1 and the anteroom R4. A door 21 allows people to enter and exit between the anteroom R4 and the changing room R3. Further, people can enter and exit through another door 22 between the changing room R3 and the preparation room R1. Note, the changing room R3 has a room pressure and cleanliness lower than the preparation room R1.

[0022] The passing room R2 is a clean room used for carrying in and out samples, and is provided between the preparation room R1 and the anteroom R4. In the example of FIG. 1, people can enter and exit between the anteroom R4 and the passing room R2 through a door 23. Further, people can enter and exit through another door 24 between the passing room R2 and the preparation room R1.

[0023] Note, in order to prevent sample contamination, a chamber pressure in the passing room R2 may be set higher than chamber pressures in the preparation room R1 and the anteroom R4. This setting makes it possible to prevent dust from entering the preparation room R1 from the anteroom R4 via the passing room R2 when people pass through the opening and closing of the doors 23, 24. Further, it is possible to prevent the sample (aerosol) from flowing out from the preparation room R1 to the anteroom R4 via the passing room R2.

[0024] The preparation room R1 is a clean room where sample preparation and the like are carried out. Such “samples” include, for example, cells and sterile preparations, but are not limited thereto. Since the sample preparation is carried out in the preparation room R1, cleanliness of the preparation room R1 is higher than that of the passing room R2 and the changing room R3. A machine room M1 is a room where an air conditioner 32 is installed. A ceiling of the clean room facility 100 may be used as a ceiling of the machine room M1 (see FIG. 2), or a separate ceiling may be provided with the machine room M1. Either is acceptable. The air conditioner 32 is a device that adjusts a temperature, humidity or the like of the air supplied to the chamber C1 (see FIG. 2). As such an air conditioner 32, for example, an air handling unit or a packaged air conditioner is used.

[0025] A duct shaft DS1 shown in FIG. 1 is an air guide tube through which air from the preparation room R1 flows, and extends in a vertical direction (see also FIG. 2). Another duct shaft DS2 is an air guide tube that guides the air flowing out from the passing room R2 to the chamber C1 (see FIG. 2), and extends in the vertical direction. These duct shafts DS1 and DS2 both communicate with the chamber C1 (see FIG. 2). The layout of the clean room facility 100 shown in FIG. 1 is an example and is not limited thereto.

[0026] FIG. 2 is an explanatory diagram showing an air flow in a clean room facility 100. As shown in FIG. 2, the clean room facility 100 includes an outside air treatment unit 31, an air conditioner 32, a chamber C1, and pressure sensors 41, 42. In addition to the above-mentioned configuration, the clean room facility 100 further includes fan filter units 1 to 4 on the supply air side, fan filter units 11, 12 on the return air side, and protrusion parts 51, 52.

[0027] An outside air treatment unit 31 is a device that takes in outside air and supplies it to the air conditioner 32. As shown in FIG. 2, the outside air treatment unit 31 includes a filter 31a and a fan 31b. The filter 31a collects dust from the outside air taken in through the duct D1. The fan 31b is a blower for sending the air that has passed through the filter 31a to the air conditioner 32 via the duct D2. As shown in FIG. 2, a damper 61 is provided in the duct D1. The damper 61 is set to a predetermined opening degree during a test run of the outside air treatment unit 31, and is maintained at a predetermined opening degree during the subsequent normal operation.

[0028] An air conditioner 32 is a device that adjusts a temperature, humidity or the like of the air heading toward the chamber C1. As shown in FIG. 2, the air conditioner 32 includes an inlet 32a, a filter 32b, a cooling coil 32c, a fan 32d, and an inverter 32e. An inlet 32a is a cylindrical body for joining the air flowing through the ducts D2, D3 and for guiding the joined air to the filter 31a. An upstream end of the duct D3 is connected to a duct shaft DS1, and a downstream end thereof is connected to the inlet 32a.

[0029] The filter 32b collects dust from the air flowing through the inlet 32a toward the cooling coil 32c. The cooling coil 32c is a heat exchanger where heat is exchanged between the air that has passed through the filter 32b and a refrigerant that flows through a heat transfer tube (not shown). The fan 32d is an air blower for sending the air cooled by the cooling coil 32c into the chamber C1 via a duct D4. The inverter 32e drives a motor (not shown) of the fan 32d in a predetermined manner.

[0030] As shown in FIG. 2, an outlet of the air conditioner 32 is connected to the chamber C1 via the duct D4. The air cooled by the air conditioner 32 is guided to the chamber C1 via the duct D4. As shown in FIG. 2, a damper 62 is installed in the duct D4. The damper 62 is set to a predetermined opening degree during a test run of the air conditioner 32, and is maintained at the predetermined opening degree during the subsequent air conditioning operation.

[0031] The chamber C1 shown in FIG. 2 is a space above a ceiling of each clean room. In other words, the chamber C1 is provided as a common space above the ceilings of the plurality of clean rooms such as the preparation room R1, the passing room R2, and the changing room R3. The chamber C1 is formed by respective ceiling plates 71-73 of the preparation room R1, the passing room R2 and the changing room R3, an upper plate C1a and a side plate C1b.

[0032] The upper plate C1a is located higher than the ceiling plates 71-73 of the respective clean rooms and is generally parallel to these ceiling plates 71-73. The side plate C1b extends downward from the edge of the upper plate C1a and is connected to the ceiling plates 71 to 73 and the like. In the example of FIG. 2, a space A1 separate from the chamber C1 is provided above the upper plate C1a, but the space A1 may not necessarily be provided.

[0033] Fan filter units 1, 2 shown in FIG. 2 are devices that supply air from the chamber C1 to the preparation room R1, and are embedded in the ceiling plate 71 of the preparation room R1. The fan filter unit 1 includes an air supply fan la and a filter 1b. The air supply fan 1a is a blower that supplies air from the chamber C1 to the preparation room R1.

[0034] The filter 1b is provided on the outlet of the air supply fan 1a, and serves to collect dust from air flowing from air supply fan 1a toward the preparation room R1. As such a filter 1b, for example, a high efficiency particulate air filter (HEPA) or an ultra low penetration air filter (ULPA) is used. Another fan filter unit 2 used to supply air to the preparation room R1 has a similar configuration.

[0035] A fan filter unit 3 is a device that supplies air from the chamber C1 to the passing room R2, and is embedded in a ceiling plate 72 of the passing room R2. Another fan filter unit 4 is a device that supplies air from the chamber C1 to the changing room R3, and is embedded in the ceiling plate 73 of the changing room R3. These fan filter units 3, 4 have the same configuration as the fan filter units 1, 2 described above, and therefore, the description thereof will be omitted. In this manner, a plurality of air supply fans 1a-4a are provided to supply air from the chamber Cl to each of a plurality of “clean rooms.”

[0036] A fan filter unit 11 is a device for discharging air from the preparation room R1 into the duct shaft DS1, and is installed in the duct shaft DS1. As shown in FIG. 2, the fan filter unit 11 includes a return air fan 11a and a filter 11b. The return air fan 11a is a blower that returns air from the preparation room R1 to the chamber C1 and the air conditioner 32 via the duct shaft DS1. The filter 11b collects dust from air flowing from the preparation room R1 toward the return air fan 11a, and is provided on the suction side of the return air fan 11a.

[0037] Another fan filter unit 12 is a device for returning air from the passing room R2 to the chamber C1, and is installed in the duct shaft DS2. The fan filter unit 12 has the same configuration as the fan filter unit 11 described above, and therefore the description thereof will be omitted. In this manner, return air fans 11a, 12a are provided to return air from a plurality of “clean rooms” to the chamber C1.

[0038] Air from the changing room R3 is exhausted to the anteroom R4 through an opening E3. Further, a micro-differential pressure damper (not shown) that opens and closes responding to a difference in pressure between the changing room R3 and the anteroom R4 may be provided. Air in the anteroom R4 is exhausted to the outside through a gap in a door or the like (not shown). A flow rate of air taken into the clean room facility 100 by the outside air treatment unit 31 and a flow rate of air taken out the clean room facility 100 are set to be substantially equal overall.

[0039] The fan filter units 1-4 on the supply air side and the fan filter units 11, 12 on the return air side are controlled by a control device (not shown). Each of the fan filter units 1-4, 11, 12 may have a built-in control device, or a plurality of fan filter units may be connected to one control device via wiring.

[0040] A rotational speed of the return air fan 11a is controlled so as to maintain a chamber pressure in the preparation room R1 at a predetermined set pressure (target pressure). Similarly, a rotational speed of another return air fan 12a is controlled so as to maintain a room pressure in the passing room R2 at a predetermined set pressure. Rotational speeds of the air supply fans 1a-4a may be constant, or may be adjusted as appropriate.

[0041] A pressure sensor 41 shown in FIG. 2 is a sensor for detecting a chamber pressure of the preparation room R1, and is installed in the preparation room R1. A detected value of the pressure sensor 41 is used to control the fan filter unit 11 on the return air side of the preparation room R1. Another pressure sensor 42 is a sensor for detecting a room pressure of the passing room R2, and is installed in the passing room R2. A detected value of the pressure sensor 42 is used to control the fan filter unit 12 on the return air side of the passing room R2.

[0042] Although not shown in FIG. 2, temperature sensors for detecting room temperatures are installed in each of the preparation room R1, the passing room R2, and the changing room R3. Detected values of these temperature sensors are used to control the air conditioner 32.

[0043] As described above, the duct shaft DS1 is an air guide pipe through which air from the preparation room R1 flows, and extends in the vertical direction. As the fan filter unit 11 is driven, a part of air flowing out from the preparation room R1 into the duct shaft DS1 is guided to the air conditioner 32 via the duct D3. Then, the remaining part of air is returned to the chamber C1. The duct shaft DS2 is an air guide pipe that guides air from the passing room R2 (a predetermined second clean room) to the chamber C1, and extends in the vertical direction.

[0044] Protrusion parts 51, 52 shown in FIG. 2 are members for narrowing an air flow path in the chamber C1 upstream of the duct shaft DS2. Hereinafter, a reason for providing the protrusion parts 51, 52 and configurations thereof or the like will be described in detail.Clean Room Temperature

[0045] The preparation room R1 is often provided with devices such as an incubator (not shown) and a safety cabinet (not shown). Since these devices generate heat while in operation, cooled air is supplied to the chamber C1 from the air conditioner 32 via a duct D4 in order to maintain the preparation room R1 at a predetermined set temperature (e.g., 22° C.).

[0046] As described above, the chamber C1 is provided as a single common space above the ceilings of the preparation room R1, passing room R2, and changing room R3. If the protrusion parts 51, 52 were not provided, the low-temperature air supplied to the chamber C1 via the duct D4 would be blown directly into the passing room R2 and the changing room R3. These passing room R2 and changing room R3 are often not provided with any device that generates heat while in operation. If this happens, the passing room R2 and the changing room R3 will become too cold, and for example, workers will likely feel chilly when changing clothes in the changing room R3.

[0047] Incidentally, the set temperatures of the passing room R2 and the changing room R3 may be higher than the set temperature of the preparation room R1. However, the set temperatures of the passing room R2 and the changing room R3 may also be substantially equal to the set temperature of the preparation room R1. Even if the set temperatures (e. g., 22° C.) of the preparation room R1, the passing room R2, and the changing room R3 are all the same, low-temperature (e. g., 18° C.) air is supplied to the chamber C1 from the air conditioner 32 to cool the preparation room R1 which contains a device that generates heat when in operation. If the protrusion parts 51, 52 were not provided, the low-temperature air flowing through the chamber C1 would be supplied directly to the passing room R2 and the changing room R3. This feature would increase the possibility that the actual temperatures in the passing room R2 and the changing room R3 would fall below the set temperature (e.g., 22° C.).

[0048] Therefore, in the first embodiment, the protrusion parts 51, 52 are provided upstream of the duct shaft DS2 in the chamber C1. This feature increases flow path resistance near the protrusion parts 51, 52, thereby preventing the low-temperature air supplied to the chamber C1 from heading downstream of the protrusion parts 51, 52. Therefore, this feature can prevent the passing room R2 and the changing room R3 from becoming too cold.

[0049] As shown in FIG. 1, in an air flow direction (arrow X1) in the chamber C1, the passing room R2 (second clean room) and the changing room R3 (second clean room) are provided downstream of the preparation room R1 (first clean room). The above-mentioned “first clean room” is a clean room to which a low-temperature air is supplied in order to maintain an appropriate temperature. Such a “first clean room” is often a room with a relatively large heat load from air conditioning, such as the preparation room R1. The “second clean room” is a clean room to which a supply of low temperature air is restricted and to which air that is slightly warmer than the “first clean room” is supplied. Such a “second clean room” is often a room with a relatively small heat load from air conditioning, such as the passing room R2 and the changing room R3.

[0050] Note that a distinction between the “first clean room” and the “second clean room” does not necessarily have to be determined solely based on a magnitude of the heat load of the air conditioning, but can be appropriately determined at the design stage, taking into consideration the overall layout and ease of use of the clean room facility 100. For example, in the example of FIG. 2, the passing room R2 is the “second clean room”, but in another configuration described later (see FIG. 3), the passing room R2 may also be the “first clean room”

[0051] Among the protrusion parts 51, 52 shown in FIG. 2, the protrusion part 51 on one side is fixed to a lower surface of an upper plate C1a of the chamber C1 by screws or the like and protrudes downward from the upper plate C1a. In other words, the protrusion part 51 is provided so as to protrude in the vertical direction from the upper plate C1a of the chamber C1 into a space inside the chamber C1. Another protrusion part 52 is fixed to an upper surface of a ceiling plate 71 of the preparation room RI by screws or the like, and protrudes upward from the ceiling plate 71. In other words, the protrusion part 52 is provided so as to protrude vertically from the ceiling plate 71 of the preparation room R1 (first clean room) into a space inside the chamber C1. These protrusion parts 51, 52 face each other in the vertical direction.

[0052] In the example of FIG. 2, a cross-sectional shape of the protrusion parts 51, 52 is rectangular, but the cross-sectional shape may be a different shape. A material constituting the protrusion parts 51, 52 may be the same as the material of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, and may also be made of metal or resin. The protrusion parts 51, 52 may have a hollow structure or a solid structure.

[0053] As shown in FIG. 1, in a plan view, the protrusion parts 51, 52 extend in an elongated manner along the boundary line L1 between the preparation room R1 (first clean room) and the passing room R2 or the changing room R3 (second clean room), close to the preparation room R1 of this boundary line L1. In other words, the protrusion parts 51, 52 extend in an elongated manner in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1 (see FIG. 2).

[0054] As shown in FIG. 1, both ends in the longitudinal direction of the protrusion parts 51, 52 respectively extend to a side surface of the preparation room R1 (a side surface parallel to the air flow direction in the chamber C1) in a plan view. In other words, the protrusion parts 51, 52 are arranged to span the entire width of the preparation room R1. The protrusion parts 51, 52 may be in contact with side surfaces of the chamber C1, or may be spaced a predetermined distance from the side surfaces.

[0055] The protrusion parts 51, 52 are provided upstream of the duct shaft DS2 in the air flow direction of (arrow X1 in FIG. 1) in the chamber C1. An air flow path in the chamber Cl is narrowed by the protrusion parts 51, 52 upstream of the duct shaft DS2. Here, the air flow path in chamber C1 is “narrowed” means that the cross-sectional area of the flow path when air flows through the chamber C1 is reduced at a predetermined location.

[0056] To explain in more detail, in the air flow direction in chamber C1 (see FIG. 2), the protrusion parts 51, 52 are provided between the duct shaft DS2 and the supply air fan located most downstream among the plurality of supply air fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., supply air fan 2a). As described above, the duct shaft DS2 is an air guide pipe for returning the air flowing out from the passing room R2 (second clean room) to the chamber C1.

[0057] With this configuration, air flowing through the chamber C1 is less likely to be guided downstream of the protrusion parts 51, 52. Therefore, most of the low-temperature air cooled by the air conditioner 32 is supplied to the preparation room R1 by the fan filter units 1, 2 on the supply air side. As a result, the preparation room R1, which is provided with a device that generates heat while in operation, can be cooled appropriately, and the passing room R2 and changing room R3 can be prevented from becoming too cold.

[0058] Further, air guided to the chamber C1 via the duct shaft DS2 is less likely to be guided upstream of the protrusion parts 51, 52 (upstream in the air flow direction in the chamber C1). As a result, most of the air guided from the passing room R2 through the duct shaft DS2 to the chamber C1 is supplied to the passing room R2 and the changing room R3 by the fan filter units 3, 4. In this way, a short-circuit flow occurs downstream of the protrusion parts 51, 52, which prevents the passing room R2 and the changing room R3 from becoming too cold. Even if a short circuit occurs, cleanliness of the passing room R2 and the changing room R3 can be appropriately maintained by ensuring ventilation frequency of these rooms.

[0059] Further, it is preferable that at least one of the “second clean rooms” such as the changing room R3 is provided at the downstream end of the plurality of clean rooms in the air flow direction in the chamber C1. Since the air temperature tends to be higher closer to the downstream end of the chamber C1, excessive cooling in the changing room R3 and the like can be effectively prevented.Effect

[0060] According to the first embodiment, the protrusion parts 51, 52 are provided upstream of the duct shaft DS2 in the air flow direction in the chamber C1. This feature allows the preparation room R1 (first clean room), which has a relatively large heat load from air conditioning, to be cooled appropriately. Further, it is possible to prevent the passing room R2 (second clean room) and the changing room R3 (second clean room), which have a smaller heat load from air conditioning than the preparation room R1, from becoming too cold.

[0061] Moreover, since the spaces upstream and downstream of the protrusion parts 51, 52 in the chamber C1 are in communication with each other, the pressure in the internal space of the chamber C1 can be made uniform. Furthermore, the configuration is simple, with only the protrusion parts 51, 52 provided in the chamber C1, and there is no need to heat the passing room R2 or the changing room R3 with a heat source such as a heater (not shown) , thereby reducing construction costs and electricity costs.FIRST MODIFICATION OF FIRST EMBODIMENT

[0062] In the first embodiment, a configuration has been described in which both protrusion parts 51, 52 (see FIG. 2) are provided in the chamber C1. However, it is also possible to omit one of the protrusion parts 51, 52. In other words, it may be provided with a “protrusion part” that protrudes in a vertical direction from at least one of the ceiling plate 71 of the preparation room R1 (first clean room) and the upper plate C1a of the chamber C1 into the space inside the chamber C1. Even with this configuration, the preparation room R1 can be cooled appropriately while preventing the passing room R2 and the changing room R3 from becoming too cold.SECOND MODIFICATION OF FIRST EMBODIMENT

[0063] In the first embodiment, a case has been described in which exhaust is discharged from the changing room R3 (see FIG. 2) to the anteroom R4 through the opening E3. However, it is not limited thereto. That is, a duct shaft DS3 (see FIG. 3) may be provided separately to return air in the changing room R3 to the chamber C1. Such a configuration will be described with reference to FIG. 3.

[0064] FIG. 3 is an explanatory diagram showing an air flow in a clean room facility 100A according to the second modification of the first embodiment.

[0065] As shown in FIG. 3, a duct shaft DS3 is provided between the passing room R2 and the changing room R3. The duct shaft DS3 is an air guide pipe for returning the air flowing out from the changing room R3 to the chamber C1. The duct shaft DS3 extends in a vertical direction and communicates with the chamber C1. A fan filter unit 13 is a device for returning air from the changing room R3 to the chamber C1 via the duct shaft DS3, and is installed in the duct shaft DS3. A rotational speed of the return air fan 13a of the fan filter unit 13 is adjusted appropriately based on detection of a pressure sensor 43 in the changing room R3.

[0066] According to the example in FIG. 3, protrusion parts 51, 52 are provided upstream of the duct shaft DS3 in an air flow direction in the chamber C1. More specifically, in the air flow direction in the chamber C1, protrusion parts 51, 52 are provided between the fan filter unit 3 that supplies air to the passing room R2 and the duct shaft DS3.

[0067] The protrusion part 51 is disposed on a lower surface of an upper plate C1a of the chamber C1 and protrudes downward from the upper plate C1a. Another protrusion part 52 is disposed on an upper surface of a ceiling plate 72 of the passing room R2 and protrudes upward from the ceiling plate 72. These protrusion parts 51, 52 face each other in the vertical direction. According to the example in FIG. 3, the preparation room R1 and the passing room R2 are the “first clean room,” and the changing room R3 is the “second clean room.” With this configuration, the preparation room R1 and the passing room R2 can be cooled appropriately, and the changing room R3 can be prevented from becoming too cold. Further, clean air in the changing room R3 can be reused.SECOND EMBODIMENT

[0068] The second embodiment differs from the first embodiment in that a plate-shaped upper floor slab E1 (see FIG. 4) is provided to separate a floor and an upper floor of a clean room facility 100B (see FIG. 4). Further, the second embodiment differs from the first embodiment in that, instead of the protrusion parts 51, 52 (see FIG. 2) of the first embodiment, a covering member 53 (see FIG. 4) is provided to cover a beam B1 (see FIG. 4). The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0069] FIG. 4 is an explanatory diagram showing an air flow in the clean room facility 100B according to the second embodiment.

[0070] Note, although the outside air treatment unit 31 (see FIG. 2) is omitted in FIG. 4, it is assumed that the outside air treatment unit 31 is provided in the same manner as in the first embodiment.

[0071] According to the example of FIG. 4, a plate-shaped upper floor slab E1 is provided to separate the clean room facility 100B from the upper floor. For example, thick concrete is used for such an upper floor slab E1. A beam B1 is installed on a lower surface of the upper floor slab E1. The beam B1 penetrates an upper plate C1a of the chamber C1 and protrudes downward (or the upper plate C1a is formed so as to avoid the beam B1). In other words, the beam B1 is provided so as to protrude in the vertical direction into a space inside the chamber C1. The beam B1 is provided upstream of the duct shaft DS2 in the air flow direction (arrow X1 in FIG. 1) in the chamber C1, and extends in an elongated manner in a direction perpendicular to the air flow direction. An extension range of the beam B1 is similar to an extension range of the protrusion part 51 (see FIG. 1) in the first embodiment.

[0072] A covering member 53 shown in FIG. 4 covers the beam B1 inside the space of the chamber C1, and has a generally U-shape in the cross section. Specifically, the covering member 53 includes a pair of side plates 53a, 53b facing each other, and a bottom plate 53c connecting lower ends of these side plates 53a, 53b. In a vicinity of both ends of the covering member 53 in a cross-sectional view, both ends are fixed to the lower surface of the upper plate C1a of the chamber C1 by screws or the like. The covering member 53 covers the beam B1 and extends in an elongated manner in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. Since the beam B1 is covered with the covering member 53 in this manner, it is possible to prevent any incidents from failing to ensure thermal insulation and maintain cleanliness compared to a configuration in which the beam B1 is exposed to the chamber C1.

[0073] In the example of FIG. 4, a predetermined gap is provided between the covering member 53 and the beam B1. However, at least a part of the inner surface of the covering member 53 may be in contact with the beam B1. A material of the covering member 53 may be the same as that of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, and may also be made of metal or resin.

[0074] Positions of both ends of the covering member 53 in the longitudinal direction may be substantially the same as the positions of both ends of the beam B1, or may extend longer than both ends of the beam B1. As shown in FIG. 4, the covering member 53 is provided between the duct shaft DS2 and the supply air fan located most downstream in the air flow direction in the chamber C1 (i.e., supply air fan 2a) among the plurality of supply air fans 1a, 2a that supply air to the preparation room R1 (first clean room).

[0075] Providing the covering member 53 in this manner narrows a flow path of air flowing through the chamber C1 upstream of the duct shaft DS2. Therefore, the preparation room R1 can be cooled appropriately, and the passing room R2 and the changing room R3 can be prevented from becoming too cold. Note, the position of the covering member 53 in the air flow direction does not necessarily have to be strictly between the supply air fan 2a and the duct shaft DS2. Herein, it is acceptable to have a configuration in which a part of the covering member 53 overlaps with a projection plane in the vertical direction (not shown) of the duct shaft DS2.

[0076] In the example of FIG. 4, a case has been described in which a part of the beam B1 exists in the chamber C1, but the same can be said for a case in which at least a part of a cylindrical body such as a duct (not shown) is present in the chamber C1 instead of the beam B1. In this case, the covering member 53 covers a duct (not shown).Effect

[0077] According to the second embodiment, even if a part of the beam B1 is present in the chamber C1, it is possible to provide a clean room such as a preparation room R1 below this beam B1. This feature not only makes it easier to secure an area of the clean room, but also increases flexibility of layout at the design stage.THIRD EMBODIMENT

[0078] In the third embodiment, instead of the protrusion parts 51, 52 (see FIG. 2) described in the first embodiment, a porous plate 54 (see FIG. 5) having a plurality of holes 54a (see FIG. 5) is provided. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0079] FIG. 5 is an explanatory diagram showing an air flow in a clean room facility 100C according to the third embodiment.

[0080] The porous plate 54 shown in FIG. 5 is a rectangular plate for narrowing a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. The porous plate 54 has a plurality of holes 54a formed therein. The porous plate 54 is disposed in the chamber C1 and extends in the vertical direction. An upper end of the porous plate 54 is fixed to a lower surface of the upper plate C1a of the chamber C1. Further, a lower end of the porous plate 54 is fixed to an upper surface of a ceiling plate 71 of the preparation room R1.

[0081] The porous plate 54 is elongated and extends in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. A range of the porous plate 54 in the above-mentioned direction is the same as a range of the protrusion parts 51, 52 (see FIG. 1) in the first embodiment. The porous plate 54 is disposed between the duct shaft DS2 and the air supply fan located most downstream in the air flow direction in the chamber C1 among the plurality of air supply fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., air supply fan 2a). A material of the porous plate 54 may be the same as that of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, or may be made of metal or resin.Effect

[0082] According to the third embodiment, providing the porous plate 54 narrows flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. Therefore, the preparation room R1 can be cooled appropriately with a simple configuration, and the passing room R2 and changing room R3 can be prevented from becoming too cold. Further, spaces upstream and downstream of the porous plate 54 in the chamber C1 communicate with each other via the plurality of holes 54a. Accordingly, a pressure in the internal space of the chamber C1 can be made uniform.FOURTH EMBODIMENT

[0083] In the fourth embodiment, a wind guide plate 55 (see FIG. 6) is provided instead of the protrusion parts 51, 52 (see FIG. 2) described in the first embodiment. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0084] FIG. 6 is an explanatory diagram showing an air flow in a clean room facility 100D according to the fourth embodiment.

[0085] An air guide plate 55 shown in FIG. 6 is a rectangular plate for narrowing a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. The air guide plate 55 is disposed in the chamber C1 with a predetermined inclination. A lower end of the air guide plate 55 is fixed to an upper surface of a ceiling plate 71 of the preparation room R1. More specifically, the lower end of the air guide plate 55 is disposed near a plane F1 including an inner surface of a side wall 81 at the preparation room R1 (first clean room) side in the duct shaft DS2. An upper end of the air guide plate 55 is spaced a predetermined distance from an upper plate Cla of the chamber C1.

[0086] The air guide plate 55 is inclined so that the closer a part of the air guide plate to the upper end thereof is, the longer a distance in a horizontal direction between the air guide plate and the plane F1 becomes. This feature makes it easier for the air rising through the duct shaft DS2 to be guided to the space above the passing room R2 and the changing room R3 in the chamber C1. Therefore, a short circuit via the duct shaft DS2 is likely to occur.

[0087] The air guide plate 55 is elongated and extends in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. A range of the air guide plate 55 in the above-mentioned direction is similar to a range of the protrusion parts 51, 52 (see FIG. 1) in the first embodiment. The air guide plate 55 is disposed between the duct shaft DS2 and the air supply fan located most downstream in the air flow direction in the chamber C1 among the plurality of air supply fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., air supply fan 2a). A constituent material of the air guide plate 55 may be the same as that of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, and may also be made of metal or resin.Effect

[0088] According to the fourth embodiment, providing the air guide plate 55 narrows a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. Thereby, it is possible to prevent low-temperature air from flowing toward downstream of the air guide plate 55. Further, a short-circuit flow via the duct shaft DS2 is likely to occur. Therefore, the preparation room R1 can be cooled appropriately, and the passing room R2 and the changing room R3 can be prevented from becoming too cold.FIFTH EMBODIMENT

[0089] In the fifth embodiment, instead of the protrusion parts 51, 52 (see FIG. 2) described in the first embodiment, a height position of a ceiling plate 71 (see FIG. 7) of the preparation room R1 is made higher than the passing room R2 and the changing room R3. Further, in the fifth embodiment, a height position of a region S2 (see FIG. 7) including a projection plane S1 (see FIG. 7) of the duct shaft DS2 in an upper plate C1a of the chamber C1 is set lower than those of other parts. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0090] FIG. 7 is an explanatory diagram showing an air flow in a clean room facility 100E according to the fifth embodiment.

[0091] As shown in FIG. 7, a height position of a ceiling plate 71 in the preparation room R1 (first clean room) is higher than a height position of a ceiling plate 72 in the passing room R2 (second clean room) and the height position of the ceiling plate 73 in the changing room R3 (second clean room). Further, in an upper plate C1a of the chamber C1, a height position of a region S2 including a projection plane S1 in the vertical direction of the duct shaft DS2 is lower than a height position on an upstream side of this region S2.

[0092] It should be noted that a plate material C11a shown in FIG. 7 is included in the upper plate C1a of the chamber C1. A range of the region S2 in a direction perpendicular to the air flowing through the chamber C1 is the same as a range of the protrusion parts 51, 52 (see FIG. 1) in the first embodiment.

[0093] In the example of FIG. 7, in the air flow direction in the chamber C1 (arrow X1 in FIG. 1), the region S2 including the projection plane S1 extends to a predetermined position above the passing room R2, but this is not limited to this. For example, a range of the region S2 may be set to coincide with the projection plane S1 of the duct shaft DS2. Further, the region S2 may extend to a vicinity of the downstream end of the chamber C1 in the air flow direction.Effect

[0094] According to the fifth embodiment, in a direction of air flow in the chamber C1, a distance in the vertical direction between a downstream end of the ceiling plate 71 of the preparation room R1 and an upstream end of the plate material C11a is relatively short. In other words, an air flow path in the chamber C1 is narrowed upstream of the duct shaft DS2. This feature prevents low-temperature air supplied to the chamber C1 from being directly supplied to the passing room R2 or the changing room R3.REFERENCE EMBODIMENT

[0095] The reference embodiment (see FIG. 8) differs from the first embodiment in that protrusion parts 51, 52 (see FIG. 2) are not specifically provided. Further, the reference embodiment differs from the first embodiment in the arrangement of the fan filter units 3, 4 (see FIG. 8) on the air supply side of the passing room R2 and the changing room R3. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0096] FIG. 8 is an explanatory diagram showing an air flow in a clean room facility 100F according to the reference embodiment.

[0097] As shown in FIG. 8, a fan filter unit3 on the supply air side and a fan filter unit 12 on the return air side are provided on the duct shaft DS2. That is, inside the duct shaft DS2, there is provided an air supply fan 3a that supplies air to the passing room R2 (a specified second clean room), and there is also provided a return air fan 12a that returns air from the passing room R2 to the chamber C1.

[0098] Further, a height position of the supply air fan 3a in the duct shaft DS2 is higher than a height position of the return air fan 12a in the duct shaft DS2. Moreover, as the return air fan 12a is driven, the air flowing out from the passing room R2 rises through the duct shaft DS2, and most of this air is returned to the passing room R2 by the supply air fan 3a. In this manner, in the reference embodiment, a short-circuit flow is generated inside the duct shaft DS2. The same can be said for the fan filter unit 4 on the supply air side and the fan filter unit 13 on the return air side in another duct shaft DS3.Effect

[0099] According to the reference embodiment, the preparation room R1 can be cooled appropriately, and excessive cooling in the passing room R2 and changing room R3 can be prevented. Further, in the chamber C1, since there is no particular need to install the fan filter units 3, 4 on the supply air side above the passing room R2 or the changing room R3, a height position of the upper plate C1a of this part (the part above the passing room R2 or the changing room R3) can be lowered. Therefore, the height position of the clean room facility 100F can be partially lowered to become more compact.COMBINATION OF FIRST EMBODIMENT AND REFERENCE EMBODIMENT

[0100] It is also possible to combine the first embodiment shown in FIGS. 1 and 2 with the reference embodiment shown in FIG. 8 to make a configuration as shown in FIG. 9.

[0101] FIG. 9 is an explanatory diagram showing the air flow in a clean room facility 100G according to a combination of the first embodiment and the reference embodiment.

[0102] As shown in FIG. 9, the clean room facility includes protrusion parts 51, 52. The protrusion parts 51, 52 are members for narrowing a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS3. In the example of FIG. 9, the protrusion part 51 is provided at a predetermined location on an upper plate C1a of the chamber C1. Further, the protrusion part 52 is provided on an upper surface of a ceiling plate 72 (similar to that shown in FIG. 8) of the passing room R2. These protrusion parts 51, 52 face each other in the vertical direction.

[0103] Moreover, the duct shaft DS3 is provided with a fan filter unit 4 on a supply air side and a fan filter unit 13 on a return air side. This feature allows a short-circuit flow to occur inside the duct shaft DS3. Note, instead of arranging the protrusion parts 51, 52 shown in FIG. 9, the protrusion parts 51, 52 may be provided upstream of the duct shaft DS2.Effect

[0104] According to the configuration shown in FIG. 9, a low-temperature air supplied to the chamber C1 is less likely to be guided to the area downstream of the protrusion parts 51, 52. Further, since a short-circuit flow occurs inside the duct shaft DS3, most of the air that flows out from the changing room R3 into the duct shaft DS3 is returned to the changing room R3. This feature allows the preparation room R1 and the passing room R2 to be cooled appropriately while preventing the changing room R3 from becoming too cold.MODIFICATIONS

[0105] The clean room facility 100 and so on according to the present disclosure has been described above in respective embodiments. However, the clean room facility 100 is not limited to these descriptions and various modifications can be made.

[0106] For example, in the first embodiment, the protrusion parts 51, 52 extend vertically in an elongated manner relative to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. However, the present invention is not limited to this. That is, the extending direction of the protrusion parts 51, 52 may be inclined at a predetermined angle with respect to the flow direction as seen in a plan view, or may be bent in a crank shape as seen in a plan view.

[0107] In the configuration of the first embodiment (see FIG. 2), a part of the air in the duct shaft DS2 may be returned to the chamber C1 by the return air fan 12a, and the remaining may be exhausted through a gap in the door. Such a configuration is also included in the matter that the return air fan 12a “performs return air” to the chamber C1. Further, the arrangement and number of return air fans can be changed as appropriate. For example, a return air fan may be arranged to provide return air from at least one of the plurality of clean rooms to chamber C1. Moreover, in the first embodiment (see FIG. 2), a case has been described in which there are two supply air fans 1a, 2a supplying air to the preparation room R1 (first clean room), but the number of supply air fans may be one, or may be three or more. In other words, it is sufficient that one or more supply fans are provided to supply air to the “first clean room.” When there is one supply air fan supplying air to the “first clean room”, the “supply air fan located most downstream” is deemed to be that one supply air fan. The same can be said about the second to fifth embodiments and the reference embodiment.

[0108] Further, in the first modification of the first embodiment (see FIG. 3), the configuration in which the two protrusion parts 51, 52 are provided has been described, but the present invention is not limited to this. For example, in addition to the configuration shown in FIG. 3, a protrusion part may be additionally provided upstream of the duct shaft DS2. With this configuration, a rate at which the low-temperature air flows in is lower in the changing room R3 than in the passing room R2. Therefore, in addition to preventing the passing room R2 from becoming too cold, it is possible to particularly prevent the changing room R3 from becoming too cold.

[0109] Moreover, in the second modification of the first embodiment (see FIG. 3), a configuration has been described in which a protrusion part 52 is provided on the ceiling plate 72 of the passing room R2, and the other protrusion part 51 is provided on the upper plate C1a so as to face this protrusion part 52. However, the configuration is not limited to this. For example, instead of arranging the protrusion parts 51, 52 shown in FIG. 3, the protrusion part 52 may be provided on the ceiling plate 71 of the preparation room R1, and the other protrusion part 51 may be provided on the upper plate Cla so as to face this protrusion part 52. With this configuration, it is possible to prevent the passing room R2 and the changing room R3 from becoming too cold.

[0110] In the second embodiment, a case has been described in which a part of the beam B1 is present in the chamber C1 (see FIG. 4), but the present invention is not limited to this. That is, the covering member 53 may be provided so as to cover inside the space of the chamber C1 the beam B1 or the duct that is provided so as to protrude in the vertical direction into the space inside the chamber C1.

[0111] In the fourth embodiment (see FIG. 6), the lower end of the air guide plate 55 is fixed to the ceiling plate 71 of the preparation room R1. However, the present invention is not limited to this. For example, the air guide plate 55 may be moved upward in parallel with respect to the arrangement shown in FIG. 6 so that an upper end thereof is fixed to the upper plate C1a of the chamber C1 and a lower end thereof is spaced apart from the ceiling plate 71 of the preparation room R1.

[0112] In the fifth embodiment (see FIG. 7), the plate material C11a of the chamber C1 may be omitted, and a height position of the ceiling plate 71 of the preparation room R1 may be made higher than the passing room R2 and the changing room R3. Even with this configuration, appropriately adjusting the height position of the ceiling plate 71 at the design stage can prevent the passing room R2 and the changing room R3 from becoming too cold.

[0113] Further, in the fifth embodiment, the plate member C11a (see FIG. 7) that forms a part of the upper surface of the chamber C1 is provided. However, the present invention is not limited to this. That is, a thickness of the upper plate C1a may be made substantially uniform, with a predetermined step being provided near the boundary of the region S2. With this configuration, the same effects as those of the fifth embodiment can be achieved.

[0114] Moreover, in each embodiment and reference embodiment, a configuration has been described in which air is returned from the preparation room R1 to the chamber C1 via the duct shaft DS1 as the return air side fan filter unit 11 (see FIG. 2) is driven. However, the configuration is not limited to this. For example, the fan filter unit 11 on the return air side may be omitted, and the air flowing out from the preparation room R1 through a predetermined gap (e. g., a gap in the door) into the duct shaft DS1 may be led directly to the air conditioner 32 via the duct D3. In this case, the opening at the upper end of the duct shaft DS1 may be closed.

[0115] Furthermore, the Respective Embodiments Can Be Combined As appropriate. For example, the first embodiment and the second embodiment may be combined to provide a covering member 53 (second embodiment: see FIG. 4) that covers the beam B1, and to provide protrusion parts 51, 52 at predetermined locations (first embodiment: see FIG. 2). Further, various combinations are possible, such as a combination of any of the first to fourth embodiments (see FIGS. 1 to 6) with the fifth embodiment (see FIG. 7). Also, any of the first to fifth embodiments (see FIGS. 1 to 7) may be combined with the reference embodiment (see FIG. 8).

[0116] Moreover, in the first embodiment, the “first clean room” is the preparation room R1, and the “second clean room” is the passing room R2 and the changing room R3. However, the type and number of rooms corresponding to the “first clean room” and the “second clean room” can be changed as appropriate.

[0117] Furthermore, the clean room facility may be configured to additionally include a room (clean room or general room) that does not correspond to the “first clean room” or “second clean room.” Such a configuration is also included in the clean room facility being “provided with a plurality of clean rooms including a first clean room and a second clean room.”

[0118] Further, the clean room facility may also be configured to include a plurality of chambers separated by plates. At least one of the protrusion parts 51, 52 (see FIGS. 2 and 3), the covering member 53 (see FIG. 4), the porous plate 54 (see FIG. 5), and the air guide plate 55 (see FIG. 2) may be provided in one or more of the plurality of chambers. Such a configuration is also included in the matter that “the air flow path in the chamber is narrowed upstream of the duct shaft” in the clean room facility.

[0119] Moreover, in the first embodiment, the clean room facility 100 includes the outside air treatment unit 31 (see FIG. 2). However, the outside air treatment unit 31 may be omitted as appropriate. The same can be said about the second to fifth embodiments and the reference embodiment. Further, in each embodiment, a case has been described in which a clean room such as the preparation room R1 is used as a positive pressure chamber. However, depending on the application, the clean room may be used as a negative pressure chamber.

[0120] Further, in each embodiment, the clean room facility 100 and the like are used for cell culture treatment and manufacturing of pharmaceutical products, but the present invention is not limited to this. For example, the respective embodiments can be applied to various fields such as the manufacturing of semiconductors, precision machinery, and liquid crystal plates, the food industry, the cosmetics industry, and experiments using radioactive materials.

[0121] Further, each embodiment has been described in detail to clearly explain the present disclosure, and is not necessarily limited to having all of the configurations described. Moreover, it is possible to add, delete, or replace a part of the configuration of the embodiment with other configurations. Furthermore, the above-mentioned mechanisms and configurations are those considered necessary for the explanation, and do not necessarily show all mechanisms and configurations of the product.REFERENCE SIGNS LIST1a, 2a, 3a, 4a Supply air fan

[0123] 11a, 12a, 13a Return air fan

[0124] 31 Outside air treatment unit

[0125] 32 Air conditioner

[0126] 41, 42, 43 Pressure sensor

[0127] 51, 52 Protrusion part

[0128] 53 Covering member

[0129] 54 Porous plate

[0130] 54a Hole

[0131] 55 Air guide plate

[0132] 71, 72, 73 Ceiling plate

[0133] 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G Clean room facility

[0134] B1 Beam

[0135] C1 Chamber

[0136] C1a Upper plate

[0137] C1b Side plate

[0138] D4 Duct

[0139] DS2, DS3 Duct shaft

[0140] E1 Upper floor slab

[0141] F1 Plane

[0142] R1 Preparation room (1st clean room)

[0143] R2 Passing room (1st clean room / 2nd clean room)

[0144] R3 Changing room (2nd clean room)

[0145] S1 Projection plane

[0146] S2 Region

Examples

first embodiment

Configuration of Clean Room Facility

[0017]FIG. 1 is an explanatory diagram showing a layout of each room in a clean room facility 100 according to a first embodiment.

[0018]Note, in FIG. 1, an outside air treatment unit 31 (see FIG. 2), which will be described later, is omitted from the illustration. Further, the shaded areas in FIG. 1 indicate ranges of protrusion parts 51, 52 provided in a chamber C1 (see FIG. 2) above a ceiling of each clean room. An open arrow X in FIG. 1 indicates an air flow direction through the chamber C1 (see FIG. 2).

[0019]The clean room facility 100 is a facility that adjusts a temperature, pressure, cleanliness or the like in a plurality of clean rooms such as a preparation room R1, a passing room R2, and a changing room R3. Such a clean room facility 100 is used, for example, for cell culture treatment and production of sterile preparations (vaccines, injections, eye drops, etc.).

[0020]In the example of FIG. 1, the clean room facility 100 has “a plurality...

first modification

FIRST MODIFICATION OF FIRST EMBODIMENT

[0062]In the first embodiment, a configuration has been described in which both protrusion parts 51, 52 (see FIG. 2) are provided in the chamber C1. However, it is also possible to omit one of the protrusion parts 51, 52. In other words, it may be provided with a “protrusion part” that protrudes in a vertical direction from at least one of the ceiling plate 71 of the preparation room R1 (first clean room) and the upper plate C1a of the chamber C1 into the space inside the chamber C1. Even with this configuration, the preparation room R1 can be cooled appropriately while preventing the passing room R2 and the changing room R3 from becoming too cold.

second modification

SECOND MODIFICATION OF FIRST EMBODIMENT

[0063]In the first embodiment, a case has been described in which exhaust is discharged from the changing room R3 (see FIG. 2) to the anteroom R4 through the opening E3. However, it is not limited thereto. That is, a duct shaft DS3 (see FIG. 3) may be provided separately to return air in the changing room R3 to the chamber C1. Such a configuration will be described with reference to FIG. 3.

[0064]FIG. 3 is an explanatory diagram showing an air flow in a clean room facility 100A according to the second modification of the first embodiment.

[0065]As shown in FIG. 3, a duct shaft DS3 is provided between the passing room R2 and the changing room R3. The duct shaft DS3 is an air guide pipe for returning the air flowing out from the changing room R3 to the chamber C1. The duct shaft DS3 extends in a vertical direction and communicates with the chamber C1. A fan filter unit 13 is a device for returning air from the changing room R3 to the chamber C1 via...

TECHNICAL FIELD

[0001] The present disclosure relates to a clean room facility.Background Art

[0002] A clean room high in air cleanliness is used in regenerative medicine, manufacturing of pharmaceutical products and so on. Regarding such a clean room, for example, Patent Literature 1 discloses a configuration in which “the space above the ceiling of each of a plurality of clean rooms is included in the chamber as a single common space.”CITATION LISTPatent Literature

[0003] Patent Literature 1: Japanese Patent Publication No. 7181425SUMMARY OF INVENTIONTechnical Problem

[0004] As described above, in the technique described in Patent Literature 1, the chamber above the ceiling serves as a single common space for a plurality of clean rooms. In such a configuration, if the thermal loads during air conditioning differ among a plurality of clean rooms, a clean room with a small thermal load (e.g., a changing room) may become too cold. Even in a configuration in which a chamber is shared by the plurality of clean rooms, it is desirable to maintain each clean room at an appropriate temperature. However, Patent Literature 1 does not disclose such a technique.

[0005] Therefore, an object of the present disclosure is to provide a clean room facility capable of maintaining temperatures of a plurality of clean rooms at appropriate levels while having a simple configuration.Solution to Problem

[0006] In order to solve the above described problem, a clean room facility of the present disclosure includes a plurality of clean rooms having a first clean room and a second clean room, a chamber provided as a common space above ceilings of the plurality of clean rooms, an air conditioner of which outlet is connected to the chamber via a duct, a plurality of supply air fans that supply air from the chamber to each of the plurality of clean rooms, a return air fan that returns air from at least one of the plurality of clean rooms to the chamber, and a duct shaft that guides air from a predetermined second clean room to the chamber. Herein, the second clean room is provided downstream of the first clean room in the air flow direction in the chamber, and an air flow path in the chamber is narrowed upstream of the duct shaft.Advantageous Effects of Invention

[0007] According to the present disclosure, it is possible to provide a clean room facility capable of maintaining temperatures of a plurality of clean rooms at appropriate levels while having a simple configuration.BRIEF DESCRIPTION OF DRAWINGS

[0008] FIG. 1 is an explanatory diagram showing a layout of each room in a clean room facility according to the first embodiment.

[0009] FIG. 2 is an explanatory diagram showing an air flow in a clean room facility according to the first embodiment.

[0010] FIG. 3 is an explanatory diagram showing an air flow in a clean room facility according to a second modification of the first embodiment.

[0011] FIG. 4 is an explanatory diagram showing an air flow in a clean room facility according to a second embodiment.

[0012] FIG. 5 is an explanatory diagram showing an air flow in a clean room facility according to a third embodiment.

[0013] FIG. 6 is an explanatory diagram showing an air flow in a clean room facility according to a fourth embodiment.

[0014] FIG. 7 is an explanatory diagram showing an air flow in a clean room facility according to the fifth embodiment.

[0015] FIG. 8 is an explanatory diagram showing an air flow in a clean room facility according to a reference embodiment.

[0016] FIG. 9 is an explanatory diagram showing an air flow in a clean room facility in combination with the first embodiment and the reference embodiment.DESCRIPTION OF EMBODIMENTSFIRST EMBODIMENTConfiguration of Clean Room Facility

[0017] FIG. 1 is an explanatory diagram showing a layout of each room in a clean room facility 100 according to a first embodiment.

[0018] Note, in FIG. 1, an outside air treatment unit 31 (see FIG. 2), which will be described later, is omitted from the illustration. Further, the shaded areas in FIG. 1 indicate ranges of protrusion parts 51, 52 provided in a chamber C1 (see FIG. 2) above a ceiling of each clean room. An open arrow X in FIG. 1 indicates an air flow direction through the chamber C1 (see FIG. 2).

[0019] The clean room facility 100 is a facility that adjusts a temperature, pressure, cleanliness or the like in a plurality of clean rooms such as a preparation room R1, a passing room R2, and a changing room R3. Such a clean room facility 100 is used, for example, for cell culture treatment and production of sterile preparations (vaccines, injections, eye drops, etc.).

[0020] In the example of FIG. 1, the clean room facility 100 has “a plurality of clean rooms” including a preparation room R1 (first clean room), a passing room R2 (second clean room), and a changing room R3 (second clean room).

[0021] An anteroom R4 is a general room where a cleanliness level is not specifically controlled. In the anteroom R4, predetermined pre-treatment, analysis, etc. are carried out. For example, a control panel, monitoring device, and utility device for the equipment (not shown) used in the preparation room R1 may be provided in the anteroom R4. The changing room R3 is a clean room where workers take off and put on clothes, and is located between the preparation room R1 and the anteroom R4. A door 21 allows people to enter and exit between the anteroom R4 and the changing room R3. Further, people can enter and exit through another door 22 between the changing room R3 and the preparation room R1. Note, the changing room R3 has a room pressure and cleanliness lower than the preparation room R1.

[0022] The passing room R2 is a clean room used for carrying in and out samples, and is provided between the preparation room R1 and the anteroom R4. In the example of FIG. 1, people can enter and exit between the anteroom R4 and the passing room R2 through a door 23. Further, people can enter and exit through another door 24 between the passing room R2 and the preparation room R1.

[0023] Note, in order to prevent sample contamination, a chamber pressure in the passing room R2 may be set higher than chamber pressures in the preparation room R1 and the anteroom R4. This setting makes it possible to prevent dust from entering the preparation room R1 from the anteroom R4 via the passing room R2 when people pass through the opening and closing of the doors 23, 24. Further, it is possible to prevent the sample (aerosol) from flowing out from the preparation room R1 to the anteroom R4 via the passing room R2.

[0024] The preparation room R1 is a clean room where sample preparation and the like are carried out. Such “samples” include, for example, cells and sterile preparations, but are not limited thereto. Since the sample preparation is carried out in the preparation room R1, cleanliness of the preparation room R1 is higher than that of the passing room R2 and the changing room R3. A machine room M1 is a room where an air conditioner 32 is installed. A ceiling of the clean room facility 100 may be used as a ceiling of the machine room M1 (see FIG. 2), or a separate ceiling may be provided with the machine room M1. Either is acceptable. The air conditioner 32 is a device that adjusts a temperature, humidity or the like of the air supplied to the chamber C1 (see FIG. 2). As such an air conditioner 32, for example, an air handling unit or a packaged air conditioner is used.

[0025] A duct shaft DS1 shown in FIG. 1 is an air guide tube through which air from the preparation room R1 flows, and extends in a vertical direction (see also FIG. 2). Another duct shaft DS2 is an air guide tube that guides the air flowing out from the passing room R2 to the chamber C1 (see FIG. 2), and extends in the vertical direction. These duct shafts DS1 and DS2 both communicate with the chamber C1 (see FIG. 2). The layout of the clean room facility 100 shown in FIG. 1 is an example and is not limited thereto.

[0026] FIG. 2 is an explanatory diagram showing an air flow in a clean room facility 100. As shown in FIG. 2, the clean room facility 100 includes an outside air treatment unit 31, an air conditioner 32, a chamber C1, and pressure sensors 41, 42. In addition to the above-mentioned configuration, the clean room facility 100 further includes fan filter units 1 to 4 on the supply air side, fan filter units 11, 12 on the return air side, and protrusion parts 51, 52.

[0027] An outside air treatment unit 31 is a device that takes in outside air and supplies it to the air conditioner 32. As shown in FIG. 2, the outside air treatment unit 31 includes a filter 31a and a fan 31b. The filter 31a collects dust from the outside air taken in through the duct D1. The fan 31b is a blower for sending the air that has passed through the filter 31a to the air conditioner 32 via the duct D2. As shown in FIG. 2, a damper 61 is provided in the duct D1. The damper 61 is set to a predetermined opening degree during a test run of the outside air treatment unit 31, and is maintained at a predetermined opening degree during the subsequent normal operation.

[0028] An air conditioner 32 is a device that adjusts a temperature, humidity or the like of the air heading toward the chamber C1. As shown in FIG. 2, the air conditioner 32 includes an inlet 32a, a filter 32b, a cooling coil 32c, a fan 32d, and an inverter 32e. An inlet 32a is a cylindrical body for joining the air flowing through the ducts D2, D3 and for guiding the joined air to the filter 31a. An upstream end of the duct D3 is connected to a duct shaft DS1, and a downstream end thereof is connected to the inlet 32a.

[0029] The filter 32b collects dust from the air flowing through the inlet 32a toward the cooling coil 32c. The cooling coil 32c is a heat exchanger where heat is exchanged between the air that has passed through the filter 32b and a refrigerant that flows through a heat transfer tube (not shown). The fan 32d is an air blower for sending the air cooled by the cooling coil 32c into the chamber C1 via a duct D4. The inverter 32e drives a motor (not shown) of the fan 32d in a predetermined manner.

[0030] As shown in FIG. 2, an outlet of the air conditioner 32 is connected to the chamber C1 via the duct D4. The air cooled by the air conditioner 32 is guided to the chamber C1 via the duct D4. As shown in FIG. 2, a damper 62 is installed in the duct D4. The damper 62 is set to a predetermined opening degree during a test run of the air conditioner 32, and is maintained at the predetermined opening degree during the subsequent air conditioning operation.

[0031] The chamber C1 shown in FIG. 2 is a space above a ceiling of each clean room. In other words, the chamber C1 is provided as a common space above the ceilings of the plurality of clean rooms such as the preparation room R1, the passing room R2, and the changing room R3. The chamber C1 is formed by respective ceiling plates 71-73 of the preparation room R1, the passing room R2 and the changing room R3, an upper plate C1a and a side plate C1b.

[0032] The upper plate C1a is located higher than the ceiling plates 71-73 of the respective clean rooms and is generally parallel to these ceiling plates 71-73. The side plate C1b extends downward from the edge of the upper plate C1a and is connected to the ceiling plates 71 to 73 and the like. In the example of FIG. 2, a space A1 separate from the chamber C1 is provided above the upper plate C1a, but the space A1 may not necessarily be provided.

[0033] Fan filter units 1, 2 shown in FIG. 2 are devices that supply air from the chamber C1 to the preparation room R1, and are embedded in the ceiling plate 71 of the preparation room R1. The fan filter unit 1 includes an air supply fan la and a filter 1b. The air supply fan 1a is a blower that supplies air from the chamber C1 to the preparation room R1.

[0034] The filter 1b is provided on the outlet of the air supply fan 1a, and serves to collect dust from air flowing from air supply fan 1a toward the preparation room R1. As such a filter 1b, for example, a high efficiency particulate air filter (HEPA) or an ultra low penetration air filter (ULPA) is used. Another fan filter unit 2 used to supply air to the preparation room R1 has a similar configuration.

[0035] A fan filter unit 3 is a device that supplies air from the chamber C1 to the passing room R2, and is embedded in a ceiling plate 72 of the passing room R2. Another fan filter unit 4 is a device that supplies air from the chamber C1 to the changing room R3, and is embedded in the ceiling plate 73 of the changing room R3. These fan filter units 3, 4 have the same configuration as the fan filter units 1, 2 described above, and therefore, the description thereof will be omitted. In this manner, a plurality of air supply fans 1a-4a are provided to supply air from the chamber Cl to each of a plurality of “clean rooms.”

[0036] A fan filter unit 11 is a device for discharging air from the preparation room R1 into the duct shaft DS1, and is installed in the duct shaft DS1. As shown in FIG. 2, the fan filter unit 11 includes a return air fan 11a and a filter 11b. The return air fan 11a is a blower that returns air from the preparation room R1 to the chamber C1 and the air conditioner 32 via the duct shaft DS1. The filter 11b collects dust from air flowing from the preparation room R1 toward the return air fan 11a, and is provided on the suction side of the return air fan 11a.

[0037] Another fan filter unit 12 is a device for returning air from the passing room R2 to the chamber C1, and is installed in the duct shaft DS2. The fan filter unit 12 has the same configuration as the fan filter unit 11 described above, and therefore the description thereof will be omitted. In this manner, return air fans 11a, 12a are provided to return air from a plurality of “clean rooms” to the chamber C1.

[0038] Air from the changing room R3 is exhausted to the anteroom R4 through an opening E3. Further, a micro-differential pressure damper (not shown) that opens and closes responding to a difference in pressure between the changing room R3 and the anteroom R4 may be provided. Air in the anteroom R4 is exhausted to the outside through a gap in a door or the like (not shown). A flow rate of air taken into the clean room facility 100 by the outside air treatment unit 31 and a flow rate of air taken out the clean room facility 100 are set to be substantially equal overall.

[0039] The fan filter units 1-4 on the supply air side and the fan filter units 11, 12 on the return air side are controlled by a control device (not shown). Each of the fan filter units 1-4, 11, 12 may have a built-in control device, or a plurality of fan filter units may be connected to one control device via wiring.

[0040] A rotational speed of the return air fan 11a is controlled so as to maintain a chamber pressure in the preparation room R1 at a predetermined set pressure (target pressure). Similarly, a rotational speed of another return air fan 12a is controlled so as to maintain a room pressure in the passing room R2 at a predetermined set pressure. Rotational speeds of the air supply fans 1a-4a may be constant, or may be adjusted as appropriate.

[0041] A pressure sensor 41 shown in FIG. 2 is a sensor for detecting a chamber pressure of the preparation room R1, and is installed in the preparation room R1. A detected value of the pressure sensor 41 is used to control the fan filter unit 11 on the return air side of the preparation room R1. Another pressure sensor 42 is a sensor for detecting a room pressure of the passing room R2, and is installed in the passing room R2. A detected value of the pressure sensor 42 is used to control the fan filter unit 12 on the return air side of the passing room R2.

[0042] Although not shown in FIG. 2, temperature sensors for detecting room temperatures are installed in each of the preparation room R1, the passing room R2, and the changing room R3. Detected values of these temperature sensors are used to control the air conditioner 32.

[0043] As described above, the duct shaft DS1 is an air guide pipe through which air from the preparation room R1 flows, and extends in the vertical direction. As the fan filter unit 11 is driven, a part of air flowing out from the preparation room R1 into the duct shaft DS1 is guided to the air conditioner 32 via the duct D3. Then, the remaining part of air is returned to the chamber C1. The duct shaft DS2 is an air guide pipe that guides air from the passing room R2 (a predetermined second clean room) to the chamber C1, and extends in the vertical direction.

[0044] Protrusion parts 51, 52 shown in FIG. 2 are members for narrowing an air flow path in the chamber C1 upstream of the duct shaft DS2. Hereinafter, a reason for providing the protrusion parts 51, 52 and configurations thereof or the like will be described in detail.Clean Room Temperature

[0045] The preparation room R1 is often provided with devices such as an incubator (not shown) and a safety cabinet (not shown). Since these devices generate heat while in operation, cooled air is supplied to the chamber C1 from the air conditioner 32 via a duct D4 in order to maintain the preparation room R1 at a predetermined set temperature (e.g., 22° C.).

[0046] As described above, the chamber C1 is provided as a single common space above the ceilings of the preparation room R1, passing room R2, and changing room R3. If the protrusion parts 51, 52 were not provided, the low-temperature air supplied to the chamber C1 via the duct D4 would be blown directly into the passing room R2 and the changing room R3. These passing room R2 and changing room R3 are often not provided with any device that generates heat while in operation. If this happens, the passing room R2 and the changing room R3 will become too cold, and for example, workers will likely feel chilly when changing clothes in the changing room R3.

[0047] Incidentally, the set temperatures of the passing room R2 and the changing room R3 may be higher than the set temperature of the preparation room R1. However, the set temperatures of the passing room R2 and the changing room R3 may also be substantially equal to the set temperature of the preparation room R1. Even if the set temperatures (e. g., 22° C.) of the preparation room R1, the passing room R2, and the changing room R3 are all the same, low-temperature (e. g., 18° C.) air is supplied to the chamber C1 from the air conditioner 32 to cool the preparation room R1 which contains a device that generates heat when in operation. If the protrusion parts 51, 52 were not provided, the low-temperature air flowing through the chamber C1 would be supplied directly to the passing room R2 and the changing room R3. This feature would increase the possibility that the actual temperatures in the passing room R2 and the changing room R3 would fall below the set temperature (e.g., 22° C.).

[0048] Therefore, in the first embodiment, the protrusion parts 51, 52 are provided upstream of the duct shaft DS2 in the chamber C1. This feature increases flow path resistance near the protrusion parts 51, 52, thereby preventing the low-temperature air supplied to the chamber C1 from heading downstream of the protrusion parts 51, 52. Therefore, this feature can prevent the passing room R2 and the changing room R3 from becoming too cold.

[0049] As shown in FIG. 1, in an air flow direction (arrow X1) in the chamber C1, the passing room R2 (second clean room) and the changing room R3 (second clean room) are provided downstream of the preparation room R1 (first clean room). The above-mentioned “first clean room” is a clean room to which a low-temperature air is supplied in order to maintain an appropriate temperature. Such a “first clean room” is often a room with a relatively large heat load from air conditioning, such as the preparation room R1. The “second clean room” is a clean room to which a supply of low temperature air is restricted and to which air that is slightly warmer than the “first clean room” is supplied. Such a “second clean room” is often a room with a relatively small heat load from air conditioning, such as the passing room R2 and the changing room R3.

[0050] Note that a distinction between the “first clean room” and the “second clean room” does not necessarily have to be determined solely based on a magnitude of the heat load of the air conditioning, but can be appropriately determined at the design stage, taking into consideration the overall layout and ease of use of the clean room facility 100. For example, in the example of FIG. 2, the passing room R2 is the “second clean room”, but in another configuration described later (see FIG. 3), the passing room R2 may also be the “first clean room”

[0051] Among the protrusion parts 51, 52 shown in FIG. 2, the protrusion part 51 on one side is fixed to a lower surface of an upper plate C1a of the chamber C1 by screws or the like and protrudes downward from the upper plate C1a. In other words, the protrusion part 51 is provided so as to protrude in the vertical direction from the upper plate C1a of the chamber C1 into a space inside the chamber C1. Another protrusion part 52 is fixed to an upper surface of a ceiling plate 71 of the preparation room RI by screws or the like, and protrudes upward from the ceiling plate 71. In other words, the protrusion part 52 is provided so as to protrude vertically from the ceiling plate 71 of the preparation room R1 (first clean room) into a space inside the chamber C1. These protrusion parts 51, 52 face each other in the vertical direction.

[0052] In the example of FIG. 2, a cross-sectional shape of the protrusion parts 51, 52 is rectangular, but the cross-sectional shape may be a different shape. A material constituting the protrusion parts 51, 52 may be the same as the material of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, and may also be made of metal or resin. The protrusion parts 51, 52 may have a hollow structure or a solid structure.

[0053] As shown in FIG. 1, in a plan view, the protrusion parts 51, 52 extend in an elongated manner along the boundary line L1 between the preparation room R1 (first clean room) and the passing room R2 or the changing room R3 (second clean room), close to the preparation room R1 of this boundary line L1. In other words, the protrusion parts 51, 52 extend in an elongated manner in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1 (see FIG. 2).

[0054] As shown in FIG. 1, both ends in the longitudinal direction of the protrusion parts 51, 52 respectively extend to a side surface of the preparation room R1 (a side surface parallel to the air flow direction in the chamber C1) in a plan view. In other words, the protrusion parts 51, 52 are arranged to span the entire width of the preparation room R1. The protrusion parts 51, 52 may be in contact with side surfaces of the chamber C1, or may be spaced a predetermined distance from the side surfaces.

[0055] The protrusion parts 51, 52 are provided upstream of the duct shaft DS2 in the air flow direction of (arrow X1 in FIG. 1) in the chamber C1. An air flow path in the chamber Cl is narrowed by the protrusion parts 51, 52 upstream of the duct shaft DS2. Here, the air flow path in chamber C1 is “narrowed” means that the cross-sectional area of the flow path when air flows through the chamber C1 is reduced at a predetermined location.

[0056] To explain in more detail, in the air flow direction in chamber C1 (see FIG. 2), the protrusion parts 51, 52 are provided between the duct shaft DS2 and the supply air fan located most downstream among the plurality of supply air fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., supply air fan 2a). As described above, the duct shaft DS2 is an air guide pipe for returning the air flowing out from the passing room R2 (second clean room) to the chamber C1.

[0057] With this configuration, air flowing through the chamber C1 is less likely to be guided downstream of the protrusion parts 51, 52. Therefore, most of the low-temperature air cooled by the air conditioner 32 is supplied to the preparation room R1 by the fan filter units 1, 2 on the supply air side. As a result, the preparation room R1, which is provided with a device that generates heat while in operation, can be cooled appropriately, and the passing room R2 and changing room R3 can be prevented from becoming too cold.

[0058] Further, air guided to the chamber C1 via the duct shaft DS2 is less likely to be guided upstream of the protrusion parts 51, 52 (upstream in the air flow direction in the chamber C1). As a result, most of the air guided from the passing room R2 through the duct shaft DS2 to the chamber C1 is supplied to the passing room R2 and the changing room R3 by the fan filter units 3, 4. In this way, a short-circuit flow occurs downstream of the protrusion parts 51, 52, which prevents the passing room R2 and the changing room R3 from becoming too cold. Even if a short circuit occurs, cleanliness of the passing room R2 and the changing room R3 can be appropriately maintained by ensuring ventilation frequency of these rooms.

[0059] Further, it is preferable that at least one of the “second clean rooms” such as the changing room R3 is provided at the downstream end of the plurality of clean rooms in the air flow direction in the chamber C1. Since the air temperature tends to be higher closer to the downstream end of the chamber C1, excessive cooling in the changing room R3 and the like can be effectively prevented.Effect

[0060] According to the first embodiment, the protrusion parts 51, 52 are provided upstream of the duct shaft DS2 in the air flow direction in the chamber C1. This feature allows the preparation room R1 (first clean room), which has a relatively large heat load from air conditioning, to be cooled appropriately. Further, it is possible to prevent the passing room R2 (second clean room) and the changing room R3 (second clean room), which have a smaller heat load from air conditioning than the preparation room R1, from becoming too cold.

[0061] Moreover, since the spaces upstream and downstream of the protrusion parts 51, 52 in the chamber C1 are in communication with each other, the pressure in the internal space of the chamber C1 can be made uniform. Furthermore, the configuration is simple, with only the protrusion parts 51, 52 provided in the chamber C1, and there is no need to heat the passing room R2 or the changing room R3 with a heat source such as a heater (not shown) , thereby reducing construction costs and electricity costs.FIRST MODIFICATION OF FIRST EMBODIMENT

[0062] In the first embodiment, a configuration has been described in which both protrusion parts 51, 52 (see FIG. 2) are provided in the chamber C1. However, it is also possible to omit one of the protrusion parts 51, 52. In other words, it may be provided with a “protrusion part” that protrudes in a vertical direction from at least one of the ceiling plate 71 of the preparation room R1 (first clean room) and the upper plate C1a of the chamber C1 into the space inside the chamber C1. Even with this configuration, the preparation room R1 can be cooled appropriately while preventing the passing room R2 and the changing room R3 from becoming too cold.SECOND MODIFICATION OF FIRST EMBODIMENT

[0063] In the first embodiment, a case has been described in which exhaust is discharged from the changing room R3 (see FIG. 2) to the anteroom R4 through the opening E3. However, it is not limited thereto. That is, a duct shaft DS3 (see FIG. 3) may be provided separately to return air in the changing room R3 to the chamber C1. Such a configuration will be described with reference to FIG. 3.

[0064] FIG. 3 is an explanatory diagram showing an air flow in a clean room facility 100A according to the second modification of the first embodiment.

[0065] As shown in FIG. 3, a duct shaft DS3 is provided between the passing room R2 and the changing room R3. The duct shaft DS3 is an air guide pipe for returning the air flowing out from the changing room R3 to the chamber C1. The duct shaft DS3 extends in a vertical direction and communicates with the chamber C1. A fan filter unit 13 is a device for returning air from the changing room R3 to the chamber C1 via the duct shaft DS3, and is installed in the duct shaft DS3. A rotational speed of the return air fan 13a of the fan filter unit 13 is adjusted appropriately based on detection of a pressure sensor 43 in the changing room R3.

[0066] According to the example in FIG. 3, protrusion parts 51, 52 are provided upstream of the duct shaft DS3 in an air flow direction in the chamber C1. More specifically, in the air flow direction in the chamber C1, protrusion parts 51, 52 are provided between the fan filter unit 3 that supplies air to the passing room R2 and the duct shaft DS3.

[0067] The protrusion part 51 is disposed on a lower surface of an upper plate C1a of the chamber C1 and protrudes downward from the upper plate C1a. Another protrusion part 52 is disposed on an upper surface of a ceiling plate 72 of the passing room R2 and protrudes upward from the ceiling plate 72. These protrusion parts 51, 52 face each other in the vertical direction. According to the example in FIG. 3, the preparation room R1 and the passing room R2 are the “first clean room,” and the changing room R3 is the “second clean room.” With this configuration, the preparation room R1 and the passing room R2 can be cooled appropriately, and the changing room R3 can be prevented from becoming too cold. Further, clean air in the changing room R3 can be reused.SECOND EMBODIMENT

[0068] The second embodiment differs from the first embodiment in that a plate-shaped upper floor slab E1 (see FIG. 4) is provided to separate a floor and an upper floor of a clean room facility 100B (see FIG. 4). Further, the second embodiment differs from the first embodiment in that, instead of the protrusion parts 51, 52 (see FIG. 2) of the first embodiment, a covering member 53 (see FIG. 4) is provided to cover a beam B1 (see FIG. 4). The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0069] FIG. 4 is an explanatory diagram showing an air flow in the clean room facility 100B according to the second embodiment.

[0070] Note, although the outside air treatment unit 31 (see FIG. 2) is omitted in FIG. 4, it is assumed that the outside air treatment unit 31 is provided in the same manner as in the first embodiment.

[0071] According to the example of FIG. 4, a plate-shaped upper floor slab E1 is provided to separate the clean room facility 100B from the upper floor. For example, thick concrete is used for such an upper floor slab E1. A beam B1 is installed on a lower surface of the upper floor slab E1. The beam B1 penetrates an upper plate C1a of the chamber C1 and protrudes downward (or the upper plate C1a is formed so as to avoid the beam B1). In other words, the beam B1 is provided so as to protrude in the vertical direction into a space inside the chamber C1. The beam B1 is provided upstream of the duct shaft DS2 in the air flow direction (arrow X1 in FIG. 1) in the chamber C1, and extends in an elongated manner in a direction perpendicular to the air flow direction. An extension range of the beam B1 is similar to an extension range of the protrusion part 51 (see FIG. 1) in the first embodiment.

[0072] A covering member 53 shown in FIG. 4 covers the beam B1 inside the space of the chamber C1, and has a generally U-shape in the cross section. Specifically, the covering member 53 includes a pair of side plates 53a, 53b facing each other, and a bottom plate 53c connecting lower ends of these side plates 53a, 53b. In a vicinity of both ends of the covering member 53 in a cross-sectional view, both ends are fixed to the lower surface of the upper plate C1a of the chamber C1 by screws or the like. The covering member 53 covers the beam B1 and extends in an elongated manner in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. Since the beam B1 is covered with the covering member 53 in this manner, it is possible to prevent any incidents from failing to ensure thermal insulation and maintain cleanliness compared to a configuration in which the beam B1 is exposed to the chamber C1.

[0073] In the example of FIG. 4, a predetermined gap is provided between the covering member 53 and the beam B1. However, at least a part of the inner surface of the covering member 53 may be in contact with the beam B1. A material of the covering member 53 may be the same as that of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, and may also be made of metal or resin.

[0074] Positions of both ends of the covering member 53 in the longitudinal direction may be substantially the same as the positions of both ends of the beam B1, or may extend longer than both ends of the beam B1. As shown in FIG. 4, the covering member 53 is provided between the duct shaft DS2 and the supply air fan located most downstream in the air flow direction in the chamber C1 (i.e., supply air fan 2a) among the plurality of supply air fans 1a, 2a that supply air to the preparation room R1 (first clean room).

[0075] Providing the covering member 53 in this manner narrows a flow path of air flowing through the chamber C1 upstream of the duct shaft DS2. Therefore, the preparation room R1 can be cooled appropriately, and the passing room R2 and the changing room R3 can be prevented from becoming too cold. Note, the position of the covering member 53 in the air flow direction does not necessarily have to be strictly between the supply air fan 2a and the duct shaft DS2. Herein, it is acceptable to have a configuration in which a part of the covering member 53 overlaps with a projection plane in the vertical direction (not shown) of the duct shaft DS2.

[0076] In the example of FIG. 4, a case has been described in which a part of the beam B1 exists in the chamber C1, but the same can be said for a case in which at least a part of a cylindrical body such as a duct (not shown) is present in the chamber C1 instead of the beam B1. In this case, the covering member 53 covers a duct (not shown).Effect

[0077] According to the second embodiment, even if a part of the beam B1 is present in the chamber C1, it is possible to provide a clean room such as a preparation room R1 below this beam B1. This feature not only makes it easier to secure an area of the clean room, but also increases flexibility of layout at the design stage.THIRD EMBODIMENT

[0078] In the third embodiment, instead of the protrusion parts 51, 52 (see FIG. 2) described in the first embodiment, a porous plate 54 (see FIG. 5) having a plurality of holes 54a (see FIG. 5) is provided. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0079] FIG. 5 is an explanatory diagram showing an air flow in a clean room facility 100C according to the third embodiment.

[0080] The porous plate 54 shown in FIG. 5 is a rectangular plate for narrowing a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. The porous plate 54 has a plurality of holes 54a formed therein. The porous plate 54 is disposed in the chamber C1 and extends in the vertical direction. An upper end of the porous plate 54 is fixed to a lower surface of the upper plate C1a of the chamber C1. Further, a lower end of the porous plate 54 is fixed to an upper surface of a ceiling plate 71 of the preparation room R1.

[0081] The porous plate 54 is elongated and extends in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. A range of the porous plate 54 in the above-mentioned direction is the same as a range of the protrusion parts 51, 52 (see FIG. 1) in the first embodiment. The porous plate 54 is disposed between the duct shaft DS2 and the air supply fan located most downstream in the air flow direction in the chamber C1 among the plurality of air supply fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., air supply fan 2a). A material of the porous plate 54 may be the same as that of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, or may be made of metal or resin.Effect

[0082] According to the third embodiment, providing the porous plate 54 narrows flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. Therefore, the preparation room R1 can be cooled appropriately with a simple configuration, and the passing room R2 and changing room R3 can be prevented from becoming too cold. Further, spaces upstream and downstream of the porous plate 54 in the chamber C1 communicate with each other via the plurality of holes 54a. Accordingly, a pressure in the internal space of the chamber C1 can be made uniform.FOURTH EMBODIMENT

[0083] In the fourth embodiment, a wind guide plate 55 (see FIG. 6) is provided instead of the protrusion parts 51, 52 (see FIG. 2) described in the first embodiment. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0084] FIG. 6 is an explanatory diagram showing an air flow in a clean room facility 100D according to the fourth embodiment.

[0085] An air guide plate 55 shown in FIG. 6 is a rectangular plate for narrowing a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. The air guide plate 55 is disposed in the chamber C1 with a predetermined inclination. A lower end of the air guide plate 55 is fixed to an upper surface of a ceiling plate 71 of the preparation room R1. More specifically, the lower end of the air guide plate 55 is disposed near a plane F1 including an inner surface of a side wall 81 at the preparation room R1 (first clean room) side in the duct shaft DS2. An upper end of the air guide plate 55 is spaced a predetermined distance from an upper plate Cla of the chamber C1.

[0086] The air guide plate 55 is inclined so that the closer a part of the air guide plate to the upper end thereof is, the longer a distance in a horizontal direction between the air guide plate and the plane F1 becomes. This feature makes it easier for the air rising through the duct shaft DS2 to be guided to the space above the passing room R2 and the changing room R3 in the chamber C1. Therefore, a short circuit via the duct shaft DS2 is likely to occur.

[0087] The air guide plate 55 is elongated and extends in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. A range of the air guide plate 55 in the above-mentioned direction is similar to a range of the protrusion parts 51, 52 (see FIG. 1) in the first embodiment. The air guide plate 55 is disposed between the duct shaft DS2 and the air supply fan located most downstream in the air flow direction in the chamber C1 among the plurality of air supply fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., air supply fan 2a). A constituent material of the air guide plate 55 may be the same as that of the insulating plates forming the preparation room R1, the passing room R2, and the changing room R3, and may also be made of metal or resin.Effect

[0088] According to the fourth embodiment, providing the air guide plate 55 narrows a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS2. Thereby, it is possible to prevent low-temperature air from flowing toward downstream of the air guide plate 55. Further, a short-circuit flow via the duct shaft DS2 is likely to occur. Therefore, the preparation room R1 can be cooled appropriately, and the passing room R2 and the changing room R3 can be prevented from becoming too cold.FIFTH EMBODIMENT

[0089] In the fifth embodiment, instead of the protrusion parts 51, 52 (see FIG. 2) described in the first embodiment, a height position of a ceiling plate 71 (see FIG. 7) of the preparation room R1 is made higher than the passing room R2 and the changing room R3. Further, in the fifth embodiment, a height position of a region S2 (see FIG. 7) including a projection plane S1 (see FIG. 7) of the duct shaft DS2 in an upper plate C1a of the chamber C1 is set lower than those of other parts. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0090] FIG. 7 is an explanatory diagram showing an air flow in a clean room facility 100E according to the fifth embodiment.

[0091] As shown in FIG. 7, a height position of a ceiling plate 71 in the preparation room R1 (first clean room) is higher than a height position of a ceiling plate 72 in the passing room R2 (second clean room) and the height position of the ceiling plate 73 in the changing room R3 (second clean room). Further, in an upper plate C1a of the chamber C1, a height position of a region S2 including a projection plane S1 in the vertical direction of the duct shaft DS2 is lower than a height position on an upstream side of this region S2.

[0092] It should be noted that a plate material C11a shown in FIG. 7 is included in the upper plate C1a of the chamber C1. A range of the region S2 in a direction perpendicular to the air flowing through the chamber C1 is the same as a range of the protrusion parts 51, 52 (see FIG. 1) in the first embodiment.

[0093] In the example of FIG. 7, in the air flow direction in the chamber C1 (arrow X1 in FIG. 1), the region S2 including the projection plane S1 extends to a predetermined position above the passing room R2, but this is not limited to this. For example, a range of the region S2 may be set to coincide with the projection plane S1 of the duct shaft DS2. Further, the region S2 may extend to a vicinity of the downstream end of the chamber C1 in the air flow direction.Effect

[0094] According to the fifth embodiment, in a direction of air flow in the chamber C1, a distance in the vertical direction between a downstream end of the ceiling plate 71 of the preparation room R1 and an upstream end of the plate material C11a is relatively short. In other words, an air flow path in the chamber C1 is narrowed upstream of the duct shaft DS2. This feature prevents low-temperature air supplied to the chamber C1 from being directly supplied to the passing room R2 or the changing room R3.REFERENCE EMBODIMENT

[0095] The reference embodiment (see FIG. 8) differs from the first embodiment in that protrusion parts 51, 52 (see FIG. 2) are not specifically provided. Further, the reference embodiment differs from the first embodiment in the arrangement of the fan filter units 3, 4 (see FIG. 8) on the air supply side of the passing room R2 and the changing room R3. The rest is similar to the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0096] FIG. 8 is an explanatory diagram showing an air flow in a clean room facility 100F according to the reference embodiment.

[0097] As shown in FIG. 8, a fan filter unit3 on the supply air side and a fan filter unit 12 on the return air side are provided on the duct shaft DS2. That is, inside the duct shaft DS2, there is provided an air supply fan 3a that supplies air to the passing room R2 (a specified second clean room), and there is also provided a return air fan 12a that returns air from the passing room R2 to the chamber C1.

[0098] Further, a height position of the supply air fan 3a in the duct shaft DS2 is higher than a height position of the return air fan 12a in the duct shaft DS2. Moreover, as the return air fan 12a is driven, the air flowing out from the passing room R2 rises through the duct shaft DS2, and most of this air is returned to the passing room R2 by the supply air fan 3a. In this manner, in the reference embodiment, a short-circuit flow is generated inside the duct shaft DS2. The same can be said for the fan filter unit 4 on the supply air side and the fan filter unit 13 on the return air side in another duct shaft DS3.Effect

[0099] According to the reference embodiment, the preparation room R1 can be cooled appropriately, and excessive cooling in the passing room R2 and changing room R3 can be prevented. Further, in the chamber C1, since there is no particular need to install the fan filter units 3, 4 on the supply air side above the passing room R2 or the changing room R3, a height position of the upper plate C1a of this part (the part above the passing room R2 or the changing room R3) can be lowered. Therefore, the height position of the clean room facility 100F can be partially lowered to become more compact.COMBINATION OF FIRST EMBODIMENT AND REFERENCE EMBODIMENT

[0100] It is also possible to combine the first embodiment shown in FIGS. 1 and 2 with the reference embodiment shown in FIG. 8 to make a configuration as shown in FIG. 9.

[0101] FIG. 9 is an explanatory diagram showing the air flow in a clean room facility 100G according to a combination of the first embodiment and the reference embodiment.

[0102] As shown in FIG. 9, the clean room facility includes protrusion parts 51, 52. The protrusion parts 51, 52 are members for narrowing a flow path of the air flowing through the chamber C1 upstream of the duct shaft DS3. In the example of FIG. 9, the protrusion part 51 is provided at a predetermined location on an upper plate C1a of the chamber C1. Further, the protrusion part 52 is provided on an upper surface of a ceiling plate 72 (similar to that shown in FIG. 8) of the passing room R2. These protrusion parts 51, 52 face each other in the vertical direction.

[0103] Moreover, the duct shaft DS3 is provided with a fan filter unit 4 on a supply air side and a fan filter unit 13 on a return air side. This feature allows a short-circuit flow to occur inside the duct shaft DS3. Note, instead of arranging the protrusion parts 51, 52 shown in FIG. 9, the protrusion parts 51, 52 may be provided upstream of the duct shaft DS2.Effect

[0104] According to the configuration shown in FIG. 9, a low-temperature air supplied to the chamber C1 is less likely to be guided to the area downstream of the protrusion parts 51, 52. Further, since a short-circuit flow occurs inside the duct shaft DS3, most of the air that flows out from the changing room R3 into the duct shaft DS3 is returned to the changing room R3. This feature allows the preparation room R1 and the passing room R2 to be cooled appropriately while preventing the changing room R3 from becoming too cold.MODIFICATIONS

[0105] The clean room facility 100 and so on according to the present disclosure has been described above in respective embodiments. However, the clean room facility 100 is not limited to these descriptions and various modifications can be made.

[0106] For example, in the first embodiment, the protrusion parts 51, 52 extend vertically in an elongated manner relative to the air flow direction (arrow X1 in FIG. 1) in the chamber C1. However, the present invention is not limited to this. That is, the extending direction of the protrusion parts 51, 52 may be inclined at a predetermined angle with respect to the flow direction as seen in a plan view, or may be bent in a crank shape as seen in a plan view.

[0107] In the configuration of the first embodiment (see FIG. 2), a part of the air in the duct shaft DS2 may be returned to the chamber C1 by the return air fan 12a, and the remaining may be exhausted through a gap in the door. Such a configuration is also included in the matter that the return air fan 12a “performs return air” to the chamber C1. Further, the arrangement and number of return air fans can be changed as appropriate. For example, a return air fan may be arranged to provide return air from at least one of the plurality of clean rooms to chamber C1. Moreover, in the first embodiment (see FIG. 2), a case has been described in which there are two supply air fans 1a, 2a supplying air to the preparation room R1 (first clean room), but the number of supply air fans may be one, or may be three or more. In other words, it is sufficient that one or more supply fans are provided to supply air to the “first clean room.” When there is one supply air fan supplying air to the “first clean room”, the “supply air fan located most downstream” is deemed to be that one supply air fan. The same can be said about the second to fifth embodiments and the reference embodiment.

[0108] Further, in the first modification of the first embodiment (see FIG. 3), the configuration in which the two protrusion parts 51, 52 are provided has been described, but the present invention is not limited to this. For example, in addition to the configuration shown in FIG. 3, a protrusion part may be additionally provided upstream of the duct shaft DS2. With this configuration, a rate at which the low-temperature air flows in is lower in the changing room R3 than in the passing room R2. Therefore, in addition to preventing the passing room R2 from becoming too cold, it is possible to particularly prevent the changing room R3 from becoming too cold.

[0109] Moreover, in the second modification of the first embodiment (see FIG. 3), a configuration has been described in which a protrusion part 52 is provided on the ceiling plate 72 of the passing room R2, and the other protrusion part 51 is provided on the upper plate C1a so as to face this protrusion part 52. However, the configuration is not limited to this. For example, instead of arranging the protrusion parts 51, 52 shown in FIG. 3, the protrusion part 52 may be provided on the ceiling plate 71 of the preparation room R1, and the other protrusion part 51 may be provided on the upper plate Cla so as to face this protrusion part 52. With this configuration, it is possible to prevent the passing room R2 and the changing room R3 from becoming too cold.

[0110] In the second embodiment, a case has been described in which a part of the beam B1 is present in the chamber C1 (see FIG. 4), but the present invention is not limited to this. That is, the covering member 53 may be provided so as to cover inside the space of the chamber C1 the beam B1 or the duct that is provided so as to protrude in the vertical direction into the space inside the chamber C1.

[0111] In the fourth embodiment (see FIG. 6), the lower end of the air guide plate 55 is fixed to the ceiling plate 71 of the preparation room R1. However, the present invention is not limited to this. For example, the air guide plate 55 may be moved upward in parallel with respect to the arrangement shown in FIG. 6 so that an upper end thereof is fixed to the upper plate C1a of the chamber C1 and a lower end thereof is spaced apart from the ceiling plate 71 of the preparation room R1.

[0112] In the fifth embodiment (see FIG. 7), the plate material C11a of the chamber C1 may be omitted, and a height position of the ceiling plate 71 of the preparation room R1 may be made higher than the passing room R2 and the changing room R3. Even with this configuration, appropriately adjusting the height position of the ceiling plate 71 at the design stage can prevent the passing room R2 and the changing room R3 from becoming too cold.

[0113] Further, in the fifth embodiment, the plate member C11a (see FIG. 7) that forms a part of the upper surface of the chamber C1 is provided. However, the present invention is not limited to this. That is, a thickness of the upper plate C1a may be made substantially uniform, with a predetermined step being provided near the boundary of the region S2. With this configuration, the same effects as those of the fifth embodiment can be achieved.

[0114] Moreover, in each embodiment and reference embodiment, a configuration has been described in which air is returned from the preparation room R1 to the chamber C1 via the duct shaft DS1 as the return air side fan filter unit 11 (see FIG. 2) is driven. However, the configuration is not limited to this. For example, the fan filter unit 11 on the return air side may be omitted, and the air flowing out from the preparation room R1 through a predetermined gap (e. g., a gap in the door) into the duct shaft DS1 may be led directly to the air conditioner 32 via the duct D3. In this case, the opening at the upper end of the duct shaft DS1 may be closed.

[0115] Furthermore, the Respective Embodiments Can Be Combined As appropriate. For example, the first embodiment and the second embodiment may be combined to provide a covering member 53 (second embodiment: see FIG. 4) that covers the beam B1, and to provide protrusion parts 51, 52 at predetermined locations (first embodiment: see FIG. 2). Further, various combinations are possible, such as a combination of any of the first to fourth embodiments (see FIGS. 1 to 6) with the fifth embodiment (see FIG. 7). Also, any of the first to fifth embodiments (see FIGS. 1 to 7) may be combined with the reference embodiment (see FIG. 8).

[0116] Moreover, in the first embodiment, the “first clean room” is the preparation room R1, and the “second clean room” is the passing room R2 and the changing room R3. However, the type and number of rooms corresponding to the “first clean room” and the “second clean room” can be changed as appropriate.

[0117] Furthermore, the clean room facility may be configured to additionally include a room (clean room or general room) that does not correspond to the “first clean room” or “second clean room.” Such a configuration is also included in the clean room facility being “provided with a plurality of clean rooms including a first clean room and a second clean room.”

[0118] Further, the clean room facility may also be configured to include a plurality of chambers separated by plates. At least one of the protrusion parts 51, 52 (see FIGS. 2 and 3), the covering member 53 (see FIG. 4), the porous plate 54 (see FIG. 5), and the air guide plate 55 (see FIG. 2) may be provided in one or more of the plurality of chambers. Such a configuration is also included in the matter that “the air flow path in the chamber is narrowed upstream of the duct shaft” in the clean room facility.

[0119] Moreover, in the first embodiment, the clean room facility 100 includes the outside air treatment unit 31 (see FIG. 2). However, the outside air treatment unit 31 may be omitted as appropriate. The same can be said about the second to fifth embodiments and the reference embodiment. Further, in each embodiment, a case has been described in which a clean room such as the preparation room R1 is used as a positive pressure chamber. However, depending on the application, the clean room may be used as a negative pressure chamber.

[0120] Further, in each embodiment, the clean room facility 100 and the like are used for cell culture treatment and manufacturing of pharmaceutical products, but the present invention is not limited to this. For example, the respective embodiments can be applied to various fields such as the manufacturing of semiconductors, precision machinery, and liquid crystal plates, the food industry, the cosmetics industry, and experiments using radioactive materials.

[0121] Further, each embodiment has been described in detail to clearly explain the present disclosure, and is not necessarily limited to having all of the configurations described. Moreover, it is possible to add, delete, or replace a part of the configuration of the embodiment with other configurations. Furthermore, the above-mentioned mechanisms and configurations are those considered necessary for the explanation, and do not necessarily show all mechanisms and configurations of the product.REFERENCE SIGNS LIST1a, 2a, 3a, 4a Supply air fan

[0123] 11a, 12a, 13a Return air fan

[0124] 31 Outside air treatment unit

[0125] 32 Air conditioner

[0126] 41, 42, 43 Pressure sensor

[0127] 51, 52 Protrusion part

[0128] 53 Covering member

[0129] 54 Porous plate

[0130] 54a Hole

[0131] 55 Air guide plate

[0132] 71, 72, 73 Ceiling plate

[0133] 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G Clean room facility

[0134] B1 Beam

[0135] C1 Chamber

[0136] C1a Upper plate

[0137] C1b Side plate

[0138] D4 Duct

[0139] DS2, DS3 Duct shaft

[0140] E1 Upper floor slab

[0141] F1 Plane

[0142] R1 Preparation room (1st clean room)

[0143] R2 Passing room (1st clean room / 2nd clean room)

[0144] R3 Changing room (2nd clean room)

[0145] S1 Projection plane

[0146] S2 Region

Examples

first embodiment

Configuration of Clean Room Facility

[0017]FIG. 1 is an explanatory diagram showing a layout of each room in a clean room facility 100 according to a first embodiment.

[0018]Note, in FIG. 1, an outside air treatment unit 31 (see FIG. 2), which will be described later, is omitted from the illustration. Further, the shaded areas in FIG. 1 indicate ranges of protrusion parts 51, 52 provided in a chamber C1 (see FIG. 2) above a ceiling of each clean room. An open arrow X in FIG. 1 indicates an air flow direction through the chamber C1 (see FIG. 2).

[0019]The clean room facility 100 is a facility that adjusts a temperature, pressure, cleanliness or the like in a plurality of clean rooms such as a preparation room R1, a passing room R2, and a changing room R3. Such a clean room facility 100 is used, for example, for cell culture treatment and production of sterile preparations (vaccines, injections, eye drops, etc.).

[0020]In the example of FIG. 1, the clean room facility 100 has “a plurality...

first modification

FIRST MODIFICATION OF FIRST EMBODIMENT

[0062]In the first embodiment, a configuration has been described in which both protrusion parts 51, 52 (see FIG. 2) are provided in the chamber C1. However, it is also possible to omit one of the protrusion parts 51, 52. In other words, it may be provided with a “protrusion part” that protrudes in a vertical direction from at least one of the ceiling plate 71 of the preparation room R1 (first clean room) and the upper plate C1a of the chamber C1 into the space inside the chamber C1. Even with this configuration, the preparation room R1 can be cooled appropriately while preventing the passing room R2 and the changing room R3 from becoming too cold.

second modification

SECOND MODIFICATION OF FIRST EMBODIMENT

[0063]In the first embodiment, a case has been described in which exhaust is discharged from the changing room R3 (see FIG. 2) to the anteroom R4 through the opening E3. However, it is not limited thereto. That is, a duct shaft DS3 (see FIG. 3) may be provided separately to return air in the changing room R3 to the chamber C1. Such a configuration will be described with reference to FIG. 3.

[0064]FIG. 3 is an explanatory diagram showing an air flow in a clean room facility 100A according to the second modification of the first embodiment.

[0065]As shown in FIG. 3, a duct shaft DS3 is provided between the passing room R2 and the changing room R3. The duct shaft DS3 is an air guide pipe for returning the air flowing out from the changing room R3 to the chamber C1. The duct shaft DS3 extends in a vertical direction and communicates with the chamber C1. A fan filter unit 13 is a device for returning air from the changing room R3 to the chamber C1 via...

Claims

1. A clean room facility comprising:a plurality of clean rooms including a first clean room and a second clean room;a chamber provided above ceilings of the plurality of clean rooms as a single common space;an air conditioner having an outlet connected to the chamber via a duct;a plurality of supply air fans which supply air from the chamber to each of the plurality of clean rooms;a return air fan which returns air from at least one of the plurality of clean rooms to the chamber; anda duct shaft which guides air from the predetermined second clean room to the chamber, whereinthe second clean room is provided downstream of the first clean room in an air flow direction in the chamber, andan air flow path in the chamber is narrowed upstream of the duct shaft.

2. The clean room facility as described in claim 1, further comprising a protrusion part protruding in a vertical direction from at least one of ceiling plates of the first clean room and an upper plate of the chamber into a space inside the chamber,the protrusion part being disposed between the duct shaft and the supply air fan located most downstream in the air flow direction in the chamber among the one or more supply air fans that supply air to the first clean room.

3. The clean room facility as described in claim 1, further comprising a covering member that covers inside the space of the chamber a beam or duct that is arranged to protrude in a vertical direction into the space inside the chamber,the covering member being arranged between the duct shaft and the air supply fan located most downstream in the air flow direction in the chamber among the one or more air supply fans that supply air to the first clean room.

4. The clean room facility as described in claim 1, further comprising a porous plate having a plurality of holes and disposed in the chamber,the porous plate being disposed between the duct shaft and the air supply fan located most downstream in the air flow direction in the chamber among the one or more air supply fans that supply air to the first clean room.

5. The clean room facility as described in claim 1, further comprising an air guide plate arranged in the chamber in a predetermined inclined state,the air guide plate being provided between the duct shaft and the air supply fan located most downstream in the air flow direction in the chamber among the one or more air supply fans that supply air to the first clean room,a lower end of the air guide plate being arranged near a plane including an inner surface of a side wall of the duct shaft on the first clean room side, andthe air guide plate being inclined such that the closer a part of the air guide plate to an upper end thereof is, the longer a horizontal distance between the plane and the air guide plate becomes.

6. The clean room facility as described in claim 1, wherein a height position of the ceiling plate of the first clean room is higher than a height position of the ceiling plate of the second clean room.

7. The clean room facility as described in claim 6, wherein a height position of a region on an upper plate of the chamber that includes a projection plane of the duct shaft in a vertical direction is lower than a height position upstream of the region in the air flow direction in the chamber.

8. The clean room facility as described in claim 1, wherein at least one of the second clean rooms is located at the downstream end of the plurality of clean rooms in the air flow direction in the chamber.

9. The clean room facility as described in claim 1, wherein a supply air fan is provided inside the duct shaft to supply air to the predetermined second clean room, and a return air fan is provided inside the duct shaft to return air from said second clean room to the chamber, anda height position of the supply air fan in the duct shaft is higher than a height position of the return air fan in said duct shaft.

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